1253960 A7 B7 五、發明説明（1) (發明所屬的技術領域） 本發明是關於一種使用於液晶顯示基板、電發光（EL) 元件等裝置的除去附著於玻璃基板的異物的技術。 (請先閱讀背面之注意事項再填寫本頁) (習知技術） 習知，製造使用於液晶顯不基板等的玻璃基板之際， 在玻璃的表面處在高溫時，浮游於環境中的玻璃粒子等的 異物（碎玻璃）附著於表面，若如放3、4天的長時間，則 會黏著。 又，在製作液晶顯示基板，使用於將液晶材料放進兩 枚玻璃基板之間進行密封時的封閉劑樹脂有附著於玻璃基 板的表面的情形。 此種碎玻璃或樹脂等異物是會黏著於玻璃面，則很難 以流水、刷洗淨或超音波洗淨等加以除去。 近年來也被要求除去2至2//m的異物，提案用以除去 如上述碎玻璃或樹脂等異物的各種方法。 經濟部智慧財產局員工消費合作社印製 例如抵接切削器的刀刃於玻璃面的每一面，經由移動 玻璃面上俾除去附著的異物的方法。但是，在該方法中， 當將切削器的刀刃抵接於玻璃面時，或移動玻璃面上時， 會有傷及玻璃表面而成爲不良產品的情形。 又，在該方法中，每一面地進行異物的除去之故，因 而除去其中一方的面的異物之後，在除去相反側的面的異 物時，有異物再附著的問題。 作爲其他方法，有使用所謂硏磨薄膜來除去玻璃面上 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -5- 1253960 A7 B7 五、發明説明（2) (請先閲讀背面之注意事項再填寫本頁) 的異物的方法。第8圖是表示使用硏磨薄膜帶的習知裝置 的一例者。該裝置是在內設硏磨薄膜帶23的硏磨頭20下 面構成有玻璃面24，藉由推壓部21將玻璃面24 —面施加 若干壓力一面抵接於玻璃基板1 〇表面，如第9圖所示，在 玻璃表面上一面移動玻璃頭20 —面除去玻璃面的異物者。 以捲取部22捲取帶23之故，因而玻璃面24是經常成爲全 新的面。 然而，在該裝置中，除了硏磨帶的更換變複雜之外， 硏磨頭20的重量也成爲大約40公斤重之故，因而載重對 於玻璃面過大，在厚度成爲〇.7mm以下的玻璃基板或液晶 顯示基板上施加高重量的硏磨頭的載重時，會有玻璃基板 破裂，或液晶顯示基板的液晶排列失去原形而成爲不良品 的問題。 又，如此地使用硏磨薄膜來除去玻璃面的異物的裝置 也是每一面地除去異物者，除了佔較多設備面積的問題之 外，還有硏磨其中一方的玻璃面，之後反轉另一單面進行 相同的硏磨之故，因而在被洗淨除去的玻璃面，會在相反 側的面的洗淨中再附著異物的大缺點問題。 經濟部智慧財產局員工消費合作社印製 (發明欲解決之課題） 鑑於如上的缺點問題，本發明之目的是在於提供一種 可將附著於玻璃基板的玻璃面的異物，不會傷及玻璃地加 以除去，且不會引起異物的再附著，同時也不佔場所的除 去附著於玻璃面的異物的技術。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -6- 1253960 A7 B7 五、發明説明（3) (解決課題所用之手段） (請先閱讀背面之注意事項再填寫本頁) 爲了達成上述目的，依照本發明提供一種附著於玻璃 面的異物的除去方法，屬於除去附著於玻璃基板或至少單 面以玻璃所構成的基板的玻璃面的異物的方法，其特徵爲: 在供給洗淨液之狀態下，在上述基板的兩面一面旋轉硏磨 機構的硏磨面一面加以接觸，同時將上述基板朝玻璃面方 向平行移動而兩面同時地除去上述玻璃面上的異物。 依照此種方法，即使有黏著於玻璃面的異物，也藉由 硏磨不會傷及玻璃面可確實地加以除去，而且兩面同時地 可除去異物之故，因而可確實地防止異物再附著，可作成 高品質的玻璃基板或液晶顯示基板。又在平行移動玻璃基 板之狀態下兩面同時地處理之故，因而生產性極高，同時也 不佔場所。 這時候，以40至500rpm旋轉硏磨機構的硏磨面較理 想，特別是作成100至500rpm更理想。 若以此種轉速旋轉硏磨面，則不會傷及玻璃面而可更 確實地除去兩面的異物。 經濟部智慧財產局員工消費合作社印製 又，作爲上述洗淨劑，使用水或界面活性劑含有液較 理想。 在本發明中，藉由硏磨機構的硏磨面進行異物除去之 故，因而並不一定需要硏磨劑，使用水或界面活性劑含有 液就可以確實地除去異物。 將上述洗淨液供給10至300CC於每一硏磨面較理想。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 1253960 A7 B7 五、發明説明（4) 作成此種供給量，則不會傷及玻璃地可更確實地除去兩 面的異物。 又，再包括：對於上述基板以水洗淨液的過程，將洗 淨液加以氣體微粒子化並噴射的過程，照射紫外線的過程， 以純水進行超音波洗淨的過程，噴空氣加以乾燥的過程， 及以紅外線加以乾燥的過程中至少一個過程以上的過程較 理想。 在藉由硏磨同時地除去玻璃兩面的異物的過程，組合 如上述的過程，可連續地又有效率地進行異物的除去、洗 淨、沖洗、乾燥等。這時候，對於過程順序，依目的可加 以適當地變更、省略、或追加。 又，依照本發明，提供一種附著於玻璃面的異物的除 去裝置，屬於除去附著於玻璃基板或至少單面以玻璃所構 成的基板的玻璃面的異物的裝置，其特徵爲：具備至少平 行移動上述基板的基板移動機構，及硏磨基板的玻璃面的 硏磨機構，及將洗淨液供給於基板的洗淨液供給機構；上 述硏磨機構的玻璃面對向配置著，從上述洗淨液供給機構 供給洗淨液狀態下，一面旋轉上述硏磨機構的硏磨面，一 面使得基板的兩面接觸於該對向的硏磨面地藉由上述基板 移動機構朝玻璃面方向平行移動基板，能兩面同時地除去 上述玻璃面上的異物者。 依照此種裝置，即使有黏著於玻璃面的異物，也不會 傷及玻璃面可確實地加以除去，而且兩面同時地可除去異 物之故，因而可確實地防止異物再附著，可作成高品質的 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） (請先閱讀背面之注意事項再填寫本頁} -訂 經濟部智慧財產局員工消費合作社印製 -8 - 1253960 A7 B7 五、發明説明（5) 玻璃基板或液晶顯示基板。又，不必反轉坡璃，在平行移 動之狀態下兩面同時地可除去玻璃面的異物之故，因而具 有生產性較高，同時設置面積較小的優點。 作爲硏磨機構，可將摩擦薄膜、砂紙、或硏磨薄膜安 裝於圓形的圓盤以構成硏磨面者。 如此地將硏磨薄膜等安裝於圓盤者，則可簡單地構成， 或也可將硏磨面的表面粗糙度（硏磨材的粒度）配合目的 而簡單地更換，可確實地除去異物，同時可防止傷及玻璃 面。 這時候，上述摩擦薄膜、砂紙、或硏磨薄膜，經由面 扣具安裝於上述圓盤較理想。 硏磨薄膜等經由面扣具安裝於圓盤，則被賦予彈性， 可確實地防止傷及玻璃。又，具有容易更換的優點。 上述圓盤的直徑是30至70mm較理想。 若爲此種大小的圓盤，則對應於通常被使用的30至 1 5 0 0 m m的玻璃基板，不必更換圓盤可確實地除去玻璃面上 的異物。 又，上述玻璃面的表面粗糙度是0.1至10 // m較理想， 特別是1至1 0 // m更理想。 將硏磨面的表面粗糙度作成上述範圍，則可確實地除 去玻璃面上的異物，同時可確實地防止傷及玻璃面。又， 硏磨面的表面粗糙度是藉由硏磨面的硏磨材被調整者，而 作爲硏磨材使用上述範圍的粒度者就可以。 上述硏磨機構是在平行移動上述基板的方向，對於基板 本纸張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 【裝· 、11 經濟部智慧財產局員工消費合作社印製 -9 - 1253960 A7 B7 五、發明説明（6) 兩面交互地對向配置至少各兩列，且在基板的各面側配置成 錯開狀較理想。 (請先閱讀背面之注意事項再填寫本頁) 如此地配置硏磨機構，則可避免硏磨機構彼此間的干 擾，可將裝置構成小型，同時在基板通過所有硏磨機構時， 成爲基板兩面普遍地與硏磨機構的硏磨面接觸，而可均勻 地除去基板兩面的異物。 上述基板移動機構是包括對向配置的輥子，藉由以輥 子夾住上述基板進行旋轉而平行移動基板者較理想。 使用如此地對向配置的輥子，則在硏磨中基板不會朝 斜方向偏離，以所定速度可確實地平行移動。 上述洗淨液供給機構是由噴灑式噴嘴或設在上述硏磨 機構的硏磨面的孔供給洗淨液者，又，每一硏磨面供給10 至300CC的洗淨液者較理想。 如此地供給洗淨液，則對於各硏磨面可確實地供給所 定量的洗淨液，可確實地進行玻璃面的異物除去與防止傷 痕。 經濟部智慧財產局員工消費合作社印製 附著於上述玻璃面的異物的除去裝置，又具備：噴水裝 置，將洗淨液加以氣體微粒子化並進行噴射的裝置、紫外 線照射裝置、超音波洗淨裝置、氣刀、及紅外線乾燥裝置 中至少一種以上的裝置。 組裝如上述的各裝置，可連續地有效率地進行異物的 除去、洗淨、沖洗、乾燥等。 (發明之實施形態） 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 公釐） -10- 1253960 A7 B7 五、發明説明（7) 以下具體地說明本發明的實施形態，惟本發明並不被 限定於此些者。 (請先閱讀背面之注意事項再填寫本頁) 本案發明人等，針對於習知洗淨技術對於玻璃基板進 行實驗檢證，同時針對於防止異物的再附著的方法重複很 多實驗的結果，獲知在如習知地每一單面的除去方法中很 難防止異物的再附著。 如此，本案發明人等，考慮到兩面同時地除去附著於 玻璃面的碎玻璃或樹脂異物有效，而進行專心檢討之同時 也重複實驗之結果，發現了供給洗淨液之狀態下，在基板 兩面一面旋轉硏磨機構的硏磨面一面加以接觸，同時朝玻 璃面方向平行移動基板並兩面同時地除去玻璃面上的異物， 就可不會傷及玻璃而確實地除去異物，又可防止再附著異 物，而完成本案發明。 第1圖是槪略表示本發明的附著於玻璃面的異物的除 去裝置的一例者（A:俯視圖，B:前視圖）：第2圖是放大表 示該裝置的局部者。 經濟部智慧財產局員工消費合作社印製 該裝置1是具備：平行移玻璃基板的基板移動機構3， 及硏磨基板的玻璃面的硏磨機構2a、2b，及將洗淨液供給 於基板的洗淨液供給機構4。 基板移動機構是主要以輥子3所構成，一部分的輥子 是經由馬達（未圖示）可旋轉驅動，而可平行移動基板。 如第4圖所示，包括一部分被對向配置的輥子3a、3a’，而 藉由以該輥子3a、3a'夾住玻璃基板10並進行旋轉驅動，防 止基板10在硏磨中朝斜方向偏離而可確實地平行移動。如 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -11 - 1253960 A7 B7 五、發明説明（8 ) 此地構成夾持基板，具有可對應於處理各種尺寸基板的優 顚占。 (請先閱讀背面之注意事項再填寫本頁) 如第5圖所示，作爲硏磨機構，使用者在圓形的圓盤6 安裝硏磨薄膜7以構成硏磨面8者。作爲硏磨薄膜7，可使 用如在樹脂及布上塡充硏磨材（氧化鋁、氧化鈽等），並塗布 於薄膜後使之硬化者。 硏磨薄膜7是以兩面黏接帶被安裝於圓盤6也可以， 惟經由面扣具安裝於基板，則可具備若干彈性。又，該面 扣具是眾知一般作爲魔術帶（登記商標）者。如此地具有 彈性，就可不會傷及硏磨面而確實地除去異物。又，若使 用面扣具也具有容易更換硏磨薄膜的優點。 又，代替硏磨薄膜，也可使用如硏磨面被加工成具有 四角錘狀的微小突起的摩擦薄膜，或極小細孔眼的砂紙。 但是，硏磨面的表面粗糙度（硏磨材的粒度）變大，則有 傷及玻璃之虞，因此必須選擇可進行異物除去之同時，對 影響玻璃表面的品質的不會有傷痕者。 經濟部智慧財產局員工消費合作社印製 在第1圖的裝置1中，安裝硏磨薄膜7的基板6 (以下， 有時稱爲硏磨圓盤），在平行移動玻璃基板的方向對於基板 的兩面，交互地各兩列對向配置有上側硏磨圓盤2a與下側 硏磨圓盤2b，且基板的各面側（側彼此間，下側彼此間）的 兩列硏磨圓盤2a、2b是分別配置成錯開狀。 如此地配置硏磨圓盤2a、2b則可防止圓盤2a、2b彼此 間的接觸，同時在藉由輥子3平行移動的玻璃基板10的兩 面，可依次接觸硏磨薄膜7 (硏磨面8)，而在玻璃基板10 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -12- 1253960 A7 B7 五、發明説明（9 ) 通過所有4列的硏磨圓盤2a、2b時，玻璃基板1 0的所有兩 面成爲與硏磨薄膜7 (硏磨面8)接觸之狀態。 (請先閱讀背面之注意事項再填寫本頁) 又，圓盤2a、2b是可分別地控制者較理想，例如，每 一各圓盤，或每一各列地變更圓盤的旋轉方向或旋轉數也 可以。又，1列的圓盤數是任意，或列數在單面分別作爲3 以上也可以，例如使用表面粗糙度的不同硏磨薄膜，經粗 硏磨後進行粗硏磨也可以。 又，在第1圖裝置1中，作爲洗淨液供給機構5如第2 圖所示地在各硏磨圓盤2a、2b的附近配置有噴灑式噴嘴4 。如第3圖所示地，該噴灑式噴嘴4是設有複數孔5，在噴 嘴4內部，以泵壓送洗淨液，可將所定量的洗淨液供給於 各硏磨圓盤2a、2b與玻璃基板10之間。又，作爲洗淨液供 給手段，在硏磨圓盤2a、2b的中央設置孔，而從該孔可供 給洗淨液也可以。這時候，硏磨薄膜也成爲在中央設置孔 者，惟形成此種環狀形狀，也可得到充分的硏磨效果，而 可良好地精修加工玻璃基板的表面。 經濟部智慧財產局員工消費合作社印製 使用該裝置1來除去附著於玻璃面的異物，從噴灑式 噴嘴4供給洗淨液之狀態下，一面以所定轉速旋轉硏磨圓 盤2a、2b，一面能使玻璃基板10的兩面接觸於對向的硏磨 面8地藉由輥子3朝玻璃面方向平行移動玻璃基板1〇。如 此地玻璃基板10是藉由輥子3的旋轉朝玻璃面方向以所定 速度平行移動，而以玻璃基板1 〇的上面的一部分，下表面 的一部分，上表面剩餘部分，下表面的剩餘部分的順序， 所有兩面與硏磨面8接觸，而兩面同時地可確實地除去玻 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇X 297公釐） -13- 1253960 A7 B7 五、發明説明（10) 璃面上的異物。如此地兩面同時地處理，則可防止異物的 再附著，提高生產性，也可減小處理空間。 (請先閱讀背面之注意事項再填寫本頁) 又，如上述地使用硏磨薄膜來進行除去玻璃面上的異 物時，成爲極細傷痕發生的玻璃面，惟此種傷痕並不是會 影響品質者。又，也不會有強大載重施加於玻璃基板之故， 因而幾乎不會有玻璃基板破裂之虞。因此可精修加工成極 高品質的玻璃基板。 