1258604 九、發明說明： 【發明所屬之技術領域】 、 本發明係關於s形曲線光導波路及採用其之光學裝 、 置。 、， 參 【先前技術】 近年隨個人電腦、網際網路的普及，資訊傳遞需求隨 之急遽增加，造成傳遞速度較快速的光傳播普及化。光導 波路在此種光傳播中便扮演著光連接（optical interconnection)的角色。當此光導波路（芯材）的形狀為s _ 形曲線等曲線形的情況時，在曲率不連續變化部分的地 方’光傳播模式的中心軸將發生偏離芯材幾何學中心轴的 現象，結果便產生光損失。為降低此損失現象，必須在曲^ 線的其中一部份上，設置偏離芯材中心軸的偏軸構造部分二、 (補償）。但是，因為此種偏轴構造乃依存於芯材與包覆材 的折射率、芯材尺寸、光波長，故將因製造上的偏差等因-素而頗難設計最佳的偏軸構造，造成發生光損失問題的情 况所以般敢好未設有偏軸構造。此外，因為具有波吾 依存性，因而便產生在寬頻的波長範圍中無法設計最佳偏 軸量的問題。 再者，相關光導波路的此種偏軸構造，在文獻（譬如參 照非專利文獻1 )中有一般性的記載。 在此已知有在CAD軟體中’製成數種光導波路等的曲 線形狀函數。其-為將曲率半徑W二個弧形成逆向連接 的形狀(以下稱「弧結合形狀」）。弧結合形狀乃因為在連 315744 5 1258604 接點處，曲率將不 連接部分處設因而如上述，便需要在弧 十偏軸構造。（第5D圖） 上，稱「s彎曲：，用下述餘弦函數的形狀(在CAD軟體 設置上述偏軸構造。此形狀便不需要在曲線中途上’ [數式5] y = - (l - cos 7JZ)1258604 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to an sigmoidal optical waveguide and an optical device using the same. [, prior art] In recent years, with the popularity of personal computers and the Internet, the demand for information transmission has increased rapidly, resulting in the popularization of light transmission with rapid transmission speed. The optical waveguide acts as an optical interconnection in this type of light propagation. When the shape of the optical waveguide (core material) is a curved shape such as a s-shaped curve, the central axis of the light propagation mode will deviate from the central axis of the core geometry in the portion where the curvature is discontinuously changed. Light loss is produced. In order to reduce this loss phenomenon, it is necessary to set the off-axis structure part (compensation) which is deviated from the central axis of the core material on a part of the curve. However, since such an off-axis structure depends on the refractive index of the core material and the cladding material, the core material size, and the wavelength of light, it is difficult to design an optimum off-axis structure due to variations in manufacturing, and the like. In the case of the problem of light loss, it is so daunting that there is no off-axis structure. In addition, because of the wave-dependent nature, there is a problem that an optimum amount of off-axis cannot be designed in a wide wavelength range. Further, such an off-axis structure of the related optical waveguide is generally described in the literature (for example, refer to Non-Patent Document 1). Here, a curve shape function in which a plurality of optical waveguides or the like are made in a CAD software is known. This is a shape in which two arcs of curvature radius W are reversely connected (hereinafter referred to as "arc joint shape"). The arc combines the shape because at the joint of 315744 5 1258604, the curvature will not be connected, so as described above, it is necessary to construct the arc in an off-axis configuration. (Fig. 5D) On the top, we call "sbend: the shape of the cosine function described below (the above-mentioned off-axis structure is set in the CAD software. This shape does not need to be in the middle of the curve] [Expression 5] y = - (l - cos 7JZ)
姓 这正弦函數的形狀（在CAD軟體上，稱r S 寫曲(bend)正弦」），因或 + 山 J ；因為不需要在中途設置偏軸構造，且 —端處其曲率半徑將為無限大（曲率為0)，所以告在二 端處接合直線光導波路的情況時，中心軸將_致，田而益須 设置偏軸構造。（第5B圖） [數式6] y- 2：- —sin 2πζ 2π [非專利文獻1 ] 光波工學、國分泰雄、共立出版股份有限公司、第250 頁。 【發明内容】 [發明所欲解決之課題] 315744 6 1258604 ¥光‘波路構成分光為（optical Spl iMer)(如第3圖） f情況時，因為在經分支的2條光導波路連接於分支部的 立而邛側（第4A圖之D)，理想的話，若可將2條光導波路間 隔無限制地變小（無限小）的話，s彎曲正弦形狀等的兩端 便可結合直線形（曲率=〇)的光導波路，而有助益於減少光 的知失。但疋，受製造上的限制，頗難形成良率佳且無限 】、的間㈣’因為在現實情況中，分支部與2條光導波路相 連接的部分處，在2條光導波路間因存在相當大的間隙，The shape of the sine function of the last name (in the CAD software, called s sine (bend) sine), because or + mountain J; because there is no need to set the off-axis structure in the middle, and the radius of curvature at the end will be infinite Large (curvature is 0), so when the linear light guide wave is joined at the two ends, the central axis will be set to _, and the field must be set to an off-axis configuration. (Fig. 5B) [Expression 6] y- 2: - sin 2π ζ 2π [Non-Patent Document 1] Optical Engineering, Kokuyo Taixiong, Kyoritsu Publishing Co., Ltd., p. 250. SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] 315744 6 1258604 ¥ Optical 'wave path constituting (optical Spl iMer) (as shown in Fig. 3) f case, because two branched optical waveguides are connected to the branch The vertical side (Fig. 4A, D), if ideal, if the distance between the two optical waveguides can be reduced indefinitely (infinitely small), the ends of the s-curved sinusoidal shape can be combined with the straight line (curvature) =〇) The light guide wave, which helps to reduce the loss of light. However, due to manufacturing constraints, it is difficult to form a good rate of infinity and infiniteness. (4) Because in the real world, the part where the branch is connected to the two optical waveguides exists between the two optical waveguides. Quite a big gap,
=在與直線形光導波路相結合時便將導致光損失。換句話 况’當在與模n(mode)中心在各個内側並未發生偏轴的直 線形光導波路相結合之情況時，便將導致光損失。為降低 邊專損失情況’最好為S彎曲餘弦、或弧結合形狀的8形 線(端郤曲率> 0)。此外。分光器的另一端部侧(第4A 二：E)乃屬於端部為直線形(曲率，，可無光損失的結合 線光導波路或光纖。另外’當該端部側連接於下一段= When combined with a linear optical waveguide, it will cause light loss. In other words, when light is combined with a linear optical waveguide that does not have an off-axis at the inner side of the mode n (mode), light loss is caused. In order to reduce the loss of the edge, it is preferable to have an S-curved cosine or an arc-shaped 8-shaped line (end curvature > 0). Also. The other end side of the spectroscope (4A 2:E) is a linear optical line (curvature, which can be lost without loss of light, or optical fiber. In addition, when the end side is connected to the next section)
