TWI254653B - Water scrubber - Google Patents

Abstract

A water scrubber. The water scrubber includes a scrubbing chamber, an inlet box, an inputting pipe, a scraper and an outputting pipe. The inlet box is disposed on the scrubbing chamber and has a first spraying device and a retardant plate. The first spraying device and retardant plate are disposed in the inlet box, and the first spraying device is located on the retardant plate. The inputting pipe is connected to the inlet box. The scraper is disposed in the inputting pipe. The outputting pipe is connected to the scrubbing chamber and has a second spraying device disposed therein.

Description

Amendment 1254653^

—------9212775R V. INSTRUCTION STATEMENT d) [Technical Field to Which the Invention Is Applicable] t-monthly relates to a wet-washing apparatus', particularly to a wet-washing apparatus which is smoother in washing operation. [Prior Art] In general, in the front-end process of the LCD, the process reaction product generation # includes the exhaust gas composed of C, 0, F, A1, and C1, and the exhaust gas must pass through a wet washing device. After the treatment of (water scrubber), it is discharged to the outside world. 1 is a schematic view showing the internal structure of a conventional wet scrubbing apparatus 1. The above-mentioned exhaust gas enters the wet scrubbing apparatus 1 via an inlet port, and then the exhaust gas passes downward through a first sprinkler device 1 After the water washing of 2 and the filtering of the first transitional group 13 , the second filter 14 , a first sprinkling device 15 , a third filter 16 , and a third sprinkling device are sequentially passed up. 17 and a fourth filter 18 are cleaned and filtered and discharged from an outlet 19. In addition, the dirty water after the water washing will flow into the first water storage tank 20, and can be discharged from the one official road 21 to the outside of the wet washing apparatus 1, and the clean water or the recycled water can be It is stored in a second water storage tank 2 2 and is selectively transportable via a line 23 to the first sprinkling device 12, the second sprinkling device 15 or the third sprinkling device 17. ;,, > 叩, write the wet scrubbing equipment 丨 has a number of shortcomings, first, because the water sprayed from the first sprinkler 12 will have moisture, the water will rise and enter through the inlet 1 1 The exhaust gas reacts rapidly and violently, and reacts to produce a solid corrosive product, which is corrosive to solid formation.

0632-10381twf2(4.5) ; AU0305034 ; Hawdong.ptc Page 7 1254653 Case No. 92127756_年月日日__ V. Description of invention (2) The object will deposit at the entrance 11 and cause the entrance 11 to block. Further, the solid rancid product produced by the reaction of the exhaust gas with water is also deposited at the outlet 19 and the fan blade 25 of the fan 24, thereby causing clogging of the outlet 19 and causing corrosion damage to the blade 25. As described above, when the inlet 11 and the outlet 19 of the wet washing apparatus 1 are clogged, the exhaust gas generated by the LCD process cannot smoothly flow into the wet washing apparatus 1, and then the LCD manufacturing apparatus is exhausted. The pressure is too high and a fault trip occurs, which causes the LCD in manufacturing to be damaged or defective. In view of the above, it is an object of the present invention to provide an improved wet scrubbing apparatus which is capable of clogging by depositing solid products at the inlet and outlet of the exhaust gas, thereby prolonging the use time of the wet scrubbing apparatus. SUMMARY OF THE INVENTION The present invention basically employs the features detailed below in order to solve the above problems. That is, the present invention includes a washing chamber, an inlet assembly, an inlet line, a scraper, and an outlet line. The inlet assembly is disposed above the washing chamber and has a first spray device and a baffle. The first spray device and the baffle are disposed in the inlet assembly, and the first spray device is located above the baffle. The inlet line is placed above the inlet combination and is connected to the inlet combination. The scraper is placed in the inlet pipe. The outlet line is connected to the washing chamber and has a second spraying device, and the second spraying device is disposed in the outlet line. Meanwhile, the wet strip washing apparatus according to the present invention further includes a jet device disposed on the inlet assembly for providing a high pressure dry air flow.

0632-10381twf2(4.5) i AU0305034 ; Hawdong.ptc Page 8 1225453 Case No. 92127756 Amendment 5, Invention Description (3) Among the entrance combinations, this is in the present and in the present and in the present In the second washing section of the present invention, the inlet pipe is connected to the fourth and fourth of the present invention and the first filter, and the first device is placed in the second and second and the second water storage. The spray spray filter is installed in four sprays in the present invention. The present invention is in the present invention. The dry gas flow is composed of nitrogen gas. In the Ming Dynasty, a motor is further connected to the scraper. In the Ming Dynasty, a support plate is further included, which is arranged at the inlet combined baffle. In the present invention, the washing chamber further has a first washing portion and a first port assembly disposed above the first washing portion, and an outlet for the second washing portion. In the middle, the first washing department further has a third spraying device, the third spraying device is disposed in the first filtering device, and the second washing portion has a second filtering device, a first a third filtering device, a fifth spraying device, and a second filtering device, wherein the device disposed in the fourth spraying device is disposed on the third filtering device, the third filtering device is on the fifth spraying device, and Five spray devices are attached to the device. In the middle, the third filtering device is a bubble generating plate. In the middle, the fourth filtering device is a bubble generating plate. In the middle, the second washing section further has an exhaust fan, which is adjacent to the lining, and the washing chamber further has a first water storage tank and a first disposed below the washing chamber. The above objectives, features and advantages of Ming are more obvious and understandable.

0632-10381twf2(4.5); AU0305034; Hawdong.ptc Page 9 1254653 Case No. 92127756_Yearly 曰 Revision _ V. Description of the Invention (4) The following is a detailed description of the preferred embodiment and the accompanying drawings. [Embodiment] A preferred embodiment of the present invention will be described with reference to the drawings. Referring to Fig. 2, the wet scrubbing apparatus 100 of the present invention mainly comprises a strip chamber 110, an inlet assembly 120, an inlet line 130, an inlet unit 140, and an outlet line 150. As still shown in FIG. 2, the washing chamber 110 can be divided into a first washing portion 1 1 1 and a second washing portion 11 2 , and the inlet assembly 1 20 is disposed on the first washing portion 11 1 , and The outlet line 150 is connected to the second washing unit 1 1 2 . At the same time, a third spraying device 11 3 and a first filtering device 114 are further disposed in the first washing portion 1 11 , and the third spraying device 113 is disposed above the first filtering device 114 and can Spray it down. In another aspect, the second cleaning unit 112 further includes a second filtering device 115, a fourth spraying device 116, a third filtering device 117, a fifth spraying device 11 8 and a fourth filtering. Device 1 1 9. The second filtering device 1 15 is disposed above the fourth spraying device 116, the fourth spraying device 116 is disposed above the third filtering device 117, and the third filtering device 117 is disposed at the fifth spraying device 118. Above, and the fifth spraying device 118 is disposed above the fourth filtering device 119. Similarly, the fourth spray device 11 6 and the fifth spray device 11 8 are also used to spray water downward. Further, as shown in Fig. 2, there is a first water storage tank 161 and a second water storage tank 162 below the washing chamber 110. An exhaust fan 170 is further disposed at an upper portion of the second washing portion 11 2 , and the exhaust fan 170 is adjacent to the outlet

0632-10381twf2(4.5) ; AU0305034 ; Hawdong.ptc Page 10

Amendment iA54653 V. Description of invention (5) Port line 150. As described above, the inlet assembly 120 is disposed on the first wash 2 of the washing chamber 110, and at the same time, a first device 121, a baffle 122, and a support plate are disposed in the inlet assembly 12 123. The first spray device 121 is located above the baffle 122 and can spray water over the baffle 122. The support plate 123 is located below the baffle 122 and is primarily used for the support and the fixed baffle 122. The inlet line 130 is disposed above the inlet assembly 12A and is coupled to the inlet assembly 120. In particular, the scraper 14 is disposed in the inlet pipe 1 30. Meanwhile, a motor 丨 8 连接 is coupled to the scraper 丨 4 以 to drive the scraper 1 400 to rotate. The outlet line 150 is a second washing unit 2 connected to the washing chamber, and a second spraying device 151 is further disposed in the outlet line 15A. The same place is used to spray water out. In addition, a jet device 19 is further disposed above the inlet assembly 120. The heater device 1 90 can provide a high pressure dry air flow in the inlet combination 1 2 '. In other words, the jet device 1 9 can be used for high pressure. The dry air is sprayed downward into the inlet assembly 120, and further the high pressure dry air is sprayed downward into the first washing portion 1 of the washing chamber 110. Additionally, the high pressure dry gas stream or air may be comprised of nitrogen. As shown in Fig. 2, when the exhaust gas flows into the wet scrubbing apparatus 100 via the inlet line 丨3, the exhaust gas flows first through the inlet combination 12〇. Since the water sprayed from the third spray device 11 in the first shampoo portion 11 1 is filled with water, the water vapor rises again, so that the rising moisture is prevented at the entrance.

