TW584840B - Method and apparatus of cooling substrate - Google Patents

Method and apparatus of cooling substrate Download PDF

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Publication number
TW584840B
TW584840B TW90132866A TW90132866A TW584840B TW 584840 B TW584840 B TW 584840B TW 90132866 A TW90132866 A TW 90132866A TW 90132866 A TW90132866 A TW 90132866A TW 584840 B TW584840 B TW 584840B
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Taiwan
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patent application
item
scope
substrate
cooling
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TW90132866A
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Chinese (zh)
Inventor
Guenter Eisele
Waldemar Lukhaub
Klaus Philipp
Roland Dr Wagner
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Steag Hamatech Ag
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26Apparatus or processes specially adapted for the manufacture of record carriers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/16Cooling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/16Cooling
    • B29C2035/1658Cooling using gas

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Oral & Maxillofacial Surgery (AREA)
  • Thermal Sciences (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

The invention relates to the method and the apparatus for ensuring the cooling of substrates, particularly optical data supports, in a fast and homogenous manner. According to the invention, the substrates are rotated through a gas flow.

Description

584840 A7 B7______ 五、發明說明(1.) 本發明係關於一種冷卻基板,尤其是光學數據載具之方 法及裝置。 在製造光學數據載具,例如CD、DVD、DVR及類似 產品時,在不同之製造步驟間,可能需要將形成數據載具之 基板或是數據載具本身冷卻。如此,可將基板例如運動通過 •冷卻氣體環境。然而此種冷卻方式可能造成基板内之溫度分 佈不均勻,及因而形成應力,因為在冷卻氣體大氣内局部之 溫度差異極難避免,其係藉由例如基板單侧流出之氣體所產 生。除此之外,此種冷卻方式相對而言較耗時。 因此本發明之任務係在於,提出一種方法及裝置,其能 夠快速且均勻冷卻基板。 根據本發明,此任務在一種冷卻基板,尤其是光學數據 載具之方法中,係如此解決,即基板被氣流轉動。藉由轉動 基板,基板四周環境内局部之溫度分佈不均勻,在冷卻時可 被平衡。此外,藉由轉動可加速冷卻過程。藉由氣流轉動基 板,另外提供一簡單且低成本之基板轉動驅動方式。 根據一特別偏好之發明實施形式,氣流被導引至基板固 定裝置之輪廓周面上。藉由氣流導引至輪廓周面上,氣流之 動能順利地轉換到基板固定裝置上,因而基板受到保護U。 基板取好對基板固定裝置之一抽轉動。 為了有良好之力轉換,氣流最好與一穿過轉動軸之平面 有一侧向偏移,而被導引至基板固定裝置之周面上。 根據一偏好之發明實施形式,基板固定襞置與基板一起 運動穿過冷卻室,以提供-可控制之冷卻環境,並加速冷 本紙張尺度適用中國國家標準(CNS)A4規格(21G X 297公釐)~~' ' ----- (請先閱讀背面之注意事頊再填寫本頁) tr·· -線 經濟部智慧財產局員工消費合作社印製 584840 A7 五、發明說明(2·) 卻。為了維持相同之冷卻環境,冷卻氣體最好在室内旋轉, 並冷卻至一預定溫度。此時冷卻氣體最好是空調後之空氣, 如此可有一極低成本之解決方法,因為如此環境空氣不會進 入室内,而冷卻空氣也不會從室内溢出,造成冷卻媒質之變 化或是造成環境問題。 注 為了讓基板以簡單方式繼續運動’基板固定裝置最好與 一輸送帶一起運動。為了使基板固定裝置與氣流有一定方 向’輸送帶之運動最奴漸進式,其間暫停運動。氣流最好 在暫停運動時’被導引至基板固定裝置之輪廊‘面上。 為了將氣流也用於冷卻基板,其被導引穿過基板固定裝 置之輪廓周面’最好至少有部份之氣流被導引至基板上。 本發明之任義在於,也可藉由—種冷卻絲,尤其是 光學數據之裝置加以解決,其中,設有―以氣流轉動基 板之裝置。、在此種裝置中,可得到上述之優點,即快速均句 之基板冷卻,及簡單低成本之基板轉動驅動。 線 根據-特職好之發明實卿式,此轉練置具有一有 ,廊周面之絲蚊裝置,及—指向鱗顧之紐喷嘴。 精此基板_裝置之輪翻面簡向其之紐料,可間 單且低成本之方式使基板固定裝置轉動。為了使基板固定裝 置有良好且料之轉動,其最好具有—轉祕之袖。 為I使氣流有良好之力轉換至基板岐裝置上,喷嘴最 ^與-穿過轉動軸之平面有—侧向偏移,因而指向 面。 製 為了可以同時冷卻多個基板,最好設置多個基板固定裝 本紙張尺度適用中國國家標準(CNg)A4規格_ χ挪公^_ -6 584840 A7 B7 五、發明說明(3·) 置,其與一輸送裝置有一定距離。 為了加速冷卻基板,此輸送裝置最好延伸穿過一具冷卻 氣體環境之冷卻室。此冷卻室最好具一裝置,用以循環及冷 卻冷卻氣體大氣,以得到均勻之冷卻氣體環境及均勻之溫度 分佈。 在一特別偏好之發明實施形式中,設有多個向室内開口 之氣體喷嘴’其間之距離最好與設置在輸送裝置上之基板固 定裝置間之距離相同。如此,在冷卻室内之多個基板固定裝 置可同時被轉動,以冷卻固定其上之基板。 根據一偏好之發明實施形式,基板固定裝置具有一有定 心部位之定心銷,其可伸入基板之内孔内,並在定心部位下 有一支承面。如此,得到一簡單且低成本之基板固定裝置, 其不具可控制之爪手元件,但在冷卻時可安全地固定住基 板。基板固定裝置之輪廓周面最好形成一風扇葉片輪廓,以 有效轉換氣流與基板固定裝置間之衝擊力。 在一偏好之發明實施形式中,支承面下之定心銷之輪廓 周面係為基板而設計。此輪廓周面最好與支承面有一段距 經濟部智慧財產局員工消費合作社印製 離,使指向輪廓周面之氣流基本上不會影響置於支承面上之 基板冷卻。 在另一發明實施形式中,周面之輪廓係如此設計,使其 可將射於其上之氣流導引至基板之方向。 根據一發明實施形式,輪廓周面相對定心銷之支承面, 於徑向向外有偏移。為了在定心銷與基板間有良好之力轉 換,最好設置一槽,以在支承面内置放一 〇形環。 本紙張尺度適用中國國家標準(CNS)A4規格_(210 X 297公楚) -7 - 584840 A7 五、發明說明(4·) 根據一特別偏好之發明實施形式,支承面之徑向寬度為 承載之基板半徑之5至20%間,以便基本上只能在内孔範圍 内支承基板。如此,大部份之基板係露空在冷卻環境中。 根據本發明之方法或裝置,最好根據一射出成形之方 法’使用光學數據載具用之半塊基板。 以下藉由一偏好之實施例,以圖式進一步說明本發明。 各圖式之内容如下: 圖一根據本發明之定心銷之示意侧視圖; 圖二圖一所示之定心銷之示意剖面圖; 圖二根據圖一所示之定心銷之上視圖; 圖四根據本發明之冷卻裝置之示意原理圖; 圖五根據本發明之冷卻裝置之示意上視圖; 圖六根據圖五所示之冷卻裝置之示意侧視圖;及 圖七根據圖五所示之冷卻裝置之示意前視圖。 圖一至圖三顯示一定心及支承銷丨之各種視圖,此銷用 於根據本發明之冷卻裝置中。 經濟部智慧財產局員工消費合作社印製 足心及支承銷1具一圓柱形或是軸柱形之主體部位3, it匕王體部位具—大致上平滑之周面5。在主體雜3之上側 有一支承面7,其相對於主體之周面5垂直延伸。在周面5 及支承面7間設有一槽9,用以置放〇形環1〇。定心凸耳 12於中央細内、支承面7上向上延伸。定心凸耳12具一 足〜斜面13 ’其可伸入一承載之基板15 (見圖四)之内孔進 仃足心。定心凸耳12之表面被拋光,且極為光滑,如此在 伸入基板15之中央孔時,定心凸耳12與基板15間之摩擦 本紙張尺度適用中國國家標準-— 584840 A7 ------ B7 五、發明說明(5·) 可被降低。 主體部位3在其下末端具_在徑向、減平滑周面5 突出之輪廓周邊凸緣17。此輪廓周邊凸緣17具_風扇葉片 形狀,且有多個鏟或齒19。齒19具一穿過銷丨之轉動軸A 延伸(齒面20,及一在其背面之齒面22。齒19在其末端具 一平坦之頂面24,其連接二齒面2〇、22。風扇葉片輪廓之 功能以後會在圖四中詳細說明。 從圖二可以看出,主體部位3及定心凸耳12均設計成 空心,一方面為了減輕銷丨之重量,另一方面用來承載未圖 示出之軸承,其使銷丨可對軸A轉動。當然此銷丨可設計 成實心,並在下末端設置一軸承凸耳,其以相應方式伸入軸 承内。 經濟部智慧財產局員工消費合作社印製 圖四顯示基板15是如何置於定心銷1上。定心凸耳12 延伸進入基板15之中央孔内,使基板支承在支承面或〇形 環10上。Ο形環10在定心銷丨轉動時具有下列功能,即在 銷1及基板15間提供良好之力轉換。氣體管道26部份延伸 至基板15下,且具一噴嘴形式之出口開口 28,其指向凸緣 17之風扇葉片輪廓。管道26與一穿過銷丨之轉動軸A之平 面平行延伸,且有一段距離,因而從開口 28喷出之氣流, 與轉動軸侧向偏移至銷1上。此風扇葉片輪廓提供氣流一良 好之面進行衝擊力轉換,因此銷丨藉由一從出口 28喷出之 氣流轉動,如箭頭B所示。 圖五至圖七顯示一根據本發明之冷卻裝置30之各種視 圖,此裝置使用上述之定心銷1。冷卻裝置%具一輸送帶 本紙張尺度適用中國國家標準(CNS)A4規格(21〇 X 297公爱)~""— " -9- 584840 A7 五、發明說明(6·) 系說32,其由兩滾筒35、36導引,其中至少 /二二、ρ《万式驅動。在輸送帶33上裝有多個定心銷 q古、/可’其《轉動轴Α轉動。在輸送帶33上之定心銷1 間有相同距離。 4 裝置32具—上料端38,基板15在此被置於定心 注 意 事 項 义—#另外’輸运裝置32具一下料端39,基板15在此 取出。在輸送裝置幻之上料及下料端%、 "又&卻直42,其包圍輸送帶33之一部份,如圖五 及圖六中讀線絲之齡。 ㈣五 範圍具r人口端44及—出口端45,二端較中央 —細、(截面。此冷卻裝置具有-未圖示出之循 =疋’用崎冷卻氣體,例如域,循環吹人 均勻且職之 在冷卻▲42之一側壁設有多個氣體輸入喷嘴% 輸入嘴嘴5G間之距離,奴心銷1之轉動軸A在輸送帶^ =距_^從圖五及圖七可以看出,氣體輸 ,管道26及一輸出開口 28,此與圖四中所示之方法相。 之操=藉由圖五至圖七進一步說明本發明之冷卻裝置3〇 腎…rt在上料端3嶋板15置於細肖1上。隨後轉動 33,使定心销〗根制六,向右運動定心销〗之^ 動轴Α間之距^如此上料之定,〗勒叙冷卻室c 本紙張尺度適用中國國家標準(CNS)A4規袼(21〇 x 297公爱)- -10 584840 經濟部智慧財產局員工消費合作社印製 A7 ------—___B7_______ 五、發明說明(7·) 内在此位置,輸入噴嘴50指向定心銷丨凸緣口之風扇葉 片輪廓上,如圖四中所示之方法。 、氣流經由喷嘴50導引至凸緣17之輪廓周面上,以驅動 銷1及位於其上之基板轉動。藉此轉動,基板在冷卻室42 内有較佳及均勻之冷卻,在整個時間内,循環 並 將溫度冷卻至-預定值。在此同時,另一基板15在輸送裝 置32之上料端38被置於另一定心銷1上。隨後輸送帶33 又再運動定心銷1轉動軸間之距離。現在,在冷卻室42内 有兩上料之基板,輸入噴嘴50指向各定心銷,如圖四中所 示之方法。然後氣流噴向輪廓凸緣17,使定心銷丨及基板 15轉動。上述過程-再重複。當定心銷i與基板15離開冷 卻室42時,在輸送裝置32之下料端39藉一適當、未圖示 出之操作裝置,將基板從定心銷1中取下。 以上藉一偏好之貫施例說明本發明,但本發明並不受限 於此具體之實例。例如輸送裝置32上定心銷1之數量,及 在冷卻室42内可承載定心銷之數量與所示不同。氣流可持 續經由氣體噴嘴5〇導入冷卻室C内,或是可如此控制氣 流,使只有在輸送裝置32停止時,及當定心銷位於輸入喷 嘴50指向之位置時’才導入氣流。如果有此需要,也可控 制氣流大小,以調整銷1及基板15之轉動速度。除了所示 之具一輸送帶33之輸送裝置32外,也可使用其他合適之輸 送裝置’例如一轉動平台,此時冷卻室42之形狀要與轉動 平台相配合。雖然在圖五及圖七中顯示,輸入噴嘴5〇係延 伸進入冷卻室42内,此噴嘴也可以是簡單、在冷卻室壁面 張尺中國國家標準(CNS)A4規格(210 x 297公釐) " - -11 - --------訂---------線 (請先閲讀背面之注意事項再填寫本頁)* 584840 A7 B7 經濟部智慧財產局員工消費合作社印製584840 A7 B7______ 5. Description of the Invention (1.) The present invention relates to a method and device for cooling a substrate, especially an optical data carrier. When manufacturing optical data carriers, such as CDs, DVDs, DVRs and similar products, it may be necessary to cool the substrate that forms the data carrier or the data carrier itself between different manufacturing steps. In this way, the substrate can be moved, for example, through a cooling gas environment. However, this cooling method may cause uneven temperature distribution in the substrate, and thus cause stress, because local temperature differences in the atmosphere of the cooling gas are extremely difficult to avoid, and are generated by, for example, gas flowing out from one side of the substrate. In addition, this cooling method is relatively time-consuming. Therefore, the task of the present invention is to provide a method and an apparatus that can quickly and uniformly cool a substrate. According to the invention, this task is solved in a method of cooling a substrate, especially an optical data carrier, such that the substrate is rotated by an air flow. By rotating the substrate, the local temperature distribution in the environment around the substrate is uneven and can be balanced during cooling. In addition, the cooling process can be accelerated by turning. The substrate is rotated by the air flow, and a simple and low-cost substrate rotation driving method is also provided. According to a particularly preferred embodiment of the invention, the airflow is directed to the contoured peripheral surface of the substrate fixing device. By directing the air current to the peripheral surface of the contour, the kinetic energy of the air current can be smoothly transferred to the substrate fixing device, so the substrate is protected. The substrate is taken and turned to one of the substrate fixing devices. For good force conversion, the airflow is preferably offset sideways from a plane passing through the axis of rotation and guided to the peripheral surface of the substrate holding device. According to a preferred embodiment of the invention, the substrate fixing device moves through the cooling chamber together with the substrate to provide a controllable cooling environment and accelerate the cooling. The paper size is in accordance with China National Standard (CNS) A4 (21G X 297 mm). ^) ~~ '' ----- (Please read the notes on the back of the page before filling out this page) tr ·· -Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 584840 A7 V. Description of the invention (2 ·) but. In order to maintain the same cooling environment, the cooling gas is preferably rotated indoors and cooled to a predetermined temperature. At this time, the cooling gas is preferably the air after the air conditioner. This can have a very low cost solution because the ambient air will not enter the room, and the cooling air will not overflow from the room, causing changes in the cooling medium or the environment. problem. Note In order for the substrate to continue to move in a simple manner, the substrate holding device is preferably moved together with a conveyor belt. In order to make the substrate fixing device and the airflow have a certain direction, the movement of the conveyor belt is the most progressive, and the movement is temporarily suspended during this time. The airflow is preferably directed to the wheel gallery 'surface of the substrate fixture when the motion is paused. In order to use the airflow for cooling the substrate as well, it is preferred that at least a part of the airflow is guided through the contour peripheral surface of the substrate fixing device to the substrate. The meaning of the present invention is that it can also be solved by a cooling wire, especially an optical data device. Among them, a device that rotates the substrate with air current is provided. In such a device, the above-mentioned advantages can be obtained, that is, the rapid cooling of the substrate and the simple and low-cost rotation of the substrate. Line According to the real invention of the special service, this rehearsal device has a silkworm device on the periphery of the gallery, and a nozzle pointing at the scales. Precisely turning the substrate_device wheel turns the material, which can make the substrate fixing device rotate easily and cost-effectively. In order to make the substrate fixing device rotate well, it is better to have a sleeve for turning secrets. In order to make the airflow have a good force to be transferred to the substrate manifold device, the plane of the nozzle and the plane passing through the axis of rotation is offset laterally, so it is directed. In order to allow multiple substrates to be cooled at the same time, it is best to set multiple substrates for fixed installation. The paper size is applicable to China National Standard (CNg) A4 specifications _ χ Norwegian ^ -6 584840 A7 B7 V. Description of the invention (3 ·) It is at a distance from a conveyor. In order to accelerate the cooling of the substrate, the conveying device preferably extends through a cooling chamber having a cooling gas environment. The cooling chamber preferably has a device for circulating and cooling the cooling gas atmosphere to obtain a uniform cooling gas environment and a uniform temperature distribution. In a particularly preferred embodiment of the invention, the distance between the plurality of gas nozzles which are opened into the room is preferably the same as the distance between the substrate fixing devices provided on the conveying device. In this way, a plurality of substrate fixing devices in the cooling chamber can be rotated at the same time to cool and fix the substrates thereon. According to a preferred embodiment of the invention, the substrate fixing device has a centering pin with a centering portion, which can extend into the inner hole of the substrate and has a support surface under the centering portion. In this way, a simple and low-cost substrate fixing device is obtained, which does not have a controllable claw-hand element, but can securely hold the substrate during cooling. A fan blade profile is preferably formed on the peripheral surface of the substrate fixing device to effectively convert the impact force between the airflow and the substrate fixing device. In a preferred embodiment of the invention, the contour of the centering pin below the support surface is designed for the substrate. The peripheral surface of this contour should be printed at a distance from the support surface of the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, so that the airflow directed to the peripheral surface of the contour will not substantially affect the cooling of the substrate placed on the support surface. In another embodiment of the invention, the contour of the peripheral surface is designed in such a way that the airflow directed thereon can be directed in the direction of the substrate. According to an embodiment of the invention, the contour peripheral surface is offset radially outward from the bearing surface of the centering pin. In order to have a good force conversion between the centering pin and the base plate, it is better to provide a groove to put a 10-shaped ring in the support surface. This paper size is in accordance with China National Standard (CNS) A4 specifications_ (210 X 297 Gongchu) -7-584840 A7 V. Description of the invention (4 ·) According to a particular preferred embodiment of the invention, the radial width of the bearing surface is the bearing The substrate radius is between 5 and 20%, so that the substrate can be supported basically only within the inner hole range. As such, most substrates are exposed in a cooling environment. According to the method or apparatus of the present invention, it is preferable to use a half substrate for an optical data carrier according to an injection molding method '. The invention is further illustrated in the following through a preferred embodiment. The contents of the drawings are as follows: Figure 1 A schematic side view of the centering pin according to the present invention; Figure 2 A schematic cross-sectional view of the centering pin shown in Figure 1; Figure 2 A top view of the centering pin according to Figure 1 Figure 4 is a schematic schematic diagram of the cooling device according to the present invention; Figure 5 is a schematic top view of the cooling device according to the present invention; Figure 6 is a schematic side view of the cooling device shown in Figure 5; and Figure 7 is shown in accordance with Figure 5 Schematic front view of the cooling device. Figures 1 to 3 show various views of a centering and support pin, which is used in a cooling device according to the invention. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The center of the foot and the supporting pin 1 have a cylindrical or shaft-shaped main body part 3, and its body part has a generally smooth peripheral surface 5. A supporting surface 7 is provided on the upper side of the main body 3, which extends perpendicularly to the peripheral surface 5 of the main body. A groove 9 is provided between the peripheral surface 5 and the support surface 7 for placing an O-ring 10. The centering lug 12 extends upwardly on the inner center surface and on the support surface 7. The centering lug 12 has a foot ~ sloping surface 13 'which can extend into the inner hole of a carrying base plate 15 (see Fig. 4) to enter the center of the foot. The surface of the centering lug 12 is polished and extremely smooth, so that the friction between the centering lug 12 and the base plate 15 when projecting into the central hole of the base plate 15 This paper applies Chinese national standards-584840 A7 --- --- B7 V. Description of the invention (5 ·) can be reduced. The main body portion 3 has, at its lower end, a contour peripheral flange 17 that protrudes in the radial direction and the smoothed peripheral surface 5. This profile has 17 fan-shaped peripheral flanges and multiple shovel or teeth 19. The tooth 19 extends through the rotation axis A of the pin 丨 (tooth surface 20, and a tooth surface 22 on its back surface. The tooth 19 has a flat top surface 24 at its end, which connects the two tooth surfaces 20, 22 The function of the fan blade profile will be explained in detail in Figure 4. From Figure 2, it can be seen that the main body part 3 and the centering lug 12 are designed to be hollow, on the one hand in order to reduce the weight of the pin, and on the other hand, Bearing a bearing not shown, the pin 丨 can rotate to the shaft A. Of course, this pin 丨 can be designed solid, and a bearing lug is provided at the lower end, which protrudes into the bearing in a corresponding manner. Bureau of Intellectual Property, Ministry of Economic Affairs The printed diagram of the employee consumer cooperative shows how the substrate 15 is placed on the centering pin 1. The centering lug 12 extends into the central hole of the substrate 15 so that the substrate is supported on the support surface or the o-ring 10. The o-ring 10 has the following function when the centering pin 丨 rotates, that is, it provides a good force conversion between the pin 1 and the base plate 15. The gas pipe 26 partially extends below the base plate 15, and has an outlet opening 28 in the form of a nozzle, which points to the convex Contour of fan blades at edge 17. Duct 26 with a through pin The plane of the axis of rotation A extends in parallel and has a distance, so the airflow ejected from the opening 28 is laterally offset from the axis of rotation to the pin 1. This fan blade profile provides a good surface of the airflow for impact force conversion. Therefore the pin 丨 is rotated by an air stream ejected from the outlet 28, as shown by arrow B. Figures 5 to 7 show various views of a cooling device 30 according to the invention, which uses the above-mentioned centering pin 1. Cooling The device is equipped with a conveyor belt. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (21〇X 297 public love) ~ " " — " -9- 584840 A7 V. Description of the Invention (6 ·) It is guided by two rollers 35 and 36, of which at least two or two, ρ 10,000-type drive. On the conveyor belt 33 is equipped with a plurality of centering pins q, and can be rotated by the rotation axis A. In the conveyance There is the same distance between the centering pins 1 on the belt 33. 4 devices 32 sets-the feeding end 38, the base plate 15 is placed in the centering precautions here-In addition, the transport device 32 has the bottom end 39, the base plate 15 is taken out here. On the conveying device, the upper and lower ends of the feeder are%, " 又 & 42, which surrounds a part of the conveyor belt 33, as shown in Figure 5 and Figure 6. The age of the reading wire. The 25th range has r population end 44 and-exit end 45, the two ends are thinner than the center-(section. This The cooling device has-not shown in the cycle = 疋 'use Qi to cool the gas, such as the domain, blowing uniformly and cyclically on the cooling ▲ 42 one side wall is equipped with multiple gas input nozzles% distance between input nozzles 5G The rotation axis A of the slave pin 1 on the conveyor belt ^ = distance _ ^ As can be seen from Figures 5 and 7, the gas transmission, the pipe 26 and an output opening 28 are in accordance with the method shown in Figure 4. Operation = The cooling device 30 kidney of the present invention is further explained with reference to FIGS. 5 to 7. Then turn 33 to make the centering pin 〖root six, move the centering pin to the right ^ the distance between the moving axis A ^ so the material is set, the cooling chamber c The paper size applies the Chinese national standard (CNS ) A4 Regulations (21〇x 297 public love)--10 584840 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ----------___ B7_______ V. Description of the invention (7 ·) In this position, enter the nozzle 50 Point the fan blade on the centering pin and the flange, as shown in Figure 4. The airflow is guided to the contoured peripheral surface of the flange 17 through the nozzle 50 to drive the pin 1 and the substrate located thereon to rotate. By this rotation, the substrate is cooled better and uniformly in the cooling chamber 42, and the temperature is circulated and cooled to a predetermined value throughout the entire time. At the same time, the other substrate 15 is placed on the other end of the centering pin 1 on the material end 38 above the conveying device 32. Subsequently, the conveyor belt 33 moves the distance between the rotation axes of the centering pin 1 again. Now, there are two loaded substrates in the cooling chamber 42, and the input nozzles 50 point to the centering pins, as shown in the method shown in FIG. The air flow then sprays the contour flange 17 to rotate the centering pin 丨 and the base plate 15. The above process-repeat again. When the centering pin i and the substrate 15 leave the cooling chamber 42, the material end 39 under the conveying device 32 borrows an appropriate, not shown operating device, to remove the substrate from the centering pin 1. The present invention has been described above with reference to a preferred embodiment, but the present invention is not limited to this specific example. For example, the number of centering pins 1 on the conveying device 32 and the number of centering pins that can be carried in the cooling chamber 42 are different from those shown. The airflow may be continuously introduced into the cooling chamber C through the gas nozzle 50, or the airflow may be controlled so that the airflow is introduced only when the conveying device 32 is stopped and when the centering pin is located at the position where the input nozzle 50 is directed. If necessary, the airflow can also be controlled to adjust the rotation speed of the pin 1 and the base plate 15. In addition to the conveyor 32 shown with a conveyor belt 33, other suitable conveyors can also be used, such as a rotating platform, in which case the shape of the cooling chamber 42 must be matched to the rotating platform. Although shown in Figures 5 and 7, the input nozzle 50 is extended into the cooling chamber 42. This nozzle can also be a simple, Chinese national standard (CNS) A4 size (210 x 297 mm) on the wall of the cooling chamber. "--11--------- Order --------- line (Please read the precautions on the back before filling this page) * 584840 A7 B7 Employee Consumer Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs Print

-12- 584840 A7 B7 五、發明説明(9·) 元件符號說明 (請先閲讀背面之注意事項再填寫本頁) 1 定心及支承銷 3 主體部位 5 周面 7 支承面 9 槽 10 Ο形環 12 定心凸耳 13 定心斜面 15 基板 17 周邊凸緣 19 齒 20 齒面 22 齒面 24 頂面 26 氣體管道 28 出口開口 經濟部智慧財產局員工消費合作社印製 30 冷卻裝置 32 輸送系統 33 輸送帶 35 滚筒 36 滾筒 38 上料端 本紙張尺度適用中國國家標準(CNS ) Α4規格(210Χ297公釐) -Π - 584840 A7 B7 五、發明説明0〇·) 39 下料端 42 冷卻室 44 入口端 45 出口端 46 中央範圍 50 氣體輸入噴嘴 A 轉動軸 (請先閱讀背面之注意事項再填寫本頁) C· 訂 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS > A4規格(210X297公釐) -14--12- 584840 A7 B7 V. Description of the invention (9 ·) Description of component symbols (please read the precautions on the back before filling out this page) 1 Centering and support pin 3 Body part 5 Peripheral surface 7 Support surface 9 Slot 10 O shape Ring 12 Centering lug 13 Centering bevel 15 Base plate 17 Peripheral flange 19 Tooth 20 Tooth surface 22 Tooth surface 24 Top surface 26 Gas duct 28 Exit opening Printed by the Ministry of Economic Affairs Intellectual Property Bureau Employee Consumer Cooperative 30 Cooling device 32 Conveying system 33 Conveyor belt 35 Roller 36 Roller 38 Loading end The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 × 297 mm) -Π-584840 A7 B7 V. Description of the invention 0 0) 39 Feeding end 42 Cooling chamber 44 Entrance End 45 Exit end 46 Central range 50 Gas input nozzle A Rotary shaft (please read the precautions on the back before filling this page) C. Order printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Employee Consumer Cooperatives. This paper is printed in accordance with Chinese national standards (CNS > A4 size (210X297mm) -14-

Claims (1)

584840 A8B8C8D8 經濟部智慧財產局員Η消費合作社印製 六、申請專利範圍 第90132866號專利案申請專利範園修正本 1. 一種冷卻基板之方法’尤其是光學數據載具,其特徵 為’該基板係置於一可轉動之基板固定裝置上,且氣 流被導引至-基板蚊裝置之輪廓周面上,以與基板 共同轉動。 2·根據申請專利範圍第1項所述之方法,其特徵為,基 板對基板固定裝置之一轉動轴運動。 3·根據申請專利範園第1項所述之方法,其特徵為,氣 流與-穿過轉動軸之平面有—側向偏移,、而被導引至 基板固定裝置之輪靡周面上。 4. 根據申請專利範圍第丨項所述之方法,其特徵為,基 板固定裝置與基板一起運動穿過冷卻室。 … 5. 根據申請專利範圍第4項所述之方法,其特徵為,冷 卻氣體在冷卻室内循環。 ’ 6. 根據申請專利範圍第5項所述之方法,其特徵為,冷 卻氣體係冷卻至一預定溫度。 Υ 7·根據申請專利範圍第4項所述之方法,其特徵為,Α 卻氣體為空調後之空氣。 8·根據申請專利範圍第1項所述之方法,其特徵為,基 板固定裝置與輸送帶一起運動。 … 9·根據申請專利範圍第8項所述之方法,其特徵為,運 動係漸進式,期間會暫停。 」〇·根據申請專利範圍第8項所述之方法,其特徵為,氣 本紙 用 t 装-d. (諝先两婧背面之注意事項再填寫本I) 訂-584840 A8B8C8D8 Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 6. Application for Patent Scope No. 90132866. Patent Application. Amendment to the Patent Park. 1. A method for cooling substrates, especially optical data carriers, which is characterized as' The substrate system It is placed on a rotatable substrate fixing device, and the airflow is guided to the contoured peripheral surface of the substrate mosquito device for common rotation with the substrate. 2. The method according to item 1 of the scope of patent application, characterized in that one of the substrate-to-substrate fixing devices rotates on a rotating shaft. 3. The method according to item 1 of the patent application park, characterized in that the airflow is laterally offset from the plane passing through the rotation axis and is guided to the peripheral surface of the wheel of the substrate fixing device. . 4. The method according to item 丨 of the patent application scope, characterized in that the substrate fixing device moves through the cooling chamber together with the substrate. … 5. The method according to item 4 of the scope of the patent application, characterized in that the cooling gas is circulated in the cooling chamber. 6. The method according to item 5 of the scope of the patent application, characterized in that the cooling gas system is cooled to a predetermined temperature. Υ 7. The method according to item 4 of the scope of patent application, characterized in that A gas is air after air conditioning. 8. The method according to item 1 of the scope of the patent application, characterized in that the base plate fixing device moves with the conveyor belt. … 9. The method described in item 8 of the scope of patent application, characterized in that the movement is progressive and the period is suspended. ”〇 · According to the method described in item 8 of the scope of the patent application, which is characterized in that the paper is filled with t-d. -15- ο A8B8C8D8 六、申請專利範® 11. 12· 13. 14· 15· 16, 經 濟 部 暫 慧 財 產 局 貝 .工 消· 费 合 作 社 印 製 17· 18· 19. 流在暫停運動時,被導引至基板固定裝置之輪廓周 上。 1 根據申請專利範圍第1項所述之方法,其特徵為,氣 流藉由輪廓周面至少有部份被導引至基板。 ; 一種冷卻基板(15)之裝置(30),尤其是光學數據載具, 其特徵為,經由具有輪廓周面及指向此周面之氣體噴 嘴(50)之可旋轉基板固定裝置(1),藉由氣流轉動基= 定裝置(1)及置於其上之基板。 根據申請專利範圍第12項所述之裝置,其特徵為,義 板固疋裝置(1)具有一有轉動轴(A)之轴(3)。 根據申請專利範圍第13項所述之裝置,其特徵為,々 體噴嘴(50)與一穿過轉動軸⑷之平面有一側向偏移氣 因而指向基板固定裝置(1)之輪廓周面。) 根據申請專利範圍第12項所述之裝置,其特徵為,有 多値基板固定裝置(1),其以一定間距設置在輸送裝 (32)上。 根據申請專利範園第I5項所述之裝置,其特徵為,輸 送裝置(32)具一輸送帶(33)。 & 根據申凊專利範圍第15項所述之裳置,其特徵為,輪 送裝置(32)至少有部份延伸穿過一具冷卻氣體環境之 冷卻室(42)。 根據申請專利範圍第17項所述之裝置,其特徵為,有 一裝置,用以循環及冷卻在冷卻室(42)内之冷卻氣體。 根據申請專利範圍第17項所述之裝置,其特徵為,有 I lull---it (»先«讀背面之注意事項再填寫本頁} 訂--------•線 » 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -16- 584840 A8B8C8D8 經濟部%慧財產局員工消費合作社印製 六、申請專利範圍 多個向冷卻室(42)開口之氣體喷嘴(50)。 20.根據申請專利範圍第19項所述之裝置,其特徵為,氣 體噴嘴(50)間之距離,與輸送裝置上基板固定裝置間之 距離相同。 21·根據申請專利範圍第12項所述之裝置,其特徵為,基 板固定裝置(1)係為一具定心部位(12)及支承面⑺之定 心銷。 22·根據申請專利範圍第12項所述之裝置,其特徵為,基 板固定裝置(1)之輪廓周面具一風扇葉片輪廓。 23·根據申請專利範圍第21項所述之裝置,其特徵為,輪 廓周面係設計在基板支承面(7)之下。 24·根據申請專利範圍第23項所述之裝置,其特徵為,輪 廓周面與支承面(7)間有一段距離。 25·根據申請專利範圍第12項所述之裝置,其特徵為,周 面之輪廓係如此設計,使其將射於其上之氣流導引至 基板之方向。 26·根據申請專利範圍第項所述之裝置,其特徵為,輪 廓周面相對定心銷之支承面(7),於徑向向外有偏移。 27·根據申請專利範圍第項所述之裝置,其特徵為,在 支承面(7)内設有一槽,以置放Ο形環(10)。 28·根據申請專利範圍第21項所述之裝置,其特徵為,支 承面之徑向寬度為其承載之基板半徑之5至20%間。 本紙^ (請先Μ讀背面之注意事項再填寫本頁) 裝 訂·-15- ο A8B8C8D8 VI. Application for patents® 11. 12 · 13. 14 · 15 · 16, Ministry of Economic Affairs, Temporary Property Bureau. Printed by Industrial Consumers · Fees Cooperatives 17. 18 · 19. When the movement is suspended, It is guided around the contour of the substrate fixing device. 1 The method according to item 1 of the scope of patent application, characterized in that the air flow is guided to the substrate by at least part of the contour peripheral surface. ; A device (30) for cooling a substrate (15), especially an optical data carrier, characterized by a rotatable substrate fixing device (1) having a contoured peripheral surface and a gas nozzle (50) directed to the peripheral surface, The base device (1) and the substrate placed thereon are rotated by the air flow. The device according to item 12 of the scope of patent application, characterized in that the escutcheon fixing device (1) has a shaft (3) having a rotating shaft (A). The device according to item 13 of the scope of the patent application is characterized in that the carcass nozzle (50) and the plane passing through the rotating shaft ⑷ have a side offset gas and thus point toward the contour peripheral surface of the substrate fixing device (1). The device according to item 12 of the scope of the patent application is characterized in that there are a plurality of substrate fixing devices (1), which are arranged on the conveying device (32) at a certain distance. The device according to item I5 of the patent application park is characterized in that the conveying device (32) is provided with a conveyor belt (33). & According to claim 15 of the scope of patent application, the rotary device (32) extends at least partially through a cooling chamber (42) with a cooling gas environment. The device according to item 17 of the scope of patent application is characterized in that there is a device for circulating and cooling the cooling gas in the cooling chamber (42). The device according to item 17 of the scope of the patent application is characterized by the following features: I lull --- it (»First« read the precautions on the back, then fill out this page} Order -------- • Thread » Paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) -16- 584840 A8B8C8D8 Printed by the Ministry of Economic Affairs% Hui Property Bureau Employee Consumer Cooperatives 6. Application for patents Multiple gas openings to the cooling chamber (42) Nozzle (50). 20. The device according to item 19 of the scope of patent application, characterized in that the distance between the gas nozzles (50) is the same as the distance between the substrate fixing devices on the conveying device. 21 · According to the scope of the patent application The device according to item 12, characterized in that the substrate fixing device (1) is a centering pin with a centering portion (12) and a support surface ⑺. 22. The device according to item 12 in the scope of patent application , Characterized in that the outline of the substrate fixing device (1) masks the outline of a fan blade. 23. The device according to item 21 of the scope of patent application, characterized in that the outline peripheral surface is designed on the substrate support surface (7) 24. According to item 23 of the scope of patent application The device is characterized in that there is a distance between the contoured peripheral surface and the support surface (7). 25. The device according to item 12 of the scope of patent application, characterized in that the contour of the peripheral surface is designed so that it will shoot The airflow thereon is directed to the direction of the substrate. 26. The device according to item 1 of the scope of the patent application, characterized in that the contour peripheral surface is deviated radially outward from the bearing surface (7) of the centering pin. 27. The device according to item 1 of the scope of the patent application, characterized in that a groove is provided in the support surface (7) for placing the O-ring (10). 28. According to the item 21 of the scope of patent application The device described is characterized in that the radial width of the support surface is between 5 and 20% of the radius of the substrate on which it is carried. This paper ^ (Please read the precautions on the back before filling this page) Binding ·
TW90132866A 2001-01-08 2001-12-28 Method and apparatus of cooling substrate TW584840B (en)

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