TWI223641B - Method and apparatus for reducing toxic gas emission - Google Patents

Abstract

A method for reducing toxic gas emission is provided. First, a hollow housing is provided. A circulation piping is provided connecting with the hollow housing to form a close loop. A filter and the source of the toxic gas are provided inside the housing and a fan is provided to force the air convection in the close loop through the source of the toxic gas and the filter layer sequentially.

Description

1223641 V. Description of the invention (1) Technical field to which the invention belongs The present invention relates to a device for reducing the escape of toxic gas, and particularly to a device for cleaning semiconductor devices, which can filter the toxic gas generated by the device and avoid Device for escape of poison gas. Prior art In the conventional semiconductor manufacturing process, in order to maintain process stability, semiconductor manufacturing equipment must usually implement preventive maintenance (Preventive Maintenance and Preventive Maintenance) on a regular basis. By using the metal etcher and metal etchers, the metal must be cleaned and maintained to ensure its normal function, and improve the implementation rate. However, because good products (such as gas ions) produced by a often exist in semiconductor manufacturing equipment, when performing disassembly and cleaning (wetc 1 ean residual wet cleaning (we tc 1 ean)) or spots * In the embodiment, the residue of the above process will easily form toxic / air contact conditions (HC1). In this way, not only does the production line personnel ^ produce gas ^ (such as hydrogenated gas due to hydrogenated gas (HC1) and other toxic gases have a corrosive surface, adverse effects, and the products or components in the damage. 'May also target the process To know the way to clean the semiconductor process equipment, you must first perform the cleaning and maintenance in the equipment ^ In general, first move to a clean room to remove the A piece, and then only >> ": Refer to Figure 1. This figure shows a conventional method to prevent the escape of poisonous gas. Please refer to the figure. In order to avoid the toxic gas from escaping to the air during the schematic process of dismantling the cracks by the process equipment Part P is in transit, so part P must be placed

0503-9264TW (Nl); tsmc2002-0894; tkl in.ptd 1223641 V. Description of the invention (2) Placed on the device for preventing the escape of poisonous gas; such as the device 1 has a plurality of partitions 12, which are known to prevent the escape of poisonous gas 12 on. In addition, in order to avoid toxic gas, the component P is placed on the partition plate I. The barrier cover 11 covers the component P and is released into the air ', so it will come into contact with it. Among them, it is known to prevent poisonous gas from escaping from the outside air 13 so that the operator can further set the parts to handle wheels. ^ To, Yuesen Zhizhong did further. However, it is customary to prevent the escape of poisonous gas to cover parts 1>. In fact, it is installed in A method 4 and covered with a barrier cover η. Over time, it often leads to yV;% The external air / isolation, due to the rise, not only seriously affects the operator's pollution on the toxic milk concentration. At the same time, Wang caused the working environment to be cleaned. Ί: η:? 'If the parts p can be disassembled and transported to filtration to reduce the toxic gas containing denier ::: inside', the cycle operator will be exposed to danger; With ίdegree, you can largely avoid the filtering of the :::: ίϊ formula as disclosed in US Patent 6, ° 79 ,. And, for example, the United States: = 生 76 强 3: ^ Do not disclose an indoor air-conditioning system and one: and m, sub-devices, which drive the fan or through; pressure), can produce a strong μ 5, ^ negative to regulate the gas Temperature or force. (2) forced convection) Generally need to occupy the magic volume. 1 = ^ 34 intake / exhaust equipment. 丨 J must cooperate with stable intake / exhaust control. Page 7 0503-9264TW (Nl); tsmc2002.0894 tklin.ptd 1223641 V. Description of the invention (3) System, so the cost is high in view of the conventional device for preventing gas escape 1 ^ is to reduce the missing production points of semiconductor device parts after disassembly The gas in the closed circuit is strong, and lice > can be dyed, and the method can effectively reduce the semiconductor device parts to be dismantled, filter the gas concentration cyclically, and avoid the toxic gas purge and the safety of the toxic operators. Disturb the body to the outside air to ensure that the invention as described in the previous article provides a method for preventing the escape of poisonous gas to prevent the poisoning of the semiconductor device. The method of preventing the escape of poisonous gas is connected to the middle filter layer. Hollow shell. Promote a closed loop pollution, make the air filter toxic, and the empty shell provides a pipeline. Provide a toxic gas through the body convection, including the first cavity, the upper is located between the middle. The body is located in the body, a hollow housing is mentioned, the aforementioned air-permeable barrier is located in the hollow body, and the gas flows sequentially through the gas while avoiding toxicity. The invention further provides a mesh partition, a second cavity, and the housing has an interior. The aforementioned filter layer is located on the screen and the top part includes 'therefore' including the empty housing in the middle. Strong body fouling, gas escape, prevention of poisoning, air-permeable partitions, and a top partition with air-permeable partitions. The front and a bottom plate are located at the bottom and the bottom. After the second disassembly, the following steps of the present invention are performed with the hollow shell to make a closed back dyeing source and disperse. The plate of air effusion x _ passing fan and one. The aforementioned top and between. The front cavity must be located in order to provide an empty shell-shaped part. Let the air in the road pass through the data layer, the device, the data layer, and a cavity. Its mesh partition, mesh partition, said first cavity filter layer and

Page 8 11 ^ 0503-9264TWF (Nl); tsmc2002-0894; tklin.ptd 1223641 5. Explanation of the invention (4). Between you. The pipeline is connected to the first cavity and the second cavity, and forms a closed circuit with the inside of the casing. The fan is disposed inside the pipe, and drives air to flow through the first cavity, the air-permeable partition, the mesh partition, the filter layer, and the second cavity in order. Implementation Modes The preferred embodiments of the present invention will be described in conjunction with the drawings. Compared with the prior art, the present invention belongs to a self-contained exhaust system. The toxic gas generated by the process equipment parts is circulated and filtered through a closed gas circuit. First, please refer to FIG. 2, which is a schematic diagram showing the toxic gas emission reduction device of the present invention. As shown in the figure, a hollow casing 2 has a top 201 and a bottom 202, and a breathable partition 4, a mesh partition 5 and a filter layer 6 are respectively disposed inside. The filtering layer 6 is made of activated carbon (Activated Carbon) as a material to filter the above-mentioned right main (such as hydrogen chloride HC1). First, in the second figure, the air-permeable partition 4 is a cavity 21 between the top 2 and the top 2 of the casing 2, and a cavity forms an outer net between the mesh-shaped partition 5 and the air-permeable partition 4. A cavity 23 is formed between the partition 5 and the filter layer 6, and a cavity 24 is formed between the layer 6 and the bottom 202 of the casing 2. Among them, the outside of the body 2 is further connected to the cavity 21 and the hollow shell through a pipeline 7 respectively. Through the pipeline 7, the cavity can be closed to the cavity 21, 22, 23 κ through the pipeline 7 and the toxic gas can be closed. No leakage to the atmosphere. $ 成 一 密 In addition, there is a movable door 3 on the side of the casing 2

0503-9264IW (Nl); t smc2002-0894; tkl in. Ptd 1223641

3 The component P can be placed on the aforementioned mesh partition 5, wherein the movable door 3 has a rubber magnet 31 (Rubber Magnet) around it. When the swing door 3 is closed, the rubber magnet 31 forms a seal with the casing 2 In order to prevent soil and toxic gases from escaping 'into the external atmosphere, pollution is formed. As mentioned above, the present invention performs cyclic filtration of the toxic gas generated by the process equipment part P by forming a closed gas circuit. In addition, a fan 81 is not provided in the pipe 7 to drive the gas flow in the closed circuit (in the direction shown by the arrow in Fig. 2). First, the gas is driven by the fan 81 and enters the cavity 21 through the pipeline 7. Among them, in order to allow the gas to diffuse evenly down to reach the ventilating partition 4, the cavity 2 L has a funnel-like structure that converges from bottom to top . Please refer to Fig. 3a again, which shows the intention of the air-permeable partition 4 in the present invention. As shown in the figure, the material of the aforementioned air-permeable partition 4 may be stainless steel or Teflon, and is provided with a plurality of uniformly distributed openings 40, wherein the above-mentioned openings are circular, When the gas flows through the air-permeable partition 4, it can be evenly introduced into the lower cavity 22 through the above-mentioned opening 40.

As shown in FIG. 2, the airflow in the cavity 22 moves from top to bottom, so the toxic gas generating source (ie, the process part p) located on the mesh partition 5 is a toxic substance that can be driven out by the airflow. , Through the mesh partition; and reach the cavity 23 below. The mesh partition 5 may be made of stainless steel or Teflon. As shown in the figure, the mesh partition 5 is provided with a plurality of openings 50 to allow airflow. Can be passed quickly.

1223641 V. Description of the invention (6) ---- Then, after the air stream with toxic substances passes through the cavity 23, it can be filtered through a filter layer 6, wherein the material of the filter layer 6 is activated carbon. Can effectively absorb pollutants and toxic substances in the gas, thereby generating a clean airflow to the body 24 below the filter layer 6 〇 As shown in Figure 2, the cavity 24 presents a downwardly converging bucket-like structure Because the lower fluid channel is narrower, it can accelerate the airflow to enter the official road 7, and at the same time, a low-pressure region can be naturally generated in the gas flow field. In this way, a narrower channel below the cavity 24 can generate a drawing force in the flow field and drive the toxic gas above to accelerate through the filtering layer 6 above to effectively perform filtration. As described above, after the clean airflow enters the pipeline 7 through the cavity 24, it can still be driven by the fan 81 to enter the upper cavity, and thereby a gas cycle can be formed. In addition, when the aforementioned closed circuit needs to be ventilated, a venting port 82 (exhaust, port) located on the side of the pipe 7 can be connected to an external exhaust system (丨 exhaust system) fixed outside To perform a ventilation action (not shown), a control valve 83 is provided directly at the ventilation port 82. When the control valve 83 is closed, a closed circuit is formed. When the control valve 83 is opened, it can be implemented through the ventilation port 82. Breathe. However, in order to make the toxic gas emission reducing device of the present invention have mobility, a plurality of wheels 9 are further provided on the bottom side of the body 2 so that it can be easily moved to a clean room for further cleaning of the part p. . In addition, as shown in another preferred embodiment of FIG. 4, the cavity of the present invention can also be separated by a plurality of mesh partitions 5 and side walls to form a complex 1223641. 5. Description of the invention (7 ) Several compartments so that more parts p can be accommodated. To sum up, the present invention generates convection in the gas-in-closed circuit of the tube, and the second and second winds are set to ': to avoid pollution of the working environment. In addition, the safety and air-avoidance control system is not only simple in construction, but also easy to use and operate: it has the advantages of low cost and high practicability. For the sake of convenience, although the present invention has been disclosed in the preferred embodiment above, and the present invention is not limited, any familiarity with this item "2" is not used for gods and concubines. What is defined in the scope of the patent application shall prevail.

1223641 Brief description of the drawings. Figure 1 is a schematic diagram of a conventional device for preventing the escape of poisonous gas; Figure 2 is a schematic diagram of the device for reducing the escape of poisonous gas of the present invention; Figure 3a is a schematic diagram of a ventilating partition in the present invention Figure 3b is a schematic diagram showing a mesh separator in the present invention; Figure 4 is a schematic diagram showing another preferred embodiment of the present invention. DESCRIPTION OF SYMBOLS 1 ~ Device for preventing escape of poisonous gas; 11 ~ Barrier cover; 13 ~ Wheel; 2 (Π ~ Top; 2 Bu 22 > 23 31 ~ Rubber magnetic 4 0 ~ Opening hole 5 0 ~ Opening hole 7 ~ Pipeline; 8 2 ~ connecting part 9 ~ wheels; 1 2 ~ partition; 2 ~ shell; 24 ~ cavity 2 0 2 ~ bottom; 3 ~ movable door; 4 ~ breathable partition 5 ~ mesh partition 6 ~ filter layer 8 1 to fan 8 3 to control valve P to parts.

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Claims (1)

1223641 VI. Scope of patent application 1. A toxic gas emission reduction device suitable for a toxic gas generation source, including: I a hollow casing with a bottom; a mesh partition located inside the hollow casing Where the toxic gas generation source is located on the mesh partition; a filter layer is located between the mesh partition and the bottom; a pipeline is connected to the hollow casing and is connected to the hollow casing A closed loop is formed inside; and a fan 'set inside the pipeline' drives gas to flow through the mesh partition and the filter layer in sequence. II 2. The toxic gas emission reducing device described in item 1 of the scope of patent application, further comprising a plurality of wheels, which are located on the bottom side of the casing. 3. The toxic gas emission reducing device as described in item 1 of the scope of patent application, wherein the material of the mesh partition is stainless steel. 4. The toxic gas emission reducing device described in item 1 of the scope of patent application, wherein the material of the mesh partition is Teflon. 5. The toxic gas emission reducing device described in item 1 of the scope of patent application, wherein the material of the filter layer is activated carbon. 6. The toxic gas emission reduction device described in item 1 of the scope of patent application, wherein the pipeline has a vent and a control valve, and the control valve position Φ is at the vent. When the control valve is opened At that time, the pipeline is ventilated through the vent. 7. The toxic gas emission reduction device described in item 1 of the scope of patent application, wherein the casing further has a movable door located on the side of the casing. 0503-9264TWF (Nl); t smc2002-0894; tklin.ptd Page 14 1223641-~ ----, 'Applicable to the scope of patent application, ^ t Reduction of toxic gas in bulk as described in item 7 of the scope of patent application The closed magnet now includes an adhesive magnet, which is arranged around the movable door. When the movable bucket is closed, the adhesive magnet forms a seal with the casing. 9. Two types of toxic gas emission reduction devices are suitable for one gas production king / seat, including:: hollow shell 'has-top and-bottom; mesh partition' is located in the hollow body and the source is located in the mesh On the partition; a ventilating partition with the responsibility, located on the top 4 as soon as it spreads, you think between 4 z 4 and the mesh partition; the pass / consideration layer is located on the mesh ^ ^ ^ Between the plate and the bottom; a first-card, to recognize-^ between the plate and the top;! A cavity is located at the door of the filter layer and the bottom neighbor. An official road, connecting the first A closed circuit is formed inside the cavity between the cavity opening x and the p; and the second cavity, and a fan, are arranged in a cavity in the pipeline, the air-permeable partition plate, and the mesh makeup dynamic gas. Flow through the first cavity in sequence. The baffle, the filter layer, and the second item 10. As in item 9 of the scope of the patent application, the first cavity converges in the direction of a funnel to reduce the escape of toxic gases. '、 状' From the air-permeable partition to the top 11. As in item 9 of the scope of the patent application, the second cavity is converged in a funnel ^ to reduce the escape direction of toxic gases. Large ’from the filter layer to the bottom 1 2 · As described in the scope of patent application No. 9, the reduction of toxic gas escape bulk 0503-9264TWF (Nl); tsmc2002-0894; tklin.ptd No. 15 1223641 6. Scope of patent application, including multiple wheels, located on the bottom side of the casing. 13. The toxic gas emission reducing belt as described in item 9 of the scope of the patent application, wherein the material of the air-permeable separator is stainless steel. 14. Reducing the toxic gas escape bulk as described in item 9 of the scope of the patent application, wherein the material of the air-permeable partition is Teflon. 1 5 · Reduce the toxic gas escape bulk as described in item 9 of the scope of the patent application, where the mesh separator is made of stainless steel. 1 6 · Reducing the toxic gas escape bulk as described in item 9 of the scope of the patent application, wherein the mesh separator is made of Teflon. 1 7 · Reduce the toxic gas escape bulk as described in item 9 of the scope of the patent application, where the material of the filter layer is active breaker. 1 8 · Reduction of toxic gas escape bulk as described in item 9 of the scope of patent application-where the pipeline has an air vent and a tritium control valve, which is located at the air vent when the control valve is open ' 4 Guanlu performs ventilation through this ventilation port. 19 · The toxic gas emission reducing device according to item 9 of the scope of the patent application, wherein the air-permeable partition has a plurality of openings' uniformly distributed on the air-permeable partition. 20 · The toxic gas emission reduction device described in item 19 of the scope of patent application, wherein the openings are circular. 2 1 · The toxic gas emission reducing device as described in item 9 of the scope of patent application, wherein the casing further has a movable door located on the side of the casing. 2 2 · The toxic gas emission reduction device as described in item 21 of the scope of patent application, further including a magnetic magnet, which is installed around the movable door of the town. When the movable door is placed 0503-9264TWF (Nl); tsmc2002-0894; tklin.ptd 16th tribute 1 ^ 3641 The method is applicable to a case where the toxic gas is closed with the casing when a toxic gas is closed. 23 · —A kind of source for reducing the escape of toxic gas, including the following steps: providing a hollow shell; forming a pipeline with the hollow shell, connecting the hollow shell, a closed circuit; & A pass-through layer is located inside the hollow shell; The toxic gas generation source is located inside the hollow casing; and the main force convection of the gas in the closed circuit, so that the gas sequentially flows through the mother rolling body generation source and the filter layer. 24. The method for reducing toxic gas escape according to item 23 of the scope of the patent application, wherein the closed circuit has a fan / fan to drive gas convection in the closed circuit. 0503-9264TW (Nl); tsmc2002-0894; tkl in.ptd p. 17