TWI242385B - Structure and manufacturing method of shadow mask for quadr-pole field emission displays - Google Patents

Structure and manufacturing method of shadow mask for quadr-pole field emission displays Download PDF

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TWI242385B
TWI242385B TW93106219A TW93106219A TWI242385B TW I242385 B TWI242385 B TW I242385B TW 93106219 A TW93106219 A TW 93106219A TW 93106219 A TW93106219 A TW 93106219A TW I242385 B TWI242385 B TW I242385B
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Taiwan
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net cover
layer
holes
plate
hole
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TW93106219A
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Chinese (zh)
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TW200531580A (en
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Guo-Rung Chen
De-Feng Jan
Jin-Shou Fang
Kuei-Wen Jeng
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Teco Nanotech Co Ltd
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Abstract

Disclosed is a structure and manufacturing method of shadow mask for quadr-pole field emission display, which is applied onto a three-layered shadow mask consisting of a convergent electrode layer, an insulated layer and a gate electrode. The structure has a first metal conductive plate for use as a convergent electrode layer on which one side is attached with a glass plate having through holes above and under the plates for enabling electron beam to pass through. The glass plate is formed as an insulated layer on which a second conductive plate is installed outside, and the second conductive plate is used as a gate electrode. Thereby the laminated three-layered structure is able to replace the conventional insulated layer formed by printing and thus achieve a better economic effect.

Description

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五、發明說明(1) 【發明摘要】 本發明係有關一種四榀 其製造方法,係、應用於!;;; =示器之網罩結構及 極層之三層網[其係以種絕緣層與閘 該導電板之-側黏著〜 ^做為收斂電極層’ 穿越之透孔,肖玻璃板缘刀別開設有供電子束 此板做為閘極層,以 達更佳之經濟效益。 p财式所形成之絕緣層,以 【發明所屬之技術領域】 本發明係有關-種四極結構之場發射顯示器,尤指 將收斂電極層、絕緣層及收斂電極層合 其製造方法。 』早 <、、、。構及 【先前技術】 按,場發射顯示器(Field Emission Display, fEd) B 近年來新興的平面顯示器之一,其原因在其具有自體潑 的效果,無需另外使用背光光源,較諸LCD,除有較佳*的 亮度表現外,再加上更寬廣的可視角度範圍、耗電量低、 反應速度快(不留殘影)及操作溫度較廣等優點,且其所呈 現之影像畫質非常近似於傳統的陰極射線管(CRT)顯示 器,而其體積卻遠較陰極射線管輕、薄,故場發射顯示_ 成為取代液晶顯示器及電漿顯示器的明日之星實為指日^V. Description of the invention (1) [Abstract of the invention] The present invention relates to a method for manufacturing a sieve. ;; = Indicator net cover structure and three-layer net of the pole layer [It is based on a kind of insulation layer and gate-the side of the conductive plate is adhered ~ ^ as a converging electrode layer 'through holes, through the edge of the glass plate The blade is provided with an electron beam bundle as a gate layer to achieve better economic benefits. The insulating layer formed by the p-type is described in [Technical Field of the Invention] The present invention relates to a field emission display with a four-pole structure, and particularly to a method of manufacturing a convergent electrode layer, an insulating layer, and a convergent electrode layer. "Early < ,,,. Structure and [Previous Technology] Press, Field Emission Display (fEd) B One of the emerging flat displays in recent years. The reason is that it has the effect of self-reflection, without the need to use a backlight source. Compared to LCD, except In addition to better brightness performance, coupled with a wider viewing angle range, low power consumption, fast response speed (no residual image), and wide operating temperature, etc., and the image quality it presents is very high It is similar to a traditional cathode ray tube (CRT) display, but its volume is much lighter and thinner than a cathode ray tube. Therefore, the field emission display _ becomes the star of tomorrow to replace the liquid crystal display and plasma display ^

1242385 五、發明說明(2) 待之事。更由於近年來奈米技術之迅速發展,將奈米材料 應用於場發射顯示器中,勢將更形促進其發展為成熟商 品 ° 第一圖所示者乃為一種基本的三極結構場發射顯示器之 剖視圖’其結構主要係包含陽極板(丨〇 )與陰極板(2 〇 ),陽 極板(10)與陰極板(20)之間設置有支撐器(spacer)(14), 提供為陽極板(10)與陰極板(2 〇)間真空區域之間隔,及作 為陽極板(10)與陰極板(20)之間之支撐,該陽極板(1〇)係 包含一陽極基板(1 1)、一陽極導電層(12)及一螢光粉體層 (Phosphors layer)(13);而該陰極板(2〇)則包含一陰極 基板(21)、一陰極導電層(22)、一電子發射源層(23)、一 介電層(24)及一閘極層(25);其中該閘極層(25)係被提供 =電位差以汲引電子發射源層(23)之電子射出,藉由陽極 導電層(12)所提供之高電壓,以提供電子束之加速,俾使 電子有足夠的動能撞擊(impinge)陽極板(1〇)上之螢光粉 體層(1 3 )激發而使其發光。 β惟因電子束之射出會形成扇形發散,而此種三極結構之 昜Ιχ射,4示器,難以控制其電子束之發散幅度,使得電子 束過度發散,甚至有可能撞擊到鄰近之 =因而降低了顯像效果,於是便有如第二圖所。四 才^ :構問世,該種四極結構亦為本申請人所提出,其係於 上一極結構以外再增設第四電極(即收斂電極),主要係 / f陰極板(40)與陽極板(3 〇)間對應固設一網罩(5),其、 係:、、、具有收斂電極層(51 )、絕緣層(52)及閘極層(53)之三1242385 V. Description of Invention (2) Things to be done. In addition, due to the rapid development of nanotechnology in recent years, the application of nanomaterials in field emission displays will further promote its development into mature products. The first picture shows a basic three-pole field emission display. The cross-sectional view 'its structure mainly includes an anode plate (丨 〇) and a cathode plate (20), and a spacer (14) is provided between the anode plate (10) and the cathode plate (20), and is provided as an anode plate (10) The space between the vacuum area and the cathode plate (20), and as a support between the anode plate (10) and the cathode plate (20), the anode plate (10) includes an anode substrate (1 1) An anode conductive layer (12) and a phosphor powder layer (13); and the cathode plate (20) includes a cathode substrate (21), a cathode conductive layer (22), an electron The source layer (23), a dielectric layer (24), and a gate layer (25); wherein the gate layer (25) is provided with a potential difference to draw electrons out of the electron emission source layer (23). High voltage provided by the anode conductive layer (12) to provide acceleration of the electron beam, so that the electrons have sufficient kinetic energy to collide Phosphor layer (13) on the (impinge) of the anode plate (1〇) excited to emit light. β, but the emission of the electron beam will form a fan-shaped divergence, and this three-pole structure of the 昜 Ιχ emission, 4 indicators, it is difficult to control the divergence amplitude of its electron beam, causing the electron beam to diverge excessively, and may even hit the neighboring = As a result, the development effect is reduced, so it is as shown in the second figure. Four talents ^: The structure was introduced. This type of quadrupole structure was also proposed by the applicant. It is a fourth electrode (convergent electrode) in addition to the previous pole structure, which is mainly a / f cathode plate (40) and an anode plate. (30) correspondingly, a mesh cover (5) is fixedly arranged, which comprises: a convergent electrode layer (51), an insulating layer (52), and a gate layer (53).

第7頁 1242385 五、發明說明(3) 層結構,且其收斂電極層(51)係面對陽極板(3〇),其間並 設有多個條狀支撐器(34),該陽極板(3〇)係由陽極基板 (31)、陽極導電層(32)及螢光粉體層(33)所組成之陽極單 元,而閘極層(5 3)係面對陰極板(4〇),其間並設有阻隔壁 (44),該陰極板(40)係由陰極基板(41)、陰極導電層(42) 及電子發射源層(4 3 )所組成之陰極單元,該閘極層(5 3 )及 收斂電極層(51)均載有適當之電位。另該網罩(5)上開設 有對應於每一陰陽極單元之複數透孔(54),以容由電子源 發射層(43)射向螢光粉體層(33)之電子束穿越。該網罩 (5)係如第三圖所示,係以一金屬導電板為基板,即以直 做為收斂電極層(51),於其下側面布設一絕緣層(52) /再 於虡、、、邑緣層(5 2 )之下側面布設一導電層,即形成閘極層 (53) 丄其=該網罩(5)之金屬導電板(即收斂電極層(51)) 上開没有複數個成矩陣排列之透孔(5 4 ),透孔(5 4 )之位置 係對應於母陰&極單元(即電子發射源及螢光粉體)排 列,以做為陰極電子發射源層(4 3)產生電子束以射向陽極 螢光粉體層(33)時穿越網罩(5)之通道。該金屬導電板之 外圍部份為無效區域(5 5 ),該無效區域(5 5 )内之適當位置 處可設置複數個對位記號(551),以為真空封裝時對曰位之 用’以利陰、陽極單元對應於該網罩(5 )内之各透孔 (54) 〇 此種四極結構可使收斂電極層(5丨)對電子束產生收斂作 用,即限縮其扇形發散幅度,使電子束可精準的撞擊對應 之螢光粉體層(33),而不致撞擊至鄰近單元,有效提升了 1242385 五、發明說明(4) 場發射顯示器之顯像效果’惟其網罩(5 )之絕緣層(5 2 )及 閘極層(5 3 )皆係以網版印刷或黃光製程所製作,其製程較 為繁複,成本較高,仍有未臻理想之處。 【發明内容】 本發明之主要目的,即在於提供一種四極結構場發射顯 示器之網罩結構及其製造方法,其以較為簡便之網罩結構 及製造方法以取代既有之網版印刷或黃光製程,可有效簡 化製程、降低成本。 為達上述目的,本發明係以一金屬導電板形成收斂電極 層’續以一玻璃板形成絕緣層,再於該玻璃板上設置第二 導電板,即形成閘極層,以合成一三層實體結構之網罩。 【實施方式】 首請參閱第四圖,其係為本發明之網罩(6)之立體分解 圖’可看出其係由一第一導電板(61)、一玻璃板(62)及一 第二導電板(63)所組成之三層結構,其中該第一與第二導 電板(6 1 ’ 6 3 )為相同之金屬材質,分別做為收斂電極層及 閘極層之用’該第一導電板(6 1)上對應於每一組陰陽極單 疋之位置處,開設有成矩陣排列之複數第一透孔(6丨丨), 其周圍之無效區(612)(虛線外之區域)之適當位置處設有 ^個對位記號(61 3),以供封裝組合之用,且在封裝組 合完成後’該無效區(6丨2 )將會被切除。該玻璃板(6 2 )係 做為絕緣層之用,以避免兩導電板(61,63)之導通,其在 對應於第一透孔(6 11)之位置處亦開設有第二透孔(6 2 1 ),Page 7 1242385 V. Description of the invention (3) layer structure, and its convergent electrode layer (51) faces the anode plate (30), and a plurality of strip-shaped supports (34) are provided in between, the anode plate ( 30) is an anode unit composed of an anode substrate (31), an anode conductive layer (32) and a fluorescent powder layer (33), and the gate layer (53) faces the cathode plate (40), A barrier wall (44) is also arranged in between. The cathode plate (40) is a cathode unit composed of a cathode substrate (41), a cathode conductive layer (42), and an electron emission source layer (4 3). The gate layer ( 5 3) and the convergent electrode layer (51) each carry an appropriate potential. In addition, the mesh cover (5) is provided with a plurality of through holes (54) corresponding to each of the cathode and anode units, so as to allow the electron beams emitted from the electron source emission layer (43) to the fluorescent powder layer (33) to pass through. The net cover (5) is shown in the third figure, and a metal conductive plate is used as a substrate, that is, a straight electrode is used as a convergent electrode layer (51), and an insulating layer (52) is arranged on the lower side / A conductive layer is arranged on the side below the edge layer (5 2), which forms a gate layer (53). It is a metal conductive plate (ie, a convergent electrode layer (51)) of the mesh cover (5). There are no multiple through holes (5 4) arranged in a matrix, and the positions of the through holes (5 4) are arranged corresponding to the female and female & polar units (ie, the electron emission source and fluorescent powder) for cathode electron emission. The source layer (43) generates an electron beam to pass through the channel of the mesh cover (5) when it is directed to the anode phosphor powder layer (33). The peripheral part of the metal conductive plate is an invalid area (5 5). A plurality of alignment marks (551) can be set at appropriate positions in the invalid area (5 5). The positive and negative electrodes correspond to the through holes (54) in the mesh cover (5). This four-pole structure can make the converging electrode layer (5 丨) converge the electron beam, that is, limit the fan-shaped divergence amplitude. The electron beam can accurately hit the corresponding fluorescent powder layer (33) without hitting the adjacent unit, which effectively improves the 1242385 V. Description of the invention (4) The imaging effect of the field