(弟4β圖之F)’s形曲線採用S彎曲餘弦或弧 ^形狀的情況時，因為模態形狀將呈非對稱狀態，因而 問題亦存在於由先導波路構 D(dlrectlonal coupler)的情況時。如此， 述習知技術的任何形狀，亦將無法抑制連接二 而處的彳貝失，且/或無法抑制波長依存性。 =話說，因轻形形狀、Sf曲餘弦狀的 =於有限U率>〇)，因此在結合於上述分光器待 4端部側(第4A圖之E、第則之F)，便將發生損失;； 315744 7 1258604 象’或者分支比變為不適當的情況。反之，因為在與分支· 部的，接侧（第4A圖之D)，2條光導波路具有間隙，因而. 在二端為直線形（曲率=0)的s彎曲正弦狀曲線將導致光損、 失現象。 、 ^所以，本發明係提供一種即便在分光器或定向耦合器 等=面，二端連接部仍不需要設置偏軸構造，光損失將變 為取小極限’且在曲線中途亦不需要設置偏軸構造之形狀 的光導波路。 [用以解決課題之方案] φ 本發明所提供的曲線光導波路，其特徵在於：中途未配 置偏軸構這之具S形芯材形狀的曲線光導波路，其中一端· 的曲率為0，另一端的曲率半徑為有限（> 〇 )。 ” 此曲線光導波路係當二端接合直線光導波路之情況 r 犄，僅而要在單側端設置偏軸構造之物性的曲線光導波 路。（第5A圖） ~ 再者，本發明所提供的遮罩，乃含有中途未配置偏軸_ 構造之具S形芯材形狀的曲線光導波路製造用遮罩，其中 一端的曲率為0，另一端的曲率為有限（> 〇)。 在分支部與2條光導波路的連接端部，模態中心為在 2條光導波路之間隙侧設置有偏軸構造的光導波路，此較 能將分支部的過度損失抑制為較小情況。換句話說，因為 2條S形光導波路的光傳播模態中心軸，分別偏離於内側， 因而即便將兩S形光導波路間隔呈較寬廣狀態的配置，仍 可低損失地連接於分支部。依此，藉由將兩s形光導波路 315744 8 1258604 間隔配置成較寬廣狀態，不僅 狀偏差影變飨丨 ^^ 刀支#分在製造時的形 部分所造二二=亦可降低因包覆#料的填埋窄寬度 成的不良情況。在與此種分 接合時，S形光導波路端部曲率為：:刀支：分進行 此外，因為另-端接合於光導波 、，泉，將屬有效。 ==、::況時，在輸，下-層分支的連 【實施4】 曲率為。將屬有效的。 本發明的S形芯材形狀係 偏軸構造之ς形/、百在中途未设置 -端的曲率A f %狀的曲線料波路，特徵在於：其中 曲線光導淹政’另—端的曲率則為有限(>〇)。相關0 :2 ?形狀，可由表示各種曲線的函數式中導 所明連接於分支部側之一端的「曲率為0 ，係 ::曲率漸趨於、。’乃涵蓋當連接於直線光導波 :不致產生光傳播模態中心偏軸芯材幾何中，而發 生光損失（O.ldB程度）之程度。 另外H兄明書中’所謂「偏軸構造」係指光導波 路心材中心線為不連續的構造。 、 Q例如可舉出用以下之式（1)所示曲線光導波 路0 [數式7] 315744 9 !258604 /(1)- 3π 1 - sin π (3z + l) 座禪轴上7與z係指光導波路所存在平面上的正交 f"^=n，（z)係指z的連續函數；滿足f(〇)=o、f，（〇)=〇、 ^ 1(1)：^2/3；Γ、f’（DM、Γ(1)=0 的函數，f’（< ⑷相關階微分，Γ⑴係指f(z)相關2的2 —、（）所示係依座“系起點為z = 0、y = 〇，終點為ζ=ι、 的形式進行格式化，但是配合需要亦可採取在^方向 及/或z方向進行放大/縮小。 再者，f(Z)的函數形式具體例，可舉出以下式（3)所示 函數。 [數式8] 勝备z -一 sin π ...(3) π w 式（3)中，因為 L數式9] —C〇S 疋丄 / (ζ) =三 sin;zz 2 ’所以滿足 f(〇) = 〇、f，（〇)二0、r(0) = 0、f(l)二l/2(¥-2/3 万）、Γ (1)=1 、 f”（1):〇 。 換句話說，本發明曲線光導波路之一較佳實施形態， 10 315744 1258604 係將式（3)代入式（1)而獲得 的曲線。 [數式10] 由下式（2)所定義之函數表示 1+_2_ 2 3^ z 2 --Γ-- 2 3π (3z -f-l) — 2π /、有上述函數所疋義形狀的曲線光導波路，因為曲率 連續地變化，因此在中途並不需要偏轴構造，其中一端的 曲率為〇，另一端的曲率為有限（>〇)。 曲率為0的K5接合’除接合於直線光導波路之外，_ 最好使用接合於分支構造的結合部（若lx 2的話，便為lch ::。在此接合部份中，相較於習知需要偏軸構造的曲線光 $波路下’可縮小製造的參差不齊情況，能獲得良率佳的“ 光導波路。此外’在較寬波長範圍中，可提供良好的光導： 曲率屬於有限之端部的接合，除接合於曲線光導波路 之外，尚可適用於與分支構造的分支部（若lx 2的話，便 為2ch側）之接合。在此接合部份中，即便分支根部的窄寬 度部分形成有限間隙的情況時，仍可降低從分支根部中央 處的洩漏光情形，可減少分支過度損失。 、 上述S形曲線光導波路係譬如當平行配置的輸入光 波路與輸出光導波路，未成同—直線狀的情況時，便可供 ，用於將該等光導波路結合。此外’ s形曲線光導波路係 譬如當將平行配置的複數輸人光導波路與複數輪出光導波 路予以連接之際，於各個複數光導波路的間距不同之情況 Π 315744 1258604 n-t 寸’便可供使用於將該等光導波路結合。s形曲線光導波 路譬如可使用於與反射面接合的構造。 再者’當將本發明的曲線光導波路連接於其他光導波 路或光纖之情況時，只要是屬於光學連接的話便可，各個 芯材間未必需要形成串聯構造。 使用本發明曲線光導波路的光學裝置，可舉例如：分光 杰'、定向I馬合器、光耦合器（optical coupler)、光耦合分 支為、光輕合分波器、光傳送模組、光接收模組、光傳送 接收模組、光開關（optical switch)、光調變器（1 ight modulator)、光滤波器、光偏向器（Hght def lector)、光 刀月欠補領裔、光塞取多工模組（optical add-dr op module)、光叉接（0pticai cross connect)等。 本發明的曲線光導波路係可採用具下述特徵的遮罩進 行製造，該遮罩係具有供轉印在中途未設置偏軸構造之s 形芯材形狀用圖案的曲線光導波路製造用遮罩；該圖案其 中一端曲率為0，另一端的曲率則為有限（> 〇)。 較佳的上述曲線光導波路製造用遮罩係描繪出依下式 (1)所示函數的圖案。 [數式11] /(!) + -2 J •——< 1 - sin [3^·[ :，+1) |+/ω 少: 在上式中，y與ζ係指光導波路所存在平面上的正交 座標轴；f(Z)係指Z的連續函數；滿足f(〇) = 〇、f，（〇) = 〇、 315744 12 !258604 Γ’（〇) = 〇、f(l)关-2/3;γ、f’（1) = ;l、f”（1) = ()的函數，f，（幻 係指f(z)相關z的1階微分，f”（z)係指f(z)相關z的2 階微分。上述函數係可使用於朝z方向及/或y方向進行任 意放大縮小。 上式（1)更佳的情況係f(z)由下式（3)所示的下式（2) 所示Z連續函數。 [數式12] •(3) ;--sin πζ [數式13] 1 2 —+ — 2 3π ζ , 2 2 . ----sin 2 3π 3π -(3ζ 4* 1) 2π sin [^ζ] •(2) 本發明的曲線光導波路可藉由採用上述遮罩，並依針 對習知曲線光導波路相同的週知順序便可製得。譬如在包 覆層上設置由芯材料（後述）構成的層之後，再於上述層上 設置感^性光阻層，並載置上述遮罩，且施行曝光、^影 之後，設置具有本發明曲線光導波路形狀的光阻層，然後 利用㈣等手段，形成具有本發明曲線料波路形狀的芯 材此外’上述遮罩材料可採用週知任何者。 本卷月曲線光導波路的芯材、包覆層材料，可舉例如· 玻肖半‘肢材料等無機材料、樹脂等有機材料等等各種 材料^因為樹脂等聚合物可利用乾式蝕刻等手段，在短時 間内加工’因而屬較佳材料。另夕卜，包覆層的全部或 一中P知亦可採用空氣層。此種聚合物可使用任何者， 315744 1258604(F of the 4β map) When the s-shaped curve adopts the S-curved cosine or the arc shape, since the modal shape will be in an asymmetrical state, the problem also exists in the case of the DLR (drectlonal coupler). . As such, any shape of the prior art will not inhibit the loss of the mussels at the junction and/or the wavelength dependence. = in other words, because of the light shape, the Sf curve is cosine-like = at a finite U-rate > 〇), so it is combined with the end of the above-mentioned beam splitter to be 4 (E of the 4A, F of the fourth). Loss occurred;; 315744 7 1258604 A situation where 'or branch ratio becomes inappropriate. On the contrary, because the two optical waveguides have a gap at the junction with the branch and the other side (D of Fig. 4A), the s-curved sinusoidal curve with a straight line at the two ends (curvature = 0) will cause light loss. Loss of phenomenon. Therefore, the present invention provides a configuration in which the two-terminal connection portion does not need to be provided with an off-axis configuration even in a splitter or a directional coupler, and the light loss becomes a small limit 'and does not need to be set in the middle of the curve. The optical waveguide of the shape of the off-axis structure. [Means for Solving the Problem] φ The curved optical waveguide provided by the present invention is characterized in that a curved optical waveguide having an S-shaped core shape in which an off-axis structure is not disposed is provided, wherein the curvature of one end· is 0, and The radius of curvature at one end is limited (> 〇). In the case where the curved optical