TWI256660B - Carbon nanotube array and method for making the same - Google Patents
Carbon nanotube array and method for making the sameInfo
- Publication number
- TWI256660B TWI256660B TW94113018A TW94113018A TWI256660B TW I256660 B TWI256660 B TW I256660B TW 94113018 A TW94113018 A TW 94113018A TW 94113018 A TW94113018 A TW 94113018A TW I256660 B TWI256660 B TW I256660B
- Authority
- TW
- Taiwan
- Prior art keywords
- nanotube array
- carbon nanotube
- making
- same
- substrate
- Prior art date
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
Abstract
The invention relates to a carbon nanotube array and method for making the same. The carbon nanotube array includes a number of carbon nanotubes aligned in a uniform direction. A mark is formed on the carbon nanotubes. The method for making the carbon nanotube array includes the following steps: providing a substrate; forming a catalyst layer on the substrate; heating the substrate to a predetermined temperature; and introducing a carbon source intermittently for growing carbon nanotube array with marks formed thereon.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94113018A TWI256660B (en) | 2005-04-22 | 2005-04-22 | Carbon nanotube array and method for making the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94113018A TWI256660B (en) | 2005-04-22 | 2005-04-22 | Carbon nanotube array and method for making the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI256660B true TWI256660B (en) | 2006-06-11 |
TW200638456A TW200638456A (en) | 2006-11-01 |
Family
ID=37614738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94113018A TWI256660B (en) | 2005-04-22 | 2005-04-22 | Carbon nanotube array and method for making the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI256660B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI451541B (en) * | 2006-06-29 | 2014-09-01 | Intel Corp | Method for measuring temperature in a microelectronic integrated circuit package, microelectronic component and computing system |
TWI757418B (en) * | 2017-02-03 | 2022-03-11 | 美商克萊譚克公司 | Multi-column scanning electron microscopy system and substrate array and method for photomask or reticle inspection and review |
-
2005
- 2005-04-22 TW TW94113018A patent/TWI256660B/en active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI451541B (en) * | 2006-06-29 | 2014-09-01 | Intel Corp | Method for measuring temperature in a microelectronic integrated circuit package, microelectronic component and computing system |
US9028142B2 (en) | 2006-06-29 | 2015-05-12 | Intel Corporation | Integrated microelectronic package temperature sensor |
TWI757418B (en) * | 2017-02-03 | 2022-03-11 | 美商克萊譚克公司 | Multi-column scanning electron microscopy system and substrate array and method for photomask or reticle inspection and review |
Also Published As
Publication number | Publication date |
---|---|
TW200638456A (en) | 2006-11-01 |
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