emission display 'but its net cover (5) The insulating layer (5 2) and the gate layer (5 3) are both made by screen printing or yellow light process. The process is more complicated and the cost is higher. [Summary of the Invention] The main object of the present invention is to provide a screen structure of a quadrupole field emission display and a manufacturing method thereof, which replace the existing screen printing or yellow light with a simpler screen structure and manufacturing method. Manufacturing process can effectively simplify the manufacturing process and reduce costs. In order to achieve the above object, the present invention forms a convergent electrode layer with a metal conductive plate, and then forms an insulating layer with a glass plate, and then sets a second conductive plate on the glass plate to form a gate layer to synthesize one or three layers. Mesh cover of solid structure. [Embodiment] First, please refer to the fourth figure, which is a three-dimensional exploded view of the net cover (6) of the present invention. It can be seen that it is composed of a first conductive plate (61), a glass plate (62) and a The three-layer structure composed of the second conductive plate (63), wherein the first and second conductive plates (6 1 '6 3) are made of the same metal material, and are used as the convergence electrode layer and the gate layer, respectively. The first conductive plate (6 1) is provided with a plurality of first through holes (6 丨 丨) arranged in a matrix at a position corresponding to each group of cathodes and anodes, and an invalid area (612) around it (outside the dotted line) There are ^ alignment marks (61 3) at appropriate positions of the area) for packaging and assembly, and after the packaging and assembly is completed, the 'invalid area (6 丨 2) will be cut off. The glass plate (6 2) is used as an insulation layer to avoid the conduction between the two conductive plates (61, 63). A second through hole is also provided at a position corresponding to the first through hole (6 11). (6 2 1),

1242385 五、發明說明(5) ,第二透孔(621)可選擇與第一透孔(611) 一對一對應開 设’亦可對應複數個第一透孔(6丨丨)進行開設,使每一第 二透孔U2 1 )可含蓋複數個第一透孔(6丨丨)所佔之區域,如 圖$所不者即為對應一整排第一透孔(6丨丨)所形成之長條 狀第二透孔(621 ),該玻璃板(62)之周圍亦設有與第一導 電板(6 1 )對應之無效區(6 2 2 )及對位記號(6 2 3 )。第二導電 板(63)係做為閘極層之用,其在對應於第一透孔(6i 1 )之 位,處亦開設有第三透孔(631),該第三透孔(621)可選擇 與第一透孔(6 1 1 ) —對一對應開設,亦可如第六圖所示之 另一種第二導電板(64,)之型態,對應一整排第一透孔 (61j)進行開設,另於每兩排第三透孔(631,631,)之間再 開設一長形隔離孔( 632 ),該隔離孔(632 )之兩端係延伸進 入無效區(633)内,使當無效區(633)被切除後,會在每一 排第二透孔(631 )之兩側分別形成一細長之導電條,該兩 兩成對之導電條形成多組獨立的導電路徑,可受控制而切 換其帶電位與否,當有任一組導電條帶有電位時,即形成 y沒引爽合於該組導電條間陰極單元之電子之閘極,另該 第二導電板(63)之周圍之無效區(63 3 )内亦設有對位記號 ( 634 )。此三者於對位封裝完成後即形成一獨立之網罩 (6),第五圖所示者即為其剖視圖,其第一、第二與第三 透孔(6 1 1,6 2 1,6 3 1 )成對應排列,形成電子束穿越之 道。 乂第七圖所示者為第二導電板(63,,)之另一種實施例,其 係於一中空框體( 6 36 )内布設複數條平行導線(6 3 5 ),該導1242385 V. Description of the invention (5), the second through hole (621) can be selected to be opened one-to-one corresponding to the first through hole (611), and can also be opened corresponding to a plurality of first through holes (6 丨 丨). Each second through-hole U2 1) can cover the area occupied by the plurality of first through-holes (6 丨 丨), as shown in Figure $, which corresponds to a whole row of first through-holes (6 丨 丨) An elongated second through hole (621) is formed, and the glass plate (62) is also provided with an invalid area (6 2 2) and a registration mark (6 2) corresponding to the first conductive plate (6 1). 