path system is connected to the linear optical waveguide at both ends, only the curved optical waveguide having the physical structure of the off-axis structure is provided at one side. (Fig. 5A) ~ Furthermore, the present invention provides The mask is a mask for manufacturing a curved light guide wave having an S-shaped core shape in which an off-axis _ structure is not disposed, wherein the curvature of one end is 0, and the curvature of the other end is limited (> 〇). At the connection end portion with the two optical waveguides, the modal center is an optical waveguide having an off-axis structure on the gap side between the two optical waveguides, which can suppress the excessive loss of the branch portion to a small extent. In other words, Since the central axes of the light propagation modes of the two S-shaped optical waveguides are respectively deviated from the inner side, even if the two S-shaped optical waveguides are arranged in a wide state, the branches can be connected to the branch with low loss. By arranging the two s-shaped optical waveguides 315744 8 1258604 in a wider state, not only the shape deviation, but also the shape of the knives in the manufacturing process can be reduced by the coating. Landfill narrow width In case of engagement with such a part, the curvature of the end of the S-shaped optical waveguide is:: knife branch: minute, in addition, because the other end is joined to the light guide, the spring will be effective. ==, :: In the case of the transmission, the lower-layer branch connection [Implement 4] has a curvature of . It is effective. The S-shaped core material shape of the present invention is an off-axis structure of the ς-shaped shape, and a hundred is not provided in the middle - the curvature of the end A f The curve-like wave path of the %-like shape is characterized in that the curved light guide is flooded and the curvature of the other end is finite (>〇). The correlation 0:2? shape can be connected to the sub-function by the function of the various curves. At one end of the branch side, the "curvature is 0, the system:: the curvature gradually becomes." is covered when connected to a linear optical waveguide: does not produce a light propagation mode center off-axis core material geometry, and light loss occurs (O. The degree of ldB degree. In addition, the so-called "off-axis structure" in the H brother's book refers to a structure in which the center line of the optical waveguide heart material is discontinuous. For example, Q can be exemplified by the curve (1) of the curve shown in the following formula (1). [Expression 7] 315744 9 !258604 /(1)- 3π 1 - sin π (3z + l) 7 and z on the zen axis Refers to the orthogonal f"^=n, (z) on the plane of the optical waveguide, which is a continuous function of z; satisfies f(〇)=o, f,(〇)=〇, ^ 1(1):^ 2/3; Γ, f' (DM, Γ (1) = 0 function, f' (< (4) related order differential, Γ (1) means f(z) related 2 2 -, () shows the pedestal “The starting point is z = 0, y = 〇, and the ending point is ζ=ι, formatted, but the matching needs to be taken in the ^ direction and / or z direction to zoom in / out. Again, f (Z) A specific example of the function form is a function represented by the following formula (3). [Expression 8] Competitor z - a sin π ... (3) π w In the formula (3), since the L number is 9] —C〇S 疋丄/ (ζ) = three sin; zz 2 'so satisfy f(〇) = 〇, f, (〇) two 0, r(0) = 0, f(l) two l/2 ( ¥-2/30,000), Γ(1)=1, f"(1): 〇. In other words, one of the preferred embodiments of the curved optical waveguide of the present invention, 10 315744 1258604 is substituted for the formula (3) (1) obtained [Expression 10] The function defined by the following formula (2) represents 1+_2_ 2 3^ z 2 --Γ-- 2 3π (3z -fl) — 2π /, which has the shape of the above function Curved light guide wave, because the curvature changes continuously, there is no need for an off-axis configuration in the middle, where the curvature of one end is 〇 and the curvature of the other end is finite (> 〇). K5 joint of curvature 0 is except for the line Outside the optical waveguide, _ preferably uses a joint that is joined to the branched structure (if lx 2, it is lch ::. In this joint, compared to the conventional curve light that requires an off-axis configuration under the wave path 'It can reduce the unevenness of manufacturing, and can obtain the "optical waveguide" with good yield. In addition, it can provide a good light guide in a wide wavelength range: the curvature belongs to the end of the limited end, except for the curved light guide In addition, it is also applicable to the joining of the branching portion (or the 2ch side if lx 2) of the branched structure. In this joint portion, even if the narrow width portion of the branch root portion forms a limited gap, it is still possible. Reduce the leakage of light from the center of the branch roots, Reduce the excessive branch loss. The above-mentioned S-curve optical waveguide system, if the input optical path and the output optical waveguide are arranged in parallel, are not identical-linear, and are available for combining the optical waveguides. The s-curve optical waveguide system, for example, when the parallel input complex optical waveguides are connected to the plurality of round-trip optical waveguides, the spacing of the respective complex optical waveguides is different. 315744 1258604 nt-inch is available for use. These optical waveguides are combined. The sigmoidal optical waveguide can be used for construction that engages the reflective surface. Further, when the curved optical waveguide of the present invention is connected to other optical waveguides or optical fibers, it is not necessary to form a series structure between the respective core materials as long as they are optically connected. An optical device using the curved optical waveguide of the present invention may be, for example, a split-light ray', a directional I-coupler, an optical coupler, an optical coupling branch, an optical light-splitting and demultiplexing device, an optical transmission module, and light. Receiver module, optical transmission and reception module, optical switch, optical modulator, optical filter, optical deflector (Hght def lector), optical knife, and optical plug An optical add-dr op module, a 0pticai cross connect, and the like. The curved optical waveguide of the present invention can be manufactured by using a mask having a feature of a curved light guide wave manufacturing mask for transferring an s-shaped core shape pattern in which an off-axis structure is not provided in the middle. The pattern has a curvature of 0 at one end and a limited curvature at the other end (> 〇). Preferably, the above-described mask for manufacturing a curved optical waveguide system draws a pattern according to a function represented by the following formula (1). [Expression 11] /(!) + -2 J •——< 1 - sin [3^·[ :,+1) |+/ω Less: In the above formula, y and ζ refer to the optical waveguide There is an orthogonal coordinate axis on the plane; f(Z) is a continuous function of Z; satisfies f(〇) = 〇, f, (〇) = 〇, 315744 12 !258604 Γ'(〇) = 〇, f( l) off -2/3; γ, f'(1) = ;l, f"(1) = (), f, (the phantom refers to the first-order differential of f(z)-related z, f" ( z) refers to the second-order differential of f(z)-related z. The above function can be used to arbitrarily zoom in and out in the z direction and/or y direction. The better case of the above formula (1) is f(z) The Z continuous function shown by the following formula (2) represented by the formula (3) [Expression 12] • (3) ; -- sin π ζ [Expression 13] 1 2 —+ — 2 3π ζ , 2 2 . ---sin 2 3π 3π -(3ζ 4* 1) 2π sin [^ζ] • (2) The curved optical waveguide of the present invention can be obtained by using the above-mentioned mask and the same as the conventional curved optical waveguide The order can be obtained. For example, after a layer made of a core material (described later) is provided on the cladding layer, a photosensitive photoresist layer is provided on the layer, and the mask is placed thereon, and exposure and shadow are applied.Thereafter, a photoresist layer having the shape of the curved optical waveguide of the present invention is provided, and then a core material having the shape of the curved wave path of the present invention is formed by means of (d) or the like. Further, any of the above-mentioned mask materials may be known as any of the above-mentioned masks. For the core material and the coating material of the wave path, various materials such as inorganic materials such as glassy semi-limb materials and organic materials such as resins can be used, and polymers such as resins can be processed in a short time by means of dry etching or the like. 'Therefore, it is a preferred material. In addition, all or one of the cladding layers may also be an air layer. Any polymer may be used, 315744 1258604
具體例可舉例如：聚醯亞胺系樹脂（例如：聚醯亞胺樹脂、 聚（醯亞胺•異吲哚喹唑啉二酮醯亞胺）樹脂、聚醚醯亞胺 樹脂、聚醚酮樹脂、聚酯醯亞胺樹脂等）、矽酮系樹脂、丙 烯酸系樹脂、聚苯乙烯系樹脂、聚碳酸酯系樹脂、聚醯胺 系樹脂、聚酯系樹脂、苯酚系樹脂、聚喹啉系樹脂、聚喹 噁啉系樹脂、聚苯并噁唑系樹脂、聚苯并噻唑系樹脂、^ 苯并咪唑系樹脂、及光折射率變化用樹脂（例如：日本特開 2^)01-296438號公報所記載的聚錢、含氮嗣化合物的石夕 乳樹脂、含有DMAPN{(4-N，N-二甲胺基苯基）_N_苯基氮酮} 的聚甲基丙烯酸甲si、顏料聚合物（dyepQlyme小含有氛 酮化合物的聚醯亞胺樹脂或環氧樹脂、日本特開2〇〇〇一 66〇51號公報所揭示加水分解性矽烷化合物等）。上述樹脂 亦可為含氟原子的樹脂。較佳的聚合物就從玻璃轉移溫度 (Tg)較高、耐熱性較優越的觀點而言，最好為㈣亞胺樹 脂，其中從穿透率、折射率特性的觀點而言，尤以含氟的 聚酿亞胺系樹脂為佳。Specific examples thereof include a polyimide-based resin (for example, a polyimine resin, a poly(indenine/isoquinazolinedione quinone imine) resin, a polyether quinone imide resin, and a polyether). Ketone resin, polyester phthalimide resin, etc., anthrone resin, acrylic resin, polystyrene resin, polycarbonate resin, polyamine resin, polyester resin, phenol resin, polyquine A porphyrin resin, a polyquinoxaline resin, a polybenzoxazole resin, a polybenzothiazole resin, a benzimidazole resin, and a resin for changing a refractive index (for example, JP-A 2) 01 Polyglycol, a nitrogen-containing ruthenium-containing compound, and polymethyl methacrylate containing DMAPN {(4-N,N-dimethylaminophenyl)_N_phenyl azone) Si, a pigment polymer (a polyimine resin or an epoxy resin containing a small ketone compound in dyepQlyme, a hydrolyzable decane compound disclosed in Japanese Patent Laid-Open Publication No. Hei. No. Hei. The above resin may also be a fluorine atom-containing resin. The preferred polymer is preferably a (iv) imine resin from the viewpoint of a high glass transition temperature (Tg) and superior heat resistance, and particularly includes a viewpoint of transmittance and refractive index characteristics. A fluorine-containing polyamili-based resin is preferred.
