TW594155B - Optical interference type color display and optical interference modulator - Google Patents

Optical interference type color display and optical interference modulator Download PDF

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Publication number
TW594155B
TW594155B TW091137638A TW91137638A TW594155B TW 594155 B TW594155 B TW 594155B TW 091137638 A TW091137638 A TW 091137638A TW 91137638 A TW91137638 A TW 91137638A TW 594155 B TW594155 B TW 594155B
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electrode
scope
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TW091137638A
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TW200411255A (en
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Wen-Jian Lin
Hsiung-Kuang Tsai
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Prime View Int Corp Ltd
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Priority to TW091137638A priority Critical patent/TW594155B/zh
Priority to US10/249,244 priority patent/US6912022B2/en
Priority to KR10-2003-0026832A priority patent/KR100494736B1/ko
Priority to JP2003136787A priority patent/JP3996545B2/ja
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Liquid Crystal (AREA)
  • Optical Filters (AREA)

Description

594155 _案號91137638_年月曰 修正_ 五、發明說明(1) 發明所屬之技術領域 本發明是有關於一種光干涉式彩色顯示面板及光干涉 調節元件,且特別是有關於一種採用單一空氣間隙設計以 及彩色濾光薄膜的光干涉式彩色顯示面板及光干涉調節元 件。 先前技術 目前具有重量輕、厚度薄的平面顯示器,例如液晶顯 示器(LCD)、有機電激發光顯示元件(OLED)、電漿顯示器 (PDP)等已被廣泛的應用於日常生活中。其中,液晶顯示 器已經漸漸成為顯示器的主流,但液晶顯示器仍然存在有 許多的問題,例如是視角不夠廣、應答時間不夠快、需要 藉由彩色濾光片方能全彩化,以及需要使用偏光片而使光 源利用效率不佳,進而導致背光模組更為耗電等等的問 題。 現今已有一種光干涉式顯示面板被發展出來,其主要 是由多個陣列排列的光干涉調節元件(〇 p t i c a 1 Interference Modulator)所構成。其中,光干涉調節元 件主要係由一透明電極、一反射電極以及一用以支撐反射 電極的支撐層所構成。藉由支撐層的支撐,反射電極與透 明電極之間會間隔一特定之空氣間隙(A i r G a p ),光線由 透明電極端進入光干涉調節元件之後,會經過空氣間隙並 入射至第二電極上,接著再藉由第二電極從透明電極端反 射出來。由於光線在不同的空氣間隙中會受到不同程度的 干涉(Interference),進而呈現不同色光,如紅光、綠光
10395twf1.ptc 第8頁 594155 ____案號 91137638 _^^_日__修正___ 五、發明說明(2) 以及藍光。此外,光干涉調節元件中的反射電極必須結合 微機電系統(Micro Electro Mechanical System,MEMS) 進行設計,以使得光干涉調節元件能夠切換於開啟/關閉 (ο η / 〇 f f )兩種狀態之間,進而達到顯示的目的。 上述由光干涉調節元件所構成之光干涉式顯示面板不 需架構彩色渡光膜與偏光板即可顯示適當之彩色畫面,能 夠節省使用彩色濾光片所需的成本。此外,上述由光干涉 調節元件所構成之光干涉式顯示面板具有低電力耗能、快 速應答時間及雙穩態(B i - s t a b 1 e )的特性,因此有利於低 電力耗能產品的開發,進而應用於可攜式(p 〇 r t a b丨e )的產 品上’例如是行動電話(Μ o b i 1 e P h ο n e )、個人數位助理 (PDA)、電子書(e-book)等。 第1圖繪示為習知光干涉式彩色顯示面板的示意圖。 請參照第1圖所示’光干涉式彩色顯示面板1 〇 〇主要係由一 基板110、一圖案化支撐層120、多個第一電極ho、多個 光學薄膜1 4 0以及多個第二電極1 5 〇所構成。其中,基板 110通常是玻璃基板或其他透明材質之透明基板;圖案化 支撐層120配置於基板11〇上,且圖案化支撐層12〇係用以 支撐住第二電極150的邊緣;第一電極13〇配置於基板 上,此第一電極1 30為透明電極,其材質例如是銦錫氧化 物(Indium Tin Oxide ,IT0);光學薄膜“!)配詈於第一雷 極13〇上,且光學薄膜140通常是由多;膜高;0電配:數於與第多層電 低介電係數交互堆疊所組成;第二電極丨5 〇配置於圖案化 支撐層120上方,並藉由圖案化支撐層12〇支撐,此第二電
