TW574611B - Method for producing color filter and colored photosensitive resin composition - Google Patents

Method for producing color filter and colored photosensitive resin composition Download PDF

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Publication number
TW574611B
TW574611B TW90116276A TW90116276A TW574611B TW 574611 B TW574611 B TW 574611B TW 90116276 A TW90116276 A TW 90116276A TW 90116276 A TW90116276 A TW 90116276A TW 574611 B TW574611 B TW 574611B
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Taiwan
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photosensitive resin
photopolymerization initiator
weight
item
range
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TW90116276A
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Chinese (zh)
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Manabu Azuma
Shunei Itahara
Koichi Fujishiro
Naoki Yokoyama
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Nippon Steel Chemical Co
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Polymerisation Methods In General (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Description

574611 A7 __ B7 五、發明説明(1) 發明所屬的抟術領域 (請先閱讀背面之注意事項再填寫本頁) 本發明係有關彩色濾光片用樹脂組成物及採用該組成 物之圖案精密度優越的彩色濾光片之製造方法。 習知技術 彩色液晶顯示裝置係以控制光之透過量或反射量之液 晶部及彩色濾光片爲構成要件,惟至於該彩色濾光片之製 造方法,將著色顏料微粒子經予分散於感光性樹脂組成物 的紅、綠、藍之像元及黑色基質形成於玻璃基板上的方法 係成爲可予使用的。在此方法經予製作的彩色濾光片雖然 顯示出耐熱性、耐光性優越的特性,惟近年因應對筆記型 電腦等可攜式顯示裝置等的低消耗電力化之要求而用的高 開口率化係爲人所要求著。因此,彩色濾光片上的紅、藍 、綠之像元,係由2〇0〜300//m至100//ΓΠ,黑 色基質係由2 0 // m至1 〇 // m經予細線化,隨著此,感 光性樹脂材料即成爲被要求較高的尺度精確度。 經濟部智慧財產局員工消費合作社印製 將於S占合劑樹脂由採用具有鹼溶解性之甲基丙烯酸苄 基酯-甲基丙烯酸共聚物,於感光性樹脂成分採用多官能 丙烯酸酯樹脂之著色感光性樹脂組成物係爲人所知的。採 用此著色感光性樹脂組成物,由已安裝圖案掩膜,若以高 壓水銀燈進行紫外線曝光時,則未予掩膜的曝光部分即成 硬化塗膜。接著,以需進行由鹼水溶液引起的顯影操作。 經予掩膜的未曝光部分之未硬化塗膜會溶出,故可形成具 有所期待的像元圖案形成之彩色濾光片。然而,此著色感 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 574611 A7 ____B7 五、發明説明(2) (請先閱讀背面之注意事項再填寫本頁) 光性樹脂組成物,係在氧氣之存在下,硬化反應成爲不足 ,有圖案之解析度或露敏度降低的問題。因此,於曝光前 形成阻斷氧氣膜’在顯影前剝離、阻斷氧氣膜的步驟即成 必需的,該製造步驟之增加即成爲新課題。 又於日本特開平1 — 1 5 2 4 4 9號公報內,爲圖謀 解決上述課題及提供顏料濃度並圖謀良好的色澤再現性’ 同時防止靈敏度降低,揭示有以鹵甲基氮雜二唑系化合物 、鹵甲基- s -之畊系化合物之使用例。然而,此等的化 合物係藉由上述的氧之反應阻礙雖使表面平坦性降低可予 改善,但在圖案尺度精確度之點仍然未達可令人滿意的水 準。 爲得具有優越的尺度精確度之微細圖案,使光聚合性 組成物中的光聚合引發劑之種類或添加量最適化即有必要 。於彩色瀘光片等的薄膜,通常在圖案細線較粗時,減少 光聚合引發劑之量使靈敏度降低一事欲調整適正的線寬雖 爲可能的,然而由於靈敏度之降低,容易生成表面粗糙、 附著性、顯影邊際之降低及圖案形狀之不良。 經濟部智慧財產局員工消費合作社印製 如此’以向來的顏料分散法製作的彩色濾光片,製造 步驟係較複雜’又有僅因應對影像之高精細化的要求之解 析度或尺度精確度不足等的問題。 又’含有受阻酚系抗氧化劑之感光性樹脂組成物係爲 人所知的’於日本特開平1 1 一 1 〇 3 1 6 8號公報等內 有記載。然而’此係與保持在加濕狀態之耐熱或絕緣可靠 性’同時可形成微小的貫穿孔之絕緣層的多層佈線板之製 -5- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 574611 A7 B7 五、發明説明(3) (請先閲讀背面之注意事項再填寫本頁) 造方法有關者,圖案尺度精確度或圖案與基板之附著性被 要求的彩色濾光片之製造方法有關者,不僅與欲解決的課 題不同,在不須顏料之點上,亦與組成物不同。 發明欲解決的課顆 本發明之目的係提供解決上述課題,圖案尺度安定性 優越,且顯像邊際,圖案附著性良好的彩色濾光片用樹脂 組成物及其製造方法。 解決課穎而樑的丰段 本發明人等經精心硏究之結果,若採用包含(A )受 阻酚系抗氧化劑,(B )光聚合引發劑,(C )感光性樹 脂成分及(D )分散顏料爲必須成分之彩色濾光片用樹脂 組成物時,發現在不犧牲顯影邊際,圖案附著性下,可提 供圖案尺度精確度優越的彩色濾光片,以至完成本發明。 亦即,本發明係有關包含(A )受阻酚系抗氧化劑, 經濟部智慧財產局員工消費合作社印製 (B )光聚合引發劑,(C )感光性樹脂成分、感光性單 體及感光性寡聚體而成之群體選擇的至少一種之感光性樹 脂成分及(D )分散顏料爲必須成分之彩色濾光片用著色 感光性樹脂組成物。 又’本發明係將含有(A )受阻酚系抗氧化劑,(B )光聚合引發劑,(C )感光性樹脂成分及(D )分散顏 料爲必須成分之著色感光性樹脂組成物塗布於透明基板上 至成指定的乾燥膜厚並予乾燥後,以(a )利用紫外線曝 本紙張尺度適用中國國家標率(CNS ) A4規格(21〇X;297公釐) ~' 574611 A7 B7 五、發明説明(4) (請先閲讀背面之注意事項再填寫本頁) 光裝置之曝光,(b )利用鹼水溶液之顯影之各步驟爲必 須步驟之彩色濾光片之製造方法。