TWI229700B - Amorphous soft magnetic alloy powder, and green compact core and radio wave absorber using the same - Google Patents

Abstract

To provide amorphous soft magnetic alloy powder which has high saturation magnetization and low core loss and which is almost spherical and manufactured by water atomization method, and to provide a green compact core and radio wave absorber using the same. This amorphous soft magnetic alloy powder is formed substantially spherical by the water atomization method. The powder mainly consists of Fe and contains at least P, C and B, and is formed of amorphous soft magnetic alloy powder consisting of an amorphous phase with a temperature interval DeltaTx of the supercooled liquid of >= 20K. A green compact core is formed by solidifying the granulated mixture of this amorphous soft magnetic alloy powder, insulator and lubricant. The radio wave absorber is formed by mixing the amorphous soft magnetic alloy powder the particles of which is flattened and insulator.

Description

1229700 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a crystalline soft magnetic alloy powder, a powder core using the same, and an electromagnetic wave absorber, and particularly to a nearly spherical shape which can be manufactured by a water atomization method Amorphous soft magnetic alloy powder, its powder producing core and electromagnetic wave absorber. [Prior technology] It has been known that alloys composed of TM-A1_Ga-p-C_B-Si series (TM is a transition metal element such as Fe, Co, Ni, etc.) are quenched by quenching the alloy melt An amorphous phase is formed, and an amorphous soft magnetic alloy is formed by them (for example, refer to Patent Document 3). In particular, in this amorphous soft magnetic alloy, those having a specific composition are known to have a wide range of supercooled liquid states at a temperature range of crystalline ^ and constitute a so-called metallic glassy alloy. This metallic vitreous alloy has excellent soft magnetic properties, and can form a thicker monolithic sheet material that is thicker than an amorphous soft magnetic alloy ribbon produced by a liquid quenching method. However, since conventional metallic glass is produced by a method such as a liquid quench method such as a single roll method, the alloy itself is required to have a considerable degree of crystal form forming ability. ° Therefore, the development of metallic glass is based on the improvement of the amorphous forming ability of the alloy as the main purpose, and the alloy composition that can achieve this goal is taken as the point of view. However, the composition that can improve the amorphous forming ability of the alloy is not necessarily related to O: \ 86 \ 86694.DOC -6- 1229700 The alloy composition of high soft magnetic properties is consistent, so in order to improve the high saturation magnetization and soft magnetic properties, there is still room for further improvement. In addition, conventional metallic glass cannot use high-cost Ga to increase the yield. Therefore, a composition capable of reducing costs has been required. In addition, a metallic glass manufactured by a single roll method or the like can obtain a thin strip shape having a thickness of about 200 μm. When such a thin strip-shaped metallic glass is used in a magnetic core such as a transformer or a choke coil, for example, the thin strip is pulverized into a powder, and a bonding material such as a resin is mixed in the powder, and the powder is solidified into a predetermined shape. To make powder cores. The powder thus obtained is produced by pulverizing a thin strip, and therefore contains a large amount of flake-shaped deformed powder. Therefore, the forming density of the magnetic core is reduced, and it is difficult to ensure the insulation between the powders. Therefore, the magnetic characteristics of the magnetic core itself may sometimes be caused Deterioration. In addition, other prior art documents related to the present invention include Patent Documents 5 to 8. Patent Document 1: Japanese Patent Application Laid-Open No. 08-333660 Patent Document 2: Japanese Patent Application Laid-Open No. 08-037107 Patent Literature 3: Japanese Patent Application Laid-Open No. 09 — Patent Publication No. 256122 Patent Literature 4: Patent No. 2574174 Patent Literature 5: Japanese Patent Publication No. 63-1117406 Patent Literature 6: Japanese Patent Publication No. 57-185957 Patent Literature 7: Patent Publication No. 06-158239 8: Japanese Unexamined Patent Publication No. 01-156452, ten pairs of questions mentioned above are proposed—A1—y-based alloys and permalloy—one end (for example, refer to Patent Document 2). The soft magnetic alloy powder

O: \ 86 \ 86694.DOC 1229700 The manufacturing method uses a gas spray method or a water spray method that sprays and melts an alloy melt with an inert gas. According to the above Fe-Al-Si-based alloy powder and Lao Permalloy powder, in the case of Fe-Al-Si-based alloy powder, a relatively low core loss can be obtained, but the saturation magnetization is reduced, and the DC overlap characteristics are deteriorated; And "the core c of Permalloy alloys has a high loss," in fact, there is still room for improvement. Therefore, in order to solve this problem, it is expected that by powdering Fe-based amorphous alloys, a combination of high net clean magnetization and low core loss will be obtained. The powder core, but as mentioned above, the shape of the powder is not optimized, and for powder cores using amorphous alloy powder, powders with good magnetic properties are still not obtained. According to the above-mentioned gas spray method, although it can be obtained Amorphous soft magnetic alloy powder with a spherical shape and few impurities (less oxygen content). However, in order to pulverize and cool the alloy melt, a large amount of expensive inert gas must be used, which results in increased manufacturing costs. Moreover, the alloy is pulverized with inert gas. Melting liquid, it is difficult to expand the manufacturing equipment. Because the above inert gas system is supplied from the gas cylinder, the crushing pressure is increased. Manufacturing efficiency. Therefore, in addition to increasing the cost, the spherical amorphous soft magnetic alloy powder produced by the gas spray method has a problem of detrimental productivity. See = Research on the water spray method in the atmospheric environment Using water spray method instead of v and fruit can make the manufacturing equipment large: crush the alloy melt under high pressure, so it can increase the output, and in the fogging method, it is in contrast to the case of using an inert gas. In comparison, its cooling rate is 22%, which is easy to be amorphized, but the amorphous shape obtained by the water spray method: 'unshaped' by the end.

O: \ 86 \ 86694.DOC 1229700 Moreover, although Fe—Si—B based spherical non-shaped alloy powder or Co based spherical amorphous alloy powder can be manufactured using the gas spray method, the use of = is fast. It is difficult to produce a spherical amorphous alloy powder having the above composition by a general water spray method. The surface of this amorphous amorphous alloy powder has many irregularities, so it has a low degree of mixing. When mixed with the above-mentioned bonding material, it is very difficult to obtain a compacted powder with excellent characteristics. core. In addition, when the amorphous alloy powder is in an amorphous shape, the product obtained by Atleta processing of the outer-Japanese alloy powder is cured and formed into a sheet shape together with the above-mentioned bonding material to produce an electromagnetic wave absorber. During Atleta processing, since the amorphous 2 gold powder is cut fine, it is difficult to control the particle size, and an electromagnetic wave absorber cannot be obtained. ~ Also, a soft magnetic alloy powder close to a spherical shape is produced by a water spray method. As described in Example T Patent Document 4, the alloy powder obtained by this water spray method is a Fe-Ni-Cr_Si-B series, and Since the inclusion ratio of the crystalline phase is high, an additional step for amorphization is required. In Patent Document 4, when the alloy is pulverized and flattened by a medium mixing roller, the amorphization is performed, which is easy to cause The above-mentioned roller is mixed with impurities', which causes deterioration of characteristics and increases the number of steps. [Summary of the Invention] In the above circumstances, the object of the present invention is to provide an amorphous soft magnetic gold powder, which has both high saturation magnetization and low core loss, and can be made into a spherical shape by the spray method. And provide the powder core and electromagnetic wave absorber using the amorphous soft recording gold powder. The present invention further provides an amorphous soft magnetic alloy powder, which is not added

O: \ 86 \ 86694.DOC 1229700 High-priced Ga, etc., which has both high saturation magnetization and low core loss. It can be manufactured by water spray method at low cost and close to a spherical shape. The amorphous soft magnetic alloy is also provided. Powder core and electromagnetic wave absorber. To achieve the above object, the present invention uses the following constitutions. The amorphous soft magnetic alloy powder of the present invention is a roughly spherical powder formed by a water spray method, which is characterized in that the powder contains Fe as a main component and contains at least P, C, and B, and is expressed by the formula △ Tx = Tx— Tg (where Tx is the crystallization start temperature and Tg is the glass transition temperature.) The temperature interval ΔTχ of the supercooled liquid represented is an amorphous phase having a temperature of 20K or more. The amorphous soft magnetic alloy powder having the above structure has magnetic properties such as P, c, and B, which is a semi-metal element having an ability to form an amorphous shape. Therefore, the amorphous soft magnetic alloy powder can be composed of an amorphous phase as a main phase and an excellent soft magnetic property. Soft magnetic alloy powder, and because it can be produced by the water spraying method in the atmospheric environment, compared with the gas spraying method using an inert gas, the alloy melts at a slower speed and is easier to amorphize. Amorphous soft magnetic alloy powder that can form an amorphous phase in the entire structure. The amorphous soft magnetic alloy powder of the present invention can be amorphous even without adding high-priced elements such as O & therefore, the cost can be reduced, and both the high saturation magnetization and the low core loss can be achieved. A substantially spherical amorphous soft magnetic alloy powder can be produced by a water spray method, and an amorphous soft magnetic alloy molten liquid (an alloy in a molten state) used in the production of the amorphous soft magnetic alloy powder of the present invention is used in accordance with the present invention. The crystalline form of filial piety magnetic alloy powder has the same composition or approximately the same composition, and therefore contains the above-mentioned element having a non-sa shape forming ability, and in order to make the supercooled liquid

O: \ 86 \ 86694.DOC 10-1229700 The temperature interval ΔΤχ is as high as 20K or more. When the high-pressure water is sprayed from the water spray nozzle to the above molten alloy (melted alloy) in the atmospheric environment for pulverization and cooling, Even if the cooling rate is somewhat slow, there is a large supercooled liquid region, which does not crystallize. With the temperature decrease, it is easy to form an amorphous phase up to the glass transition temperature Tg. Furthermore, by cooling the molten alloy when cooling The speed is such that a sufficient surface tension is generated in the molten alloy, and an approximately spherical amorphous soft magnetic alloy powder can be obtained. The cooling rate of the above-mentioned alloy melt is changed by controlling the water jet force, the nozzle jet flow (the inner diameter of the melt nozzle), the alloy melt flow rate, and the like. In addition, when manufacturing the substantially spherical amorphous soft magnetic alloy powder of the present invention, in addition to the cooling rate of the alloy melt, the slit width of the water spray nozzle, the inclination angle of the water spray nozzle, and the water spray angle can be controlled. , Temperature and viscosity of alloy melt, spray point (distance of powder point), etc. The amorphous soft magnetic alloy powder having the above-mentioned structure can be produced by the water spray method. Therefore, the manufacturing apparatus can be enlarged, and the alloy melt can be crushed under the south pressure water, which can improve the productivity, and it does not use high prices. Inert gas can be completed, so manufacturing costs can be reduced. The amorphous soft magnetic alloy powder having the above structure can be formed into a nearly spherical shape by a water spray method. Therefore, the bulk density is high, and the surface is less uneven. In order to increase the molding density, a powder core is manufactured, and an insulating material such as a resin is mixed and cured. When forming, it can ensure the insulation between the powders, so it can be used as a soft magnetic alloy powder used in the manufacture of powder cores. The amorphous soft magnetic alloy powder having the above configuration has a nearly spherical shape. Therefore, in order to manufacture an electromagnetic wave absorber, Atleta's O: \ 86 \ 86694.DOC -11-1229700 soft magnetic alloy powder is used. During processing, flat particles having a uniform shape can be obtained, and the particle diameter can be easily controlled, and can be used as a soft magnetic alloy powder for manufacturing an electromagnetic wave absorber. For the amorphous soft magnetic alloy powder of the present invention, it is preferable that the above-mentioned substantially spherical powder contains Cr, Mo, W, V, Nb, Ta, Ti, Zr, H.f, pt,

One or more elements of Pd and Au. By adding one or more elements of Cr, Mo, W, v, Nb, Ta, Dingbu △, Hf, a non-dynamic oxide film can be formed on the surface of the amorphous soft magnetic alloy powder, which has improved Effect of corrosion resistance.

Pt, Pd, and Au are precious metal elements. Therefore, by adding pt, pd, or heart, this precious metal it can be dispersed on the surface of the amorphous soft magnetic alloy powder, which has the effect of improving the corrosion resistance. In the amorphous soft magnetic alloy powder of the present invention, it is preferable that the aspect ratio of the substantially spherical powder is 1 or more and 3 or less on average. If the average aspect ratio of the above-mentioned substantially spherical powder exceeds 3, the number of amorphous soft magnetic alloy powders increases, and it is difficult to increase the forming density. Furthermore, when amorphous soft magnetic alloy powders are used to produce compacts such as powder cores, it is difficult to obtain Powder insulation. In the amorphous soft magnetic alloy powder of the present invention, it is preferable that the above-mentioned substantially spherical powder has an average particle diameter (1 > 50) of 45 m or less. Here, the average particle size = (Dso) is a cumulative 50 atomic% particle size (intermediate particle size). When the Dm of the above-mentioned substantially spherical powder exceeds 45 micrometers, an overcurrent occurs in the powder particles and the core loss increases. If the particle diameter is larger than 45 micrometers, the powder shape is slowly deformed, and it is difficult to obtain a powder close to a spherical shape. 1 '

O: \ 86 \ 86694.DOC -12- 1229700 The Dm of the above-mentioned substantially spherical powder can be controlled by controlling the manufacturing conditions such as the water spray pressure when the amorphous soft magnetic alloy powder of the present invention is manufactured using the water spray method. 'In addition, regarding the amorphous soft magnetic alloy powder of the present invention, when the tapped density of the above-mentioned substantially spherical powder is 3.7 Mg / m3 or more, The DC superposition characteristic improves the strength of the body, which is also preferable in this respect. The tap density here is measured in accordance with the Japanese powder metallurgy industry t group specification JPMAP08-1992 test method for tap density of metal powder (issued in April 1992). The larger the tap density, the closer it is to a spherical shape. When the tapped density of the above-mentioned substantially spherical powder is less than 3.7 Mg / m3, the density of a molded body produced using an amorphous soft magnetic alloy powder decreases. The tap density of the above-mentioned substantially spherical powder is controlled by controlling production conditions such as a water spray angle when the amorphous soft magnetic alloy powder of the present invention is produced by a water spray method. In particular, the tap density of the amorphous soft magnetic alloy powder is easily affected by the water spray angle Θ. The smaller the water spray angle, the larger the tap density. If the water spray angle becomes too small, the pulverizing ability of the melt is reduced, and the particle size of the obtained amorphous alloy powder is increased. Further, the cooling ability is reduced and the yield is reduced. In the amorphous soft magnetic alloy powder according to the present invention, the above-mentioned substantially spherical readability is not more than ppm. When manufacturing non-E-type alloy powder by water spray method, the high-pressure water injection 'pulverization' of the amorphous soft magnetic material having the same composition or substantially the same composition as the amorphous soft magnetic material ^ Jinji ^ "W" Cool to form a roughly spherical powder.

O: \ 86 \ 86694.DOC -13- Ϊ229700 and then 'dry it. Since these steps are performed in the atmospheric environment, compared with when manufactured by the gas spray method, 4 is easier to mix into the amorphous soft magnetic alloy powder. Oxygen, especially in the drying step, is easily mixed with oxygen. When the oxygen concentration of the above-mentioned approximately spherical powder exceeds 3000 ppm, the oxygen concentration change becomes too high, rust is easily generated on the powder surface, and the magnetic characteristics of the amorphous soft magnetic alloy powder are reduced. The manufactured core loss increases and the magnetic permeability decreases. In addition, for the amorphous soft magnetic alloy powder of the present invention, it is preferable that the above-mentioned substantially spherical powder has a specific surface area of 0.30 m2 / g or less. The specific surface area referred to here is measured by the BET method. The BET method is a method of adsorbing molecules having an adsorption occupying area on the surface of powder particles at the temperature of liquid nitrogen, and determining the specific surface area of the sample from the amount. It is best to use the low-temperature and low-humidity physical adsorption by an inert gas. . As the specific surface area of the above-mentioned approximately spherical powder increases, the irregularities on the powder shape and the degree of oxygen increase, so the upper limit of the specific surface area is 0.3 〇m2 / g, thereby obtaining a rust-resistant Roughly spherical amorphous soft magnetic alloy. If the specific surface area of the above-mentioned substantially spherical powder is high, it is difficult to obtain insulation between the powders, and further, the density of a core made of the amorphous soft magnetic alloy powder is reduced. In addition, the specific surface area of the amorphous soft magnetic alloy powder is 0.30 m2 / g or less, and the transmittance and DC superposition characteristics of a magnetic core made of the soft magnetic alloy powder can be improved. For the amorphous soft magnetic alloy powder of the present invention, the above-mentioned substantially spherical powder has an average particle diameter (D ^) greater than 4 micrometers, and 45 micrometers or less, a tap density of 3 · 7 Mg / m or more, and a specific surface area of 0. · Below 3 m2 / g, oxygen concentration is below O: \ 86 \ 86694.DOC -14-1229700 3000 ppm. The amorphous soft magnetic alloy powder having such a structure can make the core loss (w) measured at a frequency of 100 kHz and a magnetic flux density of 0T below kW / m3 ', and can achieve a composite permeability of up to 1 MHz. The real number 邛 # is basically fixed at 57 ~ 80, so that the DC bias magnetic field 5500 ΑπΓ 1 is kept straight / "L heavy $ characteristic (#, DC55⑽) is basically fixed at chuan ~ 34", so it is easy to use when used as a magnetic core. In addition, for the amorphous soft magnetic alloy powder of the present invention, it is preferable that the average particle diameter of the above-mentioned substantially spherical young powder is greater than 4 microns, and is 16 microns or less, the tap density is 4.0 Mg / mk, and the specific surface area is between 0.02 m2 / g or less, and the gas temperature below 2000 ppm. The amorphous soft magnetic alloy powder having such a structure can make the core loss (w) when measured at a frequency of ιιτkHz and a beam density of τ1τ below 25 kW / m. The actual magnetic permeability of the compound with a frequency of 1 μΗζ is basically fixed at 57 ~ 75, which makes the DC bias magnetic field 5 fine. The straight-line heavy duty characteristic 'Demo' is basically fixed at 30 ~%, so It has good characteristics when used as a magnetic core. The amorphous soft magnetic alloy powder of the present invention is preferably represented by the following formula.

Fe100.x.y.z.w.tMxPyczBwSit where M is selected from the group consisting of Cr, Mo, w, v, can, h, and

[One or two or more elements in Sun ^, the composition ratio of Y, z, w, and t is 0.5 atomic%. 8 atomic% each, 2 atomic%, 0 atomic% w 8 atomic%, 1 atom ^ i2 atomic%, (atomic atomic%, 70 atomic ⑽—zU

O: \ 86 \ 86694.DOC -15-! 2297〇79 atomic%. The relationship between y and the composition ratio in the amorphous formula of the present invention is $ 29 · 5 atomic%. Shaped soft magnetic alloy powder, preferably representing the above group z, w, t satisfying 17 atomic% (y + z + w + t) ^ The amorphous soft magnetic alloy powder of the present invention preferably represents the composition in the above group 4: In comparison, "quotation" satisfies 1 atomic% "soliton%, 4 atomic β 14 atomic%, 0 atom y atomic%, 2 atom" atom. /. , 2 atomic% ^ 8 atomic%, 72 atomic% ⑽—X—》 z—w ~ t) $ 79 atomic%. For the non-crystalline soft magnetic alloy of the present invention, it is preferable that the composition ratio in the formula above is 2, 2, ^ satisfies 1 atomic% ^ $ 3 atomic%, atomic% ', such as 4 atomic%, 4 atomic Jw Take the atom. The relationship of 2 atomic% and 7 atomic% '73 atomic% is printed as 〇 一一 乂 z-w-t) S78atomic 〇 / 〇. The above-mentioned amorphous soft magnetic alloy powder represented by any one of the composition formulas has a postal / or element T exhibiting magnetic properties, and p and c having an amorphous forming ability. Further, it has a semi-metal element such as Si, so it can be composed of Amorphous phase is an amorphous soft magnetic alloy with sub-major phases and excellent soft magnetic properties. Furthermore, because it can be manufactured by water spray method, it can improve the alloy melt compared to the gas nozzle mist method using an inert gas. Cooling rate, easy to be amorphous: It can constitute amorphous soft magnetic alloy powder with an amorphous phase in the entire structure. Moreover, it has an amorphous phase as its main phase and has excellent soft magnetic properties even if it does not include high-priced isotopes. As a result, costs can be reduced. In addition, Benmemin's flat amorphous soft magnetic alloy powder is characterized by

O: \ 86 \ 86694.DOC -16- 1229700 The crystalline soft magnetic alloy powder is non-flattened according to the present invention composed of any of the above. 0 This flat amorphous soft magnetic alloy powder has a rough, surface-like shape with little unevenness on the surface. Since the amorphous soft magnetic alloy powder of the present invention is processed by Atleta, the amorphous alloy powder cannot be finely pulverized, and can be flat-processed into a uniform sentence shape to obtain flat particles having a uniform sentence shape. In order to manufacture an electromagnetic wave absorbing material, if such a riding crystal soft magnetic alloy powder is put into an insulating material such as a resin ', these powders are arranged in layers, so that they can be densely packed and reduce the gap between the flattened particles. : The powder core of invention a is characterized in that it is composed of a granulated powder made by mixing the amorphous soft magnetic alloy powder of the present invention, which is composed of any of the above-mentioned types, or an insulating material, and a lubricant, and the granulation is performed. The material can be cured as a binder. The above-mentioned M powder core has excellent soft magnetic characteristics, high bulk density, and low surface irregularities. By solidifying and molding granulated powder produced by using the amorphous soft magnetic alloy powder of the present invention that is formed into a substantially spherical shape, powder compaction can be improved. The forming density of the core, and the companion technician maintains insulation between the terminals and improves the magnetic characteristics. Since the amorphous soft magnetic alloy powder of the present invention, which is produced by a water whistle and mist method, is produced by AA, and plate, the mass productivity can be improved. The reason is that the lubricant is not added after the granulated powder is manufactured, but the lubricant is added during the granulated powder manufacturing stage, and the amorphous soft magnetic alloy powder can be slid between the granulated powders to improve the manufacturing efficiency of the granulated powders. , Can add amorphous soft magnetic alloy powder densely in the granulated powder to increase the density of the granulated powder. O: \ 86 \ 86694.DOC -17-1229700 Therefore, the powder core of the present invention is excellent in mass productivity, has high strength, and can provide a powder core with low loss in a high frequency region. The powder core according to the present invention is suitable for a choke coil for converting a power source, a reactance coil of an active filter, and a magnetic core of a transformer. In addition, for the powder core of the present invention, the content of the granulated powder having a particle diameter of 45 μm to 500 μm is preferably greater than 83% by weight of the entire granulated powder. If the particle size of the granulated powder is less than 45 microns, when the granulated powder is flowed into the powder core manufacturing mold, the fluidity is poor and the mass productivity is reduced. If it exceeds 500 microns, the core loss increases. For the powdered core of the present invention, the content of the granulated powder having a particle diameter of less than 45 µm and the granulated powder having a particle size exceeding 500 µm is preferably 17% by weight or less of the entire granulated powder. When the content of the granulated powder having a particle diameter of less than 45 micrometers and the large granulated powder having a particle diameter of more than 500 micrometers is more than 17% by weight, the flowability of the granulated powder when it flows into a mold for manufacturing a powder core becomes poor. Therefore, if the granulated powder with a particle size of 45 micrometers or more and 50 micrometers or less contains more than 83% by weight of the whole granulated powder, the fluidity of the granulated powder flowing into the powder core manufacturing mold is good and the manufacturing efficiency can be improved # , The core loss is fully reduced, and a compacted core with a high forming density can be obtained. The electromagnetic wave absorber of the present invention is characterized by mixing any one of the amorphous soft magnetic alloy of the present invention or a flat amorphous 4 magnetic alloy powder and an insulating material. According to such an electromagnetic wave absorber, the essence has excellent soft magnetic properties, and has a high bulk density, a small surface concavity, a small unevenness, and a substantially spherical shape. "

O: \ 86 \ 86694.DOC -18-1229700 The amorphous soft magnetic alloy powder of the invention can be densely filled with an insulating material, so that it can improve the electromagnetic wave suppression effect in the frequency band of several hundred MHz to several GHz. Furthermore, mass productivity can be improved by using the amorphous soft magnetic alloy powder of the present invention produced by a water spray method. In particular, by using the flat-type amorphous soft magnetic alloy powder (flattened particles) of the present invention, these particles are arranged in layers in an insulating material, which can be more densely packed and reduce the gap between the flattened particles. Moreover, compared with the substantially spherical amorphous soft magnetic alloy powder, the flattened particles have an increased aspect ratio, an increased impedance of the electromagnetic wave absorber itself, and can suppress the generation of an overcurrent. Therefore, the electromagnetic wave absorber of the present invention is excellent in mass productivity, and the imaginary part # of the composite magnetic permeability in the frequency band of several hundred MHz to several GHz is increased to provide an electromagnetic wave absorber with improved electromagnetic wave suppression effect. [Embodiment] An embodiment of the present invention will be described in detail below. (Implementation form of amorphous soft magnetic alloy powder) The amorphous soft magnetic alloy powder according to the embodiment of the present invention is a powder having a substantially spherical shape by a water spray method. Such a substantially spherical powder is mainly composed of an amorphous phase containing at least p, c, and B as a main component. These approximately spherical powders have a temperature interval Δτχ of the supercooled liquid represented by the formula Δ828-Tg (where χ is the start of crystallization μ ° 'Tg 疋 glass transition temperature.) Is 20K or more. In addition to manufacturing amorphous powder, the amorphous soft magnetic alloy powder of the present invention sufficiently maintains the necessary amorphous forming ability, and is inferior to conventional Fe

O: \ 86 \ 86694.DOC -19- 1229700 —A1 _ Ga — C — P — Si — B-based alloys have further improved magnetic characteristics compared to other alloys, and can be formed into a nearly spherical shape by a water spray method. Furthermore, it is possible to obtain a corrosion resistance capable of withstanding the nozzle mist method. In addition, it can be made amorphous even without adding Ga, so that it can reduce costs, and also has a high saturation magnetization and a low core loss. The amorphous soft magnetic alloy powder of the present invention has Fe exhibiting magnetic properties and P, C, and B semi-metal elements having an amorphous forming ability, and therefore an amorphous phase is the main phase, and at the same time has excellent soft magnetic characteristics. Moreover, in addition to p, c, and B, Si may be added. Moreover, M (Cr, Mo, W, V, Nb, Ta, Ti, Zr, Hf,

One or two or more elements of Pt, Pd, and Au) can improve corrosion resistance. This amorphous soft magnetic alloy powder is a substantially spherical metallic vitreous alloy powder representing a temperature interval Δχ of a subcooled liquid of 20 κ or more, and has a significant temperature interval of ΔΤχ of 30 K or more and further 50 K or more according to the composition, and For soft magnetic, it also has excellent characteristics at room temperature. The amorphous soft magnetic alloy powder of the present invention has a saturation magnetization amount of south because it contains a large amount of ferromagnetic element Fe compared with the existing Fe_Al-CP-S1-B-series alloy. The structure of the substantially spherical amorphous soft magnetic alloy powder of the present invention has an entire amorphous phase. Therefore, when the heat treatment is performed under appropriate conditions, a crystalline phase is not precipitated, internal stress can be relaxed, and soft magnetic characteristics are further improved. A substantially spherical amorphous soft magnetic alloy powder of the present invention produced by a water spray method has a saturation magnetization equivalent to or higher than that of a conventional spherical amorphous soft magnetic alloy powder produced by a gas spray method.

O: \ 86 \ 86694.DOC -20- 1229700 A substantially spherical amorphous soft magnetic alloy powder can be produced by the water spray method. &Amp; Ming amorphous open > An alloy melt used for soft magnetic alloy powder production. (Alloy in molten state) Since an alloy molten liquid having the same composition or substantially the same composition as the amorphous soft magnetic alloy powder of the present invention is used, it contains an element having the ability to form an amorphous shape as described above, and the temperature interval of the supercooled liquid ΔΤχ It is 20K or more. Therefore, when the molten alloy (molten alloy) is pulverized and cooled by the water spray method, even if the cooling rate of the general water spray method is reduced to the same degree as the gas spray method, it has a wide range. In the supercooled liquid region, crystallization does not occur, and as the temperature decreases, the glass transition temperature Tg is reached, and an amorphous phase can be easily formed. In addition, by controlling the cooling rate when cooling the alloy melt to a cooling rate sufficient to exert a surface tension on the alloy melt, an approximately spherical, i.e., amorphous soft magnetic alloy powder having a smaller surface area can be obtained. For this reason, it is not easy to be acidified, and even if the cooling rate is reduced, it is necessary to form the above-mentioned alloy composition capable of being amorphous. The average aspect ratio of the amorphous soft magnetic alloy powder according to the present invention is 丨 more than 3 and the following is preferred from the reasons described above, and the average aspect ratio is more preferably ≥ 2 and more preferably 1 and 1.5 and less. good. In addition, the average particle diameter ⑴ of the amorphous soft magnetic alloy powder of the present invention is 45 μm or less, which is preferable for the reasons described above, and is larger than * μm, and 30 μm or less is preferable, and 4 to 16 μm is Even better. When the D50 of the amorphous soft magnetic alloy powder is 4 micrometers or less, the powder yield decreases and the apparent oxygen concentration increases. In addition, the tap density of the amorphous soft magnetic alloy powder of the present invention is 3 7 O: \ 86 \ 86694.DOC -21-1229700

The reasons above Mg / m are more preferable as described above, Λ to 1,000 乂, soil 3.9 Mg / m3 or more is more preferable, and 4.0 Mg / m3 or more is more preferable. The amorphous soft magnetic alloy powder of the present invention has an oxygen concentration of 3,000 or less. The reason described above is preferable, 2500 ppm or less is preferable, and ㈧ ppm or less is more preferable. For the reasons described above, the amorphous soft magnetic alloy powder of the present invention preferably has a specific surface area of 0.30 m2 / g or less, more preferably 0.26 m2 / g or less, and more preferably 23 m2 / g or less. The average particle diameter of the amorphous soft magnetic alloy powder of the present invention (DW is greater than 4 micrometers and 45 micrometers or less, the tap density is 3.7Mg / m3 or more, the specific surface area is 0.3m / g or less, and the oxygen concentration is 3,000. When it is less than ppm, the core loss (floating) when measured at a frequency of 100 kHz and a magnetic flux density of 0.1 τ can be less than 45 kW / m3, and the real number part of the composite magnetic permeability of the frequency i at ^^ is basically reached. It is fixed at 57 ~ 80, which makes the DC bias magnetic field 5500 Am-1 straight. The weight (£ 'DC55〇) is basically fixed at 30 ~ 34.5, so it is easy to use when it is used as a magnetic core. In addition, the average soft magnetic alloy powder of the present invention has an average particle diameter (d50) of more than 4 micrometers, less than 16 micrometers, a tap density of 40 micrometers / m3 or more, and a specific surface area of 0.23 m2 / g or less. When the concentration is below 2000 ppm, the core loss (W) when measured under the conditions of a frequency of 100 kHz and a magnetic flux density of 0 · it can be less than 250 kW / m3, and the composite permeability of up to frequency! MHz can be achieved. The real part is basically fixed at 57 ~ 75, making the DC bias magnetic boundary 550 The DC overlap characteristic (μ, DC55GG) at 0 Am-1 is basically fixed at 30 ~ 36, so it is easy to use when used as a magnetic core. O: \ 86 \ 86694.DOC 22-1229700 As the substantially spherical non An example of the crystalline soft magnetic alloy powder is given by the following composition formula: eiei-xy.zwtMxPyCzBwSit where M is selected from Cr, Mo, W, V, Nb, Ta, Ti, Zr, Hf One, two or more elements of Pt, Pd, Au, and the composition ratios of x, y, Z, W, and t are 0.5 atom 8 atom%, 2 atom b atom%, 0 atom atom%, i Atomic% ^ w ^ 12 atomic%, 0 atom 8 atomic%, 70 atomic% $ (100_ χ_ y — z — w — t) $ 79 atomic%. ~ The amorphous soft magnetic alloy of the present invention represented by the above composition formula The composition ratios y, z, w, and t in the above-mentioned composition formula of the powder preferably satisfy the relationship of Η atomic% $ (α + 2 +, + 0 $ 29.5 atomic%. The following is a description of the approximately spherical amorphous soft magnetic alloy powder of the present invention. The reason for limiting the composition will be described.

Fe is an element that bears magnetic properties and is an essential element for the amorphous soft magnetic alloy powder of the present invention. If the composition ratio of Fe is increased, the saturation magnetism (7 S) of the amorphous soft magnetic alloy powder can be increased.

The amount of Fe added is preferably 70 atomic% or more and 79 atomic% or less, preferably 72 atomic% or more, 79 atomic% or less, and still more preferably 73 atomic% or more and 3% or less.

If the amount of Fe added is less than 70 atomic%, the saturation magnetization σ s is reduced to less than 15 0x10 Wb.m / kg, so it is not good. When the amount of Fe added exceeds 79 atomic%, Tg / Tm, which indicates the degree of amorphous formation ability of the alloy, does not reach O: \ 86 \ 86694.DOC -23-1229700 0-57 ', and the amorphous formation ability is reduced. Best. The Tm is the melting point of the alloy. In addition, if the amount of Fe added is 76 atomic ❶ / 0 or more, the saturation magnetization amount cr s of the alloy powder can be 17 × 10-10 Wb.m / kg or more, and if it is 77 atomic 0 / 〇 or more, the alloy can be made. The saturation magnetization σs is more than 180 × l0-6Wb · m / kg. In addition, Cr, Mo, W, V, Nb, Ta, Ti, Zr, and Hf can form a non-dynamic oxide film on the surface of the alloy powder, thereby improving the corrosion resistance of the alloy powder. Among these elements, Cr is most effective in improving the corrosion resistance. In the water spray method, when the molten alloy is in direct contact with water, rust can be further prevented during the drying process of the alloy powder (degree of visual inspection). Moreover, these elements can be added alone or in combination of two or more kinds, for example, V, Mo and Cr, V * Cr, and Cr, Mo, v, etc. can be added in combination. Among these elements, Mo and V are slightly inferior in corrosion resistance, but they can be selected according to need because of improving the amorphous forming ability. In addition, the amount of elements selected from Cr, Mo, w, V, Nb, and Ta exceeds 8%? At%, the magnetic characteristics (saturated magnetization) decrease. Zr and Hf are the highest glass forming abilities among the elements used as element warfare in the above composition formula. Because Ti, Zr, and Hf are highly oxidizing, when these elements are added in excess of 8 atomic%, the alloy powder raw materials are dissolved in the atmospheric environment, the smelting solution is oxidized during the melting of the raw materials, and the magnetic characteristics (saturation magnetization amount) are reduced 0 The effect of alloy powder on improving the corrosion resistance can be obtained by adding one or two or more precious metal elements selected from Pt, pd, and AU.

O: \ 86 \ 86694.DOC -24- 1229700 Sibe metal elements are dispersed on the surface of the powder, and hope that the master η-master Ru corrosion resistance. Moreover, this 4 shell metal halide can be added alone or by adding U ^ Μ ^-* ύ Λ + ^ ^ Cr net has corrosion resistance: "The effect of a combination of halo elements. The above precious metal elements are not suitable: intestinal mixture ' Therefore, when it is added more than 8 atomic%, the glass forming ability I1 is low, and the magnetic characteristics (saturation magnetization amount) are also reduced. In order to make the amorphous soft magnetic alloy powder resistant to corrosion, the addition amount of the above M must be 0.5 atom. Therefore, in the composition formula, M is one or two or more elements selected from the group consisting of Cr, Mo, w, ν, _, Ta, τ △, ㈣, and 士. It is preferable to use ~ ⑽ ^ 十 ^ 中-One or two or more elements. The composition ratio χ of M is preferably from 0.05 atomic% to 8 atomic%, preferably i atom ❶ /. Above 4 atomic%, and more preferably ^^ 3 Atomic% or less. C, P, B, and Si are elements that improve the ability to form an amorphous form. By adding these elements to Fe and the above-mentioned M, it becomes a multi-element system, which can form a more stable binary system than only the above-mentioned binary system. Amorphous phase. In particular, for the low temperature (about 105 (rc ) Maintaining the eutectic composition, the entire structure becomes an amorphous phase, and the temperature interval △ Tx of the supercooled liquid is prone to occur. If the temperature interval △ Tχ of the supercooled liquid is added at the same time, the amorphous formation ability is improved, and the The manufacturing conditions when an amorphous single-phase structure is obtained are relaxed in a relatively simple direction. The composition ratio y of p when Si is not added is preferably 2 atoms or more. 15 atoms or more. / 0 or less is preferably 4 atomic% or more. 14 atomic% or less, most preferably 6 atomic% or less at 11 atomic% above O: \ 86 \ 86694.DOC -25-1229700. When the addition amount of p is less than 2 atomic%, amorphous soft magnetic alloy powder cannot be obtained If it exceeds 15 atomic%, the saturation magnetization decreases. If the composition ratio y of P is in the above range, the temperature interval ΔTX of the supercooled liquid appears, and the amorphous powder forming ability of the alloy powder is improved. If Si is added, the thermal stability is improved. Therefore, it is preferable to add 2 atomic% or more. If the amount of Si added exceeds 8 atomic%, the melting point increases. Therefore, the composition ratio of Si is preferably 0 atomic% or more and 8 atomic% or less, and preferably 2 atomic% or more. 8 atomic% or less, and more preferably 2 atomic% or more and 7 atomic% or less. When the amount of B added is less than 2 atomic%, it is difficult to obtain an amorphous soft magnetic alloy powder, and the melting point will rise if it exceeds 12 atomic%. Therefore, the composition ratio of B is preferably 1 atomic% or more and 12 atomic% or less, preferably 2 atomic% or more and 10 atoms or less. The following is more preferably 4 atomic% or more and 9 atomic% or less. If c is added, thermal stability is improved, Therefore, it is preferred to add 丨 atomic% or more. If the amount of C is more than 8 atomic%, the melting point will increase. Therefore, the ratio of zirconium composition is preferably more than 0 atom. More than 0 atomic% is below 6 atomic ^. It is preferred that the step is performed on the atom. Therefore, the total composition ratio of these semi-metallic elements C, p, and Si (y + z + w ~ is preferably 17 atomic% or more 2 95%; 丨, / 丁 + Λ. V is atom /. Below, more It is preferably 18 atomic% or more, preferably 18 atomic% or less, and more preferably 18 atomic% or more and 25 atomic% or less. When the total composition ratio of the semi-metal element exceeds 29.5 atomic%, the composition ratio of Bu is relatively reduced, and the magnetization amount is relatively low. Therefore, the total composition ratio of the semi-metal elements is less than 17 atomic families, the amorphous formation ability is reduced, and it is difficult to obtain an amorphous phase single-phase structure.

When the composition ratio of Fe is 76 atomic% or more, the semi-metal elements c, p, and

O: \ 86 \ 86694.DOC -26-1229700 The total composition ratio (y + z + w + t) of B and Si is 18 atoms. /. Above 24 atoms. Below 0 / 〇, the saturation magnetization σ s of the alloy powder can be made 170 × 10-6 Wb.m / kg or more. Furthermore, when the composition ratio of Fe is 77 atomic% or more, the total composition ratio (y + z + w + t) of the semimetal elements C, P, B, and Si is 18 atomic% or more and 23 atomic% or less. The saturation magnetization σ s of the alloy powder is set to be more than 180 × 10-6 wb.m / kg. In the amorphous soft magnetic alloy powder according to the present invention, Ge may have 4 atoms in the composition. / 〇 or less. Regarding the composition of any of the above cases, in the present invention, the temperature interval ΔTχ of the subcooled liquid is 20K or more, and depending on the composition, it may be 35K or more. In addition to the elements represented by the above composition, unavoidable impurities may be contained. The amorphous soft magnetic alloy powder of the present invention having the above-mentioned composition obtained by the water spray method has magnetic properties at room temperature, and can exhibit more excellent magnetic properties by heat treatment. Therefore, it can be widely used in various applications as a material having excellent soft magnetic properties. An example of manufacturing the knob-shaped amorphous soft magnetic alloy powder of the present invention by a water spray method will be described. The water haze used in the present invention, the original "^" ("Cargo Law", in the atmospheric environment will be the same as the above-mentioned non-Japanese-shaped I human magnetic alloy powder composition in order to form approximately the same amorphous form :: magnetic : Coupling = melt liquid and high-pressure water-sprayed into the reaction chamber in the form of a mist, mix the materials, and manufacture large amorphous amorphous rhenium / weight magnetic alloy powder.

O: \ 86 \ 86694.DOC -27- 1229700 Fig. 1 is a schematic cross-sectional view showing an example of a high-pressure water spray device suitable for use in the production of alloy powder by a water spray method. This high-pressure water spraying device 1 is mainly composed of a melt crucible 2, a water sprayer 3, and a reaction chamber 4. The high-pressure water spray device 1 is placed in an atmospheric environment. The molten metal crucible 2 is filled with the molten alloy 5. The molten crucible 2 is provided with a cylindrical coil 2a as a heating means to heat the molten alloy 5 and maintain the molten state. A melt nozzle 6 is provided at the bottom of the melt crucible 2, and the molten alloy 5 is dropped from the melt nozzle 6 into the reaction chamber 4. The water spraying benefit 3 is provided below the melt crucible 2. The water sprayer 3 is provided with a water introduction flow path 7 and a water injection nozzle 8 as a tip end portion of the introduction flow path 7. '' The high-pressure water 10 pressurized by a liquid pressure pump (pressurizing mechanism) (not shown) is introduced into the water injection nozzle 8 through the introduction channel 7, and a high-pressure water flow g is formed from the nozzle 8 into the reaction chamber 4. spray. The inside of the reaction chamber 4 forms the same atmospheric environment as the surrounding environment of the high-pressure water spray device. The pressure inside the reaction chamber 4 was maintained at about 100 kpa, and the temperature was maintained at about room temperature. To produce a substantially spherical amorphous soft magnetic alloy powder, first, an alloy melt 5 filled in a melt crucible 2 is added dropwise from a melt nozzle 6 to a reaction month 4. On the same day, the high-pressure water 10 sprayed from the water nozzle 8 of the water sprayer 3 to form a high-pressure water stream g, to reach the above-mentioned dripping melting "text" at the fog point p impact melting> night, atomizing the molten liquid Solid, forming approximately spherical particles composed of the above-mentioned non-Japanese open ^ 日 媸 # & λ wind 扪 non-θ-day phase. This approximately spherical powder and water are stored at the bottom of the reaction chamber 4.

O: \ 86 \ 86694.DOC -28- 1229700 The cooling rate of the alloy melt referred to here is the degree to which the surface tension sufficiently affects the alloy melt. The cooling rate of the alloy melt is determined based on the composition of the alloy, the particle size of the intended alloy powder, etc., and an appropriate cooling rate can be determined. The approximate target is 103 to 105 k / s. In fact, whether or not a nearly spherical product can be obtained can be determined by determining whether phases such as FesB, FezB, and FesP that form a crystalline phase are precipitated in the glassy phase. Then, after drying these roughly spherical powders in an atmospheric environment, the powders are classified to obtain spherical or nearly spherical amorphous soft magnetic alloy powders having a predetermined average particle diameter. When a substantially spherical amorphous soft magnetic alloy powder is produced by a water spray method, the cooling speed of the alloy melt is controlled by controlling the spray pressure of the water, the spray flow rate, the flow rate of the alloy melt, and the like, and by controlling The slit width of the water spray nozzle, the inclination angle of the water spray nozzle, the water spray angle, the temperature and viscosity of the alloy melt, the spray point (powder point distance), etc. are used to control the manufacturing conditions to obtain the desired characteristics. An amorphous soft magnetic alloy powder having an aspect ratio, a tapped density, 0 50, and an oxygen content within the above ranges was obtained. The known amorphous soft magnetic alloy powder may be heat-treated as necessary. By performing the heat treatment, the internal stress of the alloy powder can be relaxed, and the soft magnetic characteristics of the amorphous soft magnetic alloy powder can be further improved. The heat treatment temperature 仏 is preferably in a range from the Curie temperature Tc of the alloy to the glass transition temperature Tg or lower. Λ = The processing temperature Ta is lower than the Curie temperature Tc, and the effect of improving the magnetic properties due to heat treatment cannot be obtained, so it is inferior. On the other hand, if the heat treatment temperature Ta exceeds the glass transition temperature Tg, a crystalline phase is easily precipitated in the alloy powder structure, and soft magnetic properties may be lowered. Therefore, it is inferior.

O: \ 86 \ 86694.DOC -29-1229700 The heat treatment time is preferably in a range that sufficiently relaxes the internal stress of the alloy powder and does not precipitate a crystalline phase, for example, a range of 30 to 300 minutes is preferable. The Bebesch-type amorphous soft magnetic alloy powder can be manufactured by the water spray method, so that the manufacturing equipment can be enlarged, and the alloy melt can be pulverized under high pressure. The use of expensive inert gas can reduce manufacturing costs. The amorphous soft magnetic alloy powder of this embodiment is formed into a nearly spherical shape by a water spray method, so the bulk density is high, and the surface has fewer irregularities, so the forming density can be increased. When the insulating materials are mixed and solidified, the insulation between the powders can be ensured. Therefore, it is effective as a soft magnetic alloy powder for powder core manufacturing. In addition, the amorphous soft magnetic alloy powder of this embodiment has a nearly spherical shape. Therefore, when the amorphous soft magnetic alloy powder is processed by Atleta or the like for manufacturing an electromagnetic wave absorber, flat particles having a uniform shape can be obtained. Moreover, since it is easy to control the particle diameter, it is effective as a soft magnetic alloy powder for manufacturing an electromagnetic wave absorber. (Implementation form of flat amorphous soft magnetic alloy powder) The flattened amorphous soft magnetic alloy powder according to the embodiment of the present invention is a flattened amorphous soft magnetic alloy powder having a substantially spherical shape according to an embodiment of any of the above embodiments Into. As a method of flattening the amorphous soft magnetic alloy powder, for example, a substantially spherical amorphous soft magnetic alloy powder that is applied to the center is put into Atleta: crushed and mixed for 1 G minutes to 16 hours, and is mainly composed of Amorphous soft magnetic alloy powder that flattens non-Ya-shaped soft magnetic alloy powder. Here, right

O: \ 86 \ 86694.DOC -30- 1229700 The crystalline shape of the material before flattening is soft, but the alloy is not heat-treated. 0 The crushing by Atleta is better. The time is about 16 minutes. Within the range of day guard, the range of 4 to 8 hours is preferred. If the crushing and mixing time is less than 1G minutes and the flattening is not achieved, the aspect ratio of the flat i amorphous soft magnetic alloy powder cannot be higher than i, such as 10 or higher. 'If the powder mixing time exceeds ㈣ hours, the flat type Non-: shaped soft magnetic alloy powder has an aspect ratio of more than 80. The preferred flat type is 1 ±. The thickness of the gold powder is in the range of 0 to 5 micrometers (preferably 2 micrometers) 'and the long diameter is ⑽μm (preferably 2 to 80 micrometers). The obtained flat amorphous soft magnetic alloy powder is heat-treated as necessary in the same manner as in the above-mentioned embodiment. The flat amorphous soft magnetic alloy powder of this embodiment uses a substantially spherical amorphous soft magnetic alloy powder of a substantially spherical shape with a concave surface. Therefore, when a guard such as Atleta is used, the amorphous alloy powder Without being pulverized, 肊 flattened to a uniform shape to obtain a flat, uniform shape. This flat amorphous soft magnetic alloy powder is used to manufacture electromagnetic wave absorption «'mixed with insulating materials such as resin'. These powders are arranged in layers. Therefore, the months b, ', and the bifurcation fill and can reduce the gap between the flattened particles. (Implementation form of the powder core) The dust core (powder core) according to the embodiment of the present invention is one or more of the above-mentioned approximately spherical amorphous soft magnetic alloy powders of the present embodiment, an insulating material, and a lubricant. The powder is formed by mixing and granulating the agent, and the above-mentioned insulating material is used as an adhesive for @ 化 forming. As the above is roughly spherical

O: \ 86 \ 86694.DOC -31-1229700 amorphous soft magnetic alloy powder, the specific resistance is preferably 15 // Ω ιη or more. As an example of the shape of the side powder core, as shown in FIG. 2, a ring-shaped core 21 may be mentioned. The shape is not limited to this, and a long ring shape or an elliptical ring shape may be used. In addition, it may be substantially E-shaped in plan view, approximately π-shaped in plan view, or approximately J-shaped in plan view. The granulated powder of the powder core is adhered by the insulating material, so that a plurality of or one type of amorphous soft magnetic alloy powder exists in the structure, and the amorphous soft magnetic alloy powder dissolves, which does not constitute a uniform structure. Further, each of the amorphous soft magnetic alloy powders in the granulated powder is preferably insulated by an insulating material. Therefore, in the powder core 21, an amorphous soft magnetic alloy powder is mixed with an insulating material. Therefore, due to the insulating material, the specific resistance of the powder core itself is increased, the overcurrent loss is reduced, and the decrease in magnetic permeability in the high-frequency region is reduced. small. If the temperature interval of the supercooled liquid of the amorphous soft magnetic alloy powder △ Tχ is less than 2GK ', it will not occur when the granulated powder produced by mixing the amorphous soft magnetic alloy powder with the insulating material and the lubricant is subjected to heat treatment after compression molding. Crystallization makes it difficult to sufficiently alleviate internal stress. In particular, the powder core 21 according to this embodiment is preferably provided with a magnetic boundary Η. The coercive force of # kA / m is 80 A / m or less, and preferably 40 A / m or less. The insulating material forming the powder core of the conventional application type increases the specific resistance of the powder core, and simultaneously forms a granulated powder containing an amorphous soft magnetic alloy powder, and at the same time bonds the formed granulated powder and maintains the shape of the powder core. Therefore, it is preferably made of a material that does not have a large loss of magnetic properties, and examples thereof include epoxy resins, polysilicone resins, polysilicone rubbers, resins, urea resins,

O: \ 86 \ 86694.DOC -32- 1229700 Liquid or powdery resins such as melamine formaldehyde resin, PVA (polyvinyl alcohol) or rubber, water glass (Na2〇_Si〇2), oxide glass powder (Na2 〇_ B2〇3-Si02, Pb0-B203-Si02, Pb0-Ba0-Si02, Na2〇-B2〇3-Zn〇, CaO-Ba〇-Si〇2, Al2〇3 — b2〇3 — Si〇2 , B2〇3

Sl02), glassy substances produced by the sol-gel method (mainly composed of Si02, a1203, Zr02, Ti02, etc.). As the insulating material, various elastomers (rubbers) can be used. A lubricant selected from the group consisting of stearates (zinc stearate, calcium stearate, barium stearate, magnesium stearate, aluminum stearate, etc.) can be used together with the insulating material. In particular, among the above-mentioned insulating materials, a silicone resin or a silicone rubber is preferable. The oxygen rubber is usually a rubber-like elastic rubber knee composed of a crosslinked body of a linear organosparoxane having a high degree of polymerization. According to the cross-linking method, it can be divided into high temperature type and room temperature type, and the room temperature type is preferred in the present invention. Room temperature type: Oxygen rubber is particularly preferred because it is prepared by reacting straight-bonded polyorganic stone with a crosslinking agent such as ethoxyl, alkoxime, isopropoxy and other silane compounds. A cross-linking agent having an acetoxy group or an oxime group is used. "Outer 2" polysiloxane resins generally refer to polymers with a highly ternary network structure and organic polysilicon oxygen appearance. Manufactured by hydrolysis polymerization of organic gas ashite or organic oxysilane or ring-opening polymerization of cyclic siloxane. In other words, in the silicone rubber, the shuishixi latex rubber prepared by crosslinking with a cross-linking agent having an alkoxy group is less corrosive and can constitute a powder magnetic core having excellent corrosion resistance. And ’using a cross-link containing a silane compound with n-butyl in the molecule

O: \ 86 \ 86694.DOC -33-1229700 The poly-silicone rubber obtained from the combination has particularly excellent elastic properties. Therefore, for the powder core of this embodiment, if a silicone rubber prepared by using a cross-linking agent containing a silane compound having n-butyl group is used, the curing stress Λ1, 'will remain in the amorphous soft magnetic alloy powder. The internal stress is small, and the soft magnetic properties of the amorphous soft magnetic alloy powder are improved. This can greatly reduce the coercive force and core loss of the powder core. The particle size of the granulated powder used in the powder core according to this embodiment is based on the above reasons. The preferred particle size is 45 micrometers or more and 500 micrometers or less, preferably "micrometers or more and 300 micrometers or less, further preferably 45 micrometers. The content of the granulated powder with a particle diameter of 45 microns or more and 500 microns or less is greater than 83% by weight of the entire granulated powder constituting the powder core 1, or the granulated powder and the particle diameter of less than 45 microns. The content (inclusion) of granulated powder larger than 500 microns is less than 17% by weight of the whole granulated powder, which can make the granulated powder flow into the powder core manufacturing mold with good fluidity, and can increase mass production. It is better in terms of performance, and more preferably 15% by weight or less. Next, an example of a method for manufacturing the powder core according to the embodiment will be described with reference to the drawings. The method for manufacturing the powder core according to the present invention is performed by adding water. The step of mixing and granulating the approximately spherical amorphous soft magnetic alloy powder of the embodiment obtained by the spray method with the above-mentioned insulating material and the above-mentioned lubricant to form a granulated powder. Granulated powder compression molding step forms the front body molding step core 'and the core body is subjected to heat treatment prior to the above-described in (Tg- 170) Κ above (Tg) at a temperature of K or less, the internal stress is removed before the above-described core member constituting the heat treatment step.

O: \ 86 \ 86694.DOC -34- 1229700 In the step of forming the granulated powder, the inclusion ratio of the insulating material in the mixture of the above-mentioned amorphous soft magnetic alloy powder, the insulating material, and the lubricant is preferably 0-3 weight. % Or more and 5% by weight or less, preferably m or more and 3% by weight or less. If the inclusion ratio of the insulating material is less than 0.3% by weight, the amorphous soft magnetic alloy powder and the lubricant cannot be formed into a predetermined shape together with the insulating material. Moreover, if the inclusion ratio exceeds 5% by weight, the addition density of the amorphous soft magnetic alloy powder in the granulated powder will decrease, and the content rate of the #crystalline soft magnetic alloy powder in the powder core made of the granulated powder will decrease. The soft magnetic characteristics of the powder core are reduced, so it is not good. The inclusion ratio of the lubricant in the mixture is preferably from 01% by weight to 2% by weight, and more preferably from 0% by weight to 1% by weight. When the inclusion ratio of the lubricant is less than 0el% by weight, the fluidity of the amorphous soft magnetic alloy powder cannot be sufficiently improved, and therefore, the improvement of the production efficiency of the granulated powder cannot be expected, and the amorphous softness in the granulated powder cannot be expected. The addition density of the magnetic alloy powder decreases, and as a result, the soft magnetic characteristics of the powder core decrease, so it is not good. In addition, when the lubricant exceeds 2% by weight, the addition density of the amorphous soft magnetic alloy powder in the granulated powder is lowered, and the mechanical strength of the powder core is lowered. If the above-mentioned granulated powder is formed, the granulated powder formed is classified.. The range of particle diameters of 45 micrometers and 500 micrometers is selected, preferably 45 micrometers to 300 micrometers and more preferably 45 micrometers and more 15 It is used in the following steps if it is less than 0 micron. For classification, screens, vibrating screens, sonic screens, and air-flow classifiers can be used. O: \ 86 \ 86694.DOC -35- 1229700 Then, the forming step of compressing the above-mentioned granulated powder to form a core precursor is performed. In addition, it is desirable to evaporate the dissolved J, moisture, and the like contained in the granulated powder before compression molding to form an insulating material layer on the surface of the amorphous soft magnetic alloy powder. Then, the powder was compressed to produce a magnetic core precursor. The core precursor is manufactured using a mold 110 shown in FIG. 3. The mold 110 is composed of a hollow cylindrical mold m, an upper punching hole 112 and a lower punching hole 113 inserted into the hollow portion 1Ua of the mold 1U. A cylindrical protrusion 112a is provided below the upper punching hole 112, and the upper punching hole 112 and the lower punching hole 113 are integrated with the die 丨 丨 丨 to form a circular ring-shaped mold inside the die i 丨 〇. This mold 11 is filled with the granulated powder described above. The contactor then applies uniaxial pressure to the granulated powder filled in the mold 110 and heats it at or to a predetermined temperature to perform compression molding. Fig. 4 shows the essential parts of an example of a suitable plasma sintering apparatus used in compression molding. The discharge plasma sintering device of this example supports the die 110 and the lower punch 113 of the die 110 filled with the mixture, and punches the electrode 114 and the upper punch 112 of the die 110 downward as one electrode when a pulse current described later is applied. The side extrusion is composed mainly of a punching electrode 115 which is another electrode to which a pulse current is applied, and a thermocouple 17 which measures the temperature of the granulated powder in the mold 110. Here, the discharge plasma sintering device is placed in the reaction chamber 118, and the reaction chamber m is connected to a vacuum exhaust device and an environmental gas supply device (not shown). The structure can hold the granulated powder filled in the mold 110. In the inert ring O: \ 86 \ 86694.DOC -36-1229700 environment and other required environments. In FIG. 4, the energizing device is omitted, but a separate energizing device may be connected to the upper and lower punch holes 112 and 113 and the punching electrodes 114 and 115. The energizing device is configured to pass the punching holes 112, in and the punching electrode 114, 115 passes a pulse current. Therefore, the mold filled with the granulated powder is set in a discharge plasma sintering device, a vacuum is introduced into the reaction chamber 118, and uniaxial pressure is applied to the mixture from above and below through the punching holes 112 and 113? At the same time, a pulsed current is applied to heat the granulated powder and compression-mold. During the sintering process of the plasma plasma, the granulated powder is rapidly heated at a predetermined speed by the discharge current, which can shorten the compression molding time. Therefore, it is suitable for compressing the amorphous phase of the amorphous soft magnetic alloy powder. Molding 0 In the present invention, the temperature at the time of compression molding the granulated powder is different depending on the type of the root insulation material and the composition of the amorphous soft magnetic alloy powder. Water glass is used as the insulating material, and the core of the amorphous soft magnetic material is used. In the case of an alloy powder having a composition of IV〇4C2.10B7.54Si4 η, in order to adhere the granulated powders to each other with an insulating material, it must be 373K (100t) or more. ) Leaching must be below 673κ (To. C). If the insulating material is leached, the content of the insulating material in the powder core is reduced, and the specific resistance technology of the powder coated core is available.

The reduction in Hi frequency decreases the permeability in the same frequency band. If the granulated powder is subjected to I-shrink molding at a temperature range of 373K (10 (rc) or more (to .c)), the insulating material can be appropriately cured, so the adhesive granulated powder can be formed into a predetermined shape. The single force p exerted on the granulated powder during the shrink-forming process, if

O: \ 86 \ 86694.DOC -37- 1229700 Force is too low ’The density of the powder core cannot be increased and a dense powder core cannot be formed. If the pressure is too high, the insulating material leaches, the content of the insulating material in the powder core decreases, the specific impedance of the powder core decreases, and the magnetic permeability of the high frequency band decreases. Therefore, the uniaxial pressure p varies with the type of insulating material and the composition of the amorphous soft magnetic alloy powder. Water glass is used for the insulating material, and Fe74.43Cl * i 96P9.04C2.16B7 54Si4.87 is used for the magnetic material. In the composition, it is preferably 600 MPa to 1500 MPa, and more preferably 600 MPa to 900 MPa. This gives a toroidal core precursor. When uniaxial pressure is applied to the granulated powder filled in the mold 110 and compression-molded at room temperature, a ring-shaped magnetic core can be manufactured using a pressing device having the same configuration as the device shown in FIG. 4 except that the energizing device is not connected. Precursor. When a silicone resin is used as the insulating material, in the above-mentioned forming step, the granulated particles are compression-molded at ordinary temperature to obtain a core precursor having a predetermined shape. Due to the elasticity of the silicone resin, the curing stress is small, and the internal stress remaining in the amorphous soft magnetic alloy powder is small. Therefore, in addition to the influence of magnetostriction, the soft magnetic properties of the amorphous soft magnetic alloy powder are improved. As a result, the coercive force and core loss of the powder core can be greatly reduced. In particular, as described above, the silicone rubber obtained by using a cross-linking agent containing a silane compound having n-butyl in the molecule is particularly excellent in elasticity, the curing stress is special, and the residual internal stress in the amorphous soft magnetic alloy powder is extremely small. , And further improve the soft magnetic characteristics of the amorphous soft magnetic alloy powder, which can greatly reduce the coercive force and core loss of the powder core.

O: \ 86 \ 86694.DOC -38-1229700 When using silicone resin, for the pressure applied to the granulated powder during compression molding, if the pressure is too low, the density of the powder core cannot be increased and a dense compact cannot be formed. Powder core. If the pressure is too high, the consumption of punching will increase sharply. In order to eliminate the forming and stress, this pressure needs to be different depending on the composition of the amorphous soft magnetic alloy powder. Fe74.43Cri.96p9 〇4C2 16B7 54Si4 When the composition is 87, it is preferably 500 MPa or more and 2500 MPa or less, and more preferably 1000 MPa or more and 2000 MPa or less. As the amorphous soft magnetic alloy powder contained in the granulated powder constituting the powder core, an average particle diameter (D greater than 4 microns and less than 45 microns, a tap density of 3.7 Mg / m3 or more, and a specific surface area are used. When the concentration is 〇3 m2 / g or less and the oxygen concentration is 3,000 ppm or less, the core loss (w) when measured under the conditions of a frequency of 100 kHz and a magnetic flux density of 0.1 τ may be less than 45 kW / m3 and the conventional Compared with the powder core, the core loss is greatly reduced. Moreover, the real number part #, which can achieve a composite permeability of up to 1 MHz, is basically fixed at "~ 80" when the DC bias voltage is 5500 Am-! Overlap characteristics ㈨, dc5_) are basically fixed at 30 ~ 34.5, so it is easy to use when used as a magnetic core. As the above amorphous soft magnetic alloy powder, use an average particle size ⑴ greater than 4 microns and less than 16 microns, tap density In the case of 40 Mg / m3 or more, a specific surface area of 0.23 m2 / g or less, and an oxygen concentration of 2000 ppm or less, the core loss can be measured at a frequency of 100 kHz and a magnetic flux density of 0T ( W) is below 250 kW / m3. The real number part of the composite magnetic permeability that can basically fix the frequency up to 1 ΜΗζ 57 ~ 75 'make the DC bias' DC5500), basically fixed at the DC magnetic overlap characteristic at 5 5 00 Am (from O: \ 86 \ S6694.DOC -39- 1229700 30 ~ 36 ', so it is easy to use when used as a magnetic core. The following is a heat treatment step of heat treating the core precursor and removing the internal stress of the core precursor. If the core precursor is in a predetermined temperature range Internal heat treatment can remove the internal stress of the core precursor itself generated in the powder manufacturing step or the forming step and the internal stress of the amorphous soft magnetic alloy powder contained in the core precursor, and can produce a powder core with low coercive force. The temperature is preferably in the range of (Tg-170) K or more (Tg) K or less, preferably in the range of (Tg-160) K or more (Tg-5) K or less, and more preferably in the range of (Tg-140) K or more The range of (Tg ~ 10) K or less is most preferably the range of (Tg-110) K or more and (Tg-10) K. If the core precursor is (Tg-160) K or more (Tg-5) ) Heat treatment in a temperature range below K, For example, if a powder core with a magnetic field of ± 2.4 kA / m and a coercive force of 100 A / M or less is manufactured, if it is heat-treated at a temperature of (Tg — 140) K or more (Tg — ί), it can be obtained as an external magnetic field of ± 2 A powder core having a coercive force of 4 A / m or less at 80 A / M or less. 'Furthermore, if the core precursor is heat-treated at a temperature of (Tg-110) K or more and (Tg-10) K or less, for example, an additional A powder core with a magnetic field of ± 2.4 kA / m and a coercive force of 40 A / m or less. When the heat treatment temperature does not reach (Tg- 170) K, the internal stress of the core precursor cannot be sufficiently removed, so it is not good. If it exceeds (Tg) K, the amorphous soft magnetic alloy powder crystallizes and the coercive force increases. For the poor. In the case of an alloy powder having a composition of, for example, Fe74.43Cru6P9.04C2.i6B7.54Si4.87, the Tg is 780K, and the heat treatment temperature is preferably in the range of 61Ok (337 ° C) to 780K (507t :). The heat treatment temperature is preferably 620k (347 O: \ 86 \ 86694.DOC -40-! 229700). The range of heat treatment is preferably 640K (367t) ~ 7. In the range of fox (49n :), the heat treatment temperature is most preferably in the range of 670K (397 ° c) to 770K (497 ° c). Especially when polyisocyanate rubber is used as the insulating material, it is preferable to make the osmium treatment warm. The range is from 670K (3 tones) to 770K (497t). When using polylithic oxygen tree: When 'if the heat treatment temperature is not reached 670K', the internal stress of the core precursor cannot be sufficiently removed ', so it is poor if the heat treatment temperature exceeds At 773K, the polysilicone rubber is excessively decomposed, and the strength of the powder core is reduced, so it is not good. Use polyfluoride rubber as the insulation material. The environment for the more expensive heat treatment is vacuum environment or gas environment, argon, etc. An inert gas environment, and particularly a nitrogen environment is preferred. Type of ring-shaped pressed powder core 21 〇 The obtained M powder core 21 contains the amorphous soft magnetic alloy powder of the present embodiment, and therefore has excellent soft magnetic characteristics at room temperature, or is not better by heat treatment. Therefore, as a material with excellent soft magnetic properties, this powder core can be used as the magnetic material of various magnetic elements, and compared with existing materials, a magnetic core with excellent magnetic properties can be obtained. The method for forming the granulated powder by a discharge plasma sintering device is a fine forming method, but the benefits are not limited to this. It can also be obtained by ordinary powder, thermal milling, and extrusion methods.