10395twf1.ptc 594155 -_ 年月曰 ^_ 五、發明說明(3) 極150通常是具有光反射的金屬材質。 習知的光千涉式彩色顯示面板是由具有不同空氣間隙 (Air Gap)的光干涉_ 節元件(interference m〇dulator) 所構成。由第1圖中可知,不同的光干涉調節元件中,第 二電極1 5 0與第一^電極間1 3 〇之間空氣間隙的設計並不相 同’且為了達成,色顯示的目的,光干涉調節元件中的空 氣間隙通常會設計成三種空氣間隙d丨、d 2、d 3,其中,空 氣間隙為d 1的光干涉調節元件例如能夠顯示紅光;空氣間 隙為d 2的光干涉调雖元件例如能夠顯示藍光;而空氣間隙 為d 3的光干涉調節元件例如能夠顯示綠光。換言之,當光 線由外界依序穿透基板1 1 0、第一電極丨3 〇、光學薄膜丨4 〇 之後’會經過不同的空氣間隙d丨、d 2、d 3入射至第二電極 150上,接著再由第二電極丨5〇反射出基板丨丨〇外時,受到 不同程度的干涉(Interference)而呈現紅光、綠光以及藍 光。 習知光干涉調節元件中的第二電極丨5 〇必須是反射材 質’且必須具備良好的機械特性,當第二電極1 5 0與第一 電極1 3 0麵接於一偏壓時,第二電極1 $ 〇會因電性吸引而朝 向第一電極130移動,進而改變光干涉調節元件中的空氣 間隙d 1 、d 2、d 3。換言之,藉由光干涉調節元件中空氣間 隙d 1、d 2、d 3的改變,即可讓顯示面板中的各個光干涉調 節元件(畫素)切換其開啟/關閉(0n/0f f )之狀態。 ° 承上所述,習知光干涉式彩色顯示面板主要是藉由三 種不同空隙間隙的光干涉調節元件來呈現紅光、綠光與藍
10395twfl,ptc 第10頁 594155 _案號91137638_年月曰 修正_ 五、發明說明(4) 光,其缺點條列如下: 1 .不同空隙間隙的光干涉調節元件在製作上必須分開 進行,其製程相當繁瑣而造成成本上的負擔。 2 .不同空隙間隙的光干涉調節元件在製作上必須分開 進行,使得製作時間隨之拉長,進而影響產能 (throughput ) ° 3.不同空隙間隙的光干涉調節元件在製作上必須分開 進行,使得製程冗長且複雜,故往往造成產品良率低落。 發明内容 因此,本發明的目的就是在提供一種光干涉式彩色顯 示面板及光干涉調節元件,藉由設計同一空氣間隙並配合 彩色濾光薄膜,以使顯示面板達到多彩或全彩之效果,並 使得製程更為簡易。 基於上述目的,本發明提出一種光干涉式彩色顯示面 板,此光干涉式彩色顯示面板係由一彩色濾光片基板、一 圖案化支撐層、多個第一電極、多個光學薄膜以及多個第 二電極所構成。其中,圖案化支撐層與第一電極皆配置於 彩色濾光片基板上,且圖案化支撐層位於各第一電極之間 的區域上,光學薄膜則配置於第一電極上,而第二電極配 置於第一電極上方,並藉由圖案化支撐層支撐住,故第二 電極與第一電極之間具有相同的空氣間隙。 基於上述目的,本發明提出一種光干涉調節元件,此 光干涉調節元件係由一基板、一彩色濾、光薄膜、一圖案化 支撐層、一第一電極、一光學薄膜以及一第二電極所構
10395twf1.ptc 第11頁 594155 _案號91137638_年月日__ 五、發明說明(5) 成。其中,彩色濾光薄膜配置於基板上,第一電極與圖案 化支撐層配置於彩色濾光薄膜上,且圖案化支撐層例如係 位於第一電極分佈的區域以外。光學薄膜則配置於第一電 極上,而第二電極配置於第一電極上方,並藉由案化支撐 層支撐住,故第二電極與第一電極之間具有一空氣間隙。 依照本發明之較佳實施例,彩色濾光片基板係由一基 板、一黑矩陣以及多個彩色濾光薄膜所構成。其中,黑矩 陣配置於基板上,黑矩陣具有多個格點,而彩色濾光薄膜 配置於基板上,且位於黑矩陣的各格點内。 依照本發明之較佳實施例,彩色濾光薄膜例如為紅色 濾光薄膜、綠色濾光薄膜或藍色濾光薄膜。基板例如是透 明基板,其材質例如是玻璃或高分子塑膠等。第一電極例 如為透明電極,且其材質例如為銦錫氧化物。第二電極例 如為金屬電極,且其材質例如為鉬、钥合金、鉻、銘或铭 合金等。光學薄膜例如是由多層高介電係數與多層低介電 係數交互堆疊所形成。 本發明之光干涉式彩色顯示面板及光干涉調節元件因 利用同一空氣間隙以及彩色濾光薄膜的結構,以使顯示面 板展現多彩或全彩之效果,且單一空氣間隙的設計將使得 面板製造流程更為簡易。 為讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂,下文特舉一較佳實施例,並配合所附圖式,作詳 細說明如下: 實施方式
10395twfl.ptc 第12頁 594155 案號 91137638
Jf:η 曰 修正 五、發明說明(6) 第2圖是依照本發明一較佳實施例光干涉式彩色顯示 面板的示意圖。請參照第2圖所示,光干涉式彩色顯示面 板2 0 0主要係由一彩色濾光片基板2丨〇、一圖案化支撐層 220、多個第一電極230、多個光學薄膜240以及多個第二 電極2! 5 0所構成。 彩色濾光片基板2 1 0係由一基板2 1 2、一黑矩陣2 1 4以 及多個彩色濾光薄膜2 1 6所構成。其中,基板2 1 2例如是透 明基板,且其材質例如是玻璃、高分子塑膠或其他透明材 質。黑矩陣2 1 4配置於基板2 1 2上,且黑矩陣2 1 4具有多個 格點’而彩色濾光薄膜2 1 6則配置於基板2丨2上,並位於黑 矩陣2 1 4的格點之内。上述之彩色濾光薄膜2丨6例如包含多 個紅色,光薄膜2 1 6 a、多個綠色濾光薄膜2 1 6 b以及多個藍 色濾光薄膜2i6c,且紅色濾光薄膜216a、綠色濾光薄膜 2 16b、藍色遽光薄膜2 16c可以各種型態排列於黑矩陣21 4 點之内,如馬赛克型、三角配置型、條列配置型、四 畫素配置型等型態。 圖案化支樓層2 2 0配置於彩色濾光片基板2丨〇之黑矩陣 ΐ方,且圖案化支撐層2 2 0係用以支撐住第二電極 ^ h #邊+緣/由第2圖中可知,圖案化支撐層2 2 〇例如為多 ,柱狀支撐體。此外,圖案化支擇層2 2 0的材質例如為樹 月曰Ues i η)或其他與化性與物性安定之材質。 搞9卩電極2 3 〇配置於彩色濾、光片基板2 1 0上,此第一電 ^邋明電極’其材質例如是鋼錫氧化物或其他透明 之导電材質。
594155
光學薄膜240係配置於第一電極23〇上,且與 24 0通常是由至少一層第一介電薄膜24〇a與至 子声、一 案號 發明說明(7) :組成,其中第-介電薄膜曰丄、 第一介電薄膜2 4 Ob之介電係數不相同。 第二電極2 5 0配置於第—電極23〇 , 層22。支樓住,以使得第一電则於第二=案化支: 持-空氣間隙。本實施例中,第二電 金屬電極,其材質例…、二絡有上 中第二電極25。與第_電極間23 以:周: η目同。由於各個光干涉二η \ r ί其上方的光干涉調節元件a搭配將可顯Λ光Λ 示綠光,而藍色滤光薄膜21fi =二f :几件入搭配將可顯 叩i匕心尤溥膜6 c與其上方的光+斗,从士彼 A , 色濾光片基板210上之彩色濾光薄膜216、第_ ( m膜24〇之,,會經過相同的空氣間隙d4人射至第二 電極250上,接著再由第二電極15〇反射出 210外時,將可分別呈現色飽和度( 色慮先片基板 光、綠光以及藍光。 又)心n的紅 承上所述,由於光干涉調節元件A中的第二電極25〇是
