TWI253647B - Optical storage medium and manufacturing method of reflecting layer thereof - Google Patents

Abstract

A manufacturing method of a reflecting layer of an optical storage medium includes the steps of: providing an optical recording substrate in a chamber. Filling the chamber with a mixing gas, which includes nitrogen. Sputtering a sputter source, which includes silver, on the optical recording substrate to form a reflecting layer, which includes silver and nitrogen, deposited on the optical recording substrate. Furthermore, the invention also provides an optical storage medium, including an optical recording substrate and a reflecting layer. In this case, the reflecting layer is formed on the optical recording substrate by a sputtering method, and is consisting of silver and nitrogen.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical storage medium and an optical storage method having a reflective layer, a storage medium, and a method of manufacturing the same. (B), [previous technology]

In the past year, it has become more and more popular to store data in optical storage media, and it is possible to store data in the long-term storage, Bessie, and A-body. == The field of optical storage media includes storing images and sounds. The two most common optical health media include CD ( c〇_

Disc ’ = audio and video discs (DVD, "e a + ), VIII, 、, Q structure is roughly the same, and the data storage capacity of digital audio and video discs is greater than the data storage capacity of CDs. The following Γ η, 昭 昭 裕 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - The substrate u of the pit), the second layer is a reflective layer 13 formed of sheet metal, for example, D, and the third layer is a layer 16 made of resin. It should be noted that the aforementioned optical storage medium includes a recordable optical storage medium which is formed between the substrate u and the reflective layer 13 to form a recording layer composed of an organic dye (Dye) or a metal phase change material (in the figure). Not shown), at this time, the substrate is formed with a groove. In the prior art, the use of silver to form the reflective layer is a widely used technique. However, the reflective layer formed of pure silver is often too large due to the grain size, and will be generated to a considerable extent after high temperature and high humidity.

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However, it seriously affects the deterioration of optical storage media after environmental testing and the description of invention (2). Because of the quality of the burning signal, those skilled in the art often use silver, copper, and copper alloys to effectively Reduce the optical storage media error rate. However, in the sputtering process of the silver alloy shot layer, the use of the combination causes an increase in manufacturing cost. The silver alloy is used as the material of the reflective layer. The grain growth of the silver and the deterioration of the anti-deterioration energy after the % environment test constitute a reflective layer, and the sputtering target must be formed in the anti-gold material.

Therefore, how to improve the reflective layer properties of optical storage media to effectively improve the quality of optical storage media and thus reduce the degradation of optical storage media after environmental testing is one of the important topics in current optical storage media manufacturing technology. (3) SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide an optical storage medium capable of effectively improving the quality of an optical storage medium and a method of manufacturing the same.

In order to achieve the above object, a method for manufacturing a reflective layer of an optical storage medium according to the present invention comprises the steps of: disposing an optical recording substrate in a chamber; and injecting a mixed gas containing nitrogen into the reaction chamber. Sputtering-sputtering is applied to the optical recording substrate to form a reflective layer, wherein the source of the ore includes silver. In addition, the present invention also provides an optical storage medium comprising an optical recording substrate and a reflective layer. In the present invention, the reflective layer is sputtered

