1228101 玖、發明說明： 【發明所屬之技術領域】 本發明係關於一種微泵，尤指一種應用磁流體 或磁變流體的微泵。 【先前技術】 允利用微機電系統（MEMS)技術所製成的微流體 才工制元件由於具有體積小、流量控制精準與反應時 間迅速等特性，且復可與習知微感測器整合於同一 系、、先上進行回授控制，進而可進行大量批次製造， 故而已逐漸成為產業上最具價值與運用廣泛的研 珂仿文流 &制元件中的微泵（Micro Pump)元 5:言，由於其相關技術發展已漸臻成熟，故已被 里運用於化學分析、生物醫學或微型冷卻空調系 =領域上，目前習知上多係採用如第 “ 之果80,以利用兩薄膜狀的 81 作為外界工作流體進出該微_的入口 82 二出口 83,並以此進行流向控制，惟此 長期使用後，該閥件與動件將 可靠声，i a -r π 丁竹U β禎而日漸降低其 :度甚而可此於該閥件連接端出現材料疲勞 (Fatigue)現象，且該閥件 力之指生a狄μ * ^亦可能導致流體壓 力之知失，而降低其驅動流量 之污染問題。 — 級體倒流 以壓電材料為驅動源之無 因此，習知上復提出 1228101 閥式微泵85，其係如第12A、12B圖所示，以—壓 電材料所製成的Μ電片86作為該工作流體之驅^ ，，而藉電壓控制該壓電片86之變形，進而可如 第12Α圖所示驅動外界工作流體進入該微泵以 中，或如第12Β圖所示將該微泵85中之工作流體 排放輸出至外界；此設計雖可避免前述各閥件與動 件所致之問題，惟該壓電片86之變形量受限於其 材料丨生貝，最大僅能產生約1 μιη的變形，而使其 輸出流量亦有一定之限制（最大僅約2.3ml/min) 了 難付商業之所需’ @時’該設計亦可能於該微泵 Μ運作時出現倒流現象，而降低其卫作流體驅動 效率，並導致該工作流體之污染。 取新式的設計係利用一鐵磁流體（Ferr〇fluidic Magnetic)驅動微泵中之工作流體，以達至較高的 驅動效率與流量，其係如第13 @所示設計成-圓 形封閉管路90,並於該管路9〇中充填入工作流體 91與：段鐵磁流體92’且該管路9〇上係分別形成 有與外界連通的入口 93與出口 94,复中，该入口 93與出口 94間係配置有一固定磁鐵仏而料路 :〇内緣則係配置一繞該管路9〇移動的移動磁鐵 ^以令該鐵磁流體92受該移動磁鐵％之驅動而 於邊官路90内移動，並藉該固定磁鐵％使該管路 ?之入口 93與出口 94間形成-闕門，而可如圖 式之操作順序，將該工作流體91自該入口 ％驅動 1228101 至該出口 94排出，完成泵浦之循環；惟此一設計 僅考慮該工作流體91之驅動效率，卻未顧及該工 作流體91與該鐵磁流體92相互混合之嚴重污染問 題’特別係對用於化學分析或生醫系統等領域之微 泵而言’其所驅動之工作流體往往有極高的純淨度 要求’若使用此n則其排放之卫作流體91 顯然無法達至此一要求，且如操作時間愈長則污染 將愈形嚴重。 【發明内容】 因此，本發明之一目的即在於提供一種可定流 量控制，減少或消除流體倒流的應用磁流體或磁變 流體之微泵。 曰、，本叙明之次一目的在於提供一種使薄膜變形 i i曰大作用頻率較傳統微泵提升的應用磁流體或 磁變流體之微泵。 ^本發明之再一目的在於提供一種組合多數個 微泵可以增大流量的應用磁流體或磁變流體之微 泵。 Λ 本發明之又一目的在於提供一種以磁流體為 工作流體，微泵外型不受限制的應用磁流體或磁變 流體之微泵。 本發明之且另一目的在於提供一種可組合複 數個微泵作為流體切換器的應用磁流體或磁變流 1228101 體之微泵。 為達前述及其他目的，本發明所提供之應用磁 流體或磁變流體之微泵，係用以驅動一工作流體， 並包括至少一微泵元件，且每一微泵元件係包括： 具有一容置空間與至少一可連通至該容置空間之 開口的本體；形成於該本體之容置空間中的薄膜， 以將該容置空間區隔成一第一空間與一第二空 間，並令該至少一開口連通至該第二空間，且該第 二空間中係充填有該工作流體；充填於該第一空間 中的磁流體（Ferro-Fluid)/磁變流體（Magneto-Rheological Fluid) ; 以及一 磁場產 生單元 ，係 用以 對該容置空間施加磁場’以錯該磁流體/磁變流體 而使該薄膜產生連續變形，進而驅動該工作流體進 出該開口。 本發明所提供之微泵的另一微泵元件，係包 括：具有一容置空間與至少一可連通至該容置空間 之開口的本體，且該容置空間中係充填有該工作流 體；至少二磁流體/磁變流體早元’係分別位列於 該容置空間之相對兩侧；以及用以驅動該至少二磁 流體/磁變流體早元的磁場產生早元’以令該磁流 體/磁變流體單元產生連續地相對位移，進而驅動 該工作流體進出該開口。 前述之磁流體/磁變流體單元係為一不與該工 作流體互溶的磁流體/磁變流體，或為一以薄膜包 1228101 覆成形的磁流體/磁變流體，其係具有約10 nm大 小之鐵或氧化鐵微粒，以在受外加磁場後令磁化方 向相同之磁性微粒相互吸引，進而使該磁流體/磁 變流體於數毫秒内即相變化成一固體，反之，當磁 場移除後，該磁性微粒將恢復碰撞而均勻分佈於該 磁流體/磁變流體中，進而使該固化之磁流體/磁變 脰又迅速回復成液態。 因此’當該磁流體/磁變流體受磁場磁化而轉 變成固體時，該磁性固體將可受磁場之吸引而產生 變形或位移，進而可藉該變形或位移而驅動該工作 流體進出該微泵之本體，發揮泵浦功能。 此外，前述之本體上係形成有兩開口，分別為 該工作流體流入該容置空間之入口與流出該容置 空間之出口，其係均由一擴散器與一喷嘴所組成， 同時，該開口上復設置有一開口控制元件，以於該 工作抓體欲流出該出口時開放該出口而關閉該入 口，於該工作流體欲流入該入口時開放該入口而關 閉該出口，此一開口控制元件係包括另一可受磁場 驅動而位移的磁流體/磁變流體，以藉磁場對該磁 流體/磁變流體之位移作定流量控制而關閉該入口 與出口 ’以避免工作&體發生倒流現象，目時復可 提升該工作流體之驅動效率。 因此，本發明之應用磁流體或磁變流體之微 泵’即係利用磁流體/磁變流體於受磁固化後可被 1228101 磁場吸引之特性，而利用該磁流體/磁變流體作為 工作流體之驅動源，進而藉該磁流體/磁變流體之 交形或位移而控制該工作流體之輸入與輸出，當組 合多數個微泵時，俾使其輸出流量增大，同時^可 藉該磁流體/磁變流體所組成之開口控制元件，控 制一定流量並避免倒流之發生。 工 【實施方式】 以下係藉由特定的具體實例說明本發明之實 施f式，熟悉此技藝之人士可由本說明書所揭示二 内容，易地瞭解本發明之其他優點與功效。本發明 ，可猎由其他不同的具體實例加以施行或應用，本 況明書中的各項細節亦可基於不同觀點與應用，在 不雔本發明之精神下進行各種修飾與變更。 本务明之應用磁流體或磁變流體之微泵係以 微,電製程所製作，係包括單一或多數個組合而成 枝泵元件，其中，第1圖所示即為僅具有單一微 泵元件1的本發明第一實施例側視圖，包括一矽基 板本體，該矽基板本體係由一第一本體1〇與一第 本體15所組成，該兩本體1〇、15間係藉其凹部 :形成有一容置空間20，並藉其接合間隙:形成 兩開〇，該兩開口係為分別位列於該容置空間 川^相對側的工作流體入口 21與出口 22,同時， 忒谷置空間20内係形成有一 pDMs 1228101 (Polydimethylisiloxane)薄膜 3〇，該 PDMS 薄膜 3〇 係位於該入口 2 1與出口 22之上方，以將該容置空 間20區隔成一第一空間25與第二空間26，並令 该入口 21與出口 22成為該第二空間26至外界之 連通口，俾使該第二空間26成為外界工作流體流 入或流出該微果元件1之流道。 該第一空間25中係充填有一磁流體（Ferr〇_1228101 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a micropump, especially a micropump using a magnetic fluid or a magnetically variable fluid. [Previous technology] Microfluidic industrial components made using micro-electromechanical systems (MEMS) technology are small in size, accurate in flow control and fast in response time, and can be integrated with conventional micro-sensors. In the same system, the feedback control is performed first, and then a large number of batches can be manufactured. Therefore, it has gradually become the most valuable and widely used micro-pump (Micro Pump) element in the imitated flow & 5: Since the development of related technologies has gradually matured, it has been used in chemical analysis, biomedicine, or micro-cooling air-conditioning systems. It is currently widely used in many systems, such as Article 80 Two thin film 81 are used as the inlet and outlet of the micro_82 for the external working fluid, and the second outlet 83 is used to control the flow direction. However, after long-term use, the valve and moving parts will reliably sound, ia -r π 丁 竹 U β 祯 and gradually reduce it: the degree can even cause the phenomenon of material fatigue (Fatigue) phenomenon at the connecting end of the valve, and the force of the valve force a di μ * ^ may also lead to the loss of knowledge of the fluid pressure, and reduce its Driving traffic pollution Problem. — The back flow of the stage body uses piezoelectric material as the driving source. Therefore, it is known that the 1228101 valve-type micropump 85 is proposed, which is shown in Figures 12A and 12B. The sheet 86 serves as a driving force for the working fluid, and the deformation of the piezoelectric sheet 86 is controlled by voltage, and then the external working fluid can