TWI220454B - Method for inspecting alignment layer and equipment thereof - Google Patents

Method for inspecting alignment layer and equipment thereof Download PDF

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Publication number
TWI220454B
TWI220454B TW92100215A TW92100215A TWI220454B TW I220454 B TWI220454 B TW I220454B TW 92100215 A TW92100215 A TW 92100215A TW 92100215 A TW92100215 A TW 92100215A TW I220454 B TWI220454 B TW I220454B
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Taiwan
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alignment film
inspecting
scope
test piece
patent application
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TW92100215A
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Chinese (zh)
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TW200412426A (en
Inventor
Jeffrey Hsieh
Jing-Ren Han
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Au Optronics Corp
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Abstract

A method for inspecting an alignment layer and an equipment thereof are described. Firstly, an alignment layer test sample is placed in a chamber. Then, the alignment layer test sample is steamed up by using a steam generator, and the alignment layer test sample is lighted up with an intense light for visual inspection.

Description

1220454 _案號92100215_年月曰 修正_ 五、發明說明(1) 發明所屬之技術領域 本發明是有關於一種檢視配向膜的方法及設備,且特 別是有關於一種能直接以目視的方式檢視液晶顯示器 (Liquid Crystal Display,LCD)之配向膜的方法及設 備。 先前技術 液晶顯不器具有南畫質、體積小、重量輕、低電壓驅 動、低消耗功率及應用範圍廣等優點,因此,已被廣泛的 應用在中、小型可攜式電視、行動電話、攝錄放影機、筆 記型電腦、桌上型顯示器以及投影電視等消費性電子或電 腦產品,並且更逐漸取代陰極射線管(Cathode Ray Tube, C R T )而成為顯示器的主流。 液晶顯不為、主要係由兩片基板以及配置在兩基板之間 之一液晶層所構成。而且,通常在兩基板之表面上(與液 晶層接觸之表面)分別會配置有一配向膜,而配置在基板 上之配向膜在歷經一研磨製程之後,會在其表面上形成許 多溝槽,如此一來,液晶分子便會沿著配向膜上之溝槽而 配向。關於配向膜之研磨製程如下所述。 第1圖所示,其繪示為一配向膜之研磨製程之示意 圖。 請參照第1圖,利用一研磨製程以於配向膜上形成許 多溝槽之方法,係首先將已形成有一配向膜1 0 2之一基板 1 0 0放置在一研磨機台中。之後,利用研磨機台之一滾軸 (Roller)104以研磨配向膜102,而於配向膜102之表面形1220454 _Case No. 92100215_ Revised Year of the Month _ V. Description of the Invention (1) Field of the Invention The present invention relates to a method and equipment for inspecting an alignment film, and in particular, to a method capable of inspecting visually directly Method and equipment for alignment film of liquid crystal display (LCD). The prior art liquid crystal display has the advantages of southern picture quality, small size, light weight, low voltage driving, low power consumption and wide application range. Therefore, it has been widely used in medium and small portable TVs, mobile phones, Consumer electronics or computer products such as camcorders, notebook computers, desktop displays, and projection televisions have gradually replaced cathode ray tubes (CRT) and become mainstream displays. The liquid crystal display is mainly composed of two substrates and a liquid crystal layer disposed between the two substrates. In addition, an alignment film is usually disposed on the surfaces of the two substrates (the surface in contact with the liquid crystal layer), and the alignment film disposed on the substrates undergoes a grinding process to form a plurality of grooves on the surfaces. As a result, the liquid crystal molecules are aligned along the grooves on the alignment film. The polishing process of the alignment film is described below. Figure 1 shows a schematic diagram of the polishing process of an alignment film. Referring to FIG. 1, a method for forming a plurality of grooves on an alignment film by using a grinding process is to first place a substrate 100 having an alignment film 102 formed in a polishing machine. After that, one of the rollers (Roller) 104 is used to polish the alignment film 102, and the surface of the alignment film 102 is shaped.

