TWM621622U - Water catalyst filtration device - Google Patents

Abstract

The present invention provides a water catalyst filter device, which includes: an upper casing and a lower casing, a water removal device and a sprinkler device are arranged inside the upper casing, and the sprinkler device is arranged at intervals on the water removal device A plurality of sprinklers are arranged below the sprinkler, the lower casing is arranged below the upper casing and communicates with the upper casing, an air inlet is arranged below the lower casing, and the lower casing is One inner side is provided with a water shower assembly; the device is designed with the combination of the upper casing and the lower casing to facilitate the replacement of the water shower assembly and further reduce the maintenance cost of the water catalyst filter device.

Description

Water catalyst filter device

This creation is about a water catalyst filter device, especially a modular design water catalyst filter device.

As the size of semiconductor devices shrinks, the control and monitoring methods of gaseous molecular contaminants (AMCs) have also received increasing attention. In order to prevent the electrical properties of electronic products from being affected, the semiconductor and wafer manufacturing processes are placed in a strictly controlled environment, that is, a clean room. Conventional clean room air quality control mainly focuses on particles, airflow and temperature and humidity; however, in recent years, the semiconductor industry has begun to rethink the definition of so-called clean room. As the volume of semiconductors shrinks, the effects of electrostatic damage and gaseous molecular pollutants are becoming more and more obvious, and devices for removing gaseous molecular pollutants are also gradually entering the market.

Among them, devices using water spray materials or chemical filters are the common equipment for removing gaseous molecular pollutants. Gaseous molecular pollutants, because chemical filters are disposable materials, and their cost is high. Therefore, in recent years, when dealing with water-soluble chemicals, the industry has gradually turned to water washing for filtration; in practical experience, water washing devices need to be based on the air volume. Depending on the removal efficiency, plan different amounts of filler material and water volume.

Although the water-washing and showering material is a material that can be used for a long time, it is still recommended to replace it according to the environmental concentration or water-washing conditions. When the showering material of the conventional water-washing device needs to be replaced, it is usually necessary to dismantle the entire device. Replacing the water shower material requires too many parts to be disassembled, which not only takes a long time, but also causes damage to the device. Therefore, the industry needs a water washing device that can be modularized.

In view of the above-mentioned problems of the prior art, the present invention provides a water catalyst filter device, which is connected with an upper casing and a lower casing, and a water removal device and a water sprinkler are arranged inside the upper casing, and the lower casing is provided with a water removing device and a water sprinkler. The inner side of the body is equipped with a water spray material. The modular design of the upper and lower shells of this device can meet different needs, and at the same time, it is convenient to replace the water spray material, water removal device and other parts, and further reduce the cost of device maintenance.

One of the purposes of the present invention is to provide a water catalyst filter device, the upper casing and the lower casing are connected in communication, and a water removing device and a water sprinkler are arranged inside the upper casing, and a water spraying material is arranged inside the lower casing , Using the modular design of the upper and lower shells of this device, it can meet different needs, and at the same time, it is convenient to replace parts such as water spray materials, and further reduce the cost of device maintenance.

In order to achieve the above-mentioned objects and effects, the present invention provides a water catalyst filter device, which includes: an upper casing and a lower casing, an air outlet is arranged above one of the upper casings, and an air outlet of the upper casing is provided. An inner side is provided with a water removal device and a sprinkler device, the sprinkler devices are arranged at intervals below one of the water removal devices, a plurality of sprinklers are arranged below one of the sprinkler devices, and the lower casing is arranged on the upper casing Below one of the lower casings is connected to the upper casing, an air inlet is arranged below one of the lower casings, and a water shower assembly is arranged inside one of the lower casings. The water material includes a plurality of plates, the water spray materials are arranged overlapping each other, and the plates of the water shower materials are arranged correspondingly and cross each other; the modular design of the water catalyst filter device with this structure is convenient for parts The replacement operation further reduces the cost of device maintenance.

In one embodiment of the present invention, a water removing device is further included, wherein the water removing device is a water curtain or a dehumidifier.

In an embodiment of the present invention, a mesh element is further included, wherein a surface area is disposed above one of the shower components, and a spray area of each of the spray heads is greater than one-tenth of the surface area.

。 In an embodiment of the present invention, a spray angle of each of the spray heads is θ , a spray width of each of the spray heads is L, and a distance between the shower assembly and the spray heads is H, and satisfy

.

In an embodiment of the present invention, a diagonal width of the lower casing is less than twice the spraying width.

In an embodiment of the present invention, wherein the fluid flows to the shower assembly, a gas enters through the air inlet, passes through the shower assembly, and then passes through the sprinkler device and the water removal device in sequence, and finally the The gas flows out from the air outlet. .

In an embodiment of the present invention, a plurality of channels are respectively formed between the plates, and the fluid and the gas pass through the channels.

In an embodiment of the present invention, the plates are in a wave-like structure.

In order to enable your reviewers to have a further understanding and understanding of the features of this creation and the effects achieved, I would like to provide examples and accompanying descriptions, which are as follows:

In view of the above-mentioned problems of the prior art, the present invention is to provide a water removal device and a sprinkler device on an inner side of an upper casing, the sprinkler device is arranged below one of the water removal devices at intervals, and the water sprinkler A plurality of spray heads are arranged below one of the devices for spraying fluid, the lower casing is communicated and arranged below one of the upper casings, and a water shower assembly is arranged on the inner side of one of the lower casings to receive the water sprinkler by the water shower assembly The fluid ejected from the device makes it contact with the air passing through it; this device is used to facilitate the replacement of the water shower assembly, further reducing the maintenance cost of the water catalyst filter device.

Please refer to FIG. 1 , which is a schematic diagram of the structure and fluid action of an embodiment of the invention. As shown in the figure, this embodiment is a water catalyst filter device 1 , which includes an upper casing 10 and a lower casing 20 ; In this embodiment, an air outlet 11 is arranged above one of the upper casings, the lower casing 20 is arranged below one of the upper casings 10, and communicates with the upper casing 10, and the lower casing 20 An air inlet 21 is disposed below one of the two, so that the fluid can flow through the inner side of the upper casing 10 and the lower casing 20 .

Referring to FIG. 1 again, as shown in the figure, in this embodiment, a water removing device 12 and a water spraying device 14 are arranged on an inner side of the upper casing 10 , and the water removing device 14 is arranged on the water removing device 12 . Below one of the sprinklers 14, a plurality of sprinklers 142 are disposed to spray a fluid A1, and a sprinkler assembly 22 is disposed inside one of the lower casings 20, and the sprinkler assembly 22 receives the sprinklers 142 to spray the fluid A1.

Referring to FIG. 1 and FIG. 2 again, FIG. 2 is a schematic diagram of another fluid actuation according to an embodiment of the invention. As shown in the figures, in this embodiment, the sprinklers 142 of the sprinkler 14 The fluid A1 is sprayed to the water shower assembly 22, the fluid A1 passes through the water shower assembly 22, and a gas A2 enters through the air inlet 21, and the gas A2 passes through the water shower assembly 22, the gas A2 in sequence After passing through the sprinkler device 14 and the water removal device 12 , the gas A2 finally flows out from the air outlet 11 .

Continuing the above, in this embodiment, the water removing device 12 is a water curtain or a dehumidifier, but this embodiment is not limited to this, when the water mist generated by the spray heads 142 flows upward with the gas A2 , the fluid A1 is removed by the water removal device 12 to prevent the fluid A1 from affecting the subsequent pipeline.

Please refer to Fig. 3 and Fig. 4, Fig. 3 is an enlarged schematic view of the structure of an embodiment of the invention, and Fig. 4 is a top sectional view of an embodiment of the invention. As shown in the figure, in this embodiment , there is a surface area 221 above one of the shower components 22. When the spray heads 142 spray the fluid A1, a water mist will be formed. The bottom of the water mist has a spray area 144. The spraying area 144 is larger than one tenth of the surface area 221 of the shower assembly 22 , that is, the surface area 221 of the shower assembly 22 is less than ten times the spraying area 144 , so as to prevent the water mist from the sprinklers 142 from being unable to cover The shower assembly 22 affects the efficiency of filtration.

； 其中，該噴灑幅度L係該噴灑面積144之直徑；當已知該些個噴頭142之該噴角 θ以及該噴灑幅度L時，即可算得該淋水組件22與該些個噴頭142之間之該距離為H，並以該距離H設置該淋水組件22。 Continuing from the above, in this embodiment, a spray angle of the spray heads 142 for spraying the fluid A1 is θ , a spray width of each of the spray heads 142 is L, the shower assembly 22 and the One of the distances between the nozzles 142 is H, and satisfies the formula (1); The formula (1):

; Wherein, the spraying width L is the diameter of the spraying area 144; when the spraying angle θ of the spraying heads 142 and the spraying width L are known, the distance between the shower assembly 22 and the spraying heads 142 can be calculated. The distance between them is H, and the shower assembly 22 is set at the distance H.

Continuing from the above, in this embodiment, the inner side of the lower case 20 has a diagonal width W, and the diagonal width W is the widest distance between the inner side of the lower case 20 . Therefore, in this embodiment, the diagonal width W needs to be less than twice the spraying width L, so as to avoid that the water mist of the spray heads 142 cannot completely cover the inner side of the lower casing 20 and affect the filtering efficiency.

Please refer to FIG. 5, which is a schematic structural diagram of a water shower assembly according to an embodiment of the invention. As shown in the figure, in this embodiment, the water shower assembly 22 includes a plurality of water shower materials 222. The material 222 includes a plurality of plate parts 224, the water shower materials 222 are arranged overlapping each other, and the plate parts 224 of the water shower materials 222 are arranged corresponding to each other and cross each other, and the plates 224 in different directions The arrangement and combination of the plates 224 can increase the fluid exchange efficiency and improve the filtration efficiency.