3). The second conductive plate (63) is used as a gate layer, and a third through hole (631) is also provided at a position corresponding to the first through hole (6i 1). The third through hole (621) ) Can be selected to correspond to the first through hole (6 1 1)-one to one, or another type of the second conductive plate (64,) shown in the sixth figure, corresponding to a whole row of first through holes (61j), and another long isolation hole (632) is opened between every two rows of third through holes (631, 631,), and both ends of the isolation hole (632) extend into the invalid area (633 ), When the invalid area (633) is cut off, an elongated conductive strip is formed on each side of each row of the second through holes (631), and the two pairs of conductive strips form a plurality of independent sets. The conductive path can be controlled to switch its potential. When any group of conductive bars has a potential, it will form the gate of the electron that does not attract the cathode unit between the conductive bars of the group. A registration mark (634) is also provided in the invalid area (63 3) around the second conductive plate (63). These three will form an independent mesh cover (6) after the alignment packaging is completed. The one shown in the fifth figure is a sectional view. The first, second and third through holes (6 1 1, 6 2 1 , 6 3 1) in a corresponding arrangement, forming the way of electron beam crossing.乂 The seventh figure shows another embodiment of the second conductive plate (63 ,,), which is arranged in a hollow frame (6 36), and a plurality of parallel wires (6 3 5) are arranged.

第10頁 1242385 五、發明說明(6) 線(6 3 5 )係設於每一排第一透孔(6 11 )之兩側孔隙區,而在 虛線外之無效區被切除之後,該框體(6 3 6 )即與導線(6 3 5 ) 分離,形成每一組之二條導線(6 3 5 )夾合一排第一透孔 (6 1 1 )(亦可謂一排陰極單元),即如第八圖所示之狀態, 即由每二條一組之導線(6 3 5 )做為閘極。 至於本發明之製造方法,係選用與陰陽極板之膨脹係數 近似之導電板(6 1,6 3 )與玻璃板(6 2 ),以避免在高溫燒結 ^衣之過程中’因膨脹幅度不一而造成破裂情形。首先於 每一層板之相接面之無效區(61 2,6 22,632)塗覆UV膠及 破璃膠’續將各層板依對位記號(61 3,623,63 3 )進行對 f堆豐’對位堆疊完畢後,再以紫外線照射uv膠,使Μ膠 生暫時黏合之假固定作用,最後再以高溫夾夾持假固定 1 ^網罩(、6 ),送入高溫爐進行燒結,使UV膠因高溫而氣 、、出,並使玻璃膠產生真正之固定作用,如此 發明網罩(6 ) $制从 ^ ^ %风本 黃光势Γ H 不需使用習知之網版印刷或 益。、私,於I程方面可大幅簡化,更具有量產之經濟效 惟以上所述者,不 明’非用以侷限本發 作精神所為之任何等 圍。 ’ 過為本發明之較佳 明之專利範圍,其 效變換,均應倶屬 實施例之舉例言兒 他利用本發明之剑 本發明之專利範Page 10 1242385 V. Description of the invention (6) The line (6 3 5) is provided in the pore areas on both sides of each row of the first through holes (6 11), and after the ineffective area outside the dotted line is cut away, the frame The body (6 3 6) is separated from the wire (6 3 5) to form two wires (6 3 5) of each group sandwiching a row of first through holes (6 1 1) (also called a row of cathode units), That is, as shown in the eighth figure, each pair of wires (6 3 5) is used as the gate. As for the manufacturing method of the present invention, a conductive plate (6 1, 6 3) and a glass plate (6 2) which have an expansion coefficient similar to that of the cathode and anode plates are selected so as to avoid 'expansion due to expansion during the high temperature sintering process. This caused a rupture. First apply UV glue and glass-breaking glue to the invalid area (61 2, 6, 22, 632) of the contact surface of each layer. Continue to align each layer according to the registration mark (61 3, 623, 63 3). After the "Feifeng" alignment and stacking are completed, the UV glue is irradiated with ultraviolet rays to make the M glue temporarily adhere to the false fixation. Finally, the false fixation is held by the high temperature clamp 1 ^ mesh cover (6), and sent to the high temperature furnace for Sintering makes the UV glue gas out and out due to the high temperature, and makes the glass glue have a real fixing effect. So the invention of the net cover (6) $ 制 从 ^ ^% 风 本 黄光 势 Γ H No need to use the conventional screen version Printing or benefit. And private, can be greatly simplified in terms of the I process, and has more economic benefits of mass production. However, the above is not clear ’is not intended to limit the scope of the spirit of this development. ’As it is the scope of the patent of the present invention, its effects should be changed by way of example. He used the sword of the invention.