含氟聚醒亞胺系樹脂可舉例如：含氟聚醯亞胺系樹 脂、含氟聚（醯亞胺•異，朵喹唾啉二賴亞胺）樹脂、々 既聚賴亞胺樹脂、含氟聚醯胺酿亞胺樹脂等。 上述含氟聚酿亞胺系樹脂的先質溶液可利用在如·N 甲基-2-卩比錢酮、N，N_二甲基乙酿胺、r丁内酉旨、^ 亞楓等極性溶劑中，使四致酸- … 长 夂夂—酊興一胺進打反應而獲 传。氟可含於四叛酸二酐血-胶榮 町，、—胺寺二者之中，亦可僅含來 /、中任一者之中。 315744 14 1258604 再者，未含氟聚醯亞胺系樹脂的先質溶液可利用在 如：N-曱基-2-吡咯烷酮、义.二曱基乙醯胺、7_丁内酯、 一曱亞楓等極性溶劑中，使未含氟之四羧酸二酐、與未含 氟之'一胺進行反應而獲得。 含氟之酸一酐可舉例如：（三氟曱基）均苯四甲酸二 酐、二（二氟曱基）均苯四甲酸二酐、二（七氟丙基）均苯四 曱酸二酐、五氟乙基均苯四曱酸二酐、雙丨3, 5一二（三氟甲 基）苯氧基}均苯四曱酸二酐、2,2-雙（3, 4_二羧基笨基）六 氟丙烷二酐、5, 5，-雙（三氟甲基）一3, 3，，4, 4，—四羧基聯苯 一酐2,2，5,5 -四（二氟曱基）_3,3’，4,4’-四叛基聯苯二 酐、5, 5’-雙（三氟曱基）-3, 3，，4, 4，-四羧基二苯醚二酐、 5,5’-雙（三氟曱基）一3,3，，4,4，—四羧基二苯曱酮二酐、雙 {(二氟曱基）二羧基苯氧基}苯二酐、雙{(三氟曱基）二羧基 苯氧基}(三氟曱基）苯二酐、雙（二羧基苯氧基）（三氟曱基） 苯二酐、雙（二羧基笨氧基）雙（三氟甲基）苯二酐、雙（二羧 基苯氧基）四（三氟曱基）苯二酐、2, 2 —雙—{(4—(3, 4—二羧基 苯氧基）苯基}六氟丙烷二酐、雙丨（三氟甲基）二羧基苯氧基} 聯苯二酐、雙{(三氟甲基）二羧基苯氧基}雙（三氟甲基）聯 苯二酐、雙{(三氟甲基）二羧基苯氧基}二苯醚二酐、雙（二 竣基本氧基）雙（三氟曱基）聯苯二酐等。 含氟二胺可舉例如：4-(1H，1H，11H-廿氟十一氧基）— 1，3-二胺基苯、4 —(1H，1H—全氟―卜丁氧基）—13 —二胺基 苯、4-(1H，1H-全氟-卜庚氧基）-1，3 —二胺基苯、4 —(1H，1H— 全氟-1-辛氧基）— l，3-二胺基苯、4-五氟苯氧基—13 —二胺 315744 15 1258604 基苯、4-(2, 3, 5, 6-四氟苯氧基）-1，3-二胺基苯、4-(4-氟 苯氧基）-1，3-二胺基苯、4-(1Η，1Η，2Η，2Η-全氟-1-己氧 基）_1，3-二胺基苯、4-(1H，1H，2H，2H-全氟-1-十二氧基）一 1，3 -二胺基苯、2, 5 -二胺基苯并三氟化物、雙（三氟甲基） 苯二胺、二胺基四（三氟曱基）苯、二胺基（五氟乙基）苯、 2, 5-二胺基（全氟己基）苯、2, 5-二胺基（全氟丁基）苯、 2, 2’ -雙（三氟曱基）-4, 4’ -二胺基聯笨、3, 3,-雙（三氟曱 基）-4, 4’ -二胺基聯苯、八氟聯苯胺、4, 4,-二胺基二苯_、 2, 2-雙（對胺基苯基）六氟丙烧、1，3-雙（苯胺基）六氟丙 烷、1，4-雙（苯胺基）八氟丁烷、1，5-雙（苯胺基）十氟戊烷、 1，7-雙（苯胺基）十四氟庚烷、2, 2,-雙（三氟曱基）—4, 4, -二胺基二苯醚、3, 3’ -雙（三氟曱基）-4,4，-二胺基二苯醚、 3, 3’，5, 5’ -四（三氟曱基）-4, 4,-二胺基二苯醚、3, 3, -雙 (三氟曱基）-4, 4’ -二胺基二苯曱酮、4, 4,-二胺基-對（三聯 苯）、1，4-雙（對胺苯基）苯、對雙（4 —胺基-2-三氟甲基苯氧 基）苯、雙（胺基苯氧基）雙（三氟甲基）苯、雙（胺基苯氧基） 四（三氟曱基）苯、2, 2-雙{4-(4-胺基苯氧基）苯基}六氟丙 烷、2,2-雙-{4-(3-胺基苯氧基）苯基}六氟丙烷、2,2 —雙一 {4-（2-胺基本氧基）苯基}六氟丙烧、2,2-雙{4-(4-胺基苯 氧基）-3, 5-二曱基苯基}六氟丙烧、2, 2-雙{4-(4-胺基苯氧 基）-3, 5-一二氣曱基苯基}六氟丙烧、4, 4’-雙（4-胺基-2-二氟甲基苯氧基）聯苯、4, 4’ -雙（4-胺基-3-三氟曱基苯氧 基）聯苯、4, 4’-雙（4-胺基-2-三氟曱基苯氧基）二苯楓、 4, 4 -雙（3-胺基-5-三氟甲基苯氧基）二苯楓、2, 2-雙{4- 315744 16 1258604 (4-胺基-3-二氟甲基苯氧基）苯基}六氟丙烧、雙丨（三氟甲 基）胺基苯氧基}聯苯、雙{[(三氟甲基）胺基苯氧基]苯基} 六氟丙烷、雙{2-[(胺基苯氧基）苯基]六氟異丙基丨笨等 等。 上述四羧酸二酐及二胺可合併使用二種以上。聚醯亞 胺系樹脂的先質溶液可使用具感光性的溶液。 、聚醯亞胺系樹脂先質溶液可利用旋塗機或印刷等方 式，塗布於基板表面上，在最終溫度2〇〇至4〇(rc中施行 熱處理’並經硬化後，便形成聚醯亞胺系樹脂被覆膜。 [實施例] 以下，藉由實施例針對本發明進行說明，惟並非限劳 本發明範圍。 居1實施例 本發明曲線部分的過度損失，係依下述進行評估。（較 入波長 及 1.55/Zm) 在具有依式（2)函數所示曲線的本發明光導波路二 ^ ’連接者直線光導波路之光導波路（第5a圖）的過度損 =_dB(輸人波長丨31㈣之情況）、_q. _β(輸 入渡長1 · 55 // m之情況）。另外，名 習知光導波路二端，連接二：：有“曲餘弦曲線的 5C圖）的過卢損失，直線光導波路之光導波路（第 、”、_“ 〇·〇_β(輸入波長ui"之情 波路“:仳(輸入波長U5"111之情況)。本發明的光導 過術的料波路之過度損失大致相同。此外， °又貝白、计异係採用光束傳播法（ΒΡΜ)。 3Ϊ5744 】7 1258604 再者’第2圖的分支寬度A、芯材寬度B係如下述。 第1圖所示曲線光導波路，係依式（2)函數所示曲線。 分支寬度A : 3. 5//m 怒材寬度B: 6.5//m 為比較而製作具有第3圖所示概略構造之，習知含有 S彎曲餘弦曲線的曲線光導波路。比較曲線光導波路二端 的芯材幾何中心與光學中心之偏移量均為〇. 4 # m。 如上述，本發明的光導波路，並不需要在單邊的端部 設置，因依存於芯材與包覆層的折射率、芯材尺寸、光波 長，造成製造上參差不齊等因素，而導致頗難形成最佳構 造的偏軸構造，且顯示出與具有s彎曲餘弦曲線的習知光 導波路曲線部分，大致同等級的過度損失。 第2實施例 其次，針對第6圖所示構造的lx 8分光器，計算過度 損失。當在連接方面採用本發明曲線光導波路的情況時^ 為-9.5dB，而採用弧結合形狀的s形曲線 時’則為-廳。另外，“圖的分支寬度A、芯：寬= 分支寬度A : 3.5//IH 芯材寬度B : 6. 5// m 此外’過度損失的計算係採用光束傳播法（bpm)。 再者’依下述，製作上述芯材圖案的遮罩。因為 圖案係依製程而變化，所以利用CAD緣製經考量過變： 的芯材圖f。除芯材圖案之外’亦在遮罩上追加供提昇 315744 18 1258604 罩與基板位置精度用的對位標幟、或其他供圖案測量等使· 用的標幟。CAD製圖順序，為使製圖作業的效率變佳，所 以首先繪製1元件份的圖案，再將上述丨元件份的圖案進· 行排列複印，而將圖案配置於遮罩整體上。在1元件份圖 案中，除設置圖層並繪製芯材圖案的圖層之外，亦可採用 不同的圖層繪製圖案。從依上述所繪製的CAD圖式，在遮 罩基板上採用曝光機直接描繪出圖案，並製作將圖案部分 利用cr金屬膜埋藏的遮罩，以及將圖案部分之外的區域2 用Cr金屬膜埋藏的遮罩。上述二個遮罩可依芯材圖案形成_ 製程中所使用光阻劑種類、及光導波路製造中的芯材形成 製程種類，而區隔使用。 如上述，採用本發明曲線光導波路所構成的1χ 8分光“ =二較抓用弧結合形狀之s形曲線光導波路所構成的習知… 分光器’顯示出更佳的過度損失。 Μ 3 ' 採用以下材料，製作具有第7圖所示概略構造之曲線Λ 光導波路的分光器。 、’ 芯材：日立化成工業股份有限公司製〇ρι—Ν32〇5 包覆層：日立化成工業股份有限公司製〇ρι—ν1〇〇5 *製造方法：在形成著ν溝的矽晶圓上，利用旋塗法將 有^結螯合物塗布成乾燥厚度1GG埃的狀態，經乾燥後， 在其ΐ將未含氟的聚醯亞胺樹脂塗布成乾燥膜厚/zm ^ L，經乾燥後，形成由含氟的聚醯亞胺樹脂所構成下 运（8 // m)、及芯層（β· 5 “ m)。其次，在芯層上將含矽 315744 19 1258604 先阻劑塗布成厚“々“犬態，經乾 例所製得遮罩的芯材圖案施行曝光、顯^，實施 阻圖案施行反應性離子蝕刻，而形成::：二：隔著光The fluorine-containing polyamidide-based resin may, for example, be a fluorine-containing polyimide-based resin, a fluorine-containing poly(indenine, iso-, quinoxaline-diimine) resin, or a poly-imide resin. Fluorinated polyamide amine-based imide resin. The precursor solution of the above-mentioned fluorine-containing polyamili-based resin can be used in, for example, N-methyl-2-indole, N,N-dimethylethenamine, r-butylene, ^ Yafeng, etc. In the polar solvent, the tetra-acid--long-indole-oxime-amine is reacted and passed. Fluoride may be contained in the blood of four resorcinic acid anhydrides, such as Jiaorong Town, and the Amine Temple, or may be included in any of them. 315744 14 1258604 Further, a precursor solution of a non-fluorinated polyimine-based resin can be used, for example, as N-mercapto-2-pyrrolidone, dimethylglyoxime, 7-butyrolactone, and hydrazine. In a polar solvent such as arsenic, a fluorine-free tetracarboxylic dianhydride is obtained by reacting with a fluorine-free 'monoamine. The fluorine-containing acid monoanhydride may, for example, be (trifluorodecyl) pyromellitic dianhydride, bis(difluorodecyl) pyromellitic dianhydride, or di(heptafluoropropyl) pyromellitic acid II. Anhydride, pentafluoroethyl pyromellitic dianhydride, biguanide 3,5-di(trifluoromethyl)phenoxy} pyromellitic