本發明的硏磨機構的硏磨面的表面粗糙度，洗淨液的 供給量等是適當設定就可以，惟本案發明人等爲了求得最 佳硏磨條件，對於硏磨薄膜的表面粗糙度；圓盤的旋轉數， 洗淨液的供給量，圓盤的大小等進行如下的實驗，發現了 最佳條件。 (1)有關於表面粗糙度的實驗 經濟部智慧財產局員工消費合作社印製 使用將表面粗糙度0.5至20// m的硏磨薄膜（硏磨材： 氧化鋁）使用面扣具安裝於直徑60mm的圓盤者，調查以 旋轉數300rpm的硏磨後的異物的除去效果及玻璃表面的傷 痕的發生狀況。將其結果表示於表1。又，評價是如下地進 行。 異物除去效果 〇：達成初期的目的，良好。 △:雖未達成初期的目的，惟可看出效果。 X :除去效果不充分。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -14- 1253960 A7 B7 五、發明説明（11) 玻璃表面的傷痕的發生 〇：未發生傷痕，良好。 △:雖未看到發生傷痕，惟量，大小均小。 X :看到發生傷痕，對品質有影響之虞。 [表1]1253960 A7 B7 V. EMBODIMENT OF THE INVENTION (1) The present invention relates to a technique for removing foreign matter adhering to a glass substrate, which is used in a liquid crystal display substrate, an electroluminescence (EL) device, or the like. (Please read the precautions on the back and fill out this page.) (Practical Technology) It is customary to manufacture glass that floats in the environment when the surface of the glass is at a high temperature when it is used for a glass substrate such as a liquid crystal display substrate. Foreign matter such as particles (broken glass) adheres to the surface, and if it is left for 3 or 4 days, it sticks. Further, when a liquid crystal display substrate is produced and used to seal a liquid crystal material between two glass substrates, the sealant resin adheres to the surface of the glass substrate. When such foreign matter such as broken glass or resin adheres to the glass surface, it is difficult to remove it by running water, brushing, or ultrasonic cleaning. In recent years, it has been proposed to remove foreign matter of 2 to 2/m, and various methods for removing foreign matter such as cullet or resin have been proposed. Ministry of Economic Affairs, Intellectual Property Bureau, Staff and Consumer Cooperatives Printed, for example, a method of removing the adhered foreign matter from the surface of the glass surface by a blade that abuts the cutter on each side of the glass surface. However, in this method, when the blade of the cutter is brought into contact with the glass surface or when the glass surface is moved, the glass surface may be damaged and the product may become a defective product. Further, in this method, since the foreign matter is removed on each side, the foreign matter on one of the faces is removed, and when the foreign matter on the opposite side is removed, there is a problem that the foreign matter reattaches. As another method, there is a so-called honing film to remove the paper surface. The Chinese National Standard (CNS) A4 specification (210X297 mm) -5-1253960 A7 B7 5. Inventive Note (2) (Please read the back first The method of refilling the foreign matter of this page. Fig. 8 is a view showing an example of a conventional apparatus using a honing film tape. In the apparatus, a glass surface 24 is formed on the lower surface of the honing head 20 on which the honing film tape 23 is provided, and the pressing surface 21 abuts the surface of the glass substrate 1 by applying a certain pressure to the glass surface 24, as in the first As shown in Fig. 9, the glass head 20 is moved on the surface of the glass to remove the foreign matter on the glass surface. Since the take-up portion 22 winds up the tape 23, the glass face 24 is often a completely new face. However, in this apparatus, in addition to the complicated replacement of the honing belt, the weight of the honing head 20 is also about 40 kg, so that the load is too large for the glass surface, and the glass substrate having a thickness of 〇.7 mm or less is used. When the load of the honing head having a high weight is applied to the liquid crystal display substrate, the glass substrate may be broken, or the liquid crystal alignment of the liquid crystal display substrate may be lost and may become a defective product. Further, the apparatus for removing foreign matter on the glass surface by using the honing film in this way also removes the foreign matter on each side, and in addition to the problem of occupying a large amount of equipment area, there is also a glass surface which is polished one side, and then reverses the other side. Since the same honing is performed on one side, the glass surface to be washed and removed has a problem of further adhesion of foreign matter to the surface of the opposite side. Printed by the Intellectual Property Office of the Ministry of Economic Affairs, the consumer consortium (the subject of the invention). In view of the above disadvantages, the object of the present invention is to provide a foreign matter that can adhere to the glass surface of the glass substrate without damaging the glass. It is removed, and does not cause re-adhesion of foreign matter, and does not occupy the technique of removing foreign matter adhering to the glass surface. This paper scale applies to China National Standard (CNS) A4 specification (210X 297 mm) -6- 1253960 A7 B7 V. Invention description (3) (Means for solving the problem) (Please read the note on the back and fill out this page. In order to achieve the above object, according to the present invention, there is provided a method for removing foreign matter adhering to a glass surface, and a method for removing foreign matter adhering to a glass substrate or a glass surface of a substrate composed of at least one surface of glass, characterized in that: In the state in which the cleaning liquid is supplied, the honing surface of the honing mechanism is rotated while being contacted on both surfaces of the substrate, and the substrate is moved in parallel in the glass surface direction to simultaneously remove foreign matter on the glass surface. According to this method, even if there is a foreign matter adhered to the glass surface, the glass surface can be surely removed by honing, and the foreign matter can be removed simultaneously on both sides, so that the foreign matter can be reliably prevented from reattaching. It can be made into a high quality glass substrate or liquid crystal display substrate. Further, the two sides are simultaneously processed in a state where the glass substrate is moved in parallel, so that the productivity is extremely high and it does not occupy a place. At this time, it is more desirable to rotate the honing surface of the honing mechanism at 40 to 500 rpm, especially at 100 to 500 rpm. When the honing surface is rotated at such a rotation speed, the foreign matter on both sides can be removed more reliably without damaging the glass surface. Printed by the Ministry of Economic Affairs, the Intellectual Property Office, and the Consumer Cooperatives. As the above-mentioned detergent, it is preferable to use water or a surfactant-containing liquid. In the present invention, since the foreign matter is removed by the honing surface of the honing mechanism, the honing agent is not necessarily required, and the foreign matter can be reliably removed by using water or the surfactant-containing liquid. It is preferable to supply the above-mentioned cleaning liquid to 10 to 300 cc on each of the honing surfaces. This paper scale applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm) 1253960 A7 B7 V. INSTRUCTIONS (4) When this supply is made, the foreign matter on both sides can be removed more reliably without damaging the glass. Further, the method further comprises the following steps: a process of washing the cleaning liquid with the water, and a process of irradiating the cleaning liquid with ultraviolet rays, supersonic cleaning with pure water, and drying with air. The process, and the process above at least one process in the process of drying by infrared rays, is preferred. In the process of simultaneously removing the foreign matter on both sides of the glass by honing, in combination with the above-described process, the removal, washing, rinsing, drying, and the like of the foreign matter can be continuously and efficiently performed. At this time, the order of the processes may be appropriately changed, omitted, or added depending on the purpose. Moreover, according to the present invention, there is provided an apparatus for removing a foreign matter adhering to a glass surface, which is characterized in that the apparatus for removing foreign matter adhering to a glass substrate or a glass surface of a substrate composed of at least one surface of glass is characterized in that at least parallel movement is provided. a substrate moving mechanism of the substrate, a honing mechanism for honing the glass surface of the substrate, and a cleaning liquid supply mechanism for supplying the cleaning liquid to the substrate; the glass of the honing mechanism is disposed facing each other, and the cleaning is performed from the cleaning When the liquid supply mechanism supplies the cleaning liquid, the honing surface of the honing mechanism is rotated, and both surfaces of the substrate are brought into contact with the opposing honing surface, and the substrate is moved in parallel in the glass surface direction by the substrate moving mechanism. It is possible to remove foreign matter on the above glass surface at the same time on both sides. According to such a device, even if there is a foreign matter adhered to the glass surface, the glass surface can be surely removed without being damaged, and the foreign matter can be removed simultaneously on both sides, so that the foreign matter can be reliably prevented from reattaching, and high quality can be achieved. The paper size applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm) (please read the notes on the back and fill out this page) - Order the Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Print -8 - 1253960 A7 B7 V. INSTRUCTION OF THE INVENTION (5) A glass substrate or a liquid crystal display substrate. Further, it is not necessary to invert the glass, and in the state of parallel movement, both surfaces of the glass surface can be simultaneously removed, thereby having high productivity and setting area. A small advantage. As a honing mechanism, a friction film, a sandpaper, or a honing film can be attached to a circular disk to form a honing surface. Thus, if a honing film or the like is attached to the disk, Simply configured, or the surface roughness of the honing surface (the particle size of the honing material) can be easily replaced with the purpose, and the foreign matter can be reliably removed, and the glass can be prevented from being damaged. In this case, it is preferable that the friction film, the sandpaper, or the honing film is attached to the disk via a surface fastener. When the honing film or the like is attached to the disk via the surface fastener, elasticity is imparted, and the film can be reliably prevented. Injury to glass. Moreover, it has the advantage of being easy to replace. The diameter of the above disc is preferably 30 to 70 mm. If it is a disc of this size, it corresponds to a glass substrate of 30 to 150 mm which is usually used. The surface of the glass surface has a surface roughness of 0.1 to 10 // m, preferably 1 to 10 // m, which is more desirable than the replacement of the disk. When the surface roughness is in the above range, the foreign matter on the glass surface can be surely removed, and the glass surface can be surely prevented from being damaged. Moreover, the surface roughness of the honing surface is adjusted by the honing material of the honing surface. For the honing material, the particle size of the above range may be used. The honing mechanism is in the direction of moving the substrate in parallel, and the Chinese National Standard (CNS) A4 specification (210X 297 mm) is applied to the substrate paper size. (please first Read the notes on the back and fill out this page. [Installation, 11 Ministry of Economic Affairs, Intellectual Property Office, Staff and Consumer Cooperatives Printed -9 - 1253960 A7 B7 V. Invention Description (6) Two-sided interactively arranged at least two columns, and It is preferable to arrange the surface on each side of the substrate so as to be staggered. (Please read the precautions on the back side and fill in the page.) By arranging the honing mechanism in this way, interference between the honing mechanisms can be avoided, and the device can be made small. At the same