TWI237379B - Chip package structure and circuit substrate thereof - Google Patents
Chip package structure and circuit substrate thereof Download PDFInfo
- Publication number
- TWI237379B TWI237379B TW093114373A TW93114373A TWI237379B TW I237379 B TWI237379 B TW I237379B TW 093114373 A TW093114373 A TW 093114373A TW 93114373 A TW93114373 A TW 93114373A TW I237379 B TWI237379 B TW I237379B
- Authority
- TW
- Taiwan
- Prior art keywords
- power
- layer
- ground
- patterned
- contacts
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
Abstract
Description
1237379 五、發明說明(1) -種曰:2 :有關於一種晶片封裝結構,且特別是有關於 以封裝結構及其線路基板。 的相: ΐ”子技術的曰新月異’高科技電子產業 推陳出新,並::;人ί化:功能更佳的電子產品不斷地 導體封裝制 朝勹1工、溥、短、小的趨勢設計。目前在半 構裝元i:!中mf;,ubstrate)是經常使用的 、去「 · 八 要匕括壓合法(laminated)及增層 ^ g UP )二大類型之基板。其中,線路基板主要由 二二圖案化線路層(Patterned circuit layer)及多層 圖案化介電層(Patterned dielectric layer)交替疊合 =成,由於線路基板具有佈線細密、組裝緊湊及性能良好 等優點,使得線路基板已經成為晶片尺寸封裝(Ch i p1237379 V. Description of the invention (1)-Species: 2: It relates to a chip packaging structure, and in particular to a packaging structure and its circuit substrate. Phases: "The rapid development of the" sub-technology "of the high-tech electronics industry is innovating and ::; humanization: better-functioning electronic products continue to be packaged with conductors. Design. At present, in the semi-constructed element i:!, Mf ;, ubstrate) are often used to remove the two types of substrates: "laminated and laminated" and "g UP". Among them, the circuit The substrate is mainly composed of two or two patterned circuit layers and multiple patterned dielectric layers. As the circuit substrate has the advantages of fine wiring, compact assembly and good performance, it makes the circuit substrate Has become a chip size package (Ch ip
Scale Package, CSP)與覆晶封裝(flip chip package )之主流。The mainstream of Scale Package (CSP) and flip chip package.
一般而έ ’線路基板之圖案化線路層例如由銅箔層 (copper foil iayer)經過微影蝕刻所定義而成,而介 電層係配置於兩相鄰之圖案化線路層之間,用以隔離兩相 鄰之圖案化線路層。其中,相重疊之圖案化線路層之間係 可透過一導電通孔(Planting Through Hole, PTH)或一 導電孔(conductive via),而彼此電性連接。圖案化介 電層之材質例如為玻璃環氧基樹脂(FR-4、FR-5 )、雙順 丁 烯二酸醯亞胺(Bismaleimide-Triazine,ΒΤ)或是環Generally, a patterned circuit layer of a circuit substrate is defined by, for example, copper foil iayer through lithographic etching, and a dielectric layer is disposed between two adjacent patterned circuit layers for Isolate two adjacent patterned circuit layers. The overlapping patterned circuit layers are electrically connected to each other through a Planting Through Hole (PTH) or a conductive via. The material of the patterned dielectric layer is, for example, glass epoxy resin (FR-4, FR-5), bismaleimide-triazine (BTT), or ring
12373791237379
e:y resin)等。此夕卜’線路基板之最外層的 圖:”路層及介電層還更以一銲罩層(solder mask) liii,而輝罩層僅暴露出多數個接點(contact), :作為線路基板連接其他電子元件如晶片、被動元件的媒 圖1繪示習知一種線路基板的剖面示意目。請參照圖 1、以四層線路層之基板為例,習知的線路基板iq()主要係 二夕數:路層:10 M20、13。、140與多數個圖案化介電 層22、?24、126相互堆疊而成’而每—圖案化介電層 122、124、126介於兩相鄰之線路層u〇、12〇、i3〇、14〇 之間。通常在線路設計上,最内層之線路層丨2 〇、1 3 〇係作 為線路基板1〇〇之電源平面(power plane)或接地平面 (ground plane),以作為訊號傳遞時所需之電源輸入端 或接地端。此外,最外層之線路層11〇、14〇可經由微影蝕 刻而成為線路基板1 00之訊號導線,當訊號在最外層之圖 案化線路層110、140之間傳遞時,其電子流則可經由穿嗖 於圖案化介電層122、124、126與其上下兩側之電源平面 與接地平面之一導電通孔132 ’來達到訊號傳遞的目的, 且訊號在傳遞時可以電源平面或接地平面作為一參考電壓 所在之平面,以避免訊號失真。 在習知技術中’雖然線路基板丨00具有四層線路層 110、120、130、140,但僅有最外層之二線路層11〇、 可作為訊號傳輸之佈設(layout )空間,最内層之二線路 層1 2 0、1 3 0的大部分面積則作為一電源平面與一接地平面 1237379e: y resin) and so on. Here's the picture of the outermost layer of the circuit substrate: "The road layer and the dielectric layer are further provided with a solder mask liii, and the glow mask layer only exposes a large number of contacts, as a circuit The substrate is connected to other electronic components such as wafers and passive components. Figure 1 shows a schematic cross-section of a conventional circuit board. Please refer to Figure 1 for a four-layer circuit board as an example. The conventional circuit board iq () mainly Number of Lunar New Years: Road layer: 10 M20, 13., 140 and most of the patterned dielectric layers 22, 24, 126 are stacked on top of each other, and each of the patterned dielectric layers 122, 124, 126 is between two Adjacent circuit layers are between u0, 12o, i3o, and 14o. Generally, in the circuit