be driven into the micropump as shown in FIG. 12A, or as shown in FIG. 12B. The working fluid in the micro-pump 85 is discharged to the outside. Although this design can avoid the problems caused by the aforementioned valves and moving parts, the deformation of the piezoelectric plate 86 is limited by its material. Deformation of about 1 μιη, and its output flow has a certain limit (maximum only about 2.3ml / min). It is difficult to pay for commercial needs. '@ 时' The design may also occur when the micropump M operates. Phenomenon, which reduces the driving efficiency of its working fluid and leads to contamination of the working fluid. A new design is to use a ferrofluid (Ferrofluidic Magnetic) to drive the working fluid in the micropump to achieve a higher drive. Efficiency and flow, as described in Article 13 @ 所The design is a circular closed pipeline 90, and the pipeline 90 is filled with working fluid 91 and a section of ferrofluid 92 ', and the pipeline 93 is formed with an inlet 93 and an external communication port, respectively. At the exit 94, the middle, the entrance 93 and the exit 94 are provided with a fixed magnet. The material path is: the inner edge is provided with a moving magnet moving around the pipeline 90, so that the ferrofluid 92 is subject to the Driven by the moving magnet% to move within the Bianguan Road 90, and the fixed magnet% is used to form a 阙 -gate between the inlet 93 and the outlet 94 of the pipeline, and the working fluid can be operated as shown in the figure. 91 drives 1228101 from the inlet% to discharge from the outlet 94, completing the pumping cycle; however, this design only considers the driving efficiency of the working fluid 91, but does not take into account the serious mixing of the working fluid 91 and the ferrofluid 92 The “pollution problem” is particularly for micropumps used in the fields of chemical analysis or biomedical systems. “The working fluid driven by them often has extremely high purity requirements.” If this n is used, the discharged sanitary fluid 91 is obvious. Unable to meet this requirement, and such as operating time The longer the pollution becomes, the more serious it becomes. [Summary of the Invention] Therefore, an object of the present invention is to provide a micro-pump using a magnetic fluid or a magneto-variable fluid that can control the flow rate and reduce or eliminate fluid backflow. That is, the second purpose of this description is to provide a micropump that uses a magnetic fluid or a magnetofluid fluid to deform a thin film. ^ Another object of the present invention is to provide a micropump using a magnetic fluid or a magnetically variable fluid which can increase the flow rate by combining a plurality of micropumps. Λ Another object of the present invention is to provide a micropump that uses a magnetic fluid as a working fluid and has an unrestricted shape of a micropump that uses a magnetic fluid or a magnetically variable fluid. Another object of the present invention is to provide a micropump that can be used in combination with a plurality of micropumps as a fluid switch to apply magnetic fluid or magnetically variable current 1228101. In order to achieve the foregoing and other objectives, the present invention provides a micropump using a magnetic fluid or a magnetically variable fluid, which is used to drive a working fluid and includes at least one micropump element, and each micropump element system includes: The accommodating space and at least one opening body that can communicate with the accommodating space; a film formed in the accommodating space of the body to separate the accommodating space into a first space and a second space, and make The at least one opening communicates with the second space, and the second space is filled with the working fluid; the magnetic fluid (Ferro-Fluid) / Magneto-Rheological Fluid filled in the first space; And a magnetic field generating unit is used to apply a magnetic field to the accommodating space to cause the magnetic fluid / magneto-fluidic fluid to continuously deform the film, thereby driving the working fluid into and out of the opening. Another micropump element of the micropump provided by the present invention includes: a body having a containing space and at least one opening which can be communicated to the containing space, and the containing space is filled with the working fluid; At least two magnetofluidic / magnetofluidic fluid early elements' are respectively located on opposite sides of the accommodating space; and a magnetic field used to drive the at least two magnetofluidic / magnetofluidic fluid early elements generates an early element to make the magnetism The fluid / magneto-fluidic unit generates a continuous relative displacement, which in turn drives the working fluid into and out of the opening. The aforementioned magnetic fluid / magneto-fluid unit is a magnetic fluid / magneto-fluid that is not mutually soluble with the working fluid, or a magnetic fluid / magneto-fluid that is