1254653 921277.3⁄4 V. INSTRUCTIONS (6) The combination 1 2 0 reacts violently with the exhaust gas and produces a solid corrosive product, and the baffle 122 is arranged to block the rise of moisture. At the same time, the jet device 19 disposed above the inlet assembly 120 will spray high pressure dry air downward into the inlet combination 120 to further inhibit the water vapor in the first washing portion ji from rising to the inlet port 20 Among them. Then, the exhaust gas flows into the first washing portion 111 to receive the water washing of the third spraying device 3 and the filtering of the first filtering device 114. At this time, some components in the exhaust gas are sprayed with the third portion. The water ejected by the device 11 3 reacts, and the solid corrosive product generated by the reaction is accompanied by the flow of water into the first water storage tank 161, and the remaining components in the exhaust gas will flow into the second washing unit.丨丨2, and then sequentially through the fourth filter device 1 19, the fifth spray device 丨丨 8, the third filter device 丨丨 7, the fourth spray, the device 1 16 and the second filter device 丨丨5 cleaning and filtration. Similarly, the water sprayed downward by the 'fith spray device 118 and the fourth spray device 116 is sent into the first water storage tank i6i along with the reaction generated therefrom, and then, in the first water storage tank 161. The dirty water can be discharged through the pipeline 曰163, soil=type washing equipment 10. Outside. Finally, the washed and filtered waste 1 1 = the pumping operation of the exhaust fan 17〇 and the discharge value via the outlet line 侍5〇, even if the wet washing equipment is in the entrance group a baffle 122 and a jet device 19 are provided to prevent the water vapor port from being partially raised to the riser of the inlet pipe, and to generate a solid corrosive product, thus, Corrosive products of solid and evil inside, in order to keep the inlet pipe 丨3 〇,

_Ι254·ό53 Case No. (10) V. Description of invention (7). On the other hand, when the solid corrosive product accumulated on the baffle plate 122 reaches a certain amount, the first sprinkling device 121 can be turned on to generate the corrosive property of the solid state on the baffle plate 122. Rinse off. In addition, since the corrosive product of the solid state may also deposit in the outlet line 丨5 或 or above the fan blade 171 of the suction fan 170, and thus cause the outlet line 150 to block or make the blade Corrosion damage occurs in the crucible 7 1 , so the second spraying device 151 can spray the water out to remove the solid corrosive product inside the outlet line 15 or the fan 1 17 of the exhaust fan 1 70. Rinse off. In addition, in the wet washing apparatus 1 of the present invention, the third device 1 17 and the fourth filter device 19 may be a bubble generating plate, so that the exhaust gas and the moisture can be turned into more And smaller bubbles for the benefit; the water sprayed by the fourth water device 116 or the fifth sprinkler device 118, and further in the wet washing device of the present invention, clean walking or passing The recovered treated water may be stored in the second water storage tank 162i; and may be selectively sprayed through a line 16 and a second spray device 151, a third soil music device 1 21, and a fifth water spray device 118.乂, the fourth sprinkler device 116 or although the invention has been preferred to limit the invention per rain, • How to familiarize yourself with this: the second way; on the 'then it is not used in the scope of the gods, when it can be used as a towering, skill ☆ The scope of the application is not limited to the scope of the invention, and is defined by the scope of the patent application of the present invention. 0632-10381twf2 (4.5) ; AU0305034

Hawdong.ptc Page 13 1254653 Case No. 92127756_年月日日_魅_图图 Simple description Figure 1 shows a schematic diagram of the internal structure of a conventional wet scrubbing apparatus, and Figure 2 shows the wet scrubbing of the present invention. Schematic diagram of the internal structure of the device. [Description of symbols] 1, 1 0 0 ~ wet washing equipment; 1 1 ~ inlet; 1 2 ~ first sprinkler; 1 3 ~ first filter; 1 4 ~ second filter; 1 5 ~ second Sprinkler device; 1 6~3rd filter; 1 7~3rd sprinkler device; 1 8~4th filter; 1 9~ outlet; 2 0,1 6 1~first water storage tank; 21,23, 163, 164~ pipeline; 2 2, 1 6 2~ second storage tank; 2 4~fan; 2 5, 1 7 1~ fan blade; I 1 0~ washing chamber; II 1~ first washing section; 2 to the second washing section;

0632-10381twf2(4.5) ; AU0305034 ; Hawdong.ptc Page 14 1254653 Case No. 92127756_Year Month Day_Revised Drawing Simple Description 113~3rd 丨 丨 装置 ;; 1 1 4~First Filtering Device; 1 1 5 ~ second filtering device; 116 to fourth spraying device; 117 to third filtering device; 1 1 8 to fifth spraying device; 1 1 9 to fourth filtering device; 1 2 0 to inlet combination; 1 2 1 ~ first spraying device; 1 2 2 ~ baffle; 1 2 3 ~ support plate; 130 ~ inlet pipe; 1 4 0 ~ scraper; 150 ~ outlet pipe; 1 5 1 ~ second spray device ; 170 ~ exhaust fan; 1 8 0 ~ motor; 190 ~ jet device.