design, the innermost circuit layer, 2o, and 1o are used as the power plane of the circuit board (power plane). ) Or ground plane, as the power input terminal or ground terminal required for signal transmission. In addition, the outermost circuit layers 11 and 14 can be etched by lithography to become the signal conductor of the circuit board 100. When the signal is transmitted between the outermost patterned circuit layers 110, 140, The electron flow can pass through the patterned dielectric layers 122, 124, 126 and one of the power planes and ground planes on the upper and lower sides of the conductive via 132 'to achieve signal transmission, and the signal can be transmitted to the power plane during transmission. Or the ground plane is used as a plane where the reference voltage is located to avoid signal distortion. In the conventional technology, 'although the circuit substrate 00 has four circuit layers 110, 120, 130, 140, only the outermost two circuit layers 11 〇, can be used as signal transmission (layout) space, the innermost two of the circuit layer 1 2 0, 1 3 0 most of the area as a power plane and a ground plane 1237379
五、發明說明(3) 之佈設空間。亦即,當線路基板1 〇 〇之線路層的層數為四 層、六層或八層以上時’但實際上作為訊號傳輸之層數則 相對少於或等於二層、四層或六層,其餘層數則提供訊號 傳輸之參考電壓所在的平面,因而線路基板的層數無法^ 效減少,相對地影響線路基板1 0 0的成本無法降低。此 外,習知訊號傳輸時必須穿過參考電壓所在的平面,也容 易導致訊號傳輸之不穩定性。 ^ 發明内容 因此’本發明的目的就是在提供一種線路基板,其 線路基板之線路層的層數可減少,以降低基板的製作^ 0 其中線路基 ’以增加訊 本發明的另一目的是提供一種線路基板, 板之内層的線路層可作為訊號傳輸之佈設空間 破導線的佈設面積。 本發明的又一目的 板之最外層線路層的上 的平面。 是提供一種線路基板,其中線路基 面可作為訊號導線之參考電壓所在 為達本發明之上述目A 1 主要包括多數層圖案化線二本發明提出一種線路基板 圖案化銲罩層以及一電诉曰、至少-圖案化介電層、 少—導電通孔,其電性遠二之間,且圖案化介電層具有 外,圖案化銲罩層覆蓋Jit部分圖案化線路層之間。 且電源/接地接點配置、最外層之部分圖案化線路層上 罝於圖案化銲罩層之部分表面上,j 1237379 五、發明說明(4) 電性連接該些圖案化線路層之至少一者。 依照本發明的較佳實施例所述,上述之電源/接地接 點例如包括至少一電源平面以及至少一接地平面,且電源 平面與接地平面可分別位在圖案化銲罩層之同一表面上或 不同表面上。此外,電源平面與接地平面例如為電鍍或濺 鍍所形成之一銅層,且銅層之表面還可覆蓋一防氧化層。 為達本發明之上述目的,本發明又提出一種線路基 板,主要包括一第一圖案化線路層,具有多數個第一訊號 接點,以及一第二圖案化線路層,具有多數個第二訊號接 點。此外,線路基板還具有一圖案化介電層,配置於第一 | 與第二圖案化線路層之間,而圖案化介電層具有至少一導 電通孔,其電性連接於第一與第二訊號接點之間;以及一 圖案化銲罩層,其分別覆蓋於第一與第二圖案化線路層 上,且分別暴露出第一與第二訊號接點,而一電源/接地 接點配置於圖案化銲罩層之部分表面上,並電性連接第一 或第二訊號接點之至少一者。 依照本發明的較佳實施例所述,上述之電源/接地接 點例如包括至少一電源平面以及至少一接地平面,而電源 平面可電性連接至少一第一訊號接點,且接地平面電性連 接至少一第二訊號接點。此外,線路基板還可具有一防氧U 化層,其覆蓋於第一訊號接點、第二訊號接點以及電源/ 接地接點之表面上,而防氧化層例如選自於鎳、金以及鎳 金合金其中之一。 為達本發明之上述目的,本發明提出一種晶片封裝結V. Description of the invention (3) The layout space. That is, when the number of layers of the circuit board of the circuit board is four, six, or more than eight, but the number of layers actually transmitted as a signal is relatively less than or equal to two, four, or six The remaining number of layers provides the plane on which the reference voltage for signal transmission is located, so the number of layers of the circuit substrate cannot be effectively reduced, and the cost of the circuit substrate 100 can not be reduced. In addition, the conventional signal transmission must pass through the plane where the reference voltage is located, which also easily leads to the instability of the signal transmission. ^ SUMMARY OF THE INVENTION Therefore, the object of the present invention is to provide a circuit substrate, the number of layers of the circuit substrate can be reduced to reduce the production of the substrate. A circuit substrate. The circuit layer on the inner layer of the board can be used as a layout area for signal transmission. Another object of the present invention is a plane above the outermost circuit layer of the board. It is to provide a circuit substrate, in which the base surface of the circuit can be used as the reference voltage of the signal conductor. The above-mentioned objective A 1 of the present invention mainly includes a plurality of patterned lines. The present invention proposes a patterned solder mask layer of a circuit substrate and an electrical complaint. That is, at least-patterned dielectric layer, and few-conductive vias, which are electrically between two, and the patterned dielectric layer has an outer, and the patterned solder mask layer covers between the patterned circuit layers of the Jit portion. And the power / ground contact configuration, the outermost part of the patterned circuit layer is on the surface of the patterned solder mask layer, j 1237379 V. Description of the invention (4) At least one of the patterned circuit layers is electrically connected By. According to a preferred embodiment of the present invention, the aforementioned power / ground contact includes, for example, at least one power plane and at least one ground plane, and the power plane and the ground plane may be located on the same surface of the patterned solder mask layer or On different surfaces. In addition, the power plane and the ground plane are, for example, a copper layer formed by electroplating or sputtering, and the surface of the copper layer may be covered with an anti-oxidation layer. To achieve the above object of the present invention, the present invention further provides a circuit substrate, which mainly includes a first patterned circuit layer with a plurality of first signal contacts, and a second patterned circuit layer with a plurality of second signals. contact. In addition, the circuit substrate also has a patterned dielectric layer disposed between the first and second patterned circuit layers, and the patterned dielectric layer has at least one conductive via, which is electrically connected to the first and the first. Between two signal contacts; and a patterned solder mask layer covering the first and second patterned circuit layers respectively, exposing the first and second signal contacts, and a power / ground contact It is disposed on a part of the surface of the patterned solder mask layer, and is electrically connected to at least one of the first or second signal contacts. According to a preferred embodiment of the present invention, the aforementioned power / ground contact includes, for example, at least one power plane and at least one ground plane, and the power plane can be electrically connected to at least one first signal contact, and the ground plane is electrically Connect at least one second signal contact. In addition, the circuit substrate may further include an oxygen-proof U-layer, which covers the surfaces of the first signal contact, the second signal contact, and the power / ground contact, and the anti-oxidation layer is selected from, for example, nickel, gold, and One of nickel-gold alloys. In order to achieve the above object of the present invention, the present invention provides a chip package junction
13192twf.ptd 第9頁 1237379 五、發明說明(5) ,’主要包括-線路基板、 j中’線路基板具有多數個第一d::及-晶片。 第—表面上。此外,图宏 γ於線路基板之- 表面’且暴露出該些二基板之第-^並與該些第—接點電性連接:心基板一 雷源/接地接點,配置於圖案化輝罩土反运具有, 電性連接該些第一接點之至少一者。之。卩刀表面上,亚 依照本發明的較佳實施例所述, 點例如包括一電诉平 a之電源/接地接 號接點之外圍::ΐ位於晶片接合區與該些第-訊 參考平面。此夕卜用以提供晶片與線路基板所需之電壓 面::於曰:拉:源/接地接點例如還包括-接地平 用以提供晶;;第一訊號接點之外圍表面, /、線路基板所需之接地電壓參考平面。: 傳輸基Λ具△多層訊號傳輸之結構,且訊號 罩 /接地參考平面則分別位於最外層之銲 板;大部Γ的層數與其成本。因&,線路基 加訊號導線之^面=作為訊號導線之佈設空間,進而增 顯易ηπ之上述和其他㈣、特徵、和優點能更明 細說明如下.、舉一較佳實施例,並配合所附圖式,作詳 板的ϊ ΐ 2V其繪示本發明第一實施例之-種線路基 不w θ 。線路基板2 〇 〇主要包括多數個圖案化線 13l92twf.ptd 第10頁 1237379 五、發明說明(6) 路層210、220、230、240、多數個圖案化介電層222 224、226、—一圖案化銲罩層25〇以及一電源/接^接點 260。在本實施例中,線路基板2〇〇例如為一塑膠基板,里 介電的材質例如為玻璃環氧基樹脂(FR_4、FR_g f^ 脂或是環氧樹脂等。此外,線路基板2QQ亦可為其他類型’ 之基板,例如是陶瓷基板、玻璃基板、軟他 介電常數之有機/無機基板等…,每一圖案化戈介電他層低 222、224、226介於相鄰之兩圖案化線路層21Q、22〇、 230、240之間,且圖案化介電層22 2、224、226 豆 多數個導電通孔232、234 (僅繪示其二)’其電性連接有於 部分圖案化線路層21〇、240或220、230之間。 ; 值得注意的是,在本實施例中,最内層之線路芦 220、230則不再作為線路基板2〇〇之電源平面或接地曰平 面,因而在線路設計上,最内層與最外層之線路層21〇、 220、230、240均可作為線路基板2〇〇之訊號導線^ 間,以增加訊號導線的佈設面積。此外,由 板工 200之電源平面與接地平面不位在線路基板2〇〇之内:2因 此汛唬傳輸時不會穿過參考電壓所在 號傳輸時之穩定性。 疋阳〜加Λ 同樣請參考圖2,線路基板2 0 0之第一表面20 2與第二 表面2 0 4刀別具有多數個第一訊號接點2工2以及 訊號接點242 ’這些第—與第二訊號接點⑴、…例個如第是- 3ίf層21V 240 (例如是銅箔層)以微影蝕刻的 式疋義成,且第一與第二訊號接點212、242可藉由基13192twf.ptd Page 9 1237379 V. Description of the Invention (5), ‘mainly includes-the circuit substrate, and the j 'circuit substrate has a plurality of first d :: and-wafers. No. — on the surface. In addition, Figure Macro γ is on the -surface 'of the circuit substrate and exposes the-^ of the two substrates and is electrically connected to the-contacts: the core substrate-a lightning source / ground contact, which is arranged in the patterned The covering soil has a function of electrically connecting at least one of the first contacts. Of it. On the surface of the trowel, according to the preferred embodiment of the present