u t ') 本’爭》 補尤 i 玖、發明說明， (發明說明應敘明：發明所屬之技術領域、羌前技術、内容、實施方式及圖式簡草親爾）- 【發明所屬之技術領域】 本發明係關於一種五自由度環型光栅式旋轉軸量測系-統，特別是指一種將量測光學元件微組化，俾能同時測量到· 工具機主軸之偏擺量、位移量及主軸轉速等五個自由度之訊 號，提高精密加工與量測技術的量測系統。 【先前技術】 隨著現今咼科技產業技術的發達，目前高科技產品也都 不斷的趨向於短、小、精、薄，尺寸的精度也從微米級推向 奈米級。由於加工中的品質與精度乃是產品中最主要的基本 要求，而精密的量測技術有助於我們對於整個產品品質及良 率的提升，故在加工時機械加工系統時的精度就顯的格外的 重要了。 有鑑於此，精密加工技術及精密量測技術必須不斷的提 昇與增長。而在傳統的主軸加工過程中，往往因為機械因 素、材料因素、控制因素及環境因素，造成其精度並不太高，I 而且也時常忽略了主軸偏擺及微小位移量對於加工產品的 影響。但在微精密加工時，只要加工主軸對於加工工件有些 微許的=變化或偏擺等，都可能造成加工產品的尺寸與精 度的大里块差，進而造成產品精度不夠或良率不佳的情況。 在傳統的主軸量測方面般使用的有非接觸式的電容 ^探頭、三角雷射或是接觸式的厦等，它們雖然可用於測 =主軸轉速或疋主軸定位’但是它們都有—個共同的缺點， 就是無法同時測量得到主轴的多個自由度訊號，也因此無法 585988 年 % 即時準確地掌握到Γϊτ的作動情況與精度。 圖一揭示一種使用非接觸 傲Α旦：目，丨的加搂甘A 飞的雷射或疋電容式探頭來 XI . γρ, VI . V0 7 ^ 轉主軸8與多個位移感應器 7X1 X2:nY2、z，其主要藉由多個感應器mY2、 Z接收旋轉主軸8位移的變&| y Θ ^ 欠化里以達到多軸的測量的功能， 但疋其架構較為雜亂且不容易安裝。 有4α於此4χ明人為了克服在主轴加工時，位移變化量 或偏㈣於加卫精度與品質的影響’即自行研發並成功推出 「-種五自由度光柵式旋轉軸量測系統」，藉由此系統可以 適時同步得到五個自由度的訊號，並即時準確的掌握旋到旋 轉軸的變化情形’以及絲位移變化量與偏擺量，並進行線 上補償，使加工精度達到所須的要求。 【發明目的】 本發明之目的即在於提供一種五自光橋式旋 轉軸量測系統’可以同步得到五個自由度的訊號，並即時準 確的掌握旋到旋轉軸的變化情形，以及主軸位移變化量與偏 擺;£，並進行線上補償，使加工精度達到所須的要求。 【内容】 一般的多軸加工機旋轉主軸位移及偏擺訊號的量測方 法，乃大多利用一光源打在其旋轉主軸上並進而利用四象儀 (PSD)接收其反射訊號並加以處理、轉換、放大訊號而輸 出……等等方法，或是利用電容式探頭感應其電壓差來進行 量測。但是本發明則一反常態，因為本發明乃是利用光槓桿 原理與光干涉原理並藉由光柵繞射之特性來進行線上量 測’由於雷射光打在光柵上時會產生極性繞射，故我們可藉 «) 此得到繞射光的訊！έ並加以處理而得到四個自由度的測量 值·，同時也有干涉鏡處理兩條繞射光，產生=涉條= 並藉由光檢測器（Photodiodes)處理其訊號，進而得到旋轉軸 轉數的量測值。m柵肖雷射同時進行量測日夺，我們即可 同時測量出主軸偏擺量及微小位移量和旋轉數值等五個自 由度之訊號。 【實施方式】ut ') 本' 争 "Supplementary i 玖, description of the invention, (the description of the invention should state: the technical field to which the invention belongs, the previous technology, the content, the embodiment and the schematic diagram)-[the technology to which the invention belongs Field] The present invention relates to a five-degree-of-freedom ring-type grating-type rotating shaft measuring system-system, and particularly to a micro-grouping of measuring optical elements, which can simultaneously measure the deflection and displacement of the machine tool spindle Signals with five degrees of freedom, such as measurement and spindle speed, improve the measurement system of precision machining and measurement technology. [Previous technology] With the development of today's high-tech industry technology, current high-tech products are constantly trending toward short, small, precise, and thin, and the accuracy of dimensions has also been pushed from the micron level to the nanometer level. Because the quality and accuracy in processing are the most important basic requirements in the product, and the precise measurement technology helps us to improve the quality and yield of the entire product, the accuracy of the machining system during processing is obvious. Especially important. In view of this, precision machining technology and precision measurement technology must be continuously improved and increased. In the traditional spindle machining process, the accuracy is not very high because of mechanical factors, material factors, control factors and environmental factors. I also often ignore the effects of spindle deflection and small displacement on the processed products. However, in micro-precision machining, as long as the machining spindle has a slight change to the workpiece or changes, it may cause large differences in the size and accuracy of the processed product, which may cause insufficient product accuracy or poor yield. . In the traditional spindle measurement, non-contact capacitors, probes, triangle lasers, or contact lenses are used. Although they can be used to measure = spindle speed or spindle positioning, they all have one in common. The disadvantage is that it is impossible to measure multiple degrees of freedom signals of the spindle at the same time, so it is impossible to accurately and accurately grasp the operation and accuracy of Γϊτ in 585988%. Figure 1 reveals the use of a non-contact laser sensor or a capacitive sensor using a Gaigan A fly to XI. Γρ, VI. V0 7 ^ Rotary spindle 8 and multiple displacement sensors 7X1 X2: nY2, z, which mainly receives the change of the displacement of the rotating main shaft 8 by multiple sensors mY2, Z & | y Θ ^ The function to achieve multi-axis measurement, but its structure is more messy and not easy to install . There are 4α here. 4χ It is clear that in order to overcome the influence of displacement variation or bias on the accuracy and quality of the guard during spindle machining, that is, the self-developed and successfully launched "-a five-degree-of-freedom grating-type rotary axis measurement system", With this system, the five degrees of freedom signals can be synchronized in real time, and the changes of the rotation to the rotation axis and the changes in wire displacement and deflection can be accurately grasped in real time, and online compensation can be performed to achieve the required processing accuracy. Claim. [Objective of the Invention] The purpose of the present invention is to provide a five-self optical bridge type rotating shaft measurement system that can obtain signals of five degrees of freedom simultaneously, and accurately and accurately grasp the change of rotation to the rotation axis and the change of the spindle displacement. The amount and deflection; £, and online compensation, so that the processing accuracy reaches the required requirements. [Content] Generally, the measurement methods of the displacement and yaw signal of the rotating spindle of a multi-axis processing machine mostly use a light source to hit its rotating spindle and then use a four-image device (PSD) to receive its reflected signal and process and convert it. , Amplify the signal and output ... etc., or use a capacitive probe to sense the voltage difference for measurement. However, the present invention is anomalous, because the present invention uses the principle of optical lever and optical interference and uses the characteristics of grating diffraction to perform on-line measurement. 'Because the polarized diffraction occurs when laser light hits the grating, we can By «) Get the news of diffracted light! and processed to obtain four degrees of freedom measurement values. At the same time, there are also interferometers to process two diffracted lights to generate = relevant strips = and to process their signals by photodiodes to obtain the number of rotations of the rotation axis. Measured value. The m-grid laser is measured at the same time, and we can simultaneously measure the five degrees of freedom signals such as the main axis yaw amount, the small displacement amount and the rotation value. [Embodiment]