又,本發明係(A )受 阻酚系抗氧化劑之配合率在(B )光聚合引發劑之5〜 6 0重量%之範圍,且(B)光聚合引發劑之配合率在( C )感光性樹脂之5〜9重量%之範圍的前述彩色濾光片 之製造方法。 至於受阻酚系抗氧化劑(以下亦稱作(A )成分), 可使用公知的受阻酚系抗氧化劑,惟代表上可舉出:三乙 二醇雙〔3 - (3 -第三丁基一 5 -甲基一 4 —羥基苯基 )丙酸酯〕、1 ,6 -己二醇一雙〔3 — (3 ,5 -二第 三丁基-4-羥基苯基)丙酸酯〕、季戊四醇基一肆〔3 一(:3,5 -二第三丁基一 4 一羥基苯基)丙酸酯〕、十 八烷基一 3 - (3,5 —二第三丁基一 4 一羥基苯基)丙 酸酯、1 ,3 ,5 —三甲基—2 ,4 ,6 —參(3 ,5 — 二第三丁基一 4 一羥基苄基)苯、2,6 -二第三丁基一 4 一乙基酚、2 ,2’ —亞甲基雙(4 —甲基一 6 -第三 丁基酚)、4 ,4’ 一硫代—雙(3 -曱基一 6 —第三丁 經濟部智慧財產局員工消費合作社印製 基酚)、4,4’ 一亞丁基一雙(3 —甲基一 6 —第三丁 基酚)、1 ,1 ,3 -參(2 -曱基一 4 一羥基一 5 —第 三丁基苯基)丁烷、1,3,5 -參(4 一羥基苄基)苯 及肆〔亞曱基—3 -(3,5’ —二第三丁基—4’ 一羥 基苯基丙酸酯)甲烷等,此等係可使用一種或二種以上, 以三乙二醇—雙〔3— (3 —第三丁基—5 —甲基一 4 — 經基苯基)丙酸酯〕、1 ,6 —己二醇一雙一〔3 -(3 ^紙張中國國家標率(CNS ) A4規格(210X297公釐) 574611 A7 B7 五、發明説明(5) (請先閲讀背面之注意事項再填寫本頁) ’ 5 -二第三丁基一 4 -羥基苯基)丙烯酸〕、季戊四醇 基一肆〔3 -( 3,5 -二—第三丁基一 4 一羥基苯基) 丙酸酯〕、十八烷基一 3 -(3,5 -二第三丁基一 4 一 羥基苯基)丙酸酯爲尤宜。 至於光聚合引發劑(以下亦稱作(B )成分),雖可 使用公知的光聚合引發劑,惟代表上可舉出:苯乙酮、2 ’2 -一乙氧基苯乙酮、對二甲基苯乙酮、對第三丁基 苯乙酮等的苯乙酮類、二苯基酮、2 -氯二苯基酮、P, P’ —雙二甲基胺基二苯基酮、3,3, ,4,4’ —四 (第三丁基一過氧基羰基)二苯基酮、4,4’ 一二乙基 胺基二苯基酮等的二苯基酮類、苯偶因甲基醚、苯偶因異 丙基醚、苯偶因丁基醚等苯偶因醚類、2 -甲基一 1一〔 4 一(甲基硫代)苯基〕一 2 -嗎啉基丙酮一 1 ,1 ,2 一苄基一 2 -二甲基胺基一 1 一(4 一嗎啉基苯基)一丁 酮一 1 ,雙(2 ,4,6 -三甲基苯曱醯基)苯基—膦氧 化物等的α -胺基烷基苯酮類、N -苯基甘胺酸等甘胺酸 類、2 ,4 一三氯甲基一(二吡咯基)—6 -三畊、2 , 經濟部智慧財產局員工消費合作社印製 4 一三氯甲基一 (4’ 一甲氧基苯乙烯基)—6 —三畊、 2,4 —三氯甲基一 (4, 一甲氧基苯乙烯基)一6 —三 哄等的三哄類等,此等可使用一種或二種以上。 感光性樹脂成分(以下亦稱作(c )成分)係感光性 樹脂、寡聚物或單體,作用成於(a ) 1分子中具有二個 以上的乙烯性不飽和基,有助於交聯反應者,及(b ) 1 分子中僅具有乙烯性不飽和基之反應性稀釋劑者。 -8- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 574611 A7 —- --〜B7 ____ 五、發明説明(6) (請先閲讀背面之注意事項再填寫本頁) 至於(a )係鍵結多元_及^^不飽和羧酸而得者 ’例如可舉出:(甲基)Η烯酸二乙二醇酯(二丙烯酸酯 或二甲基丙烯酸酯之蒽’以下相同)、二(甲基)丙烯酸 二乙二醇酯、二(甲基)芮烯酸四乙二醇酯、二(甲基、) 丙烯酸三羥甲基丙烷酯、二(甲基)丙烯酸三羥甲基丙烷 酯、三(甲基)丙烯酸三羥甲基丙烷酯、(甲基)丙烯酸 1 ,3 —丙二醇酯、(甲基)丙烯酸1 ,3 -丁二醇酯、 經濟部智慧財產局員工消費合作社印製 四(甲基)丙烯酸季戊四醇酯、六(甲基)丙烯酸二季戊 四醇酯、五(甲基)丙烯酸二季戊四醇酯、2 ,2 -雙( 4 —丙烯氧基二乙氧基苯基)丙烷、2 ,2 —雙(4 一甲 基丙烯氧基乙氧基苯基)丙烷、於新中村化學(股)製造 商品名ΒΡΕ - 500 (2 ,2 —雙(4 —甲基丙烯氧基 聚乙氧基苯基)丙烷之混合物)等,含有縮水甘油基之化 合物加成α,/? -不飽和羧酸而得者,例如三(甲基)丙 烯酸三羧曱基丙烷三縮水甘油基醚酯、雙酚Α二縮水甘油 基醚二(甲基)丙烯酸酯、雙酚苐之二縮水甘油基醚化物 之丙烯酸加成物(新日鐵化學(股)製造的A S F 4 0 0 )等,不飽和醯胺,例如亞甲雙丙烯醯胺、1 ,6 -六亞 甲雙丙烯基醯胺等,乙烯基醚、例如琥珀酸二乙烯基酯、 己二酸二乙烯基酯、二乙烯基苯二甲酸酯、二乙烯基對苯 二甲酸酯、二乙烯基苯一 1 ,3 -二磺酸酯等。 再者,以酸酐將由多元醇及^,/3不飽和竣酸鍵結而 得者予以聚縮合並予寡聚體化者,例如可舉出雙酚莽之二 縮水甘油基醚之丙烯酸加成物以雙苯基四羧酯予以聚縮合 -9 - 本紙張尺度適用中國國家標隼(CNS ) A4規格(210 X 297公釐) 574611 A7 _ B7 五、發明説明(7) (請先閱讀背面之注意事項再填寫本頁) 而得的寡聚物(新日鐵化學(股)製造的V 2 5 9及 V 3 0 1 )。於此寡聚物中存在著不參予聚縮合的羧酸, 故在提高鹼顯影性方面係有效的。 又至於(b ),可例示出N -乙烯基吡咯烷酮、安息 香酸乙烯酯、醋酸乙烯酯等單乙烯基化合物。 經濟部智慧財產局員工消費合作社印製 至於分散顏料(以下亦稱作(D )成分),可使用通 常在此領域所使用的分散顏料,惟代表性的可舉出下述顏 料。在紅、橙色系,可舉出:屬於縮合多環芳香族之蒽醌 基紅、蒽嵌蒽(anthathrone )紅、四氯硫代靛藍、驼紅、茈 緩慢紅、茈褐紅、咱吖酮紅、喹吖酮洋紅、二酮基吡咯基 吡咯紅、屬於不溶性偶氮系之永久紅R、dianiolin橙、艷 胭脂紅F B、永久紅F S R K、吡哩啉酮橙、吡tJ坐啉酮紅 、屬於溶性偶氮系之永久紅2 B、色澱紅R、棗紅1 〇 B 、邦褐紅中色(Bon Maroon Medium )、邦褐紅輕色等。至 於黃色系。可舉出;屬於單偶氮系之堅牢黃G、苯并咪唑 酮黃H G、屬於二重氮系之永久黃、屬於蒽系之蒽基吡嘧 啶黃、黃蒽酮黃、屬於金屬錯合物系之偶氮甲川系銅錯合 物黃、亞硝基系鎳錯合物黃、鎳偶氮黃、屬於奎酞酮系之 奎酞酮黃等。至於綠色系、可舉出:氯化酞菁綠、氯溴化 酞菁綠等,至於藍色系,可舉出酞菁藍、銅酞菁藍、陰丹 士林藍等。至於紫色系、可舉出二噚畊紫、喹吖酮紫等的 顏料。 此等分散顏料,係使用由採用分散劑使分散或共分散 於溶劑或前記樹脂成分溶液中者選出的一種以上之組合, 本紙張尺度適用中國國家標準(CNS ) Α4規格(210Χ297公釐) ~ ' -- 574611 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明(8) 丨隹且爲使用監色系分散顏料,尤指使用献菁藍分散顏料。 又視必要時,可配合(C )成分以外的樹脂成分(以 下亦稱作(E )成分)。 例如,以使鹼顯像性提高的目的,可配合鹼可溶性樹 月旨’ (E )成分,宜爲於分子中具有羧基或酚性羥基之酸 丨生基者又知終_基亦可具有乙傭性不飽和基。惟表示感 光性者,係被處理作(C )成分。 至於(E )成分之具體例,可採用(甲基)丙烯酸酯 及(甲基)丙烯酸之共聚物、(甲基)丙烯酸酯及(甲基 )丙烯酸與此等可共聚合的乙烯基單體之共聚物等。