TWI221910B - Apparatus for inspecting display, method for inspecting display and method for inspecting parasitic capacity - Google Patents

Abstract

Disclosed is an apparatus for inspecting display, method for inspecting display and method for inspecting parasitic capacity to provide a technology effectuating accurate evaluation of a ratio of parasitic capacity concomitant with an individual pixel. An inspection apparatus includes a signal supplier 4 being controlled by a control unit 8 to output a voltage signal to be supplied to a pixel electrode, a light intensity detector 5 capable of detecting light intensity in a position corresponding to the relevant pixel electrode on a liquid crystal cell substrate 2, and a computer 31 including a CPU for obtaining an amount of variation of pixel voltage based on an amount of variation of the light intensity in the corresponding portion of the pixel electrode, which is detected by the light intensity detector 5 in the case where the switching element for controlling supply of the voltage signal to the pixel electrode is shifted from an ON state to an OFF state. The apparatus is designed to obtain a ratio of parasitic capacity of the pixel with respect to total capacity thereof from the amount of variation of the pixel voltage obtained by the computer 31.

Description

1221910 A7 B7 5. Description of the invention (1 Background of the invention The present invention relates to a method for detecting an indicator and a technique for inspecting parasitics and a technique for detecting a ratio of a displayed total capacitance. A device for inspecting a display, The method for checking the valley of the display power, in particular, the storage capacity of the pixel attached to the present invention is relatively well known. In a display device such as a liquid crystal display, which is not interesting, the pixel attached is The capacitance ratio of the electric valley device and the parasitic capacitor is the factor that determines the display characteristics: the factor. The accurately measured capacitance ratio brings very effective information, which can be used to optimize the panel design or cause and effect analysis of display defects. However, this type of capacitor Or parasitic capacitors usually have. ”Electric valleys below pF. Therefore, when a probe or the like comes into contact with it for measurement, such contact can induce changes in capacity, which hinders accurate measurement. For this reason, today , The total capacitance of capacitors and parasitic capacitors have been detected by changing various parameters, and theoretical and empirical methods have been used based on such detection results. To evaluate the parasitic capacitance and ratio. However, since the conventional inspection method only detects the sum of the capacitances of the capacitor and the parasitic capacitor, it is impossible to actually determine which of the capacitor and the parasitic capacitor would actually cause display defects. In addition, in recent years In the past, an image display method that actively uses parasitic capacitors has been adopted. "In this context, accurate evaluation of parasitic capacitance values has become a necessary condition for adopting such display methods. SUMMARY OF THE INVENTION The present invention has considered such technical problems, and the present invention The main purpose is to provide a technology that accurately evaluates the ratio of individual pixels to the accompanying parasitic capacitance. -5- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 1221910 A7 ________ Β7_ V. Description of the invention (2) In addition, the object of the present invention is to provide a technique for separately evaluating a pixel with various parasitic capacitance ratios. In view of the foregoing object, the present invention provides a pixel electrode and a voltage signal for controlling a voltage signal. A display inspection device for a switch supplied to the pixel electrode, the display The device inspection device includes: a signal output for outputting a voltage signal to be supplied to the pixel electrode; and a light intensity detector capable of detecting a position corresponding to the pixel electrode on the display Light intensity; and a pixel voltage detection device for obtaining a change amount of image de-voltage according to a change amount of the light intensity when the switch is changed from an ON state to an OFF state. The relationship between the pixel voltage and its corresponding light intensity when the switch is switched to the ON state will be investigated in advance. Therefore, when the switch is switched from the ON state to the OFF state, The change amount of the pixel voltage can be obtained according to the change amount of the light intensity under the event. In addition, 'according to the law of conservation of charge, when the switch transitions to the OFF state', the change in the pixel voltage can be attributed to the pixel electrode The accompanying parasitic capacitance 'so the ratio of the parasitic capacitance to the total capacitance can be calculated from the change amount of the pixel voltage. Please note that displays as described in this article include non-light-emitting displays or parts of light-emitting displays, such as substrate products that construct display screens. In addition, the display includes a liquid crystal display, a light emitting diode, a plasma display, an electroluminescence display, an organic electroluminescence display, and other hold-type displays for holding a voltage on a pixel. In addition, in this article, the open relationship is composed of a switching element, and is equipped with a scanning signal supplier for supplying a -6 for controlling the switching element-This paper size applies the Chinese National Standard (CNS) A4 specification ( 210X 297 mm) 1221910 A7

Off) signal is composed of scanning signals, and can be at the level of 0ff (off can be __ miscellaneous level, so in ⑽ (closed) state 2 ... fine adjustment of the voltage level of the 蔹 scan signal to change the The voltage supplied to a parasitic capacitance between a gate and a source. In general, the capacitance of the parasitic capacitance formed by sandwiching an insulating film in between will change according to the supplied voltage. Therefore, by adopting this kind of construction, the characteristics of the gate-source parasitic capacitance can be controlled according to the supplied voltage. Please note that the OFF (off) state proposed in this article is not necessarily completely FF (off). In addition, 疋 also contains a low-current region where very low current flows. In addition, in this case, if the construction of the scanning signal supplier can adjust the voltage to be supplied to the scanning line provided around the pixel electrode (which will The scanning signal is supplied to the pixel electrode), it can prevent the influence of the electric field of other scanning lines provided around the pixel electrode. In addition, in this construction, if the scanning line configured adjacent to the pixel electrode is constructed and stored, The capacity electrode can change the voltage supplied to the storage capacity by controlling the voltage of the relevant scanning line. In this case, by measuring the light intensity of the display, the storage can be calculated according to the principle described above The ratio of the capacitance to the total capacitance. In addition, if the signal output can control the ON / OFF operation of the voltage signal, the amount of parasitic valley between the signal output (signal line) and the pixel electrode The ratio to the total capacitance can also be calculated. In addition, 'If the signal output can adjust the voltage to be supplied to the signal lines provided around the pixel electrode (where a voltage signal will be supplied to these signal lines), you can control the The voltage supplied to the adjacent signal lines, so that the paper size can be applied to the Chinese National Standard (CNS) A4 specification (210X297 mm). Description of the invention (4) The influence of the electric field of the adjacent signal lines with a certain number of pixels is minimized In addition, the ratio of the parasitic capacitance between the adjacent signal line and the pixel electrode can be calculated. In addition, the present invention can also be understood as a display Indicator inspection device, which is designed to supply voltage to a pixel electrode to present _ a given voltage level at a position corresponding to the pixel's I pole. The display inspection device includes a voltage-luminescence relationship measurement Section for measuring the relationship between when such pixel voltage is a fixed value, the pixel voltage and the luminosity outside the display range corresponding to the position of the pixel electrode; a voltage change measurement section for With reference to the detection result in the voltage-luminescence relationship measurement section, a change in the pixel voltage of the pixel electrode is calculated from a given voltage based on a change in luminescence corresponding to the position of the pixel electrode, where when using the A luminous change occurs when the pixel electrode is charged at a given voltage; and a parasitic capacitance calculation section is used to calculate a parasitic capacitance accompanying a pixel according to the change amount. In this case, according to the parasitic capacitance As a result of the capacity calculation, a direct value of the parasitic capacitance or a ratio of the parasitic capacitance to the total capacitance can be calculated. In addition, in this construction, if the voltage-luminescence relationship measurement section is designed to measure luminosity separately, if a plurality of different voltages are supplied to the pixel electrode to find a voltage between the voltage and the When the relationship between the luminosity is linear, the relationship between the pixel electrode and the luminosity can be accurately obtained without measurement error. Please note that in this case, the pixel electrode and the luminescence The voltage / luminosity relationship measurement section stores the pixel voltage relative to the luminosity to the storage area -8-This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm)

Segment, so this voltage change measures the relationship between the optical properties of the segments. It is easy to refer to the voltage between the voltage and the voltage source. For supplying a given voltage to the pixel electrode system, turn on 2 ', and a -scanning signal supplier is provided to supply a t number to control the switching element. Check (on / off) operation. In this case, the AJ3 Scanner No. supplier is designed to form the scan signal into a signal composed of a plurality of mutually different voltages, in which the voltage range is between the voltage of a piece = a low and a voltage of 0N (on) The switch element is changed to a voltage of 0 FF (off) state, and then the complex voltage can be supplied to the gate-source parasitic capacitance, so that the gate-source parasitic capacitance can be carefully investigated. Capacity characteristics. Especially in this construction, if the parasitic capacitance calculation section is designed, = according to the linear part obtained from the relationship between the plurality of voltages between the scan signal and the pixel electrode change from a given voltage To calculate the gate of the switching element. The ratio of the parasitic capacitance to the total capacitance of the pixel 'is then obtained by excluding the effect of changes in the liquid crystal permittivity (equivalent to the change in the supplied voltage). The ratio of the total capacitance is obtained from the relationship between the gate voltage and the pixel electrode voltage change. In addition, the present invention can also be understood as a method for inspecting a display. The method includes the following steps: (A ) Investigate the relationship between the voltage supplied to-the pixel electrode-the luminosity of a part in the display, the part corresponding to the pixel electrode; (B) charge the pixel electrode with a given voltage; (C) detect Measure the luminosity of the display, which corresponds to the pixel electrode charged in step -9-1221910 A7 B7 5. Invention description (6 step (B); The relationship between the voltages is evaluated from the luminescence detected in step (C) to evaluate the actual voltage of the pixel electrode. The relationship is learned in the step; and from a given value supplied in step (B) The voltage difference between the voltage and the voltage evaluated in step (D) to evaluate the ratio of the parasitic capacitance attached to a pixel to the total capacitance of the pixel. In this case, step (B) can be performed before the step. And (C). In addition, if the method is designed to process the judgment of the pixel electrode charged in the step according to the ON / OFF operation of a switching element, wherein the switching element is The scanning signal is controlled by a plurality of rectangular pulse waves with different levels, and then the characteristic change of the gate-source parasitic capacitance can be investigated, which corresponds to the supply voltage. In this case, a The waveform formed by the quasi-gradually changing rectangular pulse wave array is used as the scanning signal, so it is easy to investigate the change in the characteristics of the gate-source parasitic capacitance, which corresponds to the supply voltage. In addition, this The invention can also be understood as a method for checking the parasitic capacitance. 'The parasitic capacitance is between a pixel electrode arranged in a display panel and a scanning line and a signal line arranged around the pixel electrode. Between any lines, the method includes: step (A), controlling the voltages to be supplied to the scanning line and the signal line in an independent manner, the scanning line and the signal line are arranged around the pixel electrode, and Control the voltage, and measure the change in luminescence in a part of the display corresponding to the pixel electrode; and step (B), investigate the existence of the pixel electrode and the scan 10- This paper size applies to China Standard (CNS) A4 size (210X 297 mm)

1221910 A7 ______B7 V. Description of the invention (7) The ratio of the parasitic capacitance to the total capacitance between the trace and any one of the signal lines. As described above, by independently changing the voltage of the wirings located around the pixel electrodes under inspection, it is possible to independently investigate the parasitic capacitances formed between the respective scan lines or signal lines and the pixel electrodes. In addition, if the method is designed so that step (B) performed after step (A) is repeated several times, then the parasitic capacitance ratio can be accurately obtained with changing measurement conditions. In addition, in the method for checking the parasitic capacitance, the ratio of the parasitic capacitance to the total capacitance between the pixel electrode and the signal line can be investigated in a state in which the pixel electrode is charged with a given voltage, The change in luminescence is measured with the voltage supplied to the signal line changed. In addition, in the case where the storage capacitance is formed between a portion of the pixel electrode and the other electrode, the ratio of the storage capacitance to the total capacitance can be investigated. This is done by charging the pixel electrode with a given voltage. In the state, a change in luminescence is measured while changing a voltage supplied to another electrode. Therefore, it is possible to accurately investigate the ratio of the non-parasitic capacitance portion to the total capacitance. In addition, 'in the method for checking the parasitic capacitance, the luminous change is measured when the voltage supplied to any line of the scanning line and the k-line is a fixed voltage' These scanning lines and these signal lines are not to be controlled The scan lines and signal lines of the supplied voltage, so this method can eliminate the negative effects of measurement. These effects can be attributed to the voltage of other scan lines or other signal lines. Simple illustration

Binding

% Specifications of this paper (_297 Gong Dong) 1221910 V. Description of the invention (8 In order to better understand the invention and its advantages, poem i will go into detail. The schematic diagram of the display device of a specific embodiment. Figure 2 shows the equivalent circuit diagram of the main part of the liquid crystal cell substrate to be inspected by the display inspection device shown in FIG. 1. FIG. 3 shows the inspection of the display shown in FIG. Block diagram of the detailed construction of the control unit in the device. Figure 4 shows the principle of the display inspection method of the present invention, which is a waveform diagram of an example of the signal supplied to the substrate of the liquid crystal unit. Figure 5 shows the principle of the display inspection method of the present invention. In the figure, the diagram includes a diagram (upper half) for presenting a change in transmitted light intensity in a portion associated with a corresponding pixel when the pixel electrode is charged, and a scanning signal and a display signal supplied in this case. Waveform diagram (bottom half). Figure 6 shows the procedure for measuring the relationship between pixel voltage and transmitted light intensity according to the display inspection method of the present invention. Flowchart. Fig. 7 shows the relationship between the pixel voltage (horizontal axis) and transmitted light voltage (ordinate axis) produced in step S9 of Fig. 6. Fig. 8 shows the graph produced in step S11 of Fig. 6. Schematic diagram of a data table used to represent the relationship between transmitted light voltage and pixel voltage. Figure 9 shows a flowchart of the method of the display inspection method of the present invention, which is used to calculate the pixel-associated parasitic capacitance or storage capacitance relative to The ratio of the total capacitance of the pixel. Figure 10 shows a diagram for explaining the details of the program shown in Figure 9, including -12 paper sizes applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). A data table presenting the measurement results of steps S17 and S19 (lower half); a diagram for presenting the relationship between transmitted light voltage and pixel voltage (upper left) used in step S22; and for presenting steps S23 to The diagram used in S25 is the relationship between the change in measurement conditions and the change in pixel voltage (upper right). Figure 11 shows the gate-source parasitic capacitance ratio measured according to the procedure shown in Figure 9. An example waveform of a signal supplied to the liquid crystal cell substrate is shown in FIG. 12. FIG. 12 shows a real waveform of the signal supplied to the liquid crystal cell substrate after the signal line-pixel electrode parasitic capacitance ratio is measured according to the procedure shown in FIG. Fig. 13 is a waveform diagram showing an example of a signal supplied to a liquid crystal cell substrate after measuring a storage capacitance ratio according to the procedure shown in Fig. 9. Fig. 14 shows a measurement of gate and source parasitics according to the procedure shown in Fig. 9. The waveform diagram of another example of the signal provided by the capacitor to the liquid crystal cell substrate. The preferred embodiment of the invention will be described in detail below according to the specific embodiment shown in the drawings. The principle construction diagram of the display of a specific embodiment of the present invention. A set 'display inspection device is used to (for example) inspect the LCD panel 2 of the constructed LCD: section, and the display inspects the arrangement. Including "to * 3 'can be used to place the liquid crystal cell substrate 2; signal supply (signal supply; signal output) 4' is used to supply voltage signals to the place ^ A7 B7 2. Description of the invention (10) The liquid crystal cell substrate 2 on the base 3; a light intensity detector 5 for measuring the light intensity on the liquid crystal cell substrate 2; a light source 6, which is provided opposite to the base 3 At the position of the liquid crystal cell substrate 2 which is symmetrical to the light intensity detector 5, the light source controller 7 is used to control the operation of the light source 6; and the control unit 8 is used to control the signal supply 4, and the light intensity is detected. The detection result of the detector 5 is input to the control unit. First, the liquid crystal cell substrate 2 to be inspected by the display inspection device 1 will be described. Fig. 2 shows a partial construction of an equivalent circuit of the liquid crystal cell substrate 2. As shown in FIG. 2, the liquid crystal cell substrate 2 includes a plurality of signal lines 10 and scan lines 丨 丨 (only a part of which is shown in the figure), which are used to form a matrix in a manner in which the sense and y directions cross each other. Arrangement; and a switching element (switch) 12 and a pixel electrode 13 which are arranged at intersections of the signal line 10 and the scanning line 〖丨. The switching element 12 is composed of a thin film transistor (tft) as a three-terminal device, and includes a source electrode 14, a gate electrode 15, and a drain electrode 16. In addition, the 'pixel electrode 13 is connected to the drain electrode 16. The pixel electrode 13 is composed of a display electrode 17 and a storage capacitor electrode 19, where the display electrode ^ is used to supply voltage to a liquid crystal material not shown in the figure, and the storage capacitor electrode 19 is used to construct The storage capacitances of the r-line 11 and the r-line 11 are connected to the display electrode 7 and the pixel electrode 13 adjacently (hereinafter, such an adjacent scanning line 11 is referred to as a "storage capacitance line 18"). The display electrode 17 is disposed opposite to a common electrode not shown in the drawing, and a liquid crystal layer (not shown) is disposed between the display electrode 17 and the common electrode, and the alignment films are respectively inserted in the media. In the liquid crystal layer and the display electrode 丨 -14-

1221910 A7 B7 V. Description of the invention (11 cells and between the liquid crystal layer and the common electrode. In the liquid crystal cell substrate 2 as described above, a voltage signal is supplied to the signal line 10. The voltage signal is transmitted through the switching element 12 It is supplied to the pixel electrode 13, where ON / OFF control of the switching element 12 is performed according to the scan signal Vgate supplied to the scan line 11, thereby supplying a given voltage to the display electrode 17. At this time, the A common signal voltage is supplied to a common electrode facing the display electrode 17, whereby a liquid crystal layer inversion (operation) occurs due to a potential difference between the common electrode and the display electrode 17. In a liquid crystal having a structure as described above, In the unit substrate 2, as described above, the "gate-source" parasitic capacitance Cgs is necessarily formed between the scan line u and the pixel electrode 13; and the "signal line-pixel electrode" parasitic capacitance Cis is necessarily formed Between the signal line 10 and the pixel electrode 13. Next, the signal supplier 4 of the display inspection device 1 will be described. As shown in FIG. 1, the 'signal supplier 4 includes: a signal generator 21; and a set of probes. This is composed of a probe for a common electrode (hereinafter referred to as a "common electrode probe") 22, a probe for a scan line (hereinafter referred to as a "scan line probe") 23, and a signal for Line probes (hereinafter referred to as r signal line probes) 24, these probes are connected in series to the signal generator 21. The k-number generator 21 is used to control the signal from the control unit $. To generate voltage signals to be supplied to the common electrode, scan line, and signal line 10 of the liquid crystal cell substrate 2. In addition, the electrode 22a of the common electrode probe 22 is also provided so that the liquid crystal cell substrate on the pedestal 3 can be connected at the same time 2 and a common voltage signal supplied from the signal generator 21 to the common electrode via the electrode 22a.

1221910

In addition, the scanning line probe 23 includes three electrodes 23a. These three electrodes 23a are set to connect three adjacent signal lines of the scanning lines 11 arranged on the liquid crystal cell substrate 2 installed on the pedestal 3, and the scanning signal Vgate generated by the signal generator 21 can be passed through the electrode 23a. Supply to these three scan lines u. Therefore, signals can be supplied to the scanning line u and its adjacent scanning line 11 (i.e., the storage capacity line 18) simultaneously via the scanning line probe 23. It is to be noted that the signal generator 21 is configured to individually supply the scanning signal Vgate to the three electrodes 23a of the scanning line probe 23. In addition, the scanning line probe 24 includes a total of six electrodes 24a. These six electrodes 24a are formed so as to simultaneously connect six adjacent signal lines of the scanning lines 10 arranged on the liquid crystal cell substrate 2 mounted on the pedestal 3, and the display generated by the signal generator 21 can be transmitted through the electrodes 24a. The signal vsig is supplied to these six scan lines 10. Note that the construction of the horn generator 21 can individually supply the display signal vsig to the six electrodes 24a. The scanning line probe 23 and the signal line probe 24 can be placed in order to connect their electrodes 23a and 24a to the installation. The expected scanning line 11 or the expected signal line 10 on the liquid crystal cell substrate 2 on the pedestal 3. Next, the light source 6 will be described. The light source 6 is disposed on the back surface of the liquid crystal cell substrate 2 so that the light emitted by the light source 6 passes through the liquid crystal cell substrate 2 and is reflected to the light intensity detector 5. Please note that a light shielding plate not shown in the figure or a spacer not shown in the figure is arranged near the liquid crystal cell substrate 2 between the light source 6 and the liquid crystal cell substrate 2 in order to prevent the light source 6 from irradiating pixels not to be measured Pixels. Please further note that when the liquid crystal cell substrate 2 to be inspected is of a reflective type-16- This paper size applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm) 1221910 A7 ___________B7 V. Description of the invention (13) The light source 6 is arranged on the front surface of the liquid crystal cell substrate 2 (that is, on the same surface as the light intensity detector 5). When the light emission type is to be checked, the light source 6 does not necessarily need to be arranged. Next, the light intensity detector 5 will be described. As shown in FIG. 1, the light intensity detector 5 includes a field confirmation telescope 26, a relay lens 1 27, a limit mask 28, and a photomultiplier tube 29. In addition, the light intensity detector 5 is constructed in such a manner that it can detect the light intensity from the light source 6 penetrating one or several pixels in a given position in the liquid crystal cell substrate 2 and can convert the detected value This is the voltage to be output to the control unit 8. Here, instead of the light multiplier tube 29, a photo tube, a photodiode, a photo crystal, or the like may be used. Next, the control unit 8 will be described. As shown in FIG. 1, the control unit 8 includes a computer 31, an RS232C port 32 and an A / D converter (ADC) circuit board 33. As shown in FIG. 3, the computer 31 includes a CPU (pixel voltage change detection device) 34 and a storage section 35. As shown in FIG. 3, the CPU 34 includes a voltage-luminescence relationship measurement section 36, a voltage change measurement section 37, and a parasitic capacitance calculation section 38. The voltage-luminescence relationship measurement section 36 can be constructed by The RS232C port 32 outputs a control signal for controlling the signal generator 21 so as to output a desired voltage signal from the signal generator 21 to the scanning line 11, the signal line 10, and the common electrode. In addition, in this case, the voltage-luminescence relationship measurement section 36 is designed to supply the voltage output from the light intensity detector 5 to the A / D conversion in the A / D converter circuit board 33. The obtained digital signal output -17- This paper size applies to China National Standard (CNS) A4 specification (210X 297 mm) 1221910

Enter the voltage-luminescence relationship measurement section 36. In addition, as described below, the voltage-luminescence relationship measurement section 36 is constructed so that the voltage (pixel voltage) of the display signal Vsig supplied to the signal line ι0 and the light output from the a / d converter circuit board 33 Intensity of digital signals is correlated, and such relationships can be stored as a table into the storage section 35. Similarly, the construction of the voltage change measurement section 37 can output a control signal for controlling the signal generator 21 via the ruler 3232 (: connection 槔 32) so as to output a desired voltage signal from the signal generator 21 to the scanning line u, The signal line 10 and the common electrode. In addition, the voltage change measurement section 37 is designed to convert the voltage output from the light intensity detector 5 into a digital signal in the A / D converter circuit board 33 and input the converted signal. In addition, as described below, the 'voltage change measurement section 37 is structured so as to be able to ················ the case of electrically charging the pixel electrode 13 according to the scanning signal vgate outputted from the signal generator 21 to the scanning line 11 , Detecting the light intensity (luminescence) of a portion corresponding to the pixel electrode 13 on the liquid crystal cell substrate 2 according to the output of the light intensity detector 5; and using such light intensity changes to calculate the light intensity on the pixel electrode 13 How the voltage changes. According to the calculation result, the voltage change measurement section 37 is designed to use a data table stored in the storage section 35 on the relationship between the pixel voltage and the light intensity. The parasitic capacitance calculation section 38 is designed to treat the pixel electrode change calculated in the voltage change measurement section 37 as the parasitic capacitance attribute accompanying the pixel. Therefore, it can be determined by using a predetermined formula as described below. Calculate the capacitance ratio of the pixel-associated parasitic capacitance to the total capacitance of the pixel. Next, the original description of the inspection method by using the display inspection device 1-18-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Staple

1221910 A7

Management. As shown in FIG. 2, the display inspection device inspects the gate-source parasitic capacitance Cgs and signal line-pixel electrode parasitic capacitance Cis parasitic on the pixel electrode 13 of the liquid crystal cell substrate 2 and the formed storage capacitance. Now: Suppose that the scan signal Vgate, the display signal, ..., and the compensation drive signal Vs shown in Fig. 4 are simultaneously supplied to the scan line 丨, the signal line 10, and the storage capacitor line 18, respectively. Here, the scanning signal Vgate, the display signal Vsig, and the compensation driving signal Vs are all rectangular pulse waves. The scan signal Vgate is designed as a signal composed of a voltage 乂 §1 for switching the switching element 12 to the ON state and a voltage vg3 for switching the switching element 12 to the 0FF state. In addition, the compensation driving signal Vs is composed of a voltage Vg3 and other voltages Vg2 lower than the voltage Vg3, and the display signal Vsig is designed by a voltage Vgl for converting the switching element 12 to an ON state and a voltage to be supplied to The signal composed of the target voltage Vsl of the pixel electrode 13 and the voltage Vs2 for turning the pixel electrode 13 to the OFF state ~ When the voltage Vgl is supplied to the switching element 12 via the scanning line 11, the switching element 12 is switched To the ON state, thereby charging the pixel electrode 13 to the target voltage ysi of the display signal Vsig which is simultaneously supplied to the signal line 10. After that, when the scan signal Vgate drops from the voltage Vgl to the voltage Vg3, the switching element 12 is switched to the OFF state. In this event, since the charge is stored in the pixel, the relationship expressed by the following formula (1) takes effect: [Formula 1]

Vpixel =: Vsl-IM (Vgl-Vg3) (Vg2-Vg3)-cOT (Vsl-Vs2) --- (1) -19-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) )

Hold

k 1221910 A7 -------------- B7 V. Description of the invention (16)-Here, 'Vpixel indicates the actual voltage of the pixel electrode 13 when the switching element 12 is switched to the 0FF (closed) state, and Call indicates The total capacitance of the pixel is 'ie' (Cs + CLC + Cgs + Cis). Note that Clc indicates the capacitance of the liquid crystal cell between the pixel electrode 13 and the common electrode. In formula (1), since the target voltage Vsi and voltages Vgl, Vg2, Vg3, and Vs2 are known, if the pixel electrode voltage Vpixel can be measured, the respective parasitic capacitances or storage capacitances (^ relative to the total capacitance) should be obtained. The ratio of Call, that is, Cgs / Cal, Cs / Call, and Cis / CaU, for example, by individually changing the voltages Vg2, Vg3, and the target voltage Vsl, and by measuring in this case between the pixel voltage Vpixel and the target voltage Vs Changes in the potential difference between them. Incidentally, the construction of the display inspection device 1 as described above can supply a desired voltage to the scanning lines, the signal lines 10, and the common electrode on the liquid crystal cell substrate 2 and can measure the The light intensity on the liquid crystal cell substrate 2 in this case. Therefore, the pixel electrode 13 is fixed at a given voltage in advance and the light intensity corresponding to the pixel electrode 13 on the liquid crystal cell substrate 2 is measured. 1 can understand the relationship between the pixel voltage Vpixel and the light intensity. In addition, the voltage of the scan signal Vgate, the display signal Vsig, and the compensation drive signal will be changed, and In this case, the light intensity of the corresponding portion of the pixel electrode 13 changes, whereby the display inspection device 1 can detect the change in the pixel voltage Vpixel of each of the capacitances due to the parasitic capacitance or the storage capacitance Cs. Then, From the relationship between the voltage change of each supplied signal and the pixel voltage Vpixel change, the ratio of the respective parasitic capacitance or storage capacitance Cs to the total capacitance Call can be obtained. The following are specific examples of the contents described above. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 1221910 A7 ____ B7 V. Description of the invention (17) Example of the graph shown in Figure 5 (where the vertical axis indicates time and the horizontal axis indicates light Intensity) is the time change of the light intensity when the display signal Vsig and the scanning signal Vgate are supplied to the pixel electrode 13 and the switching element 12 connected thereto. The scanning signal Vgate and display supplied in this case are shown below the figure The waveform of the signal Vsig. As shown in FIG. 5, when the scan signal vgate rises from the OFF state to the ON state and the display signal Vsig rises In the ON state, the light intensity of the relevant pixel will be temporarily increased (in the graph shown in Figure 5, the light intensity increase is indicated by a downward moving line.) After that, when the scanning signal Vgate is switched to OFF In the (off) state, the light intensity of the relevant pixel is decremented. In addition, when the display signal Vsig drops from the ON state to the OFF state, the light intensity of the relevant pixel is further decreased. Here, it is assumed that it has been measured in advance The relationship between the pixel voltage Vpixel and the light intensity is to reduce the light intensity before the scan signal Vgate to derive the pixel voltage VT1 of the pixel voltage 13 related to the condition, and to reduce the light intensity after the scan signal Vgate to derive the condition. The pixel voltage Vt2 of the associated pixel voltage 3. In addition, according to the aforementioned formula (1), it is estimated that the reduction amount of the pixel electrode Vti-\ ^ 2 when the scanning signal Vgate is reduced is related to the gate-source parasitic capacitance Cgs. Therefore, the ratio Cgs / Call of the gate-source parasitic valley Cgs to the total capacitance call can be calculated by dividing the reduction amount of the pixel electrode VT1-Vn by the scan signal Vgate when the scan signal Vgate is reduced. Amount of voltage change. Similarly, the ratio Cis / Call of the signal line-pixel electrode parasitic capacitance Cis to the total capacitance Call can be calculated by changing the pixel electrode Vpixel _______ -21-This paper is compliant with the National Standard for Finance (CNS) A4 specifications (21GX297 public 嫠) '______ A7 V. Invention ^ ρ—a · ~ In addition to the reduction of the display, 显, although the voltage reduction in the case of no signal Vsig is not shown in the figure. In addition, the electric power of the driving signal Vs =, ', but the amount of compensation to be supplied to the storage capacity line U, whereby the voltage can be changed, and the voltage change in this case can be measured. Relying on the ratio of the storage capacitance Cs to the total capacitance call ^,. L ^ By performing such measurements on each pixel, the distribution of the amount and storage capacitance CS can be measured. In addition, CL was obtained from Cal1 by using a value of 9, a median value, and the like. The actual value of parasitic capacitance and storage capacitance Cs can also be obtained. In the following, the actual operation of the display inspection device 丨 for performing the display inspection method (parasitic capacitance inspection method) according to the present invention will be explained. Fig. 6 shows a flowchart of a procedure for measuring the relationship between the pixel voltage and the transmitted light intensity at a pixel-related position on the liquid crystal cell substrate 2 by using the display inspection device 1. Here, the common electrode probe 22 is allowed to contact the common electrode, and the signal line probe 24 and the scanning line probe 23 are positioned so that the probe contacts the signal line corresponding to the pixel to be measured and scanned. Line 11. In addition, the light intensity detector 5 is arranged on the liquid crystal cell substrate 2 at a position corresponding to the pixel to be measured. Then, the voltage-luminescence relationship measurement section 36 in the CPU 34 of the control unit 8 starts measurement. In this case, the voltage-luminescence relationship measurement section 36 first sets a driving voltage for statically driving the pixel (step S1). In addition, the static driving represents an operation of supplying a given voltage to the pixel electrode 13 while maintaining the switching element 12 in an ON state. In other words', in step S1, a voltage to be supplied to the pixel electrode 13 is set. Please note that the voltage includes a plurality of voltages. Its phase -22- This paper size is suitable for SS Home Standard (CNS) A4 specifications x 1221910 A7 _ — —__ B7__ 5. The description of the invention (19) corresponds to the voltage level from the start to the final A plurality of given voltage levels are set step by step. In addition, the voltage-luminescence relationship measurement section 36 first sets a driving waveform for statically driving a pixel (step S2). The ' voltage-luminescence relationship measurement section 36 then drives the pixel and measures its light intensity. For the foregoing description, first set the initial voltage level from the voltage levels corresponding to the plurality of voltages set in step S2, so that the initial correlation of the pixels is displayed (step S3). Then, the voltage-luminescence relationship measurement section 36 controls the signal generator 21 to statically drive the pixel using the initial voltage level (step S4). That is, 'output a signal for changing the switching element 12 to ON state (on) to the scanning line 11' and supply a voltage for displaying the initial voltage level as set in step S3 to the signal line 10 in this case Next, a fixed voltage is supplied in advance to the electrode of the scanning line probe 23 that is in contact with the scanning line n, instead of being supplied to the scanning line 1 corresponding to the pixel to be measured for light intensity, so that the switching element 12 of the pixel is transformed 0FF (closed) state. In addition, a specific voltage is supplied in advance to the electrode of the signal line probe 24 that is in contact with the signal line 10, instead of being supplied to the signal line 10 corresponding to the pixel to be measured for light intensity, so that the light from the light source 6 Pixels related to the signal line 10 are not penetrated. Next, the voltage-luminescence relationship measurement section 36 measures the transmitted light intensity of the incident light intensity detector 5 through the liquid crystal cell substrate 2 according to a predetermined number of data, that is, the transmissive A / D converter. The voltage output from the circuit board 33 from the light intensity detector 5 (step S5). In addition, the average number of data is calculated to calculate a voltage corresponding to the intensity of transmitted light (step S6). Next, the voltage-luminescence relationship measurement section 36 judges whether the measurement performed in steps 84 to 86 corresponds to the maximum of the plurality of voltages set in step S1. -23- This paper size applies Chinese National Standard (CNS) A4 Specifications (210X 297 public reply) ------ 1221910 A7 B7 V. Description of the invention (20 final voltage level (step S7). Since this example is a case measured at the initial voltage level, it will be in step S8 + The subsequent voltage level to be measured is set, and the program returns to step S 4 ^ again to perform steps 34 to S7 for the complex voltage level, and when the measurement is completed using the final voltage level, the program proceeds to step S9. In step S9 The graph plots the transmitted light voltage related to the write voltage (pixel voltage Vpixel) supplied to the signal line 10. In other words, the results are plotted in the graph shown in FIG. 7 to explain the pixel voltage Vpixel and the transmitted light voltage The relationship between% can be obtained as shown in the relationship between the pixel voltage Vpixel and the transmitted light voltage VT shown in Figure 7. In addition, for the purpose of measurement accuracy, calculations are performed to determine the interval between which a linear approximation can be obtained. (Segment with linearity) to obtain a straight line between the pixel voltage Vpixel and the transmitted light voltage ντ as indicated by the chain lines in FIG. 7 (step S10). A data table for expressing the relationship between the transmitted light intensity L and the pixel and the voltage Vpixel (step S11), and stored in the storage section 35 to complete the intermediate between the transmitted light intensity L and the pixel voltage Vpixel Measurement of the relationship. The receiver's description is used to obtain the parasitic capacitance and the storage capacitance Cs in the pixel according to the relationship between the transmitted light intensity L and the pixel voltage Vpixel, which is determined according to the procedure shown in the flowchart in FIG. 6. Ratio to total capacitance call. First, a procedure for obtaining the ratio of the gate-source parasitic capacitance cgs to total capacitance Call will be described with reference to FIG. 9. First, the voltage change measurement section 37 of the CPU 34 Set for driving pixels-24. This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) 1221910 A7 ______B7_ V. Driving voltage and driving waveform of invention description (21) (steps S 12 and S 13 ) Specifically, for example, the display signal Vsig is set to a fixed voltage Vsl, and the scan signal Vgate is set to a signal composed of a rectangular pulse equal to the voltage Vgl and a rectangular pulse equal to the voltage Vg3, as shown in FIG. 11 In addition, the compensation driving signal Vs is set to a signal composed of a fixed voltage Vg3. Note that the value of the 'voltage Vg3 is equal to the voltage value for switching the switching element 12 to the off state. Next, the voltage change measurement The segment 37 sets measurement conditions (step S14). Here, among the driving waveforms set in steps S12 and S13, the driving waveform obtained by changing the voltage Vg3 of the scan signal Vgate to a plurality of voltages is set as a measurement condition. In addition, the voltage change measurement section 37 sets an initial driving condition (step S 1 5). In this case, one of a plurality of measurement conditions set from step s14 is selected as the driving condition waveform. Further, the voltage change measurement section 37 performs pixel driving by using the driving waveform set in step S15 (step S16) 'and simultaneously starts acquiring data from the light intensity detector 5 (step S17). After that, the driving of the pixels is terminated (step S18), and the data acquisition from the light intensity detector 5 is terminated (step S19). ^ In this case, since the scanning signal Vgate includes a rectangular pulse equal to the voltage Vgl and a voltage equal to Vg3 6¾ The rectangular pulses, so the data extracted from the light intensity detector 5 are equivalent to the voltage Vgl and the voltage Vg3, respectively. Next, the voltage change measurement section 37 judges whether the measurement by performing steps Si7 to S19 is regarded as the final measurement condition (step S20). Since this example is a case of measurement under initial driving conditions, the procedure here proceeds to steps S21 -25. This paper size is suitable for towels S ® Home Standard (CNS) A4 ^ (21G X 297 public love) ~ '1221910 A7

In which, the subsequent measurement conditions immediately after the measurement conditions set in step S14 are selected as the pixel driving conditions, and the program returns to step S16 again. Similarly, the procedures of steps S16 to S19 are repeated for all the measurement conditions set in step S14, and when it is judged in step S20 that one measurement condition is the final measurement condition, the program proceeds to step S22. In this case, please note that the change of the voltage Vg3 of the scanning signal Vgate is set to the respective measurement conditions; therefore, the data retrieved from the light intensity detector 5 will reflect the plurality of voltages Vg3. At step S22 'First, the amount of change in transmitted light intensity with respect to the amount of change in the respective measurement conditions is converted into the amount of change in the pixel voltage Vpixel. That is, according to the measurements in steps S16 to S19, one scan signal Vgate & includes a plurality of voltages (Vgl and Vg3). Here, the two voltages Vgl & Vg3 * are a voltage for changing the switching element 12 to an ON state and a voltage for changing the switching element 12 to an OFF state. The voltage Vgl is shifted to the voltage Vg3 by the voltage of the scan signal 卩 # ", so that the on-off element 12 & ON (on) state is changed to the off (off) state; at the same time, because a gate occurs on the pixel electrode 13 The source parasitic capacitance Cgs causes a voltage change. Such a voltage change is observed as a change in light intensity of transmitted light at a position corresponding to a relevant pixel on the liquid crystal cell substrate 2. Therefore, in order to calculate the parasitic capacitance ratio here , The amount of electrical waste change on the pixel electrode 3 will be calculated retrospectively from the change in light intensity. To be precise, as shown in the lower half of FIG. 10, first assume that: under the measurement conditions c 1, c2, etc., When the voltage of the scanning signal is Vg 丨, the transmitted light voltage output from the light intensity detector 5 through the A / D converter circuit board 33 is labeled as VT1-el, VT1__C2, etc .; and similarly, when the scanning signal is -26-^ Paper size is applicable to Chinese National Standard (CNS) A4 (210X 297 public copy) ~ --- ^

Ir

1221910 A7 _ R7 V. Description of the invention (23)

When the voltage of Vgate is Vg2, the transmitted light voltage output is marked as ντ2 ″, Vt2—d, and so on. Then, according to each measurement condition ci, c2, etc., referring to the data table between the transmitted light voltage ντ and the pixel voltage Vpixel obtained in step sn, obtain the change amount of the pixel voltage, that is, | Vpixel-Vsl | Expressed as the voltage difference between the target voltage vsl and the actual pixel voltage Vpixel. The upper left part of Figure 10 shows the principle of such a program. The v-T curve shown in the figure shows the relationship between the transmitted light voltage VT and the pixel voltage Vpixel, and a data table model is made in step S11. In this case, in order to obtain the variation of the voltage | Vpixel-Vsl | under the measurement condition cl, the pixel voltage Vpixel and the target voltage Vs 1 are obtained on the VT curve, so that these two voltages are equivalent to the transmitted light voltage VT1— C1 and VT2 a. And the | Vpixel-Vsl | value is calculated at this point. After that, for the measurement conditions ^, c3, etc., the procedure similar to the previous one is repeated. Next, the parasitic capacitance calculation section 38 of the CPU 34 plots the voltage of the scanning signal Vgate with respect to the measurement conditions c, c2, etc. | Vg 1 · Vg3 丨 the change in the pixel voltage | Vpixel-Vsl | Amount (step S23). In other words, assuming that the voltage | Vgl-Vg3 | of the scanning signal Vgate is expressed as (delta) Vg-Cl, (delta) Vg-C2, etc., as shown in the lower half of FIG. The amount of | Vpixel-Vsl | corresponding to the values (delta) Vg_cl, (delta) Vg_C2, etc. are plotted in the upper right of FIG. In this way, the relationship curve between | Vpixel-Vsl | and Vgl-Vg3 is obtained as shown in the figure. Then 'for the pixel obtained in this way between Vpixel-Vsl 丨 and Vgl-Vg3 -27- ^ paper size suitable financial standard (CNS) A vision grid (210 X 297 mm) " ~ 1221910 five, Description of the invention (24) The relationship curve between (to calculate the linear approximation interval La (step s24). This is due to the fact that the permittivity of the liquid crystal usually changes due to the inversion state, and the capacitance of the liquid crystal depends on the pixel potential Therefore, when the voltage supplied to the parasitic capacitance changes within the special range, the aforementioned formula ⑴ will take effect. In other words, in order to obtain The ratio Cgs / CaU of the gate-source parasitic capacitance Cgs to the total capacitance Cali needs to obtain a region where the closed relationship between | Vpixe 丨 · Vsi | and Vgl-Vg3 shows a linearity. For this reason In this specific embodiment, the linear approximation interval La is found from the relationship curve between Vpixel_Vsi and Vgl-Vg3 obtained in step S23. After that, the parasitic electrical valley calculation section 38 uses the linear approximation interval La Slope to calculate gate_source A parasitic capacitance with respect to the total capacitance Cgs

The ratio of Call is Cgs / Call (step S25), and the result is stored in the storage section 35 (step S26). Although the procedure for obtaining the ratio of the gate-source parasitic capacitance cgs to the total capacitance Call is explained, the above will be described with reference to FIG. 9 for obtaining the parasitic capacitance Cis of the k-line-pixel electrode. program of. First, similarly to the case of obtaining the ratio of the gate-source parasitic capacitance Cgs to the total capacitance Call, the voltage change measurement section 37 of the CPU 34 sets the driving voltage and driving waveform for driving the pixels (steps S12 and s 13). In this case, for example, as shown in FIG. 12, the scan signal Vgate is set to a rectangular pulse whose voltage rises from Vg3 to Vgl in a specific period, and the display signal vsig is set to be composed of the voltages Vs2 and Vsl with a short period A rectangular pulse wave for the period of the scan signal Vgate. In addition, the compensation drive signal Vs is set to a signal composed of a fixed voltage -28-this paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 1221910 A7 __B7_ V. Description of the invention (25) Voltage Vg3. As described above, the value of the voltage Vg3 is equal to the voltage value for switching the switching element 12 to the OFF state. Next, the voltage change measurement section 37 sets measurement conditions (step s 14). Here, a plurality of driving waveforms in which the Vsl level of the display signal Vsig changes is set as a measurement condition. In addition, the voltage change measurement section 37 sets an initial driving condition (step S15). In this case, one of the plurality of driving waveforms set from step S14 is specified. -After that, the voltage change measurement section 37 performs pixel driving by using the driving waveform specified in step S15 (step S16), and simultaneously starts acquiring data from the light intensity detector 5 (step S17). Here, after the scan signal Vgate drops from the voltage Vgl to Vg3, the switching element 12 is turned to the OFF state, whereby the pixel voltage Vpixel changes in accordance with the voltages (Vsl and Vs2) of the display signal Vsig. Therefore, the measurement of the change in transmission and light intensity of a pixel corresponding to a change in the pixel voltage Vpixel will be performed. After that, the driving of the pixels is terminated (step S 1 8), and the data acquisition from the light intensity detector 5 is terminated (step S19). Next, the voltage change measurement section 37 judges whether or not the measurement by performing steps S17 to S19 is regarded as a final measurement condition (step S20). Since this example is a case of measurement under initial driving conditions, the procedure here proceeds to step S21 ', where the subsequent measurement conditions immediately after the measurement conditions set in step S14 are selected as the pixel driving conditions, and the program returns again Go to step S16. Similarly, the procedures of steps S 16 to S 19 are repeated for all the measurement conditions set in step S14, and when it is judged that the measurement conditions are final in step S20-29-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 1221910 · A7 ------- Β7__ 5. Description of the invention (26) When measuring conditions, the program proceeds to step S22. In this case, please note that 'the change of the voltage Vsl of the display signal Vsig is set to the respective measurement conditions; therefore,' the data retrieved from the light intensity detector 5 will reflect the plurality of voltages Vsl. In step S22, The amount of change in transmitted light intensity of the measurement condition change amount is converted into a change amount of the pixel voltage Vpixel. Here, a program similar to the case of calculating the ratio of the gate-source parasitic capacitance Cgs to the total capacitance Call is used. That is, after switching the switching element 丨 2 to an off state under a specific measurement condition, Then, according to the display signal Vsi ^ 々 voltage shifted from Vsl to Vs2 to shift the transmitted light voltage from Vti_c1 to Vt2_c2 (when the scan signal Vgate is Vg3), reference will be made to the transmitted light voltage VT obtained in step S11 and Table of pixel voltage Vpixel to get | Vpixel-Vsl | corresponding to this offset. After that, the procedure similar to the previous one is repeated for other measurement conditions. Next, according to the respective measurement conditions, the parasitic capacitance calculation section 38 of the CPU 34 plots the pixel voltage | Vpixel_Vsl | with respect to the change amount of the voltage | Vsl-Vs2 | of the display signal Vsig | step amount (step S23). This is equivalent to transforming the amount of voltage change shown in the upper right of FIG. 10 from | VgHg3 | to | Vsl-Vs2 |. In this way, a relationship curve between | Vpixel-Vsl | and Vsl-Vs2 is obtained. Jie Xia 'calculates a linear approximation for the relationship curve between | Vpixei-Vsl | and Vsl-Vs2 obtained in this way (step S24). After that, the parasitic capacitance calculation section 38 calculates the ratio of the signal line-pixel electrode parasitic capacitance Cis to the total capacitance cau by using a slope of a linear approximation. 30- This paper is suitable for financial standards @ 家 标准 (CNS ) A4 size (21G X 297 public director) '-1221910

Cis / Call (step S25), and the result is stored in the storage section ^ (step S26). Next, a procedure for obtaining the storage capacity Cs will be described with reference to FIG. 9. First, similar to the case of obtaining the gate · source parasitic capacitance ^ or the ratio of the signal line-pixel electrode parasitic capacitance Cis to the total capacitance ^ 丨 丨, the voltage change measurement section 37 of the CPU 34 is set A driving voltage and a driving waveform for driving the pixels (steps S 12 and S 13). Specifically, for example, as shown in FIG. 13, the display signal Vstg is set to a fixed voltage signal Vsl, and the scan signal Vgate is set to a rectangular pulse whose voltage rises from Vg3 to Vgl in a specific period. In addition, the compensation driving signal Vs is set as a rectangular pulse composed of the voltages Vg2 and Vg3 and the period is shorter than the period of the scan signal Vgate. As described above, the value of the voltage Vg3 is equal to the voltage value for switching the switching element 12 to the OFF state. Next, the voltage change measurement section 37 sets measurement conditions (step s 14). Here, only a plurality of types of driving waveforms from the Vg2 value of the compensation driving signal Vs are set as the measurement conditions. In addition, the voltage change measurement section 37 sets an initial driving condition (step S15). In this case, one of the plurality of driving waveforms set from step S14 is specified. After that, the voltage change measurement section 37 performs pixel driving by using the scan signal Vgate and the display signal Vsig of the compensation driving signal Vs set in steps S12 and S 13 and the step S 1 5 (step S16), and At the same time, data acquisition from the light intensity detector 5 is started (step S 17). Here, after the scanning signal Vgate drops from the voltage Vgl to Vg3, the switching element 12 is transformed into -31-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 1221910

OFF state, whereby the pixel voltage -Vpixei changes according to the voltage (Vg2 * Vg3) of the compensation drive signal Vs. Therefore, a measurement will be performed on the change in transmitted light intensity of a pixel corresponding to a change in the pixel voltage Vpixel. After that, the driving of the pixels is terminated (step S18), and the data acquisition from the light intensity detector 5 is terminated (step S19p. Then, the voltage change measurement section 37 determines whether or not the measurement is performed by performing steps s7 to s! 9. As the final measurement condition (step S2〇). Since this example is a case of measurement under the initial driving condition, the procedure here proceeds to step S2 1, where the subsequent measurement conditions immediately following the measurement condition set in step S14 Is selected as the pixel driving condition, and the program returns to step s6 again. Similarly, the procedures of steps S16 to S19 are repeated for all the measurement conditions set in step S14 'and when the measurement is judged in step S20 When the condition is the final measurement condition, the program proceeds to step S22. In this case, please note that the change of the voltage Vg2 of the driving signal Vs is set as the respective measurement condition; therefore, it is extracted from the light intensity detector 5 The data obtained will reflect the changes in the plurality of voltages Vg2. In step S22 ', the transmitted light intensity changes with respect to the changes in the respective measurement conditions are converted into changes in the pixel voltage Vpixel. A procedure similar to the case of calculating the ratio of the gate-source parasitic capacitance Cgs and the signal line-pixel electrode parasitic capacitance Cis to the total capacitance ^ 11 is used. That is, under specific measurement conditions, the switching element 12 After turning to the 0FF (closed) state, the voltage of the compensation drive signal is shifted from Vg2 to Vg3 to shift the transmitted light voltage VT from VT1_cl to VT2_c2 (when the scan signal Vgate is Vg3 __- 32-This paper is for China National Standard (CNS) A4 specification (210X297 mm)

Hold il

Line 1221910 A7 ----- _B7__ 5. In the case of the description of the invention (29)), the data table of the transmitted light voltage ντ and the pixel voltage Vpixel obtained in step S11 will be referred to obtain the IVpixel corresponding to such offset. -Vsl After repeating the procedure similar to the previous for other measurement conditions. Next, according to the respective measurement conditions, the parasitic capacitance calculation area of the CPU 34 & 38 junction type inputs the pixel voltage | Vpixel-Vsl | with respect to the change amount of the voltage | Vg2_Vg3 of the compensation drive signal Vs (step S23). This is equivalent to transforming the amount of voltage change shown in the right-upper-part of Fig. 10 from | Vg1-Vg3 | to | Vg2-Vg3 |. This obtains the relationship curve between | Vpixei_Vsl | and Vg2-Vg3. Next, a linear approximation interval is calculated for the relationship curve between | Vpixel-Vsl 丨 and Vg2-Vg3 obtained in this way (step S24). After that, the parasitic capacitance calculation section 38 calculates the ratio Cs / Call of the storage capacitance Cs to the total capacitance Call by using a slope of a linear approximation interval (step S25), and stores the result in the storage section 35. (Step S26). In addition, by changing the positions of the signal line probe 24 and the scanning line probe 23 to perform the measurement as described above for each pixel, the parasitic capacitance on the screen or the distribution of the storage capacitance Cs can be adjusted, etc .; And this information can be used to optimize panel design or cause and effect analysis of display defects. In addition, by adjusting the capacitance CLc between the pixel electrode 13 and the common electrode by a specific device, the actual values of the respective parasitic capacitances can also be calculated. As described above, the display inspection device 1 of this embodiment includes: a signal supplier 4 for outputting a voltage signal to be supplied to the pixel electrode 13; — a light intensity detector 5 capable of detecting the location corresponding to Liquid crystal cell substrate 2 -33-This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 1221910 A7 B7 V. Light intensity on the part of the pixel electrode 13 on the description of the invention (30); and cpu 14. And in the display inspection device 1, the CPU 34 has the function of measuring the pixel voltage Vpixel between static driving and the transmitted light intensity (transmitted light voltage VT) corresponding to a corresponding portion on the liquid crystal cell substrate 2 relationship. Calculate the change in the intensity of transmitted light from the pixel when the pixel electrode 13 is charged to calculate the change in pixel voltage Vpixel from the target voltage Vsl; and calculate the ratio of the parasitic capacitance to the total capacitance based on this change . Since the ratio of the parasitic capacitance to the total capacitance Call can be calculated from the amount of change in the pixel electrode Vpixel, the calculation results can be used to optimize the panel design or simplify the cause and effect analysis of display defects. Specifically, since the signal supplier 4 is designed so as to be able to adjust the OFF state level of the scanning signal Vgate for controlling the switching element 12, the scanning signal Vgate in the OFF state can be adjusted by adjusting the The voltage level changes the voltage supplied to the gate-source parasitic capacitance. Therefore, it can be understood that the characteristics of the gate-source parasitic valley value Cgs related to the change in permittivity corresponding to the supply voltage can be measured more accurately. In addition, since the signal supply 4 is designed so as to be able to adjust the voltage to be supplied to the scanning lines provided around the pixel electrode 13 (where the scan signal Vgate is supplied to the pixel electrode 13), the scanning signal Vgate is measured When the voltage is changed, the influence of the electric field of other scanning lines Π provided around the pixel electrode 13 can be prevented. In addition, since the signal supplier 4 is designed so that it can simultaneously supply the 仏 number to the storage capacity line 18, it is easy to measure the ratio of the storage capacity Cs to the total capacity (: state. In addition, due to the signal supply Device 4 is designed to be able to control the display signal

1221910 A7 _____B7___ 5. Description of the invention (31)

Vsig's ON / OFF operation enables measurement of parasitic capacitance between the signal line 10 and the pixel electrode 13. In addition, since the voltage-luminescence relationship measurement section 36 of the CPU 34 is designed so as to find a section in which the relationship between the pixel voltage Vpixel and the transmitted light intensity (transmitted light voltage Vt) is linear, it is possible to Accurately obtain such relationships' without the impact of measurement errors. In addition, since the parasitic capacitance calculation section 38 of the CPU 34 is designed so as to be able to find a section in which the relationship between the voltage of the scan signal Vgate and the change in the voltage of the pixel voltage Vpixel is linear, it is accurate Get such relationships without the impact of measurement errors. Specifically, measurement errors due to changes in liquid crystal permittivity due to different voltage supplies can be ruled out. In addition, according to the display inspection method and the parasitic capacitance inspection method of the present invention, the transmitted light intensity 'located on a pixel charged with a given voltage is measured in advance, and the wiring voltage around the pixel electrode to be inspected is changed for individual changes. The transmitted light intensity changes, so that the pixel electrodes 13 and the parasitic capacitances formed between the respective scanning lines n and the signal lines 10 can be individually measured. Specifically, in this case, the transmitted light intensity of the pixel is measured when the voltage supplied to the signal line 10 is changed while the pixel electrode 13 is charged at a given voltage, so it is sufficient to measure the signal between the pixel electrode 3 and the signal. The parasitic capacitance characteristic between the lines 丨 0 corresponds to the voltage supplied. In addition, since the ratio of the storage capacitance Cs to the total capacitance can be measured, the ratio of the non-parasitic capacitance portion to the total capacitance can be accurately measured. -35- This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm) 1221910 A7 --------- B7 V. Description of the invention (32) Although the invention has been described in the foregoing as a specific implementation Examples, but it should be understood that the present invention is not limited to the foregoing specific embodiments, but various other configurations may be adopted if necessary. For example, in terms of measuring the transmitted light intensity to calculate the parasitic capacitance ratio, the signals to be supplied to the scanning line 11, the signal line 10, or the storage capacitance line 18 are not limited to the signals shown in FIGS. 11 to 13, for example, also The waveform shown in FIG. 14 can be applied. The 仏 number waveform shown in FIG. 14 is a waveform composed of a display signal Vsig defined as a fixed voltage vs2 and a compensation drive signal defined as a fixed voltage Vg3. The waveform is composed of a rectangular pulse wave, and the scan signal Vgate is changed from Vgi The level is gradually changed from Vg3. In this case, in the program shown in FIG. 9, the waveform shown in FIG. 14 is set in steps S12 and su, and in step S14, only one type of waveform shown in FIG. 14 is set. Is the measurement condition. Then, steps S15 to S19 are executed. In the after-performance step S20, since the measurement conditions are only one type, the program proceeds from step S20 to S22, and the subsequent steps are performed. As shown in FIG. 14, because the measurement conditions include a plurality of rectangular pulses of different levels, the procedures from steps S16 to S 19 may not be repeated, but a scanning private sequence is performed to scan pixel transmission with different levels of scanning signals Vgate. Light intensity changes. In this method, the processing time can be shortened. In addition, the ratio of the parasitic capacitance cis to the total capacitance between the adjacent signal line 10 (which is adjacent to the signal line 10 corresponding to the pixel electrode 13) and the pixel electrode 13 cannot be ignored (please (See Figure 2), you can measure the signal line-pixel electrode parasitic capacitance c η _ -36- as described in the specific embodiment. This paper size applies to China National Standard (CNS) A4 (210X297 mm) 1221910 A7 _______B7 V. Description of the invention (33) The procedure for the ratio to the total capacitance Call is approximately the same procedure to calculate the ratio of the adjacent signal line-pixel electrode parasitic capacitance cis to the total capacitance Call. Specifically, in the display inspection device 1, the signal line probe 24 can also supply the package number 配备 to the display signal ^ provided. The signal line 10 around the pixel electrode 13 there. Therefore, the light intensity of the corresponding pixel can be measured while changing the level of the display signal Vsig to be supplied to the adjacent signal line 10 ', thereby changing the signal line and the pixel electrode parasitic power similarly as described above. A program of the ratio of the capacity Cis to the total capacitance CaU to calculate the ratio of the adjacent signal line-pixel electrode parasitic capacitance Cis to the total capacitance Ca 11. Specifically, according to the ratio of the signal line and pixel electrode parasitic capacitance cis to the total capacitance calculated in the specific embodiment described below, the display signal Vsig is defined as the fixed voltage Vsi in steps S12 and S13. It is not defined as the waveform shown in FIG. 12, and the display signal Vsig supplied to the adjacent signal line ι0 is set to have the same waveform as Vsig shown in FIG. 12. In addition, a driving waveform including a plurality of Vs 丨 level changes is set as a measurement condition in step S14. Then, a procedure similar to the calculation of the ratio of the signal line-pixel electrode parasitic capacitance Cis to the total capacitance Call in a specific embodiment as described above can be used to calculate the adjacent signal line · pixel electrode parasitic capacitance Cis relative to Ratio of total capacitance Call. At this time, the liquid crystal cell substrate 2 of the display screen section of the liquid crystal display is used as the main body to be inspected in the specific embodiment described above. However, without being limited to the foregoing, inspections of light emitting diodes, plasma displays, and field emission can also be performed.

Claims (1)

1221910 A8 B8 1. A device for inspecting a display, the display is equipped with a pixel electrode and a switch for controlling the supply of a voltage signal to the pixel electrode, the device includes: a k-number output for supplying one of the to be supplied A voltage signal is output to the pixel electrode; a light intensity detector capable of detecting a light intensity located at a portion corresponding to the pixel electrode on the display; and a pixel voltage change detection device for In the case of shifting from a 0N (on) state to an OFF (off) state, a change amount of the pixel voltage is obtained according to a change amount of the light intensity. 2. The device for inspecting a display device according to item 1 of the scope of patent application, wherein the open relationship is composed of a switching element; and the device includes a scanning signal supplier for controlling the ON of the switching element. The / 0FF (on / off) operation scan signal is supplied to the switch 'and the level of the scan signal can be adjusted in an OFF (off) state. 3. For a device for inspecting a display device according to item 2 of the patent application, wherein the scanning signal supplier is designed so as to be able to adjust the voltage to be supplied to a scanning line provided around the pixel electrode, wherein the scanning A signal is supplied to the pixel electrode. 4. The device for inspecting a display, such as the scope of the patent application, wherein the signal output is designed so as to be able to control the ON / OFF operation of the voltage signal. 5. · If the device for inspecting a display device in item i of the scope of patent application, -39-This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) 1221910 A8 B8 C8 __________________ The signal output is designed so as to be able to adjust the voltage to be supplied to the signal line provided around the pixel electrode, wherein the voltage signal is supplied to the pixel electrode. 6 · A device for inspecting a display designed to supply a voltage to a pixel electrode to present a given voltage level in a portion corresponding to the pixel electrode, the device comprising: a voltage · Luminance relationship measurement section for measuring a relationship between a pixel voltage when the pixel voltage is a fixed value and a luminosity corresponding to a position of the pixel electrode outside the display range; a voltage change measurement Section, used to refer to the detection result in the voltage-luminescence relationship measurement section, and calculate a change in pixel voltage of the pixel electrode from a given voltage based on a change in luminescence corresponding to the position of the pixel electrode And a parasitic capacitance calculation section for calculating a parasitic capacitance accompanying a pixel according to the variation amount. 7. The device for inspecting a display device according to item 6 of the scope of patent application, wherein the voltage-luminescence relationship measurement section measures luminosity separately, in which case a plurality of mutually different voltages are supplied to the The pixel electrode finds a region where the relationship between the voltage and the luminosity is linear. 8. The device for inspecting a display device according to item 6 of the patent application, wherein the voltage-luminosity relationship measurement section stores the pixel voltage relative to the luminosity into a storage section; and -40 -This paper size applies to China National Standard (CNS) A4 (210X 297 mm) 1221910 A8 B8 The voltage change volume section refers to the relationship between the voltage and the luminescence stored in the storage section. 9. The device for inspecting a display device according to item 6 of the patent application, wherein the switching element is configured to control the supply of the given voltage to the pixel electrode; the display inspection device includes a scanning signal supplier for And supplying a scanning signal for controlling the 0N / 〇FF (on / off) operation of the switching element; and ... " the scanning signal supplier constitutes the scanning signal as a plurality of mutually different voltages The signal, in which the voltage range is between the voltage at which the switch element is completely turned into a 10N (on) state and the voltage at which the switch element is fully turned into an OFF (off) state. 10 · If the device for inspecting a display device according to item 9 of the patent application scope, "wherein the parasitic valley calculation section is based on the plurality of voltages obtained from the scanning signal and the pixel electrode from the Constant voltage on = part of the relationship between the amount of change with linearity, calculate the ratio of the gate / source parasitic capacitance of the switching element to the total capacitance of a pixel. Π · A type used to check the display A method comprising the following steps: (A) investigating a relationship between the voltage supplied to a pixel electrode and the luminosity of a portion of a display, the portion corresponding to the pixel electrode; (B) using Charge the pixel electrode at a given voltage; (C) Detect the luminosity of the display, which corresponds to the Α8 Β8 The pixel electrode charged in step (B); (D) evaluating the actual voltage of the pixel electrode from detecting the luminescence in step (C) according to the relationship between the luminescence and the voltage , The relationship is learned in the step (A); and, (E) a voltage between the given voltage supplied in the step (B) and the voltage evaluated in the step (D) Poor, evaluate the ratio of the parasitic capacitance of a pixel to the total capacitance of the pixel. 12 · The method for inspecting a display as claimed in item 11 of the patent scope, wherein the charging of the pixel electrode in step (B) according to the ON / OFF operation of a switching element is processed. It is determined that the switching element is controlled by a scanning signal composed of a plurality of rectangular pulse waves with mutually different levels. ° 13: The method for inspecting a display device according to item 12 of the patent application, wherein a waveform composed of an array of rectangular pulse waves whose level gradually changes is used as the trace signal. 14. · A method for checking parasitic capacitance, wherein the parasitic capacitance is between a pixel electrode arranged in a panel of a display and one of a scan line and a signal line arranged around the pixel electrode Between lines, the method includes: Step (A), controlling the voltages to be supplied to the scanning line and the signal line in an independent manner, the scanning line and the signal line are arranged around the pixel electrode, and controlling the Under voltage conditions, measure the change in luminescence in a portion of the display corresponding to the pixel electrode; and step (B), investigate a existence of the pixel electrode and the scan line and the -42-sheet scale applicable to the country of China Standard (CNS) A4 specification (210X 297 public directors) 1221910 6. Scope of patent application The ratio of the parasitic capacitance to the total capacitance between any of the lines of Line 仏. 15. The method for checking parasitic capacitance according to item 14 of the scope of patent application, wherein the step (B) performed after the step (A) is repeated several times. 16. If the method for checking the parasitic capacitance in item 14 of the scope of patent application, one of which is to investigate the ratio of the parasitic capacitance to the total capacitance between the pixel electrode and the signal line, the method is: In a state in which the pixel electrode is charged with a given voltage, the change in luminescence is measured while changing the voltage supplied to the signal line. 17 · If the method for inspecting parasitic capacitance in item 14 of the scope of patent application, wherein the storage capacitance is formed between a part of the pixel electrode and the other electrode, the storage capacitance can be investigated The ratio of the capacity relative to the total capacitance is in a state where the pixel electrode is charged with a given voltage, and the luminosity is measured while changing the voltage supplied to the other electrode: change. 1 8 · If the method for checking parasitic capacitance according to item 4 of the scope of patent application 'wherein the luminous change is measured in a state where the voltage supplied to any of the scanning lines and signal lines is a fixed voltage, etc. The scanning lines and the signal lines are not the scanning lines and the signal lines that should control the supplied voltage. _ -43- This paper size is suitable for a η family standard (CNS) A4 size (21GX297 mm) -------