invention, the points include, for example, the periphery of the power / ground contact of an electric plane: a is located on the chip bonding area and the first reference planes. . In addition, it is used to provide the required voltage surface of the chip and the circuit substrate :: Yu Yue: Pull: The source / ground contact also includes, for example, a ground plane to provide a crystal; the peripheral surface of the first signal contact, /, Ground voltage reference plane required by the circuit board. : The transmission base Λ has a structure of △ multilayer signal transmission, and the signal cover / ground reference plane is located on the outermost welding plate; most of the layers of Γ and its cost. Because of &, the ^ face of the line base plus signal wire = as the space for the signal wire layout, so that the above and other features, features, and advantages of easy ηπ can be more clearly explained as follows. Take a preferred embodiment, and In accordance with the drawings, 详 V 2V, which is a detailed circuit board, shows a circuit base of the first embodiment of the present invention, w θ. The circuit substrate 2 00 mainly includes a plurality of patterned lines 13l92twf.ptd Page 10 1237379 V. Description of the invention (6) The circuit layers 210, 220, 230, 240, and a plurality of patterned dielectric layers 222 224, 226, -1 The patterned solder mask layer 25 and a power / contact 260 are provided. In this embodiment, the circuit substrate 200 is, for example, a plastic substrate, and the dielectric material is, for example, glass epoxy resin (FR_4, FR_g f ^ grease, or epoxy resin. In addition, the circuit substrate 2QQ may also be For other types of substrates, such as ceramic substrates, glass substrates, organic / inorganic substrates with soft dielectric constants, etc., each patterned dielectric layer is 222, 224, 226 lower between adjacent two patterns. Between the circuit layer 21Q, 22〇, 230, 240, and the patterned dielectric layer 22 2, 224, 226. Most of the conductive vias 232, 234 (only the second one is shown). The patterned circuit layer is between 210, 240 or 220, 230. It is worth noting that in this embodiment, the innermost circuit 220, 230 is no longer used as the power plane or ground of the circuit substrate 2000. Plane, so in circuit design, the innermost and outermost circuit layers 21, 220, 230, and 240 can be used as signal conductors of the circuit board 200 to increase the area of signal conductors. In addition, the board The power plane and ground plane of the industrial 200 are not on the line base. Within 200: 2 Therefore, the transmission stability during flood transmission will not pass through the reference voltage. Shenyang ~ plus Λ Please also refer to Figure 2, the first surface 202 and the first surface of the circuit board 2 0 0 The second surface 2 0 4 has a plurality of first signal contacts 2 and 2 and a signal contact 242 'the first—and the second signal contacts ⑴, such as the third one—a layer 21V 240 (for example, copper Foil layer) is defined by lithographic etching, and the first and second signal contacts 212, 242 can be
1237379 五、發明說明(7) 板2〇〇内部之導電通孔242而彼此電性連接,以傳遞電子士 號。此外,圖案化銲罩層2 5 0還可覆蓋於最外層之圖案化 線路層210、240上,用以保護線路,且圖案化銲罩層25〇 係顯露第一與第二訊號接點212、242,以作為線路^板 2 0 〇對外連接晶片(如圖5 )、被動元件(未繪示)或大型 印刷電路板(未繪示)之接點。 Φ 如圖2所示,本實施例於形成圖案化銲罩層25〇之後, 再形成一電源/接地接點2 6 0 (或電源/接地層)於圖案化 鲜罩層25 0之部分表面上,而電源/接地接點26〇例如是以 電鑛及/或錢鍍的方式所形成之一電源平面與一接地平 面’其材質可以是抗氧化之導電材質,例如鋁、金或豆他 合金金屬。此外,電源/接地接點2 60亦可以導電、導熱性 極佳的銅層或銅合金作為一電源平面或是一接地平面了之 後再覆蓋一抗氧化層(未繪示)於銅層之表面上,以避免 銅層產生氧化作用。其中,抗氧化層之材質可選自於鎳、 金或鎳金合金。 圖3繪示本發明之一種線路基板的俯視示意圖。圖斗繪 示本發明另一種線路基板的剖面示意圖。圖5繪示本發明 之一種晶片封裝結構的剖面示意圖。 又 值得注意的是,上述之電源平面與接地平面可位於線 路基板之同一表面上或不同表面上。