dianhydride, 2,2-bis (3, 4_2) Carboxyl group) hexafluoropropane dianhydride, 5, 5,-bis(trifluoromethyl)-3,3,4,4,4-tetracarboxybiphenyl anhydride 2,2,5,5 -4 (two Fluorinyl)_3,3',4,4'-tetrareylbiphenyl dianhydride, 5,5'-bis(trifluoromethyl)-3,3,,4,4,-tetracarboxydiphenyl ether Diacetate, 5,5'-bis(trifluoromethyl)-3,3,4,4,tetracarboxydibenzofluorone dianhydride, bis{(difluoroindolyl)dicarboxyphenoxy}benzene Diacetate, bis{(trifluoromethyl)dicarboxyphenoxy}(trifluoromethyl)benzene dianhydride, bis(dicarboxyphenoxy)(trifluoromethyl)benzene phthalic anhydride, bis(dicarboxyl stupid) Oxy)bis(trifluoromethyl)phthalic anhydride, bis(dicarboxyphenoxy)tetrakis(trifluorodecyl)phthalic anhydride, 2,2-bis-{(4-(3,4-dicarboxy) Phenoxy)phenyl}hexafluoropropane Anhydride, biguanide (trifluoromethyl)dicarboxyphenoxy}biphenyl dianhydride, bis{(trifluoromethyl)dicarboxyphenoxy} bis(trifluoromethyl)biphenyl dianhydride, double {( Trifluoromethyl)dicarboxyphenoxy}diphenyl ether dianhydride, bis(difluorenyl basic oxy) bis(trifluoromethyl)biphenyl dianhydride, etc. The fluorine-containing diamine may, for example, be 4-(1H). ,1H,11H-fluorenylundecyloxy)-1,3-diaminobenzene, 4-(1H,1H-perfluoro-b-butoxy)-13-diaminobenzene, 4-(1H, 1H-perfluoro-p-heptyloxy)-1,3-diaminobenzene, 4-(1H,1H-perfluoro-1-octyloxy)-l,3-diaminobenzene, 4-pentafluoro Phenoxy- 13-diamine 315744 15 1258604 Benzene, 4-(2,3,5,6-tetrafluorophenoxy)-1,3-diaminobenzene, 4-(4-fluorophenoxy )-1,3-diaminobenzene, 4-(1Η,1Η,2Η,2Η-perfluoro-1-hexyloxy)-1,3-diaminobenzene, 4-(1H,1H,2H,2H -perfluoro-1-dodecyl)-1,3-diaminobenzene, 2,5-diaminobenzotrifluoride, bis(trifluoromethyl)phenylenediamine, diaminetetrayl ( Trifluoromethyl)benzene, diamino(pentafluoroethyl)benzene, 2,5-diamino group (all Fluorohexyl)benzene, 2,5-diamino(perfluorobutyl)benzene, 2,2'-bis(trifluoromethyl)-4,4'-diamine, stupid, 3, 3,-double (Trifluoromethyl)-4,4'-diaminobiphenyl, octafluorobenzidine, 4,4,-diaminodiphenyl-, 2,2-bis(p-aminophenyl)hexafluoropropyl Burned, 1,3-bis(anilino)hexafluoropropane, 1,4-bis(anilino)octafluorobutane, 1,5-bis(anilino)decafluoropentane, 1,7-bis(aniline) Tetradecyl heptane, 2, 2,-bis(trifluoromethyl)-4,4,-diaminodiphenyl ether, 3,3'-bis(trifluoromethyl)-4,4, -diaminodiphenyl ether, 3,3',5,5'-tetrakis(trifluoromethyl)-4,4,-diaminodiphenyl ether, 3,3,-bis(trifluoromethyl) -4, 4'-diaminodibenzophenone, 4,4,-diamino-p-(triphenyl), 1,4-bis(p-aminophenyl)benzene, p-bis(4-amino- 2-trifluoromethylphenoxy)benzene, bis(aminophenoxy)bis(trifluoromethyl)benzene, bis(aminophenoxy)tetrakis(trifluoromethyl)benzene, 2, 2- Bis{4-(4-aminophenoxy)phenyl}hexafluoropropane, 2,2-bis-{4-(3-aminophenoxy)phenyl}hexafluoropropane 2,2-bis-{4-(2-amine basic oxy)phenyl}hexafluoropropane, 2,2-bis{4-(4-aminophenoxy)-3, 5-dioxin Phenylphenyl}hexafluoropropane, 2,2-bis{4-(4-aminophenoxy)-3, 5-dioxanonylphenyl}hexafluoropropane, 4, 4'-double (4-Amino-2-difluoromethylphenoxy)biphenyl, 4,4'-bis(4-amino-3-trifluorodecylphenoxy)biphenyl, 4,4'-double (4-Amino-2-trifluorodecylphenoxy)diphenyl maple, 4,4-bis(3-amino-5-trifluoromethylphenoxy)diphenyl maple, 2, 2-double {4- 315744 16 1258604 (4-Amino-3-difluoromethylphenoxy)phenyl}hexafluoropropanone, biguanide (trifluoromethyl)aminophenoxy}biphenyl, double {[ (Trifluoromethyl)aminophenoxy]phenyl}hexafluoropropane, bis{2-[(aminophenoxy)phenyl]hexafluoroisopropylindole and the like. The above tetracarboxylic dianhydride and diamine may be used in combination of two or more kinds. The precursor solution of the polyamidiene resin can be used as a photosensitive solution. The polyamidene resin precursor solution can be applied to the surface of the substrate by a spin coater or printing method, and formed at a final temperature of 2 〇〇 to 4 〇 (heat treatment in rc) and hardened to form a polyfluorene. The present invention is described below by way of examples, but is not intended to limit the scope of the invention. The first embodiment of the present invention is characterized by excessive loss of the curve portion. (Compared to wavelength and 1.55/Zm) Excessive loss = _dB of the optical waveguide (Fig. 5a) of the optical waveguide of the optical waveguide of the present invention having a curve according to the function of equation (2) The case of wavelength 丨31 (four)), _q. _β (in the case of input length 1 · 55 // m). In addition, the second end of the name of the light guide wave path, the connection two:: the 5C picture with the "curve curve" Loss, optical guide wave path of the linear light guide wave (the first, ", _" 〇·〇_β (input wavelength ui" the wave path ": 仳 (in the case of input wavelength U5 " 111). The material path of the light guide of the present invention The excessive loss is about the same. In addition, ° The beam propagation method (ΒΡΜ) is used in different ways. 3Ϊ5744 】7 1258604 In addition, the branch width A and the core width B of the second figure are as follows. The curved optical waveguide shown in Fig. 1 is based on the function of equation (2). Curve width: Branch width A: 3. 