The powder core of the present invention. In J

O: \ 86 \ 86694.DOC »41-1229700 In the above description, a method for manufacturing a ring-shaped powder core using a mold is described, but it is not limited to this. A block-shaped formed body is manufactured, cut and processed into a circle. It can be made into a ring shape, a rod shape, a substantially E shape in a plan view, and a substantially mouth shape in a plan view, and various types of powder cores can be manufactured. According to the powder compact core according to the implementation form, the granulated powder produced by using the amorphous soft magnetic alloy powder of this embodiment having excellent soft magnetic characteristics and high bulk density and having a small surface unevenness and being formed into a substantially spherical shape is solidified. Therefore, the forming density of the powder core can be improved, and the high magnetic insulation characteristics of the powder can be maintained. In addition, the use of the amorphous soft magnetic alloy powder of this embodiment produced by a water spray method improves mass productivity. In addition, the lubricant is not added after the granulated powder is manufactured, and the lubricant is added during the granulated powder manufacturing stage. The amorphous soft magnetic alloy powder during the granulated powder manufacturing has good sliding properties, which can improve the manufacturing efficiency of the granulated powder. Furthermore, since the amorphous soft magnetic alloy powder is densely contained in the granulated powder, the drinkability at the end of the granule is improved, and as a result, a powder core having excellent soft magnetic properties is obtained. The amorphous soft magnetic alloy powder obtained by the water jet method is composed of particles having a small average particle size and approximately spherical shapes. Therefore, if the amorphous soft magnetic alloy powder is used as a powder core, a high saturation magnetization and a core can be obtained. Compact powder core with low loss, excellent change rate (amplitude permeability) and change rate of inductance (DC overlap characteristic) of the permeability relative to the change of the applied magnetic field. The powder core using the granulated powder according to this embodiment is not limited to the shape described above. The J-shaped powder core 41 shown in FIG. 6 and FIG. 7 are formed by cutting out a part of a ring to form a notched portion. The shape of the grooved powder core "also

〇 \ 86 \ 86694.DOC -42-1229700 is the powder core of the present invention. The manufacturing method of these powder cores 41 and 51 can be manufactured by compression molding in the same manner as the method of manufacturing the powder core 21 of the above embodiment, except that the mold shape is different. The body is manufactured by cutting. In these powder cores 41 and 51, the same effects as those of the powder core 21 of the above embodiment can be obtained. In particular, the J-shaped powder core 41 can be used as a magnetic core for a coil arranged in an electromagnetic induction heater (IH heater). As a general configuration of such a 汨 -type heater, for example, a coil is provided under a kettle (object to be heated), and a j-shaped powder core 41 is arranged below the coil. In the m-type heater, the kettle is heated by a coil, and as a coil core, a J-shaped powder core 41 with a small core loss is arranged to realize an ih-type heater with improved heating efficiency. (Implementation type of electromagnetic wave absorber) The electromagnetic wave absorber of the present embodiment is made by mixing the flat flat amorphous soft magnetic alloy powder and the insulating material of the above embodiment. A plurality of flat amorphous soft magnetic alloy powders added to the electromagnetic wave absorber are arranged in layers in the edge material. "'The insulating material used here can use materials with both insulation and adhesive properties.' May be made of thermoplastic resins such as vinyl chloride, polypropylene, ABS resin, phenolic resin, chlorinated polyethylene, silicone resin, and silicone rubber. Among these thermoplastic trees, chlorinated polyethylene is particularly preferable in terms of processability. For this kind of chlorinated polyethylene, it can be used as the gate of polyethylene and polyvinyl chloride. The chlorine content can be 30 ~ 45 atoms 0 / 〇, elongation 0: \ 86 \ 86694. D〇〇-43-1229700 A chlorinated polyethylene having a Muna viscosity of 35 to 75 (Ms 1 + 4: 10〇t :), such as 420 to 800 atomic%. In another form of the electromagnetic wave absorber of the present invention, an adhesive composed of the above-mentioned flat-type amorphous soft magnetic alloy powder of the present embodiment and a polywei elastomer is mixed to form a sheet. In the current electromagnetic wave absorber, in addition to the above-mentioned flat amorphous soft magnetic alloy powder of the present embodiment and _ as a viscosity, a lubricant composed of aluminum stearate can be added, and silane can be further added. Coupling agent. The previous electromagnetic wave absorber is formed by solidifying the flat amorphous soft magnetic alloy powder of the present embodiment and the resin as an adhesive, so the flat amorphous soft magnetic alloy powder of the present embodiment is dispersed in the resin. It is internally formed in a layered structure in the resin. In addition, the other electromagnetic wave absorbers in the foregoing are the adhesives composed of the flat amorphous soft magnetic alloy powder of the present embodiment described above and the polyfluorinated elastomer, and are formed by curing. The crystalline soft magnetic alloy powder is dispersed and arranged in layers in an adhesive. It is particularly preferred that each flat amorphous soft magnetic alloy powder is insulated by a polysiloxane elastomer. Because of the flat type of the embodiment described above, The amorphous soft magnetic alloy powder is insulated by the resin adhesive, so the impedance of the electromagnetic wave absorber itself is increased. This suppresses the generation of overcurrent, and can imaginary part of the composite permeability in the frequency band of several hundred MHz to several GHz # ,, (Hereinafter referred to as "Imaginary Permeability") can be increased in a wide range to improve the electromagnetic wave suppression effect in the high frequency band. In the former electromagnetic wave absorber, a thermoplastic resin is used as an adhesive, i

O: \ 86 \ 86694.DOC -44- 1229700 GH Permeability Π 6 or more. When the imaginary magnetic permeability is 以上 6 or higher, the HIS magnetic wave suppression effect is improved, and it can effectively shield the high-frequency electromagnetic magnetic wave absorber. It can be identified as a soft shell, as an electric mountain For example, a flat cam can be deformed from t. R; t ^ 4 by using a free finger end force. For example, the above-mentioned polysiloxane elastomer is distinguished by a feature that it has a much softer random deformation. In other electromagnetic wave absorbers, using polyfluorene elastomer as a binder, you can get! The imaginary magnetic permeability # of GHz is above 1 (). The imaginary magnetic permeability U is above ^ 乂 ^ 'The electromagnetic wave suppression effect of the GHZ band is improved, and it can effectively shield the electromagnetic waves of the south frequency, so it is better. In addition to increasing the impedance of the electromagnetic wave absorber, the chlorinated polyethylene also adheres to the flat amorphous soft magnetic alloy powder of this embodiment ^ the shape of the electromagnetic wave absorber. Moreover, the oxygenated elastomer has excellent compression moldability. Even if it is cured and molded at normal temperature, it can also form a high-strength electromagnetic wave absorber. Furthermore, “polysiloxane elastomer and chlorinated polyethylene have the full life span of dogs even in the electric absorber. For example, in the case of an amorphous soft magnetic alloy powder with a magnetic f expansion constant of lXHT6 ~ 5 () xl (r6), it can also ease the deformation, alleviate the internal stress of the electromagnetic wave absorber, and increase the imaginary magnetic permeability #. A lubricant made of aluminum stearate is added to the above resin, and the flat amorphous soft magnetic alloy powder of this embodiment is densely packed, and the degree of chirping of the magnetic wave absorber is improved. The magnetic permeability, g, is increased. If a silane coupling agent is added to the above resin, the flat amorphous soft magnetic alloy powder and the polysiloxane elastomer of this embodiment form a silane coupling agent 〇 \ 86 \ 86694 D〇C -45-! 229700 Strongly bond, uniformly cover the surface of the flat amorphous soft magnetic alloy powder with polysiloxane elastomer. This makes the flat amorphous soft magnetic alloy powder have better insulation with each other and imaginary permeability # In the electromagnetic wave absorber of this embodiment, since the flat amorphous soft magnetic alloy powder of this embodiment is arranged in layers in the insulating material, the electromagnetic wave absorber can be densely packed and the flatness can be reduced. Between the powder bundles, and the flattened powder and the approximately spherical amorphous soft magnetic alloy powder, the aspect ratio increases, the impedance of the electromagnetic wave absorber itself increases, and the occurrence of overcurrent is suppressed. Specifically In other words, if the aspect ratio of the flat amorphous soft magnetic alloy powder is UXJL, the contact between the particles is reduced. The impedance of the electromagnetic wave absorber itself increases by A, and the overcurrent If it is suppressed, the imaginary permeability # in the GHz band is easily above 6 so that the electromagnetic wave suppression effect of the electromagnetic wave absorber is improved. If the aspect ratio of the flat amorphous soft magnetic alloy powder is above ι0, the Less contact 'Increase in the glass of the electromagnetic wave absorber itself' Increase in glass 'The occurrence of overcurrent is suppressed, and the imaginary magnetic permeability in the GHz band [easily above 10' is used. As a result, the electromagnetic wave suppression effect of the electromagnetic wave absorber has an aspect ratio The upper limit is preferably 800 or less. If the aspect ratio is 800 or less, the diamagnetic boundary of the flat amorphous soft magnetic alloy powder itself will not become small. The real part of the composite magnetic permeability in the low frequency band 〆 ( It is hereinafter referred to as that the effective magnetic permeability M ， is suppressed to be low, and the imaginary number magnetic permeability is easy to be 6 or more with the irradiation, and the electromagnetic wave suppression effect is improved. The upper limit of the aspect ratio is preferably below 3⑻, if the aspect ratio is below the dove

O: \ 86 \ 86694.DOC -46- 1229700 The magnetic permeability of the flattened particles itself # 小 aivore is too small, the real part of the low-frequency band compound is called, (hereinafter referred to as lower, μμ ㈣ Ran is the effective magnetic permeability & can be suppressed to further improve the effect.… 1. Above, the electromagnetic wave is suppressed μ! The density of the electromagnetic wave absorber of the application type is preferably 3.0 gW at a colony of 1 degree if Above 30 g / cm3, the amorphous soft magnetic alloy powder causes the gap between the flat particles to decrease, so the imaginary number and magnetic permeability β in the GHz band are easily above 10, and the electromagnetic wave suppression effect is improved. The higher the density of the absorber, the better, but if it is relatively high, the particles in the flat are too eager to fill, the impedance of the electromagnetic wave absorber is reduced, and the overcurrent 'imaginary permeability #' is reduced. Therefore, it is preferable to use the upper limit of the density of the electromagnetic wave absorber. It is 6.5 g / cm3. The content rate of the flat amorphous soft magnetic alloy powder in the Bebesch type electromagnetic wave absorber is preferably 30 vol% or more and 80 vol% or less. The effective rate is more than 30% by volume, and the magnetic substance is sufficient to effectively exert the electromagnetic wave suppression effect. And if the content is less than 80% by volume, the alloy powders contact each other, the impedance does not decrease, and the imaginary number permeability is indeed increased and maintained # ” It can effectively exert the electromagnetic wave suppression effect. The content of polysilicone elastomer or vaporized polyethylene is to remove the remaining part of the flat amorphous soft magnetic alloy powder. In the case of adding a lubricant, it is better than the electromagnetic wave absorber It is added in a range of 0.1% by weight or more and 5% by weight or less. When a silane coupling agent is added, it is preferable to add 0.1 · 1% by weight to the electromagnetic wave absorber. / 0 or more and 2% by weight or less. O: \ 86 \ 86694.DOC -47- 1229700 According to the electromagnetic wave absorber of this embodiment, a flat amorphous soft magnetic alloy powder obtained by flattening a substantially spherical amorphous soft magnetic alloy powder having excellent soft magnetic characteristics is used. Since it can be densely filled in an insulating material, it can improve the electromagnetic effect of the frequency band of hundreds of MHz to several GHz. The type of electromagnetic wave absorber is prepared by mixing a flat amorphous soft magnetic alloy powder and an insulating material, which are produced by water spraying of the A-shaped amorphous soft magnetic alloy powder of this embodiment. The above-mentioned flat amorphous soft magnetic alloy powder can be coated with water glass. If the flat particles are coated with water glass, the insulation between the particles can be further improved, and the impedance of the electromagnetic wave absorber can be further improved, which can be further improved. Increase the imaginary number permeability of high-frequency frequency π to improve the electromagnetic wave suppression effect. Eight = The electromagnetic wave absorber of the present embodiment makes the amorphous soft magnetic combination: private, but the flat type mainly contains the embodiment. Amorphous soft magnetic :: The powder of 'and' instead of the flat amorphous soft magnetic two-gold powder of this embodiment 'can also use the spherical amorphous soft magnetic combination of this embodiment: at the end, but also' this A mixture of flat amorphous soft magnetic composite powder and spherical amorphous soft magnetic alloy powder. Examples Experimental Example 1: FeCrPCB series alloy denier alloy, Fe—P alloy, and Wr are used as raw materials, which are respectively called: pre-quantities, and put these raw materials into the high-voltage service device shown in FIG. I in the atmospheric environment. Dissolve while the melt is in trouble.

0. \ 86 \ 86694.DOC -48- 1229700 The molten metal nozzle is added with the molten alloy solution, and the high-pressure water is sprayed from the water spray nozzle of the nozzle fog bow shown in Figure Bing, so that the alloy molten solution is misted. In the reaction chamber, the mist-like alloy melt is quenched to produce soft magnetic alloy powders. At this time, various manufacturing conditions are changed to produce various soft magnetic alloy powders (Ng i ~ 3 soft magnetic alloy powders). The composition of each of the obtained soft magnetic alloy powders was a composition. 55 Moreover, the structure of various soft magnetic alloy powders with the composition Fe ^ Ci ^ PnCsB5 described above was analyzed by X-ray diffraction method. At this time, the X-ray diffraction patterns of all alloy powders showed a wide spectrum. Structure of crystalline phase. Therefore, even an alloy composed of Fe, Cr, p, c, and B can form an amorphous soft magnetic alloy powder composed of an amorphous phase. The above composition was observed by a scanning electron microscope (SEM) Fe "c ^ p "

Various shapes of soft magnetic alloy powder of CsB5, study shape. The results are shown in Table ^. The values shown in Table 1 are the average values of the average particle diameter (Dw), tap density, specific surface area, oxygen concentration, and minimum and maximum values of the obtained soft magnetic alloy powder. Furthermore, DSC measurement (Differential scanning caloriemetry) was performed on each of the obtained soft magnetic alloy powders, and the glass transition temperature Tg, the crystallization initiation temperature, the Curie temperature, and the melting point Tm were measured, and the supercooled liquid was also determined. The temperature interval △ Ding and Tg / Tm. These results are shown in Table 2. The temperature increase rate during DSC measurement was 0.67 κ / sec. Tm * in Table 2 represents the melting temperature of the alloy. For each of the obtained soft magnetic alloy powders, the saturation magnetization σ s was measured by a vibration sample type magnetometer O: \ 86 \ 86694.DOC -49-1229700 (VSM). These results are summarized in Table 2. Next, based on 98.3% by weight of the obtained soft magnetic alloy powder, 14% by weight of a silicone resin as an insulating material and 0.3% by weight of stearic acid as a softener were mixed, and granulated to obtain a granulated powder. These granulated powders were dried at room temperature in an atmospheric ring for 2 hours. Next, the dried granulated powder is classified and selected to have a particle size in the range of 45 micrometers to 500 micrometers, and used in the subsequent steps. After the granulated powder having a particle diameter of 45 μm to 500 μm is filled into the WC mold shown in FIG. 3, the pressing device shown in FIG. 4 is used to punch holes 112 and U3 at upper and lower pressures at room temperature under atmospheric pressure. The granulated powder was pressed to a forming pressure (Ps) of 2000 MPa. Then, heat treatment is performed at a heat treatment temperature Ta of 573K (30 (TC) to 723K (450 ° C) for 3600 seconds to produce various powder cores. The shape of this powder core is 20 mm outside diameter and 12 mm inside diameter The thickness of the ring is 7 mm. The core loss (W) of the various powder cores obtained is measured. The core loss here is the core loss when measured at a frequency of 100 kHz and a magnetic flux density of 0 · ιτ. The results are summarized. Not shown in Table 2. The real part (also called the effective permeability) of the composite magnetic permeability of the various pressed powder cores measured and the DC overlap characteristics (# 'Den⑽). Here 〆 is at the frequency of 1 kHz The value at the time of measurement, #, DC55⑽ is the effective permeability when the DC bias magnetic field is measured at 5500 Am-1. The results are summarized in Table 2. O: \ 86 \ 86694.DOC -50- 1229700 Table 1

No. Soft magnetic alloy powder composition and shape 〇50 (micron) tap density (Mg / m3) specific surface area (m2 / g) oxygen concentration (ppm) aspect ratio minimum aspect ratio maximum aspect ratio ^ ratio average structure 1 Fe7sCr2P 13C5B5 Unshaped 115.20 2.80 0.88 5300 1.0 22.0 6.0 Amorphous 2 P ^ 75 ^ Γ2P 13C5B5 Unshaped 60.7 3.20 0.59 4500 1.0 15.0 4.5 Amorphous 3 Fe75Cr2P 13C5B5 Roughly spherical 3.40 3.93 0.31 1600 Bu 1.0 3.1 Π 1.2 Amorphous

No. Tc (K) Tg (K) Tx (K) ΔΤχ (Κ) Tm * Tg / Tm Tx / Tm σ s (Wb.m / kg) W (kW / m3) U 'M'dC5500 1 550 731 776 45 1426 0.51 0.54 167 2450 150 24.0 2 550 716 774 58 1426 0.52 0.54 167 1500 125 26.0 * 3 551 733 779 46 1371 0.53 0.57 179 265 56 31.5 As can be seen from the results shown in Table 1 and Table 2, No_ 1 ~ 2 The soft magnetic alloy powder can be amorphous, has a large average aspect ratio, D5G, specific surface area, and large oxygen concentration, and has a small tap density. Therefore, the core loss of the powder core made of the soft magnetic alloy powder No. 1 to 2 is large, and the DC superimposition characteristic is low. Since the soft magnetic alloy powders No. 1 to 2 have a large oxygen concentration, thermal stability is changed. On the other hand, the soft magnetic alloy powder of No. 3 is approximately spherical, has a small specific surface area and a small oxygen concentration, and has a high tap density. Compared with No. 1 to 2, the saturation magnetization σ s is also high. Compared with a powder core made of a soft magnetic alloy powder using No.!], A powder core made of such a soft magnetic alloy powder of No. 3 has a 'core and loss that is greatly reduced, and 1, a DC overlap characteristic It also improves. In Experimental Example 1, when the average particle diameter (D5Q) of the soft magnetic alloy powder having a composition of FC2Pl3c5B5 was 9. G microns or more, the structure was crystallized. (Experimental example 2) Fe, Fe-C alloy, pe-p alloy, gold, Cr, B, or B and Si were used as raw materials, and a predetermined amount was weighed, respectively. These raw materials are put into a melt booster pot of the high-pressure water spraying device shown in FIG.

O: \ 86 \ 86694.DOC -51-1229700 The molten metal nozzle of the crucible drips the alloy to melt, and at the same time, the high-pressure water is sprayed by the water spray of the water spray shown in the figure, so that the molten alloy is atomized. The misty alloy melt is quenched in the reaction chamber to produce soft magnetic alloy powder. At this time, various manufacturing conditions are changed to produce various soft magnetic alloy powders (soft magnetic alloy powders of No. 4 to ΐ4). The composition of various soft magnetic alloy powders obtained by lOO-t-y-z-w-χΡ ySitCz is

BwCrx composition (wherein 2 is 12 to 7 atomic%, w is 5.6 to 87 atomic%, X is 丨 · 96 to 2 atomic%, y is 8.44 to 12.74 atomic%, and t is 0 to 4.87 atomic / 〇). In the above composition formula, ν represents a composition ratio of ρ, or a total composition ratio of 卩 and § 丨. Moreover, the structure of various soft magnetic alloy powders with the composition of Fe⑽ · t_y z_w xPySitCzBwCrx was analyzed by X-ray diffraction method. At this time, the X-ray diffraction patterns of all alloy powders show a broad spectrum. Structure of crystalline phase. Therefore, even if it is Fe, Cr, p, c, 6 or 6 and 5 to, an amorphous soft magnetic alloy powder composed of an amorphous phase can be formed. In addition, the above composition was observed by a scanning electron microscope (SEM), and various soft magnetic alloy powders of ⑽ · t-y_z ... x (Py or PySit) CzBwCrx 'were examined for shape. The results are shown in Table 3. Table 3 shows the average values of the average particle diameter (Dw), tapped specific surface area, oxygen concentration, and minimum and maximum values of the aspect ratio of the obtained soft magnetic alloy powder. Furthermore, Dsc measurement was performed on each of the obtained soft magnetic alloy powders. (Sc_ing caloriemetry: differential scanning calorimetry),

O: \ 86 \ 86694.DOC -52- 1229700 The glass transition temperature Tg, the crystallization start temperature Tx, the Curie temperature Tc, and the melting point Tm were measured, and the temperature intervals ΔTx and Tg / Tm of the supercooled liquid were obtained. These results are shown in Table 4. The temperature increase rate during DSC measurement was 0.67 K / sec. Tm * in Table 4 indicates the melting temperature of the alloy. For each of the obtained soft magnetic alloy powders, the saturation magnetization amount σ s was measured in the same manner as in Experimental Example 1. These results are summarized in Table 4. Next, except that the soft magnetic alloy powder obtained in Experimental Example 2 was used, granulated powders were produced in the same manner as in Experimental Example 1, and further, the granulated powder was used.

Finally, various powder cores were manufactured in the same manner as in Experimental Example 1 described above. The core loss (W) of each of the powder cores measured in the same manner as in Experimental Example 1. The results are summarized in Table 4. The effective magnetic permeability (and DC overlap characteristics (/ 'DC55GG) of various powder cores obtained by the same measurement as in Experimental Example 1 are shown in Table 4. Table 3 is summarized.

No. Soft magnetic alloy powder composition shape D50 (micron) Tap density (Mg / m3) Specific surface area (m2 / g) Oxygen concentration (ppm) Aspect ratio Minimum aspect ratio Maximum aspect ratio Average structure 4 FG70.85Cr2P12. 29 C4.65B7Si3.32 approximately spherical 6.00 4.02 0.25 1300 1.0 4.0 1.2 amorphous 5 Fe73.4Cr1.90P 12.7 C4.9B7 approximately spherical 5.00 4.00 0.26 1100 1.0 3.3 1.2 amorphous 6 Fe76Cr2P9.23C2.2 B7. 7S12.87 approximately spherical 5.80 4.01 0.25 1400 1.0 4.1 1.2 amorphous 7 Fe76Cr2P9.23Ci.2 B7.7S12.87 approximately spherical 5.80 4.01 0.25 2000 1.0 3.2 1.2 amorphous 8 Fe76Cr2P8.44C2.2 B8.7Sl2. 66 Roughly spherical 5.40 4.03 0.26 1900 1.0 4.0 1.2 Amorphous 9 Fe7〇Cr2Pn.75C7 B5.6S13.65 Roughly spherical 5.70 4.03 0.25 1500 1.0 3.5 1.2 Amorphous 10 Fe75.2iCr1.98P9.14 C2.18B7. 62S13.87 approximately spherical 9.10 4.24 0.22 1300 1.0 3.8 1.1 amorphous 11 Fe74.82crl.97p9.09 C2.17B7.58S14.37 approximately spherical 9.10 4.00 0.22 1900 1.0 3.5 1.2 amorphous 12 Fe74.43crl.96p9 .04 C2.16B7.54S14.87 roughly spherical 9.08 4.09 0.22 2400 1.0 3.7 1 .3 amorphous 13 Fe75.21crL.98p9.14 C2.18B7.62S13.87 amorphous 12.10 2.60 0.65 4500 1.1 15.0 4.0 amorphous 14 Fe75.21crl.98p9.14 C2.18B7.62S13.87 approximately spherical 9.10 4.10 0.22 1900 1.0 4.0 1.2 Amorphous O: \ 86 \ 86694.DOC -53- 1229700 Table 4

No. Tc (K) Tg (K) Tx (K) ΔΤχ (Κ) Tm * Tg / Tm Tx / Tm 〇s (Wb.m / kg) W (kW / m3) 〆β DC5500 4 548 803 845 42 1432 0.56 0.59 149 240 57 32.0 5 554 749 799 50 1367 0.55 0.58 162 267 58 32.0 6 584 751 805 54 1367 0.55 0.59 176 245 58 32.0 7 583 754 806 49 1372 0.55 0.59 170 255 57 32.0 8 591 756 803 47 1385 0.55 0.58 173 251 57 32.0 9 547 802 843 46 1434 0.56 0.59 146 242 57 32.0 10 597 765 812 47 1348 0.57 0.60 174 225 62 32.5 11 604 771 816 48 1343 0.57 0.61 175 235 61 33.0 12 602 780 829 49 1342 0.58 0.62 174 265 63 33.0 13 602 746 812 66 1388 0.54 0.59 170 1900 135 25.5 14 597 765 812 47 1348 0.57 0.60 174 235 61 33.0 It can be seen from the results of Tables 3 and 4 that the soft magnetic alloy powders No. 4 to 12 can be roughly spherical Like. The total composition ratio v of P and Si of soft magnetic alloy powders of No. 4 and 9 exceeds 15 atomic%, and ΔTχ is 46K or less. In contrast, for the soft magnetic alloy powders No. 5 to No. 5 having a composition ratio of P or a total composition ratio ν of 15 atomic% or less of P and Si, when both P and Si are added, compared with adding P alone, △ Tx can be increased. When both P and Si are added, the larger the composition ratio ν, the more △ Tx can be increased, and the amorphous phase formation ability can be improved. In Experimental Example 2, when the average particle diameter (D5G) of the soft magnetic alloy powder having a composition of F e 70.85 Cr2P12.29C4.65B7 Si3.32 was 9.0 μm or more, the structure crystallized. For the soft magnetic alloy powders No. 10 to 12, as the amount of Si added increases, ΔTx increases, and the ability to form an amorphous phase can be improved. Next, No. 13 soft magnetic alloy powder was amorphous, and the average aspect ratio, D5G, specific surface area, and oxygen concentration were large, and the tap density was small. Therefore, the core loss of the powder core made of the soft magnetic alloy powder of No. 1 3 is large, and the DC overlap characteristics are poor. Since the soft magnetic alloy powder of No. 13 has a large oxygen concentration, its thermal stability changes. In contrast, the soft magnetic alloy powder of No. 14 obtained a roughly spherical shape, which is more than O: \ 86 \ 86694.DOC-54-1229700

The surface area and oxygen concentration are small, and the Fenfen & L vibration κ 饴 degree is large, and the saturation magnetization σ s is also higher than that of No. ΐ3. ㈣The powder core made of such soft magnetic alloy powder ν〇 · ι4 and the powder core phase tb made of soft magnetic alloy powder No. 13 have significantly reduced core loss and excellent DC superposition characteristics. (Experimental example 3) Dibubble, Fe ~ C alloy, Fe-P alloy, B, Si, and Cr were used as raw materials, and a predetermined amount was weighed respectively. 'These raw materials were placed in the high-pressure water shown in Fig. 1 in an atmospheric environment. Spray "Remove the melted liquid" to dissolve, drip the alloy melting solution from the melted liquid nozzle, and simultaneously spray high pressure water from the water spray nozzle of the water sprayer shown in Fig. The molten liquid is formed into a mist shape, and the mist shape is quenched in the reaction chamber to manufacture soft magnetic alloy powder. At this time, the manufacturing conditions are changed to manufacture various soft magnetic alloy powders (soft magnetic alloy powders of Nq15 to 2i). In contrast, the soft magnetic alloy powder of plate 17 was left at room temperature for a long time after the powder was formed. The composition of each of the obtained soft magnetic alloy powders was FWh M. 7 Si2.87 or Fe100_t.y_zwxPySitCzBwCrx (wherein z is 2.16-2.2 ^^ 〇 / 〇, 7.54-7.7 ^^ 〇 / 〇, x ^ l ^ 8 > f ^ 〇 / 〇, y is 9.04 ~ 9.23 atomic%, t is 2.87 to 4.87% atomic%, and 121 is 121 to 13 _91 atoms /%) ν in the above composition formula represents the total composition ratio of P and Si. Moreover, the structure of various soft magnetic alloy powders with a composition of Fe78p9 23c2 2B7 7Si2 87 or% SitCzBwCrx was analyzed by the X-ray diffraction method. At this time, the X-ray diffraction patterns of all alloy powders show a wide spectrum. It can be seen that the structure is composed of an amorphous phase. So even if it is, O: \ 86 \ 86694.DOC -55- 1229700

An alloy composed of Cr or A1 P, c, B, and Si may also be formed into an amorphous soft magnetic alloy powder composed of an amorphous phase. In addition, various soft magnetic alloy powders of the above composition Fe78P9.23C2.2B7.7Si2.87 or Fei0 (M, w-xPySitCzBwCrx) were observed with a scanning electron microscope (SEM), and the shapes were studied. The results are shown in Table 5. 5 represents the average particle diameter (D ^) of the obtained soft magnetic alloy powder, the specific surface area of the tapped mountain, the oxygen concentration, and the minimum and maximum values of the aspect ratio. Furthermore, various soft magnetic alloy powders were obtained. Perform DSC measurement (Differentlai scanning calorimetry), measure the glass transition temperature Tg, crystallization start temperature, Curie temperature Tc * refining point Tm, and calculate the temperature interval of the supercooled liquid Δ D乂 and Tg / Tm. These results are shown in Table 6. The temperature rise rate during DSC measurement was 0.67 κ / sec. Tm * in Table 6 represents the melting temperature of the alloy. For the various soft magnetic alloy powders obtained, and In Experimental Example 1, the saturation magnetization σ s was measured in the same manner. The results are summarized in Table 6. Next, a granulated powder was produced in the same manner as in Experimental Example 1 except that the soft magnetic alloy powder obtained in Experimental Example 3 was used. Furthermore, various granulated powder cores were produced using the granulated powders in the same manner as in Experimental Example 1. The core losses of various acoustic powder cores measured in the same manner as in Test Example 1 (W). The results are summarized in Table 6. The effective magnetic permeability (β) and DC weight characteristics (# 1D C 5 5 G 0) of various powder cores obtained by the same measurement as in Experimental Example 1. The results are summarized in Table 6. 0- \ 86 \ 86694.DOC- 56- 1229700 Table 5

No. Soft magnetic alloy powder composition shape D50 (micron) Tap density (Mg / m3) Specific surface area (m2 / g) Oxygen concentration (ppm) Aspect ratio Minimum aspect ratio Maximum aspect ratio Average structure 15 Fe78P9.23C2. 2B77 Sl2.87 Roughly spherical 9.02 4.04 0.22 7500 1.0 4.4 1.2 Amorphous 16 Pβ77〇Γι9.23〇2.2 B7.7si2.87 Roughly spherical 4.60 4.00 0.22 1900 1.0 4.0 1.2 Amorphous 17 Fe76.19 crlp9.14c2. 18B7.62S13.87 approximately spherical 3.70 4.00 0.22 3700 1.0 4.0 1.1 amorphous 18 Fe73.84cr2.5p9.04 C2.16B7.54S14.87 approximately spherical 9.00 4.12 0.21 1100 1.0 3.8 1.2 amorphous 19 Fe73.39cr3p9 .04c2. 16B7.54S14.87 approximately spherical 8.80 4.09 0.21 900 1.0 4.1 1.2 amorphous 20 Fe72.39cr4p9.04c2. 16B7.54si4.87 approximately spherical 9.00 4.09 0.20 900 1.0 3.3 1.2 amorphous 21 Fe68.39cr8p9 .04c2. 16B7.54S14.87 Roughly spherical 9.02 4.10 0.21 800 1.0 3.8 1.2 Amorphous Table 6

No. Tc (K) Tg (K) Tx (K) ΔΤχ (Κ) Tm * Tg / Tm Tx / Tm as (Wb.m / kg) W (kW / m3) 〆β DC5500 15 16 610 759 803 44 1323 0.57 0.61 180 245 58 32.0 17 625 766 809 43 1365 0.56 0.59 185 470 55 31.0 18 584 782 829 47 1319 0.59 0.63 167 210 62 31.5 19 563 783 838 55 1296 0.60 0.65 161 202 62 32.0 20 540 785 841 56 1301 0.60 0.65 155 195 62 30.0 21 479 790 845 55 1315 0.60 0.64 140 187 61 28.5 As can be seen from the results in Tables 5 and 6, the soft magnetic alloy powders No. 15 to 21 can be obtained approximately spherically. However, the soft magnetic alloy powder of No. 15 has a large oxygen concentration, generates rust, and has poor corrosion resistance. The soft magnetic alloy powder of No. 17 has a large oxygen concentration and a small average particle diameter (D50), and a core loss of a powder core manufactured using the alloy powder is large.

The soft magnetic alloy powders No. 16 and 18 to 20 in which the amount of Cr is 1 to 4 atomic% have a larger saturation magnetization than the soft magnetic alloy powders No. 21 in which the amount of Cr is 8 atomic%. The saturation magnetization of the soft magnetic alloy powder of No. 21 is reduced, because the Fe concentration is relatively decreased with the increase of the Cr addition amount. In addition, as for the soft magnetic alloy powders No. 16, 18 to 20 in which the amount of Cr is added is 1 to 4 atomic%, as the amount of Cr added is increased, ΔTx is increased, and the ability to form an amorphous phase is increased. (Experimental example 4) O: \ 86 \ 86694.DOC -57- 1229700 Using Fe, Fe-C alloy, Fe-p alloy, B, and coffee as raw materials, weigh a predetermined amount, and then measure this in an atmospheric environment. The material is placed in the high-pressure water spray device shown in Figure 丨 to melt and dissolve the alloy solution. The alloy melt is added dropwise from the melt nozzle of the liquid suspension. High-pressure water is sprayed to make the molten alloy liquid into a mist. The molten alloy melt is quenched in the reaction chamber to produce soft magnetic alloy powder. At this time, the manufacturing conditions are changed to produce various soft magnetic alloy powders (NO.22 ~ 48 soft magnetic alloy powder). The & of each of the obtained soft magnetic alloy powders had a composition of% eh M · C2.16B7.54Si4.87. In addition, the various soft magnetic alloy powders with the composition Fe74 43Cri 96p9 〇4C2 as the above-mentioned composition were analyzed by X-ray diffraction method. At this time, the X-ray diffraction patterns of all the alloy powders showed a wide spectrum. It can be seen that the structure is composed of an amorphous phase. So even Fe, Cr, p, c, B,

An alloy composed of Si may also be formed into an amorphous soft magnetic alloy powder composed of an amorphous phase. FIG. 8 shows the state of the ν〇 · 23 soft magnetic alloy powder by electron field diffraction analysis with a limited field of view. Various soft magnetic alloy powders having the above composition FhmCn% iV ^ Cz. ^ BrnSi4.87 were observed by a scanning electron microscope (SEM), and the shapes were studied. The results are shown in Tables 7 and 8. Fig. 10 shows the results of observation of the soft magnetic alloy powder No. 23 by §εµ. In Fig. 12, the structure of the soft magnetic alloy powder of No. 23 was observed with a transmission electron microscope (TEM). Tables 7 and 8 show the average particle size of the obtained soft magnetic alloy powder O: \ 86 \ 86694.DOC -58-1229700 (D ^), minimum tap density, specific surface area, oxygen concentration, and minimum aspect ratio. The average of the value and the maximum. Furthermore, 'differential scanning caloriemetry (differential scanning calorimetry) was performed on each of the obtained soft magnetic alloy powders, and the glass transition temperature Tg, the crystallization initiation temperature τχ, and the Curie temperature were measured, and the refining point Tm was calculated simultaneously. The temperature interval △ Ding Yi and Tg / Tm of the supercooled liquid. These results are shown in Tables 9 and 10. The rate of temperature rise during DSC measurement was 067 K / sec. Tm * in Tables 9 and 10 indicates the melting temperature of the alloy. For each of the obtained soft magnetic alloy powders, the saturation magnetization σ s was measured in the same manner as in Experimental Example 丨. These results are summarized in Tables 9 and 0. Next, except that the soft magnetic alloy powder obtained in Experimental Example 4 was used, granulated powders were produced in the same manner as in Experimental Example 1, and further, using the granulated powders, various powder cores were produced in the same manner as in Experimental Example 1. The core loss (W) of each of the powder cores measured in the same manner as in Experimental Example 1. The results are summarized in Tables 9 and 10. Moreover, the effective permeability (//,) and DC overlap characteristics ((DC5 5GG) of the various powder cores obtained by the same measurement as in Experimental Example 丨 are shown in Tables 9 and 10.

