TWI245878B - Device for measuring linear dual axis geometric tolerances - Google Patents

Abstract

A device for measuring linear dual axis geometric tolerances is disclosed. The system of the device comprises four sets of optical fiber displacement gauges, four sets of two-dimension optical sensors, and one two-dimension optical grating scale plate. The two-dimension optical sensor and the two-dimension optical grating scale plate form a grid encoder. The four sets of optical fiber displacement gauges and the four sets of two-dimension optical sensors are separately arranged on the two-dimension optical grating scale plate. The structure of a dual axis working platform is mainly constructed by dual axis ball screws. When the dual axis working platform is operated, thirteen rotating geometric tolerances are formed. The device can precisely measure the thirteen rotating geometric tolerances when the platform is operated. Moreover, the device can calibrate and compensate the tolerances.

Description

1245878 Description of the invention: [Technical field to which the invention belongs] The present invention is a linear dual-axis measuring device that mimics the difference, in particular, it refers to a thirteen that is generated when an energy measuring dual-axis working platform moves. A measuring device whose geometric rotation is up to and can be corrected and compensated. [Previous technology] High-precision positioning and high repeatability linear platform and χ-γ platform are the key equipment of fine and poor positioning machinery. In recent years, it has been widely used in micro-machining, surveying, lithography, and semiconducting. f ^ Dou I and other automation industries. Due to the development of high-precision positioning technology, the importance of 疋 bit technology has increased rapidly. No matter in the precision machinery, semiconductor industry, micro (nano) technology is going to be miniaturized: precision and nano-level progress, so in The development of measurement equipment, manufacturing technology, and full-bodied technology in the field of precision machinery, and related research on micro-positioning platform design disk precision positioning detection technology is Junker's slow. The dual-axis work platform is one of the most commonly used tools in China. However, in recent years, the industry and academia have invested in research, and the development of the dual-axis work platform has been quite large. The dog is broken, and because of this, the precision is more accurate. So is the dual-axis working flat? ^ Explains the relative precision of

Inferiority is also an important index that determines the quality of a two-axis work bearing A for a thousand units. The dual-axis working platform adopts multi-degree-of-freedom azimuth changes, and the scene produces errors due to each target. A ^ will produce a total of thirteen and several 1245878 rotation errors when it moves in interstitial motion. Due to the precision of the entire machine and the quality of the processed products of the various dual-axis working platforms in the machine, the determination of the workpieces to be processed: The movement position and attitude of the precise parts in space need to be as described above: Measurement and adjustment or control of rotation error. ^ As the two-axis working platform will produce ping ping when it is in motion, ten or ten geometric rotations, so Shi Fu accurately measured the thirteen geometric rotations during the movement, and corrected and compensated. It seems very; therefore, 'developing the geometrical misalignment of the dual-axis work platform', < will provide the higher and higher precision of the dual-axis work platform. In many conventional techniques, 7Kq # said, Zhong Youru published in 1988-using direct measurement of displacement (dispiacement) to get 2 ι. The method of determining element difference between e and U 'emphasizes that this method can be used to describe the accuracy of Gudan and τ, and to reduce the use of instrument crying, while Professor Xiu of Taiwan University said that it has six degrees of freedom on two axes. The measurement system can obtain dual-axis operation and σ. One direction, six degrees of freedom, two spectroscopes, and two six-degree-of-freedom measurement systems. The structure is based on four Doppler laser displacement meters and two long flat mirrors. , A long right-angle mirror, and a four-image line position sensor. SUMMARY OF THE INVENTION The object of the present invention is to provide a measuring device for measuring the geometric error of a biaxial green axis, and the energy measurement of the biaxial operation. When the platform moves, the thirteen geometric rotations are 1245878, and the errors are corrected and compensated to improve the precision of the two-axis working platform. The invention is a linear two-axis geometric error measurement device. The system includes four groups of optical fibers Displacement meter, four sets of two-dimensional optical read heads and a two-dimensional optical tree scale plate. The two-dimensional optical read head and two-dimensional optical scale plate are collectively referred to as lattice code n. Read heads separately It is placed on a two-dimensional grating scale plate. With the H-dimensional optical read head, the movement values of the X-axis and γ-direction of the biaxial working flat port can be accurately read. Taking out the movement value of the biaxial working σ direction, the inclination of the biaxial working platform can also be obtained from the optical fiber displacement meter. With the four groups of optical fiber mottos loyalty 丨 丨 hit. When the 'produced such as correction and compensation, 1. δ, (χ): 2. Sy (y). 3. εΑχ): 4. Φ): 5. Φ):-6. sAy). Σ, and two-dimensional optical read head and a two-dimensional ... Gongyi / 夂 W Left, when Y vehicles move, the straightness error produced by the Υ axis; the angular error produced by the cardioid axis' 寸 axis; 1245878 ε 8. 9. 10. ε. (Χ): (y) : When moving when the χ-axis γ-axis moves

• X sAy). When the car is moving

11. ^ λχ): X 12. ^ Xy): γ • Angular error caused by the Z axis when the axis moves while the axis moves; Angular error caused by the Z car; Straightness error caused by the Y axis Straightness error caused by X axis; Straightness error produced by z axis; Straightness error produced by z axis; 13. Verticality error of χ axis and γ vehicles. [Embodiment] —The measurement device for the linear biaxial geometric error of this month ’s seed is shown in the figure—Nothing ’It includes: four groups of fiber displacement meters A-1, A-2, a-3, A-4; four * Two-dimensional optical reading head β- 丨, β_2, B-4 and a two-dimensional grating scale c; the two-dimensional optical reading head β-n β 3, B-4 and two-dimensional grating shoulder scale C Can be combined into a mule encoder. This system architecture uses four sets of optical fiber wearing positions A-1, A-2, A-3, A-4 and four sets of two-dimensional optical read heads 2, B-3, B-4 敕 八 / ^ ^, + Positive 3 together into a set of measuring arenas' two-dimensional light peach scale

The u center is on the dual-axis working platform. When the platform moves, four groups of optical fiber displacement meters D 丄 Z, A-3, A-4 can get the change in the Z axis direction; four groups of two R4 ^ r eight, choose the first master B-hB-2, B -3, B 4 After cutting, get four sets of χ direction and four sets of γ 袓 # _ &# universal displacement. With four sets of fiber displacement meters A-bA-2, α-3, α-4, four B-2-η a, -dimensional optical reading head β-1, 3, B-4 and a two-dimensional grating scale Saka C, we can know J245878 that the twelve or several movement errors produced by the two-axis and two-axis working platform only occur when it moves. The four sets of optical fiber displacement meters A], A_2, a_3, and A] can be used. Doppler displacement meters can be used, while the two-dimensional optical read head HUU can measure two-dimensional signals, so two-dimensional optical detectors can be used. ⑽ pSP) 'or Laser Four Imager. The aforementioned thirteen geometric rotation errors are explained as follows.

Platform, the axis will have six degrees of freedom, and the two-axis working platform can move to the X-axis direction and Y-direction 'will produce twelve degrees of freedom and the verticality error between the y-axis and the Y-axis, a total of thirteen The geometric rotation errors are as follows: (1) Linear errors: a Linear Positioning Error b) Side toSideStraightnessErr〇c) Verticality error (Upt〇D〇) wnStraightnessEH〇r) (a) Pitch Error (bitch) Error (Yaw) Error (O yaw error (R〇UErr〇r) When the two working platforms of the present invention drive two-dimensional The scale along the X direction is read by the 1D optical read heads B-1, B-2, B-3, and B-4 in the X direction to read the 1245878 value. The 13 geometric rotation errors of the platform can be calculated. The following is δλχ) · When X-axis moves, the straightness error δχ (χ) = Eχ (〇Α) 2. lb): When the 时 -axis moves, the straightness error δν (γ) of the Υ-axis = Εν (〇Β) ε (χ):: X-axis angular error ε {y). X-axis angular error Ez {〇 Bf) -E (〇B), W:, w ·: Angular error caused by the γ axis when the x-axis moves > (χ):

