TWD162593S - 探針卡盒體 - Google Patents
探針卡盒體Info
- Publication number
- TWD162593S TWD162593S TW102305919F TW102305919F TWD162593S TW D162593 S TWD162593 S TW D162593S TW 102305919 F TW102305919 F TW 102305919F TW 102305919 F TW102305919 F TW 102305919F TW D162593 S TWD162593 S TW D162593S
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- 239000000523 sample Substances 0.000 title abstract 5
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Abstract
【物品用途】;本設計係關於一種將半導體處理裝置之探針卡加以收納並進行搬運之盒體。;【設計說明】;本設計之探針卡盒體係將探針卡固定於透明之上側盒體的下面,並收納於下側盒體之凹陷部。藉此,可將固定著探針卡之上側盒體直接裝填到搬運對象之裝置處。;於A-A截面圖、B-B截面圖、C-C截面圖、D-D截面圖、立體圖以及顯示使用狀態之參考立體圖中,上側盒體為透明。本設計之物品乃以樹脂構件所形成者。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2013004735 | 2013-03-05 |
Publications (1)
Publication Number | Publication Date |
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TWD162593S true TWD162593S (zh) | 2014-08-21 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW102305919F TWD162593S (zh) | 2013-03-05 | 2013-09-04 | 探針卡盒體 |
Country Status (2)
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US (1) | USD751555S1 (zh) |
TW (1) | TWD162593S (zh) |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP1647333S (zh) * | 2019-03-28 | 2020-11-30 | ||
USD971212S1 (en) * | 2021-03-31 | 2022-11-29 | Lixing Xu | Protective cover for mobile phone |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2700063B1 (fr) * | 1992-12-31 | 1995-02-10 | Sgs Thomson Microelectronics | Procédé de test de puces de circuit intégré et dispositif intégré correspondant. |
JP3484365B2 (ja) * | 1999-01-19 | 2004-01-06 | シャープ株式会社 | 半導体装置用パッケージ、この半導体装置用パッケージのテスト時に使用するプローブカード、および、このプローブカードを用いたパッケージのテスト方法 |
USD436594S1 (en) * | 1999-09-10 | 2001-01-23 | Chong-Kuan Ling | Combination lock for floppy disk drive |
USD476009S1 (en) * | 2001-06-07 | 2003-06-17 | Dell Products, L.P. | Computer system status display |
EP1345197A1 (en) * | 2002-03-11 | 2003-09-17 | Dialog Semiconductor GmbH | LCD module identification |
JP2004085247A (ja) * | 2002-08-23 | 2004-03-18 | Mitsubishi Electric Corp | プローブカード |
USD501664S1 (en) * | 2003-07-25 | 2005-02-08 | Matsushita Electric Industrial Co., Ltd. | Image sensor |
US7307440B2 (en) * | 2005-10-25 | 2007-12-11 | Credence Systems Corporation | Semiconductor integrated circuit tester with interchangeable tester module |
USD608362S1 (en) * | 2008-05-22 | 2010-01-19 | Ncr Corporation | Barcode scanner weigh plate |
USD717800S1 (en) * | 2012-10-17 | 2014-11-18 | Apple Inc. | Housing for an electronic device |
USD714789S1 (en) * | 2013-02-04 | 2014-10-07 | Comptake Technology Inc. | Housing of solid state drive |
USD694242S1 (en) * | 2013-03-15 | 2013-11-26 | Creative Technology Ltd | Shield |
USD735726S1 (en) * | 2015-02-13 | 2015-08-04 | inXtron, Inc. | Hard disk drive bracket |
-
2013
- 2013-09-03 US US29/465,883 patent/USD751555S1/en active Active
- 2013-09-04 TW TW102305919F patent/TWD162593S/zh unknown
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