O: \ 86 \ 86694.DOC -59- 1229700 Table 8

No. Soft magnetic alloy powder composition shape D50 (micron) Tap density (Mg / m3) Specific surface area (m2 / g) Oxygen concentration (ppm) Aspect ratio Minimum aspect ratio Maximum aspect ratio Average structure 36 Fe74.43Cr ι .9th 9.04C2.1 approximately 8.94 4.17 0.20 1100 1.0 2.3 1.2 37 6B7.54S14.87 spherical 8.63 4.11 0.22 1000 3.1 1.2 amorphous 38 8.86 4.04 0.22 1300 3.4 1.2 39 9.04 3.92 0.25 1300 5.8 1.5 shaped 40 9.05 3.78 0.28 1300 5.8 1.8 41 8.86 4.02 0.22 1900 3.8 1.3 42 9.04 3.91 0.25 2400 4.5 1.5 43 9.05 3.78 0.28 2900 5.9 1.9 44 13.08 4.05 0.28 1300 5.9 2.1 45 14.98 4.28 0.24 1400 4.0 1.4 46 29.55 4.39 0.22 1300 4.8 1.6 47 44.32 4.51 0.22 1400 5.7 1.8 48 48.90 4.69 0.22 1400 5.7 1.8 Table 9

No. Tc (K) Tg (K) Tx (K) ΔΤχ (Κ) Tm * Tg / Tm Tx / Tm σ s (Wb.m / kg) W (kW / m3) 〆β D5500 22 602 780 829 49 1342 0.58 0.62 174 508 59 32.0 23 206 70 34.0 24 560 55 32.0 25 335 61 32.5 26 422 62 32.5 27 334 60 32.5 28 244 62 32.5 29 212 62 32.5 30 174 64 33.0 31 210 61 32.5 32 253 63 33.0 33 216 63 33.0 34 201 62 33.0 35 257 69 34.5 Table 10 No. Tc (K) Tg (K) Tx (K) ΔΤχ (Κ) Tm * Tg / Tm Tx / Tm as (Wb.m / kg) W (kW / m3) β 'β D5500 36 602 780 829 49 1342 0.58 0.62 174 174 63 32.5 37 191 62 32.5 38 200 63 32.5 39 335 63 32.0 40 420 59 32.0 41 245 61 32.0 42 342 58 31.5 43 600 786 830 44 1355 0.58 0.61 171 445 58 31.5 44 602 780 829 49 1342 0.58 0.62 174 440 70 34.0 45 235 70 34.0 46 335 71 34.0 47 445 80 34.5 48 550 85 34.5 It can be seen from the results in Tables 7 to 10 that the soft magnetic alloy powders No. 22 to 48 can Get roughly spherical. However, the specific surface area of the soft magnetic alloy powder of No. 22 is as large as 0.32 m2 / g, and the core loss of the powder core made of the soft magnetic alloy powder is large. The tap density of No.24 soft magnetic alloy powder is as small as 3.68 Mg / m3, and the core of the powder core made of this soft magnetic alloy powder is O: \ 86 \ 86694.DOC -60- 1229700. Big. In contrast, soft magnetic alloy powder (N.O.) that can make D5G greater than 4 microns and less than 45 microns, a tap density of 3.7 Mg / m3 or more, a specific surface area of 0.3 m2 / g or less, and an oxygen concentration of 3000 ppm & 25, 26, 27, 32, 35, 39, 40, 42, 44, 45, 46) The core loss (W) of the powder core is 450 kw / m3 or less, and the effective magnetic permeability 透 can be 58. ~ 7 Bu and 'Use soft magnetic alloy powder (Dw greater than 4 microns and below 16 microns, tap density of 4.0Mg / m3 or more, specific surface area of 023m2 / g butadiene, oxygen concentration of 2000 ppm or less ( No. 23, 28, 29, 30, 31 33, 34, 36, 37, 38, 4 丨) The core loss (W) of the powder core manufactured is less than 250 kw / m3, and the effective magnetic permeability can be made. 〆 is 6 丨 ~ 7〇, and the DC overlap characteristic # 'DC55GG is 32 ~ 34. As can be seen from the SEM photograph of Fig. 10, the soft magnetic alloy powder of No. 23 is approximately spherical. This soft magnetic alloy powder of No. 23 has an amorphous halo pattern as shown in the distribution pattern of the diffraction points in FIG. 8, and it can be seen that it is composed of an amorphous phase. It can be seen from the TEM photo in Fig. 12 that the soft magnetic alloy powder of No. 23 has a uniform microstructure and no mixed crystal phases. (Experimental example 5) Using Fe, Fe-C alloy, Fe_p alloy, B, Si, or ^ or braided or ~ as raw materials, weigh a predetermined amount, respectively, and put these raw materials in the atmospheric environment in Figure 1 In the melt crucible of the high-pressure water spray device shown in the figure, dissolution is performed, and the alloy melt is dropped from the melt nozzle of the melt crucible. At the same time, high-pressure water is sprayed from the water spray nozzle of the water sprayer shown in the figure to melt the alloy. : Into O: \ 86 \ 86694.DOC -61-1229700 In the form of a mist, the molten alloy melt is quenched in the reaction chamber to produce soft magnetic alloy powder. At this time, the manufacturing conditions are changed to produce various soft magnetic alloy powders ( No. 50 ~ 57 soft magnetic alloy powder). The composition of the obtained various soft magnetic alloy powders was a composition consisting of Fei.t_y_z_w xpySitCz bwmx (wherein 2 is 216 to 218 atomic%, the boundary is 7.54 to 7.62 atomic%, x is BU ·% atomic%, and y is 7 to 914 atomic%, [3 87 10 atomic%). M in the above composition formula represents Cr or Mo ·· or V. The composition of the soft magnetic alloy powder of No. 56 is the same as that of No. 23, but the average particle size (DW, tap density, specific surface area, oxygen concentration, and aspect ratio is outside the range of the present invention, and Ng The soft magnetic alloy powder of .57 has the same composition as that of ν〇 · 23 when manufactured by the water spray method, and more specifically, 'the water pressure during spraying is reduced to reduce the cooling of the molten solution. Velocity, forming a mixed phase of amorphous and crystalline. For various soft magnetic alloy powders with the above composition Fe1G (M_y_z_w-xpySitCzBwMx), the structure is analyzed by X-ray diffraction method. At this time, ν〇 · 5ι, Ν〇 · 53, said The diffracted diffraction patterns of the alloy powders of ~ Nο.56 all show a broad spectrum, and it can be seen that the structure is composed of an amorphous phase. The ν〇57 ray diffraction spectrum is a non-broad spectrum. In the smoke, it means that: Visual field electron beam diffraction analysis of the results of the soft magnetic alloy powder No. 57. Therefore, for Fe, Cr, P, c, B, Si, M, MM, the average particle diameter (〇5 °), Density, specific surface area, oxygen concentration, length and width t: the average value is within the scope of the present invention Inside ’can be used to manufacture Japanese articles by the spray method of control, and it is possible to form an amorphous phase soft magnetic field composed of an amorphous phase ... Meng Shimao (No.51, No.53 ~ No.56).

O: \ 86 \ 86694.DOC -62- 1229700 A variety of soft magnetic alloy powders with the composition Fe⑽ + y_z. W-xPySitCzBwMx were observed with a scanning electron microscope (SEM), and their shapes were studied. The results are shown in Table 11. Fig. 11 shows the results of observation of the soft magnetic alloy powder No. 56 by SEM. Fig. 13 shows the results of observation of the soft magnetic alloy powder of No. 57 by TEM. Table 12 shows the average values of the minimum and maximum values of the average particle diameter (Dm), tap density, specific surface area, oxygen concentration, and aspect ratio of the obtained soft magnetic alloy powder. Furthermore, DSC measurement (Differential scanning caloriemetry) was performed on each of the obtained soft magnetic alloy powders, and the glass transition temperature Tg, the crystallization start temperature Tx, the Curie temperature, and the melting point Tm were measured, and the supercooled liquid was obtained The temperature interval △ Τχ and Tg / Tm. These results are shown in Table 12. The temperature increase rate during DSC measurement was 0.067 K / sec. Tm * in Table 12 represents the melting temperature of the alloy. For each of the obtained soft magnetic alloy powders, the saturation magnetization σ s was measured in the same manner as in Experimental Example 丨. These results are summarized in Table 丨 2. Next, except that the soft magnetic alloy powder obtained in Experimental Example 5 was used, granulated powders were produced in the same manner as in Experimental Example 1. Furthermore, using the granulated powders, various powder cores were produced in the same manner as in Experimental Example 1. In addition, the core loss (W) of each of the powder cores measured in the same manner as in Experimental Example 1 was measured. The results are not summarized in Table 12. The effective magnetic permeability (# ') and DC superposition characteristics (/' DC55G ()) of various powder cores obtained in the same manner as in Experimental Example 1 were measured. The results are summarized in Table 12. For comparison, as in Experimental Example 1, the composition of Fe—Cr-Si-B (composition Fe73Cr2Bi5Sii ()), which is a conventionally known conventional alloy powder, was measured. The structure, shape, average particle size (D5G), tap density, specific surface area, oxygen concentration, and minimum and maximum values and average values of powder (No.52). Their results are shown in Table 11 in total. The alloy powder of No. 52 was produced by a water spray method. The microstructure of the alloy powder of No. 52 has an amorphous phase and a crystalline phase.

The saturation magnetization σ s was measured on the alloy powder of No. 5 2 in the same manner as in Experimental Example 1. These results are summarized in Table 12. Except that the alloy powder No. 52 was used, granulated powder was produced in the same manner as in Experimental Example 1 above. Using these granulated powders, a pressed powder core was produced in the same manner as in Experimental Example 1 above, and the effective magnetic permeability of the pressed powder core was measured. (// ') and DC overlap characteristics (//' DC5500). The results are not summarized in Table 12. Table 11

No. Soft magnetic alloy powder group shape 〇50 Tap density Specific surface area Oxygen concentration Aspect ratio Aspect ratio Aspect ratio structure (micron) (Mg / m3) (m2 / g) (ppm) Minimum maximum average 50 Fe74. 43MO1.96P9.O4C2.16 Approximately 9.03 4.07 0.22 1400 1.0 3.4 1.2 Amorphous B7.54 Sl4.87 Spherical 51 Fe76.19V1P9 · 14C2 · 18B7.62 Approximately 8.83 4.03 0.22 1400 1.0 4.1 1.2 Amorphous Sl3.87 Spherical 52 Fe73Cr2Bi5Sii〇 Approximately 8.51 4.13 0.30 1300 1.0 5.8 1.8 Amorphous spherical + crystalline 53 F 674.99C r 1.4P9.04C2.1 βB 7. Approximately 9.21 4.16 0.25 1400 1.0 3.2 1.2 Amorphous 54S14.87 Spherical 54 Fe74.99Cr1.4PsC2.i6B7.54 Roughly 9.09 4.15 0.25 1500 1.0 3.1 1.2 Amorphous Sl4.87 Spherical 55 F e77.〇3Cr 1.4P7C2. ΙβΒ 7.54 Roughly 8.94 4.21 0.25 1400 1.0 3.4 1.2 Amorphous Sl4.87 Spherical 56 Fe74.43crl.96p9.04c2.16B 7.54S14.87 Amorphous 75.00 2.30 0.65 4500 1.0 17.0 5.5 Amorphous 57 Fe74.43crl.96p9.04c2.l6B Approximately 11.08 4.19 0.24 1300 1.0 3.5 1.2 NOT 7.54S14.87 spherical-shaped crystals + Table 12

No. Tc (K) Tg (K) Tx (K) ΔΤχ (Κ) Tm * Tg / Tm Tx / Tm 〇s (Wb.m / kg) W (Kw / m3) 〆β DC5500 50 530 780 825 45 1360 0.57 0.61 175 213 63 33.5 51 620 771 815 44 1345 0.57 0.61 180 215 60 34.0 52 654-842 — 1436 — 0.59 180 1140 58 33.0 53 609 792 841 49 1355 0.58 0.62 172 190 60 33.6 54 618 783 828 45 1360 0.58 0.61 181 180 61 34.5 55 624 773 815 42 1364 0.57 0.6 189 220 59 35.6 56 600 785 828 43 1355 0.58 0.61 171 2200 175 25.0 57 585 786 815 30 1355 0.58 0.6 163 850 58 32.0 It can be seen from the results of Table 11 and Table 12, The soft magnetic alloy powder of No.52 is large O: \ 86 \ 86694.DOC -64- 1229700, and its structure is composed of an amorphous phase (amorphous phase) and a crystalline phase. The core loss of the powder core made of alloy powder is as large as 1000 kW / Cm1 or more. In addition, 'see the SEM photograph of FIG. 11', the soft magnetic alloy powder of No. 56 is amorphous, and from the results of Tables 11 to 12, it can be seen that the core of the pressed powder using the soft magnetic alloy powder of No. 56 Large core loss and poor DC overlap characteristics. As shown in the distribution pattern of the diffraction points of Fig. 9 for the weighted magnetic alloy powder of 4 No. 5 7, a plurality of points corresponding to the crystalline structure can be seen, that is, composed of a non-crystalline phase and a crystalline phase. From the TEM photos in Figure 3, it can be seen that the soft magnetic alloy powder of Xin No. 57 has a non-uniform microstructure, and the crystalline phase and the amorphous phase are mixed. As can be seen from the results in Tables 11 to 12, the core loss of the powder core using the soft magnetic alloy powder of No. 57 was large. Unlike this, the soft magnetic alloy powders of No. 51, 53, 54, and 55 are approximately spherical, and their structure is composed of an amorphous phase (an amorphous phase). (Experimental example 6) The particle size and fluidity of the granulated powder were examined. Households say that liquidity is k + 44.

Below micron, more than 500 microns, -65-1000 microns or less, 300 microns or more to 500, 45 microns or more to 300 microns or less, 45

O: \ 86 \ 86694.DOC 1229700 U-meters to 500 micrometers, used for fluidity test (JIS 25〇2_ 1958) ○ ... if the granulated powder particle size does not reach 45 micrometers, it does not flow, 45 micrometers 44.5 seconds below 150 microns, 50 · 4 shirts below 150 microns and 300 microns below, 618 seconds above 300 microns and 500 microns below, 618 seconds above 500 microns, no flow, 300 above 45 microns It is 45 · 9 seconds below the micron, and 50 · 0 seconds below the 45 micron. Therefore, the particle size of the granulated powder is preferably 45 micrometers or more and 500 micrometers or less, more preferably 45 micrometers or more and 300 micrometers or less, and still more preferably 45 micrometers or more and 150 micrometers or less. (Experimental Example 7) The inclusion (reset%) and fluidity of the granulated powder having a particle diameter of less than 45 m as a whole were examined. The results are shown in FIG. 5. Here, the so-called flowability: when the granulated powder is flowed into a hole having a diameter of 2.5 min, the inclusion amount of the granulated powder with a particle size of less than 45 micrometers, which accounts for 50 g of the whole granulated powder, is changed. second). The granulated powder used here is 98.3% by weight of amorphous soft magnetic alloy powder in a perforated form, 1.4% by weight of polyoxysilane resin as an insulating material, and zinc stearate as a lubricant. .3 weight 0 /. Mix the granulated products. The granulated powder thus produced was classified into particles having a particle size of 45 micrometers or less and 45 micrometers or more and 500 micrometers or less, and used for a fluidity test (JIS 2502-1958). As can be seen from the results shown in FIG. 5, if the inclusion amount of the granulated powder having a particle diameter of less than 45 μm accounts for 17% by weight or less of the entire granulated powder, the fluidity is 60 seconds, and if it is 15% by weight or less, the fluidity It can be less than 50 seconds, and the fluidity is O: \ 86 \ 86694.DOC -66-1229700. (Experimental Example 8) Except for using the soft magnetic alloy powder of No. 23 produced in the above Experimental Example 4 (with a composition of 74 4 (^ 1.96? 9. () 4.2.1667.548 丨 4.87), Granulated powder was produced in the same manner as in Experimental Example 1, and the granulated powder was further used to produce the same powder core as in Experimental Example 1. For comparison, except that Fe powder was used, it was the same as in Experimental Example 1. Production of granulated powder 'Further, using these granulated powders, a pressed powder core (Comparative Example 1) was produced in the same manner as in Experimental Example 1. For comparison, except for the conventional Ni_Fe—Mo (Mo Except for powder of Permalloy, granulated powder was produced in the same manner as in the above-mentioned experimental example, and further, a compressed core was produced using this granulated powder in the same manner as in the above-mentioned experimental example (Comparative Example 2). Except for Si (Sendai iron-silicon-aluminum magnetic alloy), a granulated powder was produced in the same manner as in the above-mentioned Experimental Example 丨, and using this granulated powder, a compacted core was produced in the same manner as in the above-mentioned Experimental Example (Comparative Example 3). Core loss (w) of various powder cores, Relative effective magnetic permeability (/ 〇, DC overlap characteristics (#,). The core loss here is measured at a frequency ⑴ must be 100kHZ and the saturation magnetic flux density (Bm) is 10 ~ 100mH ^. Relative The effective magnetic permeability is a measurement result of the relative effective magnetic permeability (#,) when the frequency is changed in the range of 丨 ~ i00kHz with a relative value. The DC overlap characteristic is a measurement of the current i mA and the frequency is set to 100 The effective magnetic permeability when the magnetic field (Hm) of the DC bias is changed from 0 to 8000 Am ·!

