CN212348265U - Spray type acid filtering water spraying device and spray type acid filtering water spraying system - Google Patents
Spray type acid filtering water spraying device and spray type acid filtering water spraying system Download PDFInfo
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- CN212348265U CN212348265U CN202020975015.0U CN202020975015U CN212348265U CN 212348265 U CN212348265 U CN 212348265U CN 202020975015 U CN202020975015 U CN 202020975015U CN 212348265 U CN212348265 U CN 212348265U
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Abstract
The embodiment of the utility model provides a waste gas filtration technical field among the semiconductor chip manufacturing process particularly, relates to a fountain acid water leaching equipment and fountain acid water leaching system. The spray type acid filtering water spraying device comprises a box body, an air inlet pipeline, an air exhaust pipeline and a spray piece. Wherein, be provided with the division board that separates the cavity for air inlet chamber and exhaust chamber in the cavity of box, and have the clearance between the diapire of division board and box. The air inlet pipeline is communicated with the air inlet cavity, the air exhaust pipeline is communicated with the air exhaust cavity, and the spraying piece extends into the air inlet cavity from the top wall of the box body and is positioned between the air inlet and the bottom wall of the box body. Therefore, the acid gas entering the air inlet cavity through the air inlet pipeline can be dissolved by the water mist sprayed by the spraying piece, so that the acid gas is filtered, and the external emission of the acid gas is reduced.
Description
Technical Field
The embodiment of the utility model provides a waste gas filtration technical field among the semiconductor chip manufacturing process particularly, relates to a fountain acid water leaching equipment and fountain acid water leaching system.
Background
Etch cleaners are used to clean chips in semiconductor chip manufacturing processes. Taking an N + type cleaning machine as an example, a nitric acid solvent is generally used to clean the chip. When the chip is cleaned, a large amount of acid gas released by nitric acid is discharged to the outside through an exhaust pipeline, so that the environment is polluted and the health of people is influenced.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a fountain acid water leaching equipment and fountain acid water leaching system separates the box for the intake chamber and the exhaust chamber of intercommunication each other and sets up in the intake chamber and spray the piece through the division board, can make and spray a spun water smoke and dissolve the sour gas that gets into the intake chamber through the intake stack to the realization is to the filtration of sour gas, with the external emission of reduction sour gas.
In a first aspect, a spray type acid filtering water spraying device is provided, which comprises: the device comprises a box body (1), an air inlet pipeline (2), an air outlet pipeline (3) and a spraying piece (4);
a partition plate (12) is arranged in the cavity of the box body (1) and divides the cavity into an air inlet cavity (111) and an air exhaust cavity (112), a gap (14) is formed between the partition plate (12) and the bottom wall (131) of the box body (1), and the air inlet cavity (111) is communicated with the air exhaust cavity (112) through the gap (14);
the air inlet pipeline (2) is communicated with the air inlet cavity (111) through an air inlet (1331) formed in a first side wall (133) of the box body (1), and the air outlet pipeline (3) is communicated with the air outlet cavity (112) through an air outlet (1341) formed in a second side wall (134) of the box body (1); wherein the first sidewall (133) is opposite the second sidewall (134);
the spray piece (4) extends into the air inlet cavity (111) from the top wall (132) of the box body (1) and is positioned between the air inlet (1331) and the bottom wall (131).
Optionally, the water draining device further comprises a water draining pipeline (5), wherein the water draining pipeline (5) is communicated with the cavity through a water draining port (1311) arranged on the bottom wall (131).
Optionally, the spray piece (4) comprises a connecting duct (41) and a spray duct (42);
the connecting pipeline (41) extends into the air inlet cavity (111) from the top wall (132) of the box body (1);
the spraying pipeline (42) is arranged in the air inlet cavity (111) and is communicated with the connecting pipeline (41), and the spraying pipeline (42) is positioned between the air inlet (1331) and the bottom wall (131);
each spraying pipeline (42) is provided with a plurality of nozzles (421) distributed at intervals.
Optionally, there are two of said showers (4);
the two spraying pipelines (42) are parallel to each other, and the nozzles (421) on the two spraying pipelines (42) spray water mist to form intersected water mist below the air inlet (1331).
Optionally, the spray nozzle (421) is detachably connected to the spray pipe (42).
Optionally, the partition plate (12) is fixed to the top wall (132) and extends toward the bottom wall (131) to divide the cavity into two parts, namely the air inlet cavity (111) and the air outlet cavity (112).
Optionally, the air outlet (1341) is provided with a filter (1342) for filtering water mist discharged into the air outlet duct (3).
Optionally, the device also comprises a valve (6) for controlling the spraying part (4) to spray water mist, and the valve (6) is installed at a position where the spraying part (4) is positioned outside the box body (1).
Optionally, one end of the exhaust duct (3) far away from the box body (1) is provided with a fan for extracting air in the exhaust cavity (112) through the exhaust duct (3).
In a second aspect, the utility model also provides a spray type acid filtering water spraying system, which comprises a chip etching cleaning machine and the spray type acid filtering water spraying device (100); the spray type acid filtering water spraying device (100) is communicated with a cleaning chamber where the chip etching cleaning machine is located, and the spray type acid filtering water spraying device (100) is used for filtering acid gas generated when the chip etching cleaning machine is used for etching and cleaning a chip in the cleaning chamber.
To sum up, the utility model discloses implement the fountain acid water filtering water drenches device and the fountain acid water filtering water drenches system that provides, can make and spray a spun water smoke and dissolve the sour gas that gets into the air inlet chamber through the intake stack to the realization is to the filtration of sour gas, with the external emission of reduction sour gas.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a spray-type acid water leaching device provided by an embodiment of the present invention.
Fig. 2 is a schematic view of a first viewing angle of the spray-type acid filtration water spraying device provided by the embodiment of the present invention.
Fig. 3 is a schematic view of a usage status of the spray type acid water leaching device provided by the embodiment of the present invention.
Fig. 4 is a schematic structural view of the spraying member according to the embodiment of the present invention.
Icon:
100-a spray type acid filtering water spraying device;
1-a box body; 111-an air inlet cavity; 112-an exhaust cavity; 12-a partition plate; 131-a bottom wall; 1311-a drain port; 132-a top wall; 133-a first sidewall; 1331-an air inlet; 134-a second sidewall; 1341-an air outlet; 1342-a filter; 14-gap;
2-an air inlet pipeline;
3-an exhaust duct;
4-spraying parts; 41-connecting a pipeline; 42-a spray pipe; 421-a nozzle;
5-a drainage pipeline;
6-valve.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings in the embodiments of the present invention are combined to clearly and completely describe the technical solutions in the embodiments of the present invention, and obviously, the described embodiments are only a part of the embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, unless otherwise expressly specified or limited, the terms "disposed," "connected," and "connected" are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1 and fig. 2, the spray-type acid filtering water spraying apparatus 100 provided by the present invention may include a box 1, an air inlet pipe 2, an air outlet pipe 3 and a spraying member 4. The air inlet structure comprises a box body 1, wherein a partition plate 12 is arranged in a cavity of the box body 1 and divides the cavity into an air inlet cavity 111 and an air outlet cavity 112, a gap 14 exists between the partition plate 12 and the bottom wall 131 of the box body 1, and the air inlet cavity 111 is communicated with the air outlet cavity 112 through the gap 14.
Further, the air inlet duct 2 is communicated with the air inlet cavity 111 through an air inlet 1331 formed on the first side wall 133 of the box body 1, and the air outlet duct 3 is communicated with the air outlet cavity 112 through an air outlet 1341 formed on the second side wall 134 of the box body 1. In this embodiment, the first sidewall 133 is opposite to the second sidewall 134.
The spray piece 4 extends into the air inlet chamber 111 from the top wall 132 of the box body 1 and is located between the air inlet 1331 and the bottom wall 131. The spraying member 4 is used for spraying water mist, so that the acid gas entering the air inlet cavity 111 through the air inlet 1331 is dissolved into the water mist, and the acid gas is filtered. Therefore, the discharge amount of acid gas from the exhaust pipeline can be reduced, and the pollution to the environment and the influence on personnel are reduced.
In this embodiment, the material of the box 1 and the partition plate 12 may be transparent Polyvinyl chloride (PVC), which is convenient for the whole sprinkling type acid filtering water sprinkling device 100 to observe the sprinkling member 4 inside the box and the sprinkling state thereof during the operation process, so as to timely maintain the sprinkling member 4 when the sprinkling member 4 fails.
