580561 五、發明說明（l)580561 V. Description of the invention (l)
一、發明所屬之技術領域 本發明係關於一種影像偵測元件與其與待測物件相對 移動方向之偏移角度量測方法，尤指一種適用於掃瞄式多 線光電感測元件（如CCD)之取像偏移角度量測方法。 -、先 根 器中， 形狀的 涓J ，其 而言， 形狀特 後，再 逼真， 高影像 析度下 配一精 部份區 像，而 然 範圍内 喪失、 有斷層 當嚴重 前技術 據調查顯 形狀量測 量測又可 中則以三 欲量測某 性，訂出 選用適當 各種取像 之解析度 若欲以有 密移動之 塊影像， 成為高晝 而，若取 ’則取像 部分影像 出現，會 。而一般 示，目前工 是所有量測 分為二維尺 維形貌高度 待測物的三 適當的水平 的取像裝置 裝置無不盡 。而當像素 限像素取得 定位裝置， 再藉由軟體 質之影像。 像裝置與移 後在作影像 重疊的情形 導致影像失 光感測元件 業界使用的 項目中最基 寸大小與三 的量測最為 維形貌時， 與垂直方向 。近年來為 其所能地增 增加到某種 大範圍的影 以在不同位 將這些區塊 自動化光 本的項目 維形貌高 複雜與困 會先根據 的範圍與 使影像更 加影像像 程度時， 像資訊， 置點取得 影像結合 =之垂直度未在 、··。5處理時，會發現 窗，使得區塊影像接 真或模糊不清，對查 陣列多安裝於厚實： 學檢測儀 之一，而 度的量 難。一般 待測物的 解析度 為清晰與 素，以提 在同樣解 通常可搭 待測物體 成大影 合理要求 部份影像 合邊界上 質影響相 外殼之1. Technical Field to which the Invention belongs The present invention relates to a method for measuring an offset angle of an image detection element and a relative moving direction of the image detection element and an object to be measured, and more particularly, it is applicable to a scanning multi-line photoinductive element (such as a CCD) Measurement method of image offset angle. -In the root organ, the shape of the shape J, in particular, the shape is then real, then a high-resolution image is matched with a partial image, but the area is lost and there are faults. When the technology is investigated, it is serious. The measurement of the apparent shape measurement can be measured by three desires, and the appropriate resolution of various acquisitions is selected. If you want to move the block image with dense movement, it will become high daylight. If you take ', then take the image part. The image appears, yes. Generally speaking, at present, all the measuring devices are divided into two-dimensional scales, the height of the topography, the height of the object to be measured, and the three appropriate levels of the imaging device are endless. When the pixel is limited to the pixel, the positioning device is obtained, and then the software-quality image is used. When the image device and the image are overlapped after being moved, the image loss of light sensor element is used in the industry. The measurement of the most basic size and the most three-dimensional shape is the vertical direction. In recent years, it has been possible to increase the scope of the project to some extent to automate these blocks in different places. The project has a high degree of complexity and difficulty, and the scope of the project will be based on the scope and degree of the image. Image information, set point to get the image combination = the verticality is not in, ... 5 During processing, a window will be found, making the block image real or blurred, and the check array is mostly installed in a thick: one of the detectors, and the measurement is difficult. Generally, the resolution of the test object is clear and plain, in order to provide the same solution. Generally, the test object can be used to form a large shadow. Reasonable requirements. Part of the image is on the boundary.
580561 五、發明說明（3) 本發明影像偵測元件歲^ '〜""〜^---- 偏移度量測方法c物件相對 件陣列，該先感測元件# f衫像谓測元件較“f方向之 明影像谓測元件盥1 = J k為電荷耦合元件ΓΓ^先感測元 ，量测方法中之^圭4待1 物件相對移動M H本發 度。本發明影像偵測於（Ν〜1)個或（Μ〜η “直偏移 垂直偏π译曰 、/:兀件與其與待、>丨必# )個晝素長 偏私度1測方法， 寻而物件相對移動 有二強度雙化之影像 2:像無限制，可為 :::本發明影像谓測元件與其：J有明暗或色彩變化 °垂直偏移度量測方法中，j 1、/、待測物件相對移動方 。限制，可為白光、紅變化邊界點之 屑元件與其與待測物件相對移動二a光。本發明影像偵 法之該第一邊界點與該第二邊界點σ之，直偏移度量測方 佳為光強度變化之斜率絕對值4 ^之判定方法無限制，較 件與其與待測物件相對移動方向之2 本發明影像偵測元 其使用之近似曲線方程式無限制之垂直偏移度量測方法， interpolation、 bicubic spline 可為 Cubic spline polynomial interpolati〇n等，車六土terp〇lati〇n或 interpolation。本發明影像偵測 ^ =，cubic spi lne 對移動方向之垂直偏移度量測方法杜\其與待測物件相 元件與待測物件有相對移動之三錐二^係應用於影像偵測 佳為掃瞄式多線CCD之影像描取。型或輪廊之量測’較 為能讓貴審查委員能更瞭解太机。。 舉 較佳具體實施例說明如下。 '之技術内容’特 $ 8頁 580561 五、發明說明（5) (pixel size)為 s*s(um*um)，填滿因數（fill factor)為 1〇〇%，“〇陣列大小為„1*11(1)][}(61*1^}^1)，（：(：1)拍取第一張 影像後，移動s*( η—丨）的距離後再拍取第二張影像。以數 位的角度先粗略計算影像線位置2 1之明暗邊界點，邊界點 發生在強度變化最劇烈的地方，也就是強度近似方程式曲 線斜率絕對值最大的地方，強度曲線斜率（一階導數）如下 式1 ·· (式1)580561 V. Description of the invention (3) The image detection element of the present invention is ^ '~ " " ~ ^ ---- The offset measurement method c an object counterpart array, the first sensing element #fshirt like The measuring element is compared to the "f-direction bright image". The measuring element 1 = J k is a charge-coupled element ΓΓ ^ first sensing element, and the measuring method ^ Gui 4 waits for the relative movement of the object MH. The image detection of the present invention Measured in (N ~ 1) or (Μ ~ η "Straight offset vertical offset π translation, /: Wu and its components, and>, and must #) a day-length length privacy degree 1 measurement method, find the object Relative motion has two intensity doubled images 2: The image is unlimited, and can be ::: The image pre-measurement element of the present invention and its: J has light or dark or color changes ° In the vertical offset measurement method, j 1, /, and Measure the relative moving side of the object. The limitation can be white light and red chip elements with varying boundary points and their relative movement with the object to be measured. According to the image detection method of the present invention, the determination method of the straight offset measurement of the first boundary point and the second boundary point σ is the absolute value of the slope of the light intensity change 4 ^ There is no limit to the determination method, and it is related to the measurement Object relative movement direction 2 The image detection unit of the present invention uses an approximate vertical equation measurement method for unlimited curve equations. The interpolation and bicubic spline can be Cubic spline polynomial interpolati〇n, etc., Che Liutu terp〇lati〇 n or interpolation. The image detection method of the present invention ^ =, cubic spi lne's measurement method of vertical offset of the moving direction Du \ Its three cones with relative movement between the phase component of the object to be measured and the object to be measured ^ are used for image detection Scanning multi-line CCD image capture. The measurement of the shape or the corridor is better to allow your reviewer to understand the machine more well. . The preferred embodiments are described below. 'Technical Content' Special $ 8 pages 580561 V. Description of the invention (5) (pixel size) is s * s (um * um), fill factor is 100%, "〇Array size is„ 1 * 11 (1)] [} (61 * 1 ^} ^ 1), (:(: 1) After taking the first image, move the distance s * (η— 丨) and take the second Image. Firstly calculate the light and dark boundary points of the image line position 21 at a digital angle. The boundary points occur where the intensity changes most drastically, that is, where the absolute value of the curve of the intensity approximation equation has the largest absolute value. ) The following formula 1 ... (Formula 1)
Xu — X; 。以^績曲線的角度來解邊界的次像素位置。強度近似 方矛王ΐ 了採用Cubic-Spline Interpolation，此函式需要 四個貝料·點’此四個資料點即粗略計算邊界時所找到的邊 界刚後各一個貪料點，如圖6所示，其函式如下式2 ·· 其中Xu — X;. The sub-pixel position of the boundary is solved from the angle of the performance curve. The intensity is approximated by the square spear. Wang Bi used Cubic-Spline Interpolation. This function requires four shells and points. These four data points are the greedy points immediately after the boundary found when the boundary is roughly calculated, as shown in Figure 6. The function is as follows: 2
y-AyJ+ByJ+l+Cyj+DynJ+ly-AyJ + ByJ + l + Cyj + DynJ + l
(式2) - 4c· = 導數等於零的地方’強度近似方程式 其中 令/ >，) :0 •Ί- 且λ* · 3; (式3) 可求得(Equation 2)-4c · = where the derivative is equal to zero ’The approximate equation of the intensity where // >,): 0 • Ί- and λ * · 3; (Equation 3) can be obtained
Xjyj+] -xJ+] II If •>Vl 一 計算不同列影像之邊界偏移量如下 = (subpixel (式4) 580561 五、發明說明（6) 並計算不同列光感測器之距離（1 i n e s p a c i n g )如下式5 ·· / = sx(”-l) (式 5) 而得偏移角度如下式6 : 卜tan-丨^^ tan-丨丄 （式6 ) I /z -1 本發明以待測物件與光感測元件陣列相對移動，並多 次取得物體上同一縱向位置之影像，隨後由影像計算光感 測元件陣列之側向（橫向）偏移量，並利用強度近似方程式 (Intensity fitting function)來提高計算側向偏移量的 精確度，而由側向偏移量計算光感測元件陣列之一軸與物 體相對移動方向之垂直度偏移角度。本發明不需藉助額外 的量測儀器，而得以非接觸式的量測方法，即運用影像處 理的方法，來計算出影像偵測元件掃描取像時的偏移角 度，並配合影像邊界點精度的計算方法（I n t e n s i t y fitting function)，使計算出之偏移角度可達次像素 (s u b p i X e 1 )精度，可精確地反應出細微的偏移量。 上述實施例僅係為了方便說明而舉例而已，本發明所主張 之權利範圍自應以申請專利範圍所述為準，而非僅限於上 述實施例。Xjyj +] -xJ +] II If • > Vl-Calculate the boundary offset of different columns of images as follows = (subpixel (Equation 4) 580561 V. Description of the invention (6) and calculate the distance of the light sensors of different columns (1 inespacing ) The following equation 5 ·· / = sx ("-l) (Equation 5) gives the offset angle as follows: tan- 丨 ^^ tan- 丨 丄 (Equation 6) I / z -1 The measurement object is moved relative to the light sensing element array, and images of the same longitudinal position on the object are obtained multiple times, and then the lateral (lateral) offset of the light sensing element array is calculated from the image, and the intensity approximation equation is used (Intensity fitting function) to improve the accuracy of calculating the lateral offset, and the vertical offset angle of one axis of the light sensing element array and the relative movement direction of the object is calculated from the lateral offset. The present invention does not require additional measurement Instrument, and a non-contact measurement method, that is, the image processing method is used to calculate the offset angle when the image detection element scans and acquires the image, and cooperate with the calculation method of the image boundary point accuracy (I ntensity fitting function) To make the calculation The offset angle can reach the sub-pixel (subpi X e 1) accuracy, which can accurately reflect the slight offset. The above embodiments are just examples for the convenience of explanation. The range described shall prevail and is not limited to the embodiments described above.
580561 圖式簡單說明 五、 圖式簡單說明 圖1係本發明一較佳實施例之影像偵測元件與待測物件示 意圖。 圖2係本發明一較佳實施例之待測物件上視圖。 圖3係本發明一較佳實施例之光感測元件第一次取像示意 圖。 圖4係本發明一較佳實施例之光感測元件第二次取像示意 圖。 圖5係本發明一較佳實施例之第一列影像與第二列影像之 光強度曲線圖。 圖6係本發明一較佳實施例之強度近似方程式曲線圖。 六、 圖號說明 10 光 感 測 元件陣列 11 方 向 12 方 向 13 方 向 101 第 — 列 102 第 N列 20 待 測 物 件 21 線 位 置 30 第 一列晝素 31， 41 邊 界 點 34 側 向 偏 移 40 第 N列晝素 A 偏 移 角 度 X 移 動 距 離 Y 距 離580561 Brief description of the drawings 5. Brief description of the drawings FIG. 1 is a schematic diagram of the image detection element and the object to be tested according to a preferred embodiment of the present invention. FIG. 2 is a top view of an object under test according to a preferred embodiment of the present invention. FIG. 3 is a schematic diagram of the first image acquisition of a light sensing element according to a preferred embodiment of the present invention. FIG. 4 is a schematic diagram of a second image capture of a light sensing element according to a preferred embodiment of the present invention. Fig. 5 is a graph showing light intensity curves of a first row of images and a second row of images of a preferred embodiment of the present invention. FIG. 6 is a graph of an approximate equation of the intensity according to a preferred embodiment of the present invention. VI. Explanation of Drawing Numbers 10 Light Sense Element Array 11 Direction 12 Direction 13 Direction 101 First — Column 102 Nth Column 20 Object under Test 21 Line Position 30 First Column 31, 41 Boundary Point 34 Lateral Offset 40 Section Column N daylight A offset angle X travel distance Y distance
第12頁Page 12