594155 _案號91137638_年月日__ 五、發明說明(8) 反射材質,且具備良好的機械特性,當第二電極2 5 0與第 一電極2 3 0耦接於一偏壓時,第二電極2 5 0會因電性吸引而 朝向第一電極2 3 0移動,進而改變光干涉調節元件A中的空 氣間隙d4。換言之,藉由光干涉調節元件A中空氣間隙d4 的改變,即可讓顯示面板中的各個光干涉調節元件A (畫 素)切換於開啟/關閉(on/of f )之狀態之間。 綜合以上所述,本發明至少具有下列優點: 1 .本發明光干涉式彩色顯示面板,由於每一光干涉調 節元件的空氣間隙皆相同,各個光干涉調節元件可同時製 作,使製程更行簡易,故可降低成本。 2.本發明光干涉式彩色顯示面板,由於每一光干涉調 節元件的空氣間隙皆相同,係可避免習知需重複製作所造 成的時間浪費,故可提昇產能(t h r 〇 u g h p u t )。 3 ·本發明光干涉式彩色顯示面板,由於每一光干涉調 節元件的空氣間隙皆相同,使製程更行簡易,故產品的良 率可提升。 4.本發明光干涉式彩色顯示面板中所使用之彩色濾光 薄膜,由於已是目前相當成熟的技術,其取得容易且色純 度高,故實用性高。 雖然本發明已以較佳實施例揭露如上,然其並非用以 限定本發明,任何熟習此技藝者,在不脫離本發明之精神 和範圍内,當可作些許之更動與潤飾,因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。
10395twfl.ptc 第15頁 594155 _案號91137638_年月日__ 圖式簡單說明 第1圖繪示為習知光干涉式彩色顯示面板的示意圖; 以及 第2圖是依照本發明一較佳實施例光干涉式彩色顯示 面板的示意圖。 圖式標示說明 100 光 干 涉式彩色顯示 110 基 板 120 圖 案 化支撐層 130 第 一 電極 140 第 二 電極 dl、1 d2、 • d 3 :空氣間隙 200 光 干 涉式彩色顯示 210 彩 色 濾、光片基板 212 基 板 214 垔 矩 陣 216 彩 色 濾光薄膜 216a :乡 3:色濾光薄膜 216b :綠色濾光薄膜 216c :藍色濾光薄膜 220 圖 案 化支撐層 230 第 _ — 電極 240 光 學 薄膜 2 5 0 : :第 二 電極 d4 : 空氣間隙
10395twfl.ptc 第16頁 594155 案號 91137638 年月曰 修正 圖式簡單說明 A :光干涉調節元件
IBS 第17頁 10395twf1.ptc

Claims (1)

  1. 594155 _案號91137638_年月日_ifi_ 六、申請專利範圍 1 . 一種光干涉式彩色顯示面板,包括: 一彩色濾光片基板; 一圖案化支撐層,配置於該彩色濾光片基板上; 複數個第一電極,配置於該彩色濾光片基板上; 複數個光學薄膜,配置於該些第一電極上;以及 複數個第二電極,配置於該些第一電極上方,並藉由 該圖案化支撐層支撐,其中該些第二電極與該些第一電極 之間具有相同的空氣間隙。 2 .如申請專利範圍第1項所述之光干涉式彩色顯示面 板,其中該彩色濾光片基板包括: 一基板; 一黑矩陣;以及 複數個彩色濾光薄膜,其中該黑矩陣配置於該基板 上,且該黑矩陣具有複數個格點,而該些彩色濾光薄膜配 置於該基板上,且位於該些格點之内。 3 .如申請專利範圍第2項所述之光干涉式彩色顯示面 板,其中該些彩色濾光薄膜包括複數個紅色濾光薄膜、複 數個綠色濾光薄膜,以及複數個藍色濾光薄膜。 4.如申請專利範圍第1項所述之光干涉式彩色顯示面 板,其中該些第一電極之材質包括透明電極。 5 .如申請專利範圍第4項所述之光干涉式彩色顯示面 板,其中該些第一電極之材質包括銦錫氧化物。 6.如申請專利範圍第1項所述之光干涉式彩色顯示面 板,其中該些第二電極之材質包括金屬電極。
    10395twf1.ptc 第18頁 594155 _案號91137638_年月日_ί±±_ 六、申請專利範圍 7 .如申請專利範圍第6項所述之光干涉式彩色顯示面 板,其中該些第二電極之材質包括鉬、鉬合金、鉻、鋁及 鋁合金其中之一。 8 .如申請專利範圍第1項所述之光干涉式彩色顯示面 板,其中該基板之材質為玻璃及高分子塑膠其中之一。 9 .如申請專利範圍第1項所述之光干涉式彩色顯示面 板,其中每一該些光學薄膜包括: 至少一第一介電薄膜;以及 至少一第二介電薄膜,其中該第二介電薄膜與該第一 薄膜係交互堆疊,且該第二介電薄膜之介電係數與該第一 介電薄膜之介電係數不同。 1 0 . —種光干涉調節元件,包括: 一基板; 一彩色濾光薄膜,配置於該基板上; 一圖案化支撐層,配置於該彩色濾光薄膜上; 一第一電極,配置於該彩色濾光薄膜上; 一光學薄膜,配置於該第一電極上;以及 一第二電極,配置於該第一電極上方,並藉由該圖案 化支撐層支撐,其中該第二電極與該第一電極之間具有一 空氣間隙。 1 1 .如申請專利範圍第1 0項所述之光干涉調節元件, 其中該彩色濾光薄膜包括一紅色濾光薄膜、一綠色濾光薄 膜,以及一藍色濾光薄膜其中之一。 1 2.如申請專利範圍第1 0項所述之光干涉調節元件,
    10395twf1.ptc 第19頁 594155 _案號91137638_年月曰 修正_ 六、申請專利範圍 其中該第一電極之材質包括透明電極。 1 3 .如申請專利範圍第1 2項所述之光干涉調節元件, 其中該第一電極之材質包括銦錫氧化物。 1 4.如申請專利範圍第1 0項所述之光干涉調節元件, 其中該第二電極之材質包括金屬電極。 1 5 .如申請專利範圍第1 4項所述之光干涉調節元件, 其中該第二電極之材質包括鉬、鉬合金、鉻、鋁及鋁合金 其中之一。 1 6 .如申請專利範圍第1 0項所述之光干涉調節元件, 其中該基板之材質為玻璃及高分子塑膠其中之一。 1 7.如申請專利範圍第1 0項所述之光干涉調節元件, 其中該光學薄膜包括: 至少一第一介電薄膜;以及 至少一第二介電薄膜,其中該第二介電薄膜與該第一 薄膜係交互堆疊,且該第二介電薄膜之介電係數與該第一 介電薄膜之介電係數不同。
    10395twf1.ptc 第20頁
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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7719747B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Method and post structures for interferometric modulation