Ex (〇Af) -Ex (〇A) 6. £ Xy):: Angle error Ez {AC / y0) -Ez {AC) (y) y〇: (y) :

Ez {〇B / y0) -Ez (〇B) y〇 7.: When the X-axis moves, the angular error caused by the Z-axis (Xχ):

Ex (〇A) -Ex (BC) y〇ε. (Y): When the Y axis moves, the angular error generated by the z axis is 1245878 1245878 Sy (x) .: (water SAOB) ~ Ex (〇B / y ( )) y〇9 · ”/: Straightness error of the Y axis when X cars h move privately ιο · ～ Μ · 6 ^ x) -Ey (〇Ayx〇Sz (x) _ & When moving, X Straightness error δ ^) ^ Eχ (〇Β) + γε ^ ll / zW: χ. #When moving, the straightness error of the Z axis is ((χ) Κ〇 ^) + χ〇5 ( χ) 12.: When y is moving, the straightness error S ^ y) ^ E2 (〇Byysx (y) 13. · v λ », by vehicle: HY verticality error axy ^ sM + ^ x (y) ~ y ^ z (y) -Ex (AC) J / The present invention requires the use of various optical components, and the components will now be described. h Optical fiber displacement meter h, a-2, h, h: use The characteristics of the fiber, 的 the distance between the surface of the object to be measured and the fiber.

2 · Two-dimensional optical read heads B-1, B-2, and B 4 · Can provide X vehicles at the same time: Two-dimensional movement signal in the direction of Y axis. 3 · Two-dimensional grating scale flat plate C ·· With its shape, the two, 隹 optical read heads can read the X-axis direction and Y-axis direction [Simplified illustration of the drawing] Private motion signal 12 1245878 凊 See The following details of a preferred embodiment of the present invention, ... 5 brothers and their drawings, will further understand the technical content and purpose of the present invention. The drawings related to this embodiment are as follows. Application example of the present invention. [Description of main component symbols] A-1, 'A-3, A-4 fiber displacement meters B ~ 1, 3, B-4 Two-dimensional optical read head C Two-dimensional grating scale plate

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Claims (1)

1245878 Patent application scope i. A linear biaxial geometric error measurement device, its composition system includes four groups of optical fiber displacement meters, which are used to measure the change in displacement of the x-axis and y-axis of the clam when the platform moves; Four sets of two-dimensional optical read heads are used to measure the change in displacement when the platform is moved; on the table; two two-dimensional grating scale plates are fixed to a biaxial working plane. Toyo, Shuo was placed on the two-dimensional grating scale plate, and the four sets of one-dimensional optical reading heads of Jitian could accurately read the movement values of the x-axis and γ-direction of the two-axis working platform. Accurately read out the movement value of the two-axis work platform in the Z direction. The inclination of the two-axis work platform can also be obtained from the fiber displacement meter. The patent states that the linear measuring device of linear biaxial geometric error described in item 丨 is described, and it is used today to give eight f 3 one-dimensional optical master head system can use two-dimensional optical detector. The optical read head can use the linear biaxial geometric error measurement device described in item 1 of the Four-Laser Laser Application Patent, which is the second instrument. A linear biaxial geometric error described in the first item of the range ^, wherein the fiber displacement meter can use a Doppler position 14 1245878 shift meter. 5. A linear biaxial geometric error measurement device as described in item 1 of the scope of the patent application, wherein the four sets of two-dimensional optical read heads and two-dimensional grating scale plates can be combined into a grid encoder. 15