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Claims (1)

1254653 ^ - Case No. 1?77M VI. Patent Application _ Year Month 曰 Amendment 1 · A wet washing apparatus, including a washing room; + a combination of inlets, disposed above the washing chamber, and Having a first spraying device and a baffle 'the first spraying device and the baffle is disposed in the side inlet combination' and the first spraying device is located above the baffle; an inlet combination; a scraping-in pipe is disposed on the inlet assembly, and is connected to the outlet, and is provided with a jet of air to the dry air 2; as claimed in the 'drying 3', such as a motor, 4. A support plate is included. 5. If the washing chamber assembly is connected to the second washing unit, the pipeline is disposed in the pipeline, and is connected to the outlet pipe device, and is disposed in the inlet group. Nitrogen ^ The patent range is connected to the scraping range, which is disposed in the inlet lines; the washing chamber has a second spray path; and the inlet combination is used Provided - in the middle. The wet scrubbing apparatus of item 1, which is composed of. The wet scrubbing apparatus described in item 1, further comprising a packer. The wet washing device of the above-mentioned item is further included in the inlet cascading, and is used for supporting the gear. The patent scope is more the first to be placed in the wet washing device described in the first washing, wherein the washing a department and a second washing unit, the upper part of the knee, and the outlet line 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The first washing portion further has a third spraying device and a first filtering device, and the third spraying device is disposed on the first filtering device. 7. The wet washing apparatus of claim 5, wherein the second washing portion further comprises a second filtering device, a fourth spraying device, a third filtering device, and a fifth spraying device. And a fourth filtering device disposed on the fourth spraying device, the fourth spraying device is disposed on the third filtering device, and the third filtering device is disposed on the third filtering device Above the fifth spraying device, and the fifth spraying device is disposed above the fourth filtering device. 8. The wet scrubbing apparatus of claim 7, wherein the third filtering device is a bubble generating plate. 9. The wet scrubbing apparatus of claim 7, wherein the fourth filtering device is a bubble generating plate. The wet scrubbing apparatus of claim 5, wherein the second washing section further has an exhaust fan adjacent to the outlet pipe. 11. The wet scrubbing apparatus of claim 1, wherein the washing chamber further has a first water storage tank and a second water storage tank disposed below the washing chamber. 0632-10381twf2(4.5) ; AU0305034 ; Hawdong.ptc Page 17 Case No. 9212775fi_年月 j^_ IV. Abstract of Chinese Invention (Invention Name: Wet Washing Equipment) A wet strip washing machine, including a sinking room , an inlet combination, an inlet line, a scraper, and an outlet line. The inlet assembly is disposed above the washroom and has a first spray device and a baffle. The first irrigation device and the baffle are disposed in the inlet assembly and the first spray device is located above the baffle. The inlet line is placed above the inlet combination and is connected to the inlet combination. The scraper is placed in the inlet line. The outlet line is connected to the washing chamber and has a second spraying device, and the second spraying device is disposed in the outlet line. Wu, (1), the representative of the case is: Figure 2. (2) The representative symbol of the representative figure in this case is a simple description: 1 0 0~ wet washing equipment; 1 6 1~ first water storage tank; 163, 164~ pipeline; 1 6 2~ second water storage tank; The invention includes: a water scrubber. The water scrubber includes a scrubbing chamber, an inlet box, an inputting pipe, a scraper and an outputting pipe. The inlet box is disposed on the scrubbing chamber and has a first Spraying device and a retardant plate. The first spraying device and retardant plate are disposed in the inlet box, and the first spraying device is located on the retardant plate. 0632-10381twf2(4.5) ; AU0305034 ; Hawdong.ptc Page 3 1254653 Case No. 921277% Year Month 曰 _ Amendment _ IV. Abstract of Chinese Invention (Invention Name··Wet Washing Equipment) I 71~Fanye; II 0~ Washing chamber; 1 1 1~first washing section; I 1 2~second washing section; II 3~third spraying device; 11 4~first filtering device; 11 5~second filtering device; I 1 6~ Fourth spraying device; II 7 to third filtering device; 11 8 to fifth spraying device; 11 9 to fourth filtering device; 1 2 0 to inlet combination; 1 2 1 to first spraying device; 1 2 2~ baffle; 1 2 3~ support plate; 6. English abstract (invention name: Water scrubber) inputting pipe is connected to the inlet box. The scraper is disposed in the inputting pipe. The output is i ng pipe is connected to The scrubbing chamber and has a second spraying device disposed therein. 0632-10381twf2(4.5) ; AU0305034 ; Hawdong.ptc Page 4 1254653 Case No. 92127756_年月日日 _ IV. Summary of Chinese Invention (Invention Name: Wet Washing Equipment) 1 3 0~Inlet Pipeline; 1 4 0~ Scraper; 150~ outlet pipe; 1 5 1~ second spray device; 1 7 0~ exhaust fan; 1 8 0~ motor; 1 9 0~ jet device. Sixth, English invention summary (invention name: Water scrubber) 0632-10381twf2(4.5) ; AU0305034 ; Hawdong.ptc Page 5