至於 在此所使用的(甲基)丙烯酸酯、例如可舉出:(甲基) 丙烯酸丁酯、(甲基)丙烯酸2 一乙己基酯、(甲基)丙 烯酸苄基酯、(甲基)丙烯酸四氫呋喃基酯、(甲基)丙 烯酸二甲酯、(甲基)丙烯酸二乙酯、(甲基)丙烯酸縮 水甘油基酯、(甲基)丙烯酸2,2,2 -三氟乙基酯、 (甲基)丙烯酸2,2,3,3 -四氟丙基酯丙烯醯胺、 二丙酮丙烯醯胺等。又至於可與(甲基)丙烯酸酯或(甲 基)丙烯酸共聚合的乙烯基單體,可舉出苯乙烯、乙烯基 甲苯等。其他亦可舉出苯乙烯一順丁烯二酸酐共聚物之部 分酯、二醇及酸二酸水合物之共聚物之部分酯、不飽和聚 酯之部分酯等的具有羧基之酯寡聚物作爲(E )成分。 又至於其他的樹脂成分,除上述成分外,可添加與此 等相容的光聚合性及鹼可溶性不相關的樹脂成分,例如環 氧樹脂、松香樹脂、醇酸樹脂等。 (請先閲讀背面之注意事項再填寫本頁) •裝-574611 A7 __ B7 V. Description of the invention (1) The technical field of the invention (please read the precautions on the back before filling this page) This invention relates to the resin composition for color filters and the precision of the pattern using the composition Manufacturing method of color filter with excellent degree. Conventional technology A color liquid crystal display device is composed of a liquid crystal portion and a color filter that control the amount of light transmission or reflection. However, in the method for manufacturing the color filter, colored pigment particles are dispersed in the photosensitive A method in which red, green, and blue pixels and a black matrix of a resin composition are formed on a glass substrate is applicable. Although the color filter prepared by this method has excellent heat resistance and light resistance, it has a high aperture ratio in recent years in response to the demand for low power consumption of portable display devices such as notebook computers. The Department of Chemistry is required. Therefore, the red, blue, and green pixels on the color filter are from 2000 to 300 // m to 100 // ΓΠ, and the black matrix is from 20 // m to 1 0 // m. With thinning, the photosensitive resin material is required to have a high scale accuracy. Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, will be used in the S accountant mixture. The resin is made of benzyl methacrylate-methacrylic acid copolymer with alkali solubility, and multi-functional acrylate resin is used for photosensitive resin. The resin composition is known. With this colored photosensitive resin composition, when a pattern mask is installed and exposed to ultraviolet light with a high-pressure mercury lamp, the exposed portion without the mask becomes a hardened coating film. Next, it is necessary to perform a developing operation by an alkaline aqueous solution. The uncured coating film of the unexposed portion that has been masked will elute, so that a color filter having a desired pixel pattern can be formed. However, the coloration of this paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 574611 A7 ____B7 V. Description of the invention (2) (Please read the precautions on the back before filling this page) Photoresist composition In the presence of oxygen, the curing reaction becomes insufficient, and the resolution or dew sensitivity of the pattern is reduced. Therefore, a step of forming an oxygen blocking film before exposure is necessary, and a step of peeling and blocking the oxygen film before development becomes necessary, and the increase of this manufacturing step becomes a new issue. In Japanese Patent Application Laid-Open No. 1-1 5 2 4 4 9, in order to solve the above-mentioned problems and provide pigment concentration, and strive for good color reproducibility, and to prevent the decrease in sensitivity, it is disclosed that halomethylazadiazole