TW200424450A - Coaxial type high vacuum magnetic transmission coupler - Google Patents

Abstract

Disclosed is a coaxial type high vacuum magnetic transmission coupler, for providing power transmission under an isolated environment. This invention uses the non-contact transmission feature of magnetic coupler to provide coaxial type magnetic transmission vacuum isolation purposes. The coaxial type high vacuum magnetic transmission coupler includes two sets of magnetic couplers, vacuum isolation cylinders, and inner and outer shafts. The two sets of magnetic couplers are each connected to the inner and outer shafts, respectively. The inner and outer shafts serve to transmit power by means of the two sets of magnetic couplers.

Description

200424450 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a kind of high-vacuum inner and outer shaft type high-vacuum magnetic coupling vacuum, which is a power transmission device for the active side and the power transmission device from the 2/3, empty operation environment. Isolation tube can be completely blocked, or it must be in special gas: especially suitable for wafer picking robotic arm second mining environment that requires ultra-high vacuum, such as the reliability of high vacuum environment and magnetic coupling of wafer transfer equipment I The shaft device can improve its [previous technology] round technology or more subtle level, and measure the level of broken crystals, the surface including the defects, the amount of impurity concentration I must be strictly "; half; body ^ field chamber- In the industry where particles are processed in a special gas, there is a big problem for performance and leakage. The h conveyor caused by the glaze seal gap = machine = :, ^ I exceeds the specified standard. The dust particles generated No 1 丨 Mechanical transmission and magnetic transmission are two types ... Force transmission is u 3 ί, leather or ball screw, etc. = /, I rely on the machine to use electromagnets or permanent magnets as the driving force, and magnetic I rail type Two types, of which articulated The robot can be divided into the use of piece goods _ Le Page pulley or 6,200,424,450

V. Description of the invention (2) Driven by gears, it has the functions of elongation and shortening, and it can even be folded up. It takes up less space; the slide type is controlled by a ball guide screw, and it is used for forward, backward and rotation. Movement, it can convey the workpieces that need more power, and the movement is smooth and low friction. However, since the mechanical transmission is direct contact

Transmission 'is relatively easy to generate dust during operation, which is a great test for ultra-high-precision wafer production. If it is a mechanical arm that uses magnetic transmission, it is not easy to generate dust because it is not directly in contact with the transmission. Therefore, the clean production of the space will be improved by 1 pair, which is very suitable for wafers or other high-tech 2 products.

This problem is to solve the problem that when mechanical conveyors, such as wafer conveying equipment, it is easy to generate a method to effectively meet the needs of high vacuum. [Summary of the Invention] "Technical Problems to Be Solved" The first structure to be solved by the present invention is applied to high Vacuum operation environment, dust reduces the environmental cleanliness and I loss. …, Extremely solid = moving magnetic coupling adopts the adhesive method to maintain the magnetic high vacuum conditions, and the phenomenon of outgassing (〇utgasing), which will cause the quality cannot be further improved, and the adhesion process is more complicated. Product design The question 'is the traditional magnetic force: Shaft :: The second iron ring to be solved by the present invention is easy to cause the magnetic pole to be fixed to the magnetically conductive vehicle, which in turn causes high vacuum 侔 & In the vacuum environment, it is free to maintain, and the adhesion process is more complicated.

Page 7 200424450 V. Explanation of the invention (3) | The magnetic pole book = three "is the low of the traditional magnetic coupling, which causes the effective use of magnetic energy can not be improved anymore = Fajin" Technical means to solve the problem "U ΐ = The first technical means lies in the use of vacuum isolation cylinder Completely block the moving side of L ^ ^ ^ and use a magnetic coupling as the vacuum separation of the 5 active and passive shafts to prevent the passive side from being exposed to external dust :: transmission device: 、 Metallurgical methods to meet the environmental requirements of the vacuum: i. The permanent magnets with straight = energy product (BH) maf are mostly powder I cylinders, and are not limited to simple geometric shapes such as rectangular bodies or circles. For subsequent cutting, if you need to process the shape, you must cut. Therefore, the magnetic circuit design of the present invention uses a soft magnetic ^ under-type clamping fixture that is easy to cut and has high magnetic permeability :: The fixing method can be used Mechanical): ΐ Π 疋 二, xy (AW) or Locti te adhesion, or ... Be careful to consider the adhesion strength after installation, the large change in air gap4, because it will affect the magnetic circuit. ; The surgical means is Mechanically fixed manner π like magnetic core magnetic port mounted vehicles, so the free fat-free adhesive Cheng in a high vacuum environment: " 'and can avoid quality. The method is to combine the two sides of the magnetically permeable vehicle iron designed with two sets of non-magnetically permeable material products, and then combine the magnetic pole clip fixing ring on! Fu Guzhen on the magnetically yoke iron ring to face ιι__ 8