With reference to fig. 2, the water spray device 100 may further include a water discharge pipe 5, wherein the water discharge pipe 5 is connected to the cavity through a water discharge hole 1311 formed in the bottom wall 131. The water discharge pipe 5 is used for discharging the liquid dissolved with the acid gas. In this embodiment, an alkaline material may be disposed in the water discharge pipeline 5 to facilitate acid-base neutralization of acid gas in the water mist. Further, the box body 1 is communicated with the outside only through the air inlet pipeline 2, the air outlet pipeline 3 and the water outlet pipeline 5. This ensures that the acid gas in the tank 1 does not leak out.
Please refer to fig. 3, which is a schematic diagram illustrating a principle of the spray type acid leaching apparatus 100. Wherein, the mixed gas of air and sour gas passes through air inlet pipe 2 and gets into air inlet chamber 111, and the water smoke that sprays 4 that sets up in air inlet chamber 111 dissolves and filters the sour gas. Further, the air is discharged through the exhaust duct 3 after flowing to the exhaust chamber 112. By arranging the spraying piece 4 at the lower part of the air inlet 1331 and arranging the partition plate 12 in the cavity of the box body 1, the flow direction of the acid gas in the box body 1 can be changed, so that the acid gas is fully contacted with the water mist, and the filtering efficiency of the acid gas is improved.
Referring to fig. 3 and 4, the spray member 4 includes a connecting pipe 41 and a spray pipe 42. The connecting duct 41 extends from the top wall 132 of the cabinet 1 into the air inlet chamber 111. The spraying pipe 42 is disposed in the air inlet cavity 111 and is communicated with the connecting pipe 41, and the spraying pipe 42 is located between the air inlet 1331 and the bottom wall 131.
In this embodiment, each of the shower pipes 42 is provided with a plurality of spaced nozzles 421 as shown in fig. 4. In an alternative embodiment, the spraying member 4 is two, two spraying pipes 42 are parallel to each other, and the nozzles 421 on the two spraying pipes 42 spray water mist to form a converged water mist under the air inlet 1331. Through the design, the area of sprayed water mist can be increased, so that the contact surface of the water mist and the acid gas is increased, and the filtering efficiency of the acid gas is improved.
In another alternative embodiment, the spray nozzles 421 are removably coupled to the shower pipe 42. In this way, the nozzle 421 can be repaired or replaced in time when it fails. Optionally, the spray type acid filtration water spraying device 100 further comprises a valve 6 for controlling the spray piece 4 to spray water mist, and the valve 6 is installed at a position where the spray piece 4 is located outside the box body 1.
In another example, the partition plate 12 is fixed to the top wall 132 and extends toward the bottom wall 131 to divide the cavity into two parts, i.e., the air inlet cavity 111 and the air outlet cavity 112. Therefore, the flow direction of the mixed gas entering the air inlet cavity 111 through the air inlet pipeline 2 can be changed through the partition plate 12, so that the mixed gas flows to form intersected water mist below the air inlet 1331, and the acid gas in the mixed gas is filtered.
In a possible embodiment, an end of the exhaust duct 3 away from the box body 1 is provided with a fan for extracting air in the exhaust cavity 112 through the exhaust duct 3. Further, the exhaust port 1341 may further be provided with a filtering member 1342 for filtering water mist discharged into the exhaust duct 3. Therefore, the phenomenon that water vapor enters the exhaust pipeline 3 to corrode the fan can be avoided.
On the basis, the spraying type acid filtering water spraying system comprises the chip etching cleaning machine and the spraying type acid filtering water spraying device 100. The spray type acid filtering water spraying device 100 is communicated with a cleaning chamber where the chip etching cleaning machine is located, and the spray type acid filtering water spraying device 100 is used for filtering acid gas generated when the chip etching cleaning machine is used for etching and cleaning a chip in the cleaning chamber.
