TWI256660B - Carbon nanotube array and method for making the same - Google Patents

Carbon nanotube array and method for making the same

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Publication number
TWI256660B
TWI256660B TW94113018A TW94113018A TWI256660B TW I256660 B TWI256660 B TW I256660B TW 94113018 A TW94113018 A TW 94113018A TW 94113018 A TW94113018 A TW 94113018A TW I256660 B TWI256660 B TW I256660B
Authority
TW
Taiwan
Prior art keywords
nanotube array
carbon nanotube
making
same
substrate
Prior art date
Application number
TW94113018A
Other languages
Chinese (zh)
Other versions
TW200638456A (en
Inventor
Kai-Li Jiang
Kai Liu
Shou-Shan Fan
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW94113018A priority Critical patent/TWI256660B/en
Application granted granted Critical
Publication of TWI256660B publication Critical patent/TWI256660B/en
Publication of TW200638456A publication Critical patent/TW200638456A/en

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  • Carbon And Carbon Compounds (AREA)

Abstract

The invention relates to a carbon nanotube array and method for making the same. The carbon nanotube array includes a number of carbon nanotubes aligned in a uniform direction. A mark is formed on the carbon nanotubes. The method for making the carbon nanotube array includes the following steps: providing a substrate; forming a catalyst layer on the substrate; heating the substrate to a predetermined temperature; and introducing a carbon source intermittently for growing carbon nanotube array with marks formed thereon.
TW94113018A 2005-04-22 2005-04-22 Carbon nanotube array and method for making the same TWI256660B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94113018A TWI256660B (en) 2005-04-22 2005-04-22 Carbon nanotube array and method for making the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94113018A TWI256660B (en) 2005-04-22 2005-04-22 Carbon nanotube array and method for making the same

Publications (2)

Publication Number Publication Date
TWI256660B true TWI256660B (en) 2006-06-11
TW200638456A TW200638456A (en) 2006-11-01

Family

ID=37614738

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94113018A TWI256660B (en) 2005-04-22 2005-04-22 Carbon nanotube array and method for making the same

Country Status (1)

Country Link
TW (1) TWI256660B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI451541B (en) * 2006-06-29 2014-09-01 Intel Corp Method for measuring temperature in a microelectronic integrated circuit package, microelectronic component and computing system
TWI757418B (en) * 2017-02-03 2022-03-11 美商克萊譚克公司 Multi-column scanning electron microscopy system and substrate array and method for photomask or reticle inspection and review

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI451541B (en) * 2006-06-29 2014-09-01 Intel Corp Method for measuring temperature in a microelectronic integrated circuit package, microelectronic component and computing system
US9028142B2 (en) 2006-06-29 2015-05-12 Intel Corporation Integrated microelectronic package temperature sensor
TWI757418B (en) * 2017-02-03 2022-03-11 美商克萊譚克公司 Multi-column scanning electron microscopy system and substrate array and method for photomask or reticle inspection and review

Also Published As

Publication number Publication date
TW200638456A (en) 2006-11-01

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