如圖3所示,當電源 平面310與接地平面320位在同一表面3〇2上時,電源平面 31 0與接地平面320可分別位於線路基板3〇〇之兩側或基板 3 0 0周圍未佈設第一訊號接點3 1 2的外圍表面上,且電源平1237379 V. Description of the invention (7) The conductive vias 242 inside the board 200 are electrically connected to each other to transmit the electronic name. In addition, the patterned solder mask layer 250 can also cover the outermost patterned circuit layers 210 and 240 to protect the circuit, and the patterned solder mask layer 25 is to expose the first and second signal contacts 212. , 242, as the connection points of the circuit board 200 externally connected to the chip (as shown in Figure 5), passive components (not shown) or large printed circuit boards (not shown). Φ As shown in FIG. 2, after the patterned solder mask layer 250 is formed in this embodiment, a power / ground contact 2 60 (or power / ground layer) is formed on a part of the surface of the patterned fresh mask layer 250. And the power / ground contact 26 is a power plane and a ground plane formed by, for example, electricity mining and / or money plating. The material can be an oxidation-resistant conductive material, such as aluminum, gold, or beans. Alloy metal. In addition, the power / ground contact 2 60 can also be a conductive or thermally conductive copper layer or copper alloy as a power plane or a ground plane, and then covered with an anti-oxidation layer (not shown) on the surface of the copper layer. To avoid oxidation of the copper layer. The material of the anti-oxidation layer may be selected from nickel, gold or nickel-gold alloy. FIG. 3 is a schematic top view of a circuit substrate according to the present invention. The drawing shows a schematic cross-sectional view of another circuit substrate of the present invention. FIG. 5 is a schematic cross-sectional view of a chip packaging structure according to the present invention. It is also worth noting that the above-mentioned power plane and ground plane may be located on the same surface of the circuit substrate or on different surfaces. As shown in FIG. 3, when the power plane 310 and the ground plane 320 are located on the same surface 300, the power plane 310 and the ground plane 320 may be located on both sides of the circuit substrate 300 or around the substrate 300, respectively. Route the first signal contact 3 1 2 on the peripheral surface and
1237379 五、發明說明(8) 面3 1 0與接地平面3 2 0分別電性連接至少一第一訊號接點 3 1 4、3 1 6,而這些陣列排列之第一訊號接點3 1 2、3 1 4、 3 1 6所圍成的區域例如作為一晶片接合區3 1 8或其他電子元 件之配置區域,其中晶片(未緣示)例如以覆晶接合型態 或打線接合型態而與第一訊號接點3 1 2、3 1 4、3 1 6電性連 接。再者,如圖4所示,當電源平面4 1 0與接地平面4 2 0分 別位於線路基板之第一與第二表面402、404上方之銲罩層 4 5 0表面時,電源平面4 1 0與接地平面4 2 0可位於線路基板1237379 V. Description of the invention (8) The plane 3 1 0 and the ground plane 3 2 0 are electrically connected to at least one first signal contact 3 1 4 and 3 1 6 respectively, and the array of first signal contacts 3 1 2 The area surrounded by 3, 4 and 3 1 6 is, for example, a wafer bonding area 3 1 8 or a configuration area of other electronic components. The wafer (not shown) is, for example, a flip-chip bonding type or a wire bonding type. It is electrically connected to the first signal contact 3 1 2, 3 1 4, 3 1 6. Furthermore, as shown in FIG. 4, when the power plane 4 1 0 and the ground plane 4 2 0 are located on the surfaces of the solder mask layer 4 50 above the first and second surfaces 402 and 404 of the circuit substrate, respectively, the power plane 4 1 0 and ground plane 4 2 0 can be located on the circuit board
4 0 0之上下兩側,且分別電性連接至少一第一訊號接點41 2 與至少一第二訊號接點4 1 4。 請參考圖5,當晶片330配置於線路基板3〇〇之第一表 面3 0 2上時,電源平面3 1 0與接地平面3 2 0最好位於晶片3 3 0 所配置之表面上的外圍,特別是打線接合之晶片封裝結 構,利用本發明之大面積的電源平面3丨〇與接地平面3 2 Q, 可產生金屬屏蔽(shielding )效果,以避免傳遞訊號之 相鄰導線332之間產生電感性耦合的現象。此外,線路基 板3 0 0之第二表面3 04上還可配置多數個銲球(s〇lder 土 ball ) 340、針腳(pin )或其他導電凸塊,以作為線路The upper and lower sides of 4 0 0 are electrically connected to at least one first signal contact 41 2 and at least one second signal contact 4 1 4 respectively. Referring to FIG. 5, when the chip 330 is disposed on the first surface 3 2 of the circuit substrate 300, the power plane 3 1 0 and the ground plane 3 2 0 are preferably located on the periphery of the surface on which the chip 3 3 0 is disposed. In particular, the chip packaging structure of wire bonding, using the large-area power plane 3 丨 0 and the ground plane 3 2 Q of the present invention, can produce a metal shielding effect to avoid the occurrence of the interference between adjacent wires 332 that transmit signals. The phenomenon of inductive coupling. In addition, a plurality of solder balls (340), pins (pins), or other conductive bumps can be arranged on the second surface 3 04 of the circuit substrate 300 to serve as a circuit.
