TWI256721B - ESD protection circuit with active device - Google Patents
ESD protection circuit with active deviceInfo
- Publication number
- TWI256721B TWI256721B TW092122170A TW92122170A TWI256721B TW I256721 B TWI256721 B TW I256721B TW 092122170 A TW092122170 A TW 092122170A TW 92122170 A TW92122170 A TW 92122170A TW I256721 B TWI256721 B TW I256721B
- Authority
- TW
- Taiwan
- Prior art keywords
- protection circuit
- active device
- esd protection
- discharge device
- electrostatic
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Emergency Protection Circuit Devices (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/230,287 US7092227B2 (en) | 2002-08-29 | 2002-08-29 | Electrostatic discharge protection circuit with active device |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200403831A TW200403831A (en) | 2004-03-01 |
TWI256721B true TWI256721B (en) | 2006-06-11 |
Family
ID=31976445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW092122170A TWI256721B (en) | 2002-08-29 | 2003-08-12 | ESD protection circuit with active device |
Country Status (2)
Country | Link |
---|---|
US (2) | US7092227B2 (zh) |
TW (1) | TWI256721B (zh) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040256692A1 (en) * | 2003-06-19 | 2004-12-23 | Keith Edmund Kunz | Composite analog power transistor and method for making the same |
US20060125014A1 (en) * | 2004-12-14 | 2006-06-15 | Nui Chong | Diode with low junction capacitance |
DE102005027368A1 (de) * | 2005-06-14 | 2006-12-28 | Atmel Germany Gmbh | Halbleiterschutzstruktur für eine elektrostatische Entladung |
US7333312B2 (en) * | 2005-07-01 | 2008-02-19 | Altera Corporation | ESD device with low trigger voltage and low leakage |
US7825473B2 (en) * | 2005-07-21 | 2010-11-02 | Industrial Technology Research Institute | Initial-on SCR device for on-chip ESD protection |
US8804289B2 (en) * | 2007-10-17 | 2014-08-12 | Nxp, B.V. | Voltage surge protection circuit |
US7701682B2 (en) * | 2008-01-31 | 2010-04-20 | Freescale Semiconductors, Inc. | Electrostatic discharge protection |
JP2009277963A (ja) * | 2008-05-16 | 2009-11-26 | Toshiba Corp | 半導体装置 |
JP5525736B2 (ja) * | 2009-02-18 | 2014-06-18 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | 半導体装置及びその製造方法 |
US9385241B2 (en) | 2009-07-08 | 2016-07-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Electrostatic discharge (ESD) protection circuits, integrated circuits, systems, and methods for forming the ESD protection circuits |
US20110096446A1 (en) * | 2009-10-28 | 2011-04-28 | Intersil Americas Inc. | Electrostatic discharge clamp with controlled hysteresis including selectable turn on and turn off threshold voltages |
US8416553B2 (en) * | 2009-10-30 | 2013-04-09 | Intersil Americas Inc. | Bias and discharge system for low power loss start up and input capacitance discharge |
US8634172B2 (en) | 2010-05-18 | 2014-01-21 | International Business Machines Corporation | Silicon controlled rectifier based electrostatic discharge protection circuit with integrated JFETs, method of operation and design structure |
US8921941B2 (en) * | 2010-08-05 | 2014-12-30 | Mediatek Inc. | ESD protection device and method for fabricating the same |
US9190501B2 (en) * | 2013-02-26 | 2015-11-17 | Broadcom Corporation | Semiconductor devices including a lateral bipolar structure with high current gains |
TWI655746B (zh) * | 2015-05-08 | 2019-04-01 | 創意電子股份有限公司 | 二極體與二極體串電路 |
US9882003B1 (en) | 2016-07-11 | 2018-01-30 | Tower Semiconductor Ltd. | Device and system of a silicon controlled rectifier (SCR) |
CN108231758A (zh) * | 2016-12-22 | 2018-06-29 | 台湾类比科技股份有限公司 | 静电放电保护电路及静电放电保护的深次微米半导体元件 |
US10770555B2 (en) * | 2017-07-25 | 2020-09-08 | Vanguard International Semiconductor Corporation | Semiconductor device and method for forming the same |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4692781B2 (en) * | 1984-06-06 | 1998-01-20 | Texas Instruments Inc | Semiconductor device with electrostatic discharge protection |
US5225702A (en) * | 1991-12-05 | 1993-07-06 | Texas Instruments Incorporated | Silicon controlled rectifier structure for electrostatic discharge protection |
US5400202A (en) * | 1992-06-15 | 1995-03-21 | Hewlett-Packard Company | Electrostatic discharge protection circuit for integrated circuits |
US5452171A (en) * | 1992-06-15 | 1995-09-19 | Hewlett-Packard Company | Electrostatic discharge protection circuit for integrated circuits |