time, when the substrate passes through all the honing mechanisms, the two sides of the substrate are generally in contact with the honing surface of the honing mechanism, and the foreign matter on both sides of the substrate can be uniformly removed. The substrate moving mechanism is a roller including the opposite direction, by It is preferable that the roller sandwiches the substrate and rotates to move the substrate in parallel. By using the roller arranged in the opposite direction, the substrate does not deviate in the oblique direction during the honing, and can be surely moved in parallel at a predetermined speed. The cleaning liquid supply means is preferably provided by a spray nozzle or a hole provided in the honing surface of the honing mechanism, and it is preferable to supply a cleaning liquid of 10 to 300 cc per honing surface. By supplying the cleaning liquid in this manner, it is possible to reliably supply the predetermined amount of the cleaning liquid to each of the honing surfaces, and it is possible to reliably remove the foreign matter on the glass surface and prevent the scratches. The Ministry of Economic Affairs, the Intellectual Property Office, the employee's consumer cooperative, which has a device for removing foreign matter attached to the glass surface, and a water spray device, a device for jetting and cleaning the cleaning liquid, a UV irradiation device, and an ultrasonic cleaning device. At least one or more of the air knife, and the infrared drying device. By assembling each of the above-described devices, the removal, washing, rinsing, drying, and the like of the foreign matter can be continuously and efficiently performed. (Embodiment of the Invention) The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X mm) -10- 1253960 A7 B7 V. Description of the Invention (7) Hereinafter, embodiments of the present invention will be specifically described, but the present invention is Not limited to these. (Please read the precautions on the back and fill out this page.) The inventors of the present invention have conducted experimental verification on the glass substrate by the conventional cleaning technique, and repeated the results of many experiments to prevent the reattachment of foreign matter. It is difficult to prevent re-adhesion of foreign matter in the removal method of each single side as is conventional. In this way, the inventors of the present invention have considered the results of repeated experiments while removing the cullet or resin foreign matter adhering to the glass surface at the same time, and found that the supply of the cleaning liquid is on both sides of the substrate. When the honing surface of the rotary honing mechanism is contacted while moving the substrate in parallel with the glass surface and simultaneously removing foreign matter on the glass surface on both sides, the foreign matter can be surely removed without damaging the glass, and the foreign matter can be prevented from being attached again. And completed the invention of the case. Fig. 1 is a view showing an example of a device for removing foreign matter adhering to a glass surface of the present invention (A: plan view, B: front view): Fig. 2 is an enlarged view showing a part of the device. The device 1 is provided with a substrate moving mechanism 3 for parallel-moving a glass substrate, and honing mechanisms 2a and 2b for honing the glass surface of the substrate, and supplying the cleaning liquid to the substrate. The cleaning liquid supply mechanism 4. The substrate moving mechanism is mainly constituted by the rollers 3, and a part of the rollers are rotatably driven by a motor (not shown) to move the substrates in parallel. As shown in Fig. 4, a part of the rollers 3a, 3a' which are disposed oppositely are included, and by holding the glass substrate 10 with the rollers 3a, 3a' and rotationally driving, the substrate 10 is prevented from being inclined in the honing direction. Deviate and move in parallel. For example, the paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) -11 - 1253960 A7 B7 V. Inventive Note (8) This site constitutes a clamping substrate, which has an advantage in handling substrates of various sizes. (Please read the precautions on the back and then fill out this page.) As shown in Fig. 5, as the honing mechanism, the user installs the honing film 7 on the circular disc 6 to form the honing surface 8. As the honing film 7, for example, a resin (aluminum oxide, yttria, etc.) may be added to a resin and a cloth, and the film may be applied to a film to be cured. The honing film 7 may be attached to the disk 6 by a double-sided adhesive tape, but may be provided with a plurality of elasticity by being attached to the substrate via a surface fastener. Further, the surface fastener is generally known as a magic belt (registered trademark). With such elasticity, the foreign matter can be surely removed without damaging the honing surface. Moreover, the use of the face fastener also has the advantage of easy replacement of the honing film. Further, instead of the honing film, a rubbing film in which the honing surface is processed into a microprotrusion having a square hammer shape or a sandpaper having a very small fine hole may be used. However, if the surface roughness of the honing surface (the particle size of the honing material) is large, there is a risk of damage to the glass. Therefore, it is necessary to select a foreign matter which can be removed, and which does not cause any damage to the quality of the glass surface. In the device 1 of Fig. 1, the device 1 of the imaginary film 7 is mounted on the substrate 1 of the honing film 7 (hereinafter sometimes referred to as a honing disk), and the substrate is moved in the direction of moving the glass substrate in parallel. On both sides, two rows of honing discs 2a and two lower rows of honing discs 2a are disposed opposite to each other, and the upper honing discs 2a and the lower honing discs 2b are disposed opposite to each other, and the side faces of the sides of the substrate (between the