TWI264970B - Vacuum suction system - Google Patents

Vacuum suction system

Info

Publication number
TWI264970B
TWI264970B TW094121230A TW94121230A TWI264970B TW I264970 B TWI264970 B TW I264970B TW 094121230 A TW094121230 A TW 094121230A TW 94121230 A TW94121230 A TW 94121230A TW I264970 B TWI264970 B TW I264970B
Authority
TW
Taiwan
Prior art keywords
workpiece
vacuum
vacuum suction
storing hole
vacuum pipe
Prior art date
Application number
TW094121230A
Other languages
Chinese (zh)
Other versions
TW200605746A (en
Inventor
Tomoyuki Kojima
Seiji Yoshizawa
Kenji Mizuno
Akihisa Kodaira
Original Assignee
Tokyo Weld Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Weld Co Ltd filed Critical Tokyo Weld Co Ltd
Publication of TW200605746A publication Critical patent/TW200605746A/en
Application granted granted Critical
Publication of TWI264970B publication Critical patent/TWI264970B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Specific Conveyance Elements (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The subject of the invention is to provide a vacuum suction system capable of stably charging a workpiece into a workpiece storing hole of a workpiece carrying table and discharging the workpiece. This system is provided with the workpiece carrying table 2 having the workpiece storing hole 5 and a table base 3 having a vacuum suction groove 7 communicated with the workpiece storing hole 5 of the workpiece carrying table 2. The workpiece storing hole 5 and the vacuum suction groove 7 are communicated with a vacuum generation source 17 via a vacuum pipe 9. A negative pressure sensor 10 is connected to the vacuum pipe 9. Based on a signal from the negative pressure sensor 10, compressed air from a compressed air generation source 20 is delivered to the vacuum pipe 9, or the inside of the vacuum pipe 9 is opened to the atmosphere to regulate a degree of vacuum in the vacuum pipe 9.
TW094121230A 2004-07-21 2005-06-24 Vacuum suction system TWI264970B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004212981A JP4500938B2 (en) 2004-07-21 2004-07-21 Vacuum suction system

Publications (2)

Publication Number Publication Date
TW200605746A TW200605746A (en) 2006-02-01
TWI264970B true TWI264970B (en) 2006-10-21

Family

ID=35894683

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094121230A TWI264970B (en) 2004-07-21 2005-06-24 Vacuum suction system

Country Status (4)

Country Link
JP (1) JP4500938B2 (en)
KR (1) KR100721840B1 (en)
CN (1) CN1725948B (en)
TW (1) TWI264970B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4124242B2 (en) * 2006-05-24 2008-07-23 株式会社村田製作所 Work transfer device and electronic component transfer device
JP4046138B2 (en) 2006-05-24 2008-02-13 株式会社村田製作所 Work transfer device and electronic component transfer device
JP4079179B2 (en) 2006-06-02 2008-04-23 株式会社村田製作所 Work transfer device and electronic component transfer device
CN105692198B (en) * 2016-03-11 2019-01-01 青岛创想智能技术有限公司 It is a kind of for controlling the control system of fixture
EP3252317B1 (en) * 2016-06-01 2020-01-29 Piab Ab Controlling a vacuum system comprising a vacuum generator arrangement
IT201700091334A1 (en) * 2017-08-07 2019-02-07 Samec S P A DEPRESSION WORKING PLAN FOR A PANTOGRAPH
CN107499930B (en) * 2017-09-12 2019-11-05 武汉华星光电半导体显示技术有限公司 Panel adsorbent equipment
KR102119654B1 (en) * 2018-11-14 2020-06-05 현대자동차주식회사 Battery gripper device
CN115072045A (en) * 2022-06-27 2022-09-20 江苏仅一联合智造有限公司 Vacuumizing negative pressure intelligent control terminal

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09293995A (en) * 1996-02-26 1997-11-11 Matsushita Electric Ind Co Ltd Part vacuum-sucking method
JP4160666B2 (en) * 1998-08-17 2008-10-01 Ｊｕｋｉ株式会社 Component adsorption device
JP2001031241A (en) * 1999-05-20 2001-02-06 Daishin:Kk Part transport apparatus and manufacture therefor
JP3660201B2 (en) * 2000-04-21 2005-06-15 株式会社 東京ウエルズ Work discharge system
JP3687503B2 (en) * 2000-07-11 2005-08-24 株式会社村田製作所 Electronic component transport device and inspection device using the transport device
JP2002046858A (en) * 2000-08-01 2002-02-12 Tokyo Weld Co Ltd Work carrier device
JP3690257B2 (en) * 2000-08-28 2005-08-31 株式会社村田製作所 Chip parts transfer device
JP2003224397A (en) * 2002-01-30 2003-08-08 Fuji Mach Mfg Co Ltd Inspection and cleaning method for clogging state of filter of electric component holder, and apparatus therefor
JP3925337B2 (en) * 2002-07-22 2007-06-06 株式会社村田製作所 Chip parts transfer and holding device
JP2004075248A (en) * 2002-08-13 2004-03-11 Tokyo Weld Co Ltd Workpiece transfer and conveyance device and workpiece transfer and conveyance method
JP4346912B2 (en) * 2003-01-20 2009-10-21 株式会社 東京ウエルズ Vacuum suction system and control method thereof

Also Published As

Publication number Publication date
CN1725948A (en) 2006-01-25
TW200605746A (en) 2006-02-01
CN1725948B (en) 2010-09-29
JP4500938B2 (en) 2010-07-14
KR100721840B1 (en) 2007-05-28
KR20060049867A (en) 2006-05-19
JP2006027881A (en) 2006-02-02

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