TWD230332S - Pedestal for a substrate processing system - Google Patents
Pedestal for a substrate processing system Download PDFInfo
- Publication number
- TWD230332S TWD230332S TW110305460F TW110305460F TWD230332S TW D230332 S TWD230332 S TW D230332S TW 110305460 F TW110305460 F TW 110305460F TW 110305460 F TW110305460 F TW 110305460F TW D230332 S TWD230332 S TW D230332S
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- TW
- Taiwan
- Prior art keywords
- view
- pedestal
- design
- top view
- substrate processing
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 title abstract description 12
- 239000000758 substrate Substances 0.000 title abstract description 5
- 238000010586 diagram Methods 0.000 abstract 5
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Abstract
【設計說明】;立體圖係基板處理系統用台座之實施例的視圖；俯視圖係立體圖所示之台座的視圖；橫剖面圖1係沿著俯視圖中之線3-3之平面的台座之頂板的視圖；橫剖面圖2係沿著俯視圖中之線4-4之平面的台座之頂板的視圖；局部放大俯視圖係俯視圖之台座之頂板之一部分的視圖(細節5)。;使用包含虛線之斷線所顯示之元件僅為例示之目的，並且不構成所請設計的部分。包含虛線與點的斷線係用於表示剖面圖。圖式所揭露之虛線係表示所應用之物品，為本案不主張設計之部分。;如同顯示與說明，本設計係主張基板處理系統用台座的裝飾性設計。【Design Description】; The three-dimensional diagram is a view of an embodiment of a pedestal for a substrate processing system; the top view is a view of the pedestal shown in the three-dimensional diagram; the cross-sectional diagram 1 is a view of the top plate of the pedestal along the plane of line 3-3 in the top view; the cross-sectional diagram 2 is a view of the top plate of the pedestal along the plane of line 4-4 in the top view; the partially enlarged top view is a view of a portion of the top plate of the pedestal in the top view (Detail 5). ; The components shown by the broken lines including dashed lines are for illustrative purposes only and do not constitute part of the requested design. The broken lines including dashed lines and dots are used to represent the cross-sectional diagram. The dashed lines disclosed in the figure represent the applied items and are not the parts of the design advocated by this case. ;As shown and described, this design advocates the decorative design of the base for substrate processing systems.
Description
立體圖係基板處理系統用台座之實施例的視圖；俯視圖係立體圖所示之台座的視圖；橫剖面圖1係沿著俯視圖中之線3-3之平面的台座之頂板的視圖；橫剖面圖2係沿著俯視圖中之線4-4之平面的台座之頂板的視圖；局部放大俯視圖係俯視圖之台座之頂板之一部分的視圖(細節5)。 The perspective view is a view of an embodiment of the pedestal for a substrate processing system; the top view is a view of the pedestal shown in a perspective view; the cross-sectional view 1 is a view of the top plate of the pedestal along the plane of line 3-3 in the top view; the cross-sectional view 2 It is a view of the top plate of the pedestal along the plane of line 4-4 in the top view; the partially enlarged top view is a view of a part of the top plate of the pedestal in the top view (detail 5).
使用包含虛線之斷線所顯示之元件僅為例示之目的，並且不構成所請設計的部分。包含虛線與點的斷線係用於表示剖面圖。圖式所揭露之虛線係表示所應用之物品，為本案不主張設計之部分。 Components shown using broken lines including dashed lines are for illustration purposes only and do not form part of the requested design. Broken lines consisting of dashed lines and dots are used to represent cross-sections. The dotted lines disclosed in the drawings represent the applied items and are the parts of this case that are not intended to be designed.
如同顯示與說明，本設計係主張基板處理系統用台座的裝飾性設計。 As shown and explained, this design is a decorative design for a pedestal for a substrate handling system.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202129778184 | 2021-04-12 | ||
| US29/778,184 | 2021-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD230332S true TWD230332S (en) | 2024-03-11 |
Family
ID=91333389
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW110305460F TWD230332S (en) | 2021-04-12 | 2021-10-08 | Pedestal for a substrate processing system |
| TW110305460D01F TWD232576S (en) | 2021-04-12 | 2021-10-08 | Pedestal for a substrate processing system |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW110305460D01F TWD232576S (en) | 2021-04-12 | 2021-10-08 | Pedestal for a substrate processing system |
Country Status (1)
| Country | Link |
|---|---|
| TW (2) | TWD230332S (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD201038S (en) | 2018-05-18 | 2019-11-21 | 日商國際電氣股份有限公司 | Sealing cover for semiconductor manufacturing equipment |
-
2021
- 2021-10-08 TW TW110305460F patent/TWD230332S/en unknown
- 2021-10-08 TW TW110305460D01F patent/TWD232576S/en unknown
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD201038S (en) | 2018-05-18 | 2019-11-21 | 日商國際電氣股份有限公司 | Sealing cover for semiconductor manufacturing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| TWD232576S (en) | 2024-08-01 |
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