第11頁 1242385 圖式簡單說明 第一圖 第二圖 第三圖 第四圖 第五圖 第六圖 第七圖 弟八圖· 。 。 。 圖圖圖 圖圖圖。 體體視 視視意圖 立立剖 剖剖示解 之之部 部部罩分 例例局 局局網體。施施之 之之之立圖實實後 器器器之視二三 示示示例剖第第網 顯顯顯施合之之成 射射射實組層層組 發發發一之極極層 場場場第罩閘閘極 之之之之網之之閑 構構構罩之罩罩之 結結結網示網網示 極極極之所之之所 三四四明圖明明圖 知知知發四發發七 習習習本第本本第 # 符 表: 代份 件部 元用 [習 10.. •陽 極 板 11.. •陽 極 基 板 12.. .陽 極 導 電 層 13.. •螢 光 粉 體 層 14.. •支 撐 器 20.. •陰 極 板 21.. •陰 極 基 板 22.. •陰 極 導 電 層 23.. •電 子 發 射 源層 24.. •介 電 層 25· · •閘 極 層 30·, •陽 極 板 31.. •陽 極 基 板 32.. .陽 極 導 電 層 33· · •螢 光 粉 體 層 34· · •支稽 器 40.. ..陰極板 41.. •陰 極 基 板 42.. •陰 極 導 電 層 43.. .電 子 發 射 源層 44· · •阻 隔 壁 5· · •網 罩 51.. •收 斂 電 極 層 52.. .絕 緣 層 53· · .閘 極 層 54· · •透 孔Page 11 1242385 Brief description of the drawings The first picture The second picture The third picture The fourth picture The fifth picture The sixth picture The seventh picture . . Figure chart chart Figure chart chart. Stereo stereopsis Visual stereotypes The sections are explained in sections and parts are covered in sections. An illustration of Shi Shizhi's real image of the rear device The first gate, the gate, the net, the free structure, the structure, the cover, the knot, the net, the net, the pole, the place, and the place ## Character table in the textbook: For replacement parts [Xi .. • • Anode plate 11 .. • Anode substrate 12. .. Anode conductive layer 13 .. • Fluorescent powder layer 14 .. • Supporter 20. • Cathode plate 21 .. • Cathode substrate 22 .. • Cathode conductive layer 23 .. • Electron emission source layer 24 .. • Dielectric layer 25 .. • Gate layer 30 .. • Anode plate 31. .. • Anode substrate 32... Anode conductive layer 33 · · • Fluorescent powder layer 34 · · • Support 40. .. Cathode plate 41.. • Cathode substrate 42. • Cathode conductive layer 43. .. Electron emission source layer 44 · · • Barrier wall 5 · • • Mesh cover 51.. • Convergent electrode layer 52... Insulation Layer 53 ·· .Gate layer 54 ·· • through hole

第12頁Page 12

Claims (1)

1242385 六、申請專利範圍 1. 一種四極結構場發射顯示器之網罩結構,該網罩係設 於陽極板與陰極板之間,設有一收斂電極層、一絕緣層及 一閘極層,係包括: 一第一導電板,為一金屬板體,做為收斂電極層,其上 對應於每一組陰陽極單元之位置處,開設有複數個第一透 ; 一玻璃板,做為絕緣層,其上開設有對應於前述第一透 孔之第二透孔; 一第二導電板,為一金屬板體,做為閘極層,其上開設 有對應於前述第一透孔之第三透孔,並於兩第三透孔間開 設一長形隔離孔; 其中該三透孔形成供電子束穿越網罩之孔道。 2. 如申請專利範圍第1項所述之網罩結構,其中該第二 透孔係為與第一透孔一對一對應開設。 3. 如申請專利範圍第1項所述之網罩結構,其中該第二 透孔係為與複數個相鄰之第一透孔對應開設。 4. 如申請專利範圍第1項所述之網罩結構,其中該第三 透孔係為與第一透孔一對一對應開設。 5. 如申請專利範圍第1項所述之網罩結構,其中該第三 透孔係為與複數個相鄰且成同一排之第一透孔對應開設。 6. —種四極結構場發射顯示器之網罩結構,該網罩係設 於陽極板與陰極板之間,該網罩係設有一收斂電極層、一 絕緣層及一閘極層,係包括: 一第一導電板,為一金屬板體,做為收斂電極層,其上1242385 6. Scope of patent application 1. A net cover structure of a four-pole structure field emission display, the net cover is provided between an anode plate and a cathode plate, and is provided with a convergent electrode layer, an insulating layer and a gate layer. : A first conductive plate, which is a metal plate body, is used as a convergent electrode layer, and a plurality of first transparent plates are provided at positions corresponding to each group of the anode and anode units; a glass plate is used as an insulation layer, A second through hole corresponding to the first through hole is provided thereon; a second conductive plate is a metal plate body as a gate layer, and a third through hole corresponding to the first through hole is provided thereon; A long isolation hole is formed between two third through holes; wherein the three through holes form a hole through which the electron beam passes through the net cover. 