TWI403655B - No-moving-part micro-valve structure - Google Patents

Description

Structure of the non-moving member microvalve

The invention relates to a miniature valve, in particular to a structural design of a miniature non-moving member valve.

At present, microelectromechanical systems (MEMS) technology has developed a new technology of microfluidics in the bioengineering field, and the micro-flux device of the micro-flow control body is a very important component, but it is not only technically difficult to manufacture valve components in micro-pipes. The cost is high. When the valve is actuated, it is easy to cause damage to the sample during fluid transportation, and the valve itself has a life limit. Therefore, the valve is designed as a micro-pump valve, which is formed by using different inlet pressure and outlet pressure. The pressure difference drives the fluid in the pipe.

Referring to FIG. 1 , a conventional non-moving member valve 10 has a first pipe 11 and a second pipe 12 . The two pipes 11 and 12 are connected at an angle of 45 degrees. The second pipe 12 is connected. Extending to form a curve 13 and communicating with the first pipe 11 , when the fluid flows in from the second pipe 12 and flows out from the first pipe 11 , the pressure resistance is small, and conversely, when the fluid is compliant with the first pipe 11 When flowing in and flowing out of the second pipe 12, the pressure resistance is large, and the resistance flows through the different directions, and the effect of the one-way valve having a single flow direction due to the difference in flow rates between the two sides is achieved under the same pressure difference.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a structure of a non-moving member microvalve which, through a simple design, achieves a microvalve having a large bipolarity, that is, a single flow direction having a better flow.

A second object of the present invention is to provide a non-moving valve micro-pull composed of the above-described non-moving member microvalve.

In order to achieve the foregoing object, a structure of a non-moving member microvalve according to the present invention is suitable for controlling a flow direction of a microfluid, comprising: a main pipe, which is a through pipe, defining one end as an inlet end and the other end as An outlet end; at least one outer curve extending perpendicularly outward from the main pipe on one side of the main pipe to form an upright section, the upright section being circularly bent toward the entrance end to form a curved section, the curved section Further extending to form an inclined section, and the inclined section is in inclined angle with the side of the main pipeline, and the two baffles are located in the direction of the entrance end of the opening of the outer curved passage and the main pipeline, the baffle Tilt toward the exit end.

The non-moving valve micro-pull of the present invention comprises: a trough body, two through holes are defined in the groove wall, and one of the through holes is defined as an inlet port, and one is an outlet, and has a composite film (Fe-PDMS). Iron-containing polydimethylsiloxane, the composite film set is disposed in the slot of the tank body, and two permanent magnets are respectively located above the slot of the slot and below the bottom of the slot of the slot; The non-moving micro-valve has two outer curved corners, and the outer curved corners are separated by a distance and are respectively located on different sides of the main pipeline, and the two non-moving micro-valves are respectively defined as one a non-moving member microvalve and a second immovable member microvalve, the outlet end of the first immovable member microvalve is in communication with the inlet port of the trough body, and the entry end of the second immovable member microvalve is The outlet group of the tank body is connected.

First, please refer to FIG. 2, the structure of the micro-valve of the movable member provided by the embodiment of the present invention is suitable for controlling the flow direction of the microfluid. The non-moving member microvalve 20 includes a main pipe 21 and At least one outer curve 22, wherein: the main pipe 21 is a through pipe, and one end is an inlet end 211, and the other end is an outlet end 212; the outer curve 22 is on one side of the main pipe 21 The main duct 21 extends vertically outward to form an upright section 221, and the upright section 221 is circularly curved toward the entrance end 211 to form a curved section 222, and the curved section 222 is further extended to form an inclined section 223, and the inclined section The 223 is in an oblique angle with the side of the main pipe 21, and the two baffles 224 are located in the direction of the inlet end 211 of the opening of the outer curve 22 and the main pipe 21, and the baffle 224 faces the outlet end 212. Tilt in direction.

The above description is the structure of each main component of the embodiment of the present invention and its configuration description. The operation mode and the function of the embodiment of the present invention are as follows: Please refer to FIG. 2, the present invention is provided by a pipeline. It is designed that when the fluid flows from the inlet end 211 to the outlet end 212, the flow of the baffle 224 causes the fluid to flow little to the outer curve 22 and to the outlet end 212, while the fluid flows from the outlet end 212. When the inlet end 211 flows backward, the fluid flows back to the outer curve 22 due to the guidance of the baffle 224, so that the resistance increases, and the net flow is generated due to the asymmetry of the flow field, reaching the fluid direction. Valve efficiency in a single direction.

Referring to Fig. 3, the movable member microvalve 20 of the present invention and the conventional non-moving member valve 10, as shown in Fig. 1, are shown at different Reynolds numbers (Re), and bipolar (D ^p _i The comparison, before the discussion, explains the definition of Reynolds number (Re) and bipolar (D ^p _i ), as follows: The bipolar (D ^p _i ) is defined as D ^p _i = ΔP _r / ΔP _f , Wherein, the inlet end of the inactive valve is set at a flow rate, and the outlet end is at a large pressure, then the pressure difference between the inlet end and the outlet end is called ΔP _f , and the outlet end is set to have a flow velocity opposite to the inlet end direction, and the inlet end is one. At atmospheric pressure, the pressure difference between the outlet end and the inlet end is called ΔP _r , and if D ^p _i = 1, the effect of the non-moving valve is lost. Based on the pipeline being designed to be asymmetrical, the two pressure values will be different. The pressure difference, the fluid causes a net flow in a single direction due to the pressure difference, so a larger D ^p _i indicates that a better net flow rate can be formed.

The Reynolds number (Re) is defined as Re=ρ‧V‧D/μ, where ρ is the density of the fluid, V is the average flow velocity in the pipe, D is the diameter of the pipe diameter, and μ is the viscosity coefficient of the fluid. It can be known that the Reynolds number is proportional to the flow rate.

Therefore, it can be seen from FIG. 3 that the bipolarity (D ^p _i ) of the movable member microvalve 20 of the present invention is better than that of the conventional non-moving member valve 10, regardless of the Reynolds number (Re) value. It is shown that the design of the present invention does achieve a bipolarly large, non-moving microvalve.

Referring to FIG. 4, the outer side curve 22 in the foregoing embodiment may also be two outer corners 22a, 22b. The two outer corners 22a, 22b are separated by a distance H and are respectively located. Different sides of the main duct 21.

In addition, another object of the present invention is to form a non-moving valve micro-pump 30 by using the above-mentioned non-moving member microvalve, as shown in Figures 5a and 5b, the non-moving member valve micro-pump 30 includes a slot. The body 31 and the two movable member microvalves 20, wherein: the groove body 31 is provided with two through holes in the groove wall, and two through holes are defined as an inlet port 311 and an outlet port 312 having a composite film (Fe). -PDMS) 313, which is an iron-containing polydimethylsiloxane, the composite film 313 is disposed in the slot of the tank 31, and the two permanent magnets 314 are respectively located above the slot of the slot 31 and The groove body 31 is below the bottom of the groove; the two movable member microvalves 20 are respectively defined as a first mover microvalve 20a and a second mover microvalve 20b, and the first mover microvalve 20a The outlet end 212a is in communication with the inlet port 311 of the tank body 31, and the inlet end 211b of the second mover microvalve 20b is in communication with the outlet 312 of the tank body 31.

Therefore, when the permanent magnet 314 that moves over the slot of the slot 31 is controlled to approach the composite film 313, the composite film 313 is attracted by the permanent magnet 314 due to the magnetic attraction, because the pressure in the slot 31 changes. Small enough to allow fluid to flow into the trough 31 via the first mover microvalve 20a and the second mover microvalve 20b, because during the inflow, the fluid entering the port 311 through the trough 31 is cis To the inflow, the fluid entering through the outlet 31 of the tank body 31 is reversely flowing, so that the fluid entering the port 311 through the tank body 31 enters more fluid than the fluid entering through the outlet port 312 of the tank body 31; when the control movement is located in the tank body 31 When the permanent magnet 314 under the bottom of the groove is close to the composite film 313, the composite film 313 is recessed by being attracted by the permanent magnet 314. Since the pressure in the groove 31 is increased, the fluid flows through the groove 31 to the first portion. a non-moving member microvalve 20a and the second immovable member microvalve 20b, because during the outflow, the fluid flowing out through the outlet 312 of the trough body 31 flows out smoothly, and flows out through the trough body 31 into the port 311. The fluid is flowing backwards, so The outlet 312 of the tank body 31 has more fluid flowing out through the inlet port 311 of the tank body 31. Therefore, when the tank body 31 flows into the tank body 31, it flows into the port 311 through the tank body 31, and flows out of the tank body 31. The outlet 312 of the tank body 31 flows out more, and the fluid-moving valve micro-pump 30 which flows in a single direction is reached.

10. . . Inactive valve

11. . . First pipe

12. . . Second pipe

13. . . Curved road

20. . . Inactive micro valve

20a. . . Inactive micro valve

20b. . . Inactive micro valve

twenty one. . . Main pipeline

211. . . Entering end

211b. . . Entering end

212. . . Exit end

212a. . . Exit end

twenty two. . . Lateral curve

22a. . . Lateral curve

22b. . . Lateral curve

221. . . Upright section

222. . . Curved section

223. . . Tilted section

224. . . Baffle

30. . . No moving valve micro pump

31. . . Slot

311. . . Entry port

312. . . Export

313. . . Composite film

314. . . permanent magnet

H. . . distance

Figure 1 Schematic diagram of a conventional non-moving valve.

Fig. 2 is a schematic view of the micro-valve of the movable member of the present invention.

Fig. 3 is a diagram showing the bipolar comparison of the non-moving member microvalve of the present invention and the conventional non-moving member valve at different Reynolds numbers.

Figure 4 The present invention is a schematic illustration of two outer curves.

Figure 5a is a schematic view of the non-moving valve micro-fluid fluid of the present invention being drawn into the tank.

Fig. 5b is a schematic view showing the flow of the micro-pump fluid of the non-moving member valve of the present invention from the tank.

20‧‧‧No moving parts microvalve

21‧‧‧ main pipeline

211‧‧‧ entry end

212‧‧‧export end

22‧‧‧Outside corner

221‧‧‧Upright section

222‧‧‧Bend section

223‧‧‧Sloping section

224‧‧ ‧ baffle

Claims (3)

The structure of the non-moving member microvalve is suitable for controlling the flow direction of the microfluid, comprising: a main pipe, which is a through pipe, defining one end as an inlet end and the other end as an outlet end; at least one outer curve, One side of the main pipe extends perpendicularly outward from the main pipe to form an upright section, and the upright section is circularly bent toward the entrance end to form a curved section, and the curved section is further extended to form a sloped section, and the inclined section The baffle is in an oblique angle with the side of the main pipe, and the two baffles are located at the entrance end of the outer curved passage communicating with the main pipe, and the baffle is inclined toward the outlet end. The structure of the non-moving member microvalve according to claim 1, wherein the outer side curve is two, and the outer side curves are at a distance apart from each other and located on different sides of the main pipe. A non-moving valve micro-pull comprising the structure of the non-moving micro-valve as described in claim 2, comprising: a trough body, two through holes are defined in the groove wall, and one of the through holes is defined as entering a port, one of which is an outlet, has a composite film (Fe-PDMS), which is a polydimethylsiloxan containing iron. The composite film is disposed in the groove of the tank, and two permanent magnets are respectively located at the mouth. Above the slot of the slot body and below the bottom of the slot of the slot; the two micro-valves of the movable member are respectively defined as a first non-moving member micro-valve and a second non-moving member micro-valve, the first non-moving member The outlet end of the microvalve is in communication with the inlet port of the trough, and the inlet end of the second immovable microvalve is in communication with the outlet of the trough.