5//m Bulk material width B: 6.5//m For comparison, a curved light guide wave path having a schematic structure shown in Fig. 3 and having a S-curved cosine curve is prepared. The offset between the geometric center of the core of the optical waveguide and the optical center is 〇. 4 # m. As described above, the optical waveguide of the present invention does not need to be disposed at the end of one side, because it depends on the core material and the package. The refractive index of the cladding, the size of the core material, and the wavelength of the light cause factors such as unevenness in manufacturing, resulting in an off-axis structure that is difficult to form an optimal structure, and exhibits a conventional optical waveguide curve having an s-curved cosine curve. In part, the excessive loss of the same level. Second Embodiment Next, the excessive loss is calculated for the lx8 optical splitter constructed as shown in Fig. 6. When the curved optical waveguide of the present invention is used for the connection, ^ is -9.5 dB. And adopting an arc combined shape s In the case of a curve, it is a hall. In addition, the branch width A of the figure, the core: the width = the width of the branch A: 3.5//IH, the width of the core material B: 6. 5 / / m In addition, the calculation of the 'excess loss is based on the beam Propagation method (bpm). In addition, the mask of the above-mentioned core material pattern is produced as follows. Since the pattern varies depending on the process, the core material pattern f is considered to be changed by the CAD edge method. In addition, it is also added to the mask to enhance the 315744 18 1258604 alignment mark for the positional accuracy of the cover and the substrate, or other flags for pattern measurement, etc. The CAD drawing sequence is to make the efficiency of the drawing work Preferably, the pattern of one component is drawn first, and the pattern of the component of the enamel component is aligned and copied, and the pattern is placed on the entire mask. In the 1-component pattern, in addition to the layer in which the layer is set and the core pattern is drawn, a different layer can be used to draw the pattern. From the CAD pattern drawn as described above, the pattern is directly drawn on the mask substrate by an exposure machine, and a mask in which the pattern portion is buried by the Cr metal film is formed, and the region 2 outside the pattern portion is made of a Cr metal film. Buried mask. The above two masks can be used depending on the type of the core material, the type of the photoresist used in the process, and the type of the core material forming process in the manufacture of the optical waveguide. As described above, the conventional light splitter formed by the curved light guide wave path of the present invention using the curved light guide wave path of the present invention has a better excessive loss. Μ 3 ' A spectroscope having a curved Λ optical waveguide of the schematic structure shown in Fig. 7 is produced by the following materials: 'Core material: 日ρι—Ν32〇5 manufactured by Hitachi Chemical Co., Ltd. Coating: Hitachi Chemical Co., Ltd. 〇ρι—ν1〇〇5 *Manufacturing method: On the tantalum wafer on which the ν groove is formed, the chelate is applied to a dry thickness of 1 GG by spin coating, and after drying, it is dried. The fluorine-free polyimine resin is coated to a dry film thickness / zm ^ L, and after drying, it is formed into a carrier (8 / m) composed of a fluorine-containing polyimine resin, and a core layer (β · 5 “ m). Secondly, the ruthenium 315744 19 1258604 first resist is coated on the core layer into a thick "々" dog state, and the core material pattern of the mask obtained by the dry method is exposed, and the resist pattern is applied to perform reactive ion etching. And form ::: two: across the light
形成上包覆層(1 一而製：二:先:T 後，利用晶割切取晶片。 絲先¥波路。然 波路料光導波路的插人損失。在評估時乃以光導 量皮路=端所形0溝為導轨，固定著光 ： 里先源係採用波長 明曲線光導波路時的插人損失，^田^本， 大的接點處為-l〇.8dB)，而杏 =二·知失取 用弧結合形狀的s形曲線 先^皮路日守之插入損失，平均值為_u. 點處為-11.7dB)。 貝天取大的接 从如上述，採用本發明曲線光導波路所構成的lx 8型分 =構造分光器，較採用孤結合形狀之§形曲線光導波路所 成的4知分光為，顯示出較佳的插入損失。 再者，在本實施例中，雖構成分光器用光導波路的所 ，S形曲線光導波路，均採用本發明的曲線光導波路，但 疋亦可形成著混合其他S形曲線的構造。 (發明之效果） 藉由採用本發明的s形曲線光導波路，便可構成在其 中糕，然偏軸且低損失地結合著直線導波路，而在另一 立而’則幾偏軸地結合著相同曲率之曲線光導波路的光導波 路。此外’藉由採用本發明的S形曲線光導波路，便可構 成在其中一端’無偏軸且低損失地結合著直線導波路，而 20 315744 1258604 在另:端，則依引起從導波路芯材幾何中心偏離的形式， 結合著光模態中心的光導波路。 曲率為〇的端部接合’除接合於直線光導波路之外， 尚可適用接合於如分光器般的分支構造結合部(若為k 2 的話，便為Ich側）。此接合部分’相較於採用習知 軸的曲線光導波路的情況下，可減小製造參差不齊， 較佳良率的光導波路。而且，在較寬波長範圍中，可= 良好的光導波路。 /、 曲率屬於有限之端部的接合’除接合於曲線光導波路 ，尚可適用於與分光器之分支構造的分支部（若lx 2 中便為2ch側）的接合、或定向轉合器。在此接合部份 :P便將分支根部的窄寬度部分形成有限間隙的情況 :仍可降低從分支根部中央處的茂漏 支過度損失 刀 【圖式簡單說明】 樣態圖第。1圖係採用本發明曲線光導波路的分光器之—實施 ^ 2圖係第1圖的分支部分放大圖。 圖。第3圖係採用習知s彎曲餘弦曲線光導波路的分光器 波 第4A圖係分光器中，s形曲線光導波路與直線光 路的連接部圖。 、 第4B圖係分光器中，s形曲線光導波路與分支光 路的連接部圖。 