TW593204B - A method of producing lithium aluminosilicate ceramics - Google Patents

A method of producing lithium aluminosilicate ceramics Download PDF

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TW593204B
TW593204B TW91111814A TW91111814A TW593204B TW 593204 B TW593204 B TW 593204B TW 91111814 A TW91111814 A TW 91111814A TW 91111814 A TW91111814 A TW 91111814A TW 593204 B TW593204 B TW 593204B
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ceramic
powder
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manufacturing
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TW91111814A
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Chinese (zh)
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Jr-Chen Chen
Guo-Jiun Shiu
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Univ Nat Central
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Abstract

A method of producing lithium aluminosilicate (LAS) ceramics, which uses a mixing powder of lithium carbonate, aluminum oxide, and silicon oxide as a raw material powder. After being mixed by ball milling and baked dry, the raw material powder is processed with a calcinations process such that the raw material powder becomes a precursor. The precursor is then pressed into the green ceramic. Significantly, the high heat conducting metal sheets are tightly attached above and below the surfaces of the ceramic during sinter and heat-treatment processes. A solid-state sinter process is performed with the green ceramic. Next, the ceramic is treated with a proper heat-treatment process. Since the top and bottom surfaces of the ceramic are capped with the high heat conducting metal, the ceramics are uniformly heated during all the heating processes. The ceramics of this invention exhibit more uniform properties and stable structure, which allow them to be used as temperature compensation components and athermal products.

Description

593204 _案號91111814_年月曰 修正_ 五、發明說明(1) 本發明是有關於一種陶堯材料之製造方法,且特別是 有關於一種鋰鋁矽酸鹽陶瓷製造方法。 近年來由於高科技系統之精密元件裝置及儀器設備受 溫度影響而降低原有效能的問題日益顯著,往往會因元件 材質間之不同膨脹係數隨著環境溫度改變而產生應力變 形,所以開發負熱膨脹材料做為提供一般正熱膨脹材料之 熱補償元件,以複合成不受環境溫度影響而保持原有元件 效能之無熱效應(Athermal )裝置,亦應為極具應用價值 之研究。而在熱補償的應用實例中,例如精密光學方面之 光纖通訊技術,以高密度分波多工器(DWDM )之光纖布拉 格光栅(F B G )元件而言,為確保光纖在更多頻道上可傳 遞不同波長的訊號以充分利用光纖容量,因此極需熱補償 材料來複合,減少溫度對光栅反射波長之影響。目前已成 功測試利用/5 -鋰霞石相(/5 - e u c r y p t i t e ,L i A 1 S i 0 4)高負 膨脹且線性的特性,將鋰鋁矽酸鹽負膨脹陶瓷基板與所需 光纖母材複合,可使光纖光柵中心波長之溫度係數變化量 控制在可允許之標準值1 p m / 以下,使得光纖通訊可以不 受外界溫度的影響,進而研製成具有自補償功能的無溫度 敏感性光纖光栅器件。另外熱補償技術亦可應用在CNC工 具機高速轉軸之溫昇熱變位補償應用技術上。 鋰鋁矽酸鹽陶瓷材料包括具負膨脹之/5 -鋰霞石相(yS -eucryptite,LiAlSi04)、幾乎為零膨脹之經輝石相 (Spodumene,LiAlSi20ri)、以及葉長石相(Petalite, LiAlSi401G)等。其中,由於冷-鋰霞石之熱膨脹係數為-6x 1 0—fi/ °C至-8 X 1 0—V °C左右,而且還具有高機械強度、化學593204 _Case No. 91118814_ Revised_ Five. Description of the invention (1) The present invention relates to a method for manufacturing Tao Yao materials, and in particular to a method for manufacturing lithium aluminosilicate ceramics. In recent years, due to the influence of temperature on the precision components and high-tech systems of precision components and instruments, the problem of reducing the original efficiency has become increasingly significant. Often, the thermal expansion of the components due to the different expansion coefficients between the component materials and the environmental temperature changes, so the development of negative thermal expansion Materials are used as thermal compensation elements to provide general positive thermal expansion materials. Compounding them into an athermal device that is not affected by the ambient temperature and maintains the original component performance should also be a research with great application value. In the case of thermal compensation, for example, optical fiber communication technology in precision optics, and fiber Bragg grating (FBG) components of high-density demultiplexer (DWDM), in order to ensure that the fiber can transmit different channels on more channels Wavelength signals make full use of the optical fiber capacity, so thermal compensation materials are needed to recombine to reduce the effect of temperature on the reflected wavelength of the grating. At present, we have successfully tested the use of / 5 -eucryptite (/ 5-eucryptite, Li A 1 S i 0 4) high negative expansion and linear characteristics, the lithium aluminum silicate negative expansion ceramic substrate and the required optical fiber master The composite material can control the temperature coefficient variation of the center wavelength of the fiber grating to an allowable standard value of 1 pm / below, so that the optical fiber communication can not be affected by the external temperature, and then developed into a temperature-insensitive fiber with self-compensation. Grating device. In addition, the thermal compensation technology can also be applied to the temperature rise thermal displacement compensation application technology of the high-speed rotating shaft of CNC machine tools. Lithium aluminosilicate ceramic materials include / 5-eucryptite (LiAlSi04) phase with negative expansion, Spodumene (LiAlSi20ri) phase with almost zero expansion, and Petalite (LiAlSi401G) phase. Wait. Among them, the thermal expansion coefficient of cold-eucryptite is about -6x 1 0-fi / ° C to -8 X 1 0-V ° C, and it also has high mechanical strength, chemical

9285twf2.ptd 第6頁 593204 案號91111814__年月 日 修正 五、發明說明(2) 為 之。多石 之粉構究 之要璃溫 鹽,鹽 脹 法 而 瓷驟許々 例置結陶為溫 玻高。酸數酸 方膨 方 , 陶步於造of比前到出度高U之經定矽係矽 造之 此 點 璃等見製t各及得提溫成f出瓷穩鋁脹鋁 製性 , 優 玻理已法or之提法}結換高提陶不鋰膨鋰 之線 法 等 統處,bep分未無85燒轉ito)璃質種之之 料更 方 性 傳熱法w R成並此5 ,相^28玻性一定定 材,。造 定 用及方w 1中中因66°c溫显7’之料供穩穩 瓷數料製 安。使以作露ca當獻,000低U08得材提及更 陶係材之 寸料係形製lni變文理S611從呈6’所瓷於勻構 種脹瓷究 尺材料成之uch改但處(U至分UUS其陶在均結 一膨陶陶 的瓷材、料等Te用,熱人p充AiAC,成的有、 供之之鹽 好陶瓷製材ΟΓ利小之等00相U等象造目具密 提定定酸 良種陶熔瓷ot板,大後telo晶W1"現而一到緻 於穩穩碎 與一鹽料陶am基 J之成arw結ual離,之得更 在及更鋁 、之酸原鹽ak瓷;數完SW度使”Be分力明以且 的勻構鋰 性用矽過酸S陶99係結。溫可{而相應發可, 目均結種 耐姓性、耐熱衝擊 目前及業界較常使 一般製作鋰鋁 熔融方法,亦即經 而且,關於鐘銘石夕 文獻中。例如,A . 英固溶體之負膨脹 IEICE, ρρ·71 (19 差異來調整熱膨脹 末煆燒以及陶瓷燒 緻密且穩定之陶瓷 燒結前之粉末瑕燒 1 2 0 ◦ °C 至 1 3 0 0 〇C, /3 -鐘霞石單一相’ 耗費較大之能量。 熔融製法容易產生 淬火後會產生極大 有鑑於此,本 陶瓷之製造方法, 更線性之膨脹曲線 陶瓷。 本發明之另一 法,可以得到具有 曲線,且更敏密、 本發明提供一9285twf2.ptd Page 6 593204 Case No. 91118814__Year Month Day Amendment 5. The description of the invention (2). The structure of the rocky powder requires glass temperature salt, salt expansion method, and porcelain Xu Xuan, for example, sets the temperature of pottery to high glass. The acid number and the acid square expansion square, Tao Bu made more than the former to the degree of the high degree of silicon made of silicon-based silicon, etc. See the system t and can be heated to f to produce a stable aluminum expansion aluminum, Youboli has already mentioned the method of} to exchange the high-tech ceramics and lithium-free lithium wire method and other systems, bep points are not burned to 85, it is turned into)) the material of the glass material is more square heat transfer method w R into And this 5, phase ^ 28 glassy certain fixed material. The material used in the production of square 1 is 66 ° c and the temperature is 7 ′. The material is stable and stable. As a dedication to ca, 000, low U08, the materials mentioned are more ceramic materials, the shape of the system is made of lni variants, S611, from 6's porcelain to homogeneous expansion of the porcelain ruler material, but changed (U to UUS, its pottery is used for ceramics, materials, etc., which are made of expanded pottery. They are filled with AiAC, and they are made of salt. Good ceramic materials. The ot plate of fine ceramics, which is a fine-grained acid-fixing pottery, is made by Taro crystal W1, and now it is steadily broken and arw separated from a salt pottery am base J, which is more and more Aluminium, acid salt ak porcelain; complete the degree of SW to make the "Be" and the homogeneous lithium is tied with silicon peracid S ceramic 99. Wen Ke {and the corresponding hair can be used, the name of each species is resistant The thermal shock resistance and the industry are more commonly used to make lithium-aluminum melting methods, that is, in the literature on Zhong Mingshi Xi. For example, A. The negative expansion of IEICE solid solution, ρρ · 71 (19 difference to adjust the thermal expansion end Sintering and ceramic firing Dense and stable powder sintering before sintering of ceramics 120 ° C to 1300 ° C, / 3 -Zhongxiashi single phase 'consumes a lot of energy. Melting The method is easy to produce after quenching. In view of this, the ceramic manufacturing method has a more linear expansion curve. The other method of the present invention can obtain a curve that is more dense and more dense. The present invention provides a

9285t.wf2. ptd 第7頁 593204 案號 91111814 年 月 曰 修_ 五、發明說明(3) 係以碳酸鋰、氧化鋁、與氧化矽之混合粉末作為 末。以球磨方式混合並烘乾原料粉末後,對原料 煆燒製程,使原料粉末形成前置粉末。然後,將 壓製成生胚,並於生胚之上表面與下兩面緊密貼 金屬片(高導熱金屬片之材質為傳導係數高於10 屬)。之後,進行燒結製程,使生胚燒結成陶瓷 瓷進行熱處理製程。 本發明以固態燒結法製作锂鋁矽酸鹽陶瓷, 加熱過程(包括燒結製程和熱處理製程)中加蓋高 片幫助均勻陶瓷受熱溫度場,高導熱金屬片必須 陶瓷貼合以使傳熱均句。而且,於燒結製程之後 處理製程,以改善陶瓷熱膨脹遲滯及偏移之不穩 雖然,本發明直接以碳酸鋰、氧化鋁、與氧 末合成鋰鋁矽酸鹽陶瓷,可能會在高溫反應中造 侵蝕氧化物或陶瓷之問題。然而本發明在進行燒 前,先進行前置粉末之煆燒製程,因此可以避免 中氧化物或陶瓷受到碳酸鋰侵蝕,而順利完成陶 過程。 此外,本發明在陶瓷燒結製程中,於陶瓷生 緊密加蓋高導熱金屬,可將熱較均勻的傳入陶瓷 生胚晶粒間在燒結過程中均勻受熱反應,以降低 非等向效應,使得整體陶瓷晶粒間更為隨機排列 而且,後續之熱處理製程,可使晶粒間再次癒合 而形成更緻密且結構更穩定之陶瓷。 本發明另外提供一種陶瓷材料之製造方法, 原料粉 粉末進行 前置粉末 合高導熱 W/mK之金 1並對陶 在所 導熱 緊密 ,進 定現 化石夕 成碳 結製 南溫 瓷之 有之 金屬 的與 行熱 象。 之粉 酸鋰 程之 反應 燒結 胚上下方 生胚,使 晶體間之 與分佈。 和成長’ 此方法係9285t.wf2. Ptd Page 7 593204 Case No. 91111814 Rev. _ V. Description of the Invention (3) The powder of lithium carbonate, alumina, and silicon oxide is used as the final product. After the raw material powder is mixed and dried by ball milling, the raw material is calcined to make the raw material powder into a pre-powder. Then, it is pressed into a green embryo, and a metal sheet is closely adhered on the upper surface and the lower surface of the green embryo (the material of the high thermal conductivity metal sheet is a conductivity higher than 10 genera). Then, a sintering process is performed, and the green embryo is sintered into a ceramic porcelain for a heat treatment process. The invention uses a solid state sintering method to produce lithium aluminosilicate ceramics. During the heating process (including the sintering process and the heat treatment process), a high sheet is added to help uniformize the temperature field of ceramic heating. Highly thermally conductive metal sheets must be bonded with ceramics to make the heat transfer uniform. . Moreover, the process is processed after the sintering process to improve the thermal expansion retardation and instability of the ceramic. Although the present invention directly synthesizes lithium aluminum silicate ceramics from lithium carbonate, alumina, and oxygen, it may be produced in high temperature reactions. Erosion of oxides or ceramics. However, in the present invention, the firing process of the pre-powder is performed before firing, so that the middle oxide or ceramic can be prevented from being attacked by lithium carbonate, and the ceramic process can be smoothly completed. In addition, in the ceramic sintering process, the ceramics are tightly covered with a highly thermally conductive metal, and the heat can be more uniformly introduced into the ceramic raw embryo grains during the sintering process to reduce the anisotropic effect, so that The overall ceramic grains are arranged more randomly, and the subsequent heat treatment process can make the grains heal again to form a denser and more stable ceramic. The invention also provides a method for manufacturing a ceramic material. The raw powder powder is pre-powdered and combined with high thermal conductivity W / mK of gold 1 to conduct heat tightly to the ceramic material. Thermal image of metal with lines. The reaction of lithium powder and sintering process sintered the upper and lower embryos to produce embryos, so that the crystals were distributed with each other. And grow ’this method