板3 0 0與外部電子裝置(例如大型印刷電路板)之間訊號 傳遞之媒介。 b [第二實施例] 圖6繪不本發明第二實施例之一種線 意圖。請參照圖6 ’以三層線路 = 50 0主要係由多數個後踗J深路基 似線路層510、52〇、54〇與多數個圖复Medium for signal transmission between board 300 and external electronic devices (such as large printed circuit boards). b [Second Embodiment] Fig. 6 is a schematic diagram of a second embodiment of the present invention. Please refer to FIG. 6 ′ The three-layer circuit = 50 0 is mainly composed of a plurality of rearward deep roadbeds, similar to the circuit layers 510, 52, and 54 and a plurality of drawings.
12373791237379
五、發明說明(9) 介電層522、524相互堆疊而成,而每一圖案化介電層 522、524介於兩相鄰之線路層51〇、520、540之間。在本 實施例之線路設計上,最内層之線路層5 2 〇係作為線路其 板500之一電源平面(p0wer piane),以作為訊號傳遞日产 所需之電源輸入端。此外,最外層之線路層5丨〇、5 4 〇可細 由微影蝕刻而成為線路基板5〇〇之訊號導線,且兩者可夢= 由導電通孔532或導電孔而電性連接,以達到訊號 =5. Description of the invention (9) The dielectric layers 522 and 524 are stacked on each other, and each patterned dielectric layer 522 and 524 is located between two adjacent circuit layers 510, 520 and 540. In the circuit design of this embodiment, the innermost circuit layer 5 2 0 is used as a power plane of the circuit board 500, and is used as a power input terminal required for signal transmission of Nissan. In addition, the outermost circuit layers 5 丨 〇, 5 4〇 can be finely etched to become signal conductors of the circuit substrate 5000, and the two can be dreamed = electrically connected by the conductive via 532 or the conductive hole, To reach the signal =
曰的。 & J 同樣請參考圖6,線路基板50 0之第一表面502與第二 表面504分別具有多數個第一訊號接點512以及多數個第二 訊號接點542,這些第一與第二訊號接點512、542例如 =t線,層51Q、54()(例如是㈣層)以微影钱刻的 方式广義而成。此夕卜,基板5〇〇之第一與第二表面5〇2、 504退可覆蓋一圖案化銲罩層550,且圖案化銲罩層55 0分 ”露出第-與第二訊號接點512、542。值得心的是, 於Λ成安圖案化薛罩層550之後,再形成一電源/接 地接點5 6 0於圖幸J卜左曰 地接點560例如是以:罩層550之部分表面上’而電源/接 平面,其材質及/或濺鑛的方式所形成之一接地 在本實施例中―:施例所述相同’在此不再贅述。 案化銲罩層55〇!Λ於接地平®(如標號56())位於圖 置一電源平面Γ 分表面上’而線路基板5 0 0之内部僅配 層數由習、知的^^號52G),故線路基板㈣之線路層的 的三層減少^ 成少為三層,而介電層的層數也由習知 曰/ 句—層’故線路基板5 0 0的層數減少且成本也Said. & J Please also refer to FIG. 6. The first surface 502 and the second surface 504 of the circuit substrate 500 have a plurality of first signal contacts 512 and a plurality of second signal contacts 542, respectively. These first and second signals The contacts 512 and 542 are, for example, t-lines, and the layers 51Q and 54 () (for example, the plutonium layer) are generalized in the manner of lithography. In addition, the first and second surfaces 502, 504 of the substrate 500 can cover a patterned solder mask layer 550, and the patterned solder mask layer 5500 "exposes the first and second signal contacts. 512, 542. It is worth noting that after the Xue cover layer 550 is patterned by Λ Chengan, a power / ground contact 5 6 0 is formed in Tuxing J. The left contact 560 is, for example, the cover layer 550. Part of the surface is a ground formed by the power source / connecting plane, its material and / or splattering method. In this embodiment, “the same as described in the embodiment” will not be repeated here. ! Λ on the ground plane (such as the reference number 56 () is located on a power plane Γ sub-surface), and the inside of the circuit board 5 0 0 is only equipped with the number of layers from the Xi, 52 ^ G, so the circuit board The number of three layers in the circuit layer is reduced ^ The number of layers is reduced to three, and the number of layers in the dielectric layer is also known from the sentence / layer-so the number of layers in the circuit substrate 5 0 0 is reduced and the cost is also reduced.