、波 315744 21 1258604 第5A至5D圖係各曲線光導波路兩端，在與直線光導 ^路間之連接部圖。第5A圖係本發明的曲線光導波路圖， 第5Β圖係習知s彎曲正弦形狀的曲線光導波路圖。第％ 圖係習知s彎曲餘弦形狀的曲線光導波路圖。第5D圖係習 知弧結合形狀的曲線光導波路。 〜第6圖係採用本發明曲線光導波路的分光器_實施樣 ^第7圖係採用本發明曲線光導波路的光分器一實施樣 恶圖。 、 【主要元件符號說明】Forming the upper cladding layer (1 one system: two: first: T, using the crystal cutting to cut the wafer. Silk first wave path. The wave loss of the wave path light path. In the evaluation is the light guide volume = end The 0-shaped groove is a guide rail, and the light is fixed: the input loss when the first source is a wavelength-guided optical waveguide, ^田^本, the large contact is -l〇.8dB), and the apricot=two · Knowing the loss of the arc-shaped shape of the s-shaped curve first, the insertion loss of the skin, the average value is _u. The point is -11.7dB). According to the above, the lx8-type sub-structured optical splitter formed by the curved optical waveguide of the present invention is compared with the four-dimensional split light formed by the §-shaped curved optical waveguide of the isolated shape, showing Good insertion loss. Further, in the present embodiment, the curved optical waveguide of the present invention is used for the S-curve optical waveguide of the optical waveguide for the optical splitter, but the structure of the other S-shaped curve may be formed. (Effect of the Invention) By adopting the s-curve optical waveguide of the present invention, it is possible to construct a linear guide wave in which the cake is combined with an off-axis and low loss, and the other is connected in an off-axis manner. The optical waveguide of the curved light guide wave with the same curvature. In addition, by using the S-curve optical waveguide of the present invention, a linear waveguide can be formed at one end of the 'unbiased axis and low loss, and 20 315744 1258604 is at the other end, and the induced waveguide core is caused. The geometric center of the material deviates in the form of a light-guided wave path in the center of the optical mode. The end joints having a curvature of ’ are applied to a branching structure joint such as a spectroscope (in the case of k 2 , the Ich side), in addition to being bonded to the linear light guide. In the case where the joint portion ' is smaller than the curved light guide wave path using the conventional axis, it is possible to reduce the manufacturing of the optical waveguide having unevenness and preferable yield. Moreover, in a wide wavelength range, a good optical waveguide can be =. / The joint in which the curvature belongs to the finite end portion is applied to the branch portion of the branching structure of the spectroscope (the 2ch side in the case of 1x 2) or the directional coupler, in addition to being joined to the curved light guide path. In this joint portion: P, the narrow width portion of the branch root portion is formed into a finite gap: the excessive loss of the leaking branch from the center of the branch root can be reduced. [Simplified drawing] FIG. Fig. 1 is an enlarged view of a branch portion of the first embodiment of Fig. 1 using the spectroscope of the curved optical waveguide of the present invention. Figure. Fig. 3 is a view showing a beam splitter of a conventional s-curved cosine curve light guide wave. Fig. 4A is a view showing a connection portion between an s-curve light guide wave path and a straight line path. Fig. 4B is a view showing a connection portion between the sigmoidal optical waveguide and the branching optical path in the optical splitter. Wave 315744 21 1258604 The 5A to 5D diagrams are diagrams of the connection between the ends of the curved light guides and the linear light guides. Fig. 5A is a curved light guide wave diagram of the present invention, and Fig. 5 is a conventional curved light guide wave diagram of a curved sinusoidal shape. The %th figure is a curved light guide wave diagram of the curved cosine shape of the conventional s. The 5D figure is a curved optical waveguide in which the arc is combined with the shape. - Fig. 6 is a spectroscope using the curved optical waveguide of the present invention. Fig. 7 is an embodiment of the optical splitter using the curved optical waveguide of the present invention. , [Main component symbol description]
A D E F 分支寬度 B 芯材寬度 1至142〇、3025、26 50200 分支輸出部與2條S形曲線光導波路的連接部 S形曲線光導波路與直線光導波路的連接部 S形曲線光導波路與分支輸入部的連接部 本發明曲線光導波路 V溝形成區域 21、31 V溝 溝 41至44芯材ADEF branch width B core width 1 to 142 〇, 3025, 26 50200 branch output part and 2 S-curve optical path connecting point S-shaped curve optical waveguide and linear optical waveguide connecting point S-curve optical waveguide and branch input Connecting portion of the present invention, the curved light guiding wave path V groove forming region 21, 31 V groove ditch 41 to 44 core material
巴復增 1〇〇 光導波路形成區域 具为光為用V溝之光導波路基板 315744 22Ba Fuzeng 1〇〇 Optical waveguide formation area Light-guided V-channel optical waveguide substrate 315744 22