TW587133B - Coaxial type high vacuum magnetic transmission coupler - Google Patents

Abstract

Disclosed is a coaxial type high vacuum magnetic transmission coupler, for providing power transmission under an isolated environment. This invention uses the non-contact transmission feature of magnetic coupler to provide coaxial type magnetic transmission vacuum isolation purposes. The coaxial type high vacuum magnetic transmission coupler includes two sets of magnetic couplers, vacuum isolation cylinders, and inner and outer shafts. The two sets of magnetic couplers are each connected to the inner and outer shafts, respectively. The inner and outer shafts serve to transmit power by means of the two sets of magnetic couplers.

Description

587133 V. Description of the invention (1) [Technical field to which the invention belongs The present invention relates to a device suitable for a high vacuum operation environment, and in particular, j is the driving side and the driven side can be transmitted through the inner and outer shafts through a vacuum isolation cylinder 胄 y Type high-vacuum magnetic coupling; it is particularly suitable for applications that require barriers, or environments that must be processed in special gases, such as wafer transfer robots on vacuum, using the magnetic coupling of the invention Reliability of equipment in high vacuum environment and reduced equipment cost. ° Increasedly [Previous technology] Semiconductor manufacturing has reached sub-micron or thinner circles? There are several basic indicators of operation quality, including defects: plug and :: crystal weight of stone, must be strict ::;:; = = field = dust, or must be selected in special gas: vacuum performance, The leak is-a big problem. Because of the semiconducting] (the gram :, == the conditions caused by the gap between the shaft and the shaft are extremely strict, so with its production technology for working environment wafer transfer mechanism, processing machine, etc.), edge hardware equipment (such as drive The device exceeds the prescribed standards. 〇 The dust particles generated during operation can not be divided into two types: mechanical transmission uses gears, pulleys and magnetic transmission, and force transmission uses electromagnets. 3 Driven by a bead screw, etc., the mechanical arm of a magnetic sinusoidal drive is a driving device. There are two types of joint type and slide rail type. Among them, the different driving methods can be divided into Guan and Zhongguan instant mechanical arms. Using a pulley or

587133 V. Description of the invention (2) Driven by the caster wheel, it has the functions of elongation and shortening, and can even be folded up completely, taking up less space; the slide-rail type is controlled by a ball guide screw, and 0 is used to advance and retreat As well as rotary motion, it can convey workpieces requiring greater power with smooth motion and low friction. However, since the mechanical transmission is a direct contact type, it is relatively easy to generate dust during operation, which is a great test for the production of ultra-high precision crystals. If it is a mechanical arm that uses magnetic transmission, it is not easy to generate dust because it is not directly in contact with the transmission. Therefore, the clean production of the space will be relatively improved, which is very suitable for wafers or other high-tech products. ^ = Processing environment. seat. Word of mouth [invention, "desired constitutive application of dust and lost. Under the fixed pole, there will be high-vacuum quality without problems. It is an iron ring. Contents] The solution of the invention is to use the high-vacuum reduction environment to apply the free volatilization conditions of the magnetically conductive vehicle. The first operating environment that led to the high-tech problem was solved on the iron ring with ▲ clarity and no magnetic transmission, but the phenomenon, or maintenance, was improved. Therefore, there is no problem in the vacuum condition of the force coupling when collecting the deposit agent. It is to solve the problem of the lack of magnetic coupling which is easy to effectively meet the requirements of the degree of vacuum in the south when the mechanical conveyor such as wafer conveying equipment is used. Magnetism is the phenomenon of outgasing of the chemical components of the adhesive in a vacuum environment, which will lead to a more complicated adhesion process. The second problem of product design, which is to be solved by the present invention, is to fix the magnetic pole to the magnetically conductive chemistry by means of adhesion. The components are maintained in a free-flow method in a vacuum environment, and the adhesion process is more complicated. 587133 V. Description of the invention (3) The absence of 1. The third problem to be solved by the present invention is the reason that the magnetic pole 2 of the traditional magnetic coupling is limited by its shape, 'cause the size of the air gap cannot be further decreased by ^', and the effective use efficiency of magnetic energy cannot be improved. Missing. "Technical means to solve the problem" The first technical means described by I # is to use a vacuum isolation cylinder. It completely blocks the driving side and the driven side of the transmission force, and uses a magnetic coupling as the active shaft on the outside of the vacuum barrier. With the power transmission device of the passive shaft, the passive side is prevented from being polluted by external dust and meets the environmental requirements of high vacuum. L At present, permanent magnets with a large magnetic energy product (M) max are mostly powder iiui ’, and their shapes are often limited to simple geometric shapes such as rectangular bodies or circles. Therefore, the magnetic circuit design of the present invention uses the utilization rate of the magnetic energy inside the magnet. Permanent magnet and "Shuijiu-style clamping solid gold n,

Seeking solid, using EpOXy (AB glue) or L 1 slot), etc., the fixing method must be considered after installation = strong adhesion, small changes in holes, etc., because it will affect the magnetic circuit strength, air gap According to the second technical means provided by the present invention, the method of extremely fixing the magnetic adhesive to the magnetically-guided yoke and grasping the mechanical fixer in the production process of the high-quality office is complicated, and can avoid daggers. The method is to combine two sets of non-magnetically conductive materials; the two sides of the yoke iron designed on the product above, and then the magnetic pole is lost 2 ”: the pole fixing ring is combined on the I rule to be fixed on the yoke iron ring, $ 8 pages

JQ / iJJ V. Description of the invention (4) I constitute the inner or outer ring of the magnetic coupling. A non-magnetically conductive stainless steel screw is used to fix the two ± I. First, a magnetic pole fixing ring I magnetic poles are respectively arranged on the lower side of the ring on the magnetic yoke iron ring, and then each-the other-magnetic pole fixing ring is locked. On the guide groove; then the magnetized magnetic coupling holders are magnetized. The fixed ring is fixed on the drive shaft; the group of rust steel screws is fixed by the magnetic pole. Finally, the core is completed :::::: The assembly of the outer ring and the drive pulley is easy to operate: the segment is used for the design of magnetic circuits. A 、 /, Magnetically permeable soft magnetic materials to guide and improve the utilization rate of permanent magnets. The present invention provides a circular arc or a chamfered chamfer to the magnetic poles using a fan-shaped or rectangular machine, respectively, and borrows them. Shitie ft is generally made of aluminum alloy. The magnetic pole fixing ring is clamped on the opposite sides of the magnetically conductive ^ iron coat, which achieves the dual role of positioning and fixing the magnetic pole. · 耩 The fan-shaped magnetic pole design can reduce the air gap. the size of. "Effects on the prior art" Compared with the prior art, the present invention has the following characteristics: 1. A vacuum isolating cylinder completely separates the active-side rotating shaft and the passive-side rotating shaft for power transmission, and two sets of magnetic couplings It is set on the inside and outside of the vacuum isolation cylinder, respectively, as the power transmission interface of the inner and outer rotating shafts, which can effectively maintain the cleanliness of the space on the passive side and high vacuum. First, the use of yoke-guided magnetic coupling as the power transmission can make the shaft page 9 587133

V. Description of the invention (5)

The magnetic flux leakage is reduced, so the effect of the upper and lower images is almost negligible. Using circular arc-shaped magnetic poles for effective use. The next two sets of magnetic couplings are now magnetically coupled to reduce the size of the air gap and increase the magnetic strength. Mechanical and magnetic pole fixation methods can reduce the release of gas from adhesive materials and improve the efficiency of magnetic pole assembly operations. ~ After the design is improved, the modularized magnetic transmission module is easier to assemble. [Embodiment] The first diagram is a plan sectional view of the inner and outer shaft type high-vacuum magnetic coupling of the present invention, which should be magnetic 2! It includes an inner ring magnetic coupling 1, an outer ring * 轴 轴 器 2 and Vacuum isolation cylinder 3. The inner ring magnetic coupling is formed on the inner side of the true < isolation 疴 3, and the inner ring magnetic coupling 1 is fixed to a transmission shaft 4 'and the outer ring magnetic coupling 2 is provided in a vacuum isolation. The outer part of the cylinder 3 is provided with a transmission element, such as a transmission pulley, in the outer ring magnetic coupling 2; the true isolation 1 3 internal system maintains a high vacuum state, and the vacuum isolates the inner ring magnetic force of the inner and outer sides of the cylinder 3 The coupling 1 and the outer ring magnetic coupling 2 are driven by magnetic force. When the driving pulley 5 is driven to rotate, the outer ring magnetic coupling 2 is driven to rotate, and then the inner ring magnetic coupling 2 is driven by the magnetic force. The transmission shaft 4 rotates simultaneously. A structure of the inner ring magnetic coupling 1 of the present invention includes a set of inner ring 10 of the magnetic coupling shown in the second and third figures, and two sets of inner ring magnetic poles shown in the fourth figure. The inner ring 10 of the magnetic coupling is further composed of a magnetically conductive light iron ring 11 and two magnetic poles 12; the inner ring 10 of the magnetic coupling is a circular ring body, and its outer diameter surface is Equidistantly distributes multiple pole positions with appropriate depth

Page 10 587133 V. Description of the invention (6) The groove 111 '俾 sets a plurality of magnetic poles 12 in the magnetic pole positioning recesses _ I " and exposes the magnetic poles 12 to the magnetic pole positioning recesses 111. The magnetic poles 2 are made of soft magnetic materials that are easy to cut and have high magnetic permeability to guide and improve the utilization of the magnetic energy inside the permanent magnet. The magnetic poles 12 are designed as fan-shaped or rectangular, and the magnetic poles 1 2 The outer edge of the two mountains and two 'chamfers becomes the outer circle solitary angle 1 21. The "fan shape" is defined as two shapes in which the center of the iron ring 11 extends radially to the poles 2 symmetrically. The inner ring magnetic pole fixing ring formed by J is a circular ring body, in which—the inner edge arc surface 13 corresponding to the shape of the arc angle 121 outside the magnetic pole 12 is fixed at the position of the ring and On the wheel surface, the inner ring magnetic coupling 1 is required to be installed. The screws pass through the inner ring magnetic pole fixing ring. First, the non-magnetic stainless steel is used to arrange the screws on the listening ring of the magnetic ring 11 on the magnetic ring. Hole hole = and locked on the magnetic pole positioning groove 111 of the magnetically guided vehicle iron; then, the other one), and then put a female pole 1 2 points and an inner ring magnetic pole fixing ring 13 into 22 22 this old monk Hi Next, the magnetically conductive non-scale steel screw is pinched on the upper side of the magnetically conductive iron ring 11, and then the non-locked to the magnetically conductive light iron ring f inner axial magnetic pole fixing ring 13 of the axial hole 132 and ^ 3 ^ κ ^ ^ ^ ^ Refer to the fifth figure and the outer arc angle 121 of the sixth / pole 12 is completely in close contact (please use the single pole & double two ancient times). The assembled inner ring of the magnetic coupling 1 0 The inner ring of the coupling 丨 the magnetic seat is magnetized separately. The magnetized magnet is passed through the inner magnetic pole fixing ring with a non-magnetic stainless steel screw

587133 V. Description of the invention (7) 1 3 The radial holes 1 3 1 are fixed on the transmission shaft 4; the assembled transmission shaft 4 is first installed in the vacuum isolation cylinder in order, and then outside the coupling. The assembly of the ring and the transmission pulley 5 is finally completed by the combination of the magnetic transmission module. The structure of the outer ring magnetic coupling 2 of the present invention includes a set of magnetic coupling outer rings 20 shown in the seventh and eighth figures, and two sets of outer ring magnetic pole fixing rings 23 shown in the ninth figure; The magnetic coupling outer ring 20 is further composed of a magnetically conductive choke ring 21 and a plurality of magnetic poles 22. The magnetic coupling outer ring 20 is a circular ring body whose inner diameter surfaces are distributed at equal distances. A plurality of magnetic pole positioning grooves 2 11 having an appropriate depth, and a plurality of magnetic poles 22 are disposed in the magnetic pole positioning grooves 211, and the magnetic poles 22 are exposed to the magnetic pole positioning grooves 211. The magnetic pole 22 is also made of soft magnetic materials that are easy to cut and have high magnetic permeability. The precision is used to guide and improve the utilization of the magnetic energy inside the permanent magnet. The magnetic pole 22 is designed as a sector or a rectangle, and The two ends of the inner edge of the magnetic pole 2 2 are chamfered into an inner arc angle 2 2 1 respectively. The "fan shape" is defined as a shape formed by extending radially from the center of the magnetic yoke ring 21 to the opposite sides of the magnetic pole 22. The outer ring magnetic pole fixing ring 23 is a circular ring body, and an end surface is provided with

The outer arc surface 2 3 3 corresponding to the inner arc angle 2 21 of the magnetic pole 2 2; a plurality of radial holes 2 3 1 are equally spaced on the outer diameter wheel surface of the outer ring magnetic pole fixing ring 2 3 Moreover, a plurality of axial holes 2 3 2 on both sides of the Beton are distributed at equal distances on the end surface of the outer ring magnetic pole fixing ring 2 3. The outer ring magnetic coupling 2 is installed by first using non-magnetic stainless steel screws to pass through the axial holes 2 3 2 of the outer ring magnetic pole fixing ring 2 3 and locked to the lower side of the magnetic yoke 2 1 Set the screw holes (not shown in the figure), then divide each magnetic pole 2 2 points

On page 12, the description of the invention (8), the description of the invention (8) guide lock ring on the pole positioning groove 211; then, the other magnetic stainless steel screw empty A; 蛉 the upper side of the yoke iron ring 21 The axial hole ⑶ of the ferromagnetic pole fixing ring 23 that is not fixed to the magnetically permeable vehicle is used to completely fit the inner circle of the magnetic coil ... 1 (please use the single pole or the bracket f). The assembled outer ring 20 of the magnetic coupling 20 and the moving pulley 5 are magnetized separately without seats. Its ★ ’will pass to the hole again? I 9 «^ π The diameter of the magnetically permeable stainless steel screw passing through the outer ring magnetic pole fixing ring 23 Because the diameter * is determined on the outer magnetic coupling 20 of the magnetic coupling. It is very troublesome, so it has a considerable magnetic force after pole magnetization, which will increase the design and assembly sequence of the 礤 force coupling thin disc Ϊ structure on the assembly. Careful planning is required. In addition, beneficial. ° 〃 The combination of special moving shafts has modularization and assembly. It is a moving feature. Ϊ ^ Ϊ Technical features-using an iron-guided magnetic coupling as the coupling. Magnetic force 2 can make the axis The magnetic leakage is reduced, and the influence of the upper and lower sets of magnetically shaped fan spots Γ & elephant is almost negligible. In addition, arcs are used. Although r can reduce the size of the air gap and improve the effective transport of magnetic energy, another characteristic of $, Ming is the use of mechanical magnetic pole fixation, such as efficiency 5 to reduce the impact of outgassing of adhesive materials, and improve the assembly of magnetic poles. After μ π L is good, the modular magnetic transmission module is easier to assemble. In order to explain the present invention, the preferred embodiment of the present invention is not intended to be limited in any way according to the spirit of the present invention. Therefore, any modification or change related to the present invention in the same invention should still be included in this

Page 13 587133 V. Description of invention (9) Scope of protection of invention intention

IBB Page 14 587133 The diagram is briefly explained. The first picture shows the transmission mechanism. The second picture shows the third structure. The fourth picture shows the fifth structure. The seventh figure is the combination structure of the eighth figure, the ninth figure is the combination relationship of the ring, and the tenth figure is the combination of the ring. The plane cross-section of the present invention shows the plane of the present invention. The plan view of the present invention shows the plane of the structure of the present invention. The plan view of the present invention shows the plane of the present invention. The plane cross section shows the structure of the present invention. Magnetic link map of the magnetic link. Inner ring magnetism. Two sets of internal exploded views. Two sets of internal sectional views. The two sets of external magnetic exploded views of the magnetic coupling of the two sets of cross-sectional external views of the mobile module applied to the inner and outer shaft type high vacuum shaft inner ring structure. A perspective view of the structure of the yoke iron ring and the pole pole fixing ring of the inner ring of the shaft. Inside the magnetic pole fixing ring and the magnetic coupling 〇 Inside the magnetic pole fixing ring and the magnetic coupling 〇 The perspective view of the yoke iron ring of the outer ring of the shaft and the outer ring of the magnetic pole shaft. Outer ring magnetic pole fixed ring and magnetic coupling outside 0 ring magnetic pole fixed ring and magnetic coupling outside [Element Symbol Description] (1) Inner ring magnetic coupling (1 0) Magnetic coupling inner ring (11) Magnetic permeability轾 Iron ring (1 1 1) magnetic pole positioning groove (1 2) magnetic pole

Page 15 587133 Brief description of the diagram (121) Outer arc angle (13) Inner ring magnetic pole fixing ring (1 3 1) Radial hole (1 3 2) Axial hole (133) Inner edge arc surface ( 2) Outer ring magnetic coupling (20) Magnetic coupling outer ring (21) Magnetic yoke ring (211) Positioning groove (2 2) Magnetic pole (221) Inner arc angle (23) Outer ring magnetic pole fixed Ring (2 3 1) Radial hole (2 3 2) Axial hole (233) Outer edge arc surface (3) Vacuum isolation cylinder (4) Transmission shaft (5) Transmission pulley

Page 16

Claims (1)

The equidistant ground rings are respectively fixed (1 2), 3. according to the application device, which are respectively fixed with the two groups of equidistant ground rings (2 2), 4. according to the Shenli coupling 5. according to the application device, all Soft magnetic 587133 mentioned 6. Application scope 1. A type of inner and outer shaft type high vacuum magnetic coupling, which is provided with an inner ring magnetic coupling and an outer ring magnetic force on the outer side and the outer side. The coupling is connected to an inner shaft, the outer magnet is connected to an outer shaft, and the inner shaft is driven and rotated by the outer shaft through the inner and outer magnetic contact manner. 2. According to the inner and outer shaft type high-definition device according to item 1 of the scope of patent application, wherein the inner ring magnetic shaft device includes: one set of magnetic force and two sets of inner ring magnetic pole fixing rings, and the magnetic coupling The inner ring is provided with a plurality of magnetic poles (12), and the two groups are fixed on opposite sides of the inner ring of the magnetic coupling and the magnetic pole (12) is fixed in the magnetic coupling. The inner and outer shaft type high true # described in the first item of the scope, the outer ring magnetic shaft device includes: a set of magnetic J ring magnetic pole fixing rings, and the outer ring of the magnetic coupling is provided with a plurality of magnetic poles (2 2) , The secret _ 'π extended a group of relative Cong determinated on the outer ring of the magnetic coupling' He Biyou to fix the magnetic pole (22) to the magnetic coupling red w, patent item 2 or 3 In the above item, the magnetic poles (1 2) and (2 2) are fan-shaped. The inner and outer wheel ancient magnetic poles (12) and (22) described in item 4 of the patent scope are made of materials that are easy to cut f true 2. Cutting processing and 6. • According to the inner and outer wheel _ device according to item 4 of the scope of the patent application, wherein the two ends of the outer edge of the magnetic pole (1 2) are inverted / Ah ^ inner force coupling of the isolation cylinder, force coupling Couplings are fixed with non- [magnetic coupling coupling inner ring outer diameter surface with ring magnetic poles and are in contact with the magnetic 〇 [magnetic coupling coupling outer ring inner diameter surface are fixed with each magnetic pole and contact with magnetic 〇 high The vacuum magnetic S magnetic coupling has a high-permeability magnetic coupling angle, and 587133 VI. The scope of patent application and an end of the inner ring magnetic pole fixing ring is provided with an arc corresponding to the outer pole (12) Arc shape of the inner edge of the angular shape. 7. The inner and outer shaft type high vacuum magnetic coupling according to item 4 of the scope of the patent application, wherein both ends of the inner edge of the magnetic pole (2 2) are chamfered into an inner arc angle, and the outer ring magnetic pole One end surface of the fixed ring is provided with an outer arc surface corresponding to the inner arc angle shape of the magnetic pole (2 2). 8. According to the inner and outer shaft type high vacuum magnetic coupling according to item 2 of the scope of patent application, wherein the outer diameter surface of the inner ring of the magnetic coupling is distributed at an equal distance + a plurality of magnetic pole positioning grooves (111 ), And the magnetic poles (1 2) are set in the magnetic pole positioning grooves (111). 9. According to the inner and outer shaft type high-vacuum magnetic coupling according to item 2 of the scope of the patent application, wherein the inner diameter surface of the outer ring of the magnetic coupling is equidistantly arranged with a plurality of magnetic pole positioning grooves ( 2 11), and the magnetic poles (2 2) are set in the magnetic pole position grooves (2 11). 、 Identification axis I 0 · According to the inner and outer shaft type high true cross magnetic two cloth device described in item 2 of the scope of the patent application, in the bean, the outer ring of the inner ring magnetic pole fixing ring is equally spaced on the wheel surface _ plural Radial holes (1 3 1), # and a plurality of axial holes (132) penetrating the two sides of the inner ring magnetic pole fixing ring are distributed off the ground. , II · According to the inner and outer shaft type high-vacuum magnetic device described in item 2 of the scope of the patent application, wherein the outer diameter of the outer ring magnetic pole fixing ring is equidistant to the blade and is equidistant to a complex i radial hole ( 231), and a plurality of axial holes (2 3 2) penetrating both sides are distributed on the end surface of the outer ring magnetic pole fixing ring from the ground. Page 18