1237379 五、發明說明(10) 相對降低。此外,訊號傳輸時不會穿過接地電壓所在的 面’進而增加訊號傳輸時之穩定性。 另一方面,上述之電源平面與接地平面具有可交換 性,亦即最内層之線路層520可作為線路基板500之一接 平面,以作為訊號傳遞時所需之接地端。此外,電源/ 地接點5 6 0例如是以電鍍及/或濺鍍的方式所形成之一 平面,其餘部分均與圖6所配置之方式相同。因此,告"、 號傳輸時可以一電源平面(如標號52〇 )或一接地平二° 】如標號560)作為參考電麼所在之平面,以避免訊號失 由上述第一與第二實施例可知,本發明之 ,及其線路基板,其特徵在於線;: :做線之佈設空間,以增加訊號導線之 ΐ面:ΐ = ;Γ = ;,線路基板内部僅保留-電源 ”1、隹ί ί 線路層均可作為訊號導線之佈設 號傳輸時所需之電壓或接地參;=則 路=同的部分表面上,例如」 ^ ^ ^ t .,ν „ ,, # 點同-表面上或不同表面上,以構成一晶在片:電源::=地接 、雖然本發明已以一較佳實施例、^:冓。 ζ限定本發明,任何熟習此技藝揭=雜其並非用 砷和範圍内’當可作此 在不脫離本發明之精 乍二齐之更動與潤飾,因此本發明之保 13l92twf.Ptd 第15頁 1237379 五、發明說明(11) 護範圍當視後附之申請專利範圍所界定者為準。1237379 V. Description of the invention (10) Relative decrease. In addition, the signal transmission will not pass through the plane where the ground voltage is located, thereby increasing the stability during signal transmission. On the other hand, the above-mentioned power plane and ground plane are interchangeable, that is, the innermost circuit layer 520 can be used as a connection plane of the circuit substrate 500 as a ground terminal required for signal transmission. In addition, the power / ground contact 5 6 0 is a flat surface formed by, for example, plating and / or sputtering, and the remaining parts are the same as those configured in FIG. 6. Therefore, when transmitting signals, a power plane (such as the number 52) or a ground plane (such as the number 560) can be used as the reference plane to avoid signal loss caused by the first and second implementations. For example, it can be known that the present invention and its circuit substrate are characterized by wires; :: the space for wiring is arranged to increase the area of the signal conductor: ΐ =; Γ =;隹 ί ί The circuit layer can be used as the voltage or grounding parameter required for the signal transmission of the signal wire; = The road = the same part of the surface, such as "^ ^ ^ t., Ν„ ,, # 同 同-surface On or on different surfaces to form a crystal on the chip: power source :: = ground, although the present invention has been described in a preferred embodiment, ^: 冓. Ζ limits the present invention, anyone familiar with this technique will not be used. The arsenic and the range can be modified and retouched without departing from the essence of the present invention. Therefore, the protection of the present invention 13l92twf.Ptd page 15 1237379 V. Description of the invention (11) The ones defined in the scope of patent application shall prevail.
Hill 13192twf.ptd 第16頁 1237379Hill 13192twf.ptd Page 16 1237379
圖3繪示本發明之一種線路基板的俯視示音 圖4繪示本發明另一種線路基板的剖面示:。 圖5繪示本發明之一種晶片封裝結構的剖;圖: 圖6繪不本發明第二實施例之一種 =思、圖。 意圖。 板的剖面示 圖式標不說明】 1 〇 〇 ·線路基板 14 〇 :線路層 圖案化介電層 110 、 120 、 130 122 、 124 、 126 1 3 2 :導電通孔 第 2 0 0 :線路基板 202、204 :第一表面 210、220、230、240 :圖案化線路層 2 1 2、242 :第一訊號接點、第二訊號接點 222、224、226 :圖案化介電層 232、234 :導電通孔 2 5 0 :圖案化銲罩層 26 0 :電源/接地接點 3 0 0 :線路基板 3 0 2、3 04 :第一表面、第二表面FIG. 3 is a top view of a circuit substrate of the present invention. FIG. 4 is a cross-sectional view of another circuit substrate of the present invention. FIG. 5 is a cross-sectional view of a chip packaging structure according to the present invention; FIG. 6 is a diagram showing a second embodiment of the present invention. intention. The diagram of the cross-section of the board is not explained. 1 0 ·· Circuit substrate 14 〇: Circuit layer patterned dielectric layer 110, 120, 130 122, 124, 126 1 3 2: Conductive via hole 2 0 0: Circuit substrate 202, 204: first surface 210, 220, 230, 240: patterned circuit layer 2 1 2, 242: first signal contact, second signal contact 222, 224, 226: patterned dielectric layers 232, 234 : Conductive through hole 2 5 0: Patterned solder mask layer 26 0: Power / ground contact 3 0 0: Circuit board 3 0 2, 3 04: First surface, second surface
13192twf.ptd 第17頁13192twf.ptd Page 17