systems Examples of use of compounds and halomethyl-s-cultivated compounds. However, although these compounds prevent the surface flatness from being reduced by the above-mentioned reaction of oxygen, the accuracy of the pattern scale is still not at a satisfactory level. In order to obtain a fine pattern with superior scale accuracy, it is necessary to optimize the type or amount of the photopolymerization initiator in the photopolymerizable composition. For thin films such as color phosphors, it is generally possible to reduce the amount of photopolymerization initiator to reduce the sensitivity when the pattern thin line is thick. However, it is possible to adjust the correct line width. However, due to the decrease in sensitivity, rough surface and Poor adhesion, reduced development margin, and poor pattern shape. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed such a color filter made with the conventional pigment dispersion method, the manufacturing steps are more complicated, and the resolution or scale accuracy is only due to the requirements for high definition of the image. Insufficient issues. Also known as "a photosensitive resin composition containing a hindered phenol-based antioxidant" is described in Japanese Patent Application Laid-Open No. 11-1083 168 and the like. However, 'this system and the heat resistance or insulation reliability maintained in a humidified state' can be used to form a multilayer wiring board with an insulating layer of tiny through holes at the same time. -5- This paper size applies to China National Standard (CNS) A4 (210X297). (Mm) 574611 A7 B7 V. Description of the invention (3) (Please read the precautions on the back before filling this page) For the manufacturing method, the accuracy of the pattern scale or the adhesion of the pattern to the substrate is required for the color filter. The manufacturing method is not only different from the problem to be solved, but also different from the composition in that no pigment is required. SUMMARY OF THE INVENTION The object of the present invention is to provide a resin composition for a color filter that solves the above-mentioned problems, has excellent pattern scale stability, and has a good development margin and good pattern adhesion, and a method for producing the same. The result of careful research by the present inventors and others, if the present inventors and others have carefully studied, if (A) a hindered phenol-based antioxidant, (B) a photopolymerization initiator, (C) a photosensitive resin component, and (D) When the dispersing pigment is a resin composition for color filters which is an essential component, it was found that without sacrificing the development margin and pattern adhesion, a color filter having excellent pattern scale accuracy can be provided, and the present invention has been completed. That is, the present invention relates to (A) a hindered phenol-based antioxidant, (B) a photopolymerization initiator printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, (C) a photosensitive resin component, a photosensitive monomer, and photosensitivity. The colored photosensitive resin composition for color filters in which at least one of the photosensitive resin component and the (D) dispersed pigment selected by the oligomer group is an essential component. Furthermore, the present invention applies a colored photosensitive resin composition containing (A) a hindered phenol-based antioxidant, (B) a photopolymerization initiator, (C) a photosensitive resin component, and (D) a disperse pigment as essential components to a transparent coating. After the substrate has reached the specified dry film thickness and dried, (a) use ultraviolet light to expose the paper size to the Chinese National Standard (CNS) A4 specification (21〇X; 297 mm) ~ '574611 A7 B7 V. Description of the invention (4) (Please read the precautions on the back before filling out this page) Exposure of optical devices, (b) Each step of development using an alkaline aqueous solution is a necessary method for manufacturing a color filter. In addition, the compounding ratio of the hindered phenol-based antioxidant of the present invention (A) is in a range of 5 to 60% by weight of the (B) photopolymerization initiator, and the compounding ratio of the (B) photopolymerization initiator is (C). A method for producing the aforementioned color filter in a range of 5 to 9% by weight of the resin. As for the hindered phenol-based antioxidant (hereinafter also referred to as (A) component), a known hindered phenol-based antioxidant can be used, but representative examples include triethylene glycol bis [3-(3-third butyl-1 5-methyl-4-hydroxyphenyl) propionate], 1,6-hexanediol-bis [3- (3,5-di-third-butyl-4-hydroxyphenyl) propionate], Pentaerythritol group [3-((3,5-di-tertiary-butyl-4 4-hydroxyphenyl) propionate], octadecyl- 3- (3,5-di-tertiary-butyl-4) Hydroxyphenyl) propionate, 1,3,5-trimethyl-2,4,6—ginseng (3,5-di-third-butyl-4 4-hydroxybenzyl) benzene, 2,6-di Tributyl-1 4-ethylphenol, 2,2'-methylenebis (4-methyl-6-third-butylphenol), 4,4'-thio-bis (3-fluorenyl-6 —Printed base phenol by the Consumer Cooperative of the Intellectual Property Bureau of the Third Ministry of Economic Affairs, 4,4′-butylene-bis (3-methyl-6-third butylphenol), 1, 1, 3-( 2 -fluorenyl-4 -hydroxy-5 -third butylphenyl) butane, 1,3,5- See (4-hydroxybenzyl) benzene and [[Methyleneidene-3- (3,5'-di-third-butyl-4'-hydroxyphenylpropionate) methane, etc., these can use one or Two or more kinds, with triethylene glycol-bis [3- (3-third butyl-5-methyl-1,4-methylphenyl) propionate], 1,6-hexanediol bis [ 3-(3 ^ Paper China National Standards (CNS) A4 Specification (210X297 mm) 574611 A7 B7 V. Invention Description (5) (Please read the notes on the back before filling this page) '' 5-二三 丁-4-hydroxyphenyl) acrylic acid], pentaerythritol group [3--(3,5-di-third-butyl-4 4-hydroxyphenyl) propionate], octadecyl 3-(3 Of these, 5-di-tert-butyl-4 monohydroxyphenyl) propionate is particularly preferred. As for the photopolymerization initiator (hereinafter also referred to as (B) component), although known photopolymerization initiators can be used, representative examples include acetophenone, 2'2-monoethoxyacetophenone, Acetophenones such as dimethylacetophenone, p-tert-butylacetophenone, diphenylketone, 2-chlorodiphenylketone, P, P '—bisdimethylaminodiphenylketone , 3,3,, 4,4'-tetrakis (third butyl-peroxycarbonyl) diphenyl ketone, diphenyl ketones such as 4,4'-diethylaminodiphenyl ketone, Benzoin methyl ether, Benzoin isopropyl ether, Benzoin butyl ether and other benzoin ethers, 2-methyl-1 1 [4 ((methylthio) phenyl]-2- Morpholinylacetone-1,1,2-benzyl-2dimethylamino-1 1- (4-morpholinylphenyl) monobutanone-1, bis (2,4,6-trimethyl Α-Aminoalkyl phenones such as phenyl-phosphine oxide, Glycines such as N-phenylglycine, 2,4-trichloromethyl- (dipyrrolyl) — 6-Sangen, 2, printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 'monomethoxystyryl) -6-trimethyl, 2,4-trichloromethyl- (4, monomethoxystyryl) -6-trimethylol, etc. One or more kinds may be used. A photosensitive resin component (hereinafter also referred to as (c) component) is a photosensitive resin, oligomer, or monomer that acts on (a) one or more molecules having two or more ethylenically unsaturated groups, which is helpful for cross-linking. (B) Reactive diluents with only ethylenically unsaturated groups in the molecule. -8- This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 574611 A7 —--~ B7 ____ 5. Description of the invention (6) (Please read the notes on the back before filling this page) As for (A) Those obtained by bonding polyvalent and unsaturated carboxylic acids, for example, (meth) pinenoic acid diethylene glycol (diacrylate or anthracene of dimethacrylate) or less Identical), diethylene glycol di (meth) acrylate, tetraethylene glycol di (meth) areneate, trimethylolpropane di (meth) acrylate, trimethyl di (meth) acrylate Methylolpropane, trimethylolpropane tri (meth) acrylate, 1,3-propanediol (meth) acrylate, 1,3-butanediol (meth) acrylate, Intellectual Property Office of the Ministry of Economic Affairs Employee Consumer Cooperative printed pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipentaerythritol penta (meth) acrylate, 2,2-bis (4-propenyloxydiethoxybenzene Propyl), propane, 2,2-bis (4-methacryloxyethoxyphenyl) Addition of glyceryl-containing compounds such as alkane, trade name BPE-500 (mixture of 2,2-bis (4-methacryloxypolyethoxyphenyl) propane) manufactured by Shin Nakamura Chemical Co., Ltd. α, /?-Unsaturated carboxylic acids, such as tricarboxymethylpropane triglycidyl ether tris (meth) acrylate, bisphenol A diglycidyl ether di (meth) acrylate, bisphenol Acrylate adducts of hydrazone diglycidyl etherate (ASF 4 0 0 manufactured by Nippon Steel Chemical Co., Ltd.), etc., unsaturated fluorene amines, such as methylene bispropenylamine, 1,6-hexamethylene Dipropenylamine and the like, vinyl ethers such as divinyl succinate, divinyl adipate, divinyl phthalate, divinyl terephthalate, divinylbenzene 1,3-disulfonate and the like. Furthermore, those obtained by bonding polyhydric alcohols and ^, / 3 unsaturated unsaturated acids with acid anhydrides are polycondensed and combined with oligomerized ones. For example, an acrylic acid addition of diglycidyl ether of bisphenol manganese may be mentioned. The product is polycondensed with bisphenyltetracarboxylate-9-This paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) 574611 A7 _ B7 V. Description of the invention (7) (Please read the back first For the matters needing attention, fill in this page again) (V 2 5 9 and V 3 0 1 manufactured by Nippon Steel Chemical Co., Ltd.). Since the oligomer contains a carboxylic acid which is not involved in polycondensation, it is effective in improving alkali developability. As for (b), monovinyl compounds such as N-vinylpyrrolidone, vinyl benzoate, and vinyl acetate can be exemplified. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs As for the disperse pigments (hereinafter also referred to as (D) component), disperse pigments commonly used in this field can be used, but the following pigments are representative. Examples of the red and orange colors include anthraquinone red, anthrathrone red, tetrachlorothioindigo, camel red, osmanthus red, osmanthus red, and acridine, which are condensed polycyclic aromatics. Red, quinacridone magenta, diketopyrrolyl pyrrole red, permanent red R which is an insoluble azo series, dianiolin orange, carmine FB, permanent red FSRK, pyrazolinone orange, pyritinone red, Permanent red 2 B, lake red R, bayonet 10 B, Bon Maroon Medium, Bon Maroon Medium, etc. which are soluble azo series. As for the yellow line. Examples include: Fast Yellow G, which belongs to the monoazo system, HG, benzimidazolone yellow, Permanent yellow, which belongs to the diazo system, Anthracene pyrimidine yellow, anthraxone yellow, which belongs to the anthracene system, and metal complexes. The azomethine copper complex yellow, the nitroso nickel complex yellow, the nickel azo yellow, and the quinolone yellow belonging to the quinolone family. Examples of the green system include chlorinated phthalocyanine green, chlorobromide phthalocyanine green, and the like, and examples of the blue system include phthalocyanine blue, copper phthalocyanine blue, and indanthrene blue. As for the purple type, pigments such as Niigata Violet and Quinacridone Violet can be mentioned. These dispersing pigments are a combination of one or more selected by using a dispersant to disperse or co-disperse in a solvent or a solution of the resin component described above. The paper size applies to the Chinese National Standard (CNS) A4 specification (210 × 297 mm) ~ '-574611 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (8) 丨 It is a supervising color dispersing pigment, especially a blue-dispersing pigment. If necessary, a resin component (hereinafter also referred to as (E) component) other than the (C) component may be blended. For example, for the purpose of improving the alkali imaging property, an alkali-soluble tree component (E) component may be added, and it is preferred that the acid has a carboxyl group or a phenolic hydroxyl group in the molecule, and the terminal group may also have A second-serving unsaturated group. Those who express photosensitivity are treated as (C) component. As specific examples of the (E) component, copolymers of (meth) acrylate and (meth) acrylic acid, (meth) acrylate and (meth) acrylic acid, and copolymerizable vinyl monomers can be used. Copolymers, etc. Examples of the (meth) acrylate used herein include: butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, benzyl (meth) acrylate, and (meth) Tetrahydrofuryl acrylate, dimethyl (meth) acrylate, diethyl (meth) acrylate, glycidyl (meth) acrylate, 2,2,2-trifluoroethyl (meth) acrylate, (Meth) acrylic acid 2,2,3,3-tetrafluoropropyl acrylamide, diacetone acrylamide and the