TW575535B - Method for producing high precision multilayered ceramic component - Google Patents

Abstract

A method for producing a high precision multilayered ceramic component comprises using two crystallizable glass powders each with a different softening point as fillers; separately mixing the glass powders with an organic binder to produce two blanks; interleaving the two blanks to form a composite blank structure; using the two different softening temperatures of the two blanks to form a mutual binding sintering property in order to reduce contraction rate thereof and eliminate the problem of an excessive dimensional variance in the X-Y direction caused by sintering contraction in producing the multilayered ceramic component.

Description

575535 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a multi-layered ceramic pottery with a limit to the collection of 'multi-layer ceramic potter's precision' [Previous Technology] It is shown because of the related electronics products' In order to reduce the size of various components, the modularization and integration of electronics production has become a separate development of Modules (MCM) process technology in accordance with different materials and processes. Among them, the multilayer ceramic green body is used as the base material, and the layers and layer resistance, capacitors, and conductors are laminated together to achieve higher embryos and then sintered together. In this manner, the low temperature co-fired Taurman substrate is buried to form the entire portion. The process of multi-layer Taoman module is firstly connected with the upper and lower circuits by using a scraper forming machine and an appropriate drying temperature. After the formation, the metal ink is filled. The metal inks on different layers are made per-Kun / / ^ layer production Complete the trip to the South Wenzhou high-pressure stacking process to form a tri-structure. The great advantage of multilayer ceramics is that if there is any in the layer, the layer process is wrong. If a thick film process is used, once one of the layers is discarded. Multi-layer ceramic damage + π μ 3 Watt embryo structure manufacturing method The manufacturing method of the element, especially the manufacturing method of the ceramic element. Light, thin, short, and small are the benchmarks for a new wave of active and passive components in development projects. Therefore, various polycrystalline modules (Mult i-Chip multilayer ceramic modules (MCM-C) are embedded with heterogeneous materials, such as electrical silver: buried density. Then they are born in the inner layer of the resistance or capacitor element. After combining the circuits or components in the component-after milling the ball to form the circuit diagram of each layer of the green embryo, the sequential dimension (3D) is a kind of flat, which can be printed after another print, and must be mixed into thin sheets. Using multiple layers of ceramics to make errors outside the manufacturing process, the cutting material must be cut in order to reach the through hole, and the printing technique is layered & metamorphosed &

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575535 5. Description of the invention (2) _ Size sintered at 300 to 500 degrees Celsius to 900 degrees for sintering. However, when Tao is sintered into a rod and sintered at 85 ° C U watts, it will shrink in size due to the gradualization of the body. The shrinkage phenomenon will occur in the three axes χ — γ_ζ without external force. In the case of sintering, the requirements of miniaturization and high dimensional accuracy tend to cause the product to have a great risk of dimensional errors, and even cause: = ί and other defects. And for modules with complicated lines, the coupling caused by changes in line and line (C〇U131 1ΓΐΗ # 田 a ′), the deviation of the mercury from the characteristics. Especially for the demand; the "into the" ring to the entire module wheel For the application of the surface of the Taumann module, χ% requires the axis to construct his / her components in multiple layers. Therefore, the manufacturing process is greatly reduced; pottery and magnification control are very important. The amount of variation is a large issue. At present; = Heterogeneity that will not shrink at the junction temperature caused by shrinkage during the sintering of the green embryo is not limited. The shrinking process is used in the firing of ceramic sintered bodies as a tie layer or a substrate, and the homogeneity is large enough. Methods such as pressure are applied to the thickness direction (Z-axis) by applying a hot-pressing sintering method to the component to perform welding = to make it shrink. For example, when a compressive stress is applied to cause the χ-γ plane to produce shrinkage Under the Z axis, this amount of deformation can be related to the amount of / shape due to sintering, and it will not change from a proper pressure, that is, the additional pressure: shrinkage offsets, so that the size of the component during the hot pressing sintering process, the Z axis The applied t sintering principle, however, in the flow All the methods will directly shape the σ 仃, the de-binder of the raw embryo, and the average degree of load and load of the gas pressure ::::: quality. When sintered, the load on the raw embryo, the shape of the wire and the surface are flat. ; = It is difficult and costly to shrink the inner sentence of the ceramic body. Also, the design of the hot-pressing furnace and mold is sintered due to external pressure.