To sum up, the embodiment of the utility model provides a fountain acid water leaching equipment and fountain acid water leaching system. The spray type acid filtering water spraying device comprises a box body, an air inlet pipeline, an air exhaust pipeline and a spray piece. Wherein, be provided with the division board that separates the cavity for air inlet chamber and exhaust chamber in the cavity of box, and have the clearance between the diapire of division board and box. The air inlet pipeline is communicated with the air inlet cavity, the air exhaust pipeline is communicated with the air exhaust cavity, and the spraying piece extends into the air inlet cavity from the top wall of the box body and is positioned between the air inlet and the bottom wall of the box body. Therefore, the acid gas entering the air inlet cavity through the air inlet pipeline can be dissolved by the water mist sprayed by the spraying piece, and the acid gas is filtered to reduce the external emission of the acid gas.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The utility model provides a fountain acid water leaching equipment, its characterized in that includes: the device comprises a box body (1), an air inlet pipeline (2), an air outlet pipeline (3) and a spraying piece (4);
a partition plate (12) is arranged in the cavity of the box body (1) and divides the cavity into an air inlet cavity (111) and an air exhaust cavity (112), a gap (14) is formed between the partition plate (12) and the bottom wall (131) of the box body (1), and the air inlet cavity (111) is communicated with the air exhaust cavity (112) through the gap (14);
the air inlet pipeline (2) is communicated with the air inlet cavity (111) through an air inlet (1331) formed in a first side wall (133) of the box body (1), and the air outlet pipeline (3) is communicated with the air outlet cavity (112) through an air outlet (1341) formed in a second side wall (134) of the box body (1); wherein the first sidewall (133) is opposite the second sidewall (134);
the spray piece (4) extends into the air inlet cavity (111) from the top wall (132) of the box body (1) and is positioned between the air inlet (1331) and the bottom wall (131).
2. The spray acid leaching water spray device of claim 1, further comprising a drain pipe (5), wherein the drain pipe (5) is in communication with the cavity through a drain opening (1311) provided in the bottom wall (131).
3. The sprinkling acid leaching device according to claim 1, wherein the sprinkling member (4) comprises a connecting duct (41) and a sprinkling duct (42);
the connecting pipeline (41) extends into the air inlet cavity (111) from the top wall (132) of the box body (1);
the spraying pipeline (42) is arranged in the air inlet cavity (111) and is communicated with the connecting pipeline (41), and the spraying pipeline (42) is positioned between the air inlet (1331) and the bottom wall (131);
each spraying pipeline (42) is provided with a plurality of nozzles (421) distributed at intervals.
4. The sprinkling acid leaching device according to claim 3, wherein the number of said sprinkling members (4) is two;
the two spraying pipelines (42) are parallel to each other, and the nozzles (421) on the two spraying pipelines (42) spray water mist to form intersected water mist below the air inlet (1331).
5. The apparatus for the sprinkling acid leaching according to claim 3, wherein the spray nozzle (421) is detachably connected to the sprinkling pipe (42).
6. The showering acid leaching device according to claim 1, wherein the partition plate (12) is fixed to the top wall (132) and extends in the direction of the bottom wall (131) to divide the cavity into two parts, namely the air inlet chamber (111) and the air outlet chamber (112).
7. The shower-type acid water leaching device according to claim 1, wherein the air outlet (1341) is provided with a filter (1342) for filtering water mist discharged into the air outlet duct (3).
8. The apparatus for showering acid leaching according to claim 1, further comprising a valve (6) for controlling the spray of water mist by said spray member (4), said valve (6) being mounted at a position of said spray member (4) outside said tank (1).
9. The spray type acid water leaching device according to claim 1, wherein a fan for extracting air in the exhaust cavity (112) through the exhaust duct (3) is disposed at one end of the exhaust duct (3) away from the box body (1).
10. A spray acid leaching water system comprising a chip etching cleaning machine and a spray acid leaching water device (100) according to any one of claims 1 to 9;
the spray type acid filtering water spraying device (100) is communicated with a cleaning chamber where the chip etching cleaning machine is located, and the spray type acid filtering water spraying device (100) is used for filtering acid gas generated when the chip etching cleaning machine is used for etching and cleaning a chip in the cleaning chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020975015.0U CN212348265U (en) | 2020-06-02 | 2020-06-02 | Spray type acid filtering water spraying device and spray type acid filtering water spraying system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020975015.0U CN212348265U (en) | 2020-06-02 | 2020-06-02 | Spray type acid filtering water spraying device and spray type acid filtering water spraying system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212348265U true CN212348265U (en) | 2021-01-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020975015.0U Active CN212348265U (en) | 2020-06-02 | 2020-06-02 | Spray type acid filtering water spraying device and spray type acid filtering water spraying system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212348265U (en) |
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2020
- 2020-06-02 CN CN202020975015.0U patent/CN212348265U/en active Active
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