Continuing from the above, in this embodiment, the plates 224 are in a wave-like structure, and the wave-like structure can further increase the contact area between the plates 224 and the fluid A1, and make the fluid A1 adhere to the On the wave-like structure of the plates 224, the mixing efficiency of the fluid A1 and the gas A2 is improved.

Continuing from the above, in this embodiment, the water shower materials 222 are a water shower filler, and a plurality of channels 226 are formed between the plates 224 respectively, and the fluid A1 and the gas A2 pass through the channels 226, and mix them. The spraying materials 222 are used to receive and spray the liquid (such as water) sprayed by the sprinkler 14. After many times, they are scattered into tiny water droplets or water films to increase the contact of the liquid. area, prolong the contact time between liquid and gas, and ensure that the passing gas can be effectively exchanged with the liquid.

A water catalyst filter device 1 of the present embodiment utilizes the upper casing 10 and the lower casing 20 which are detachable from each other to modularize the water catalyst filter device 1. If the water shower assembly 22 needs to be replaced When the water removal device 12 needs to be replaced, only the upper housing 10 needs to be removed correspondingly, which greatly reduces the time and manpower required for maintenance.

To sum up, the present invention provides a water catalyst filter device, which utilizes the modular design of the upper casing and the lower casing, and a water removing device and a water sprinkler are arranged inside the upper casing, and are arranged inside the lower casing. When the water spray material needs to be replaced, the lower shell should be removed. When the water removal device and sprinkler device need to be replaced, the upper shell should be removed. The replacement of the corresponding parts will further reduce the cost of device maintenance and solve the problem of conventional water washing. When the sprinkler material of the device needs to be replaced, it is usually necessary to dismantle the whole device before the sprinkler material can be replaced. The number of parts to be disassembled is too many, which takes a long time and easily leads to the problem of damage to the device.

Therefore, this creation is indeed novel, progressive and available for industrial use, and it should meet the requirements for patent application in my country's patent law.

However, the above description is only an embodiment of the present creation, and is not intended to limit the scope of implementation of the present creation. Therefore, all equivalent changes and modifications made in accordance with the shape, structure, characteristics and spirit described in the patent scope of the present creation, All should be included in the scope of the patent application for this creation.

1: Water catalyst filter device 10: Upper shell 11: Air outlet 12: Water removal device 14: Sprinkler device 142: Sprinkler 144: Spray area 20: Lower shell 21: Air inlet 22: Water shower assembly 221: Surface area 222: water spray material 224: plate 226: channel A1: fluid A2: gas H: distance L: spray width W: diagonal width θ : spray angle

Figure 1: It is a schematic diagram of the structure and fluid action of an embodiment of the creation; Figure 2: It is a schematic diagram of another fluid actuation in an embodiment of the present creation; Figure 3: It is an enlarged schematic view of the structure of an embodiment of the creation; Figure 4: It is a top sectional view of an embodiment of the present invention; and Figure 5: It is a schematic structural diagram of a shower assembly according to an embodiment of the present invention.

1: Water catalyst filter device

10: Upper shell

11: Air outlet

12: Water removal device

14: Sprinklers

142: Sprinkler

20: Lower shell

21: air inlet

22: Water shower components

A1: Fluid

Claims (8)

A water catalyst filter device, comprising: an upper casing, an air outlet is arranged above it, a water removing device and a watering device are arranged on the inner side of the upper casing, the watering device is arranged below the water removing device, and a plurality of water sprinklers are arranged below the watering device a sprinkler for spraying a liquid; and A lower casing, which is detachably arranged below the upper casing and communicates with the upper casing, an air inlet is arranged below the lower casing, and a water shower assembly is arranged on the inner side of the lower casing. The assembly includes a plurality of water shower materials, each water shower material includes a plurality of plates, the water shower materials are arranged overlapping each other, and the plates of the water shower materials are arranged correspondingly and cross each other. The water catalyst filtering device according to claim 1, wherein the water removing device is a water curtain or a dehumidifier. The water catalyst filtering device according to claim 1, wherein the spraying area of each spray head for spraying the liquid is greater than one tenth of the surface area above the shower assembly. The water catalyst filtering device according to claim 3, wherein the spray angle of each spray head for spraying the liquid is θ , the spray width is L, the distance between the water spray component and each spray head is H, and the

. The water catalyst filtering device according to claim 4, wherein a diagonal width of the lower casing is less than twice the spraying width. The water catalyst filtering device as claimed in claim 1, wherein the fluid flows to the water shower assembly, and a gas enters through the air inlet, passes through the water shower assembly, and then passes through the water sprinkler and the removal device in sequence. water device, and finally the gas flows out from the air outlet. The water catalyst filter device according to claim 6, wherein a plurality of channels are formed between the plurality of plate members of each water shower material, and the fluid and the gas pass through the channels. The water catalyst filtering device according to claim 1, wherein the plates are in a wavy structure.

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