TWI265136B - Conveyance system and semiconductor manufacturing system - Google Patents

Conveyance system and semiconductor manufacturing system

Info

Publication number
TWI265136B
TWI265136B TW093120468A TW93120468A TWI265136B TW I265136 B TWI265136 B TW I265136B TW 093120468 A TW093120468 A TW 093120468A TW 93120468 A TW93120468 A TW 93120468A TW I265136 B TWI265136 B TW I265136B
Authority
TW
Taiwan
Prior art keywords
conveyance
performance
vehicles
apparatuses
track
Prior art date
Application number
TW093120468A
Other languages
Chinese (zh)
Other versions
TW200505778A (en
Inventor
Takayuki Wakabayashi
Shinichi Watanabe
Original Assignee
Trecenti Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trecenti Technologies Inc filed Critical Trecenti Technologies Inc
Publication of TW200505778A publication Critical patent/TW200505778A/en
Application granted granted Critical
Publication of TWI265136B publication Critical patent/TWI265136B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput

Landscapes

  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)

Abstract

To provide a conveyance technique for improving a conveyance capability while taking advantage of an existing system when enhancing or expanding the conveyance system. This conveyance system includes a plurality of manufacturing apparatuses 1; a track 2 connecting among the apparatuses 1; and a plurality of conveyance vehicles 3 different in performance and driving along the track 2 to convey objects to be conveyed among the apparatuses 1, and has a configuration in which the plurality of vehicles 3 different in performance coexist and drive on the same track 2. The vehicles 3 are provided in a state where old model vehicles 3a and new model vehicles 3b coexist and drive with respective performance (travelling performance such as a travelling speed and an accelerating/decelerating speed, and transfer performance such as a transfer speed) of vehicle 3a, 3b.
TW093120468A 2003-07-10 2004-07-08 Conveyance system and semiconductor manufacturing system TWI265136B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003194758A JP2005031873A (en) 2003-07-10 2003-07-10 Conveyance system and semiconductor manufacturing system

Publications (2)

Publication Number Publication Date
TW200505778A TW200505778A (en) 2005-02-16
TWI265136B true TWI265136B (en) 2006-11-01

Family

ID=33562525

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093120468A TWI265136B (en) 2003-07-10 2004-07-08 Conveyance system and semiconductor manufacturing system

Country Status (3)

Country Link
US (2) US20050005808A1 (en)
JP (1) JP2005031873A (en)
TW (1) TWI265136B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10705538B2 (en) 2018-01-31 2020-07-07 Metal Industries Research & Development Centre Auto guided vehicle system and operating method thereof

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006281344A (en) * 2005-03-31 2006-10-19 Daihatsu Motor Co Ltd Work equipment
JP4839844B2 (en) 2006-01-12 2011-12-21 日産自動車株式会社 Power converter control method and hybrid power conversion system using the same
US7496423B2 (en) * 2007-05-11 2009-02-24 Applied Materials, Inc. Method of achieving high productivity fault tolerant photovoltaic factory with batch array transfer robots
US20080279658A1 (en) * 2007-05-11 2008-11-13 Bachrach Robert Z Batch equipment robots and methods within equipment work-piece transfer for photovoltaic factory
US20080292433A1 (en) * 2007-05-11 2008-11-27 Bachrach Robert Z Batch equipment robots and methods of array to array work-piece transfer for photovoltaic factory
US20080279672A1 (en) * 2007-05-11 2008-11-13 Bachrach Robert Z Batch equipment robots and methods of stack to array work-piece transfer for photovoltaic factory
US20090022575A1 (en) * 2007-07-19 2009-01-22 Asyst Shinko. Inc. Article storing apparatus
JP2010067028A (en) * 2008-09-11 2010-03-25 Muratec Automation Co Ltd Transfer control device and transfer system
TW201013820A (en) * 2008-09-24 2010-04-01 Inotera Memories Inc Automatic transport system and control method thereof
JP5686501B2 (en) * 2009-03-27 2015-03-18 株式会社ダイフク Goods transport equipment
JP5477651B2 (en) * 2010-08-04 2014-04-23 株式会社ダイフク Goods transport equipment
JP5440870B2 (en) * 2010-08-19 2014-03-12 株式会社ダイフク Goods transport equipment
US20140119858A1 (en) * 2012-10-31 2014-05-01 Sandisk 3D Llc Semiconductor Device Manufacturing Line
DE202014101003U1 (en) 2014-03-06 2015-06-17 Kuka Systems Gmbh manufacturing plant
JP6123740B2 (en) 2014-06-17 2017-05-10 トヨタ自動車株式会社 Semiconductor device manufacturing line and semiconductor device manufacturing method
US10520932B2 (en) 2014-07-03 2019-12-31 Taiwan Semiconductor Manufacturing Co., Ltd Transport system and method
JP6358142B2 (en) * 2015-03-26 2018-07-18 株式会社ダイフク Goods transport equipment
JP6304122B2 (en) * 2015-05-13 2018-04-04 株式会社ダイフク Goods transport equipment
JP6690497B2 (en) * 2016-10-28 2020-04-28 株式会社ダイフク Goods transport facility

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3508130B2 (en) * 2000-09-21 2004-03-22 村田機械株式会社 Transport system
KR100350719B1 (en) * 2000-11-30 2002-08-29 삼성전자 주식회사 apparatus for transferring in a semiconductor fabricating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10705538B2 (en) 2018-01-31 2020-07-07 Metal Industries Research & Development Centre Auto guided vehicle system and operating method thereof

Also Published As

Publication number Publication date
TW200505778A (en) 2005-02-16
JP2005031873A (en) 2005-02-03
US20050005808A1 (en) 2005-01-13
US20060201375A1 (en) 2006-09-14

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees