TWD223247S - 遮蔽環升降組件 - Google Patents

遮蔽環升降組件 Download PDF

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Publication number
TWD223247S
TWD223247S TW111301131F TW111301131F TWD223247S TW D223247 S TWD223247 S TW D223247S TW 111301131 F TW111301131 F TW 111301131F TW 111301131 F TW111301131 F TW 111301131F TW D223247 S TWD223247 S TW D223247S
Authority
TW
Taiwan
Prior art keywords
lift assembly
shadow ring
ring lift
design
lifting assembly
Prior art date
Application number
TW111301131F
Other languages
English (en)
Inventor
黃祖濱
史瑞尼法斯 托庫爾莫哈納
史瑞雅斯 帕提珊塔維拉斯瓦米
珊德許 雅達曼尼
拉菲 傑立巴利
哈爾普利特 辛格
曼裘那薩 高帕
Original Assignee
美商應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TWD223247S publication Critical patent/TWD223247S/zh

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Abstract

【物品用途】;本設計所請求係遮蔽環升降組件。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分。

Description

遮蔽環升降組件
本設計所請求係遮蔽環升降組件。
圖式所揭露之虛線部分，為本案不主張設計之部分。
TW111301131F 2021-09-28 2022-03-09 遮蔽環升降組件 TWD223247S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/809,534 2021-09-28
US29/809,534 USD997894S1 (en) 2021-09-28 2021-09-28 Shadow ring lift assembly

Publications (1)

Publication Number Publication Date
TWD223247S true TWD223247S (zh) 2023-01-21

Family

ID=84027355

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111301131F TWD223247S (zh) 2021-09-28 2022-03-09 遮蔽環升降組件

Country Status (3)

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US (1) USD997894S1 (zh)
JP (1) JP1729851S (zh)
TW (1) TWD223247S (zh)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD212326S (zh) 2020-05-27 2021-06-21 日商日立全球先端科技股份有限公司 電漿處理裝置用離子遮蔽板

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5922133A (en) 1997-09-12 1999-07-13 Applied Materials, Inc. Multiple edge deposition exclusion rings
US6589352B1 (en) * 1999-12-10 2003-07-08 Applied Materials, Inc. Self aligning non contact shadow ring process kit
US20030000647A1 (en) 2001-06-29 2003-01-02 Applied Materials, Inc. Substrate processing chamber
JP2006324610A (ja) 2005-05-20 2006-11-30 Matsushita Electric Ind Co Ltd 基板処理装置及び基板処理方法
US8801857B2 (en) * 2008-10-31 2014-08-12 Asm America, Inc. Self-centering susceptor ring assembly
US20220172980A1 (en) * 2008-10-31 2022-06-02 Asm Ip Holding B.V. Self-centering susceptor ring assembly
US9236284B2 (en) 2014-01-31 2016-01-12 Applied Materials, Inc. Cooled tape frame lift and low contact shadow ring for plasma heat isolation
SG11201701465QA (en) * 2014-09-05 2017-03-30 Applied Materials Inc Susceptor and pre-heat ring for thermal processing of substrates
US20180138074A1 (en) * 2016-11-11 2018-05-17 Samsung Electronics Co., Ltd. Carrier ring and chemical vapor deposition apparatus including the same
US12531210B2 (en) 2018-04-20 2026-01-20 Lam Research Corporation Edge exclusion control
US11512393B2 (en) * 2018-11-29 2022-11-29 Lam Research Corporation Dynamic sheath control with edge ring lift
KR102770274B1 (ko) 2019-08-06 2025-02-20 삼성전자주식회사 샤워헤드 및 이를 구비하는 기판 처리장치
CN114945707A (zh) * 2020-01-17 2022-08-26 朗姆研究公司 具有用于排放晶片边缘气体的流动路径的排除环
JP2023514842A (ja) 2020-02-21 2023-04-11 ラム リサーチ コーポレーション 裏面反応性阻害ガス
US20220108908A1 (en) * 2020-10-06 2022-04-07 Applied Materials, Inc. Shadow ring kit for plasma etch wafer singulation process

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD212326S (zh) 2020-05-27 2021-06-21 日商日立全球先端科技股份有限公司 電漿處理裝置用離子遮蔽板

Also Published As

Publication number Publication date
USD997894S1 (en) 2023-09-05
JP1729851S (ja) 2022-11-15

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