9773twf1.ptc 第5頁 1220454 _案號92100215_年月曰 修正_ 五、發明說明(2) 成許多溝槽1 0 6。 通常配向膜在進行研磨製程之後,都會進行一檢視步 驟,以檢視配向膜上之溝槽的位置以及長度等等是否都符 合標準,並且檢視配向膜之表面否有其他異常的圖案也同 時被刻印在配向膜上。由於倘若能即時發現配向膜表面上 之溝槽有異常現象產生,或者是因有微顆粒附著在研磨製 程之滾輪上而造成異常圖案出現在配向膜上時,工作人員 便可以依據異常的狀況而立即對研磨機台作檢查維修或作 參數之調整,以避免對後續產品造成影響。 而目前檢視配向膜之方法,大都是利用一光學檢視儀 器來進行配向膜之檢視步驟。然而,此光種學檢視儀器非 常的昂貴,而且由於習知檢視之方法是利用光學儀器來檢 視,因此必須進行許多儀器校正對位等等繁瑣之步驟。另 外,目前尚無簡易而有效的目視檢視設備與方法,以能快 速的判定配向膜研磨後之結果。 發明内容 因此,本發明的目的就是在提供一種檢視液晶顯示器 之配向膜的方法及設備,以改善習知檢視配向膜之方法及 設備有較為昂貴及較為繁瑣之缺點。 本發明的目的就是在提供一種檢視液晶顯示器之配向 膜的方法及設備,以提供檢視人員可直接以目視的方式而 快速的檢視配向膜。 本發明提出一種檢視液晶顯示器之配向膜的方法,此 方法係首先將一配向膜測試片放置在一檢測室中。其中,9773twf1.ptc Page 5 1220454 _ Case No. 92100215_ Year Month Revision _ 5. Description of the invention (2) into many grooves 106. Generally, after the alignment film is subjected to the grinding process, an inspection step is performed to check whether the positions and lengths of the grooves on the alignment film meet the standards, and whether there are other abnormal patterns on the surface of the alignment film are also engraved On the alignment film. If the grooves on the surface of the alignment film can be found immediately, or if abnormal patterns appear on the alignment film due to the micro particles attached to the rollers of the grinding process, the staff can rely on the abnormal conditions. Immediately inspect and repair the grinding machine or adjust the parameters to avoid affecting the subsequent products. At present, most methods for inspecting the alignment film use an optical inspection instrument to perform the inspection steps of the alignment film. However, this optical spectroscopic inspection instrument is very expensive, and since the conventional inspection method uses optical instruments to inspect, many tedious steps such as calibration and alignment of the instrument must be performed. In addition, there is currently no simple and effective visual inspection equipment and method to quickly determine the results of the alignment film after grinding. SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a method and equipment for inspecting an alignment film of a liquid crystal display to improve the conventional method and equipment for inspecting an alignment film, which have the disadvantages of being expensive and complicated. The purpose of the present invention is to provide a method and equipment for inspecting an alignment film of a liquid crystal display, so as to provide an inspector to directly and quickly inspect the alignment film in a visual manner. The invention provides a method for inspecting an alignment film of a liquid crystal display. This method firstly places an alignment film test piece in a detection chamber. among them,

9773twf1.ptc 第6頁 1220454 _案號92100215_年月曰 修正_ 五、發明說明(3) 此檢測室之周圍覆蓋有不透光、不透氣且不反光之一黑 幕,以將外界光線以及氣流干擾阻絕在外。而配向膜測試 片已歷經過一研磨製程,因此在配向膜測試片之表面上已 形成有許多溝槽。接著,將配向膜測試片霧化,其中霧化 配向膜測試片之方法係利用將此配向膜測試片放置在一蒸 汽產生器上,藉由蒸汽產生器所產生之蒸汽以將配向膜霧 化。之後,利用一強光照射配向膜測試片,並以目視的方 式直接檢視此配向膜測試片表上是否有異常現象,換言 之,以目視的方式檢視配向膜測試片上之溝槽的長度及間 距是否符合標準,並檢視配向膜測試片之表面是否有其他 異常的圖案刻痕存在。 本發明提出一種檢視液晶顯示器之配向膜的設備,其 包括一檢測室、一蒸汽產生器以及一強光燈。其中,檢測 室係由一堅固之框架所構成,且在堅固框架之周圍還覆蓋 有不透光、不透氣且不反光之一黑幕,以將外界光線以及 氣流干擾阻絕在外。另外,蒸汽產生器係放置在檢測室 中,其中一待測之配向膜測試片係放置在蒸汽產生器上, 以使蒸汽產生器所產生之蒸汽可以將配向膜測試片霧化。 而強光燈係放置在檢測室中,且強光燈係直接照射此配向 膜測試片,藉以輔助當以目視的方式檢視霧化後之配向膜 測試片時,能輕易的檢視出配向膜測試片之表面是否有異 常的現象。 本發明之檢視液晶顯示器之配向膜的方法,由於其係 將配向膜霧化之後,在強光的照射下便可以直接目視檢視9773twf1.ptc Page 6 1220454 _Case No. 92100215_ Revised Year of the Month _ V. Description of the invention (3) The surrounding of this testing room is covered with a black curtain that is opaque, air-impermeable and non-reflective, in order to block external light and air flow. Interference is blocked. Since the alignment film test piece has undergone a grinding process, many grooves have been formed on the surface of the alignment film test piece. Next, the alignment film test piece is atomized. The method for atomizing the alignment film test piece is to place the alignment film test piece on a steam generator, and use the steam generated by the steam generator to atomize the alignment film. . Afterwards, an alignment film test piece is irradiated with a strong light, and the alignment film test piece table is visually inspected for abnormalities, in other words, the length and spacing of the grooves on the alignment film test piece are visually inspected Meet the standard, and check whether there are other abnormal pattern marks on the surface of the alignment film test piece. The invention provides a device for inspecting an alignment film of a liquid crystal display, which includes a detection chamber, a steam generator, and a strong light. Among them, the detection room is composed of a sturdy frame, and the sturdy frame is also covered with a black curtain that is opaque, air-permeable and non-reflective to block out external light and airflow interference. In addition, the steam generator is placed in the detection room, and one of the alignment film test pieces to be tested is placed on the steam generator, so that the steam generated by the steam generator can atomize the alignment film test piece. The glare lamp is placed in the detection room, and the glare lamp directly illuminates this alignment film test piece, thereby assisting in easily viewing the alignment film test when viewing the atomized alignment film test piece visually. Are there any abnormalities on the surface of the film? The method for inspecting the alignment film of a liquid crystal display of the present invention can directly inspect the alignment film under strong light after the alignment film is atomized.

9773twf1.ptc 第7頁 1220454 _案號92100215_年月日__ 五、發明說明(4) 配向膜上是否有異常之情形,因此本發明之方法具有快速 以及簡單之優點。 本發明之檢視液晶顯示器之配向膜的設備,由於其僅 需蒸汽產生器以及強光燈,而不需昂貴的光學檢視儀器, 因此較習知檢視設備便宜許多。 為讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂,下文特舉一較佳實施例,並配合所附圖式,作詳 細說明如下: 實施方式 第2圖,其繪示為依照本發明一較佳實施例之檢視配 向膜之設備示意圖。 請參照第2圖,本實施例之配向膜的檢測設備包括一 檢測室2 0 0、一蒸汽產生器2 0 4以及一強光燈2 0 8。 其中,檢測室2 0 0係由一堅固之框架所構成,且在堅 固框架之周圍還覆蓋有一黑幕2 0 2,此黑幕2 0 2係為不透 光、不透氣且不反光之一黑色布幕材料,以將外界光線以 及氣流干擾阻絕在外。 蒸汽產生器2 0 4係放置在檢測室2 0 0中,其中一待測之 配向膜測試片2 0 6係放置在蒸汽產生器2 0 4之上方,以使蒸 汽產生器2 0 4所產生之蒸汽可將配向膜測試片2 0 6霧化。其 中,此配向膜測試片2 0 6已歷經過一研磨製程,因此在配 向膜測試片2 0 6之表面上已形成有許多溝槽。而此蒸汽產 生器2 0 4更包括與一電源供應器2 1 0連接,此電源供應器 2 1 0係用來供應電源給蒸汽產生器2 0 4。9773twf1.ptc Page 7 1220454 _Case No. 92100215_Year Month Date__ V. Description of the invention (4) Whether there is any abnormality on the alignment film, so the method of the invention has the advantages of fast and simple. Since the device for inspecting the alignment film of a liquid crystal display of the present invention only needs a steam generator and a strong light, and does not require expensive optical inspection instruments, it is much cheaper than a conventional inspection device. In order to make the above and other objects, features, and advantages of the present invention more comprehensible, a preferred embodiment is given below in conjunction with the accompanying drawings to make a detailed description as follows: FIG. 2 shows an embodiment A schematic diagram of an apparatus for inspecting an alignment film according to a preferred embodiment of the present invention. Referring to FIG. 2, the detection device of the alignment film of this embodiment includes a detection chamber 200, a steam generator 204, and a strong light lamp 208. Among them, the detection chamber 2 0 0 is composed of a solid frame, and a black curtain 2 2 is covered around the solid frame. The black curtain 2 2 is a black cloth which is light-proof, air-permeable and non-reflective. Curtain material to block outside light and airflow interference. The steam generator 2 0 4 is placed in the detection room 200, and one of the alignment film test pieces 2 6 to be tested is placed above the steam generator 2 0 4 so that the steam generator 2 0 4 generates The steam can atomize the alignment film test piece 206. Among them, the alignment film test piece 206 has undergone a grinding process, so many grooves have been formed on the surface of the alignment film test piece 206. The steam generator 204 is further connected to a power supply 210, which is used to supply power to the steam generator 204.

9773twf1.ptc 第8頁 1220454 _案號92100215_年月曰 修正_ 五、發明說明(5) 另外,強光燈2 0 8係放置在檢測室2 0 0中,且強光燈 2 0 8係直接照射此配向膜測試片2 0 6。而此強光燈2 0 8亦與 電源供應器2 1 0連接,用以供應電源至強光燈2 0 8。 利用此強光燈2 0 8照射配向膜測試片2 0 6後,便可以直 接以目視的方式檢視霧化後之配向膜測試片2 0 6之表面上 是否有異常現象,而所謂異常現象例如是配向膜測試片 2 0 6上之溝槽的長度及間距是否符合標準,以及配向膜測 試片206之表面是否有其他異常的圖案刻痕存在。如第3圖 所示,檢視人員將霧化後之配向膜測試片2 0 6拿起來直接 以目視的方式檢視,由於霧化後之配向膜測試片2 0 6上的 溝槽將會明顯顯現出來,再加上強光燈2 0 8之輔助,因此 檢視人員可以輕易以目視的方式檢視出配向膜測試片2 0 6 之表面的溝槽是否異常或者是有其他異常的刻痕圖案產 生。 倘若檢視人員發現配向膜測試片2 0 6之表面確實有異 常現象時,則可以立即依照異常之狀況而調整研磨製程之 參數或進行研磨機台的檢查維修工作,以確保後續之產品 不會受到造成影響。 第4圖所示,其繪示為依照本發明一較佳實施例之檢 視配向膜之流程圖。 請參照第4圖,利用本發明之檢視設備以檢視液晶顯 示器之配向膜的方法,係首先將一配向膜測試片放置在一 檢測室中(步驟4 0 0 )。其中,此檢測室之周圍例如是覆蓋 有不透光、不透氣且不反光之一黑幕,以將外界光線以及9773twf1.ptc Page 8 1220454 _Case No. 92100215_ Year Month Amendment _5. Description of the invention (5) In addition, the 280 light series is placed in the detection room 280, and the 280 light series is Directly irradiate this alignment film test piece 206. The high-intensity lamp 208 is also connected to the power supply 210, which is used to supply power to the high-intensity lamp 208. After irradiating the alignment film test piece 206 with this strong light lamp 208, it is possible to directly visually check whether there is an abnormality on the surface of the atomized alignment film test piece 206. The so-called abnormal phenomenon such as Whether the length and pitch of the grooves on the alignment film test sheet 206 meet the standard, and whether there are other abnormal pattern marks on the surface of the alignment film test sheet 206. As shown in FIG. 3, the inspector picks up the atomized alignment film test piece 206 and directly inspects it visually. Because the groove on the atomized alignment film test piece 206 will be apparent. Come out, plus the assistance of a strong light lamp 2008, so the inspector can easily visually check whether the grooves on the surface of the alignment film test strip 2 06 are abnormal or have other abnormal scratch patterns. If the inspector finds that there is an abnormality on the surface of the alignment film test piece 206, he can immediately adjust the parameters of the grinding process or carry out the inspection and maintenance of the grinding machine according to the abnormal conditions to ensure that subsequent products will not be affected. Make an impact. FIG. 4 is a flowchart of an inspection alignment film according to a preferred embodiment of the present invention. Referring to FIG. 4, a method for inspecting an alignment film of a liquid crystal display by using the inspection device of the present invention is to first place an alignment film test piece in a detection chamber (step 400). Among them, the surrounding of the detection chamber is covered with a black curtain which is opaque, air-permeable and non-reflective, so as to shield the external light and

9773twf1.ptc 第9頁 1220454 _案號92100215_年月日_«_ 五、發明說明(6) 氣流干擾阻絕在外。而且,此配向膜測試片已歷經過一研 磨製程,因此在配向膜測試片之表面上已形成有許多溝 槽。 接著,將配向膜測試片霧化(步驟4 0 2 ),其中霧化配 向膜測試片之方法例如是將此配向膜測試片放置在一蒸汽 產生器上,藉由蒸汽產生器所產生之蒸汽以將配向膜霧 化。 之後,利用一強光照射配向膜測試片(步驟4 0 4 )。再 直接以目視的方式檢視配向膜測試片(步驟4 0 6 ),換言 之,在以強光照射霧化後之配向膜測試片之後,便可以直 接以目視的方式檢視此配向膜測試片之表面上是否有異常 現象,例如檢視配向膜測試片上之溝槽的長度及間距是否 符合標準,以及檢視配向膜測試片之表面是否有其他異常 的圖案刻痕存在。 倘若在步驟4 0 6中,發現配向膜測試片之表面確實有 異常現象時,則可以立即依照異常之狀況而調整研磨製程 之參數或進行研磨機台的檢查維修工作,以確保後續之產 品不會受到影響。 因此,本發明之檢視液晶顯示器之配向膜的方法與設 備,由於其係將配向膜測試片霧化之後,在強光的照射下 便可以直接目視檢視配向膜上是否有異常之情形,因此本 發明係為一種簡易且快速的目視檢視方法及設備,其具有 有快速以及簡單之優點。 本發明之檢視液晶顯示器之配向膜的方法與設備,由9773twf1.ptc Page 9 1220454 _Case No. 92100215_ Year Month and Day _ «V. Description of the invention (6) Airflow interference is blocked. Moreover, the alignment film test piece has gone through a grinding process, so many grooves have been formed on the surface of the alignment film test piece. Next, the alignment film test piece is atomized (step 402). The method for atomizing the alignment film test piece is, for example, placing the alignment film test piece on a steam generator, and using the steam generated by the steam generator To atomize the alignment film. After that, the alignment film test piece is irradiated with a strong light (step 404). Then directly visually inspect the alignment film test piece (step 406). In other words, after irradiating the atomized alignment film test piece with strong light, you can directly visually inspect the surface of the alignment film test piece. Are there any abnormal phenomena, such as checking whether the length and spacing of the grooves on the alignment film test sheet meet the standards, and checking whether there are other abnormal pattern marks on the surface of the alignment film test sheet. If it is found that there is an abnormality on the surface of the alignment film test piece in step 406, you can immediately adjust the parameters of the grinding process or perform the inspection and maintenance of the grinding machine according to the abnormal conditions to ensure that the subsequent products are not Will be affected. Therefore, the method and equipment for inspecting the alignment film of a liquid crystal display of the present invention can directly inspect whether there is an abnormality on the alignment film under strong light irradiation after the alignment film test piece is atomized. The invention is a simple and fast visual inspection method and device, which has the advantages of being fast and simple. The method and device for inspecting an alignment film of a liquid crystal display of the present invention are provided by

9773twf1.ptc 第10頁 1220454 _案號 92100215_年月日__ 五、發明說明(7) 於其僅需蒸汽產生器以及強光燈,而不需昂貴的光學檢視 儀器,因此本發明較習知之檢視設備與方法便宜許多。 雖然本發明已以較佳實施例揭露如上,然其並非用以 限定本發明,任何熟習此技藝者,在不脫離本發明之精神 和範圍内,當可作些許之更動與潤飾,因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。9773twf1.ptc Page 10 1220454 _ Case No. 92100215_ Year Month Date __ V. Description of the invention (7) Since it only needs a steam generator and a strong light lamp, and does not require expensive optical inspection equipment, the present invention is more familiar. Known inspection equipment and methods are much cheaper. Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications and retouching without departing from the spirit and scope of the present invention. The scope of protection shall be determined by the scope of the attached patent application.

9773twf1.ptc 第11頁 1220454 _案號92100215_年月日__ 圖式簡單說明 第1圖所示,其繪示為一配向膜之研磨製程之示意 圖; 第2圖是依照本發明一較佳實施例之檢視配向膜之設 備示意圖; 第3圖是依照本發明一較佳實施例之以目視的方式檢 視配向膜之示意圖;以及 第4圖是依照本發明一較佳實施例之檢視配向膜之流 程圖。 圖式之標示說明 100 基 板 102 配 向 膜 104 滾 輪 106 溝 槽 200 檢 測 室 202 $ 4 ΟΛ 幕 204 蒸 汽 產 生 器 206 配 向 膜 測 試片 208 強 光 燈 210 電 源 供 應 器9773twf1.ptc Page 11 1220454 _ Case No. 92100215_ Year Month Day __ Brief description of the diagram Figure 1 shows a schematic diagram of the grinding process of an alignment film; Figure 2 is a preferred method according to the present invention Schematic diagram of an apparatus for inspecting an alignment film according to an embodiment; FIG. 3 is a schematic diagram of inspecting an alignment film visually according to a preferred embodiment of the present invention; and FIG. 4 is an inspection of an alignment membrane according to a preferred embodiment of the present invention The flowchart. Description of the drawings 100 base plate 102 Alignment film 104 Roller 106 Groove 200 Inspection room 202 $ 4 ΟΛ curtain 204 Steam generator 206 Alignment film test strip 208 Strong light 210 Power supply

9773twf1.ptc 第12頁9773twf1.ptc Page 12

Claims (1)

1220454 _案號92100215_年月日__ 六、申請專利範圍 1 . 一種檢視配向膜的方法,包括: 將一配向膜測試片放置在一檢測室中; 將該配向膜測試片霧化; 以強光照射該配向膜測試片;以及 檢視該配向膜測試片之表面是否有異常現象。 2 ·如申請專利範圍第1項所述之檢視配向膜的方法, 其中該配向膜測試片已經歷過一研磨製程。 3 ·如申請專利範圍第1項所述之檢視配向膜的方法, 其中該檢測室係將外界光線以及氣流干擾阻絕在外。 4.如申請專利範圍第1項所述之檢視配向膜的方法, 其中該檢測室之周圍係利用一黑幕遮罩住。 5 ·如申請專利範圍第4項所述之檢視配向膜的方法, 其中該黑幕係為不透光、不透氣且不反光之一黑色布幕材 質。 6 ·如申請專利範圍第1項所述之檢視配向膜的方法, 其中霧化該配向膜測試片之方法係利用一蒸汽產生器所產 生之蒸汽以將該配向膜測試片霧化。 7 ·如申請專利範圍第1項所述之檢視配向膜的方法, 其中以強光照射該配向膜測試片之方法係利用一強光燈直 接照射該配向膜測試片。 8 ·如申請專利範圍第1項所述之檢視配向膜的方法, 其中檢視該配向膜測試片表上是否有異常現象之方法係直 接利用目視之方法判斷。 9 ·如申請專利範圍第1項所述之檢視配向膜的方法,1220454 _Case No. 92100215_Year Month Date__ VI. Application Patent Scope 1. A method for inspecting an alignment film, comprising: placing an alignment film test piece in a detection chamber; atomizing the alignment film test piece; Strong light illuminates the alignment film test piece; and inspects the surface of the alignment film test piece for abnormal phenomena. 2. The method for inspecting an alignment film as described in item 1 of the scope of patent application, wherein the alignment film test piece has undergone a grinding process. 3. The method for inspecting an alignment film as described in item 1 of the scope of the patent application, wherein the detection chamber blocks external light and airflow interference. 4. The method for inspecting an alignment film according to item 1 of the scope of patent application, wherein the surroundings of the detection chamber are covered with a black screen. 5. The method for inspecting an alignment film as described in item 4 of the scope of patent application, wherein the black curtain is a black cloth curtain material that is opaque, air-permeable and non-reflective. 6. The method for inspecting an alignment film as described in item 1 of the scope of patent application, wherein the method for atomizing the alignment film test piece is to use the steam generated by a steam generator to atomize the alignment film test piece. 7. The method for inspecting an alignment film as described in item 1 of the scope of patent application, wherein the method for irradiating the test piece of the alignment film with strong light is to directly irradiate the test piece of the alignment film with a strong light. 8 · The method for inspecting an alignment film as described in item 1 of the scope of the patent application, wherein the method for inspecting whether there is any abnormality on the sheet of the alignment film test sheet is directly judged by visual inspection. 9 · The method of inspecting the alignment film as described in item 1 of the scope of patent application, 9773twf1.ptc 第13頁 1220454 案號 92100215 年 月 曰 修正 六、申請專利範圍 其中檢視該配向膜測試片表上是否有異常現象之該步驟包 括檢視該配向膜測試片表面之溝槽長度及溝槽位置是否異 常,以及檢視該配向膜測試片之表面是否有異常圖案產 生。 1 0 .如申請專利範圍第1項所述之檢視配向膜的方法, 其中倘若該配向膜測試片之檢視結果係為異常,則依照其 異常之狀況而調整製程參數或進行檢查維修工作。 1 1 . 一種檢視配向膜的設備,包括: 一檢測室; 一蒸汽產生器,配置在該檢測室中,其中一待測之配 向膜測試片係放置在該蒸汽產生器上;以及 照射該 12 備,該 外。 13 備,其 架周圍 14 備,其 幕材質 15 備,其 一強光燈,配置在該檢測室中,其中該強光燈係直接 待測支配向膜。 ,如申請專利範圍第1 1項所述之檢視配向膜的設 其中該檢測室係將外界光線以及氣流干擾阻絕在 .如申請專利範圍第1 1項所述之檢視配向膜的設 中該檢測室係由一堅固之框架所構成,且該堅固框 係覆蓋一黑幕。 .如申請專利範圍第1 3項所述之檢視配向膜的設 中該黑幕係為不透光、不透氣且不反光之一黑色布 〇 .如申請專利範圍第1 1項所述之檢視配向膜的設 中更包括一電源供應器,用以供應電源給該蒸汽產9773twf1.ptc Page 13 1220454 Case No. 92100215 Amendment 6 、 Scope of patent application Where the inspection of the alignment film test sheet table is abnormal, this step includes inspecting the groove length and the groove surface of the alignment film test sheet Check whether the position is abnormal, and check whether there are abnormal patterns on the surface of the alignment film test piece. 10. The method for inspecting an alignment film as described in item 1 of the scope of patent application, wherein if the inspection result of the alignment film test piece is abnormal, adjust the process parameters or perform inspection and maintenance according to the abnormal condition. 1 1. An apparatus for inspecting an alignment film, comprising: a detection chamber; a steam generator disposed in the detection chamber, wherein a test film of an alignment film to be tested is placed on the steam generator; and the 12 Equipment, the outside. There are 13 equipments, 14 equipments around the rack, 15 materials for the curtain, and one glare lamp, which is arranged in the detection room, where the glare lamp is the directing film to be tested. As described in the scope of application of the patent for the inspection of the alignment film set 11th, wherein the detection room is to block external light and air current interference. As described in the scope of the patent application for the inspection of the alignment film set 11 The room is composed of a solid frame, and the solid frame covers a black curtain. The black curtain is a black cloth that is opaque, air-permeable and non-reflective in the setting of the viewing alignment film described in item 13 of the patent application scope. The viewing alignment described in item 11 of the patent application scope The membrane design further includes a power supply for supplying power to the steam generator. 9773twf1.ptc 第14頁 1220454 案號 92100215 六、申請專利範圍 生器以及該強光燈 _η 曰 修正 Ιϋϋ 第15頁 9773twf1.ptc9773twf1.ptc Page 14 1220454 Case No. 92100215 VI. Scope of patent application Vital appliances and the high-intensity lamp _η Revision Ⅰϋϋ Page 15 9773twf1.ptc
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