9285t.wf2. pt.d 第8頁 593204 _案號91111814_年月曰 修正_ 五、發明說明(4) 提供前置粉末。接著,將前置粉末壓製成生胚,並於生胚 之上表面與下兩面緊密貼合一高導熱金屬片。然後,進行 燒結製程,使生胚燒結成陶瓷,並對陶瓷進行熱處理製 程。其中,在配置前置粉末時,以至少包括一種成分以上 之混合粉末作為一原料粉末。在混合研磨並烘乾原料粉末 後,對原料粉末進行一煆燒製程,使原料粉末形成前置粉 末。 本發明以固態燒結法製作陶瓷材料,在所有之加熱過 程(包括燒結製程和熱處理製程)中加蓋高導熱金屬片幫助 均勻陶瓷受熱溫度場,高導熱金屬片必須緊密的與陶瓷貼 合以使傳熱均句。而且,於燒結製程之後,進行熱處理製 程,以改善陶瓷熱膨脹遲滯及偏移之不穩定現象。 而且,本發明在陶瓷燒結製程中,於陶瓷生胚上下方 緊密加蓋高導熱金屬,可將熱較均勻的傳入陶瓷生胚,使 生胚晶粒間在燒結過程中均勾受熱反應,以降低晶體間之 非等向效應,使得整體陶瓷晶粒間更為隨機排列與分佈。 而且,後續之熱處理製程,可使晶粒間再次癒合和成長, 而形成更緻密且結構更穩定之陶瓷。 為讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂,下文特舉一較佳實施例,並配合所附圖式,作詳 細說明如下: 圖式之標示說明: 1 0 0、1 0 2、1 0 4、1 0 6、1 0 8、1 1 0、1 1 2 :步驟 實施例 本發明係藉由一次前置粉末煆燒處理,再進行固態燒9285t.wf2. Pt.d Page 8 593204 _Case No. 91118814_ Year Month Amendment_ V. Description of the invention (4) Provide pre-powder. Next, the front powder is pressed into a green embryo, and a high thermal conductivity metal sheet is closely adhered to the upper surface and the lower two surfaces of the green embryo. Then, a sintering process is performed to sinter the green body into a ceramic, and the ceramic is subjected to a heat treatment process. Among them, when disposing the pre-powder, a mixed powder including at least one component or more is used as a raw material powder. After mixing and grinding the raw material powder, the raw material powder is subjected to a calcination process to form the raw material powder into a pre-powder. The present invention uses a solid state sintering method to produce ceramic materials. In all heating processes (including sintering process and heat treatment process), a high thermally conductive metal sheet is covered to help uniform ceramic heating temperature field. The high thermally conductive metal sheet must be closely attached to the ceramic so that Heat transfer is even. Moreover, after the sintering process, a heat treatment process is performed to improve the thermal expansion retardation and instability of the ceramic. In addition, in the ceramic sintering process, the ceramic green embryo is tightly covered with a high thermal conductive metal on the upper and lower sides of the ceramic green embryo, so that the heat can be evenly transmitted to the ceramic green embryo, so that the green embryo grains are subject to thermal reactions during the sintering process. In order to reduce the anisotropic effect between the crystals, the overall ceramic grains are more randomly arranged and distributed. Moreover, the subsequent heat treatment process can make the grains heal and grow again, and form a denser and more stable ceramic. In order to make the above and other objects, features, and advantages of the present invention more comprehensible, a preferred embodiment is given below in conjunction with the accompanying drawings to make a detailed description as follows: Symbols of the drawings: 1 0 0 1 0 2 1 0 4 1 0 6 1 0 8 1 1 0 1 1 2 Step Examples The present invention uses a pre-powder calcination treatment and then performs solid firing.

9285t.wf2. pt.d 第9頁 593204 _案號91111814_年月曰 修正_ 五、發明說明(5) 結的方式合成陶瓷。在燒結製程中,藉由於陶瓷上下方緊 密貼合高導熱金屬片,使得陶瓷能夠受熱均勻,再利用良 好之熱處理而得到更緻密且結構更穩定之陶瓷本體。 第1圖所繪示為本發明之陶瓷材料之製造方法的步驟 流程圖。請參照第1圖,首先,進行原料粉末之製備,取 可以在高溫燒結中會有揮發現象、或者陶瓷均句性對熱敏 感者、甚至一般製程無特殊需求的陶瓷原料粉末,原料粉 末例如是碳酸鋰、氧化鋁、氧化矽、氧化鎢、氧化锆、氧 化鋰、氧化鈮、氧化釩、氧化釔、碳酸鋇、氧化鈦等。在 本實施例中係以製作鋰鋁矽酸鹽陶瓷為實例作說明,因此 原料粉末例如是碳酸鋰、氧化鋁及氧化矽,且碳酸鋰、氧 化鋁及氧化矽之莫耳比例如是1 : 1 ·· 2至1 ·· 1 ·· 3左右(步 驟 1 0 0 )。 接著,進行球磨混合(步驟1 0 2 ),其步驟例如是先利 用濕式球磨之方式,將碳酸鋰、氧化鋁及氧化矽粉末均勻 混合後,再將濕式球磨混合完成後之粉末放入烤箱烘乾。 其中,在進行濕式球磨步驟時例如是以乙醇做為溶劑。 然後,進行煆燒製程,以製成前置粉末(步驟1 0 4 )。 將乾燥後之粉末放入氧化鋁坩鍋内,並放置於高溫爐中, 以例如是5 °C / m i η之升溫速率,在5 0 0 °C至7 0 0 °C之溫度 下,進行煆燒處理1 2小時至3 6小時左右。煆燒完成後之原 料粉末即作為燒結製程之前置粉末。 接著,將煆燒後之粉末以氧化鋁研砵磨細,並放置於 壓模中,並加壓至例如是3 5 0 K g / c m2以製作成生胚(步驟 106) °9285t.wf2. Pt.d Page 9 593204 _Case No. 91118814_ Year Month Amendment_ V. Description of the invention (5) Synthetic ceramics by way of knot. In the sintering process, the ceramic body can be uniformly heated due to the close contact between the top and bottom of the ceramic, so that the ceramic body can be denser and more stable by good heat treatment. FIG. 1 is a flowchart showing the steps of the method for manufacturing a ceramic material according to the present invention. Please refer to Fig. 1. First, the raw material powder is prepared. The ceramic raw material powder which can be volatilized during high temperature sintering, or the ceramic is sensitive to heat, and even has no special requirements in the general process. For example, the raw material powder is Lithium carbonate, aluminum oxide, silicon oxide, tungsten oxide, zirconia, lithium oxide, niobium oxide, vanadium oxide, yttrium oxide, barium carbonate, titanium oxide, and the like. In this embodiment, the production of lithium aluminosilicate ceramics is taken as an example, so the raw material powder is, for example, lithium carbonate, alumina, and silicon oxide, and the molar ratio of lithium carbonate, alumina, and silicon oxide is, for example, 1: 1 ·· 2 to 1 ·· 1 ·· 3 or so (step 1 0 0). Next, ball milling and mixing are performed (step 102). The steps are, for example, firstly using a wet ball milling method to uniformly mix lithium carbonate, alumina, and silicon oxide powder, and then putting the powder after the wet ball milling is completed. Oven drying. Among them, ethanol is used as a solvent when the wet ball milling step is performed. Then, a sintering process is performed to make a pre-powder (step 104). The dried powder is placed in an alumina crucible and placed in a high-temperature furnace, for example, at a temperature increase rate of 5 ° C / mi η, at a temperature of 500 ° C to 700 ° C. Simmering treatment takes about 12 hours to 36 hours. The raw powder after the calcination is completed is used as the powder before the sintering process. Next, the calcined powder is ground and ground with alumina, placed in a stamper, and pressed to, for example, 3 50 K g / c m2 to make a green embryo (step 106) °

9285twf2. pt.d 第10頁 593204 _案號91111814_年月曰 修正_ 五、發明說明(6) 然後,將生胚放置於高導熱金屬片上,並再加蓋高導 熱金屬片,此高導熱金屬片之材質包括傳導係數高於1 〇 W/ mK之金屬,其例如是白金片(步驟1 ◦ 8 )。 接著,進行燒結製程,以製成陶瓷(步驟1 1 0 ),將上 下覆蓋有高導熱金屬片之生胚放置於高溫爐中,在850 t 至1 4 0 0 °C之溫度下,停留2小時至2 4小時之時間以進行燒 結後,再使其降至室溫,而可得到燒結完成之陶瓷。 之後,進行熱處理製程,使陶瓷更為緻密且結構更穩 定。將燒結完成之陶瓷上下覆蓋高導熱金屬片後,將其放 置於高溫爐中,以例如是1 °C / m i η至8它/ m i η之升溫速率加 熱至8 0 0 °C ,再以1 °C / m i η至8 °C / m i η之降溫速率降至室溫 (2 5 °C ),如此重複進行多次升降溫步驟而可得到緻密且結 構更穩定之陶瓷(步驟1 1 2 )。在燒結完成之陶瓷中,氧化 鋰、氧化鋁與氧化矽之莫耳比例如是1 : 1 : 2至1 : 1 : 3之 在製作鋰鋁矽酸鹽陶瓷時,若碳酸鋰、氧化鋁及氧化 矽之混合粉末未經過前置粉末煆燒處理(步驟1 0 0至步驟 1 0 4 ),則在進行生胚之燒結製程時,碳酸鋰粉末在高溫反 應時會侵蝕當中之氧化物或陶瓷部分,所以本發明藉由煆 燒處理以製備前置粉末,使其中碳酸鋰粉末先分解揮發出 二氧化碳,並與二氧化矽部分反應成矽酸鋰之固溶相,順 利避開碳酸鋰粉末所造成之現象。請參照第2圖所示之完 成煆燒之前置粉末之X光繞射分析圖。在第2圖中,符號* 表示Li2Si03,符號#表示Li2Si 2 05,符號+表示Si02。請參 照第2圖,完成煆燒之前置粉末在繞射角度2 0 = 2 4度左右9285twf2. Pt.d Page 10 593204 _Case No. 91118814_ Year, month and month of revision _ V. Description of the invention (6) Then, the green embryo is placed on a highly thermally conductive metal sheet, and then the highly thermally conductive metal sheet is covered, and this high thermal conductivity The material of the metal sheet includes a metal having a conductivity higher than 10 W / mK, which is, for example, a platinum sheet (step 1 ◦ 8). Next, a sintering process is performed to make ceramics (step 110). The green embryo covered with the high thermally conductive metal sheet above and below is placed in a high-temperature furnace, and stays at a temperature of 850 t to 14 0 ° C for 2 seconds. After sintering for 24 hours to 24 hours, the temperature is lowered to room temperature to obtain a sintered ceramic. Thereafter, a heat treatment process is performed to make the ceramic denser and more stable in structure. After the sintered ceramic is covered with a highly thermally conductive metal sheet, it is placed in a high-temperature furnace, and heated to a temperature of 80 ° C at a heating rate of 1 ° C / mi η to 8 it / mi η, and then 1 The cooling rate from ° C / mi η to 8 ° C / mi η is reduced to room temperature (2 5 ° C). Repeating the temperature rising and lowering steps in this way can obtain a dense and more stable ceramic (step 1 1 2) . In the sintered ceramics, the molar ratios of lithium oxide, aluminum oxide, and silicon oxide are, for example, 1: 1: 2 to 1: 1: 3. In the production of lithium aluminum silicate ceramics, if lithium carbonate, aluminum oxide, and oxide The mixed powder of silicon has not been subjected to pre-powder sintering treatment (steps 100 to 104). When the green sintering process is performed, the lithium carbonate powder will erode the oxides or ceramics during the high temperature reaction. Therefore, in the present invention, the pre-powder is prepared by sintering, so that the lithium carbonate powder is first decomposed to volatilize carbon dioxide, and partially reacts with the silicon dioxide to form a solid solution phase of lithium silicate, which smoothly avoids the lithium carbonate powder. Phenomenon. Please refer to the X-ray diffraction analysis chart of the powder placed before sintering as shown in Figure 2. In FIG. 2, the symbol * indicates Li2Si03, the symbol # indicates Li2Si 2 05, and the symbol + indicates Si02. Please refer to Figure 2 and place the powder at a diffraction angle of 20 = 24 degrees before sintering.

9285 t.wf2. pt.d 第11頁 593204 _案號91111814_年月曰 修正_ 五、發明說明(7) 與繞射角度2 0 = 2 7度左右有繞射峰產生,而此繞射峰係 為矽酸鋰(Li2Si 2 05 )之繞射峰,表示經過煆燒後,碳酸鋰已 經與二氧化矽反應成矽酸鋰。 而且,本發明在燒結製程中,藉由於陶瓷上下方緊密 貼合高導熱金屬片,使得陶瓷能夠受熱均勻。於燒結製程 之後,再利用良好之熱處理製程,而可以得到更緻密且結 構更穩定之陶瓷本體(步驟1 0 6至步驟1 1 2 )。 以下特舉出實驗例1、實驗例2與比較例,以詳細的說 明本發明。 實驗例1 將莫耳比1 : 1 : 2之碳酸鋰、氧化鋁及氧化矽粉末以 濕式球磨之方式均句混合後,放入烤箱烘乾。然後,將乾 燥後之粉末放入氧化鋁坩鍋内,並放置於高溫爐中,以5 °C / m i η之升溫速率,升溫至5 5 0 °C之溫度,進行煆燒處理 2 4小時。將煆燒後之粉末以氧化鋁研砵磨細,並放置於壓 模中,並加壓3 5 0 K g / c m2以製作成生胚。然後,將生胚之上 下方緊密貼合高導熱金屬片,並放置於高溫爐中,先以5 °C / m i η之升溫速率加熱至1 1 5 0 °C ,再以1 °C / m i η之升溫速 率加熱至1 3 0 0 °C ,並停留1 2小時之時間以進行燒結,之後 再以5 °C / in i η之降溫速率降至室溫,而可得到燒結完成之 陶瓷。 實驗例2 將莫耳比1 : 1 : 2之碳酸鋰、氧化鋁及氧化矽粉末以 濕式球磨之方式均勻混合後,放入烤箱烘乾。然後,將乾 燥後之粉末放入氧化鋁坩鍋内,並放置於高溫爐中,以59285 t.wf2. Pt.d Page 11 593204 _Case No. 91118814_ Year Month Revised_ V. Description of the invention (7) and diffraction angle 2 0 = 2 There is a diffraction peak around 7 degrees, and this diffraction The peak is a diffraction peak of lithium silicate (Li2Si 2 05), which means that after sintering, lithium carbonate has reacted with silicon dioxide to form lithium silicate. Moreover, in the sintering process of the present invention, the ceramic can be uniformly heated due to the close contact between the top and bottom of the ceramic with the high thermal conductivity metal sheet. After the sintering process, a good heat treatment process can be used to obtain a denser and more stable ceramic body (step 106 to step 1 12). Hereinafter, Experimental Example 1, Experimental Example 2 and Comparative Example will be specifically described to explain the present invention in detail. Experimental Example 1 Lithium carbonate, alumina, and silicon oxide powders having a molar ratio of 1: 1: 2 were uniformly mixed in a wet ball milling method, and then dried in an oven. Then, put the dried powder into an alumina crucible and place it in a high-temperature furnace, and heat it to a temperature of 5 50 ° C at a heating rate of 5 ° C / mi η, and perform a calcination treatment for 2 4 hours. . The calcined powder was ground and ground with alumina, placed in a stamper, and pressed under a pressure of 350 Kg / cm2 to make a green embryo. Then, the top and bottom of the green embryo were closely adhered to the high thermal conductivity metal sheet, and placed in a high-temperature furnace, and first heated to a temperature of 5 ° C / mi η to 1 150 ° C, and then 1 ° C / mi The heating rate of η is heated to 1 300 ° C, and it stays for 12 hours for sintering, and then the temperature is reduced to room temperature at a cooling rate of 5 ° C / in i η, and the sintered ceramic can be obtained. Experimental Example 2 Lithium carbonate, alumina and silicon oxide powders having a molar ratio of 1: 1: 2 were evenly mixed by a wet ball milling method, and then dried in an oven. Then, put the dried powder into an alumina crucible and place it in a high-temperature furnace.

9285twf2.pt.d 第12頁 593204 _案號91111814_年月曰 修正_ 五、發明說明(8) °C / m i η之升溫速率,升溫至5 5 0 °C之溫度,進行煆燒處理 2 4小時。將煆燒後之粉末以氧化鋁研砵磨細,並放置於壓 模中,並加壓3 5 0 K g / c m2以製作成生胚。然後,將生胚之上 下方緊密貼合高導熱金屬片,並放置於高溫爐中,先以5 °C / m i η之升溫速率加熱至1 1 5 0 °C,再以1 °C / m i η之升溫速 率加熱至1 3 0 0 °C ,並停留1 2小時之時間以進行燒結,之後 再以5 °C / m i η之降溫速率降至室溫,而可得到燒結完成之 陶瓷。之後,進行熱處理製程,將燒結完成之陶瓷上下覆 蓋高導熱金屬片後,將其放置於高溫爐中,以5 °C / m i η之 升溫速率加熱至8 0 0 °C ,再以5 °C / m i η之降溫速率降至室 溫,重複升降溫步驟四次而可得到緻密且結構更穩定之陶 瓷。 比較例 將莫耳比1 : 1 : 2之碳酸鋰、氧化鋁及氧化矽粉末以 濕式球磨之方式均句混合後,放入烤箱烘乾。然後,將乾 燥後之粉末放入氧化鋁坩鍋内,並放置於高溫爐中,以5 °C / m i η之升溫速率,升溫至5 5 0 °C之溫度,進行煆燒處理 2 4小時。將煆燒後之粉末以氧化鋁研砵磨細,並放置於壓 模中,並加壓3 5 0 K g / c m2以製作成生胚。然後,直接將生胚 放置於高溫爐中,先以5 °C/min之升溫速率加熱至1150 °C ,再以1 °C / m i η之升溫速率加熱至1 3 0 0 °C ,並停留1 2小 時之時間以進行燒結,之後再以5 °C / m i η之降溫速率降至 室溫,而可得到燒結完成之陶瓷。 接著,說明實驗例1、實驗例2與比較例之比較結果。 第3 Α圖、第3 Β圖與第3 C圖為分別繪示實驗例1 、實驗例2與9285twf2.pt.d Page 12 593204 _Case No. 91118814_ Year Month Amendment _ V. Description of the invention (8) The temperature rising rate of ° C / mi η is heated to a temperature of 5 5 0 ° C and subjected to sintering treatment 2 4 hours. The calcined powder was ground and ground with alumina, placed in a stamper, and pressed under a pressure of 350 Kg / cm2 to make a green embryo. Then, the top and bottom of the raw embryo were closely adhered to the high thermal conductivity metal sheet, and placed in a high-temperature furnace, first heated to a temperature of 1 150 ° C at a heating rate of 5 ° C / mi η, and then 1 ° C / mi The heating rate of η is heated to 1 300 ° C, and it stays for 12 hours for sintering, and then the temperature is reduced to room temperature at a cooling rate of 5 ° C / mi η, and the sintered ceramic can be obtained. After that, a heat treatment process is performed, after the sintered ceramic is covered with a high thermal conductivity metal sheet, it is placed in a high-temperature furnace and heated to a temperature of 5 ° C / mi η to 800 ° C, and then 5 ° C. The cooling rate of / mi η is reduced to room temperature, and the temperature rising and falling steps are repeated four times to obtain dense and more stable ceramics. Comparative Example Lithium carbonate, alumina, and silicon oxide powders having a molar ratio of 1: 1: 2 were uniformly mixed in a wet ball mill, and then dried in an oven. Then, put the dried powder into an alumina crucible and place it in a high-temperature furnace, and heat it to a temperature of 5 50 ° C at a heating rate of 5 ° C / mi η, and perform a calcination treatment for 2 4 hours. . The calcined powder was ground and ground with alumina, placed in a stamper, and pressed under a pressure of 350 Kg / cm2 to make a green embryo. Then, directly place the green embryo in a high-temperature furnace, first heat it to 1150 ° C at a heating rate of 5 ° C / min, and then heat it to 1 300 ° C at a heating rate of 1 ° C / mi η, and leave it It takes 12 hours to perform sintering, and then decreases to room temperature at a temperature lowering rate of 5 ° C / mi η, and a sintered ceramic can be obtained. Next, the comparison results of Experimental Example 1, Experimental Example 2 and Comparative Example will be described. Figures 3A, 3B, and 3C show Experimental Example 1, Experimental Example 2, and

9285twf2.ptd 第13頁 593204 _案號 91111814_年月日__ 五、發明說明(9) 比較例之鋰鋁矽酸鹽陶瓷材料之掃瞄式電子顯微鏡照相 圖。如第3 A圖與第3 C圖所示,在燒結製程中,上下加蓋高 導熱金屬片所得到之燒結陶瓷比未加蓋高導熱金屬片所得 到之燒結陶竟之晶粒與晶塊結構皆更加完整且均句。因 此,在燒結製程中,於生胚之上下緊密貼合高導熱金屬 片,可以使生胚受熱更加均勻,而使陶瓷具有較均勻的結 構。而且如第3 A圖與第3 B圖所示,在燒結製程後,經過熱 處理製程後之陶瓷(實驗例2 )與未經過熱處理製程後之陶 瓷(實驗例1 )相比較,其結構更為緻密且穩定。這是因為 在熱處理製程之緩慢升1溫過程中,可使晶粒間再次成長 癒合與成長,而形成緻密且結構更穩定之陶莞。 第4圖為繪示以熱機械分析儀量測實驗例1、實驗例2 與比較例之鋰鋁矽酸鹽陶瓷所得到之平均膨脹係數值與標 準差。在第4圖中,符號#表示實驗例1 ,符號▲表示實驗 例2,符號表示比較例。由第4圖的結果所示,實驗例 1、實驗例2與比較例之平均膨脹係數值分別為-9. 6 4 X 1 0 -6/ °C 、-8,63x10—6/°C 與-10.15xl0_6/°C 。因此,由第4 圖中可看出實驗例2具有較實驗例1、比較例更平均且更穩 定之膨脹係數。 第5圖為繪示以熱機械分析儀量測實驗例1之鋰鋁矽酸 鹽陶瓷在燒結溫度1 3 0 0 °C與不同停留時間之平均膨脹係數 值與標準差。如第5圖所示,實驗例1之鋰鋁矽酸鹽陶瓷材 料之平均膨脹係數值隨著停留時間之增長而增加並到達一 固定值。其中,實驗例1之鋰鋁矽酸鹽陶瓷之最大平均膨 脹係數值可達-1 0. 62 X 1 0-V °C。9285twf2.ptd Page 13 593204 _Case No. 91111814_ Month and Day__ V. Description of the invention (9) Scanning electron microscope photograph of the lithium aluminum silicate ceramic material of the comparative example. As shown in Figures 3A and 3C, in the sintering process, the sintered ceramics obtained by covering the high thermally conductive metal sheet up and down are larger than the crystals and ingots of the sintered ceramics obtained without the high thermally conductive metal sheet The structures are more complete and even sentences. Therefore, in the sintering process, the high thermal conductivity metal sheet is closely adhered to the top and bottom of the green embryo, so that the green embryo can be heated more uniformly, and the ceramic has a more uniform structure. Moreover, as shown in Figures 3A and 3B, after the sintering process, the ceramics after the heat treatment process (Experiment Example 2) are compared with the ceramics without the heat treatment process (Experiment Example 1), and their structure is more Dense and stable. This is because during the slowly increasing temperature of the heat treatment process, the grains can grow again, heal and grow, and a denser and more stable ceramic can be formed. Figure 4 shows the average expansion coefficient values and standard deviations obtained by measuring the lithium aluminosilicate ceramics of Experimental Example 1, Experimental Example 2 and Comparative Example with a thermomechanical analyzer. In Fig. 4, the symbol # indicates Experimental Example 1, the symbol ▲ indicates Experimental Example 2, and the symbol indicates Comparative Example. As shown in the results of Figure 4, the average expansion coefficient values of Experimental Example 1, Experimental Example 2 and Comparative Examples are -9. 6 4 X 1 0 -6 / ° C, -8, 63x10-6 / ° C and -10.15xl0_6 / ° C. Therefore, it can be seen from Fig. 4 that Experimental Example 2 has a more average and stable expansion coefficient than Experimental Example 1 and Comparative Example. Figure 5 shows the average expansion coefficient values and standard deviations of the lithium aluminosilicate ceramics of Experimental Example 1 measured at a sintering temperature of 130 ° C and different residence times using a thermomechanical analyzer. As shown in Fig. 5, the average expansion coefficient value of the lithium aluminum silicate ceramic material of Experimental Example 1 increases with the increase of the residence time and reaches a fixed value. Among them, the maximum average expansion coefficient value of the lithium aluminosilicate ceramics of Experimental Example 1 can reach -1 0.62 X 1 0-V ° C.

9285twf2.ptd 第14頁 593204 _案號 91111814_年月日__ 五、發明說明(10) 第6 A圖與第6 B圖為分別繪示實驗例1與實驗例2之鋰鋁 矽酸鹽陶瓷之膨脹曲線圖。第7 A圖與第7 B圖為分別繪示實 驗例1與實驗例2之鋰鋁矽酸鹽陶瓷之經重複升降溫度過程 之陶瓷膨脹曲線及遲滯現象。如第6 A圖、第6 B圖、第7 A圖 與第7 B圖所示之結果,經過熱處理後之陶瓷可以得到更線 性且更穩定之膨脹係數,且可以改善在重複升降溫過程 中,膨脹曲線之遲滯及非線性不穩定現象。 本發明以固態燒結法製作陶瓷材料,在所有之加熱過 程(包括陶瓷燒結和熱處理)中加蓋高導熱金屬片幫助均勻 陶瓷受熱溫度場,高導熱金屬片必須緊密的與陶瓷貼合以 使傳熱均句。而且,於燒結製程之後,進行熱處理製程, 以改善陶瓷熱膨脹遲滯及偏移之不穩定現象。 雖然,本發明直接以碳酸鋰、氧化鋁、與氧化矽之粉 末合成鋰鋁矽酸鹽陶瓷,可能會在高溫反應中造成碳酸鋰 侵蝕氧化物或陶瓷之問題。然而本發明在進行燒結製程之 前,先進行前置粉末之煆燒製程,因此可以避免高溫反應 中氧化物或陶瓷受到碳酸鋰侵蝕,而順利完成陶瓷之燒結 過程。 此外,本發明在陶瓷燒結製程中,於陶瓷生胚上下方 緊密加蓋高導熱金屬,可將熱較均句的傳入陶瓷生胚,使 生胚晶粒間在燒結過程中均勻受熱反應,以降低晶體間之 非等向效應,使得整體陶瓷晶粒間更為隨機排列與分佈。 而且,後續之熱處理製程,可使晶粒間再次癒合和成長, 而形成更敏密且結構更穩定之陶瓷。 在本發明之上述實施例係以合成鋰鋁矽酸鹽陶瓷為例9285twf2.ptd Page 14 593204 _Case No. 91118814_ Year Month Day__ V. Description of the invention (10) Figures 6A and 6B are lithium aluminum silicates showing Experiment 1 and Experiment 2 respectively Ceramic expansion curve. Figures 7A and 7B show the ceramic expansion curves and hysteresis of the lithium aluminosilicate ceramics of Experimental Example 1 and Experimental Example 2, respectively, after repeated temperature rise and fall processes. As shown in Figure 6A, Figure 6B, Figure 7A and Figure 7B, ceramics after heat treatment can obtain a more linear and stable expansion coefficient, and can improve the process of repeated temperature rise and fall , Hysteresis and nonlinear instability of the expansion curve. The invention uses a solid state sintering method to produce ceramic materials. In all heating processes (including ceramic sintering and heat treatment), a high thermally conductive metal sheet is covered to help uniform ceramic heating temperature field. The high thermally conductive metal sheet must be closely attached to the ceramic to make the thermal conductivity Hot Jun sentence. In addition, after the sintering process, a heat treatment process is performed to improve the thermal expansion retardation and instability of the ceramic. Although, the present invention directly synthesizes lithium aluminosilicate ceramics from powders of lithium carbonate, aluminum oxide, and silicon oxide, which may cause lithium carbonate to attack oxides or ceramics during high temperature reactions. However, in the present invention, the sintering process of the pre-powder is performed before the sintering process, so that the oxide or ceramic can be prevented from being attacked by lithium carbonate during the high temperature reaction, and the sintering process of the ceramic can be successfully completed. In addition, in the ceramic sintering process, the high-thermal-conductivity metal is tightly covered on the top and bottom of the ceramic green embryo, so that the heat can be introduced into the ceramic green embryo, so that the green embryo grains are uniformly heated during the sintering process. In order to reduce the anisotropic effect between the crystals, the overall ceramic grains are more randomly arranged and distributed. In addition, the subsequent heat treatment process can make the grains heal and grow again, and form a more dense and more stable ceramic. In the above embodiment of the present invention, a synthetic lithium aluminum silicate ceramic is taken as an example.

9285t.wf2.ptd 第15頁 593204 _案號91111814_年月曰 修正_ 五、發明說明(11) 作說明,當然本發明之方法並不是只限於合成鋰鋁矽酸鹽 陶瓷,也可以適用於製造其他種類之陶瓷。舉例來說,可 以視所要製作之陶瓷材料而選取不同之原料粉末混合在一 起後,依照本發明之方法依序進行混合、煆燒、製作生 胚、於生胚上下貼合高導熱金屬片、燒結、以及熱處理使 陶瓷緻密化之步驟,而製造出具有較佳性質的陶瓷。其 中,原料粉末並不限於本發明實施例所用之碳酸鋰、氧化 鋁及氧化矽等,還包括可以在高溫燒結中會有揮發現象、 或者陶瓷均勻性對熱敏感者、甚至一般製程無特殊需求的 原料粉末,其例如是氧化鎢、氧化鍅、氧化鋰、氧化鈮、 氧化釩、氧化釔、碳酸鋇、氧化鈦等。藉由選取不同成分 之原料粉末,並使用本發明之方法而可以製造出不同之陶 瓷材料,例如是釩酸釔陶瓷材料、鎢酸锆陶瓷材料、鈮酸 鋰陶兗材料與鈦酸鋇陶兗材料等。 雖然本發明已以一較佳實施例揭露如上,然其並非用 以限定本發明,任何熟習此技藝者,在不脫離本發明之精 神和範圍内,當可作各種之更動與潤飾,因此本發明之保 護範圍當視後附之申請專利範圍所界定者為準。9285t.wf2.ptd Page 15 593204 _Case No. 91118814_ Year Month Amendment _ V. Description of the Invention (11) Of course, the method of the present invention is not limited to synthetic lithium aluminosilicate ceramics, but can also be applied to Manufacture of other types of ceramics. For example, depending on the ceramic material to be produced, different raw material powders can be selected and mixed together, followed by sequential mixing, sintering, production of green embryos, and bonding of high thermal conductivity metal sheets on top of the green embryos, The steps of sintering and heat-treating to densify the ceramics to produce ceramics with better properties. The raw material powder is not limited to the lithium carbonate, alumina, and silicon oxide used in the embodiments of the present invention, but also includes volatilization during high temperature sintering, or ceramics with uniformity to heat sensitive, and even no special requirements in the general process. The raw material powder is, for example, tungsten oxide, hafnium oxide, lithium oxide, niobium oxide, vanadium oxide, yttrium oxide, barium carbonate, titanium oxide, and the like. By selecting raw material powders with different compositions and using the method of the present invention, different ceramic materials can be manufactured, such as yttrium vanadate ceramic materials, zirconium tungstate ceramic materials, lithium niobate ceramic materials and barium titanate ceramic materials. Materials, etc. Although the present invention has been disclosed as above with a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can make various changes and decorations without departing from the spirit and scope of the present invention. The scope of protection of the invention shall be determined by the scope of the attached patent application.

9285twf2.ptd 第16頁 593204 _案號91111814_年月曰 修正_ 圖式簡單說明 第1圖所繪示為本發明之陶瓷材料之製造方法的步驟 流程圖。 第2圖所繪示為完成煆燒之前置粉末的X光繞射分析 圖。 第3 A圖所繪示為實驗例1之鋰鋁矽酸鹽陶瓷材料之掃 瞄式電子顯微鏡(Scanning Electron Microsocope ,SEM) 照相圖。 第3 B圖所繪示為實驗例2之鋰鋁矽酸鹽陶瓷材料之掃 瞄式電子顯微鏡照相圖。 第3 C圖所繪示為比較例之鋰鋁矽酸鹽陶瓷材料之掃瞄 式電子顯微鏡照相圖。 第4圖為繪示以熱機械分析儀量測實驗例1、實驗例2 與比較例之鋰鋁矽酸鹽陶瓷材料所得到之平均膨脹係數值 與標準差。 第5圖為繪示以熱機械分析儀量測實驗例1之鋰鋁矽酸 鹽陶瓷材料在1 3 0 0 °C之燒結溫度下,不同停留時間之平均 膨脹係數值與標準差。 第6 A圖為繪示實驗例1之鋰鋁矽酸鹽陶瓷之膨脹曲線 圖。 第6 B圖為繪示實驗例2之鋰鋁矽酸鹽陶瓷之膨脹曲線 圖。 第7 A圖為繪示實驗例1之鋰鋁矽酸鹽陶瓷之經重複升 降溫度過程之陶瓷膨脹曲線及遲滯現象示意圖。 第7 B圖為繪示實驗例2之鋰鋁矽酸鹽陶瓷之經重複升 降溫度過程之陶瓷膨脹曲線及遲滯現象示意圖。9285twf2.ptd Page 16 593204 _Case No. 91118814_ Year Month Amendment _ Brief Description of Drawings Figure 1 shows the flow chart of the steps of the method for manufacturing the ceramic material of the present invention. Figure 2 shows an X-ray diffraction analysis chart of the powder placed before sintering. Figure 3A shows a scanning electron microscope (SEM) photograph of the lithium aluminosilicate ceramic material of Experimental Example 1. Fig. 3B shows a scanning electron microscope photograph of the lithium aluminosilicate ceramic material of Experimental Example 2. Fig. 3C shows a scanning electron microscope photograph of a lithium aluminum silicate ceramic material of a comparative example. Figure 4 shows the average expansion coefficient values and standard deviations obtained by measuring the lithium aluminosilicate ceramic materials of Experimental Example 1, Experimental Example 2 and Comparative Example with a thermomechanical analyzer. Figure 5 shows the average expansion coefficient and standard deviation of different retention times of the lithium aluminum silicate ceramic material of Experimental Example 1 measured by a thermomechanical analyzer at a sintering temperature of 130 ° C. FIG. 6A is a graph showing the expansion curve of the lithium aluminosilicate ceramic of Experimental Example 1. FIG. Fig. 6B is a graph showing the expansion curve of the lithium aluminosilicate ceramic of Experimental Example 2. Figure 7A is a schematic diagram showing the ceramic expansion curve and hysteresis of the lithium aluminosilicate ceramics of Experimental Example 1 after repeated temperature rise and fall processes. Figure 7B is a schematic diagram showing the ceramic expansion curve and hysteresis of the lithium aluminosilicate ceramics of Experimental Example 2 after repeated temperature rise and fall processes.

9285twf2.ptd 第17頁9285twf2.ptd Page 17

Claims (1)

593204 _案號91111814_年月日__ 六、申請專利範圍 1 · 一種鋰鋁矽酸鹽陶瓷之製造方法,該方法包括下列 步驟: 以碳酸鋰、氧化鋁、與氧化矽之混合粉末作為一原料 粉末, 混合研磨該原料粉末後,並烘乾該原料粉末; 對該原料粉末進行一煆燒製程,使該原料粉末形成一 前置粉末; 將該前置粉末壓製成一生胚; 於該生胚之上表面與下兩面貼合一高導熱金屬片; 進行一燒結製程,使該生胚燒結成一陶瓷;以及 對該陶瓷進行一熱處理製程。 2.如申請專利範圍第1項所述之鋰鋁矽酸鹽陶瓷之製 造方法,其中混合研磨該原料粉末之方法包括球磨法。 3,如申請專利範圍第1項所述之鋰鋁矽酸鹽陶瓷之製 造方法,其中碳酸鋰、氧化鋁與氧化矽之莫耳比包括1 : 1 ·· 2 至1 ·· 1 : 3 之間。 4 .如申請專利範圍第1項所述之鋰鋁矽酸鹽陶瓷之製 造方法,其中該高導熱金屬片之材質包括傳導係數高於1 〇 W / m K之金屬。 5.如申請專利範圍第全項所述之鋰鋁矽酸鹽陶瓷之製 造方法,其中該高導熱金屬片包括白金片。 6 .如申請專利範圍第1項所述之鋰鋁矽酸鹽陶瓷之製 造方法,其中該陶瓷中之氧化鋰、氧化鋁與氧化矽之莫耳 比包括1 : 1 : 2至1 ·· 1 : 3之間。593204 _Case No. 91118814_Year_Month__ VI. Scope of patent application1. A method for manufacturing lithium aluminum silicate ceramics, the method includes the following steps: using lithium carbonate, alumina, and mixed powder of silicon oxide as a Raw material powder, after mixing and grinding the raw material powder, and drying the raw material powder; subjecting the raw material powder to a firing process to form the raw material powder into a pre-powder powder; pressing the pre-powder powder into a raw embryo; A high thermal conductivity metal sheet is bonded to the upper surface and the lower surface of the embryo; a sintering process is performed to sinter the green embryo into a ceramic; and a heat treatment process is performed on the ceramic. 2. The method for manufacturing a lithium aluminum silicate ceramic according to item 1 of the scope of the patent application, wherein the method of mixing and grinding the raw material powder includes a ball milling method. 3. The manufacturing method of lithium aluminosilicate ceramics as described in item 1 of the scope of the patent application, wherein the molar ratios of lithium carbonate, alumina and silicon oxide include 1: 1 to 2 between. 4. The method for manufacturing a lithium aluminosilicate ceramic according to item 1 of the scope of the patent application, wherein the material of the highly thermally conductive metal sheet includes a metal having a conductivity higher than 10 W / mK. 5. The method for manufacturing a lithium aluminum silicate ceramic as described in the entire item of the scope of patent application, wherein the highly thermally conductive metal sheet includes a platinum sheet. 6. The manufacturing method of lithium aluminosilicate ceramics according to item 1 of the scope of patent application, wherein the molar ratios of lithium oxide, aluminum oxide and silicon oxide in the ceramic include 1: 1: 2 to 1 ·· 1 : Between 3. 9285twf2.ptd 第18頁 593204 _案號91111814_年月日__ 六、申請專利範圍 7.如申請專利範圍第1項所述之鋰鋁矽酸鹽陶瓷之製 造方法,其中該煆燒製程之溫度包括5 0 0 °C至7 0 0 °C之間。 8 ·如申請專利範圍第1項所述之鋰鋁矽酸鹽陶瓷之製 造方法,其中該煆燒製程之停留時間包括1 2小時至3 6小時 之間。 9 ·如申請專利範圍第1項所述之鋰鋁矽酸鹽陶瓷之製 造方法,其中該燒結製程之溫度包括8 5 0 °C至1 4 0 0 °C之 間。 1 0 .如申請專利範圍第1項所述之鋰鋁矽酸鹽陶瓷之製 造方法,其中該燒結製程之停留時間包括2小時至2 4小時 之間。 1 1 .如申請專利範圍第1項所述之鋰鋁矽酸鹽陶瓷之製 造方法,其中該熱處理製程之步驟包括: (a )使該陶瓷升溫至一第一溫度; (b )使該陶瓷從該第一溫度降溫至一第二溫度;以及 (c )重複進行上述步驟(a )與步驟(b )。 1 2 ·如申請專利範圍第1項所述之鋰鋁矽酸鹽陶瓷之製 造方法,其中該熱處理製程之升溫速率1 °C / m i η至8 °C / m i η 之間。 1 3 ·如申請專利範圍第1項所述之鋰鋁矽酸鹽陶瓷之製 造方法,其中該熱處理製程之降溫速率1 °C / m i η至8 °C / m i η 之間。 1 4 ·如申請專利範圍第1項所述之鋰鋁矽酸鹽陶瓷之製 造方法,其中該第一溫度包括8 0 0 °C ,該第二溫度包括2 59285twf2.ptd Page 18 593204 _ Case No. 91118814 _ __ Date of application for patent 7. The manufacturing method of lithium aluminosilicate ceramics as described in item 1 of the scope of patent application, wherein the firing process is Temperatures range from 500 ° C to 700 ° C. 8. The method for manufacturing a lithium aluminosilicate ceramic according to item 1 of the scope of patent application, wherein the residence time of the sintering process includes between 12 hours and 36 hours. 9. The method for manufacturing a lithium aluminosilicate ceramic according to item 1 of the scope of patent application, wherein the temperature of the sintering process includes between 850 ° C and 14 0 ° C. 10. The method for manufacturing a lithium aluminosilicate ceramic according to item 1 of the scope of the patent application, wherein the residence time of the sintering process includes between 2 hours and 24 hours. 1 1. The method for manufacturing a lithium aluminosilicate ceramic as described in item 1 of the scope of patent application, wherein the steps of the heat treatment process include: (a) heating the ceramic to a first temperature; (b) making the ceramic Cooling down from the first temperature to a second temperature; and (c) repeating the steps (a) and (b). 1 2 · The method for manufacturing a lithium aluminosilicate ceramic as described in item 1 of the scope of patent application, wherein the heating process has a heating rate between 1 ° C / m i η and 8 ° C / m i η. 1 3 · The method for manufacturing a lithium aluminosilicate ceramic as described in item 1 of the scope of patent application, wherein the temperature reduction rate of the heat treatment process is between 1 ° C / m i η and 8 ° C / m i η. 1 4 · The method for manufacturing a lithium aluminosilicate ceramic according to item 1 of the scope of patent application, wherein the first temperature includes 80 ° C, and the second temperature includes 2 5 9285twf2.ptd 第19頁 593204 _案號91111814_年月曰 修正_ 々、申請專利範圍 °c。 1 5 . —種陶瓷材料之製造方法,該方法包括下列步 驟: 提供一前置粉末; 將該前置粉末壓製成一生胚; 於該生胚之上表面與下兩面貼合一高導熱金屬片; 進行一燒結製程,使該生胚燒結成一陶瓷;以及 對該陶瓷進行一熱處理製程。 1 6 .如申請專利範圍第1 5項所述之陶瓷材料之製造方 法,其中該前置粉末之製作步驟包括: 以至少包括一種成分以上之混合粉末作為一原料粉 末; 混合研磨該原料粉末後,並烘乾該原料粉末;以及 對該原料粉末進行一煆燒製程,使該原料粉末形成該 前置粉末。 1 7.如申請專利範圍第1 5項所述之陶瓷材料之製造方 法,其中該原料粉末至少係選自在高溫燒結中會有揮發現 象之陶瓷原料粉末、陶瓷均勻性對熱敏感之陶瓷原料粉 末、與一般製程無特殊需求的陶瓷原料粉末所組之族群之 其中一種以上。 1 8 .如申請專利範圍第1 5項所述之陶瓷材料之製造方 法,其中該高導熱金屬片之材質包括傳導係數高於1 0 W/mK之金屬。 1 9 .如申請專利範圍第1 5項所述之陶瓷材料之製造方9285twf2.ptd Page 19 593204 _Case No. 91118814_ Year Month Amendment _ 々, scope of patent application ° c. 15. A method for manufacturing a ceramic material, the method includes the following steps: providing a pre-powder; pressing the pre-powder into a green embryo; and attaching a high thermal conductivity metal sheet on the upper surface and the lower two sides of the green embryo Performing a sintering process to sinter the green embryo into a ceramic; and performing a heat treatment process on the ceramic. 16. The method for manufacturing a ceramic material according to item 15 of the scope of the patent application, wherein the step of preparing the pre-powder comprises: using a mixed powder including at least one ingredient as a raw material powder; after grinding and grinding the raw material powder And drying the raw material powder; and performing a calcination process on the raw material powder to form the raw material powder into the pre-powder. 1 7. The method for manufacturing a ceramic material according to item 15 of the scope of the patent application, wherein the raw material powder is at least selected from a ceramic raw material powder that has a volatilization phenomenon at high temperature sintering, and a ceramic raw material powder whose ceramic uniformity is sensitive to heat One or more of the groups of ceramic raw material powders with no special requirements in general processes. 18. The method for manufacturing a ceramic material as described in item 15 of the scope of patent application, wherein the material of the highly thermally conductive metal sheet includes a metal having a conductivity higher than 10 W / mK. 19. The manufacturer of ceramic materials as described in item 15 of the scope of patent application 9285twf2.ptd 第20頁 593204 _案號91111814_年月日__ 六、申請專利範圍 法,其中該熱處理製程之步驟包括: (a )使該陶瓷升溫至一第一溫度; (b )使該陶瓷從該第一溫度降溫至一第二溫度;以及 (c )重複進行上述步驟(a )與步驟(b )。 2 0 .如申請專利範圍第1 5項所述之陶瓷材料之製造方 法,其中該熱處理製程之升降溫速率為1 °C / m i η至8 °C / m i η 之間。9285twf2.ptd Page 20 593204 _ Case No. 91118814_ year month date__ Six, the patent application method, wherein the steps of the heat treatment process include: (a) heating the ceramic to a first temperature; (b) making the The ceramic is cooled from the first temperature to a second temperature; and (c) the steps (a) and (b) are repeated. 20. The method for manufacturing a ceramic material according to item 15 of the scope of the patent application, wherein the temperature rise and fall rate of the heat treatment process is between 1 ° C / m i η and 8 ° C / m i η. 9285t.wf2. pt.d 第21頁9285t.wf2. Pt.d Page 21
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