TW587970B - Slurry delivery system combining pre-mixing with real-time mixing - Google Patents

Abstract

A slurry delivery system combining pre-mixing with real-time mixing includes a plurality of polishing slurry systems separately providing a plurality of slurries; a plurality of slurry delivery pipelines coupled to the slurry systems for delivering the slurries; a real-time mixing system coupled to the slurry delivery pipelines for quantitatively mixing the slurries and delivering them in real time; and a pre-mixing tank coupled to the slurry delivery pipelines for mixing and preparing the slurries to a specified ratio followed by delivery.

Description

587970 V. Description of the invention (l) The present invention relates to a grinding slurry transmission system, and more particularly to a grinding slurry transmission system combining premixing and instant mixing. The present invention relates to a semiconductor manufacturing process, and more particularly to a chemical mechanical polishing method (Chemical Mechanical Poshing; CMp). Chemical mechanical polishing method , Is currently the only technology that can provide global planarization (global planarization), its principle is to use the chemical reaction provided by chemical additives, and the wafer on the polishing table by the two mechanical polishing 'protrude the wafer The deposited layers are added step by step. In the CMP process, we usually use " siurry " as an auxiliary.研 The slurry used is mainly made of colloidal silica (S1llca) or dispersed aluminum and alkaline solutions such as K0Κ or NH4〇H, Niren and #from) grinding particles, ii 1 into. The size distribution of these extremely hard abrasive particles in the research polymer is about 0-1. In this book, we are using these extremely abrasive products: Surface grinding. The CMP of different materials comes from different tables. For example, in the metal tungsten & mΛ, the knives will have oxidants and organic, and the composition of Rongzhong's slurry will include-also emulsifiers and organic cooling. Agents to help the CMP process. However, when the process technology reaches 0.13 // m or less, the system of research and development will cause many problems, such as the mixed research of Mongolian and Jiuzhi technologies to make special processes. The use of CMP; two methods k for real-time online central system to do deployment 'due to the transmission of the grinder distance is too long? The / composition is caused by the-lake phenomenon, and it is not easy to be accurate: it can cause particle sinking, which may cause valve failure and pipeline damage. In view of this, in order to solve the problem, the main purpose of the present invention is M7970.

This kind of grinding slurry mixing and conveying system, especially about one kind of conclusion: the grinding-slurry conveying system of first mixing and real-time mixing can be simply placed near ^ D, the distance between particles is reduced, and the phenomenon of particle precipitation is reduced, and it is immediately delivered to the machine. . In order to achieve the above-mentioned object, the present invention proposes a grinding slurry transmission system combining pre-mixing and j7, and this mouth includes a plurality of grinding slurry = system, each of which provides a plurality of different grinding slurry compositions; a plurality of slurry delivery lines , Coupled to the grinding slurry systems, used to transfer the grinding slurry ^ an instant mixing system, coupled to the slurry transmission pipeline, used to transfer the grinding slurry immediately after transmission; a pre-mixing The tank is coupled to the slurry transmission pipelines, and is used for mixing and preparing the grinding slurry to a predetermined ratio, and then transmitting the slurry. In order to make the above-mentioned objects, features, and advantages of the present invention more obvious and easy, a preferred embodiment is given below, and in conjunction with the accompanying drawings, the detailed description is as follows: Schematic illustration: The first figure is in the present invention Schematic of a pre-mixed and instant-mixed slurry delivery system. Explanation of symbols: 102 first grinding slurry; 1 06 first power pump; 1 1 0 second grinding slurry; 1 14 second power pump; 1 1 8 first valve; 10 0 first grinding slurry system 10 4 first circuit System; 108 the second grinding slurry system 112 the second circuit system; 116 the first liquid transmission line

587970 V. Description of the invention (3) 120 The third power 124 The second valve 1 2 8 Instantly mixes the third slurry 1 3 6 The fourth slurry 14 0 Premixes 1 4 4 The second path embodiment: pump; 122 126 system, 130 Transmission pipeline; 134 transmission pipeline; 138 tank; 142 second slurry transmission pipeline; fourth power pump; first path; third valve; fourth valve; load cell; the present invention proposes a combination of premixing and instant The mixed grinding slurry transmission system includes, as shown in the first figure, a first grinding slurry system 100, and the first grinding slurry system 100 includes a first grinding slurry 102 and a first circuit system 10. 4, and the first circuit system 104 has a first power pump 106, wherein the first power pump 106 is used to control the flow of the first grinding slurry 102 in the first circuit system 104. A second grinding slurry system 108 includes a second grinding slurry 110 and a second circuit system 112, and the second circuit system 112 has a second power pump 114, in which the second power pump 114 is used to control the flow and circulation of the second grinding slurry 11 in the second circuit system 2; A first slurry transmission line 116 is coupled to the first grinding slurry system 100 ′ for transmitting the first grinding slurry 102. The first slurry transmission line 116 includes a first valve 118 and a first valve. Three power pumps 120, wherein the first valve 118 is a switch that controls the first slurry transmission line 116, and the third power pump 120 is to control the flow rate and

0503-6915TWF TSMC2001-0777 I Jerry.ptd Page 7

A second slurry transmission line 122 and 108 are used to transmit the second grinding transmission line 122 including a second valve, wherein the second valve 124 is used to control the flow rate, and the fourth power pump 126 is used to control the flow rate. . The second slurry slurry is coupled to the second slurry slurry 1 1 0, in which the second slurry slurry gate 124 and a fourth power pump 126, the second slurry slurry transmission line 22, the second slurry slurry 1 1 The flow rate of 0 and the first stage are connected to the first-_pipeline 116, the first stage: m road 122, which is used to mix the first grinding slurry 102 and = into a first mixed grinding slurry (not shown: path 13 ° Immediate transmission, where the mixing ratio of the first-mixing pump 1202 is not shown in the figure) The first grinding is controlled by the flow rate of the third power grinding polymer 102 and the fourth power pump 126 The velocity of the slurry 1 1 0 is determined. The first and second transmission pipelines 132 are connected to the first grinding slurry system Ϊ 'to transport the first grinding slurry 102, and a third valve 134 is included in the third slurry = path 132. The third valve 134 is a switch for controlling the third slurry transmission pipeline 32. _ »One to four / liquid transmission line 136 'Consumed in the second grinding slurry system = 8 It is used to transfer the second grinding slurry UG, where the fourth polymer solution first: J Γ 丨 Road 136 includes A fourth valve 138, wherein the fourth valve 138 is a switch for controlling the fourth slurry transmission line 136.西 # A pre-mixing tank 140 is coupled to the third slurry transfer pipeline 132 and the fourth slurry transfer pipeline 136 to mix and prepare the first grinding slurry.

587970

10 and the second grinding slurry 110 to a predetermined ratio, and a second mixed grinding slurry (not shown in the figure) is formed in the pre-mixing tank 140, and then transmitted through the second path 144, where A weight meter 142 is further included in the pre-mixing tank 140 to measure the weight of the first grinding slurry 102 and the second grinding slurry 10, and the second mixed grinding slurry (not shown in the figure) The mixing ratio is controlled by measuring the weight of the first grinding slurry 1, 0 2 and the second grinding slurry 11 0 by the weight scale 1 42. When the desired grinding: Γ f H reaches a predetermined value At the time, the third valve 134 is closed or the first month is closed without mixing and the current time is poor. The second is to increase the CMP of the on-line mixing slurry ratio ^, and the composition of the mixing slurry is partially simplified. The multi-functional sleeve deployment makes the distance for transmitting the grinding slurry shortened. It is easy to adjust the composition ratio of the grinding slurry to provide more f and the definition of the invention. Although the present invention is disclosed in the preferred embodiment, it lacks the advantages of the present invention. Scope, anyone who is familiar with this skill is not good: He Fan Within, when to do some modifications and variations, depending on the scope of protection as defined by the scope of the appended patent, whichever is present

Claims (1)

587970 6. Scope of patent application ^ A grinding slurry transmission system combining pre-mixing and instant mixing, which includes: -r Ϊ several research liquid systems' to provide different multiple grinding polymer compositions, respectively; multiple public liquid transmission A pipeline is connected to the grinding slurry system for transmitting the grinding slurry; an instant mixing system is coupled to the slurry transmission pipeline for mixing the waiting grinding slurry and transmitting immediately; The pre-mixing tank is coupled to the slurry transmission pipelines for mixing and preparing the grinding slurry to a predetermined ratio, and then transmitting it. 2 · The grinding slurry transmission system combining pre-mixing and instant mixing as described in item 1 of the scope of the patent application, wherein the ratio of the grinding slurry in the instant mixing system after mixing is by precisely controlling the flow rate of the grinding slurry Decided. 3. The grinding slurry transmission system combining pre-mixing and instant mixing as described in item 1 of the scope of patent application, wherein the proportion of the grinding slurry in the pre-mixing tank after mixing is determined by controlling the weight of the grinding slurry 0 4 · A grinding slurry transmission system combining pre-mixing and instant mixing, comprising: a first grinding slurry system, the first grinding slurry system comprising a first grinding slurry and a first circuit system, and the first The first circuit system has a first power pump; a second grinding slurry system, and the second grinding slurry system includes 0503-6915TWF; TSMC2001-0777; Jerry.ptd page 10 The first grinding slurry and a second circuit system have a second power pump and a first slurry transmission pipeline, which are coupled to the first grinding slurry for transporting the first grinding slurry, where the 1 = liquid system includes- -The door and a third move ;: in the poly-fluid transfer wheel pipeline 4-the second t-liquid transfer pipeline, lightly connected to the = transfer the second grinding liquid, which is installed in the second; : Including a second valve and a fourth power pump; an instant mixing system in a special round pipeline temple circuit system, coupled to the two slurry transmission lines, for mixing the liquid into a first mixed slurry and a third slurry A transmission pipeline for transmitting the first grinding and cracking fluid, including a third valve; and transmitting the first grinding slurry and the first grinding slurry and the second grinding slurry immediately after the first slurry transfer wheel tube and the second grinding slurry; In the first grinding slurry system, wherein in the second polymer liquid transfer pipeline A fourth liquid transmission pipeline is coupled to the second grinding slurry system for transmitting the second grinding slurry, wherein a fourth valve is included in the fourth slurry transmission pipeline; a pre-mixing tank, coupled Connected to the third slurry transfer pipeline and the fourth polymer slurry transfer pipeline to mix and prepare the first grinding slurry and the second grinding slurry to a predetermined ratio to form a second mixed grinding slurry, and then Transmission out. 5. The grinding slurry transmission system combining pre-mixing and instant mixing as described in item 4 of the scope of patent application, wherein the first power pump is used to control the flow of the first grinding slurry in the first circuit system. 0503-6915TW; TSMC2001-0777; Jerry.ptd Page 11 587970 6. Patent application scope β 6. Combination of pre-mixing and real-time LG Research 2 liquid transfer system as described in item 4 of the patent application scope. This is used to control the flow of the second grinding slurry in the first circuit system. 7. The grinding slurry transfer system combining pre-mixing and instant mixing as described in item 4 of the scope of the patent application, wherein the first valve destroys the switch of the liquid transfer pipeline. Control violation: The grinding slurry transmission system combining pre-mixing and instant mixing as described in item 4 of the scope of patent application, wherein the third power pump controls the flow rate of the first grinding slurry. 9. The grinding slurry transfer system combining pre-mixing and instant mixing as described in item 4 of the scope of the patent application, wherein the second valve is a switch that controls the second polymer liquid transfer pipeline. 10. The grinding slurry delivery system combining premixing and instant mixing as described in item 4 of the scope of the patent application, wherein the fourth power pump is to control the flow rate of the second grinding slurry. 11 · The grinding slurry transmission system combining pre-mixing and instant mixing as described in item 4 of the scope of the patent application, wherein the mixing ratio of the first mixed grinding slurry is controlled by the third power pump to control the flow rate of the first grinding slurry And the fourth power pump determines the flow rate of the second grinding slurry. 1 2 The grinding slurry transfer system combining premixing and instant mixing as described in item 4 of the scope of the patent application, wherein the third valve is a switch that controls the third slurry transfer pipeline. 1 3 · The grinding slurry transfer system combining pre-mixing and instant mixing as described in item 4 of the scope of patent application, wherein the fourth valve is for controlling the fourth 0503-6915TW; TSMC2001O777; Jerry.ptd Page 12 587970 6. Scope of patent application The switch of slurry transmission pipeline. 1 4. The grinding slurry transmission system combining pre-mixing and instant mixing as described in item 4 of the scope of the patent application, wherein the pre-mixing tank further includes a load cell for measuring the first grinding slurry and the first grinding slurry. The weight of the two grinding slurry, and the mixing ratio of the second mixed grinding slurry is controlled by the weight of the first grinding slurry and the second grinding slurry. 0503-6915TWF; TSMC2001-0777; Jerry.ptd page 13