US7807488B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US7911428B2 (en) 2004-09-27 2011-03-22 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7928928B2 (en) 2004-09-27 2011-04-19 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing perceived color shift
US7933475B2 (en) 2006-02-17 2011-04-26 Qualcomm Mems Technologies, Inc. Method and apparatus for providing back-lighting in a display device
US8004743B2 (en) 2006-04-21 2011-08-23 Qualcomm Mems Technologies, Inc. Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display
US8111445B2 (en) 2004-02-03 2012-02-07 Qualcomm Mems Technologies, Inc. Spatial light modulator with integrated optical compensation structure
US8284474B2 (en) 1994-05-05 2012-10-09 Qualcomm Mems Technologies, Inc. Method and system for interferometric modulation in projection or peripheral devices
US8362987B2 (en) 2004-09-27 2013-01-29 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US8979349B2 (en) 2009-05-29 2015-03-17 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
US9019183B2 (en) 2006-10-06 2015-04-28 Qualcomm Mems Technologies, Inc. Optical loss structure integrated in an illumination apparatus
US9025235B2 (en) 2002-12-25 2015-05-05 Qualcomm Mems Technologies, Inc. Optical interference type of color display having optical diffusion layer between substrate and electrode

Families Citing this family (124)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7907319B2 (en) 1995-11-06 2011-03-15 Qualcomm Mems Technologies, Inc. Method and device for modulating light with optical compensation
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
TWI231865B (en) * 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
TW593126B (en) * 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7855824B2 (en) * 2004-03-06 2010-12-21 Qualcomm Mems Technologies, Inc. Method and system for color optimization in a display
TWI267662B (en) * 2004-04-23 2006-12-01 Innolux Display Corp A color filter and a method of manufacturing the same
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
JP4449708B2 (ja) 2004-07-21 2010-04-14 日産自動車株式会社 車輪懸架装置
US7527995B2 (en) 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7130104B2 (en) 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US8004504B2 (en) * 2004-09-27 2011-08-23 Qualcomm Mems Technologies, Inc. Reduced capacitance display element
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7446926B2 (en) * 2004-09-27 2008-11-04 Idc, Llc System and method of providing a regenerating protective coating in a MEMS device
US7710632B2 (en) * 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Display device having an array of spatial light modulators with integrated color filters
US7653371B2 (en) 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7944599B2 (en) * 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US8102407B2 (en) * 2004-09-27 2012-01-24 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7373026B2 (en) * 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7808703B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. System and method for implementation of interferometric modulator displays
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7525730B2 (en) * 2004-09-27 2009-04-28 Idc, Llc Method and device for generating white in an interferometric modulator display
US7302157B2 (en) 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7920135B2 (en) 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
US7561323B2 (en) * 2004-09-27 2009-07-14 Idc, Llc Optical films for directing light towards active areas of displays
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US20060065622A1 (en) * 2004-09-27 2006-03-30 Floyd Philip D Method and system for xenon fluoride etching with enhanced efficiency
US7553684B2 (en) * 2004-09-27 2009-06-30 Idc, Llc Method of fabricating interferometric devices using lift-off processing techniques
US20060066557A1 (en) * 2004-09-27 2006-03-30 Floyd Philip D Method and device for reflective display with time sequential color illumination
US7327510B2 (en) * 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US20060077148A1 (en) * 2004-09-27 2006-04-13 Gally Brian J Method and device for manipulating color in a display
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US8031133B2 (en) * 2004-09-27 2011-10-04 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7630119B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7710636B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Systems and methods using interferometric optical modulators and diffusers
US7612932B2 (en) * 2004-09-27 2009-11-03 Idc, Llc Microelectromechanical device with optical function separated from mechanical and electrical function
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7321456B2 (en) 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7898521B2 (en) 2004-09-27 2011-03-01 Qualcomm Mems Technologies, Inc. Device and method for wavelength filtering
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
TW200628877A (en) * 2005-02-04 2006-08-16 Prime View Int Co Ltd Method of manufacturing optical interference type color display
US7884989B2 (en) 2005-05-27 2011-02-08 Qualcomm Mems Technologies, Inc. White interferometric modulators and methods for forming the same
US7460292B2 (en) 2005-06-03 2008-12-02 Qualcomm Mems Technologies, Inc. Interferometric modulator with internal polarization and drive method
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7652814B2 (en) 2006-01-27 2010-01-26 Qualcomm Mems Technologies, Inc. MEMS device with integrated optical element
US7547568B2 (en) * 2006-02-22 2009-06-16 Qualcomm Mems Technologies, Inc. Electrical conditioning of MEMS device and insulating layer thereof
US7550810B2 (en) * 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
US7643203B2 (en) * 2006-04-10 2010-01-05 Qualcomm Mems Technologies, Inc. Interferometric optical display system with broadband characteristics
US7903047B2 (en) 2006-04-17 2011-03-08 Qualcomm Mems Technologies, Inc. Mode indicator for interferometric modulator displays
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7369292B2 (en) * 2006-05-03 2008-05-06 Qualcomm Mems Technologies, Inc. Electrode and interconnect materials for MEMS devices
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7471442B2 (en) 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
WO2008045207A2 (en) 2006-10-06 2008-04-17 Qualcomm Mems Technologies, Inc. Light guide
WO2008045311A2 (en) 2006-10-06 2008-04-17 Qualcomm Mems Technologies, Inc. Illumination device with built-in light coupler
US7629197B2 (en) 2006-10-18 2009-12-08 Qualcomm Mems Technologies, Inc. Spatial light modulator
US20080111834A1 (en) * 2006-11-09 2008-05-15 Mignard Marc M Two primary color display
US7706042B2 (en) * 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7403180B1 (en) * 2007-01-29 2008-07-22 Qualcomm Mems Technologies, Inc. Hybrid color synthesis for multistate reflective modulator displays
US8115987B2 (en) 2007-02-01 2012-02-14 Qualcomm Mems Technologies, Inc. Modulating the intensity of light from an interferometric reflector
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US7742220B2 (en) * 2007-03-28 2010-06-22 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing conducting layers separated by stops
US7715085B2 (en) * 2007-05-09 2010-05-11 Qualcomm Mems Technologies, Inc. Electromechanical system having a dielectric movable membrane and a mirror
US7643202B2 (en) 2007-05-09 2010-01-05 Qualcomm Mems Technologies, Inc. Microelectromechanical system having a dielectric movable membrane and a mirror
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US8111262B2 (en) * 2007-05-18 2012-02-07 Qualcomm Mems Technologies, Inc. Interferometric modulator displays with reduced color sensitivity
US7643199B2 (en) * 2007-06-19 2010-01-05 Qualcomm Mems Technologies, Inc. High aperture-ratio top-reflective AM-iMod displays
US7782517B2 (en) 2007-06-21 2010-08-24 Qualcomm Mems Technologies, Inc. Infrared and dual mode displays
US7630121B2 (en) * 2007-07-02 2009-12-08 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
WO2009018287A1 (en) 2007-07-31 2009-02-05 Qualcomm Mems Technologies, Inc. Devices for enhancing colour shift of interferometric modulators
US8072402B2 (en) 2007-08-29 2011-12-06 Qualcomm Mems Technologies, Inc. Interferometric optical modulator with broadband reflection characteristics
US7847999B2 (en) 2007-09-14 2010-12-07 Qualcomm Mems Technologies, Inc. Interferometric modulator display devices
US7773286B2 (en) 2007-09-14 2010-08-10 Qualcomm Mems Technologies, Inc. Periodic dimple array
US8058549B2 (en) 2007-10-19 2011-11-15 Qualcomm Mems Technologies, Inc. Photovoltaic devices with integrated color interferometric film stacks
JP5302322B2 (ja) 2007-10-19 2013-10-02 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 一体型光起電力を有するディスプレイ
JP2011504243A (ja) 2007-10-23 2011-02-03 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 調節可能透過型memsベースの装置
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US7715079B2 (en) 2007-12-07 2010-05-11 Qualcomm Mems Technologies, Inc. MEMS devices requiring no mechanical support
US8068710B2 (en) 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
WO2009079279A2 (en) * 2007-12-17 2009-06-25 Qualcomm Mems Technologies, Inc. Photovoltaics with interferometric back side masks
US8164821B2 (en) 2008-02-22 2012-04-24 Qualcomm Mems Technologies, Inc. Microelectromechanical device with thermal expansion balancing layer or stiffening layer
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
US7612933B2 (en) 2008-03-27 2009-11-03 Qualcomm Mems Technologies, Inc. Microelectromechanical device with spacing layer
US7898723B2 (en) 2008-04-02 2011-03-01 Qualcomm Mems Technologies, Inc. Microelectromechanical systems display element with photovoltaic structure
US7969638B2 (en) 2008-04-10 2011-06-28 Qualcomm Mems Technologies, Inc. Device having thin black mask and method of fabricating the same
US8023167B2 (en) 2008-06-25 2011-09-20 Qualcomm Mems Technologies, Inc. Backlight displays
US7768690B2 (en) 2008-06-25 2010-08-03 Qualcomm Mems Technologies, Inc. Backlight displays
US7746539B2 (en) 2008-06-25 2010-06-29 Qualcomm Mems Technologies, Inc. Method for packing a display device and the device obtained thereof
US7859740B2 (en) 2008-07-11 2010-12-28 Qualcomm Mems Technologies, Inc. Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
US7855826B2 (en) 2008-08-12 2010-12-21 Qualcomm Mems Technologies, Inc. Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices
US8358266B2 (en) 2008-09-02 2013-01-22 Qualcomm Mems Technologies, Inc. Light turning device with prismatic light turning features
US7719754B2 (en) * 2008-09-30 2010-05-18 Qualcomm Mems Technologies, Inc. Multi-thickness layers for MEMS and mask-saving sequence for same
KR101614903B1 (ko) * 2009-02-25 2016-04-25 삼성디스플레이 주식회사 간섭 광 변조기 및 이를 채용한 디스플레이
US8611331B2 (en) * 2009-02-27 2013-12-17 Qualcomm Incorporated Time division duplexing (TDD) configuration for access point base stations
US8270056B2 (en) 2009-03-23 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with openings between sub-pixels and method of making same
US8270062B2 (en) 2009-09-17 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with at least one movable stop element
US8488228B2 (en) 2009-09-28 2013-07-16 Qualcomm Mems Technologies, Inc. Interferometric display with interferometric reflector
WO2011126953A1 (en) 2010-04-09 2011-10-13 Qualcomm Mems Technologies, Inc. Mechanical layer of an electromechanical device and methods of forming the same
US8848294B2 (en) 2010-05-20 2014-09-30 Qualcomm Mems Technologies, Inc. Method and structure capable of changing color saturation
KR20130091763A (ko) 2010-08-17 2013-08-19 퀄컴 엠이엠에스 테크놀로지스, 인크. 간섭 디스플레이 장치에서의 전하 중성 전극의 작동 및 교정
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
US20120134008A1 (en) * 2010-11-30 2012-05-31 Ion Bita Electromechanical interferometric modulator device
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
US8736939B2 (en) * 2011-11-04 2014-05-27 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5142414A (en) * 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
JP2001356701A (ja) * 2000-06-15 2001-12-26 Fuji Photo Film Co Ltd 光学素子、光源ユニットおよび表示装置

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8284474B2 (en) 1994-05-05 2012-10-09 Qualcomm Mems Technologies, Inc. Method and system for interferometric modulation in projection or peripheral devices
US9025235B2 (en) 2002-12-25 2015-05-05 Qualcomm Mems Technologies, Inc. Optical interference type of color display having optical diffusion layer between substrate and electrode
US8111445B2 (en) 2004-02-03 2012-02-07 Qualcomm Mems Technologies, Inc. Spatial light modulator with integrated optical compensation structure
US9019590B2 (en) 2004-02-03 2015-04-28 Qualcomm Mems Technologies, Inc. Spatial light modulator with integrated optical compensation structure
US7928928B2 (en) 2004-09-27 2011-04-19 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing perceived color shift
US7719747B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Method and post structures for interferometric modulation
US8362987B2 (en) 2004-09-27 2013-01-29 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7911428B2 (en) 2004-09-27 2011-03-22 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7807488B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US7933475B2 (en) 2006-02-17 2011-04-26 Qualcomm Mems Technologies, Inc. Method and apparatus for providing back-lighting in a display device
US8004743B2 (en) 2006-04-21 2011-08-23 Qualcomm Mems Technologies, Inc. Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display
US9019183B2 (en) 2006-10-06 2015-04-28 Qualcomm Mems Technologies, Inc. Optical loss structure integrated in an illumination apparatus
US8979349B2 (en) 2009-05-29 2015-03-17 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof

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US20040125282A1 (en) 2004-07-01
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KR100494736B1 (ko) 2005-06-13
JP3996545B2 (ja) 2007-10-24

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