2. The net cover structure described in item 1 of the scope of patent application, wherein the second through holes are opened one-to-one corresponding to the first through holes. 3. The net cover structure according to item 1 of the scope of patent application, wherein the second through hole is opened corresponding to a plurality of adjacent first through holes. 4. The net cover structure according to item 1 of the scope of patent application, wherein the third through-holes are opened one-to-one corresponding to the first through-holes. 5. The net cover structure described in item 1 of the scope of patent application, wherein the third through-holes are opened corresponding to a plurality of adjacent first through-holes in the same row. 6. —A net cover structure of a field emission display with a quadrupole structure, the net cover is provided between the anode plate and the cathode plate, and the net cover is provided with a convergent electrode layer, an insulating layer and a gate layer, including: A first conductive plate is a metal plate body as a convergent electrode layer. 第13頁 1242385Page 12 1242385 對應於母^一^组陰陽極單开f罢者 ΘΒ ^ y ^ ,妻 习炫早兀之位置處,開设有複數個第一透 孔; 一玻璃板,做為絕緣層,其上開設有對應於前述第一透 孔之第二透孔; =第二導電板,做為閘極層,係於一中空框體内布設複 數‘線該導線係設於第一透孔之孔隙之對應位置處; 其中該二透孔與導線之間隙形成供電子束穿越網罩之孔 道〇 7 ·如申請專利範圍第6項所述之網罩結構,其中該第二 透孔係為與第一透孔一對一對應開設。 8 ·如申請專利範圍第6項所述之網罩結構,其中該第二 透孔係為與複數個相鄰之第一透孔對應開設。 9 · 一種四極結構場發射顯示器之網罩製造方法,該網罩 係設有一收斂電極層、一絕緣層及一閘極層,係包括: 選定兩金屬導電板,以分別做為收斂電極層及閘極層; 選定一玻璃板,以做為絕緣層; 將玻璃板夾合於二導電板間,對位黏著固定。 I 0 ·如申請專利範圍第9項所述之網罩製造方法,其中該 二導電板及玻璃板之周圍之無效區分別設有複數個對位記 號。 II ·如申請專利範圍第9項所述之網罩製造方法,其係於 母一層板之相接面塗覆u V膠及玻璃膠,續將各層板依對位 g己號進行對位堆疊,再以紫外線照射υ V膠’使υ V膠產生假 固定作用,最後再將網罩送入高溫爐進行燒結固定。Corresponding to the female ^ a ^ group of anode and cathode single open f striker ΘΒ ^ y ^, at the position of Wife Xixuan early Wu, a plurality of first through holes are opened; a glass plate is used as an insulating layer, and is opened on it There is a second through hole corresponding to the aforementioned first through hole; = a second conductive plate as a gate layer, and a plurality of 'wires are arranged in a hollow frame; the wire is corresponding to the pores of the first through hole; Where the gap between the two through-holes and the wire forms an electron beam passing through the hole of the net cover. The net cover structure according to item 6 of the patent application scope, wherein the second through-hole is connected to the first through-hole. The holes are opened one-to-one. 8. The net cover structure according to item 6 of the scope of patent application, wherein the second through-holes are opened corresponding to a plurality of adjacent first through-holes. 