formed by coating with a thin film package 1228101, and has a size of about 10 nm. The iron or iron oxide particles attract magnetic particles with the same magnetization direction to each other after being subjected to an external magnetic field, thereby causing the magnetic fluid / magnetic fluid to change phase into a solid within a few milliseconds. Conversely, when the magnetic field is removed, The magnetic particles will recover and collide and be uniformly distributed in the magnetic fluid / magnetically variable fluid, so that the solidified magnetic fluid / magnetically variable fluid will quickly return to the liquid state. Therefore, when the magnetic fluid / magneto-fluid is transformed into a solid by the magnetization of the magnetic field, the magnetic solid can be deformed or displaced by the magnetic field, and the working fluid can be driven into and out of the micropump by the deformation or displacement. The body itself exerts a pumping function. In addition, the aforementioned body is formed with two openings, which are an inlet of the working fluid into the accommodating space and an outlet of the accommodating space, which are each composed of a diffuser and a nozzle. At the same time, the opening An opening control element is arranged on the upper part to open the outlet and close the inlet when the working grasping body wants to flow out of the outlet, and open the inlet to close the outlet when the working fluid wants to flow into the inlet. The opening control element is Including another magnetic fluid / magneto-fluid that can be displaced by the driving of a magnetic field, to close the inlet and outlet by using a magnetic field to control the displacement of the magnetic fluid / magneto-fluid, to avoid working & backflow It can improve the driving efficiency of the working fluid. Therefore, the micropump using the magnetic fluid or the magneto-fluid fluid according to the present invention uses the characteristic that the magneto-fluid / magneto-fluid can be attracted by the magnetic field of 1228101 after being magnetically solidified, and the magneto-fluid / magneto-fluid is used as the working fluid. Drive source, and then control the input and output of the working fluid by the intersection or displacement of the magnetic fluid / magneto-fluidic fluid. When a plurality of micropumps are combined, the output flow is increased, and at the same time, the magnetic fluid can be borrowed. The opening control element composed of fluid / magneto-fluidic fluid controls a certain flow rate and avoids backflow. [Embodiment] The following is a description of the implementation formula f of the present invention through specific specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can be implemented or applied by other different specific examples, and various details in the present specification can also be modified and changed without departing from the spirit of the present invention based on different viewpoints and applications. The micropumps using magnetic fluids or magnetically variable fluids are produced by micro-electric process, including single or multiple combination of branch pump elements. Among them, Figure 1 shows only a single micro-pump element. 1 is a side view of a first embodiment of the present invention, including a silicon substrate body. The silicon substrate system is composed of a first body 10 and a first body 15. The two bodies 10 and 15 are connected by their recesses: An accommodating space 20 is formed, and a joint gap is formed by the two openings. The two openings are working fluid inlets 21 and 22 respectively located on opposite sides of the accommodating space, and at the same time, Kariya space A pDMs 1228101 (Polydimethylisiloxane) film 30 is formed in the system 20. The PDMS film 30 is located above the inlet 21 and the outlet 22 to separate the accommodation space 20 into a first space 25 and a second space 26. In addition, the inlet 21 and the outlet 22 are used as communication ports between the second space 26 and the outside, so that the second space 26 becomes a flow path for external working fluid to flow into or out of the micro-fruit element 1. The first space 25 is filled with a magnetic fluid (Ferr0_
Fluid)/磁變流體（Magnet〇-Rhe〇l0gical Fluid) 40, 該磁流體/磁變流體40係具備鐵或氧化鐵等奈米粉 粒，而可於受磁場磁化時因其鐵磁性微粒而於瞬間 由液體轉變為固體；此外，該第二本體1 5中係配 置有一例如電磁鐵開關50之磁場產生單元，該電 磁鐵開關50係可依一預定頻率而以一正負電壓對 该谷置空間2 0連績地施加正反向之磁場。 前述之PDMS薄膜30亦可選用其他矽酮類 (Silicone)材質，例如選用一 ρΜρ§ (Polymethylphenylsiloxane)薄 膜 、 PDPS (Polydiphenylsiloxane)薄膜或其他 p〇ly (dimethyIisil〇xane)-CO-poly(diphenylsil〇xane)共聚 合物等，而包括聚丙烯（PP polypropylene )與聚乙 烯（PE polyethylene)在内的其他高分子材料，亦可 用以‘成遺薄膜’其厚度約為2 5 μηι左右，且均具 有極佳之伸縮性；本實施例中亦非僅限於以該電磁 鐵開關5 0來產生正反向之磁場，其他可依預定頻 π 1228101 率產生磁場並驅動該磁流體/磁變流體40的磁場產 生單凡亦同樣可配置於該第二本體15中；此外， 該第一本體1〇與第二本體15之接合間隙所形成的 入口 2 1與出口 22係依微機電製程而分別設計成一 擴散器23與噴嘴24，以代替習知微泵之閥門 (VaWe)，該擴散器23與喷嘴24上復可配置一開口 控制兀件（未圖示），以配合該電磁鐵開關5〇之操 作而適時開放或關閉該入口 21或出口 22，達到可 疋肌畺控制’減少或消除流體倒流的目的與功效， 其細部設計與運作將於後詳述。 口此别述弟一貫施例之微栗即係利用該第一 空間25中之磁流體/磁變流體4〇為驅動源，以驅 動工作流體輸入該第二空間26或自該第二空間％ 輸出，其運作流程係先啟動該電磁鐵開關5〇，以 對該本體之容置空間20連續地施加正反向磁場， 俾使該第一空間25中的磁流體/磁變流體切連續 地冗到不同磁場方向的磁化，並於受到磁化時令該 磁流體/磁變流體40中磁化方向相同之微粒相互吸 引，而使該磁流體/磁變流體4〇如第2A圖所示瞬 間形成固體’再於其消磁時令該微粒受磁流體/磁 變流體分子之碰撞而進行布朗運動，進而均勻分佈Fluid) / Magneto-Rhe〇l0gical Fluid 40. This magnetic fluid / magneto-fluid 40 is equipped with nano particles such as iron or iron oxide. Instantly changes from a liquid to a solid; In addition, the second body 15 is provided with a magnetic field generating unit such as an electromagnet switch 50, and the electromagnet switch 50 can set the valley space with a positive and negative voltage according to a predetermined frequency. 20 successive application of a forward and reverse magnetic field. The aforementioned PDMS film 30 may also be made of other silicone materials, such as a ρΜρ§ (Polymethylphenylsiloxane) film, a PDPS (Polydiphenylsiloxane) film, or other poly (dimethyIisil〇xane) -CO-poly (diphenylsil〇xane) ) Copolymers, and other polymer materials, including polypropylene (PP polypropylene) and polyethylene (PE polyethylene), can also be used as 'formation film' with a thickness of about 2 5 μηι, and all have extremely This embodiment is not limited to the use of the electromagnet switch 50 to generate a forward and reverse magnetic field. Others can generate a magnetic field at a predetermined frequency π 1228101 and drive the magnetic field of the magnetic fluid / magneto-fluid 40. The generated Shanfan can also be arranged in the second body 15; in addition, the inlet 21 and the outlet 22 formed by the joint gap between the first body 10 and the second body 15 are respectively designed as a diffusion according to the micro-electromechanical process. Device 23 and nozzle 24, instead of the conventional micro pump valve (VaWe), the diffuser 23 and nozzle 24 can be equipped with an opening control element (not shown) to cooperate with the electromagnet switch 5 The operation and timely open or close the inlet 21 or outlet 22, to be controlled Cloth muscle Jiang 'reducing or eliminating reverse flow purposes and effects, which will be detailed design and operation described in detail later. In this case, the micro-pump that has been consistently described is to use the magnetic fluid / magnetic fluid 40 in the first space 25 as a driving source to drive the working fluid into the second space 26 or from the second space. The output, its operation flow is to first activate the electromagnet switch 50 to continuously apply a positive and negative magnetic field to the accommodation space 20 of the body, so that the magnetic fluid / magnetofluid in the first space 25 is continuously cut. Redundant magnetization in different magnetic field directions, and when subjected to magnetization, the particles with the same magnetization direction in the magnetic fluid / magnetic fluid 40 attract each other, so that the magnetic fluid / magnetic fluid 40 is formed instantaneously as shown in FIG. 2A When the solid is demagnetized, the particles are subjected to Brownian motion due to the collision of the magnetic fluid / magneto-fluidic molecules, so that they are evenly distributed.
而如第2B圖所不形成液體，·因此，當該磁流體/ 磁變流體4〇受磁化而形成固體時，該磁性固體40 將受該電磁鐵開關50之磁力吸引而壓迫該pDMS 12 1228101As shown in FIG. 2B, no liquid is formed. Therefore, when the magnetic fluid / magnetic fluid 40 is magnetized to form a solid, the magnetic solid 40 will be attracted by the magnetic force of the electromagnet switch 50 and compress the pDMS 12 1228101.
薄膜30，使該薄膜30變形，進而如第3a圖 C縮忒弟—空間26，俾使自該入口 2工、出口 ^ 輸出該第二空間26的工作流體多於輸入該第二空 間26的工作流體，此時該微泵即進行泵浦模弋 (Pump Mode)運作，反之，當該電磁鐵開關5〇受^ 反向電壓而對該容置空間20施加一反向磁場又該 磁性固體將於毫秒間回復至磁流體/磁變流體復再 成=為磁性固體40,並因其相反之磁化方向而與 该電磁鐵開關50相斥，俾使該PDMS薄膜3〇反向 變形而壓縮該第一空間25，並如第3B圖所示使^ 填有该工作流體的第二空間26變大，此時，自兮 入口 21、出口 22輸入該第二空間26的工作流體 將多於輸出該第二空間26的工作流體，而令該微 泵進行供應模式（Supply M〇de)運作，而完成一個 完整的泵浦循環，並發揮驅動工作流體之功效。 該電磁鐵開關50之切換頻率可高達1〇〇〇Hz以The thin film 30 deforms the thin film 30, and further shrinks the brother-space 26 as shown in FIG. 3a C, so that more working fluid is output from the second space 26 than the input from the second space 26 Working fluid. At this time, the micropump is in Pump Mode operation. On the contrary, when the electromagnet switch 50 receives a reverse voltage, a reverse magnetic field is applied to the accommodation space 20 and the magnetic solid It will return to the magnetic fluid / magnetofluidic fluid regeneration in milliseconds = it is a magnetic solid 40, and because of its opposite magnetization direction, it repels the electromagnet switch 50, causing the PDMS film to reversely deform and compress. The first space 25, as shown in FIG. 3B, makes the second space 26 filled with the working fluid larger. At this time, the working fluid input into the second space 26 from the inlet 21 and the outlet 22 will be more than The working fluid in the second space 26 is output, and the micro-pump is operated in a supply mode to complete a complete pumping cycle and exert the function of driving the working fluid. The switching frequency of the electromagnet switch 50 can be as high as 1000 Hz.