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V. INSTRUCTION DESCRIPTION OF THE INVENTION (3) Formed in the embodiment of the basic invention of optical recording, the invention has the advantages of long-term and anti-deterioration ability and material deterioration as compared with the above-mentioned "the method is based on the reflection layer of the reaction chamber". . In the reflective layer, the reflective layer is a nitrogen storage device according to the present invention, so that the nitrogen-containing silver reflective layer of the nitrogen-containing silver reflective layer can further reduce the optical storage by silver and nitrogen. In the nitrogen-containing silver reflective layer. The storage medium and its reflective layer are formed by a sputtering process; and the conventional silver reflective layer is effective for suppressing the grain formation of silver after the environmental test (IV), [Embodiment] Hereinafter, the relevant drawings will be described with reference to the related drawings. Optical storage medium and method of manufacturing the same according to a preferred embodiment of the present invention, wherein the same elements will be described with the same reference numerals. Referring to FIG. 2, an optical storage medium 2 according to a preferred embodiment of the present invention includes a substrate 21, a recording layer 23, a reflective layer 25, and a protective layer 27. In the present embodiment, a pre-groove 211 is formed on one side of the substrate 21; in general, a well-known person first makes a stamper corresponding to the substrate 21 and utilizes The substrate forming layer 21 is formed by injection molding. The soil recording layer 2 3 is formed on one side of the substrate 2 1 on which the pre-groove 2 1 1 is formed. In the embodiment, the material of the recording layer 23 may be included. Organic matter, such as phthalocyanine, or Azo compounds, which are exposed to laser light and are focused by laser light.

Page 7 1253647 V. INSTRUCTIONS (4) The resulting south temperature produces structural changes for writing data; in addition, the material of the recording layer 23 may also include alloy materials such as (je-Te, or

Ag-In-Sb-Te, after the above-mentioned alloy material is irradiated with laser light, a phase change occurs due to the two temperatures generated by the focusing of the laser light, thereby obtaining the writing of the data. The reflective layer 25 is formed on the recording layer 23 by a sputtering process as shown in FIG. In the present embodiment, the reflective layer 25 is mainly formed of a sputtering material (e.g., silver) and its ruthenium is doped with an appropriate proportion of nitrogen. In more detail, the reflective layer 25 is formed by a sputtering process, and the sputtering source used for the sputtering process is silver' and nitrogen is added to the reaction chamber in which the sputtering process is performed. A protective layer 27 is formed on the reflective layer 25. In general, the protective layer 27 is usually formed of a resin, and a side of one of the back-reflecting layers 25 is usually printed with an appropriate pattern, for example, the product says a month or the like. It is to be noted that the substrate 21 and the recording layer 23 constitute an optical recording substrate as defined above, which can constitute an optical storage medium such as a conventional CD-R/RW. Further, the optical storage medium according to this embodiment may be one of two layers of R/RW or DVD + R/RW. In addition, in another preferred embodiment of the present invention, the optical recording substrate defined in the foregoing is only one substrate, and the substrate is formed with a plurality of holes; in this embodiment, the reflective layer is formed on the substrate. The protective reed is formed on the reflective layer, wherein the reflective layer is a nitrogen-containing silver reflective layer: Note that the optical recording substrate according to the embodiment can constitute an optical storage medium such as the conventional two (3). Further, the optical storage medium according to this embodiment is more preferably one of the layers of the double-layered DVD. "

Page 8 1253647 V. DESCRIPTION OF THE INVENTION (5) In order to make the content of the present invention easier to explain, a preferred embodiment of the present invention will be described below. Λ(4)^ The reflective layer manufacturing method of the storage medium, as shown in FIG. 3, the method for manufacturing the reflective layer of the optical storage medium according to the preferred embodiment of the invention, including the ▲, 生, 生, + 丰 毛月3〇1~一氺庳3. First, in step 301, the substrate is placed on the same 庵A T, η , and reacted to the middle. In this embodiment, the optical two =::: CD, CD-R/RW, _, _-, or ndr storage part of the structure; the optical recording substrate is usually ^ ^ ^ 丞槪 right is write or can The part of the phonographic optical storage medium is composed of a main 曰+~^a I knife, and the mouth structure is a substrate with pre-groove and a layer of Lu. Next, in step 302, a gas mixture system is injected into the reaction chamber. In the present embodiment, the "mixed gas (4) is composed of nitrogen gas and "inert gas" (for example, rolling), and the mixed gas has a nitrogen content of about 15% or less. Finally, step 303 is performed by a sputtering process which is sputter-sputtered from the optical recording substrate provided in step 301 to form a reflective layer on the optical recording substrate. In this embodiment, the sputtering source used in this step is silver, and the sputtering gas contains nitrogen. Therefore, the reflective layer formed is a nitrogen-containing silver reflective layer. It should be noted that in step 3〇2, nitrogen and argon can be separately input into the reaction chamber from separate pipelines, so the well-known technician can control the gas premixing effect at an appropriate ratio by independent flow control of nitrogen and argon. Further, the nitrogen content of the reflective layer formed in step 303 is controlled; wherein the preferred mixed gas has a nitrogen content ratio of 15% or less. In addition, in step 312, nitrogen and argon may also be premixed in a certain ratio, and then