9 · A method for manufacturing a net cover of a four-pole field emission display, the net cover is provided with a convergent electrode layer, an insulating layer and a gate layer, and includes: two metal conductive plates are selected as the convergent electrode layers and Gate layer; a glass plate is selected as an insulating layer; the glass plate is sandwiched between two conductive plates, and is fixed in position by adhesion. I 0 · The method for manufacturing a net cover according to item 9 of the scope of the patent application, wherein the ineffective areas around the two conductive plates and the glass plate are respectively provided with a plurality of alignment marks. II · The manufacturing method of the net cover as described in item 9 of the scope of the patent application, which is to apply u V glue and glass glue to the contact surface of the mother layer, and continue to stack the layers according to the registration number g. Then, uv V glue is irradiated with ultraviolet rays to make ν V glue have a false fixing effect. Finally, the net cover is sent to a high temperature furnace for sintering and fixing. 第14頁 1242385Page 14 1242385 12感ΐ申請專利範圍第9項所述之網罩製造方氺, 金屬導電板與破璃板係 ° ,其中該 材質。 ^用與陰陽極板之膨脹係數近似之 13·種四極結構場發射顯示器之網罩製造 ^ 係設有一收斂電極層、一 π / a / ,該網罩 、n宝人s、# 纟巴緣層及一閘極層,係包括· 遠=一金屬導電板,以做為收斂電極層; 匕括· 選定一玻璃板,以做為絕緣層; 製作閘極層,係於中空框體内布設複數條導線所 將玻璃板夾合於導電板與閘極層之間,對位黏著固定’12 Inductive grid cover manufacturing method described in item 9 of the scope of patent application, the metal conductive plate and the broken glass plate are °, which is the material. ^ Manufactured with a net cover of 13. four-pole structure field emission display with an expansion coefficient similar to that of the cathode and anode plates. ^ A convergent electrode layer and a π / a / are provided. The net cover, nbaorens, # 纟 巴 缘Layer and a gate layer, including: far = a metal conductive plate as a convergent electrode layer; a glass plate is selected as an insulating layer; a gate layer is made and is arranged in a hollow frame The glass plate is sandwiched between the conductive plate and the gate layer by a plurality of wires, and the position is adhered and fixed. 1 4 ·如申請專利範圍第1 3項所述之網罩製造方法,其^中, 導電板、閘極層及玻璃板之周圍之無效區分別設有&數^ 對位記號。 1 5·如申請專利範圍第1 3項所述之網罩製造方法,其係於 母' 層板之相接面塗覆U V膠及玻璃膠’續將各層板依對位 記號進行對位堆疊,再以紫外線照射UV膠,使uv膠產生假 固定作用,最後再將網罩送入高溫爐進行燒結固定。 1 6 ·如申請專利範圍第1 3項所述之網罩製造方法,其中該 金屬導電板與玻璃板係選用與陰陽極板之膨脹係數近似之 材質。 ----1 4 · The method for manufacturing a net cover as described in Item 13 of the scope of the patent application, wherein the invalid areas around the conductive plate, the gate layer and the glass plate are provided with & number ^ registration marks, respectively. 15. The method for manufacturing a net cover as described in Item 13 of the scope of the patent application, which is to apply UV glue and glass glue to the mating surface of the mother laminate. Continue to stack the laminates according to the registration marks. Then, the UV glue is irradiated with ultraviolet rays to make the UV glue produce a false fixing effect. Finally, the net cover is sent to a high-temperature furnace for sintering and fixing. 16 · The method for manufacturing a net cover as described in item 13 of the scope of the patent application, wherein the metal conductive plate and the glass plate are made of a material having an expansion coefficient similar to that of the cathode and anode plates. ----
TW93106219A 2004-03-09 2004-03-09 Structure and manufacturing method of shadow mask for quadr-pole field emission displays TWI242385B (en)

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