TW577994B - Method of using electro-optic measurement system to measure magnetic field and using magneto-optic measurement system to measure electric field - Google Patents

Abstract

The present invention provides a method where electro-optic measurement system is capable of measuring the magnetic field in addition to the electric field. The invented method also can be used in a magneto-optic measurement system that is capable of measuring the electric field in addition to the magnetic field. Furthermore, this new method can be used in any electric field or magnetic field measurement system, and is not confined in electro-optic or magneto-optic measurement system.

Description

V. Description of the invention (1) • Field of the invention The present invention provides nine two-insertion arches used in a thunder umbrella. This method can simultaneously measure the electric field and the wall electric field. Electricity first measurement system, magnetic field measurement or magneto-optical measurement. Background electro-optic: the reason and characteristics of the needle measurement system: No., combined: two: `` Metal probe measurement-the circuit under test is applied ; Ί: When the operating frequency of the circuit is getting higher and higher, and ... probing = because the metal probe must contact the measuring method! i forms a measurement error. Therefore, the development of the Lee method is very important. Nearly: The development of the electro-optical measurement system is to solve the above problem, because of the characteristics of the input impedance due to the electricity used in the electro-optic measurement system. The electro-optic measurement system 2 • The following detailed descriptions have been used to gain a deeper understanding.) Basic working principle. · The two-probe system can use the electro-optical characteristics of a crystal as ^^ 3〇3 , UNb03 KH2P03, K02P04 and so on. a When subjected to an external electric field, its refractive index will produce a variable field, especially the voltage measurement method of the system measurement does not measure the circuit. The new body of the problem of the high-frequency signal to be measured has a high original working crystal type. The crystal is described by optics 577994, five inventions (2) _ the traditional measurement technology of the system, so we can measure the refractive index of such crystals, and then infer the vector of the added electric field. Edge-cutting When the electro-optic crystal is subjected to an external electric field, the relationship between its breakage is as follows: dry /, electrical% n ^ CE) = nij (0) + rijkEk + SiiklEkE, + ···· ⑴ where ri ik is linear (Or Pock 1 es) electro-optic coefficient. In this issue, only the effect of the P o c k 1 e s electro-optic coefficient is considered. The t e n s 〇r formed by the electro-optic coefficient of P 0 c k e 1 s is called an electro-optic tensor. The relationship between the change in the refractive index and the applied electric field is as follows:

(2)

Page 5 577994

V. Description of the Invention (3)-The refractive index of electro-optic crystals seen in different directions can be described by the equation of the index elUpsoi... According to the direction of laser light travel and the refractive index ellipse The sphere can determine the characteristic wave (eigenwave) and characteristic value (eigenvalue) of the laser light propagating in the crystal. Then, determine the (ordinary refractive index) and ~ (extra0rdinary refractive i ndex) of the electro-optic crystal. When the electro-optic When the crystal is subjected to an external electric field, the refractive index ellipsoid will produce a compressed stretched (efefrmatino) and a rotational deformation (rotational defomatio). The following describes the geometric structure of the probe as follows. It is divided into two types, total internal reflection and high ref lection, and its structure is shown in the first figure. In the first figure (a), the laser light generates a total Reflection, after three total reflections S !, S2, Sa, the laser light is reflected back along a path parallel to the incident light. In the first figure (b), the laser light is positive The bottom of the crystal is incident and reflected back from the front of the bottom. Comparing the two structures, the fully f-emission type electro-optic interaction area is larger, so there will be a stronger electro-optical signal. However, its disadvantage is its spatial resolution ( The spatial resolution is poor. This is because compared to the highly reflective structure, the spatial resolution is only the spot size of the laser light. Another disadvantage of this total reflection type is that of three total reflection surfaces. Processing is very difficult. If the positioning and polishing of the three surfaces are not performed properly, the laser light is difficult to reflect from the crystal cut surface.

Page 6 577994 V. Description of the invention (4) As for the laser light source, it can be divided into pulse laser (pulse laseO and continuous wave laser). The pulse laser is generally used " " For a sampling type (samp 1 ing) measurement system, the basic principle is as shown in the second figure. When the pulse laser emits light at an instant ^, the signal under test at this instant is measured. So little by little Point sampling can measure the entire signal waveform. The only difference is that the frequency of the measured signal is low and the signal to be measured. The meaning is that the signal of the same frequency can be measured with a lower frequency pulse signal. Measurement signal. Generally speaking, the pulse repetiti rate of ultra-fast lasers is very high, so very high-frequency signals can be measured. Compared to the f of pulsed lasers, Continuous wave laser. A common semiconductor laser is a CW laser. Its characteristic is low cost. It can be used to detect a sine wave type signal to be measured, but it is impossible to measure any signal like the repetitive signal in the second figure. An introduction to the two-dimensional electro-optical measurement system architecture. Measurement system architecture: The two-dimensional measurement system refers to the two-dimensional electric field component parallel to the object under measurement when the probe is placed above the object under measurement. According to Chen Weixuan (W · Η · Chen, w. K. Ku〇, s. L.

Huang, ΥT Huang, and ΗZ Cheng, n〇n-Wafer 2D

Electric-Field-Vector Mapping Using One ^ Beam Electro-Optic Probing Technique, 1 'Technical Digest oj CLEO ’5 68 (2 0 0 0)) proposed a system architecture for measuring two electric field fractions with a beam of laser light. This system is used at the same time-telescopic deformation of electro-optic crystal ΙΙΙΙΙΙ ^^ Ι page 7 577994

V. Description of the invention (5) and rotation deformation to measure two electric field components. The system architecture is shown in the third example. In the third figure, the light source is a red light semiconductor + with a wavelength of 632.8nm. The laser light is reflected by a 32 × 45G mirror and then passes through a polarizer to change the polarization state of the laser light. Through-the focusing action of the microscope is incident on an electro-optic crystal. This electro-optic crystal has a _full ~ reflective geometry. Since the electro-optic crystal is subjected to the action of the electric field to be measured, a change in refractive index is generated ', which further changes the polarization state of the laser light reflected by the crystal. The reflected laser light passes through a compensator, and its function is to adjust its phase delay to make the signal received by a photo detector the strongest. The function of Wo 11 as ton prism is to decompose the laser into two beams of orthogonal polarization, and the two beams of light enter the differential light detection knife. The differential receiver reduces common mode noise (mQde noise) and also enhances the strength of the electro-optical signal. The mathematical relationship between the angle of the electro-optical signal I 0 and the two-dimensional electric field component (the angle of the device) in the 50 Hz system is as follows: χ W turns Θ coffee solution ㈣⑹ ⑴ ⑴ t right ㈣. s (秘 娘; and ㈣5., Α: Qiu n⑽ △ ⑹ 乂 4 / By changing t, we can get two components Εχ and dagger respectively. The comparison between the fourth graph value and the theoretical value. At this time, the test object —Circuit board, add the parent current voltage 彳 § on both sides of the middle engraving. The electro-optical probe is placed above the groove. At this time, the angle of the polarizer is set at the coffee,

577994

Don't get Ex and Ez. The consistency can be seen in the fourth figure. After changing the value of ^, the amount remains to the corresponding 10, from the experimental value and the theoretical value V calculated by mathematical formula (3). The above is the angle of the two polarizers measured with a beam of light set to 0Q and 45 . . The amount of laser light is a two-dimensional electric field component, in which two laser beams are simultaneously incident on electricity, and are set at 0Q and 45G. As shown in the fourth figure, two-dimensional electric field components are measured, but two sets of signal detection circuits are used. Dimensional electric field components are needed in this system. Another conventional method is to use a two-beam system as shown in Figure 5. In the fifth photonic crystal, the corresponding polarizer is compared. The advantage of the fifth photo is that the optical path system is more complicated and requires a three-dimensional electro-optical measurement system architecture. According to Guo Wenkai et al. (11〇, 3.1) 11 ^ 1 ^, 1 \ 3 ·

Horng, and LCChang MTwo-Dimensional Mapping of Electric-Field Vector by Electro-optic Prober ,,, Optics Comm., 149, 55-60 (1 998)) on the basis of the two-dimensional measurement system, the development of two-dimensional The electro-optic measurement system is shown in Figure 6. In this system, two laser beams enter the electro-optic crystal along different paths, and are also reflected along different paths, as shown in Figure 7. From the signal changes of the three beams of light, three-dimensional electric field components can be solved by simultaneous equations. ^ Traditionally, the electromagnetic measurement system can only measure the electric or magnetic field of the object to be measured. It is not yet possible to measure the electric and magnetic fields simultaneously. Therefore, in view of the lack of f-head technology, the present invention considers and improves the idea of the invention, and invented the case of measuring the magnetic field with the electro-optical $ measuring system and measuring the electric field with the magneto-optical measuring system.

577994 V. Description of the invention (7). Method ". Summary of the invention The purpose of the present invention is to measure the electric field of the object to be measured and "a: to enable the τ electro-optical probe system to simultaneously obtain the electric and magnetic fields of the object to be measured, or to enable the magneto-optical probe system to measure The measurement system of the present invention measures-the element to be measured; the electric field probe is used to measure the IPR needle in the following steps of the component under test: the m ^ ^ thousand on / 0 direction modulation, measuring 嗲 ϋ, 3 丨Le e%, and generate an electric field modulation = the electric part of the object to be measured; and use the thunder ί :; to extract the magnetic field of the AC object's modulated signal. The AC part of the electric field modulation signal is calculated to be the one to be measured. According to the above concept, the field light probe wire ~ 1. + * τ, then the system is an electro-optic system (electro-optic prObing system) / according to the above-mentioned concept to maintain one of the electric fields. One of the dimensional magnetic fields according to the above concept. According to the above idea, according to the above idea, wherein the direction includes X, y, and z directions. The electric field is a three-dimensional electric field, and the magnetic field is a magnetic field. The electric field probe measurement system further includes a low pass filter (LPF), which is used to detect the modulation signal of the J field. DC part, Xiao DC part is the electricity of the DUT

Page 10 577994

V. Description of the invention (8) According to the above-mentioned concept, the electric field detection package includes a full-time measurement system and an eight-phase lock-in amplifier (lock-in amplifier), which is used to detect 3 ~ field modulation signals. Exchange, points. @ 电 The second idea of the invention is to provide a method for measuring the magnetic field of a component under test using a measurement system, including the following steps to reset the probe, and moving the component under test in one direction for modulation. ^ The electric field of a solid object is detected and an electric field modulation signal is generated; the electric field modulation is detected. The exchange part of the temple; and the exchange part using the electric field to modulate the signal to output the magnetic field of the object to be measured. Blade Ye Sheng According to the above-mentioned structure: It is thought that the electric field probe measurement system is an electro-optic probing system. Electricity According to the above concept, one of the electric fields is maintained. One of the dimensional magnetic fields according to the above concept. According to the above idea, according to the above idea, wherein the direction includes χ, y, and z squares. The electric field system is a three-dimensional electric $ 22, where the magnetic field system is an i-dimensional magnetic field, and the electric field probe measurement system further includes eight low pass filters (LPF ,, Putian ,, 3 One J you use to detect the DC part of the φ a electric field modulation signal. The DC part, read out | is the field of the object to be measured. Electricity According to the above concept, the electric field probe measurement system is more locked. Phase amplifier (lock-in amplifier), Sun Tian ~, B ~ 1 are used to detect the AC part of the field modulation signal. Λ Electric according to the third concept of the present invention is to provide a magnetic field probe

Page 11 577994 V. Description of the invention (9). The method for measuring the electric field of a component under test by the measuring system includes the following steps: adjust the direction of the needle measurement component in one direction, and measure the magnetic properties of the component under test. Two modulation signals; the AC that detected the magnetic field modulation signal = the AC portion of the electric field modulation signal was calculated. The test to be tested was based on the concept described above, where the magnetic field probe measurement is an optical probe system (magneto-optic probing system) '. The above conception, wherein the direction includes χ, y, and z directions. • The concept of Weiye, where the electric field is-the three-dimensional electric field and-one-dimensional = 2, " the magnetic field is-three-dimensional magnetic field and-"ΐ ΐ ϋ ϋ 的 'Concept' where the magnetic field probe measurement system is more Including the DC part of the magnetic field modulation signal ☆, the DC 丄: = :::: field. Canshu's idea 'where the magnetic field probe measurement system further includes a phase-locked amplifier (10ck-ln amplifier), It is used to set the AC part of the modulation signal. To detect the demagnetization According to the fourth concept of the present invention, a method for measuring the electric field of a component to be measured using a magnetic field probe system includes the following steps: Move the component under test in one direction to fix the magnetic field, and generate a magnetic field modulation signal; when the second phase is detected, the logistics part under test, and the AC component using the magnetic field modulation signal are calculated.

Page 12 577994

V. Description of the Invention (ίο) The electric field of the measured object. According to the above conception, wherein the magnetic field probe measurement system is a magneto-optic probe system (megrrfcto-optic probincr ^, system; 〇 According to the above conception, wherein the direction includes the above-mentioned concept, where the electric field It is a three-dimensional electric field with ° and ° a one-dimensional electric field. One of the two-dimensional magnetic fields according to the above concept. The magnetic field is a three-dimensional magnetic field and a measurement system further includes one, which is used to detect the That is, the magnetism of the object to be tested is based on the above-mentioned concept, wherein the magnetic field probe low-pass filter (LPF) magnetic field modulates the DC part of the signal, and the DC part needle measurement system further includes a system for Detect the magnetism, and get a deeper idea based on the above, where the magnetic field probes the AC part of the field-modulated signal of the lock-in amplifier. This case can be understood by the following diagram and details Ϋ Brief description of the diagram ϊ = Geometric sectional view of a conventional total reflection electro-optic crystal; Ϊ: ί t Geometrical cut-away view of a highly reflective electro-optic crystal; First picture U) is the treatment of a conventional laser light source The sound signal diagram of the measurement signal; The second image (b) is the sample signal sound diagram of the conventional laser light source;

577994 V. Description of the invention (11) The second picture (C) is a conventional laser and the third picture is a conventional one. The measured signal is not intended;-the fourth picture is a conventional electric operation. ;: f schematic diagram of electro-optical measurement system; schematic diagram of value comparison; theoretical values and experiments with respect to the angle of the polarizer. The fifth diagram is a conventional two-beam two electro-optical measurement system; Figure 7 is a schematic diagram of a conventional three-beam light-optical measurement system; Figures; Schematic diagrams of propagation along different paths in an electro-optic crystal Figure 8 is a conventional electro-optic probe See Figure 9 is a conventional magneto-optical probe Schematic diagram; Figure 50 is a block diagram of the second system of this case; and a block diagram. The preferred embodiment of the electro-optic probe measurement system after the modulation is added. The body 4 :: U optical t-pin is based on the electro-optic effect of the crystal, that is, the refraction of the crystal when the crystal π, π & = sister Γ. The rate will change slightly: Kyoichi and signal processing detect this slight change, and then reverse # J: Field !! In the same way, the magneto-optical probe is based on the crystal. 屮 :: batch 2: when the body fork is applied to the external magnetic field, it is detected by the measurement system. . According to a modulation technique (K · W · Shieh t, Meth〇d f〇r

Measuring Magnetic Field Based 〇n Electro-Optic Probing Technique and Measuring Electric Field

Page 14 577994

Based on Magnetic Probing Technique, "If pending.), Adjust the AP at the location of the electro-optic probe. ^ = Nt The optical signal is transmitted to the computer. Simple calculation, that is, the same electric field as ^ 1 仟. The eighth figure is electro-optical Schematic diagram of the probe measurement system == The standard is (X, y, Z), and the output of the measurement system is (3, the three-dimensional vector electric field Ex, £ y, Ez., Y, z) where / Ex For example, if the modulation is performed in the x direction, the output is Bu Yi Jia, and the right △ «〇, mEx can be expressed by mathematical formula (4) (4)

Ex (x + A sin wmty y9 z) «Ex (x, y, z) + A sin wj

Ey (x + A sin γ) z); " ^) + Asin w dEy {x, y, z) (5) m dx + Δ sin yvmt, y, z) ^ ^) + Asin w it ^ Ε: (χ, γ, ζ) 1 dx (6) Take the mathematical formula (5) as an example, the DC signal in the output% is Ey (X, y, z), that is, the y component of the electric field 'and the ac component has a y component Partial derivative of electric field to dEy (X ^ y > Z) °

CX As shown in the ninth figure, the DC signal Ey (x, y, z) can be detected through a low-pass filter (low pass Π 1 ter (LPF)); and through a lock-in amplifier (10ck-in amplifier) ), The amplitude of the AC signal

Page 15 577994

• UmPlitude). Π is adjusted in the y and z directions, and AdEi (x, y, z) Δ ^ > hj ^ x9y, zAEi (x, y, Z) can be obtained in the ninth figure. According to Maxwell Equations, (7) ▽ X E =-

Hx: 1 (¾. -Jwu dy-警) Hy: 1 (¾ -j \ niv dz dx 'Η, 1 (¾ dEx, -yvw v dx (8) where) = 7 ^ 1, > ^ == 2; /, f is the operating frequency of the electromagnetic field to be measured, # is the coefficient of the guide < 1. If the position of the probe is adjusted, it can be obtained by substituting into the mathematical formula (8) to obtain a three-dimensional magnetic field. In the figure, the output of the lock-in amplifier is ΔM ^) instead of. Standard test object

Sentence J 577994

δΕ ^ χ, γ, ζ) dj. The process is as follows: ′ The electric field and magnetic field on its surface are calibrated, and the probe is placed on the surface of a standard test object. When adjusting the position of the probe, get dj minus' and get the net 1 according to the first formula in mathematical formula (8). Such signals are used as algebra A (dEAx, y, z) dEy (XiyjZ) (― ^ (9) • The left side of the mathematical formula (9) is the result of the direct output reduction of the ioc-iri amplifier, which is known; the right side Ιχ is the magnetic field of the X component of the surface of the standard test object, which is also known. This can be used to find D, which can accurately ^ dE ^ x, y, z) — turn the output sentence of the lock-in amplifier into 翌 『) _. After this calibration process, this probe measurement system can measure any task at the same time; what electric and magnetic fields are generated by the object to be measured. Similarly, the tenth figure is a schematic diagram of a magneto-optical probe measurement system. The output of the system is a three-dimensional vector magnetic field at the position of the probe (x, y, z), H "】.] As in the electro-optic probe measurement system In general, if the y position 2 of the magneto-optical probe is changed, Η "χ, y, z) and mXw), i * v dj 1, and x, y, z can be obtained.

I substitute Maxwel1 Equation, (10)

VxH = plus E

577994 V. Description of the invention (15) The result is £ fdH · E: E, — (S β ^ ε dx (11 Guangzhong / 广 dielectric constant (perm iti vi ty)). Passed by the MO survey, ^ Substitute the mathematical formula UU to get Εχ, Ey pin: change * not limited to electro-optic d]: two: the three-dimensional magnetic field method, the probe, can also be applied to any form of field method is not limited to the magnetic field The measuring system pushes three-dimensional :: probe. Furthermore, this type of electric field probe in the form of = does not: limit f electro-optical probe, suitable magnetization J = method is not limited to magneto-optical probe T; The system pushes-reads the needle. Ten can also be applied to any form of the measurement system's advantages of measuring the electromagnetic field: L Traditionally, you want to measure the object to be measured first. At this time the position of the probe will be = 2 The field and magnetic field must be replaced. The system cannot be located on the same page, page 577994. V. (16) point of the invention. That is, the same difference cannot be measured. This error is not uncommon at low frequencies: magnetic: two: caused The measurement error is obvious. Especially when the high-frequency electronic circuit ^ two-frequency signal is getting worse, with this innovative measure The problem of increasing frequency of frequency. J The method of electromagnetic% will avoid this question. 2. The current bandwidth of electro-optic crystals is about 60GHz to 5GHz. 5GHz. However, with the modulation of the electro-optic frequency, the southernmost field frequency will be as high as 60GHZ, which greatly increases the measurement range of the magnetic field frequency in the system. electr〇magnetic 丨 leg) and antenna radiation field pattern (radiatiQn pattern) == C, e has been derived from the near field to obtain the far field field pattern. Due to the limited measurement system, only the monthly b can be measured to near The electric or magnetic field of the field. But j, ·, and the electromagnetic field, but can greatly reduce the memory space required to switch from the near field. The 4 different time of the wild and 4 · in terms of cost considerations, a single set of measurement system As for the measurement of two physical quantities from two sets of electricity, one will be able to ... One, as mentioned above, this case may be made by a person familiar with this technology > = cost two modification, but it is not as good as attaching the scope of patent application Desire to swear ^: Become well and everything 8 Page 19 577994-Simple illustration of the diagram ^ ---- First picture a) A geometrical cross-section of a conventional total reflection electro-optic crystal. The first diagram (b) is a geometrical cross-section of a conventional highly reflective electro-optic crystal. The second diagram (a) is a schematic diagram of a signal to be measured by a conventional laser light source. The second picture (b) is a schematic diagram of the sampling signal of a conventional laser light source; the second picture (c) is a schematic diagram of the measured signal of a conventional laser light source; the third picture is a conventional two-dimensional electro-optical measurement system of a light beam Schematic diagram; The fourth diagram is a schematic diagram of the comparison of the theoretical% value of the electro-optical signal with respect to the angle of the polarizer; the _ value and the experiment are the fifth diagram of the conventional one-beam two-dimensional electro-optical measurement system; Schematic diagram of a two-dimensional electro-optical measurement system; The seventh diagram is a conventional diagram of three beams of light in an electro-optic crystal along different paths; the eighth diagram is a block diagram of a conventional electro-optical probe measurement system; the ninth diagram is a conventional diagram The block diagram of the magneto-optical probe measurement system j. The tenth diagram is a schematic diagram of the electro-optical detection after the modulation is added to the preferred embodiment of the present case. Dingli measuring system of the symbol description beam beam beam total reflection B3 s2 2: beam 1 · total reflection 3 · total reflection

Page 20

Claims (1)

3 // 994 VI. Application for Patent Scope-A method for measuring the magnetic field of a component under test using an electric field probe measurement system, including the following steps: The direction is adjusted, and the electric% of the object to be measured is measured, and the electric field modulation signal is generated; the AC part of the electric field modulation signal is detected; and the field. Use the AC portion of the electric field modulation signal to calculate the magnetic mm of the object to be measured: The measurement method described in item 1, wherein the electric field detection, and "" are an electro-optic probe system (e 1 ectr 〇- 〇 ptic probmg system). where the direction is where the electric field is where the magnetic field is where the electric field is detected ^ = The measurement method described in the scope of the patent application includes directions X, y, and z. The negative is as described in item 1 of the scope of patent application. The measurement method described is one of a f-dimensional electric field and a two-dimensional electric field. The measurement method described in Item 1 of the Helmet II_ 凊 patent scope is one of a two-dimensional magnetic field and a two-dimensional magnetic field. Needle = please patent The measurement method described in the first item of the scope, the 糸 system includes a low-pass filter (10W paSS fi 1 ter, LPF vb) to detect the DC of the electric field modulation signal. Part. The electric field of the object to be measured in the DC part. The measurement method described in item 1 of the patent scope of θ and Qing, wherein the electric field detection system further includes a lock-in amplifier (for detecting The AC part of the electric field modulation signal is output. Probe measuring system measures the magnetic field of a component under test Page 21 577994 • Sixth, the scope of patent application-method, including the following steps: Fix the probe, and move the DUT in one direction for modulation, measure the electric field 4 of the DUT and generate a 〆 electric field modulation Signal; detecting the AC portion of the electric field modulation signal; and using the AC portion of the electric field modulation signal to calculate the magnetic field of the object under test. 9. The measurement method as described in item 8 of the scope of patent application, wherein the electric field probe measurement system is an electro-optic probe system (electr0-〇pt ic probing system). Where the direction is where the electric field is where the magnetic field is where the electric field is probed. The measurement method described in item 8 of the scope of the patent application includes X, y, and z directions. 11 · The measurement method described in item 8 of the scope of patent application is one of a three-dimensional electric field and a two-dimensional electric field. 12. The measurement method described in item 8 of the scope of patent application is one of a two-dimensional magnetic field and a two-dimensional magnetic field. 1 3 · As described in item g of the scope of patent application, the needle measurement system further includes a low-pass filter (low pass ii Iter (LPF)) for detecting the DC portion of the electric field modulation signal. The DC part is the electric field of the object to be measured. 4 · The measurement method as described in item 8 of the patent application scope, wherein the electric field probe measurement system further includes a lock-in amplifier, which is used to detect the AC portion of the electric field modulation signal . 1 5. A method for measuring the electric field of a component under test using a magnetic field probe measurement system includes the following steps: Page 22 577994 VI. Scope of patent application The probe performs modulation in a direction on the DUT, measures the magnetic field of the DUT, and generates a magnetic field modulation signal; detects the magnetic field modulation j signal The AC portion of the magnetic field modulation signal; and the AC portion of the magnetic field modulation signal to calculate the electric field of the DUT. 1 6 · The measurement method as described in item 5 of the scope of patent application, wherein the magnetic field probe measurement system is a magneto-optic probing system 〇 1 7 · As the scope of patent application The measurement method according to item 5, wherein the direction includes X, y, and z directions. The electric field 1 8 · The measurement method described in item 1g of the scope of patent application is one of a three-dimensional electric field and a two-dimensional electric field. The magnetic field 19. The measurement method described in item 15 of the scope of patent application is one of a two-dimensional magnetic field and a two-dimensional magnetic field. The magnetic field 20 is the measurement method described in item 15 of the scope of the patent application. The probe measurement system further includes a low-pass filter (10w pass niter, LPF). The DC part of the magnetic field modulation signal is detected, and the DC part is the magnetic field of the object to be measured. Η The measurement method described in item 15 of the patent application scope of μ and Qing patents, wherein the magnetic field is ~ 10: ^ J series, and first includes a phase-locked amplifier (10 din ampiifier) _ is used to detect The magnetic field modulates the AC portion of the signal. The method for measuring the electric field of a component under test using a magnetic field probe measurement system for ancient species includes the following steps: Fix the probe, and move the component under test to adjust the quantity Page 23 577994 6. Apply for a patent, measure the magnetic field of the DUT and generate a magnetic field modulation signal; detect the AC part of the magnetic field modulation signal; and use the AC part of the magnetic field modulation / change signal to calculate The object to be measured. Yidian 23. The measurement method as described in item 22 of the scope of patent application, wherein the 礤 p probe measurement system is a magneto-optical probe system (megnet〇—〇ptic sentence probing system) 〇24 · As applied The measurement method according to item 22 of the patent scope, wherein the square includes X, y, and ζ directions. ° | 5. The measurement method according to item 22 of the patent application, wherein the electric field is one of a three-dimensional electric field and a two-dimensional electric field. 2 6 · The measurement method as described in item 22 of the Shenjing patent scope, wherein the magnetic field is one of a three-dimensional magnetic field and a two-dimensional magnetic field. 2 7 · The measurement method as described in item 22 of the patent application scope, wherein the magnetic field probe measurement system further includes a low pass filter (LPF) 'for detecting the magnetic field modulation The DC part of the variable signal. The DC part is the magnetic field of the DUT. 2 8 · The measurement method described in item 22 of the scope of patent application, wherein the magnetic field needle measurement system further includes a phase-locked muscle ^ ′ is an AC name used to detect the magnetic field modulation signal Page 24