「請參閱圖二」本發明所提供之一種五自由度環型光拇 式旋轉軸量測系統，其主要係由一個自行研發之光學讀寫頭 與一環型光柵1所構成之量測系統。在讀寫頭方面包括一個 雷射光源（Laser diode) 2，兩個半反射鏡（Half Mirr〇r) 31、 32,兩個二維四象儀（2DPSD)41、42,兩個干涉鏡（Interfer〇meter) 51、52，一個凸透鏡（Lens) 6及兩個光檢測器（ph〇t〇di〇des) 71、72。其基本作動原理乃是利用一個雷射光源2發出一束 雷射光束（L)打在一干涉鏡51上，藉由相位相干涉原理產 生干涉條紋，並經由一光檢測器71可量測到z軸方向的變 化；而另一道光線由干涉鏡51直接打在其旋轉主軸8上之環 型光柵1，因雷射光打在其環型光柵丨上會產生極性繞射光， 且因其正一階光（L+1)、負一階光（L-1)具有較強之強度， 所以我們主要是接收其正一階光（L+1)、負一階光（L—丨）做 為量測依據，並藉由半反射鏡31、32將繞射後的正一階光 (L+1)、負一階光（[一！）又各自分成正二階光（L+2)、負二 階光（L-2)兩道光線；其中分別穿過半反射鏡31、32的正二 階光（L+2)和負二階光（l-2)的其中兩道雷射光訊號，分別 各自由兩個二維四象儀41、42讀取其分光後的光之訊號，並 且藉由其電壓差轉換成位置變化訊號輸出，進而達到量測X 轴（X-axis)的二維偏移量和2軸（Z-axis)的一維偏移量。 *. · · . 經由上述的量測法，我們可得到X軸（X-axis)和Z轴 (Z-axis)的位置訊號舆偏擺訊號共四個自由的訊號；而另外一 方面，另外兩束雷射光束正二階光（L+2)和負二階光（L- 2) 分別經.由半反射鏡31、32折射入同一個午涉鏡52中，藉由此 • * ： 秦 干涉鏡52此兩道雷射光正二階光（L+2)和負二階光（L-2)彼 此產生一相位相互干涉效應，並產生明暗之干涉條綵，同時 我們讓干射光通過一凸透鏡6打到一個先檢測器72上，用p • > 接收並判斷其明暗干涉條紋之訊號，利用此設計可判斷出千 涉條紋明亮之變化量，進而得到旋轉主“ 8之轉速。因此.， 藉由本發明的董測系統，我們可輕易的暈測出旋轉轴系統的 .··... · · ： 位移.、痛擺、轉數等五個自由度之訊號。 【特點及功效】 • * · . · _ . :· ： 本發明所提供之一種五自由度環型光柵式旋轉軸量測系 t .· * · 統，可以同步得到五個自由度的訊號，並即時準確的掌握旋 * . · 到旋轉_的變化情形，以及主轴位移變化量與偏擺董，並進 行線上補償，使加工精度達到所須的要求p * ： · 上列詳細說明係針對本發明之一可行實施例之具體奴 明，惟該實施例並非用以限制本發明之專利範圍，凡未脫離 本發明锋藝精神所為之等效實施或變更，均應包含於本案之 專利範圍中。 • · · . · 【囷式簡單說明】 .. · 請參間以下有關本發明一較佳實施例之詳細說明及其附 圖，將可進一步瞭解本發明之技術内容及其目的功效；有關 該實施例之附圖為： 585988 :減 __ 圖一爲^¥^知接觸式的雷射或是電容式探頭來做為 量測的架構例圖；以及 圖二為本發明五自由度環型光柵式旋轉軸量測系統之架 構例圖。 【主要部分代表符號】“Please refer to FIG. 2” A five-degree-of-freedom ring-shaped optical thumb-type rotation axis measurement system provided by the present invention is mainly a measurement system composed of a self-developed optical read-write head and a ring-shaped grating 1. The read / write head includes a laser diode 2, two half mirrors 31 and 32, two two-dimensional four imagers 2DPSD 41 and 42, and two interferometers ( Interferometer) 51, 52, a convex lens (Lens) 6 and two photodetectors (phOtodiodes) 71, 72. The basic operating principle is to use a laser light source 2 to emit a laser beam (L) and hit an interferometer 51. The interference fringe is generated by the phase-phase interference principle, and can be measured by a photodetector 71 change in the z-axis direction; and the other beam is directly hit by the interferometer 51 on the ring grating 1 of its rotating main axis 8. Because the laser light hits the ring grating 丨, it will generate polar diffracted light, and because it is positive First order light (L + 1) and negative first order light (L-1) have strong intensity, so we mainly receive its positive first order light (L + 1) and negative first order light (L- 丨) as Measurement basis, and split the positive first-order light (L + 1) and negative first-order light ([one!) Into the positive second-order light (L + 2) and negative by the half mirrors 31 and 32 respectively. Two rays of second-order light (L-2); two laser light signals of positive second-order light (L + 2) and negative second-order light (l-2) passing through the half mirrors 31 and 32, respectively, are respectively composed of two A two-dimensional four-imager 41, 42 reads the light signal after it has been split, and converts the voltage difference into a position change signal output, thereby achieving the measurement of the X-axis two. 2 and the offset axis (Z-axis) of one-dimensional offset. *. · ·. Through the above measurement method, we can get the X-axis (Z-axis) and Z-axis (Z-axis) position signals. There are four free signals. The two laser beams, the positive second-order light (L + 2) and the negative second-order light (L-2), respectively, are refracted by the half mirrors 31 and 32 into the same nodal mirror 52, and thus * *: Qin interference Mirror 52: The two laser lights, the positive second-order light (L + 2) and the negative second-order light (L-2), produce a phase mutual interference effect with each other, and produce an interference stripe of light and darkness. At the same time, we let the dry light pass through a convex lens 6 To a pre-detector 72, use p • > to receive and judge the light and dark interference fringe signal. Using this design, you can determine the change in brightness of the fringe fringe, and then get the rotational speed of the main “8. So, by From the monitoring system of the present invention, we can easily measure the signals of five degrees of freedom, such as displacement, pain, and number of rotations, of the rotating shaft system. [Features and Effects] • * ·. · _.: ·: A five-degree-of-freedom ring-type grating-type rotating shaft measuring system t. · * * System, you can get five degrees of freedom signals simultaneously and accurately grasp the rotation *. · The change to rotation_, the change of the spindle displacement and the deflection, and online compensation, so that the processing accuracy reaches the required Requirement p *: · The above detailed description is specific to one of the feasible embodiments of the present invention, but this embodiment is not intended to limit the scope of the patent of the present invention, and any equivalent implementation without departing from the spirit of Fengyi of the present invention Or changes should be included in the patent scope of this case. • · · · · [Simplified description of the formula] .. · Please refer to the following detailed description of a preferred embodiment of the present invention and its drawings, which will further Understand the technical content of the present invention and its purpose and effectiveness; the drawings related to this embodiment are: 585988: minus __ Figure 1 is an example of a ^ ¥ ^ known contact laser or capacitive probe as a measurement framework Figures; and Figure 2 are examples of the architecture of a five-degree-of-freedom ring-type grating-type rotary axis measurement system according to the present invention. [Main part representative symbols]
1環型光柵 2雷射光源 31、32半反射鏡 41、42二維四象儀 51、52干涉鏡 6凸透鏡 71、72光檢測器 8旋轉主軸 XI、Χ2位移感應器 Yl、Υ2位移感應器 Ζ位移感應器 10 蜂、中文發:明摘要:1 ring type grating 2 laser light source 31, 32 half mirror 41, 42 two-dimensional four imager 51, 52 interferometer 6 convex lens 71, 72 light detector 8 rotating spindle XI, X2 displacement sensor Yl, Y2 displacement sensor Z displacement sensor 10 bee, Chinese post: Ming Abstract:
一種五自由度環型光柵式旋轉軸量測系統，該系統乃是 利用光柵之特性，並配合自行研發之光學讀頭，其包含有一 環形光柵與一光學讀寫頭，該讀寫頭更包含雷射光源、半反 射鏡、四象儀、干涉鏡、光檢測器等，該光學讀寫頭將量測 光學元件微組化，使其成為-個具有五自由度同時量測之機 構’可藉由此系統測量到工具機主轴之偏擺量 軸轉速等五個自由度之訊號，以、去 秒里及主 效 果。 “達到即時線上量測控制的 ·· 银、英文發明摘要 ·· 3A five-degree-of-freedom ring-type grating-type rotary axis measurement system uses a characteristic of a grating and cooperates with a self-developed optical read head. The system includes a ring grating and an optical read-write head. The read-write head further includes Laser light source, half mirror, four imager, interferometer, light detector, etc. The optical read-write head micro-groups the measuring optical elements, making it a mechanism with five degrees of freedom for simultaneous measurement. With this system, the five degrees of freedom signals such as the yaw axis speed of the machine tool spindle are measured, and the main effect is in seconds. "Achieving real-time online measurement control ·· Silver and English invention abstracts ·· 3