575535

The road is distorted and the resolution of the line is reduced. Or use the binding layer to reduce the pressure of the palladium added by the Chinese patent No. 5 2 77 723. Rumei's porosity change board is used to limit the compound reed. The method is to use high on the contact surface of the green embryo. The shrinkage must be removed by grinding: but it must be high after sintering and increase the uncertainty of the product. Cost of processing & process

Kovar alloy (29% recorded -17% chain one 54ϋ = = 7258 Gan 08 patent system application application ^, cobalt b4 / 〇 iron) metal plate with a glass bonded to its surface, and then co-fired with low temperature " Co-firing after pressure bonding. The bonding force of the bonded glass makes the metal plate restrict the low-temperature co-fired ceramic green body from shrinking in the plane direction during sintering. Its disadvantage is that it increases the cost of limiting the shrinkage material, and if the metal plate is not ground away, A metal layer must exist on one side of the co-fired ceramic element or substrate, which reduces the design flexibility. [Summary] The disadvantages of the conventional technology, the main purpose of the present invention is to provide a method for manufacturing a high-precision multilayer ceramic element. During the sintering process, the shrinkage of the ceramic substrate in the χ-y direction is less than 0.5%, thereby eliminating the problem of excessive dimensional variation in the XY direction due to sintering shrinkage during the manufacture of multilayer ceramic components, while avoiding the use of binding layers or hot-pressing sintering in conventional techniques. In order to achieve the above-mentioned object of the invention, the technical means used in the present invention is to use a crystallizable (crysta 1 1 iz) with different softening temperatures. ab 1 e) Po Wangli powder as a filler, and then mixed with an organic binder to form two kinds of raw embryos', and the two are alternately laminated to form a composite raw embryo structure. By using two crystallizable powders The different softening temperatures make them self-constrained during the sintering process to control the multilayer ceramic components.

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Page 7 575535 V. Description of the invention (4) Receive in X-Y direction. The method for making soybeans is to adjust the composition of the first raw embryo, Γ, and crystal glass, which can be adjusted to the Japanese temperature & -: 二 ί :: and the embryo with the second softening temperature and the second bio-degradation μ degree are lower than the second softening temperature. The sintering process is started after the green embryos are solidified. When preparing for sound, and production, due to the temperature of shrinkage and contraction, the-+ 1 degree reaches the first system. And when the embryos at the pupal place can act as a hindrance to the first peak shape ^ 4 to the pupation of the first-raw embryo :: the temperature rises to the second raw embryo begins to soften ::: the clamp machine as a hindrance of the first 'at this time- When the raw embryo is not used, the characteristics of the element, i ;; reduce its shrinking temperature. Health teacher: ―The raw embryos of the layer substrate can be different U :; for multilayer pottery, multilayer pottery-man: Γ into a composite embryo. , And then pile 4ϊ: γ softened, tiled pieces. The layered substrate is formed so that the% of the present invention is shown in detail. For example, the manufacturing method and the function have been further advanced. The method of / 1 is as follows. / 1 is as follows. Please refer to Figure 1 for more information. 々2 makes two kinds of raw embryo illuminant real-life maps. Firstly, it is divided into θ organic body, including clay, and the embryo material is made by adding glass powder. Then, the scraping agent, plasticizer and solvent are used to ball mill the first life embryo and the second wood, and the two kinds of slurry are multi-layered to cut the upper and lower embryos and the four embryos (step 120). A through hole was made with the second raw embryo (the mesh of ν ^ mesh connected to the first raw embryo, 'M3.'). The raw embryo was dried and aged 575535. 5. After the description of the invention (5), the machine or mine was used. Perforating with a through-hole machine; then, fill the through hole with metal ink and use printing technology to print the required components and metal circuit patterns on the first and second raw embryos (step 丨 4); The first and second embryos are stacked in opposite layers to form a multilayer embryo structure (step 15); the multilayer embryo structure is subjected to a high-temperature and high-pressure stacking process (step 16), and the layers are placed at Celsius. At 70 ° C, a pressure of 4,000 pounds per square inch (psi) was applied for 10 minutes, and the temperature was raised ^ 500 ° C for two hours to remove the binder. Finally, it was sintered at 900 ° C in the atmosphere for 1 minute. In a few hours, it becomes a multilayer ceramic element (step 17). The slurry used by the turtle /, Zhongdi embryo contains wt% sodium oxide (N a 0 g), WiQ / ° oxidation 1 bow (Ca0), and wt% stone dioxide (S! 02). Glass ^-η The polymer used contains two kinds of glass powders: wt% oxide (办) and wt%. Both glass powders are made from oxides. They are ball-milled for 24 hours and then melted at $ 1,600,8 degrees and 8 hours. After quenching > Ran Yi Celsius ^ ^ ^ ^ ^ r ^ ^ 7 / into a glass rim, and then ball milled to Pinggu (24) for 24 hours to become the end of Wei Wei H ^ kind of glass in ί 2 can be added into commercial glass (≪ 50% by weight) to adjust the pot softening_stain: Geng to get better properties. And the number of hangings makes them close,

After the raw materials are prepared, the powder is mixed with an organic carrier to form a paddle embryo and a micro-bladder made by a spatula (approximately 45 microbraids) of the first-60 degrees of the first degree, and the second slope of the glass / second degree When the softening temperature is about 60 ° C and the sintering temperature reaches 60 ° C, the person is at 72 ° C (3 ° C. When the left and right contraction is completed; and the second and second specific embryos begin to contract. 4 The sintering of your raw embryos has a restraining effect. A ,,, and § support for the first § When the sintering temperature rises to 7 2 0 ° c, the second

575535 V. Description of the invention (6) The raw embryo begins to shrink, and the shrinkage is completed at 85 degrees Celsius. At this stage, the first embryo will not continue to shrink because it has been densified. Sintering will have a restraint effect. Therefore, under the condition of sintering at 900 degrees Celsius for one hour, the shrinkage rate of the ceramic layer transformation element in the χ — γ direction is less than 0.5%. The invention uses the characteristics of the first raw embryo and the second raw embryo to restrain each other from sintering to reduce the shrinkage rate. In the production of multilayer ceramic components, the green embryos of each layer of the substrate can be combined with two types of softening temperatures of different thicknesses to form a composite green embryo, and then the multilayer substrates are stacked to form a multilayer ceramic element. The thickness should be at least 30 microns. Since the present invention does not require the subsequent removal of the step I4A of the suppression layer, the cavity required for the component can be produced first at the embryonic stage. Compared with laser processing after sintering, the cost can be greatly reduced. The invention utilizes a self-restrained sintering process of multilayer ceramic green embryos. No, a process of adding pressure and external pressure can simplify the manufacturing process and reduce the cost. = F describes the circuit pattern needed to print on the surface of the green embryo with thick film, which effectively reduces the cost. The preferred embodiment of the I I ^ & Ming is disclosed as described above, but it is not intended to be used in February: Anyone skilled in related arts will not depart from the spirit of the present invention!: = Ί can make some changes And retouching, therefore, the patent consumption scope of the present invention shall be determined by the scope of the patent application attached to this specification. I mm IF ™ Page i0 575535 Brief Description of Drawings Figure 1 is a flowchart of an embodiment of the present invention. [Explanation of Symbols] Step 1 1 0 Prepare two kinds of raw embryo slurry separately Step 1 2 Use a scraper forming machine and appropriate drying temperature to form the two raw materials into a first raw embryo and a second raw embryo respectively. Cutting step 1 3 0 Make through holes in the first and second embryos Step 1 40 Fill the through holes with metallic ink and use printing technology to print on the first and second embryos Element and metal circuit pattern step 15 0 staggered and stacked 10 layers of the first and second embryos to form a multi-layer embryo structure step 160 0 high-temperature and high-pressure stacking process of the multi-layer embryo structure Step 17 Sintering at 900 ° C for one hour in the atmosphere will become a multilayer ceramic element

Claims (1)

575535 t, patent application scope I ~;-^: 1. A method for manufacturing a high-precision multilayer Taurman element, the steps of which include: providing one or more first green embryos having a first softening temperature, and having a first The first softening temperature of one or more second green embryos with two softening temperatures is lower than the second softening temperature; the first green embryo and the second green embryo are alternately laminated to form a multilayer ceramic green embryo, so that each A gap between the first green embryos and the second green embryos; and heating up to a sintering temperature to limit the shrinkage sintering of the multilayer ceramic green embryos, the sintering temperature is higher than the first softening temperature and the second softening temperature; „When the multilayer ceramic green embryo is heated to the first softening temperature, the first green embryo begins to soften and shrink, the second green embryo does not reach the softening temperature at this time, and the sintering temperature continues to rise to the second green embryo When the temperature at which softening and contraction starts, the first green embryo has shrunk to end. 2. The method for manufacturing a high-precision multilayer ceramic element as described in item 1 of the scope of patent application, wherein the first green embryo and the second green embryo Of The degree difference is greater than 30 microns. 3. The method for manufacturing a high-precision multilayer ceramic element as described in item 1 of the scope of patent application, wherein the components of the first raw embryo and the second raw embryo contain a glass powder. The method for manufacturing a high-precision multilayer ceramic element according to item 1 of the scope of patent application, wherein the glass powder is selected from the group consisting of sodium oxide (Na2 0), calcium oxide (CaO), silicon dioxide (Si02), and calcium oxide (CaO ), Silicon dioxide (S 1 02) and boron oxide (B2 03) and any combination thereof. 5. Manufacture of high-precision multilayer talman elements as described in item 3 of the patent application scope. Page 12 575535 VI. Patent application method, wherein the glass powder component of the first embryo is composed of wt% sodium oxide (N a2 0), wt% oxidation # 5 (C a 0), and wt% dioxide Shi Xi (S i 02). 6. The method for manufacturing a high-precision multilayer ceramic element according to item 3 of the scope of the patent application, wherein the glass powder component of the second raw embryo is composed of wt% calcium oxide (CaO) and wt% silicon dioxide (Si02). And wt ° /. It is composed of boron oxide (B2 03). 7. The method for manufacturing a high-precision multilayer ceramic element according to item 1 of the scope of the patent application, wherein before the step of staggering and laminating the first green embryo and the second green embryo to form a multi-layer Taumann. Embryo, The method further includes a step of forming a component and a metal circuit pattern from the first and second embryos. 8. The method for manufacturing a high-precision multilayer ceramic element according to item 1 of the scope of patent application, wherein before the step of staggering the first green embryo and the second green embryo to form a multilayer ceramic green embryo, The method further includes a step of making a through hole and filling a metal into the first and second embryos. Page 13