O: \ 86 \ 86694.DOC -67- 1229700 (# ’). The results are shown in FIGS. 14 to 16. When measuring the specific impedance (P) of the various powder cores, the powder core of the experimental example was 307 k Ω .cm, the powder core of the comparative example was 0.5 k Ω.cm, and the powder core of the comparative example 3 It is 1.7 k Ω .cm. From the results in FIG. 14, it can be seen that the powder core of the experimental example using the soft magnetic alloy powder of v.23 and the powder core of Comparative Example 1 using the Fe powder, the powder using Ni—Fe—Mo, and Fe— Compared with the powder of Comparative Example 2 ^^^ 3 of A1-8, the powder core was lower. The magnetic permeability of the core must be better in the frequency range of use. From the results in Figure 5 it can be seen that in the range of 1 kHz to 1000 kHz (1 MHz), a comparative example using Fe powder and Ni — Fe-Mo powder If the frequency of the powder core of 1 to 2 is increased, the effective magnetic permeability is reduced. In contrast, in the powder core of the experimental example using soft magnetic alloy powder No. 23, the effective magnetic permeability is basically constant at a frequency of 1 kHz to 1000 kHz, and in the above frequency range, 'ratio than F e — A1 is used. — The powder core of Comparative Example 3 of S i powder has a high effective magnetic permeability. In addition, when the core is used, it is better to maintain the permeability as constant as possible even if the DC bias magnetic field is increased. However, it can be seen from the results of FIG. 16 that the pressure of Comparative Example 2 using Ni—Fe—Mo powder is smaller. If the magnetic core increases, the effective magnetic permeability decreases sharply, so it is difficult to use. On the other hand, the dust core of the experimental example is the same as the dust cores of Comparative Examples 1 and 3 using Fe powder and Fe—Al—Si powder. Even if the magnetic boundary is increased, the reduction ratio of the effective magnetic permeability is small. With this, the powder core of the experimental example using soft magnetic alloy powder of the present invention: O: \ 86 \ 86694.DOC -68-! 2297〇〇 The core loss is low, and it can show a certain degree of transmission until the frequency is high. Magnetic properties, when used as a core, have stable characteristics and are easy to use. (Experimental Example 9) A granulated powder was produced in the same manner as in Experimental Example 1 except that the approximately spherical soft magnetic alloy powder of v.23 produced in Experimental Example 4 was used. Example 1 The powder core of the experimental example was produced in the same manner as a comparison 'except for the amorphous alloy powder (composition: Fe74.43Cri 96p9 Q4c2 i6B7 54Si4 87) of ν〇 · 56 produced in the above Experimental Example 5 and the same as the above experimental example. 1 A granulated powder was produced in the same manner, and a powder core was produced in the same manner as in Experimental Example 1 using this granulated powder (Comparative Example 4). The core loss (W), the initial effective magnetic permeability (#,), and the DC overlap characteristic (#,) were measured for the pressed powder cores of the manufactured experimental example and comparative example 4. The core loss here is the core loss when the saturation magnetic flux density (Bm) is 0.1 T, and the frequency (f) is changed in the range of 10 to 200 kHz. The initial effective magnetic permeability is the effective magnetic permeability (//,) when the measurement frequency is changed in the range of i to 1000 kHz. The DC superposition characteristic is the effective magnetic permeability (#f) when the measurement current is 1 mA, the frequency (f) is set to 100 kHz, and the DC bias magnetic field (Hm) is changed in the range of 0 to 800,000 Am]. The results are shown in FIGS. 17 to 19. The measurement results of the density (D) of the dust cores of the experimental example and comparative example 4 are shown in FIG. 20. It can be seen from the results in FIG. 17 that the soft magnetic core using the spherical shape of No. 23 soft magnetic powder is used to test the powder core of the conventional example. The frequency ranges from 10 to 200 kHz.

O: \ 86 \ 86694.DOC -69-1229700, compared with the powder core of the experimental example using a soft magnetic alloy powder of No. 56 having an irregular shape, the powder core is lower. The magnetic permeability of the above-mentioned core is preferably constant in the frequency range of use. However, it can be seen from the results in FIG. 18 that in the range of 1 kHz to 1000 kHz, the powder core of Comparative Example 4 has an initial effective magnetic permeability as the frequency increases. The reduction ratio increases. On the other hand, the dust core of the experimental example has a substantially constant initial effective magnetic permeability in the above-mentioned frequency range, and it is easy to use it as a core. From the results of Fig. 19, it can be seen that if the applied magnetic boundary of the core of Comparative Example 4 increases, the effective magnetic permeability decreases sharply. On the other hand, the powder core of the experimental example has a small percentage reduction in initial effective magnetic permeability even when a large magnetic field is applied. When the initial effective magnetic permeability is higher than 2500 Am-1, the initial effective magnetic permeability increases compared to Comparative Example 4. . It can be seen from the results of FIG. 20 that the density of the powder core of Comparative Example 4 is about 5.5 g / cm3, and the density of the powder core of the Experimental Example is about 6 g / cm3, which is larger than that of Comparative Example 4. . From this, it can be seen that the powder cores of the experimental example and comparative example 4 use soft magnetic alloy powders with the same composition. Due to the different shapes of the alloy powders, the above characteristics are different. Therefore, the core loss using the soft magnetic alloy powders that are approximately spherical is low until The frequency of 1000 kHz shows a certain permeability. When used as a core, the characteristics are stable and easy to use. (Experimental Example 10) The substantially spherical soft magnetic alloy powder of No. 23 produced in the above Experimental Example 4 was put into Atleta, and 12 O: \ 86 \ 86694 were crushed and mixed with Atleta dial 4 .DOC -70- 1229700 — Flat type soft magnetic alloy powder for ικ test. The flat amorphous soft magnetic alloy powder of the experimental example manufactured here has a thickness of about 0.3 to 1 micrometer 'and a length of about 10 to 7 ^ kezhi々々㈤ ^ ^, and the government is not yet dry. Fig. 21 shows the results of observing the flat-type soft magnetic alloy powder of the experimental example of w production by SEM. From the figure, the soft magnetic alloy powder, which can be roughly spherical, is flattened, has a shape close to a disk, and has a uniform size. Next, a polysilicone elastomer M, which is a material of insulation and a binder, 45 weights with respect to 45 weights of the flat-type soft magnetic alloy powder of the experimental example was formed into a sheet shape, and an electromagnetic wave absorber of the experimental example was manufactured. For comparison, the amorphous soft magnetic alloy powder of No.% produced in the above Experimental Example 5 was injected into the Atleta towel, and the Atleta dial 10 was pulverized and mixed for 16 hours to produce a flattened sheet of the Comparative Example. Soft magnetic alloy powder. The flat soft magnetic alloy powder of the comparative example produced was classified into particles having a particle size of 0 to 106 m. Fig. 22 shows the results of observing the flat-type soft magnetic alloy powder of the comparative example by SEM. As can be seen from Fig. 22, the soft magnetic alloy powder of No. 56 having an irregular shape is flattened, thinned, and the size is not uniform. Next, a polysiloxane elastomer M as a material for insulation and a binder was mixed with 45% by weight of the flat-type soft magnetic alloy powder of the comparative example of classification, and the curing was formed into a sheet to produce electromagnetic wave absorption of the comparative example. body. The electromagnetic wave absorbers manufactured in the experimental examples and comparative examples were measured for the effective magnetic permeability (/ z,) and imaginary magnetic permeability (/ '') when the frequency was changed in the range of i MHz to 1000 MHz. The results are shown in Fig. 23. From the results in FIG. 23, it can be seen that the electromagnetic wave absorber of the experimental example using the substantially spherical soft magnetic alloy flattened powder of No. 23 is 2 μηζ O: \ 86 \ 86694.DOC -71-1229700 ~ In the range of 1000 MHz, compared with the electromagnetic wave absorber of the comparative example using a powder obtained by flattening No. 56 amorphous soft magnetic alloy powder, the effective magnetic permeability is higher and the electromagnetic wave absorber of the conventional example is at 7 MHz. In the range of ~ 100MHz, compared with the electromagnetic wave absorber of the comparative example, the imaginary number magnetic permeability is improved, and the electromagnetic wave suppression effect is excellent. Especially above 20 MHz, it can obtain / Z ”above 15 (maximum ι8) The amorphous soft magnetic alloy powder of the present invention described in detail above has both high saturation magnetization and low core loss, and the amorphous soft magnetic alloy powder of the present invention can be manufactured by a water spray method, so the manufacturing apparatus can be It can be increased in size, and the molten alloy can be pulverized by high-pressure water to improve mass productivity, and the production cost can be reduced even if no expensive inert gas is used. This type of amorphous soft magnetic alloy powder It is formed in a crystalline spherical shape by the water spray method, so it has the advantages of high bulk density and less unevenness on the surface. [Simplified illustration of the drawing] Fig. 1 shows an example of a high-pressure nozzle device for manufacturing amorphous soft magnetic alloy powder according to the present invention. A schematic cross-sectional view. Fig. 2 is a perspective view of a first embodiment of the powder core of the present invention. Fig. 3 is an exploded perspective view of an example of a mold for manufacturing a powder core of the present invention. The schematic diagram of the key parts of the slurry sintering device. Figure 5 shows the relationship between the inclusion amount and fluidity of the granulated powder with a particle size of less than 45 microns. Figure 6 is a perspective view of another embodiment of the powder core of the present invention. Figure 7 O: \ 86 \ 86694.DOC -72- 1229700 Fig. 8 is a diagram showing the results of electron beam diffraction of soft magnetic alloy powder No. · 23. Fig. 9 shows Fig. 10 is an electron diffraction result of the soft magnetic alloy powder. Fig. 10 is a SEM photograph of the soft magnetic alloy powder of No. 23. Fig. 11 is a SEM photograph of the soft magnetic alloy powder of No. 56. Fig. 12 It is a TEM photograph of a soft magnetic alloy powder of No. 23. Fig. 13 is a TEM photograph of a soft magnetic alloy powder of No. 57. Fig. 14 shows a core loss measurement result of the powder core of the experimental example and comparative examples 1 to 3. Fig. 15 is a graph showing the measurement results of the relative effective permeability of the powder cores of the experimental examples and comparative examples 1 to 3. Fig. 16 is a graph showing the measurement results of the DC overlap characteristics of the powder cores of the inspection examples and comparative examples 1 to 3. Fig. 17 Figures showing the core loss measurement results of the pressed powder cores of the Comparative Example and Comparative Example 4. Figure 18 shows the results of the initial effective magnetic permeability measurement results of the powder cores of the Experimental Example and Comparative Example 4. Figure 19 shows the comparison examples and Comparison A graph of measurement results of DC superimposition characteristics of the powder core of Example 4. FIG. 20 is a graph showing the results of measuring the density of the dust cores of the experimental example and the comparative example 4. FIG. 21 is a SEm photograph of a flat-type soft magnetic alloy powder according to an experimental example. 22 is a SEM photograph of a flat-type soft magnetic alloy powder according to a comparative example. FIG. 23 is a schematic diagram showing the frequency dependence of the effective magnetic permeability O: \ 86 \ 86694.DOC -73-1229700 and the imaginary magnetic permeability of the electromagnetic wave absorbers of the experimental example and the comparative example. [Illustration of representative symbols in the figure] 1 Pressurized water spraying device 2 Melt liquid slump 3 Water sprayer 4 Reaction chamber 5 Alloy molten liquid 6 Melt liquid nozzle 7 Introduction channel 8 Water spray nozzle 10 High-pressure water 21, 31, 41 Powder core g High-pressure water flow P Spray point Θ Water spray angle OA86 \ 86694.DOC -74-

Claims (1)

I229f ^ 22125 applied for the patent scope of Huiqing 3, and applied for a patent ^ belongs to ^ lotus soil an amorphous soft magnetic alloy powder, 1Λ ^, Jf ^ Feng is formed into a roughly spherical shape by water spray method The powder is characterized by the temperature interval of the supercooled liquid represented by Fe Yang as the main component, containing at least P, C, and B, and represented by the formula Δx ~ Tx ~ Tg (where Tx is the material transfer temperature). △ ^ is an amorphous phase structure avoiding the above; it is represented by the following composition formula: 'Fei〇〇.xyzwtMxPyCzBwSit where M is selected from Cr, Mo, w, v, Can, ^, &, One or more of Hf, Pt, Pd, and Au, or two or more elements representing a composition ratio, and ^ are ⑷ atoms and 仏 ⑸ atoms. /. ^, Child atomic%, 0 atomic% $ zS8 atomic%, i atomic $ 12 atomic%, 8 atomic% to 8 atomic%, 70 atomic 仏 _— 乂 —y—z—w—t) s 79 atoms 〇 / 〇. For example, the amorphous soft magnetic alloy powder according to item 1 of the patent application range, wherein the aspect ratio of the above-mentioned substantially spherical powder is i or more and 3 or less on average. 4. If an application is made for the amorphous soft magnetic alloy powder of item 1 above, the average particle diameter (D5Q) of the above-mentioned approximately spherical powder is 45 micrometers or less. For example, the amorphous soft magnetic alloy powder of item i of the color circle | color enclosure, wherein the tap density of the above-mentioned substantially spherical powder is 3.7 Mg / m3 or more. For example, the amorphous soft magnetic alloy powder of item i in the patent, wherein the oxygen concentration of the above-mentioned substantially spherical powder is below "⑼ 卯 ㈤". For example, the amorphous soft magnetic alloy powder of the item i in the patent scope, wherein the above-mentioned substantially spherical shape The specific surface area of the powder is below 0.30m2 / g. 6. 1229700 7. The amorphous soft magnetic alloy powder according to item 1 of the patent application scope, wherein the average particle diameter (D5q) of the above-mentioned substantially spherical powder is greater than 4 microns And after the penetration below 45 microns, the degree is above 3.7 Mg / m3, the specific surface area is below 0.3 m2 / g, and the degree of oxygen is below 3000 ppj ^ 8. As the amorphous soft magnetic field of the patent application No. 丨Alloy powder, wherein the above-mentioned approximately spherical powder has an average particle diameter (D5g) of more than 4 microns and less than 16 microns, a penetrating male degree, a degree of 4.0 · Mg / m3 or more, and a specific surface area of 0.23 m2 / g or less The oxygen concentration is less than 2000 ppm. 9. As in the amorphous soft magnetic alloy powder of item i in the scope of the patent application, the composition ratio y, z, w, and t in the above composition formula are required to satisfy 7 atoms. (乂 + z + w + t) ^ 29.5 atomic%. 1 〇 · As applied The amorphous soft magnetic alloy powder according to the first item of the invention, wherein the composition ratio χ, y, Z, W, and t in the above composition formula satisfy 1 atom. ^ Χ $ 4 atomic%, 4 atomic% ^} ^ 14 atomic% 〇atomic% ^ 2 ^ 6atomic%, 2atomic% $ 10atomic%, 2atomic% $ 1 $ 8atomic. ^ Atomic% $ (100 — x_y_z_w_t) g 79atomic%. 11. If applying for a patent The amorphous soft magnetic alloy powder in the range i, in which the composition ratios x, y, z, w, and t in the above composition formula satisfy a thorium atom X $ 3 atomic%, 6 atomic% $ ^^ 11 atomic%, 1 Atomic% ^ 2 $ 4 Atomic%, 4 Atomic% $ ~ $ 9 Atomic%, 2 Atomic% $ 1 $ 7 Atomic 73 Atom 0 / $ (100—X—y—z—w — 78 Atomic%.-12. — A flat amorphous soft magnetic alloy powder, which is characterized by flattening an amorphous soft magnetic alloy such as any one of the UU in the patent application scope. O: \ 86 \ 86694-931229.DOC -2 -1229700 1 3. A pressed powder core, characterized in that it comprises a granulated powder, which is composed of a mixture of a plurality of types or an amorphous soft magnetic material as in any one of claims 1 to 11 Gold powder, insulating material and lubricant, and granulated, the above-mentioned insulating material is formed by curing and curing as a binder. 14. · For example, the powder core of item 3 of the patent application scope, in which the particle size is 45 The content of granulated powder from micron to 500 microns is greater than 83% by weight of the entire granulated powder. For example, the powder core of item 13 of the patent application scope, wherein the granulated powder with a particle size of less than ^ microns and the particle size exceeds 500. The content of the micron-sized granulated powder is 17% by weight or less of the entire granulated powder. 16 .: An electromagnetic wave absorber 'characterized by mixing an amorphous soft magnetic alloy powder as described in any one of claims 1 to 11 or a flat amorphous soft magnetic alloy powder as described in claim U Made with ^ edge material. O: \ 86 \ 86694-931229.DOC 3- 1229700 Case No. 092122pM Tiger Patent Case No. 1 51 Figure, 7