1253647 V. INSTRUCTIONS (6) The reaction is input to the medium by a single line. According to the optical storage medium of different embodiments, the reflective layer formed in step 303 is formed on the substrate having the holes or formed on the recording layer. Further, after the reflective layer is formed, a protective layer can be formed on the reflective layer. In summary, the manufacturing method forms the inferior shot layer manufacturing gold after the reflection-up optical storage test, so the above method of the present invention should be included in the method of depositing the media layer, and the method of storing the media may not have the spirit and the attachment only. Due to the quality of the gas that can be shaped. In addition, the use efficiency is reduced as an example _, application for special / ten, slave π < especially adding nitrogen to nitrogen-containing silver, thereby reducing the expensive alloy of the invention according to the invention, rather than for Take advantage of it. Therefore, the reflective layer optical storage optical target is splashed with a limited equivalent medium and is shaped by the use of its storage media storage medium. Any modification or reflective layer sputtering process is effective enough to improve the environmental measurement and its anti-silver combination.

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BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a conventional optical storage medium; FIG. 2 is a schematic view showing an optical storage medium according to a preferred embodiment of the present invention; And Figure 3 is a flow chart showing the flow of a method of fabricating a reflective layer of an optical storage medium in accordance with a preferred embodiment of the present invention. Description of the component symbols: 1 Optical storage medium 11 Substrate 13 Reflective layer 15 Protective layer 2 Optical storage medium 21 Substrate 211 Pre-groove 2 3 Recording layer 25 Reflecting layer 27 Protective layer 30 1 -30 3 Method of manufacturing reflective layer of optical storage medium A step of

Claims (1)

1253647 6. Patent application scope 1. A method for manufacturing a reflective layer of an optical storage medium, comprising: disposing an optical recording substrate in a chamber; injecting a mixed gas into the reaction chamber, the mixed gas containing nitrogen And sputtering a sputtering source from the optical recording substrate to form a reflective layer, wherein the sputtering source comprises silver. 2. The method for producing a reflective layer of an optical storage medium according to claim 1, wherein the reflective layer is a nitrogen-containing silver reflective layer. The method for producing a reflective layer of an optical storage medium according to claim 1, wherein the mixed gas has a nitrogen content of 15% or less. 4. The method for producing a reflective layer of an optical storage medium according to claim 1, wherein the gas systems of the mixed gas are separately injected into the reaction chamber and mixed. 5. The method for producing a reflective layer of an optical storage medium according to claim 1, wherein the gas systems of the mixed gas are premixed and then injected into the reaction chamber. 6. The method of manufacturing a reflective layer for an optical storage medium according to claim 1, wherein the optical recording substrate comprises a substrate, and the reflective layer is formed on the substrate. </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; a substrate and a recording layer, the recording layer is formed on the substrate, the reflective layer is formed on the recording layer 〇δ, an optical storage medium, comprising: an optical recording substrate; and a reflective layer, which is sprayed A plating method is formed on the optical recording substrate, and the reflective layer contains silver and gas. 9. The optical storage medium of claim 8, wherein the optical master substrate comprises a substrate, and the reflective layer is formed on the substrate. 10. The optical storage medium of claim 8, wherein the optical brother record substrate comprises a substrate and a recording layer, the recording layer is formed on the substrate. The reflective layer is formed on the recording layer. . 11. The optical storage medium of claim 8, further comprising: a protective layer formed on the reflective layer. Page 13