sides and the lower sides of each other) And 2b are respectively arranged in a staggered shape. Disposing the honing discs 2a, 2b in this manner prevents the discs 2a, 2b from contacting each other, and simultaneously contacts the honing film 7 (the honing surface 8) on both sides of the glass substrate 10 which is moved in parallel by the rollers 3. ), while on the glass substrate 10, the paper size applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm) -12- 1253960 A7 B7 V. Description of invention (9) Pass all 4 rows of honing discs 2a, 2b At the time, all the surfaces of the glass substrate 10 are in contact with the honing film 7 (the honing surface 8). (Please read the note on the back and then fill out this page.) Also, the discs 2a, 2b are preferably separately controllable, for example, each disc, or each column, changes the direction of rotation of the disc or The number of rotations is also ok. Further, the number of discs in one row may be arbitrary, or the number of rows may be three or more on one side, and for example, a honing film having a different surface roughness may be used, and rough honing may be performed after rough honing. Further, in the apparatus 1 of the first embodiment, the spray nozzle 4 is disposed in the vicinity of each of the honing discs 2a and 2b as the cleaning liquid supply mechanism 5 as shown in Fig. 2 . As shown in Fig. 3, the spray nozzle 4 is provided with a plurality of holes 5, and the washing liquid is pumped inside the nozzle 4, and a predetermined amount of the cleaning liquid can be supplied to each of the honing discs 2a. 2b is between the glass substrate 10. Further, as the cleaning liquid supply means, holes are provided in the center of the honing discs 2a, 2b, and the cleaning liquid may be supplied from the holes. At this time, the honing film is also provided with a hole in the center, but by forming such an annular shape, a sufficient honing effect can be obtained, and the surface of the glass substrate can be finely finished. In the state in which the device 1 is used to remove foreign matter adhering to the glass surface, and the cleaning liquid is supplied from the spray nozzle 4, the honing discs 2a and 2b are rotated at a predetermined number of revolutions. The glass substrate 1 can be moved in parallel by the roller 3 in the glass surface direction by bringing the both surfaces of the glass substrate 10 into contact with the opposing honing surface 8. In this manner, the glass substrate 10 is moved in parallel at a predetermined speed by the rotation of the roller 3, and is a part of the upper surface of the glass substrate 1 , a part of the lower surface, the remaining part of the upper surface, and the remaining part of the lower surface. , all two sides are in contact with the honing surface 8, and both sides can be surely removed at the same time. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (21〇X 297 mm) -13- 1253960 A7 B7 V. Invention Description ( 10) Foreign matter on the glass surface. By treating both surfaces simultaneously, it is possible to prevent re-adhesion of foreign matter, improve productivity, and reduce processing space. (Please read the precautions on the back and fill out this page.) In addition, when the honing film is used as described above to remove foreign matter on the glass surface, it becomes a glass surface with extremely fine scratches, but the flaw does not affect the quality. . Moreover, there is no strong load applied to the glass substrate, so that there is almost no breakage of the glass substrate. It can therefore be finished into a very high quality glass substrate. The surface roughness of the honing surface of the honing mechanism of the present invention, the supply amount of the cleaning liquid, and the like may be appropriately set, but the inventors of the present invention have the surface roughness of the honing film in order to obtain the optimum honing condition. The number of rotations of the disk, the amount of supply of the cleaning liquid, the size of the disk, and the like were examined as follows, and the optimum conditions were found. (1) For the surface roughness, the Ministry of Economic Affairs, the Intellectual Property Office, the employee consumption cooperative, printed the honing film (the honing material: alumina) with a surface roughness of 0.5 to 20/m, and installed it in the diameter using a surface fastener. For the 60 mm disk, the removal effect of the foreign matter after the honing at 300 rpm and the occurrence of the flaw on the glass surface were investigated. The results are shown in Table 1. Further, the evaluation was carried out as follows. Foreign matter removal effect 〇: The purpose of achieving the initial stage is good. △: Although the initial purpose was not achieved, the effect was observed. X : The removal effect is insufficient. This paper scale applies to China National Standard (CNS) A4 specification (210X297 mm) -14- 1253960 A7 B7 V. Invention description (11) The occurrence of scar on the glass surface 〇: No damage, good. △: Although no scars were observed, the amount and size were small. X: I saw the occurrence of scars and had an impact on quality. [Table 1]