1237379 圖式簡單說明 3 1 0 :電源平面 3 1 2、3 1 4、3 1 6 :第一訊號接點 318 晶 片 接 合區 320 接 地 平 面 330 晶 片 332 導 線 340 銲 球 400 線 路 基 板 402、404 ··第一表面、第二表面 4 1 0 :電源平面 4 1 2、4 1 4 :第一訊號接點、第二訊號接點 420 接地平面 450 銲罩層 500 線路基板 502、504 ··第一表面、第二表面 5 1 0、5 2 0、5 4 0 :線路層 5 1 2、5 4 2 :第一訊號接點、第二訊號接點 522、524 :圖案化介電層 532 導電通孔 550 圖案化銲罩層 560 電源/接地接點1237379 Brief description of the diagram 3 1 0: power plane 3 1 2, 3 1 4, 3 1 6: first signal contact 318 chip bonding area 320 ground plane 330 chip 332 wire 340 solder ball 400 circuit board 402, 404 ·· First surface, second surface 4 1 0: power supply plane 4 1 2, 4 1 4: first signal contact, second signal contact 420 ground plane 450 solder mask layer 500 circuit substrate 502, 504 · · first surface 2nd surface 5 1 0, 5 2 0, 5 4 0: circuit layer 5 1 2, 5 4 2: first signal contact, second signal contact 522, 524: patterned dielectric layer 532 conductive via 550 patterned solder mask layer 560 power / ground contact
13192twf.ptd 第18頁13192twf.ptd Page 18
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW093114373A TWI237379B (en) | 2004-05-21 | 2004-05-21 | Chip package structure and circuit substrate thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW093114373A TWI237379B (en) | 2004-05-21 | 2004-05-21 | Chip package structure and circuit substrate thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI237379B true TWI237379B (en) | 2005-08-01 |
TW200539415A TW200539415A (en) | 2005-12-01 |
Family
ID=36821432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093114373A TWI237379B (en) | 2004-05-21 | 2004-05-21 | Chip package structure and circuit substrate thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI237379B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI512921B (en) * | 2012-05-29 | 2015-12-11 | Unimicron Technology Corp | Carrier structure, chip package structure and manufacturing method thereof |
TWI555167B (en) * | 2014-01-29 | 2016-10-21 | 矽品精密工業股份有限公司 | Semiconductor package and manufacturing method thereof |
TWI824414B (en) * | 2022-02-16 | 2023-12-01 | 矽品精密工業股份有限公司 | Electronic package and manufacturing method thereof |
-
2004
- 2004-05-21 TW TW093114373A patent/TWI237379B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW200539415A (en) | 2005-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10134663B2 (en) | Semiconductor device | |
US6218731B1 (en) | Tiny ball grid array package | |
US7170162B2 (en) | Chip embedded package structure | |
US8058721B2 (en) | Package structure | |
EP2548225B1 (en) | System-in-package using embedded-die coreless substrates, and processes of forming same | |
KR101535223B1 (en) | Tape wiring substrate, chip on film package and device assembly including the same | |
US20030133274A1 (en) | Integrated circuit package and method of manufacture | |
US7253526B2 (en) | Semiconductor packaging substrate and method of producing the same | |
JP2008270810A (en) | Semiconductor device package for improving functional capability of heat sink, and grounding shield | |
WO2020228704A1 (en) | Embedded packaging structure and preparation method therefor, and terminal | |
KR20140057979A (en) | Semiconductor package and method of manufacturing the semiconductor package | |
JP2002329802A (en) | Semiconductor package, its manufacturing method and semiconductor device | |
JP2005150748A (en) | Semiconductor chip package having decoupling capacitor and method for manufacturing same | |
KR20140057982A (en) | Semiconductor package and method of manufacturing the semiconductor package | |
US9462704B1 (en) | Extended landing pad substrate package structure and method | |
KR20160066311A (en) | semi-conductor package and manufacturing method thereof | |
KR20240017393A (en) | Semiconductor device and manufacturing method thereof | |
JP7301919B2 (en) | Circuit board with constrained solder interconnect pads | |
JP2003332377A (en) | Organic substrate for flip-chip bonding | |
TWI237379B (en) | Chip package structure and circuit substrate thereof | |
JP2004193186A (en) | Wiring board, its manufacturing method, and semiconductor device | |
TWI811764B (en) | Semiconductor emi shielding component, semiconductor package structure and manufacturing method thereof | |
TWI360216B (en) | Package substrate with high heat dissipation capab | |
KR101920434B1 (en) | Printed circuit board and manufacturing method thereof | |
JPH1131713A (en) | Bga semiconductor device using film carrier tape |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |