TWI235819B - Testing method for polariscope - Google Patents

Testing method for polariscope Download PDF

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Publication number
TWI235819B
TWI235819B TW093103118A TW93103118A TWI235819B TW I235819 B TWI235819 B TW I235819B TW 093103118 A TW093103118 A TW 093103118A TW 93103118 A TW93103118 A TW 93103118A TW I235819 B TWI235819 B TW I235819B
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TW
Taiwan
Prior art keywords
light source
light
detection device
polarizer
patent application
Prior art date
Application number
TW093103118A
Other languages
Chinese (zh)
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TW200526920A (en
Inventor
Shih-Feng Yeh
Yao-Chung Cheng
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Optimax Tech Corp
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Application filed by Optimax Tech Corp filed Critical Optimax Tech Corp
Priority to TW093103118A priority Critical patent/TWI235819B/en
Priority to KR1020040075142A priority patent/KR20050080724A/en
Priority to JP2004317901A priority patent/JP2005227262A/en
Application granted granted Critical
Publication of TWI235819B publication Critical patent/TWI235819B/en
Publication of TW200526920A publication Critical patent/TW200526920A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Abstract

The present invention is related to a checking method for a polariscope. The method includes processes of a selected beam of light passing through a filter, a polarizer, a concave lens or a filter, a mirror, a concave lens and finally to an optical coating sample; the optical coating sample is rotated along z-axis to ascertain that if there is any variation of shade in an optical domain, in order to differentiate defective samples from qualified ones. By applying the method of the present invention, gooseflesh in thickness of the optical coating is apparently ascertained by a naked eye easily while feeding and checking results can be reflected to a factory owner. The cost for the checking is not too much and no expensive instruments need to be set up additionally; moreover, an addition processing of polarizing plate pasting is needless and the sample itself can be checked. Therefore, the checking method has a simplified procedure and it does not take much time to finish the checking.

Description

1235819 五、發明說明（1) 【發明所屬之技術領域· 二發明係為一種偏極片的檢測方法 光源經過—省尖Η ^ 田 挑選後之 鏡子？-fKr起偏器、1透鏡或是-渡光片、 凹透叙至一光學膜樣品；移動光與暖样口 =後=學膜樣品沿z轴旋轉，並判別、：= 為合：：品則該光學膜樣品有瑕广此；若無1光= 【先前技術】 杳在製作偏光膜時，導入新 乂避免將來成品有瑕疲。然 ’膜厚度的不均勻性便是一 主要乃是因為偏光膜的膜厚 往往當偏光膜在前製程到 ^ ’以致增加生產成本。 型光學膜物料往往需先行檢 而有些瑕疵並非肉眼可以分 例。膜厚度的不均勻性的成 不均勻，肉眼無法明顯辨 半成品時瑕疯才被檢查出 檢杳當偏光膜在前製程到半成品時’需要在偏光直交透過 :〜才能明顯辨別出亂視（G〇〇sef Ush)嚴重的程度，此檢 ^方法時機似乎有些晚，因為在半成品時方能檢查出瑕 ； 成本效益並不大。 因*在與光學膜物料的上游廠商反應瑕疵時，亦有困難。 杳膜^度的不均勻性無法以肉眼辨識，需至半成品方可檢 ^出來’無法在進料時即時反映給廠商。同時，此膜厚度 難^均勾性無法以言語明確形容亦無一標準，有溝通上的 、处 U成上游廠商對於膜厚度的不均勻性情況亦無頭1235819 V. Description of the invention (1) [Technical field to which the invention belongs · The second invention is a detection method of polarizers] The light source passes through—the sharp point of the province ^ Tian After the mirror is selected? -fKr polarizer, 1 lens or -crossing lens, concave to an optical film sample; moving light and warm sample port = rear = the film sample rotates along the z axis, and discriminates: This optical film sample has many flaws; if there is no light = [prior art] 导入 When making polarizing film, introduce new 乂 to avoid flaws in the finished product in the future. However, the non-uniformity of the film thickness is one of the main reasons, because the film thickness of the polarizing film is often when the polarizing film is in the previous process to increase the production cost. Type optical film materials often need to be checked first, and some defects are not visible to the naked eye. The non-uniformity of the film thickness becomes non-uniform, and the flaw is detected when the semi-finished product cannot be clearly discerned by the naked eye. When the polarizing film is in the previous process to the semi-finished product, it needs to pass through the polarized light at right angles: 〇〇sef Ush) severity, this inspection method seems to be a bit late, because defects can only be detected in the semi-finished product; cost-effectiveness is not great. It is also difficult to react to defects with upstream manufacturers of optical film materials. The non-uniformity of the film thickness cannot be identified with the naked eye, and it can only be detected until it is semi-finished. It cannot be immediately reflected to the manufacturer when feeding. At the same time, the thickness of this film is difficult to ^ uniformity can not be clearly described in words, there is no standard, there are communication, processing, upstream manufacturers have no problem with the uneven thickness of the film

1235819 五、發明說明（2) 緒。因為光學膜物料的上游廠商本身對於膜厚度的不均勻 性瑕疵瞭解不深並且肉眼無法明顯辨識，即便欲改善亦不 知從何改善起。 由於上述種種原因，於是醞釀此發明之動機。然而解 決方案不宜耗時過久，以便能在進料時即能檢測並反映給 廠商，無需等到半成品時方可檢查出來。最重要的目的是 能突顯出不均勻膜厚度的缺點，同時最好能以肉眼辨識， 而不需依賴儀器做檢測。 雖然本產業目前尚無相關的檢測方法，但是在其他產 業仍有他案可供參考。半導體產業聯誠積體電路公司所申 請中華民國專利證號1 0 7 2 6 1 「透光膜表層缺陷檢測方 法」，該發明為檢測半導體晶圓表面之缺陷，事先必須預 鑛上一抗透射層來進行檢測，該透射層成分可為氮化石夕 (Silicon Nitride)、氧石夕氮化物（Silicon Oxynitride)、金屬鈦（Ti)、氮化鈦（TiN)、鈦鎢（TiW)化 合物或光阻類材料。另外，萬國商業機器公司所申請的中 華民國專利證號8 2 8 8 5 「薄膜厚度之檢查方法」，該發明 為使用一掃描測距儀檢測一彩色濾波器薄膜厚度的檢測方 法。 【發明内容】 本發明係為一種偏極片的檢測方法，其第一目的在於 解決膜厚度的不均勻性難以肉眼辨識之難處；本發明之檢 測方法可輕易以肉眼明顯辨別膜厚度的不均勻性現象。1235819 V. Description of Invention (2) Introduction. Because the upstream manufacturers of optical film materials themselves do not know much about the unevenness of film thickness and cannot clearly recognize it with the naked eye, even if they want to improve, they do not know where to improve. For various reasons mentioned above, the motivation for this invention was then brewed. However, the solution should not take too long, so that it can be detected and reflected to the manufacturer at the time of feeding, without waiting for the semi-finished product to be checked out. The most important purpose is to highlight the disadvantages of non-uniform film thickness. At the same time, it is best to identify it with the naked eye without relying on instrumentation for detection. Although there is no relevant detection method in this industry, there are still other cases available for reference in other industries. Semiconductor industry Liancheng Integrated Circuit Company applied for the Republic of China patent certificate number 1 0 7 2 6 1 "Transparent film surface layer defect detection method", the invention in order to detect defects on the surface of the semiconductor wafer, you must pre-mine a anti-transmission The transmission layer may be composed of silicon nitride (Silicon Nitride), silicon oxide (Silicon Oxynitride), titanium metal (Ti), titanium nitride (TiN), titanium tungsten (TiW) compound or light Resistive materials. In addition, the Republic of China Patent No. 8 2 8 8 5 "Method for inspecting film thickness" filed by IWC is an inspection method for detecting the thickness of a color filter film using a scanning rangefinder. [Summary of the Invention] The present invention is a method for detecting polarizers. The first purpose of the present invention is to solve the problem that the unevenness of the film thickness is difficult to identify with the naked eye. The detection method of the present invention can easily distinguish the unevenness of the film thickness with the naked eye Sex phenomenon.

1235819 五、發明說明（3) 本發明係為一種偏極片的檢測方法，其第二目的在於 進料時即可檢查並反映給廠商，無需到半成品時，在偏光 直交透過檢查才能明顯辨別出膜厚度的不均勻性。 本發明係為一種偏極片的檢測方法，其第三目的在於 ;会測成本不南’無需添增貴重設備，亦無需經過已為成品 或半成品之偏光膜，樣品本身即可拿來檢測，程序簡潔耗 時不長。 本發明係為一種偏極片的檢測方法，係由一挑選後之 光源經過一濾光片、一起偏器、一凹透鏡或是一濾、光片、 一鏡子、一凹透鏡至一光學膜樣品；移動光學膜樣品調整 焦距後將光學膜樣品沿Z軸旋轉，並判別光域明暗是否有 變化；若有，則該光學膜樣品有瑕疵；若無，該光學膜樣 品為合格樣品。 為使熟悉該項技藝人士瞭解本發明之目的、特徵及功 效，茲藉由下述具體實施例，並配合所附之圖式，對本發 明詳加說明如后： 【實施方式】 本發明使用偏極光線照射透明光學膜，利用因為膜厚 不均勻所導致的相位差，使得射出的光線投射在白色屏幕 上時有明暗之分，由此而判別是否有膜厚不均勻 (G〇〇sef1esh)的現象。 請參照第1圖與第3圖，其係為本發明第一較佳實施 例之檢測流程圖與本發明第一較佳實施例之檢測設備圖1235819 V. Description of the invention (3) The present invention is a method for detecting polarizers. The second purpose is to check and reflect to the manufacturer when the material is fed. When the semi-finished product is not required, it can be clearly identified when the polarized light is transmitted through. Non-uniformity in film thickness. The present invention is a method for detecting polarizers, and its third purpose is that the cost of the test is not high. No need to add expensive equipment or pass through the polarizing film that is already a finished or semi-finished product. The sample itself can be used for testing. The program is simple and does not take long. The invention is a method for detecting polarizers. A selected light source passes through a filter, a polarizer, a concave lens or a filter, a light filter, a mirror, a concave lens, and an optical film sample. After the optical film sample is moved to adjust the focal length, the optical film sample is rotated along the Z axis, and it is judged whether there is a change in the brightness of the light field; if so, the optical film sample is defective; if not, the optical film sample is a qualified sample. In order to make those skilled in the art understand the purpose, features and effects of the present invention, the following specific examples and the accompanying drawings are used to explain the present invention in detail as follows: [Embodiment] The present invention uses The polar light irradiates the transparent optical film, and the phase difference caused by the uneven film thickness is used to make the emitted light projected on a white screen. There is a difference between light and dark, so as to determine whether there is an uneven film thickness (G〇〇sef1esh) The phenomenon. Please refer to FIG. 1 and FIG. 3, which are a detection flowchart of the first preferred embodiment of the present invention and a detection equipment diagram of the first preferred embodiment of the present invention.

1235819 圖式簡單說明 第1圖為本發明第一較佳實施例之檢測流程圖； 第2圖為本發明第二較佳實施例之檢測流程圖； 第3圖為本發明第一較佳實施例之檢測設備圖式； 第4圖為本發明第二較佳實施例之檢測設備圖式。 圖號編號說明1235819 Brief description of the drawings. Figure 1 is a detection flowchart of the first preferred embodiment of the present invention. Figure 2 is a detection flowchart of the second preferred embodiment of the present invention. Figure 3 is a first preferred implementation of the present invention. FIG. 4 is a diagram of a detection device according to a second preferred embodiment of the present invention. Drawing number description

第13頁 11 光源 12 聚苯乙烯板 13 濾光片 14 起偏器 15 凹透鏡 16 樣品 17 屏幕 18 成像 21 光源 23 濾光片 24 鏡子 25 凹透鏡 26 樣品 27 屏幕 28 成像 步驟 101 光源選擇 步驟 102 判別可產生最清楚投射影色之光源 步驟 103 固定光學膜樣品 1235819 圖式簡單說明 步 驟 104 光 源 經 過 一 聚 苯 乙 烯 (Polystyre )ne 丨）板 以 強 化 偏 極 化 之 光 步 驟 105 光 源 經 過 一 濾 光 片 使 所欲之波長 範 圍 可 通 過 步 驟 106 光 源 經 過 一 起 偏 器 使 檢測之光偏 極 化 步 驟 107 光 源 經 過 一 凹 透 鏡 將 檢測之光放 大 步 驟 108 將 光 學 膜 樣 品 在 光 源 移動以調整 焦 距 步 驟 109 將 光 學 膜 樣 品 沿 Z轴逆時針旋轉 步 驟 110 判 別 光 域 明 暗 是 否 有 變4匕 步 驟 111 合 格 步 驟 112 不 合 格 步 驟 113 結 束 步 驟 201 光 源 選 擇 步 驟 202 判 別 可 產 生 最 清 楚 投 射影色之光 源 步 驟 203 固 定 光 學 膜 樣 品 步 驟 204 光 源 經 過 一 濾 光 片 使 所欲之波長 範 圍 可 通 過 步 驟 205 光 源 經 過 一 鏡 子 使 檢 測之光反射 步 驟 206 光 源 經 過 一 凹 透 鏡 將 檢測之光放 大 步 驟 207 將 光 學 膜 樣 品 在 光 源 移動以調整 焦 距 步 驟 208 將 光 學 膜 樣 品 沿 Z轴逆時針旋轉 步 驟 209 判 別 光 域 明 暗 是 否 有 變4匕 步 驟 210 合 格 步 驟 211 不 合 格Page 13 11 Light source 12 Polystyrene plate 13 Filter 14 Polarizer 15 Concave lens 16 Sample 17 Screen 18 Imaging 21 Light source 23 Filter 24 Mirror 25 Concave lens 26 Sample 27 Screen 28 Imaging step 101 Light source selection step 102 Discrimination The light source that produces the clearest projection shadows Step 103 Fixing the optical film sample 1235819 Simple illustration of the step 104 The light source passes through a polystyre (neat) plate to strengthen the polarized light Step 105 The light source passes through a filter The desired wavelength range can be polarized by step 106. The light source is polarized by a polarizer. Step 107. The light source is amplified by a concave lens. Step 108: Move the optical film sample to the light source to adjust the focus. Rotate counterclockwise along the Z axis. Step 110 Determine whether the light and shade have changed. Step 111 Pass step 112 Fail step 113 End Step 201 Light source selection Step 202 Identify the light source that produces the clearest projection shadow Step 203 Fix the optical film sample Step 204 The light source passes a filter to make the desired wavelength range pass Step 205 The light source passes a mirror to reflect the detected light step 206 The light source passes a concave lens to magnify the detection light. Step 207 Move the optical film sample in the light source to adjust the focus. Step 208 Rotate the optical film sample counterclockwise along the Z axis. Step 209 Determine whether the light field has changed. 4 Step 210 Pass step 211 Disqualified

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Claims (1)

1235819 __案號 93103118 六、申請專利範圍1235819 __ Case No. 93103118 VI. Application scope 1 · 一種偏極片的檢測方法，包括： (1)選擇一光源； (2)判別該光源是否可產生最清楚投射影色，若 進行下一步驟；若否，則回至步驟（1); 、 (3 )固定光學膜樣品，並進行下一步驟； (4 )將比較後之光源經過一檢測裝置照射至光學 品’並進行下一步驟； (5) 將光學膜樣品移動以調整焦距，並進行下_ + 驟； v (6) 將光學膜樣品沿z轴旋轉，並進行下一步驟； (7 I判別光域明暗是否有變化，若否，則進行下丄 驟；若是，則進至步驟（9 ); ’ (8) 該光學膜樣品經檢測為合格，並進行至步驟 (10)， (9) 該光學膜樣品經檢測為不合格，並進行下一步 (1 0)結束。 偏極片的檢測方法， 反射式檢測裝置與穿 2·如申請專利範圍第1項所述之一種 其中該步驟4所述之檢測裝置可為 透式檢測裝置之任一選項。 3·如申請專利範圍第2項所# - 盆Φ辞空、未JL £偈極片的檢測方沐 其中該牙透式檢測裝置之使用方法包含去 ⑷）光源經過一遽光片； …列步驟： (4 c)光源經過一起偏器；1 · A method for detecting polarizers, including: (1) selecting a light source; (2) judging whether the light source can produce the clearest projection shadow, if proceeding to the next step; if not, return to step (1) ;, (3) fix the optical film sample and proceed to the next step; (4) irradiate the compared light source to the optical product through a detection device and proceed to the next step; (5) move the optical film sample to adjust the focus (6) Rotate the optical film sample along the z-axis and proceed to the next step; (7 I determine whether there is a change in the light field brightness and darkness, and if not, proceed to the next step; if so, then Proceed to step (9); '(8) The optical film sample is tested as qualified and proceeds to step (10), (9) The optical film sample is tested as failed and proceeds to the next step (1 0). Detection method of polarizer, reflective detection device and wear 2. As described in item 1 of the scope of patent application, where the detection device described in step 4 can be any option of transparent detection device. The scope of patent application No.2 Institute #-Inspection of ΦΦ 辞 vacancy, not JL £ 偈Square method using Mu wherein the teeth of the detection device comprises permeable to ⑷) light rays through a hurry; ... the steps of: (4 c) with light through a polarizer; 1235819 _$ 號 93_103118 % 月—^ 日 偬 π：_ 六、申請專利範圍 (4D)光源經過一凹透鏡。 4 ·如申請專利範圍第3項所述之一種偏極片的檢測方法， 其中該穿透式檢測裝置之使用方法可在步驟（4Β )前添增 一步驟： (4Α)光源經過一聚苯乙烯（Polystyrene)板； 5.如申請專利範圍第3項所述之一種偏極片的檢測方法， 其中該穿透式檢測裝置之使用方法可在步驟（4D )後添增 一步驟： (4E)使光照射至一屏幕上。 6·如申請專利範圍第2項所述之一種偏極片的檢測方法， 其中該反射式檢測裝置之使用方法包含下列步驟： (4A’）光源經過一濾光片； (4B’）光源經過一鏡子反射； (4C’）光源經過一凹透鏡。 7 ·如申請專利範圍第6項所述之一種偏極片的檢測方法， 其中該反射式檢測裝置之使用方法可在步驟（4C，）後添 增一步驟： ” (4D’）使光照射至一屏幕上。 8·如申請專利範圍第1項所述之一種偏極片的檢測方法， 其中該檢測方法欲檢測之波長範圍同時涵蓋紅光、藍光 與綠光之波長範圍。1235819 _ $ No. 93_103118% Month — ^ Day 偬 π: _ VI. Patent Application (4D) The light source passes through a concave lens. 4 · A method for detecting a polarizer as described in item 3 of the scope of patent application, wherein the method of using the penetrating detection device can be added with a step before step (4B): (4Α) the light source passes through a polybenzene Polystyrene board; 5. A method for detecting a polarizer as described in item 3 of the scope of patent application, wherein the method of using the penetrating detection device can be added after step (4D): (4E ) Make light shine on a screen. 6. A method for detecting a polarizer as described in item 2 of the scope of the patent application, wherein the method of using the reflective detection device includes the following steps: (4A ') the light source passes through a filter; (4B') the light source passes through A mirror reflection; (4C ') the light source passes through a concave lens. 7 · A method for detecting a polarizer as described in item 6 of the scope of the patent application, wherein the method of using the reflective detection device may include a step after step (4C,): "(4D ') to irradiate light To a screen. 8. A method for detecting a polarizer as described in item 1 of the scope of patent application, wherein the wavelength range to be detected by the detection method simultaneously covers the wavelength ranges of red light, blue light and green light. -II ―1-II ―1
TW093103118A 2004-02-10 2004-02-10 Testing method for polariscope TWI235819B (en)

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TW093103118A TWI235819B (en) 2004-02-10 2004-02-10 Testing method for polariscope
KR1020040075142A KR20050080724A (en) 2004-02-10 2004-09-20 Testing method for a polarizing plate
JP2004317901A JP2005227262A (en) 2004-02-10 2004-11-01 Polarizer testing method

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