表面粗糙度（粒度）（// m) 0.5 0.7 1 3 5 7 10 13 15 20 異物除去效果 X Δ 〇 〇 〇 〇 〇 〇 〇 〇 有無玻璃傷痕 〇 〇 〇 〇 〇 〇 〇 Δ X X (請先閱讀背面之注意事項再填寫本頁) 由表示於表1的實驗結果，可知硏磨面的表面粗糙度， 是在1至10/zm,則可充分發揮異物的除去效果，同時可確 實地防止發生玻璃表面的傷痕。 經濟部智慧財產局員工消費合作社印製 另一方面，可知硏磨面的表面粗糙度爲比更小時， 則有無法充分除去附著於玻璃面的碎玻璃或樹脂異物之虞， 又，成爲比1 〇 // m更大，則有影響到玻璃面的品質的傷痕之 虞。 又，使用將硏磨材作爲氧化鈽的不同硏磨薄膜而進行 同樣的調查，則在表面粗糙度0.1至10// m時得到充分的異 物除去效果，又沒有發生玻璃面的傷痕。 (2)有關於圓盤的旋轉數的試驗 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -15- 1253960 A7 ___B7 五、發明説明（12) (請先閱讀背面之注意事項再填寫本頁) 將安裝表面粗糙度5 // m的硏磨薄膜（硏磨材：氧化鋁） 的直徑60mm的圓盤的旋轉數設定在30至900rpm，有關於異 物除去效果與發生玻璃表面的傷痕進行與上述同樣的評價 。將結果表示於表2。 [表2]Surface roughness (grain size) (// m) 0.5 0.7 1 3 5 7 10 13 15 20 Foreign matter removal effect X Δ 〇〇〇〇〇〇〇〇 With or without glass scar 〇〇〇〇〇〇〇 Δ XX (Read first Note on the back side. By the results of the experiment shown in Table 1, it can be seen that the surface roughness of the honing surface is 1 to 10/zm, so that the removal effect of the foreign matter can be sufficiently exhibited and the occurrence of the foreign matter can be surely prevented. Scar on the surface of the glass. On the other hand, it is known that the surface roughness of the honing surface is smaller than that of the imaginary surface of the Ministry of Economic Affairs, and it is not possible to remove the cullet or resin foreign matter adhering to the glass surface. 〇 / / m is larger, there are flaws that affect the quality of the glass surface. Further, the same investigation was carried out using a honing material as a different honing film of cerium oxide, and when the surface roughness was 0.1 to 10 / / m, a sufficient foreign matter removing effect was obtained, and no flaw on the glass surface occurred. (2) Tests on the number of rotations of the disc This paper scale applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) -15- 1253960 A7 ___B7 V. Invention description (12) (Please read the notes on the back first) Fill in this page again. Set the number of rotations of a 60 mm diameter disc with a honing film (硏: alumina) with a surface roughness of 5 // m at 30 to 900 rpm, regarding the removal of foreign matter and the occurrence of a glass surface. The scar was subjected to the same evaluation as described above. The results are shown in Table 2. [Table 2]
旋轉數（rpm) 30 50 70 100 200 300 400 500 600 700 900 異物除去效果 X X Δ 〇 〇 〇 〇 〇 〇 〇 〇 有無玻璃傷痕 〇 〇 〇 〇 〇 〇 〇 〇 Δ X X 由表示於表2的實驗結果，綜合地評價異物的除去效果 與有無傷痕的發生狀況，可知若爲100至500rpm，就可確實 地除去異物，同時不會發生較理想。 又，使用另一硏磨薄膜（硏磨材：氧化鈽）進行同樣 的實驗，在4〇至500rpm有關於異物除去與防止傷痕發生的 雙方，得到較高效果。 經濟部智慧財產局員工消費合作社印製 (3)有關於洗淨液的供給量的試驗 使用安裝表面粗糙度5// m的硏磨薄膜的直徑60mm圓盤 ，將以旋轉數3〇〇rpm硏磨時的每一硏磨面的洗淨液（水） 的供給量設定爲2至5 OOcc，進行同樣的評價。將其結果表 示於表3。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） _ 16 - 1253960 A7Number of revolutions (rpm) 30 50 70 100 200 300 400 500 600 700 900 Foreign matter removal effect XX Δ 〇〇〇〇〇〇〇〇 With or without glass flaws 〇〇〇〇〇〇〇〇 XX XX The results of the experiments shown in Table 2 The comprehensive removal effect of the foreign matter and the occurrence of the presence or absence of the flaw were comprehensively evaluated, and it was found that the foreign matter was reliably removed at 100 to 500 rpm, and it was not preferable. Further, the same experiment was carried out using another honing film (honing material: yttrium oxide), and both of the foreign matter removal and the prevention of the occurrence of scratches were obtained at 4 Torr to 500 rpm, and a high effect was obtained. Printed by the Ministry of Economic Affairs, the Intellectual Property Bureau, and the Consumer Cooperatives. (3) The test for the supply of the cleaning liquid is to use a 60 mm diameter disk with a honing film with a surface roughness of 5/m, which will rotate at 3 rpm. The supply amount of the washing liquid (water) per honing surface at the time of honing was set to 2 to 5,000 cc, and the same evaluation was performed. The results are shown in Table 3. This paper size applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm) _ 16 - 1253960 A7
7 B 五、發明説明（13) [表3] 供給量（c C ) 2 5 7 10 50 100 200 300 320 350 400 500 異物除去效果 〇 〇 〇 〇 〇 〇 〇 〇 Δ △ Δ X 有無玻璃傷痕 X X Δ 〇 〇 〇 〇 〇 〇 〇 〇 〇 經濟部智慧財產局員工消費合作社印製 由表示於表3的實驗結果，綜合地評價異物的除去效果 與有無傷痕的發生狀況，可知洗淨液是每一硏磨面供給10 至3 0 0 c c較理想。 又，流量成爲每一圓盤（硏磨面）不足10cc時，有在玻 璃面發生傷痕，或無法充分地除去異物之虞。另一方面， 流量大於300cc時，除了有硏磨效果變少，玻璃面上的異物 除去成爲不充分之虞之外，還有依洗淨液的費用上昇而影 響到經濟效果，因而不適用。 (4)有關於硏磨圓盤的大小的試驗 準備直徑10至200 mm的圓盤，在各圓盤安裝表面粗糙 度5//m的硏磨薄膜，並將旋轉數作爲300rpm,將洗淨液的 供給量作爲lOOcc進行同樣的評價。將其結果表示於表4。 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Μ規格（21〇><297公釐） -17 - 1253960 A7 B7 五、發明説明（14) [表4]7 B V. INSTRUCTIONS (13) [Table 3] Supply amount (c C ) 2 5 7 10 50 100 200 300 320 350 400 500 Foreign matter removal effect 〇〇〇〇〇〇〇〇 Δ Δ X With or without glass scar XX Δ 〇〇〇〇〇〇〇〇〇 Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printed by the experimental results shown in Table 3, comprehensively evaluate the removal effect of foreign matter and the occurrence of scars, it is known that the cleaning liquid is each It is ideal to supply the honing surface from 10 to 300 cc. Further, when the flow rate is less than 10 cc per disk (honing surface), there is a flaw on the glass surface, or the foreign matter cannot be sufficiently removed. On the other hand, when the flow rate is more than 300 cc, the removal of foreign matter on the glass surface is insufficient, and the cost of the cleaning liquid increases, which affects the economic effect, and thus is not applicable. (4) For the test of the size of the honing disc, prepare a disc with a diameter of 10 to 200 mm, and install a honing film with a surface roughness of 5//m on each disc, and wash the number of rotations as 300 rpm. The amount of liquid supplied was similarly evaluated as 100 cc. The results are shown in Table 4. (Please read the notes on the back and fill out this page.) The paper size applies to the Chinese National Standard (CNS) Μ Specifications (21〇><297 mm) -17 - 1253960 A7 B7 V. Description of Invention (14) [ Table 4]
圓盤之直徑（mm) 10 20 25 30 50 60 70 75 80 100 150 200 異物除去效果 X Δ Δ 〇 〇 〇 〇 〇 〇 〇 Δ Δ 有無玻璃傷痕 〇 〇 〇 〇 〇 〇 〇 Δ Δ Δ Δ X (請先閱讀背面之注意事項再填寫本頁) 由表示於表4的實驗結果，綜合地評價異物的除去效果 與有無傷痕的發生狀況，可知圓盤直徑是30至70mm較理想 。此乃可能爲旋轉的圓盤的中心部與外周部的周速相差對 於玻璃的損傷（傷痕的發生程）有很大影響。 又，通常使用於液晶屏的玻璃基板是一邊長度3 0至 1 500mm的四角形狀，所處理的基板的每一大小地變更圓盤 尺寸，會導致成本上昇，惟如第1圖的裝置地配置直徑30至 70mm的圓盤，也可以不傷及玻璃面而兩面同時地確實地除 去處理附著於30至1 500mm四方的任何大小的玻璃面的異物 〇 經濟部智慧財產局員工消費合作社印製 作爲本發明的除去附著於玻璃面的異物的裝置，以表 示於第1圖的裝置作爲中心，再具備噴水裝置，將洗淨液作 爲氣體微粒子化並加以噴射的裝置、紫外線照射裝置、超 音波洗淨裝置、氣刀、及紅外線乾燥裝置中至少一種以上 的裝置所構成也可以。 第7圖是表示依次組合LD (裝載機）4 1，純水噴灑裝置 (噴水裝置）42，表示於第1圖的異物除去裝置43，將純水作 成氣體微粒子化並加以噴射的裝置、純水超音波洗淨裝置 本紙張尺度適用中國國家標準（CNS ) A4規格（2!0X297公釐)~ ' -- 1253960 A7 B7 五、發明説明（15) 45、純水噴灑裝置.46、噴出乾燥空氣並進行乾燥的氣刀47 、U L D (卸載機）4 8的裝置5 0。作成如此地構成的除去玻璃 面的異物的裝置，則可連續地進行藉由輥子依次平行移動 玻璃基板，除去玻璃基板兩面的異物之後，經洗淨、乾燥 精修加工爲止的作業。 又，作爲將洗淨液作成氣體微粒子化並加以噴射的裝 置44，可使用具備如表示於第6圖的洗淨噴射的裝置。 在該洗淨噴嘴3 0，設有攪拌洗淨液作成氣體微粒化的 攪拌室31，從洗淨液供給口 33以如200L/ min的流量所供給 的洗淨液，是在攪拌室31內被攪拌，相撞於其內壁並散亂 。經散亂的洗淨液是與溶存在洗淨液中的氣體及起初就存 在於攪拌室3 1中的空氣等在攪拌室3 1內一起攪拌，被混合 而發生氣體微粒子。包含該氣體微粒子的液體，從開縫形 狀的液體放出口 3 4被送至連通的混合室3 2。 在混合室32，是將包含該氣體微粒子的液體，與從氣 體供給口 35所供給的氣體混合，並從開縫形狀的洗淨液噴 射口 3 6與氣體混合作爲洗淨液進行噴射。如此地，將已包 含氣體微粒子的洗淨液與氣體混合之後噴射至玻璃基板之 故，因而洗淨液是均勻地成爲氣體混合液體，而該微粒子 的尺寸也可作成極微細者。所以，以高洗淨效率可以進行 洗淨，並可防止將損傷賦於玻璃基板的情形。又，可減小 所供給的氣體壓力之故，因而也可減小所使用的洗淨液的 流量，而可減低洗淨成本。 組裝於本發明的裝置的裝置的組合是並不被限定於第7 (請先閲讀背面之注意事項再填寫本頁) 一裝· 訂 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -19- 1253960 A7 B7 五、發明説明（16) 圖者，也可作成如下的①至④的組合。 ① 噴水（普通水）裝置+表不於第1圖的裝置+噴水（純 水）裝置+氣刀 (請先閲讀背面之注意事項再填寫本頁) ② 噴水（普通水）裝置+將洗淨液作成氣體微粒子化並 噴射的裝置+表示於第1圖的裝置+純水超音波洗淨裝置+氣 刀 ③ 表示於第1圖的裝置+噴水（純水）裝置+紫外線照射 裝置+純水超音波洗淨裝置+氣刀 ④ 噴水（普通水）裝置+將洗淨液作成氣體微粒子化並 噴射的裝置+表示於第1圖的裝置+噴水（純水）裝置+紫外 線照射裝置+純水超音波洗淨裝置+紅外線乾燥裝置 經濟部智慧財產局員工消費合作社印製 如此地作成組合第1圖的裝置及如上述的裝置者，則可 連續地進行依第1圖的裝置的異物的除去過程，及對於基板 以水洗淨的過程，將洗淨液作成氣體微粒子化並噴射的裝 置5及照射紫外線的過程，以純水進行超音波洗淨的過程， 噴上空氣進行乾燥的過程，及以紅外線進行乾燥的過程中 至少一種以上的過程，而可作成可連續地進行玻璃面上的 異物除去、洗淨、沖洗、乾燥等的裝置。當然，也可以僅 具備此些以外的裝置者，或任意地省略一部分、置換等。 又，本發明是並不被限定於上述實施形態者。上述實 施形態是僅爲例示，具有與記載於本發明的申請專利範圍 的技術性思想實質上相同構成，且具備同樣的作用效果者， 不管任何者均包含在本發明的技術性範圍。 在上述實施形態中，說明了處理一枚玻璃基板的情形， 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 1253960 A7 B7 五、發明説明（ (請先閱讀背面之注意事項再填寫本頁) 惟本發明可適用的玻璃基板是並不被限定於上述者，特別 是，最適用於液晶面板或EL元件，以及成膜前的原玻璃或 成膜後的玻璃基板等，至少單面以玻璃所構成的基板（元 件）的異物除去。 又，在上述實施形態所說明的裝置，是將基板作成水 平加以移動者，惟將基板作成朝垂直移動者也可以，而硏 磨機構的數量或配置，若可普遍地硏磨玻璃基板的兩面者， 並未特別加以限定者。 (發明之效果） 依照本發明，將硏磨機構的硏磨面接觸於玻璃基板的 兩面，就可兩面同時地除去附著於玻璃面上的碎玻璃、樹 脂異物之故，因而可有效率地進行不傷及玻璃面可除去異 物，也可防止異物的再附著。特別是可進行以平坦屏顯示 業爲中心的電子產業的洗淨作爲課題的亞微細粒洗淨。 [圖式簡單說明] 經濟部智慧財產局員工消費合作社印製 第1 (A)圖是槪略表示本發明的附著於玻璃面的異物的除 去裝置的一側的前視圖。 第1 (B)圖是槪略表示本發明的附著於玻璃面的異物的除 去裝置的一側的俯視圖。 第2圖是表示噴灑式噴嘴的位置的局部放大圖。 第3圖是表示噴灑式噴嘴的槪略圖。 第4圖是表示基板移動機構的一例（輥子）的槪略圖。 本纸張尺度適用中國國家標準（CNS ) A4規格（21〇><297公釐） Z, ~ 一 1253960 A7 B7 五、發明説明（1δ) 第5圖是表示硏磨機構的一例的局部槪略圖。 (請先閱讀背面之注意事項再填寫本頁) 第6圖是表示將洗淨液作成氣體微粒子化並噴射的裝置 的洗淨噴嘴的一例的槪略圖。 第7圖是表示裝置的組合的一例的槪略圖。 第8圖是表示除去玻璃面上的異物的習知裝置（硏磨頭 )的槪略圖。 第9圖是表示硏磨頭的移動方向的說明圖。 (記號的說明） 1、50:附著於玻璃面的異物的除去裝置，2a、2b硏磨 機構（硏磨圓盤），3:基板移動機構（輥子），4:洗淨液供 給機構（噴灑式噴嘴），6:圓形圓盤，7:硏磨薄膜，8、24: 硏磨面，10:玻璃基板，20:硏磨頭，21:推壓部，22:捲取 部，23:硏磨薄膜帶，3〇:洗淨噴嘴，31:攪拌室，32:混合 室，33:洗淨液供給口，34:液體放出口，35:氣體供給口， 36:洗淨液噴射口，41:裝載機，42、46:純水噴灑裝置， 經濟部智慧財產局員工消費合作社印製 43 :異物除去裝置，44 :將純水作成氣體微粒子化並噴射的 裝置，45:純水超音波洗淨裝置，47:氣刀，48:卸載機。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -22-Disk diameter (mm) 10 20 25 30 50 60 70 75 80 100 150 200 Foreign matter removal effect X Δ Δ 〇〇〇〇〇〇〇 Δ Δ With or without glass scar 〇〇〇〇〇〇〇 Δ Δ Δ Δ X ( Please read the precautions on the back and fill in this page. From the results of the experiments shown in Table 4, the removal effect of foreign matter and the occurrence of scratches are comprehensively evaluated. It is understood that the disk diameter is preferably 30 to 70 mm. This may be because the difference in the peripheral speed of the center portion and the outer peripheral portion of the rotating disk greatly affects the damage of the glass (the occurrence of the flaw). Further, the glass substrate generally used for the liquid crystal panel has a square shape with a length of 30 to 1,500 mm on one side, and changing the size of the disk for each size of the substrate to be processed causes an increase in cost, but is arranged as in the apparatus of Fig. 1 The disc with a diameter of 30 to 70 mm can also be used to remove the foreign matter of any size of the glass surface attached to the square from 30 to 150 mm without damage to the glass surface. In the apparatus for removing foreign matter adhering to the glass surface of the present invention, the apparatus shown in Fig. 1 is further provided with a water spray device, a device for jetting the cleaning liquid as a gas particle, an ultraviolet irradiation device, and ultrasonic washing. At least one of the net device, the air knife, and the infrared drying device may be configured. Fig. 7 is a view showing a combination of an LD (loader) 4, a pure water spray device (water spray device) 42, and a foreign matter removing device 43 shown in Fig. 1, which is a device for purifying and jetting pure water. Water Ultrasonic Cleaning Device This paper scale is applicable to China National Standard (CNS) A4 specification (2!0X297 mm)~ ' -- 1253960 A7 B7 V. Invention description (15) 45. Pure water spraying device. 46. Spray drying The air knife 47 and the ULD (unloader) 48 device 50 of the air are dried. In the apparatus for removing the foreign matter on the glass surface, the glass substrate is sequentially moved in parallel by the rollers, and the foreign matter on both surfaces of the glass substrate is removed, and then the operation is performed by washing and drying. Further, as the means 44 for atomizing the cleaning liquid and spraying it, a device having the cleaning jet shown in Fig. 6 can be used. In the cleaning nozzle 30, a stirring chamber 31 for agitating the cleaning liquid to form a gas atomization is provided, and the cleaning liquid supplied from the cleaning liquid supply port 33 at a flow rate of, for example, 200 L/min is in the stirring chamber 31. Stirred, collided with its inner wall and scattered. The scattered cleaning liquid is stirred with the gas dissolved in the cleaning liquid and the air originally present in the stirring chamber 31 in the stirring chamber 31, and mixed to generate gas fine particles. The liquid containing the gas fine particles is sent to the communicating chamber 3 2 from the liquid discharge port 34 of the slit shape. In the mixing chamber 32, the liquid containing the gas fine particles is mixed with the gas supplied from the gas supply port 35, and mixed with the gas from the slit-shaped cleaning liquid discharge port 36 as a cleaning liquid. In this manner, the cleaning liquid containing the gas fine particles is mixed with the gas and then ejected onto the glass substrate, so that the cleaning liquid is uniformly a gas mixed liquid, and the size of the fine particles can be made extremely fine. Therefore, the cleaning can be performed with high cleaning efficiency, and the damage can be prevented from being imparted to the glass substrate. Further, since the pressure of the supplied gas can be reduced, the flow rate of the cleaning liquid to be used can be reduced, and the cleaning cost can be reduced. The combination of the devices assembled in the device of the present invention is not limited to the seventh (please read the back of the note first and then fill in the page). The installation of the Ministry of Economic Affairs, the Intellectual Property Office, the employee consumption cooperative, the printing of this paper scale applies to China. National Standard (CNS) A4 Specification (210X 297 mm) -19- 1253960 A7 B7 V. Description of Invention (16) The figure can also be made into the following combinations of 1 to 4. 1 Water spray (normal water) device + table not shown in Figure 1 + water spray (pure water) device + air knife (please read the note on the back before filling this page) 2 Water spray (normal water) device + will be washed The device for forming a gas into a gas particle and ejecting + the device shown in Fig. 1 + pure water ultrasonic cleaning device + air knife 3 is shown in the device of Fig. 1 + water spray (pure water) device + ultraviolet irradiation device + pure water Ultrasonic cleaning device + air knife 4 Water spray (normal water) device + device for making the cleaning liquid into gas particles and spraying + device shown in Fig. 1 + water spray (pure water) device + ultraviolet irradiation device + pure water Ultrasonic cleaning device + Infrared drying device Ministry of Economic Affairs Intellectual Property Office Employees Cooperatives Co., Ltd. Printing the device as shown in Fig. 1 and the device as described above, the foreign matter removal of the device according to Fig. 1 can be continuously performed. The process, the process of washing the substrate with water, the process of making the cleaning liquid into a gas particle and spraying the device 5, and the process of irradiating ultraviolet rays, the ultrasonic cleaning process is performed with pure water, and the air is dried by spraying. And at least one or more processes in the process of drying by infrared rays, and means for continuously removing, washing, rinsing, drying, and the like of the foreign matter on the glass surface. Of course, it is also possible to provide only a device other than the above, or to arbitrarily omit a part, a replacement, or the like. Further, the present invention is not limited to the above embodiment. The above-described embodiments are merely illustrative, and have substantially the same configuration as the technical idea described in the patent application scope of the present invention, and have the same operational effects, and are included in the technical scope of the present invention. In the above embodiment, the case of processing one glass substrate is described. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm). 1253960 A7 B7 V. Invention Description (Please read the back note first) Further, the glass substrate to which the present invention is applicable is not limited to the above, and is particularly suitable for a liquid crystal panel or an EL element, and a raw glass before film formation or a glass substrate after film formation. At least the foreign matter of the substrate (element) formed of glass is removed on one side. Further, in the apparatus described in the above embodiment, the substrate is moved horizontally, but the substrate may be moved vertically, and the substrate may be honed. The number or arrangement of the mechanisms is not particularly limited if the two sides of the glass substrate are generally honed. (Effect of the Invention) According to the present invention, the honing surface of the honing mechanism is brought into contact with both sides of the glass substrate, The cullet and resin foreign matter adhering to the glass surface can be removed at the same time on both sides, so that the foreign matter can be removed without damage to the glass surface. In addition, it is possible to carry out the sub-fine particle washing which is the subject of the cleaning of the electronics industry centering on the flat screen display industry. [Simplified explanation] The Ministry of Economic Affairs, the Intellectual Property Bureau, the employee consumption cooperative, printed the first (A) is a front view showing one side of the apparatus for removing foreign matter adhering to the glass surface of the present invention. Fig. 1(B) is a view schematically showing the apparatus for removing foreign matter adhering to the glass surface of the present invention. Fig. 2 is a partial enlarged view showing the position of the spray nozzle. Fig. 3 is a schematic view showing a spray nozzle. Fig. 4 is a schematic diagram showing an example (roller) of the substrate moving mechanism. The paper scale applies to the Chinese National Standard (CNS) A4 specification (21〇><297 mm) Z, ~11253000 A7 B7 V. Inventive Note (1δ) Fig. 5 is a partial view showing an example of the honing mechanism (Please read the precautions on the back side and fill out this page.) Fig. 6 is a schematic diagram showing an example of a washing nozzle for a device in which a cleaning liquid is formed into a gas particle and sprayed. Fig. 7 is a view showing a combination of devices. An example of Fig. 8 is a schematic view showing a conventional device (honing head) for removing foreign matter on the glass surface. Fig. 9 is an explanatory view showing a moving direction of the honing head. (Description of symbols) 1, 50: Removal device for foreign matter attached to the glass surface, 2a, 2b honing mechanism (honing disc), 3: substrate moving mechanism (roller), 4: cleaning liquid supply mechanism (spray nozzle), 6: round circle Plate, 7: honing film, 8, 24: honing surface, 10: glass substrate, 20: honing head, 21: pressing part, 22: winding part, 23: honing film strip, 3 〇: washing Net nozzle, 31: mixing chamber, 32: mixing chamber, 33: cleaning solution supply port, 34: liquid discharge port, 35: gas supply port, 36: washing liquid injection port, 41: loader, 42, 46: Pure water spraying device, Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing 43: foreign matter removal device, 44: pure water as gas microparticles and spray device, 45: pure water ultrasonic cleaning device, 47: air knife, 48: Unloader. This paper scale applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm) -22-