200411143200411143
一、發明所屬之技術領域 本發明係關於一種影像偵測元件與其與待測物件相 =動方向之偏移角度量測方法，尤指一種適用於掃吗 ^ 線光電感測元件（如CCD)之取像偏移角度量測方法。工夕 根 器中， 形狀的 测，其 而言， 形狀特 後，再 逼真， 南影像 析度下 配一精 部份區 像5而 然 範圍内 喪失、 有斷層 當嚴重 前技術 據調查顯 形狀量測 量測又可 中則以三 欲量測某 性，訂出 選用適當 各種取像 之解析度 若欲以有 密移動之 塊影像， 成為高晝 而，若取 ，則取像 部分影像 出現，會 。而一般 示，目 是所有 分為二 維形貌 待測物 適當的 的取像 裝置無 。而當 限像素 定位裝 再藉由 質之影 像裝置 後在作 重疊的 導致影 光感測 前工業 量測項 維尺寸 高度的 的三維 水平與 裝置。 不盡其 像素增 取得大置，以 軟體將 像。 與移動 影像結情形， 像失真 元件陣 界使 目中 大小 量測 形貌 垂直 近年 所能 加到 範圍 在不 這些 用的 最基 與三 最為 時， 方向 來為 地增 某種 的影 同位 區塊 自動化 本的項 維形貌 複雜與 會先根 的範圍 使影像 加影像 程度時 像資訊 置點取 影像結 光學撿測儀 目之一，而 高度的量 困難。一般 據待測物的 與解析度 更為清晰輿 像素，以揭 ’在同樣解 ’通常可招 得待測物體 合成大影I. Technical Field to which the Invention belongs The present invention relates to a method for measuring the angle of deviation between an image detection element and its measured object = moving direction, especially a scanning optical sensor element (such as a CCD) suitable for scanning? Measurement method of image offset angle. In the Gongxi root organ, the shape is measured. In terms of the shape, the shape is more realistic. The southern part of the image is matched with a fine part of the image and is lost within 5. However, when there is a fault, the shape is shown by investigation. If the measurement can be measured, then three desires are used to measure a certain sex, and an appropriate resolution of various acquisitions is selected. If a densely moving block image is to be used, it will become a high daylight. If it is taken, some images of the acquisition will appear. ,meeting. In general, the objective is to have all the appropriate imaging devices divided into two-dimensional topography. The limited pixel positioning device then uses the qualitative image device to overlap and cause shadow detection before the industrial measurement. The dimension and height of the three-dimensional level and the device. Endlessly increase the number of pixels to achieve a large set, the software will image. In the case of moving images, the boundary of the image distortion element makes the size of the measured shape vertical. In recent years, the range can be added to the range. When the most basic and the three most important are not used, the direction is to increase a certain shadow parity block. The complex dimension of the automation version and the range of the root causes the image information to be taken as one of the points of the optical pickup when the image is added to the image, but the height is difficult to measure. Generally, according to the resolution and resolution of the object to be tested, the pixels are more clear, so as to ‘under the same solution’, the object to be tested can be combined into a large image.
内之垂直度未在合理 合處理時，合 i古祐… 會發現部份 武衫像接合邊 ?,J ^ ^ „ 對晝質影 夕文I於厚實的外殼The verticality of the interior is not reasonable. When you deal with it, you will find a part of the shirt like the edge of the joint ?, J ^ ^ „For the daylight shadow Xi Yuwen in a thick shell
200411143 五、發明說明（2) — 中’這亦使得利用量測儀哭來 方向之垂直度極為困j儀山測其-軸與物體相對移動 、發明内容 本發明之主要目的係在提供一 #旦彡作# t 待測物件相對移動方向之偏移角度量測：件與其與 處理的方式來快速計算出光感測元件m=以影像 測物件相對移動方向之垂直度，而不兩^二ΐ與其，待 為達成上述目的，本發明^ ，里測儀器。 ::件相對移動方向之垂直偏移度量：元：：其與待 一物件，其中該物件具有至少一明忤^如像偵測元件及 :貞：元件上可形成一明暗變化影像或於該影像 j 像偵測元件對該物件取像，得 2整數，·接 ?疋位平台，以該定位平台使該景彡傻伯、衫像；之後 ::相對移動—距離x，其"小於：於：元件元件與 L-匕：後再：該影像债測元件對該物偵測元 丨式分别計算該第一影 J岔次异法之你曲= 丨列畫素之光強度變化邊界素；；第二影像：：： ，以及由 …/又）。 |及γ計曾;界點與該第二邊界點之距離;邊界 I …像谓測元件之垂直偏移角度為二 丨四、實施方式 第7頁 200411143 五、發明說明（3) ___ 本發明影像偵測元件與发 、 垂直偏移度量測方法中，^二待測物件相對移動 件陣列，胃光感測元件更”較佳為 明影像偵測元件與其與待測物=:^ 5兀件（CCD)。本發 度量測方法中之X較佳為等於^ =動方向之垂直偏移 度。本發明影像偵測元件與其鱼 =^ M-ι)個畫素長 垂直偏移度量測方法，其中該明相對移動方向之 任何具有光強度變化之影像， ^衫像無限制’可為 之影像。本發明影像偵測元件=复f具有明暗或色彩變化 向之垂直偏移度量測方法中，ς ;；/、待測物件相對移動方 度無限制，可為白光、紅光、^光=^變化邊界點之光強 測元件與其與待測物件相對移動、方=監光。本發明影像偵 法之該第一邊界點與該第二邊界點D 直偏移度量測方 佳為光強度變化之斜率絕對值參 ^妁疋方法無限制，較 件與其與待測物件相對移動二:本發明影像偵測元 其使用之近似曲線方程式之ΐ =度量測方法， interpolation、bicubi U lc …咖 nnlvn . t . , , pine lnterpolati〇n或 P〇 yn〇mial interpolation等，較佳為 cuMc spHne 2動方向t垂直偏移纟置測方法較佳係'應用於影像债測 凡件Μ待測物件有相對移動之三維外型或輪廓之量測，較 佳為掃瞄式多線CCD之影像描取。 為能讓貴審查委員能更瞭解本發明之技術内容，特 舉一較佳具體實施例說明如下。 ^200411143 V. Description of the invention (2) — This also makes it extremely difficult to use the measuring instrument to measure the verticality of the direction of the instrument. The instrument is used to measure the relative movement of the axis and the object. SUMMARY OF THE INVENTION The main purpose of the present invention is to provide a # Once measured #t Offset angle measurement of the relative movement direction of the object to be measured: the piece and the way it is processed to quickly calculate the light sensing element m = the perpendicularity of the relative movement direction of the object with the image, not two ^ 2ΐ Instead, in order to achieve the above-mentioned object, the present invention provides a measuring instrument. :: Vertical offset measurement of the relative movement direction of the item: Yuan :: It is related to an object, where the object has at least one light ^ ^ such as an image detection element and: Zhen: a light and dark change image can be formed on the element or The image j image detection element takes an image of the object and obtains an integer of 2. Connect to the platform, and use the positioning platform to make the scene idiot and shirt image; then: Relative movement—distance x, whose " is less than : In: Element component and L-dagger: Later: The image debt measurement element detects the object to the object. 丨 Formula calculates the first shadow of the J-order sub-different method separately. = 丨 the light intensity change boundary of the pixel素 ;; The second image :::, and by ... / again). | And γ meter; the distance between the boundary point and the second boundary point; boundary I… the vertical offset angle of the image measuring element is two 丨 four, the embodiment of the seventh page 200411143 V. Description of the invention (3) ___ The present invention In the method of measuring image detection elements, hair, and vertical offset, ^ two arrays of relative moving parts of the object to be measured, and gastric light sensing elements are more "preferably", the image detection element and its relationship with the object to be measured =: 5 CCD. In the measurement method of the present invention, X is preferably equal to the vertical offset of ^ = moving direction. The image detection element of the present invention and its fish = ^ M-ι) pixels long vertical offset Measurement method, in which any image with light intensity change in the direction of the relative movement, ^ shirt image is unlimited 'can be an image. The image detection element of the present invention has a vertical shift with light or dark or color changes In the measurement method, ς ;; /, the relative moving degree of the object to be measured is unlimited, and it can be white light, red light, ^ light = ^ the light intensity measuring element at the change boundary point and its relative movement with the object to be measured, square = Jian Guang. The first boundary point of the image detection method of the present invention is directly offset from the second boundary point D The method of measuring Fang Jia is the absolute value of the slope of the light intensity. There is no limit to the method. The relative part is relatively moved with the object to be measured. Second: The approximate curve equation of the image detection unit of the present invention is used. , Interpolation, bicubi U lc… cnnlvn. T.,, Pine lnterpolati〇n or Pynynial interpolation, etc., preferably cuMc spHne 2 movement direction t vertical offset. The method of measurement is better applied to the image For the measurement of the three-dimensional shape or contour of the object to be measured, which is relative to the debt measurement, it is preferably a scanning multi-line CCD image capture. In order to allow your review committee to better understand the technical content of the present invention, A preferred embodiment is described below. ^
立、货切說明（4) 示意圖。影：伯須m發明之影像债測元件與待測物件 光感測元件陣：：2丨°4具有色彩變化的圖案，方向η為 為光感測元件陣列件20相對移動之方向，方向12 視圖，線位置21==方向。圖2為待測物件2。之上 測物件20相對移動光感測元件陣列1〇與待 向u之間有11與光感測元件陣列Η之縱軸方 ”"01對準線偏位=A: : i w 〇對待測物件2〇取像，得一第 言感測元件陣列 平台移動光感測元件陣=或；以：二 =測元件陣列〗。與待測物件2。之相； (N — 1)列畫素之距離。接著由第私動距離X’即 得線位置？ (夕馇一而丨舍主0 〜像一弟一影像分別取 圖，石闻 旦素與第N列畫素40之光強度曲轉 iitt.D Θ 5所示。然後以強度近似方程式（Intensify β t1: mg function)分別計算第—列書辛 界點31，41’以求得次像素-(:一、二 點31與邊界點41之側向偏移34之距離Y，而光； 列10之縱軸方向13與光感測元件陣列10與待測物 ^^目。對移動方向i i之垂直度偏移角度A即為taIW ^物 以面形電荷耦合元件（CCD)陣列為例，假設像素大小 200411143Standing and cargo cutting instructions (4) Schematic. Shadow: The image debt measuring element and the light sensing element array of the object invented by Bosu m :: 2 丨 ° 4 have a color changing pattern, and the direction η is the direction in which the light sensing element array 20 moves relatively, direction 12 View, line position 21 == direction. Figure 2 shows the object 2 to be tested. There is a vertical axis of 11 between the light sensing element array 10 and the to-be-oriented u 20 relative to the object to be measured, and the vertical axis of the light sensing element array "" 01 alignment deviation = A :: iw 〇 to be measured Take the image of object 20 to get a first description of the sensing element array platform moving light sensing element array = or; to: two = measuring element array〗. Phase with the object to be measured 2. (N — 1) pixels The distance is then obtained by the second private moving distance X '? (Xi Yiyi 丨 the owner 0 ~ take a picture like a younger one, respectively, the light intensity of Shi Wendansu and the Nth pixel 40 is turned to iitt .D Θ 5. Then use the approximate formula of the intensity (Intensify β t1: mg function) to calculate the first column-Leshin boundary points 31, 41 'to obtain the sub-pixel-(: one, two points 31 and boundary points 41 The lateral offset 34 is the distance Y, and the light; the vertical axis direction 13 of the column 10 and the light sensing element array 10 and the object to be measured. The vertical offset angle A to the moving direction ii is taIW ^ Take a planar charge-coupled device (CCD) array as an example, assuming a pixel size of 200411143
(pixel size)為 s*s(um*um)’ 填滿因數（f土 ！ j · fact〇r 10 0%，CCD陣列大小為 m*n(pixel*pixel )，CCD拍取第一、、 影像後，移動s*(n-1)的距離後再拍取第二張影像。以數x 位的角度先粗略計算影像線位置2丨之明暗邊界點，邊界點 發生在強度變化最劇烈的地方，也就是強度近似方程式曲 線斜率絕對值最大的地方，強度曲線斜率（一階導數）如下 式1 : y)=(pixel size) is s * s (um * um) 'fill factor (f soil! j · fact〇r 10 0%, CCD array size is m * n (pixel * pixel), CCD takes first, After the image, move the distance of s * (n-1) before taking a second image. Firstly, roughly calculate the light and dark boundary point of the image line position 2 丨 with an angle of several digits. The boundary point occurs at the intensity where the intensity changes most drastically. Where, that is, where the absolute value of the slope of the approximate curve of the intensity approximation equation is the largest, the slope (first derivative) of the intensity curve is as follows: y) =
(式1 ) 以連續曲線的角度來解邊界的次像素位置。強度近似 方私式可採用Cubic-Spline Interpolation，此函式需要 四個資料點，此四個資料點即粗略計算邊界時所找到的邊 界4後各一個貧料點’如圖6所示，其函式如下式2· y = Ayj^ByJ+l^CyJ+Dy：+l (式 2 )(Equation 1) The sub-pixel position of the boundary is solved by the angle of the continuous curve. Cubic-Spline Interpolation can be used for the intensity approximation. This function requires four data points. These four data points are each a poor material point after the boundary 4 that is found when the boundary is roughly calculated. The function is as follows: y = Ayj ^ ByJ + l ^ CyJ + Dy: + l (Equation 2)
^ ^(^3 - a\xj+\ ^ xj) ’ ^ = i(e3 - 万)(^.+丨-Λ、·） 而邊界點發生在二階導數等於零的地方，強 之二階導數如下式3 : , /=A/J+By]+] 其中 度近似方程式 (式3) 其中 令/=〇 i ，可求得 J 广丨 y.+x — yj (式4) 計算不同列影像之邊界偏移量如下式4 : d = (subpixel ) 200411143 五、發明說明（6) 並計算不同列光感測器之距離（1 i n e s p a c i n g)如下式5 ·· l = sx(n^l) (式 5) 而得偏移角度如下式6 : ^ = tan-^ = tan^ (式 6 ) I -1 本發明以待測物件與光感測元件陣列相對移動，並多 次取得物體上同一縱向位置之影像，隨後由影像計算光感 測元件陣列之側向（橫向）偏移量，並利用強度近似方程式 (Intensity fitting function)來提高計算側向偏移量的 精確度，而由側向偏移量計算光感測元件陣列之一軸與物 體相對移動方向之垂直度偏移角度。本發明不需藉助額外 的量測儀器，而得以非接觸式的量測方法，即運用影像處 理的方法，來計算出影像偵測元件掃描取像時的偏移角 度，並配合影像邊界點精度的計算方法（I n t e n s i t y fitting function)，使計算出之偏移角度可達次像素 (s u b p i X e 1 )精度，可精確地反應出細微的偏移量。 上述實施例僅係為了方便說明而舉例而已，本發明所主張 之權利範圍自應以申請專利範圍所述為準，而非僅限於上 述實施例。^ ^ (^ 3-a \ xj + \ ^ xj) '^ = i (e3-ten thousand) (^. + 丨 -Λ, ·) The boundary point occurs where the second derivative is equal to zero. The strong second derivative is as follows: :, / = A / J + By] +] where the degree is approximated by the equation (Equation 3) where / = 〇i, we can get J Guang 丨 y. + X — yj (Equation 4) Calculate the boundary deviation of the images in different columns The amount of displacement is as follows: d = (subpixel) 200411143 V. Description of the invention (6) and calculating the distance (1 inespacing) of different columns of light sensors is as follows: 5 ·· l = sx (n ^ l) (Equation 5) The offset angle is as follows: ^ = tan- ^ = tan ^ (Equation 6) I -1 In the present invention, the object to be measured and the light sensing element array are relatively moved, and multiple images of the same longitudinal position on the object are obtained multiple times. , Then calculate the lateral (lateral) offset of the light sensing element array from the image, and use the intensity approximation equation (Intensity fitting function) to improve the accuracy of calculating the lateral offset, and calculate from the lateral offset The vertical deviation angle of one axis of the light sensing element array and the relative moving direction of the object. The present invention does not require additional measuring instruments, but enables a non-contact measurement method, that is, an image processing method is used to calculate an offset angle when the image detection element scans and acquires images, and cooperates with the accuracy of the image boundary points. The calculation method (Intensity fitting function) enables the calculated offset angle to reach the sub-pixel (subpi X e 1) accuracy, which can accurately reflect the slight offset. The above-mentioned embodiments are merely examples for the convenience of description. The scope of the claimed rights of the present invention shall be based on the scope of the patent application, rather than being limited to the above-mentioned embodiments.
第11頁 200411143 圖式簡單說明 五、 圖式簡單說明 圖1係本發明一較佳實施例之影像偵測元件與待測物件示 意圖。 圖2係本發明一較佳實施例之待測物件上視圖。 圖3係本發明一較佳實施例之光感測元件第一次取像示意 圖。 圖4係本發明一較佳實施例之光感測元件第二次取像示意 圖。 圖5係本發明一較佳實施例之第一列影像與第二列影像之 光強度曲線圖。 圖6係本發明一較佳實施例之強度近似方程式曲線圖。 六、 圖號說明Page 11 200411143 Brief description of the drawings V. Brief description of the drawings Fig. 1 is a schematic diagram of the image detection element and the object to be tested according to a preferred embodiment of the present invention. FIG. 2 is a top view of an object under test according to a preferred embodiment of the present invention. FIG. 3 is a schematic diagram of the first image acquisition of a light sensing element according to a preferred embodiment of the present invention. FIG. 4 is a schematic diagram of a second image capture of a light sensing element according to a preferred embodiment of the present invention. Fig. 5 is a graph showing light intensity curves of a first row of images and a second row of images of a preferred embodiment of the present invention. FIG. 6 is a graph of an approximate equation of the intensity according to a preferred embodiment of the present invention. Six, drawing number description
第12頁 10 光 感 測 元件陣列 11 方 向 12 方 向 13 方 向 101 第 一 列 102 第 N列 20 待 測 物 件 21 線 位 置 30 第 一列晝素 31， 41 邊 界 點 34 側 向 偏 移 40 第 N列晝素 A 偏 移 角 度 X 移 動 距 離 Y 距 離Page 12 10 Array of light sensing elements 11 Direction 12 Direction 13 Direction 101 First column 102 Nth column 20 Object under test 21 Line position 30 First column day element 31, 41 Boundary point 34 Lateral offset 40 Nth column Day prime A offset angle X moving distance Y distance