上且遠磁流體/磁變流體40的相變化又可於毫秒 間完成’故而在本實施例之泵浦中，該PDMS薄膜 30將可以一高達1〇〇〇Hz的頻率進行往復的薄膜振 動，進而藉該振動驅動該工作流體，令其達至 1000Hz以上的驅動頻率。 該PDMS薄膜3〇由於具有極高的伸縮性，因 此該電磁鐵開關5〇除 加正、反向磁場外，亦 前述以正、反向電壓反覆施 可以施加磁場及移除磁場兩 13 !2281〇ι 3〇 1 =行交替運作，而同樣可達至使該PDMS薄膜 r卩1主復振動之功效，此時該磁性固體40將於磁場 瞬間回復至磁流體7磁變流體，並因其不再受 :=磁鐵開關50吸引而令該PDMS薄膜30迅速變 計申縮’而同樣可達至如第3A、3B圖所示之泵浦 。所以本發明因磁流體的變形或位移乃由外在 屬二所=制，可以解決壓電式微泵因電壓片變形量 形:以成之流量小的問題，故本發明可使薄膜變 ^里牦大。同時，磁流體由液體轉變為固體所需時 曰㈣’僅需毫秒的反應時間，故作 微果提升’流量可因作用頻率提升而變大。另= 明=磁流體為工作流體，微泵可彈性設計外型，而 不又限制的應用磁流體或磁變流體之微泵。 由此，即知§亥第一實施例之驅動源係為受外加 磁場所控制之磁流體/磁變流體40’且該磁場變化 與域流體/磁變流體4〇相變化的轉變頻率均極高， 而可令該PDMS薄膜30具有極大的變形量與變形 頻2二進而可驅動遠較習知微泵為大的流量，且其 流量復可藉該磁場而作定流量控制，而可運用於需 大流量的微型冷卻空調系統或需定流量的生殺$ 統^。同時，該實施例中亦可減省習知動件與=件 之設計」不致造成多餘的元件磨損或流體壓力損 失，且藉由其開口控制元件之設計，亦可控制該入 口與出口之閉合，避免工作流體產生倒流而發：污 14 1228101 染，並藉該液態磁流體/磁變流體而使其整體結構 不致具有外型上的限制。 此一實施例中僅以單一微泵元件1為例，惟本 發明之應用磁流體或磁變流體之微泵亦可如第4 圖組合多數個微泵元件丨，以加大整體所驅動 之流量，並增加本發明可運用之領域。 第5A圖所示係本發明之應用磁流體或磁變流 體之微泵的第二實施例上視圖，其係以單一微泵元 件2為例，第5B圖則為一配置於該第二實施例之 微泵兀件2上的上蓋板55，其中，第5A圖所示之 被系係包括一矽基板本體6〇，該本體60中係形成 有一容置空間65，且該本體60之兩側係分別開設 有一入口 61及出口 62，其係分別設計成一擴散器 63與喷嘴64，以連通至該容置空間65並作為工作 流體流入或流出該容置空間65之開口，俾使該容 置空間65成為該工作流體之流道，同時，該容置 空間65之兩相對側係分別充填有一磁流體/磁變流 體單元70，以令該磁流體/磁變流體單元70與該工 作流體同時位於該容置空間65中。 前述之磁流體/磁變流體單元70係為一不與該 工作流體互溶的磁流體/磁變流體，或為一以PDMS 薄膜包覆成形的磁流體/磁變流體，惟若該磁流體/ 磁變流體與該工作流體間有互溶之可能，則務須以 該PDMS薄膜進行包覆區隔，以避免該磁流體/磁 15 1228101 又八版/了木该工作流體而減損 磁户粬/讲"/ 貝尿凉之運作效能；該 兹抓脰/磁受流體係與前述每 備有鐵或氧化鐵等奈米粉粒，匕二=口 述實！例相同，可替換為其他等效之材Γ』 第5B圖所示之上蓋板55 n ^ , m 极W係對應於第5Λ圖之 本脰60而配置於該本體 封芸/士兮—取 以使该上蓋板55 封盍住该谷置空間65，同時 罟古^ 鑌上盍板55上係配 置有兩相對之可動磁鐵56，发The phase change of the upper and far magnetic fluid / magneto-fluid 40 can be completed in milliseconds. Therefore, in the pump of this embodiment, the PDMS film 30 can reciprocate the film vibration at a frequency of up to 1000 Hz. Then, the working fluid is driven by the vibration, so that the working fluid reaches a driving frequency of more than 1000 Hz. Because the PDMS film 30 has extremely high stretchability, in addition to the positive and reverse magnetic fields, the electromagnet switch 50 can also apply a magnetic field and remove the magnetic field by repeatedly applying positive and reverse voltages. 〇ι 3〇1 = Alternate line operation, and the same effect as that of the main and complex vibrations of the PDMS film r 卩 1 can be achieved. At this time, the magnetic solid 40 will instantly return to the magnetic fluid 7 magnetically variable fluid due to the magnetic field. No longer attracted by: = the magnet switch 50 causes the PDMS film 30 to quickly change and shrink, and can also reach the pump as shown in Figures 3A and 3B. Therefore, because the deformation or displacement of the magnetic fluid of the present invention is made by the external institute, it can solve the problem that the piezoelectric micropump is deformed by the voltage plate: the flow rate is small, so the present invention can change the film thickness.牦 大. At the same time, the time required for the magnetic fluid to change from a liquid to a solid state requires only a response time of milliseconds. Therefore, a slight increase in flow rate can be caused by the increase in the frequency of action. Another = Ming = Magnetic fluid is the working fluid. The micropump can be flexibly designed without restricting the use of magnetic pumps or magnetically variable fluid micropumps. Therefore, it is known that the driving source of the first embodiment is a magnetic fluid / magneto-fluid 40 'controlled by an external magnetic field, and the transition frequency of the magnetic field change and the phase fluid / magneto-fluid 40 phase change are extremely polar. High, which can make the PDMS film 30 have a large amount of deformation and deformation frequency 22 and can drive a much larger flow than the conventional micropump, and its flow can be controlled by the magnetic field for constant flow, and can be used For micro-cooled air-conditioning systems that require a large flow or a system that requires a fixed flow ^. At the same time, in this embodiment, it is also possible to reduce the design of the known moving parts and parts "so as not to cause unnecessary component wear or fluid pressure loss, and the design of the opening control element can also control the closing of the inlet and outlet. To prevent the working fluid from flowing backwards: stain 14 1228101, and use the liquid magnetic fluid / magneto-fluid fluid to make its overall structure not have restrictions on its appearance. In this embodiment, only a single micropump element 1 is used as an example. However, the micropump using the magnetic fluid or the magneto-fluidic fluid of the present invention can also be combined with a plurality of micropump elements as shown in FIG. 4 to increase the overall drive. Traffic and increase the areas where the present invention can be used. Fig. 5A is a top view of a second embodiment of a micropump using a magnetic fluid or a magneto-fluidic fluid according to the present invention, which uses a single micropump element 2 as an example, and Fig. 5B is an arrangement in the second embodiment. For example, the upper cover plate 55 on the micropump element 2, wherein the quilt shown in FIG. 5A includes a silicon substrate body 60, and an accommodating space 65 is formed in the body 60. An inlet 61 and an outlet 62 are respectively opened on both sides, which are respectively designed as a diffuser 63 and a nozzle 64 to communicate with the accommodation space 65 and as working fluid to flow into or out of the opening of the accommodation space 65, so that The accommodating space 65 becomes a flow channel of the working fluid. At the same time, two opposite sides of the accommodating space 65 are filled with a magnetic fluid / magneto-fluidic unit 70 respectively, so that the magnetic fluid / magneto-fluid unit 70 and the working fluid The fluid is located in the accommodation space 65 at the same time. The aforementioned magnetic fluid / magneto-fluidic unit 70 is a magnetic fluid / magneto-fluid that is not mutually soluble with the working fluid, or a magnetic fluid / magneto-fluid that is overmolded with a PDMS film, but if the magnetic fluid / There is a possibility of mutual dissolution between the magnetotropic fluid and the working fluid, so the PDMS film must be used to cover the separation to avoid the magnetic fluid / magnetic 15 1228101 and eighth edition / the working fluid and detract from the magnetic user. " / Operational efficiency of urinary cooling; this is a scratch / magnetic current system and each of the aforementioned nano powders such as iron or iron oxide is prepared. The same example, can be replaced by other equivalent materials Γ ”Figure 5B, the upper cover plate 55 n ^, m pole W is corresponding to the original 脰 60 in Figure 5 Λ and is placed in the body seal / Shi Xi- The upper cover plate 55 is used to seal the valley space 65. At the same time, two opposite movable magnets 56 are arranged on the upper cover plate 55.
^ ^ ^ ^ 0B /、配置位置係對應於 X谷二4 65中的磁流體/磁變流體單元7〇位 置，而使該磁流體/磁變流體單元7G受該可動 士6之磁化而形成固體，並可於該可動磁鐵％移動 可，叉其驅動而進行位移。^ ^ ^ ^ 0B /, the placement position corresponds to the position of the magnetofluidic / magnetofluidic unit 70 in X Valley II 4 65, and the magnetofluidic / magnetofluidic unit 7G is formed by the magnetization of the movable person 6 It is solid and can be moved by% of this movable magnet, and it can be driven to move.
因此，此一第二實施例之微泵即係利用該上蓋 板5 5上之可動磁鐵5 6為驅動源，以如第6 a圖所 示令該兩可動磁鐵56相互移動至該上蓋板55^中 央並如第6B圖所示驅動該兩對應之固化磁流體 /磁變流體單元7〇位移而令其相互接近，此時，該 兩磁流體/磁變流體單元7〇將可擠壓該容置空^ 6 5中的工作流體，而使自該入口 61、出口 6 2輸出 該容置空間65的工作流體多於輸入該容置空^ 65 的工作流體，並使該微泵進行泵浦模式運作，反 之’當該可動磁鐵56再受驅動而相互分離並回到 該上蓋板55之相對兩側，該兩固化磁流體/磁變流 體單元70亦將產生位移而相互分離，並藉該容置 16 !228101 =間65中之壓力落差而使自該入口 6ι、出 輪入該容置空間65的工作、户舻夕 ee 心备 作机體多於輪出該容置空 間65的工作流體，並令兮饩爷a / 工 — I?忒破泵進行供應模式運 作，而完成一元整的泵浦循環。 因此，若將該可動磁鐵26技斿# & 敕E 彺设移動之頻率調 二至1000Ηζ以上，則在本實施例之泵浦中，該 2對磁流體/磁變流體單元7〇往復進 頻 竹、*_ 入# 運而了猎其在復位移驅動該工 机脰’八亦達至1000Hz以上的驅動頻率。 此一實施例中的上芸把ς 匕 息板55亚非僅限於第5Β 圖之設計，而亦可如第7 fi私- 弟7圖所不，於整個上蓋板 ’ 3表面連繽配置整排之r并娜：， ,7 正徘之电磁鐵57,該整排電磁鐵 7之磁場啟動順序係可操控如圖所示之箭號，而 广上：板55之兩端側依序向中央位置啟動，以 叙揮與第5B圖之可動磁鐵56 ^ 果，進而令該容置空間65中：二效：磁場移動效 且工㈣〇)〒的兩相對 磁變流體單元70產生位移而如万社 播……“移相互接近，同樣可發 揮理心的流體驅動效果。 該第二實施例之微泵元件2亦與前述之第一 貫，例相同，可相互組合而如第δ圖所示（未圖示 上盍板），以輸出較高的工作流體流量，而可運用 於需要大流量的微型冷卻空調系統中。&外，續第 :實：例之容置空間入口61、出口 62的擴散器;63 與嘴鳴64間復可如第9Α、9Β圖所示（未圖示上蓋 1228101 板）配置一開口控制亓杜 者 件，此一開口控制元件與前 ^ Λ〜稍述之開σ控制元件相同，係為多數 叉磁場驅動的磁流體/磁變流體單元71a、71b， :可藉磁場之變更而分別於該入口側與出口侧之 弟一流道72與第-泠；音，。& , 士 乐一抓道73中位移，因此，若能同 日守將該開口控制元件盥兮 、Θ谷置空間65中之磁流體/ 石义/爪肢單兀70以磁場作一同步位移整合，即可 發揮理想的流量與流向控制效果，例如第9A圖所 示之系浦模式時，續交@ 、 σ 巧谷置工間65中之磁流體/磁變 抓妝單元70仍分列兩侧，此時出口側之第二流道 73中的磁流體/磁變流體單元71b係位移至該容置 空間65之出口 62而封蓋之，俾使外界工作流體可 自"玄入口侧之入口 61流入該容置空間65中，反 之，當該微泵運作如第9B圖所示之供應模式時， 名=置工間65中之磁流體/磁變流體單元7〇將受 上盍板55上之磁場驅動而位移並相互接近，以擠 壓=容置空間65中的工作流體，此時入口側之第 一流道72中的磁流體/磁變流體單元7ia將位移至 。亥谷置工間65之入口 61並封蓋之，而使該容置空 間65中的工作流體會自該出口側之出口 流至外 界’可進订一流向控制，而不致如習知微泵般發生 工作流體倒流之情形，亦不致污染該工作流體。 ^ ^第10圖所示（未圖示上蓋板）之微泵實施例 係於第9 A、9B圖所示之開口控制元件上復增設一 18 1228101 流 刀換功能，以對 作一更精準之抑、^ /爪體之輪入或輪出流量 該容置空間65二中/例如圖示之操作模式，係利用 移而排出該卫抑^流體/磁變流體單元的位 能，運用磁場控制此恰可藉由流體切換之功 體/磁變流體單_ 木作该第二流道73中的磁流 出口 62僅打開：=生位移’以令該出口端之 62輪出所需的工：、、:使該微泵僅於該單-出口 控制之需长，而 极體，以兼顧大流量與定流量 缺在丨 求可同時將本發明運用於亟需定、义旦 才工制的生醫系統中。 、 /瓜里 泵作& 本貝她例提供可組合複數個微 汞作為μ體切換器的應用。 論今==由本發明第二實施例之設計，即知不 哪β U泵係為單_料 所組合個微泵元件2 即- "1用其外加磁場與磁流體/磁變流體 :兀70、=位移，驅動一遠較習知微泵為高的流 极里復可藉該磁場而作定量之控制，同時 亦可減省習知動件與閥件之設計，不致造成多餘的 兀：磨損或流體壓力損失，且藉由其開口控制元件 之叹计，亦可控制該入口 6 i與出口 62之閉合，避 免工作流體產生倒流而發生污染，並藉該液態磁流 肢/磁變流體而使其整體結構不致具有外型上的限 制。 本电明即係揭示一種應用磁流體或磁變流體 之彳政栗’以藉磁流體/磁變流體之特性，利用外加 19 1228101 磁場快速地控制其變形或位移，it而驅動工作产 體，一併解決習知微泵之問題。 w 上述實例僅為例示性說明本發明 嶋發明。任何熟習此項技藝： 二可在不延背本發明之精神及範蠢 實施例進行修飾與變化。因：’:上述 範圍’應如後述之申請專利範二;;，之相利保護Therefore, the micropump of this second embodiment uses the movable magnet 56 on the upper cover plate 5 5 as a driving source to move the two movable magnets 56 to the upper cover as shown in FIG. 6a. At the center of the plate 55, and as shown in FIG. 6B, the two corresponding solidified magnetofluidic / magnetofluidic units 70 are displaced to bring them close to each other. At this time, the two magnetofluidic / magnetofluidic units 70 can be squeezed Press the working fluid in the accommodation space ^ 65, so that the working fluid output from the accommodation space 65 from the inlet 61, outlet 6 2 is more than the working fluid input to the accommodation space 65, and make the micropump Perform the pump mode operation. Otherwise, when the movable magnet 56 is driven again to separate from each other and return to the opposite sides of the upper cover 55, the two solidified magnetic fluid / magneto-fluidic units 70 will also be displaced and separated from each other. And by the accommodation 16! 228101 = the pressure drop in 65, so that the work from the entrance 6m, out of the accommodation space 65, the households are more prepared than the rotation out of the accommodation The working fluid of space 65, and make Xi Xiye a / 工 — I? A unitary pump cycle. Therefore, if the frequency of the movable magnet 26 is adjusted to be more than 1000Ηζ, then in the pump of this embodiment, the two pairs of magnetic fluid / magneto-fluidic unit 70 will reciprocate. Frequency bamboo, * _ 入 # In the meantime, it was hunting to reset the drive to drive the machine to reach a driving frequency above 1000Hz. In this embodiment, the upper and lower brackets 55 and 29 are not limited to the design of Figure 5B, but can also be configured on the entire upper cover '3 surface, as shown in Figure 7fi. The entire row of r and na :,, 7 is the electromagnet 57 that is floating. The magnetic field start sequence of the entire row of electromagnets 7 can be controlled by the arrow shown in the figure, and the upper side: the two sides of the plate 55 are in order. Start to the central position, and use the movable magnet 56 in Figure 5B to describe the result, and then make the accommodation space 65: the second effect: the magnetic field movement effect and the two relative magnetically-fluid fluid units 70 are displaced. And if Wanshe broadcasts ... "Move close to each other, the rational fluid drive effect can also be exerted. The micropump element 2 of this second embodiment is also the same as the previous first example, and can be combined with each other as in Section δ It is shown in the figure (the upper panel is not shown) to output a higher flow rate of working fluid, and can be used in a micro cooling air-conditioning system that requires a large flow. &Amp; outer, continued: Reality: Example of the entrance to the storage space 61. The diffuser at the outlet 62; between the 63 and the vocal 64 can be shown in Figures 9A and 9B (the upper cover 1228101 board is not shown) An opening control element is provided. This opening control element is the same as the above-mentioned open σ control element. It is a magnetic fluid / magnetofluidic unit 71a, 71b driven by most fork magnetic fields. The change is on the entrance side and the exit side, respectively, the first-level road 72 and the first-line; sound, &, Shi Leyi grasps the road 73 displacement, so if you can keep the opening control element on the same day, Θ The magnetic fluid / Shiyi / claw limb 70 in the valley space 65 integrates with a magnetic field to perform a synchronous displacement integration, and can achieve the desired flow and flow direction control effect. For example, in the pump mode shown in Figure 9A, continued交 @, σ The magnetic fluid / magneto-variable makeup unit 70 in Qiaogu Zhijian 65 is still divided into two sides. At this time, the magnetic fluid / magneto-fluid unit 71b in the second flow channel 73 on the exit side is displaced to The outlet 62 of the accommodating space 65 is closed, so that external working fluid can flow into the accommodating space 65 from the inlet 61 on the side of the mysterious inlet. Conversely, when the micropump operates as shown in FIG. 9B In the supply mode, the name = magnetic fluid / magneto-fluidic unit 70 in the home 65 will be listed. The magnetic field on 55 is displaced and moved close to each other to squeeze = the working fluid in the accommodation space 65, and at this time, the magnetic fluid / magneto-fluidic unit 7ia in the first flow passage 72 on the inlet side will be displaced to. The inlet 61 of the workshop 65 is closed, so that the working fluid in the accommodating space 65 will flow from the outlet side of the outlet to the outside. It can be ordered and controlled, and does not work like a conventional micropump. The backflow of the fluid does not cause contamination of the working fluid. ^ ^ The micropump embodiment shown in Figure 10 (not shown on the top cover) is an additional one on the opening control element shown in Figures 9 A and 9B. 18 1228101 Flow knife change function, to make a more precise control, ^ / claw body in or out of the flow of the accommodation space 65 two / for example, the operation mode shown in the figure, the use of displacement to discharge the health control ^ Possible energy of the fluid / magneto-fluid unit, using a magnetic field to control the work body / magneto-fluid unit which can be switched by the fluid_ The magnetic current outlet 62 in the second flow channel 73 is only open: = displacement 'In order to make the outlet of the 62 rounds required: ,,: make the micropump only on the single-output The need for oral control is long, and the polar body is required to take into account both large flow and constant flow. The present invention can be applied to a biomedical system that urgently needs to be fixed and is only capable of working in Yidan. / / Guali Pump for & Ben Beiteli provides applications that can combine multiple micro-mercuries as μ-body switchers. The present == is designed by the second embodiment of the present invention, that is, the β U pump system is a single micro pump element combined with 2 micro pump elements, namely-" 1 with its external magnetic field and magnetic fluid / magnetic fluid: 70. = Displacement, driving a current pole far higher than the conventional micropump can use the magnetic field for quantitative control, and it can also reduce the design of known moving parts and valve parts, which will not cause unnecessary inconvenience. : Wear or fluid pressure loss, and through the opening control element sigh meter, the closing of the inlet 6 i and outlet 62 can also be controlled to avoid backflow of working fluid and pollution, and use the liquid magnetic limb / magnetic change Fluid so that its overall structure does not have physical restrictions. The present invention is to reveal a kind of maggots that use magnetic fluid or magneto-fluidic fluid to take advantage of the characteristics of magnetic fluid / magneto-fluid, and use the external magnetic field of 19 1228101 to quickly control its deformation or displacement. Solve the problems of conventional micropumps together. w The above examples are merely illustrative to illustrate the present invention. Anyone familiar with this skill: Second, modifications and changes can be made without departing from the spirit and scope of the present invention. Because: ‘: the above scope’ shall be as described in the second patent application;
20 1228101 【圖式簡單說明】 、 第1圖係本發明之微泵元件的第一實施例側 視圖； 第2A圖係受磁場磁化後之固化磁流體/磁變 流體示意圖； 第2B圖係未受磁場作用之磁流體/磁變流體 示意圖； 第3A圖係第1圖所示之第一實施例於其泵浦 模式下之運作示意圖； 鲁 ^第3B圖係第丨圖所示之第一實施例於其供應 模式下之運作示意圖； 、第4圖係第1圖所示之第一實施例於組合後之 粟浦模組示意圖； 第5A圖係本發明之微泵元件的第二實施例於 未配置上蓋板下之上視圖； 苐5 B圖係本發明之微栗元件的第二實施例之 上盖板上視圖； 第6A圖係第5B圖所示之兩可動磁鐵的位 意圖； 抑第6B圖係第5 A圖所示之兩磁流體/磁變流體 單元的位移示意圖； 弟7圖係第5B圖所示之上蓋板上的另一磁場 產生單元之上視圖； 第8圖係第5A圖所示之第二實施例於組合後 21 1228101 之泵浦模組示意圖； 第9A圖係帛8圖所示t實施例的_ 件於其泵浦模式下之運作示意圖； 口控制元 第9B圖係第8圖所示之實施例的開口控制元 件於其供應模式下之運作示意圖； 第1 〇圖係第9 A、9B圖所示之實施例於配置 流體切換功能下之運作示意圖； 第11圖係習知薄膜式微泵之側視圖；20 1228101 [Brief description of the drawings], Figure 1 is a side view of the first embodiment of the micropump element of the present invention; Figure 2A is a schematic diagram of a solidified magnetic fluid / magnetofluid after magnetization by a magnetic field; Figure 2B is not shown Schematic diagram of magnetic fluid / magnetofluid under the action of magnetic field; Figure 3A is a schematic diagram of the operation of the first embodiment shown in Figure 1 in its pumping mode; Figure 3B is the first shown in Figure 丨The schematic diagram of the operation of the embodiment in its supply mode; Figure 4 is a schematic view of the combined pump pump module of the first embodiment shown in Figure 1; Figure 5A is a second embodiment of the micropump element of the present invention. Top view below the upper cover is not configured; 苐 Figure 5B is a top view of the upper cover of the second embodiment of the micropump element of the present invention; Figure 6A is a plan view of the two movable magnets shown in Figure 5B; Figure 6B is a schematic diagram of the displacement of two magnetic fluid / magneto-fluidic units shown in Figure 5A; Figure 7 is a top view of another magnetic field generating unit on the upper cover shown in Figure 5B; Figure 8 The figure shows the pump module of the second embodiment shown in Figure 5A after combination 21 1228101 Fig. 9A is a schematic diagram of the operation of the embodiment of the t-piece shown in Fig. 8 in its pumping mode; Fig. 9B of the mouth control element is the opening control element of the embodiment shown in Fig. 8 in its supply mode The following is a schematic diagram of operation; FIG. 10 is a schematic diagram of the operation of the embodiment shown in FIGS. 9A and 9B under the configuration of a fluid switching function; FIG. 11 is a side view of a conventional membrane micropump;
第12A、12B圖係習知壓電式微泵之側視圖； 以及 第13圖係習知鐵磁流體/磁變流體驅動式微泵 之運作示意圖。 【元件編號說明】 1 微泵元件 1G 第一本體 15 第二本體 2 微泵元件 20 容置空間 21 入口 22 出口 23 擴散器 24 喷嘴 25 第一空間Figures 12A and 12B are side views of a conventional piezoelectric micropump; and Figure 13 is a schematic diagram of the operation of a conventional ferrofluid / magneto-rheological fluid driven micropump. [Element number description] 1 Micropump element 1G First body 15 Second body 2 Micropump element 20 Receiving space 21 Inlet 22 Outlet 23 Diffuser 24 Nozzle 25 First space
26 第二空間 30 PDMS薄膜 40 磁流體/磁變流 50 電磁鐵開關 55 上蓋板 56 可動磁鐵 57 電磁鐵 60 本體 61 入口 62 出〇 22 1228101 63 擴散器 64 喷嘴 65 容置空間 70 磁流體/磁變流體 X3XJ 一 早兀 71a 磁流體/磁變流體 口口 一 早兀 71b 磁流體/磁變流體 X3X7 一 早兀 72 第一流道 73 第二流道 80 薄膜式微泵 被動閥 入口 出口 無閥式微泵 壓電片 管路 工作流體 鐵磁流體 入口 出口 固定磁鐵 移動磁鐵 2326 Second space 30 PDMS film 40 Magnetic fluid / magnetic current 50 Electromagnet switch 55 Upper cover 56 Movable magnet 57 Electromagnet 60 Body 61 Entrance 62 Out 022 22 28101 63 Diffuser 64 Nozzle 65 Receiving space 70 Magnetic fluid / Magnetofluidic fluid X3XJ Yizaowu 71a Magnetofluidic / Magnetofluidic fluid port Yizao 71b Magnetofluid / Magnetofluidic fluid X3X7 Yizao 72 First runner 73 Second runner 80 Membrane type micropump passive valve inlet and outlet valveless micropump piezoelectric Sheet line working fluid ferrofluid inlet and outlet fixed magnet moving magnet 23