US5646808A (en) * | 1994-08-05 | 1997-07-08 | Kawasaki Steel Corporation | Electrostatic breakdown protection circuit for a semiconductor integrated circuit device |
KR0150992B1 (ko) * | 1994-08-31 | 1998-10-01 | 김광호 | 고내압용 모스 트랜지스터 및 그 제조방법 |
US5510279A (en) * | 1995-01-06 | 1996-04-23 | United Microelectronics Corp. | Method of fabricating an asymmetric lightly doped drain transistor device |
JPH08250728A (ja) * | 1995-03-10 | 1996-09-27 | Sony Corp | 電界効果型半導体装置及びその製造方法 |
US5572394A (en) * | 1995-04-06 | 1996-11-05 | Industrial Technology Research Institute | CMOS on-chip four-LVTSCR ESD protection scheme |
US5576574A (en) * | 1995-06-30 | 1996-11-19 | United Microelectronics Corporation | Mosfet with fully overlapped lightly doped drain structure and method for manufacturing same |
US5631793A (en) * | 1995-09-05 | 1997-05-20 | Winbond Electronics Corporation | Capacitor-couple electrostatic discharge protection circuit |
US5747834A (en) * | 1995-09-29 | 1998-05-05 | Texas Instruments Inc | Adjustable Bipolar SCR holding voltage for ESD protection circuits in high speed Bipolar/BiCMOS circuits |
US5698884A (en) * | 1996-02-07 | 1997-12-16 | Thunderbird Technologies, Inc. | Short channel fermi-threshold field effect transistors including drain field termination region and methods of fabricating same |
US5734541A (en) * | 1996-05-20 | 1998-03-31 | Pmc-Sierra, Inc. | Low voltage silicon controlled rectifier structure for ESD input pad protection in CMOS IC's |
US5763919A (en) * | 1996-07-08 | 1998-06-09 | Winbond Electronics Corporation | MOS transistor structure for electro-static discharge protection circuitry having dispersed parallel paths |
US5744842A (en) * | 1996-08-15 | 1998-04-28 | Industrial Technology Research Institute | Area-efficient VDD-to-VSS ESD protection circuit |
US5740000A (en) * | 1996-09-30 | 1998-04-14 | Hewlett-Packard Co. | ESD protection system for an integrated circuit with multiple power supply networks |
US5838146A (en) * | 1996-11-12 | 1998-11-17 | Analog Devices, Inc. | Method and apparatus for providing ESD/EOS protection for IC power supply pins |
US6147538A (en) * | 1997-02-05 | 2000-11-14 | Texas Instruments Incorporated | CMOS triggered NMOS ESD protection circuit |
US5982600A (en) * | 1998-04-20 | 1999-11-09 | Macronix International Co., Ltd. | Low-voltage triggering electrostatic discharge protection |
US6239472B1 (en) * | 1998-09-01 | 2001-05-29 | Philips Electronics North America Corp. | MOSFET structure having improved source/drain junction performance |
US6211023B1 (en) * | 1998-11-12 | 2001-04-03 | United Microelectronics Corp. | Method for fabricating a metal-oxide semiconductor transistor |
US6256184B1 (en) * | 1999-06-16 | 2001-07-03 | International Business Machines Corporation | Method and apparatus for providing electrostatic discharge protection |
US6546522B1 (en) * | 1999-08-06 | 2003-04-08 | United Microelectronics Corp. | Signal-to-noise ratio optimization of multiple-response design-of-experiment |
US6362062B1 (en) * | 1999-09-08 | 2002-03-26 | Texas Instruments Incorporated | Disposable sidewall spacer process for integrated circuits |
US6528850B1 (en) * | 2000-05-03 | 2003-03-04 | Linear Technology Corporation | High voltage MOS transistor with up-retro well |
US6426291B1 (en) * | 2000-08-31 | 2002-07-30 | Micron Technology, Inc. | Method of co-deposition to form ultra-shallow junctions in MOS devices using electroless or electrodeposition |
US6671153B1 (en) * | 2000-09-11 | 2003-12-30 | Taiwan Semiconductor Manufacturing Company | Low-leakage diode string for use in the power-rail ESD clamp circuits |
US6822297B2 (en) * | 2001-06-07 | 2004-11-23 | Texas Instruments Incorporated | Additional n-type LDD/pocket implant for improving short-channel NMOS ESD robustness |
-
2002
- 2002-08-29 US US10/230,287 patent/US7092227B2/en not_active Expired - Lifetime
-
2003
- 2003-08-12 TW TW092122170A patent/TWI256721B/zh not_active IP Right Cessation
-
2005
- 2005-01-31 US US11/045,300 patent/US7554159B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20040042143A1 (en) | 2004-03-04 |
TW200403831A (en) | 2004-03-01 |
US7554159B2 (en) | 2009-06-30 |
US20050127445A1 (en) | 2005-06-16 |
US7092227B2 (en) | 2006-08-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |