TWD163540S - Wafer loading/unloading chamber cover - Google Patents
Wafer loading/unloading chamber coverInfo
- Publication number
- TWD163540S TWD163540S TW102306046F TW102306046F TWD163540S TW D163540 S TWD163540 S TW D163540S TW 102306046 F TW102306046 F TW 102306046F TW 102306046 F TW102306046 F TW 102306046F TW D163540 S TWD163540 S TW D163540S
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer loading
- chamber
- unloading chamber
- unloading
- substrates
- Prior art date
Links
- 239000000758 substrate Substances 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Abstract
【物品用途】;本設計的物品是晶圓載入/載出腔用蓋，設置於半導體製程裝置之晶圓載入/載出腔上。該晶圓載入/載出腔係連接於真空搬送室，該真空搬送室另連接於處理腔，真空搬送室收容有可移載基板之機械手臂，晶圓載入/載出腔具備有開閉閥供基板出入，處理腔維持真空狀態使晶圓載入/載出腔與處理腔之間基板進行出入，透明窗部可監視晶圓載入/載出腔內部。;【設計說明】;窗部係為透明。[Item Purpose];The item of this design is a cover for a wafer loading/unloading chamber, which is installed on the wafer loading/unloading chamber of a semiconductor process device. The wafer loading/unloading chamber is connected to a vacuum transfer chamber, which is further connected to a processing chamber. The vacuum transfer chamber houses a robot arm that can move substrates. The wafer loading/unloading chamber is equipped with an opening and closing valve for substrates to enter and exit. The processing chamber maintains a vacuum state to allow substrates to enter and exit between the wafer loading/unloading chamber and the processing chamber. The transparent window can monitor the inside of the wafer loading/unloading chamber. ;[Design Description];The window is transparent.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013007035 | 2013-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD163540S true TWD163540S (en) | 2014-10-11 |
Family
ID=90415016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102306046F TWD163540S (en) | 2013-03-28 | 2013-09-09 | Wafer loading/unloading chamber cover |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWD163540S (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD931240S1 (en) | 2019-07-30 | 2021-09-21 | Applied Materials, Inc. | Substrate support pedestal |
-
2013
- 2013-09-09 TW TW102306046F patent/TWD163540S/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD931240S1 (en) | 2019-07-30 | 2021-09-21 | Applied Materials, Inc. | Substrate support pedestal |
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