2UU4244 ^ U V. Description of the invention (4) The magnetic coupling is formed by non-magnetically arranging the magnetic poles to fix the inner and outer rings of the other magnetic pole fixing device in the air transmission isolation cylinder. Finally, the magnetic is easy to cut by the present invention. The internal magnetic energy of the magnet. The gap is large, and a magnetic pole fixing ring is connected to the female one by one. The magnetic poles are fixed in the real assembly, and they are all set with high permanent rectangles, which are not magnetically permeable; Side. After assembly, do n’t magnetize the steel screws, then firstly drive the pulley to the magnetic circuit design in order to guide and lift the fan or surface chamfering, and then fix the ring to double the magnetic poles / J \ 〇 "For the prior art Compared with the prior art, the present invention has the following features: 1. The two vacuum isolation cylinders completely separate the active side rotating shaft and the passive h = rotating shaft for power transmission, and two sets of magnetic couplings are respectively set. On the 7 and the outside of the vacuum isolation cylinder, it is used as the power transmission interface of the inner and outer rotating shafts, which can effectively and efficiently support the cleanliness of the space on the passive side and high vacuum. 2. The yoke-guided magnetic coupling is used as power. Transmission can make the axis page 9 200424450

The magnetic flux leakage is reduced, so the effect of the image is almost minimal. 3. The arc-shaped fan-shaped magnetic pole can be effectively used. The next two sets of magnetic couplings can reduce the size of the air gap and improve the magnetic performance. 4. The mechanical magnetic pole fixing method can reduce the neck and increase the efficiency of the magnetic pole assembly operation. 〉 、 The influence of outgassing of adhesive materials. 5. After the improved design, the modular magnetic transmission module is easier to assemble. : Embodiment] The first diagram is a plan sectional view of the transmission mechanism inside and outside the vehicle of the present invention; Tong Bao ^ return two magnetic couplings using magnetic coupling 2 and vacuum isolation tube 3 :, = force coupling The outer annulus isolates the inside of the barrel 3 and magnetically coats the inner annulus. The force coupling 1 is located in the true 4; the outer ring magnetic coupling 2 is located in the real horse shaft 2 fixed to-the drive shaft Li Tao 3 inside the system to maintain a high vacuum-like weight 4 true two partition inner ring magnetic coupling i When driving with the outer ring magnetic coupling, the outer ring magnetic coupling 2 is driven to rotate. The U magnetic force drives the inner ring magnetic coupling 2 and the transmission shaft 4 to rotate at the same time. F The inner ring magnetic coupling of the invention The structure of the shaft coupling includes a set of inner ring 10 of the second and third couplings shown in the second and third figures, and two sets of inner ring magnetic poles shown in the fourth figure. The inner ring 10 of the magnetic coupling further described It consists of a yoke iron ring 11 and t κ / magnetic pole 12, the inner ring 10 of the magnetic coupling is a circular ring body, and the surface of the star diameter is distributed at equal distances.

200424450 V. Description of the invention (6) Grooves 111. The plurality of magnetic poles 12 are arranged in the magnetic pole positioning grooves 111, and the magnetic poles 12 are exposed to the magnetic pole positioning grooves 111 °. The magnetic poles 12 are made by easy cutting and It is made of soft magnetic material with high magnetic permeability to guide and improve the utilization of the magnetic energy inside the permanent magnet. The magnetic pole 12 is designed as a sector or a rectangle, and the two ends of the outer edge of the magnetic pole 12 are chamfered into an outer circle. Arc angle 1 2 1. The "fan shape" is defined as a shape formed by extending radially from the center of the yoke ring 11 to the opposite sides of the magnetic pole 12. The inner ring magnetic pole fixing ring 13 is a circular ring body, and an inner edge arc surface 1 3 3 corresponding to a shape of an arc angle 1 2 1 outside the magnetic pole 12 is provided on one end surface thereof; the inner ring magnetic pole fixing ring 13 1 3 A plurality of radial holes are equally spaced on the outer diameter wheel surface ^ 31 'and an end face of the inner ring magnetic pole fixing ring 3 is equally spaced a plurality of axial holes on both sides of Beton 1 3 2. The inner screw threading ring 11 is in the queue below. An inner ring magnetically conductive lock is fixed to the ring. The figure and the installation method of the nok early pole or inner ring coupling 1 are first fixed to the screw holes of the magnetically conductive yoke by using the axial holes 1 3 2 of the non-magnetic stainless steel magnetic pole fixing ring 13. (Not shown in the figure), and then divide each magnetic pole 12 points, the magnetic pole positioning groove 111 on the ring 11; then, place another = 1 am on the upper side of the magnetic yoke ring 1 丨, and then use the non- Through the axial holes 132 of the inner ring magnetic pole fixing ring 13 and the screw holes provided on the upper side of the second ring, the two sets of inner ring magnetic poles are fixed. Please double ^ magnetization = assembled magnetic coupling inner ring 10 Γ and then complete it separately. The magnetized non-recording steel screw passed through the inner pole pole fixing ring

Page 11 200424450 V. Description of the invention 1 3 Radial holes 1 31 and fixed to the transmission shaft ^ ^ ^ ^ ^ ^ ^ ^ Installed in the vacuum isolation cylinder in sequence 'next then ^ :: Chengzhi transmission shaft 4 then the assembly of the pulley 5 is finally combined into a combination of magnetic transmission modules. The bad magnetic coupling outside the wooden invention 2 is not as good as the 4 * 1. The structure includes a set of magnetic coupling outer ring 20 shown in the seventh figure and the eighth figure, and the ninth figure The two sets of outer ring magnetic pole fixing rings 23; the magnetic coupling outer ring 20 is further composed of a permeable yoke iron ring 21 and a plurality of magnetic poles 22, and the magnetic coupling outer ring 20 is a ring Shape, the inner diameter surface of which is equidistantly distributed with a plurality of magnetic pole positioning grooves 2 11 having an appropriate depth, 俾 set a plurality of magnetic poles 22 in these magnetic pole positioning grooves 2 11 ′ and let the magnetic poles 2 2 out of the magnetic poles Positioning groove 2 1 1. The magnetic pole 22 is also made of soft magnetic materials that are easy to cut and have high permeability to guide and improve the utilization of the magnetic energy inside the permanent magnet. The magnetic pole 22 is designed as a sector or rectangle and the magnetic pole The two ends of the inner edge of 2 2 are chamfered into an inner arc angle 2 21 respectively. The "fan shape" is defined as a shape formed by extending radially from the center of the magnetic yoke ring 21 to the opposite sides of the magnetic pole 22.

The outer ring magnetic pole fixing ring 23 is a circular ring body, and an outer edge arc surface 2 3 3 of a shape corresponding to the inner arc angle 22 1 of the magnetic pole 22 is provided on one end surface; A plurality of radial holes 23b are equidistantly distributed on the outer diameter wheel surface 23, and a plurality of axial holes 2 3 2 penetrating both sides are equally distributed on the end face of the outer ring magnetic pole fixing ring 23. The outer ring magnetic coupling 2 is installed by first using non-magnetic stainless steel screws to pass through the axial holes 2 3 2 of the outer ring magnetic pole fixing ring 2 3 and locked to the underside of the magnetically conductive choke ring 2 1 Set the screw holes (not shown in the figure), then divide each magnetic pole 2 2 points

Page 12 ZUU424450 V. Description of the invention (8) ____ One is arranged on the magnetically conductive light and $ 001 l-^ m ^ ^ η, on the magnetic pole positioning groove 211 on Tiechen 21, and then, another magnetically permeable No. “Π3 is placed on the upper side of the magnetically-guided iron ring 21, and the non-locked to the magnetically-shielded iron if the outer hole of the magnetic pole fixing ring 23 of the axial hole 232 and L · ^ ^ η clothing 2 1 on the upper side The screw holes are set to allow the two sets of outer ring magnetic poles to be fixed = the same as the inner arc angle of the magnetic coil, which is not used in the military pole 卞 雔 4). The assembled magnetic coupling outer ring 20 goes to the hole 231 and The warp ^ ^ ^ ^ ^ 2〇- ° | which is fixed on the magnetizing ^ screw through the outer magnetic pole fixing ring 23 is troubled, so the clock & 2 magnetic force on the structure will increase the assembly force. Shafts and transmission shafts 1 :: ;; The installation sequence should be carefully planned. In addition, | profitable. It has modularization and assembly. One of the technical features of the present invention # ラ a is the transmission of power, so the magnetic force can be made The effect of the coupling of the magnetic coupling of the coupling device as a coupling is almost half reduced. The fan-shaped magnetic poles of the upper and lower sets of magnetic shapes can reduce the air pressure. ≫ The arc is used. The size of the flower team increases the effective transport of magnetic energy. Another feature of the present invention is the use of this, which can reduce the amount of outgassing of the adhesive material, and the fixing method, such as the yield. After improving the design Modularization and improvement of the magnetic pole assembling operation are only used to explain the assembly of the transmission mold f of the present invention is easier. In order to limit the present invention in any form, the preferred embodiment is not an attempt According to the spirit, any amendments to the present invention are based on the following: 'Everything that is decorated or changed in the same invention should still be included in Ben Gong No. 13 200424450 V. Description of the invention (9) The scope of the invention's intended protection IϋΒ page 14 200424450 Brief description of the diagram. The first picture shows the transmission mechanism, the second picture shows the third structure, and the fourth picture shows the fifth structure. The picture shows the combination structure of the eighth picture shows the ninth brother the picture shows the relationship of the ring combination The tenth picture shows the plane after the ring combination The plane of the hair plane The plane of the hair plane The hair knot The plane of the display shows the magnetic view of the structure of the display. The magnetic view of the magnetic structure of the Ming. The magnetic section of the two sections of the Ming. The magnetic view of the two sections of the Ming. The magnetic section of the Ming. A perspective view of the structure of the inner ring structure of the inner and outer shaft type high-vacuum force coupling with two distinct plane sectional force transmission modules. The perspective view of the structure of the magnetic yoke ring and the magnetic pole ring and the fixed ring structure of the inner ring of the force coupling. Internal view of ring magnetic pole fixed ring and magnetic coupling. Internal view of group inner ring magnetic pole fixed ring and magnetic coupling. A perspective view of the yoke iron ring of the outer ring of the force coupling and the magnetic pole. Outer view of the outer ring magnetic pole fixing ring and magnetic coupling. Outer view of the outer ring magnetic pole fixing ring and magnetic coupling. [Description of component symbols] (1) Inner ring magnetic coupling (1 0) Inner ring of magnetic coupling (11) Magnetic yoke ring (111) Magnetic pole positioning groove (1 2) Magnetic pole

Page 15 200424450 Brief description of the diagram (121) Outer arc angle (13) Inner ring magnetic pole fixing ring (1 3 1) Radial hole (1 3 2) Axial hole (133) Inner edge arc surface ( 2) Outer ring magnetic coupling (20) Magnetic coupling outer ring (21) Magnetic yoke ring (211) Positioning groove (2 2) Magnetic pole (221) Inner arc angle (23) Outer ring magnetic pole fixed Ring (2 3 1) Radial hole (2 3 2) Axial hole (233) Outer edge arc surface (3) Vacuum isolation cylinder (4) Transmission shaft (5) Transmission pulley

Page 16

Claims (1)

200424450 6. Scope of patent application 1. An inner rotating magnetic shaft is connected to an outer rotating shaft on the inner and outer shaft side and the outer side respectively, and a high-frequency magnetic coupling is provided on the high-vacuum magnetic coupling to connect an inner rotating shaft warp beam device. It is connected to a true coupling and an outer ring rotating shaft, and the outer ring is connected by the inner magnetic coupling of the inner and outer ring magnetic air isolating cylinders. The magnetic coupling is coupled with the outer shaft in a non-contact manner. Drive and rotate. 2 · The inner and outer shaft type high vacuum magnetic coupling according to item 1 of the scope of the patent application, wherein the inner ring magnetic shaft coupling includes: · one set of magnetic coupling and two sets of inner ring magnetic poles A fixed ring, a plurality of magnetic poles (1 2) are equidistantly arranged on the outer diameter surface of the inner ring of the magnetic coupling, and the two sets of inner ring magnetic pole fixing rings are respectively fixed to the phases of the inner ring of the magnetic coupling The two sides are symmetrical and contact the magnetic pole (12) to fix the magnetic pole (12) to the inner ring of the magnetic coupling. 3. According to the inner and outer shaft type high-speed handle device according to item 1 of the scope of the patent application, wherein the outer ring magnetic shaft device includes: one set of magnetic force and two sets of outer ring magnetic pole fixing rings, and the magnetic coupling Axis 3! The outer ring of the outer y-axis is located at an equal distance and a plurality of magnetic poles (22) are arranged at equal distances. The surface of the 1-k surface is fixed on the opposite sides of the outer ring of the magnetic coupling. The magnetic pole fixed pole (2 2) is used to fix the magnetic pole (2 2) to the magnetic coupling 2 = and contact the magnetic 4 · According to item 2 or item 3 of the scope of patent application ^% ° In the force coupling, the magnetic poles (12) and (22) are in a shape. Outer vehicle type high vacuum 礤 5. According to the inner and outer shafts / types described in item 4 of the patent scope of the application, the magnetic poles (12) and (22) are soft magnetic with easy cutting ^ direction vacuum pressure Made of materials. 〇Technical and highly conductive 6 · According to the inner and outer shaft speakers described in item 4 of the scope of the patent application, wherein the two ends of the outer edge of the magnetic pole (12) have a vacuum angle and an outer arc angle. ,: Page 17 200424450 6. Scope of patent application Moreover, one end surface of the inner ring magnetic pole fixing ring is provided with an inner edge arc surface corresponding to the outer arc angle shape of the magnetic pole (12). 7. The inner and outer shaft type high vacuum magnetic coupling according to item 4 of the scope of the patent application, wherein both ends of the inner edge of the magnetic pole (2 2) are chamfered into an inner arc angle, and the outer ring magnetic pole One end surface of the fixed ring is provided with an outer arc surface corresponding to the inner arc angle shape of the magnetic pole (2 2). 8 · According to the inner and outer shaft type high vacuum magnetic coupling according to item 2 of the scope of the patent application, wherein the outer diameter surface of the inner ring of the magnetic coupling distributes a plurality of magnetic pole positioning grooves at an equal distance (111) , 俾 set the magnetic poles (12) in the magnetic pole positioning grooves (111). 9 · The inner and outer shaft type high vacuum magnetic coupling according to item 2 of the scope of the patent application, wherein the inner diameter surface of the outer ring of the magnetic coupling distributes a plurality of magnetic pole positioning grooves at an equal distance (211) , 俾 set the magnetic poles (22) in the magnetic pole positioning grooves (211). I 0 · According to the inner and outer shaft type south vacuum magnetic coupling according to item 2 of the scope of the patent application, wherein the outer diameter of the inner ring magnetic pole fixed ring is distributed with a plurality of radial holes (131 ), And the end faces of the inner pole magnetic pole fixing ring are equally spaced with a plurality of axial holes (1 3 2) penetrating through both sides. II · According to the inner and outer shaft type high vacuum magnetic coupling according to item 2 of the scope of the patent application, wherein the outer diameter of the outer ring magnetic pole fixing ring is a plurality of radial holes (2 3 1), and a plurality of axial holes (2 3 2) penetrating both sides are equally distributed on the end surface of the outer ring magnetic pole fixing ring. Page 18