TWI226499B - Silver alloy thin film reflector and transparent electrical conductor - Google Patents

Silver alloy thin film reflector and transparent electrical conductor Download PDF

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Publication number
TWI226499B
TWI226499B TW92128677A TW92128677A TWI226499B TW I226499 B TWI226499 B TW I226499B TW 92128677 A TW92128677 A TW 92128677A TW 92128677 A TW92128677 A TW 92128677A TW I226499 B TWI226499 B TW I226499B
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Taiwan
Prior art keywords
copper
silver
alloy thin
thin film
transparent electrical
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TW92128677A
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Chinese (zh)
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TW200424713A (en
Inventor
Han Hanwai Nee
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Target Technology Co Llc
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Priority claimed from US10/431,695 external-priority patent/US20030227250A1/en
Application filed by Target Technology Co Llc filed Critical Target Technology Co Llc
Publication of TW200424713A publication Critical patent/TW200424713A/en
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Publication of TWI226499B publication Critical patent/TWI226499B/en

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Abstract

A silver-based alloy thin film is provided, suitable for use as a reflective and/or a transparent electrical conductor for various opto-electronic device applications such as liquid crystal displays, flat panel displays, plasma displays, solar cells, organic light emitting diode and electrochromic or energy efficient windows. Elements alloyed with silver include copper, palladium, platinum, gold, zinc, silicon, cadmium, tin, lithium, nickel, indium, chromium, antimony, gallium, boron, molybdenum, germanium, zirconium, beryllium, aluminum, magnesium, manganese, cobalt and titanium. Over a thickness range of 3 nm to 20 nm, these silver alloy thin films can be used as transparent electrical conductors. At a thickness greater than 20 nm, they can be used as reflectors. These alloys have moderate to high reflectivity and electrical conductivity and reasonable good corrosion resistance under ambient conditions.

Description

1226499 103年7月1丨日更正替換頁 器 6.根據申請專利範圍第5項之光電 中該光電組件或堆疊俦A _ · 择豐其 …疊係為-種電致變色窗戶(electr〇_ chromic window) 〇 7· 一種顯示器裝置,其包括: -個包括-陣列圖素電極的第一基板: ,-個包括-相對電極之第二基板:以及 -層介於該第-與該第二基板之間的有 中:第一基板包含了高反射率之層1高反射率層係為l 金屬合金,該金屬合金包括·· 、· ·" •銀; 以及 乾圍在0 · 1原子百分比 ’其中S玄第二元素係選自於 銅、錳、鎂、鈹、鋅、鎘、 、鉻、姑、錄、鎵、蝴、錫 包含氧化物層》 第7項之顯示器裝置 其中,該顯示器裝置不 8.根據申請專利範圍 金屬合金包括: 銀; 至10原子百分比的第二元素 由下列元素所組成之群組中: 鋰、锆、矽、鋁、銦、鈦鎳 、鉬、和鍺; 其中該 範圍在0. 1原子百分比至 轨圍在〇. 1原子百分此芬 ’其中該第三金屬係選自於下 石夕、緒、紹、欽、钮I、左士 5. 0原子百分比的銅;以及 5.0原子百分比的第三金屬 列金屬.錯 '錢、經、鋅' 1226499 】03年7月11日更正替換頁 、石朋、和錯。 9. 根據申請專利範圍第7或8項之顯示器裝置,其 中該顯示器組件係為一種反射式液晶顯示器。 10. 一種窗型塗層,其包括: 一個透明基板;以及 一薄膜堆疊,其包括一層銀合金之薄膜,包括: 銀;以及 範圍在0. 1原子百分比至1 0. 0原子百分比的第二元 素,其中該第二元素係選自於由下列元..素所組成之群組中 :金、纪、Ιέ、銅、鋅、錢 '紹、欽、.裡、鎖、猛、石夕、 錯、級、錫、銦、録、鈷、絡、錄、鎵·、删、翻、和錯; 其中,該窗型塗層不包含氧化物層。 11. (刪除)根據申請專利範圍第10項之窗型塗層, 其包括: 該薄膜銀合金; —介電層;以及 一氧化物層,其中該薄膜銀合金係介於該介電層與該 氧化物層之間。 12. 一種光電堆疊,其包括: 一個透明基板;以及 一個透明且具導電性之堆疊,該堆:疊包括了: 一層透明導電氧化物;以及 : 一金屬合金層,該金屬合金包括了 : 銀;以及 31 1226499 _ • ' 103年7月11 .日更正替換頁 範圍在0. 1原子百分比至10原子百分比的第二元素 ,其中該第二元素係選自於由下列元素所組成之群組中: 銅、le、Ιέ、金、錦、經、鋅、錄、鉢'、鉻、錄、鎵、棚 、I目、链、欽、鎮、猛、石夕、鍺、鍵、錫、銦、和錯; 其限制條件為該透明氧化物層不為氧化銦與至 少一種選自欽、結、组、銳、鈴、飾、紐、鍺、紗 以及絡所組成金屬氧化物形成的氧化物層。 13. 根據申請專利範圍第1、2 ' 3、4、或12項之光 電堆疊,其中該光電組件係在一太陽能電池中。 14. 根據申請專利範圍第1、2、3、4、或1 2項之光 電堆疊,其中該光電組件係在一聚合物.發光二極體中。 15. 根據申請專利範圍第1、2、3_..、4、或12項之光 電堆疊,其中該光電組件或堆疊係在一平扳顯示器中。 16. 根據申請專利範圍第1、2 ' Υ:、4、或1 2項之光 電堆疊,其中該光電組件或堆疊係在一.電致變色窗戶中。 拾壹、圖式: 如次頁 321226499 July 1st, 2013. Correction and replacement of the pager 6. According to the scope of the patent application No. 5 of the optoelectronic component or stacking 俦 A _ · Select Fengqi ... The stacking system is an electrochromic window (electr〇_ chromic window) 〇7. A display device comprising:-a first substrate including-an array of pixel electrodes:-a second substrate including-an opposing electrode: and-a layer between the first and the second Between the substrates: the first substrate contains a layer of high reflectivity. 1 The layer of high reflectivity is a metal alloy. The metal alloy includes ··, · " • silver; Percent 'where the second element of S is selected from the group consisting of copper, manganese, magnesium, beryllium, zinc, cadmium, chromium, copper, gallium, butterfly, and tin containing an oxide layer "The display device of item 7, wherein Display device No. 8. According to the scope of the patent application, metal alloys include: silver; the second element to 10 atomic percent is in the group consisting of: lithium, zirconium, silicon, aluminum, indium, titanium nickel, molybdenum, and germanium ; Wherein the range is from 0.1 atomic percent to the orbital range is 0.1 The percentage of this fen 'is that the third metal is selected from the group consisting of Xia Shixi, Xu, Shao, Qin, Niu I, Zuoshi 5.0 atomic percent copper; and 5.0 atomic percent third metal column metal. Wrong 'Money, Classic, Zinc' 1226499] July 11, 2003 Corrected the replacement page, Shi Peng, and Wrong. 9. The display device according to item 7 or 8 of the scope of patent application, wherein the display component is a reflective liquid crystal display. 10. A window coating comprising: a transparent substrate; and a thin film stack including a layer of a silver alloy film including: silver; and a second in the range of 0.1 atomic percent to 1.0 atomic percent Element, where the second element is selected from the group consisting of the following elements: gold, ji, yi, copper, zinc, qian'shao, qin, li, lock, mang, shi xi, Fault, grade, tin, indium, copper, cobalt, iron, copper, gallium, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, aluminum, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, but are not included in the window coating. 11. (Deleted) The window coating according to item 10 of the patent application scope, which includes: the thin film silver alloy; a dielectric layer; and an oxide layer, wherein the thin film silver alloy is interposed between the dielectric layer and Between the oxide layers. 12. A photovoltaic stack comprising: a transparent substrate; and a transparent and conductive stack, the stack comprising: a layer of transparent conductive oxide; and: a metal alloy layer, the metal alloy comprising: silver ; And 31 1226499 _ • 'July 11, 103. Corrected the second element in the replacement page range from 0.1 atomic percent to 10 atomic percent, wherein the second element is selected from the group consisting of Middle: copper, le, iron, gold, brocade, warp, zinc, record, bowl ', chromium, record, gallium, shed, I, chain, Qin, Zhen, Meng, Shixi, Germanium, bond, tin, indium The limitation is that the transparent oxide layer is not an oxide formed by indium oxide and at least one metal oxide selected from the group consisting of krypton, knot, group, sharp, bell, decoration, button, germanium, yarn, and network. Floor. 13. The photovoltaic stack according to item 1, 2'3, 4, or 12 of the scope of the patent application, wherein the photovoltaic module is incorporated in a solar cell. 14. The photovoltaic stack according to item 1, 2, 3, 4, or 12 of the scope of the patent application, wherein the photovoltaic module is in a polymer. Light emitting diode. 15. The photovoltaic stack according to item 1, 2, 3 _ .., 4, or 12 of the scope of patent application, wherein the photovoltaic module or stack is tied in a flat-panel display. 16. The photovoltaic stack according to item 1, 2 'Υ :, 4, or 12 of the scope of the patent application, wherein the photovoltaic module or stack is tied in an electrochromic window. Pick up, schema: as next page 32

TW92128677A 2003-05-08 2003-10-16 Silver alloy thin film reflector and transparent electrical conductor TWI226499B (en)

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US10/431,695 US20030227250A1 (en) 2002-05-08 2003-05-08 Silver alloy thin film reflector and transparent electrical conductor

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7915815B2 (en) 2005-03-11 2011-03-29 Novaled Ag Transparent light-emitting component
TWI485270B (en) * 2013-01-23 2015-05-21 Mitsubishi Materials Corp Sputtering target for forming ag alloy film, ag alloy film, ag alloy reflecting film, ag alloy conducting film, and ag alloy semitransmitting film

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI507712B (en) * 2013-10-23 2015-11-11 Licon Technologies Inc The structure of an electrochromic vehicle rear view mirror body and its manufacturing method
CN113444914A (en) * 2021-07-19 2021-09-28 福建阿石创新材料股份有限公司 Silver-based alloy and preparation method thereof, silver alloy composite film and application thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7915815B2 (en) 2005-03-11 2011-03-29 Novaled Ag Transparent light-emitting component
TWI485270B (en) * 2013-01-23 2015-05-21 Mitsubishi Materials Corp Sputtering target for forming ag alloy film, ag alloy film, ag alloy reflecting film, ag alloy conducting film, and ag alloy semitransmitting film

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