like. Examples of the vinyl monomer copolymerizable with (meth) acrylate or (meth) acrylic acid include styrene and vinyltoluene. Other examples include ester oligomers having carboxyl groups such as partial esters of styrene-maleic anhydride copolymers, partial esters of copolymers of diols and acid diacid hydrates, and partial esters of unsaturated polyesters. As (E) component. As for other resin components, in addition to the above components, resin components which are not compatible with the photopolymerizability and alkali solubility, such as epoxy resin, rosin resin, and alkyd resin, can be added. (Please read the notes on the back before filling out this page)

、1T 本紙張尺度適用中國國家標隼(CNS ) Α4規格(210Χ297公釐) -11 - 574611 A7 B7 五、發明説明(9) (請先閲讀背面之注意事項再填寫本頁) 受阻酚系抗氧化劑(A ),係以捕捉在光聚合引發劑 (B )發生的自由基之內的過量成分,使圖案尺度精確度 提高者。因此,(A )成分之配合率係以(B )成分之5 〜6 0重量%之範圍的一定比率配合。且本發明所謂(a ).成分之配合率(重量% ),係以A / B X 1 〇 〇 (惟A 及B係(A )成分及(B )成分之配合量(重量部)予以 計算者。 局壓水銀燈之照度若增強時,則光聚合引發劑之自由 基發生量變多。由而,依照度之不同,需最適量添加受阻 酚系抗氧化劑之添加量係必要的。宜爲設成使紫外線曝光 裝置之I線照度及(A )成分之配合率(重量% )滿足下 述關係。 ① I線如度爲5〜1 5 m W/ c m 2之時,(A )之配 合率5〜3 0重量%, ② I線照度爲1 5〜4 0 m W/ c m 2,( A )之配合 率3〇〜6 0重量%, 經濟部智慧財產局員工消費合作社印製 光聚合引發劑(Β )之配合量,係使與本著色感光性 樹脂組成物之光硬化反應所用的紫外線曝光裝置之照度成 反比例並予設定即可。亦即,於採用5〜1 5 m W/ c m 2 之低照度的紫外線曝光裝置時,由促進硬化反應之必要, 以將(B )成分之配合率設成感光性樹脂成分(c )之 6.0〜9·0重量%之較多的配合量爲宜。且,(B) 成分之配合率(重量% ),係B / C X 1 〇 〇 (惟,B及 C係(B)成分及(C)成分之配合量(重量分))。 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) -12- 574611 A7 B7 五、發明説明( (請先閲讀背面之注意事項再填寫本頁) 再者,此時之膜厚係於膜厚爲0 . 5〜2 . 0 # m薄 膜時,(B)成分之配合率設成6 _ 〇〜7 . 0重量%, 2 . 〇〜4 · 0//m厚膜時,(B)成分之配合率設成 7.0〜9.0重量%爲更宜的。. 又,於採用1 5〜40mW/cm2未滿的高照度之紫 外線曝光裝置時,由抑制硬化反應之必要,光聚合引發劑 (B )之配合率設成5 · 0〜7 _ 0重量%之較少的配合 量爲宜,再者此時之膜厚爲0 · 5〜2 . 0 // m之薄膜時 ’在(B)成分之配合率設成5 · 0〜6 · 0重量%, 2.〇〜4.0#m厚膜時,(B)成分之配合率設成 6.0〜7.0重量%爲更宜的。 (C )感光性樹脂成分之配合率係除由著色感光性樹 脂組成物之塗布特性或圖案膜厚之要求値可予各種規定外 ’由所使用的感光性樹脂之種類亦會變化,惟一般於溶劑 亦包含的著色感光性樹脂組成物中,以設成1 0〜3 ◦重 量%之範圍爲宜。 經濟部智慧財產局員工消費合作社印製 (D )分散顏料之配合率,亦依所用的顏料之種類或 所要求的彩色濾光片之色純度而不同,惟一般對樹脂成分 之(C )成分及(E )成分之合計的比率,亦即,顏料重 量/樹脂成分合計之比(以下稱作P / B )設爲0 . 3〜 〇 . 8之範圍較宜。 本發明之著色感光性樹脂組成物,爲使塗布容易,以 使溶解或稀釋於溶劑內爲宜。至於因此而使用的溶劑,例 如可舉出乙二醇單丁基醚、乙二醇單己基醚、乙二醇單苯 本紙張尺度適用中國國家標準(CNS ) A4規格(21〇><297公釐) ~ 574611 Α7 Β7 五、發明説明(1) (請先閱讀背面之注意事項再填寫本頁) 基醚、丙二醇單甲基醚、丙二醇單苯基醚、二乙二醇二甲 基醚、三乙二醇二甲基醚等各種二醇醚類、丙酮、甲乙基 酮、甲異丁基酮、環己酮、異佛爾酮、Pentoquinon、N -甲基吡咯烷酮、〃- 丁內酯等的酮類、丁基醚、二噚烷、 四氫呋喃等醚類、甲氧基丁醇、二丙酮醇、丁醇、異丙醇 等的醇類、甲苯、二甲苯、己烷等的烴類、醋酸乙酯、醋 酸丁酯、安息香酸乙酯等的酯類等。藉由採用此種溶劑之 一種或二種以上使溶解、混合或分散,成爲適於塗布的均 勻溶液狀之組成物。 又,於本發明之著色感光性樹脂組成物內,視必要時 可添加界面活性劑、偶合劑、塡充劑、可塑劑、接著促進 劑等添加物。 發明之實施形態 通常,抗氧化劑係具有有效的捕捉自由基之作用,由 光聚合引發劑或樹脂引起的自由基種之情形,聚合反應可 予抑制且圖案之線粗度可予抑制。 經濟部智慧財產局員工消費合作社印製 最適量添加抗氧化劑時,雖然較圖案之頂部寬度可控 制底部寬度之粗度的作用可予觀察出,然而此爲容易接觸 至大氣中的氧之圖案表面部係容易引起由於過氧基自由基 引起的氧禁止反應,在不添加抗氧化劑的系因容易生成圖 案表面粗糙、頂部寬度之過度的減少等的問題相比,可被 相測爲若添加抗氧化劑時,則捕捉過氧基自由基並抑制氧 禁止反應之作用。 本紙張尺度適用中國國家標奉(CNS ) A4規格(210X297公楚1 _ λ A _ 574611 A7 _____B7_ 五、發明説明( (請先閲讀背面之注意事項再填寫本頁) 其次,說明已採用本著色感光性樹脂組成物之彩色濾 光片之製造法。首先,將本著色感光性樹脂組成物,利用 旋塗器、棒塗器、噴塗器等的塗布機或印刷法等予以塗布 於玻璃等的基板上至指定厚度,予以乾燥而得著色塗板。 於此塗板上介由光罩,採用超高壓水銀燈、高壓水銀燈、 鹵化金屬燈、遠紫外線燈等的光源並進行曝光,使塗膜中 之感光性樹脂光硬化。其次使已曝光完畢的塗板曝露於碳 酸鈉等的鹼金屬碳酸鹽、氫氧化鈉等的鹼金屬氫氧化物、 氫氧化四甲基銨等的有機鹼等之鹼水溶液之流水或淋幕中 並進行鹼顯影及水淸洗,並形成圖案於基板上。其次,烘 烤圖案形成基板並使圖案中的樹脂成分加熱硬化。對紅、 綠、藍之各著色感光性樹脂組成物重複此操作三次並使彩 色濾光片製作。且在本發明,須爲塗布,乾燥步驟、曝光 步驟及鹼顯影步驟,惟至於其他步驟,亦可設成另外的方 法。 實施例 經濟部智慧財產局員工消費合作社印製 以下,基於實施例及比較例,具體的說明本發明。在 此實施例、比較例之彩色濾光片之製造所用的原料及簡稱 後係如下所述。 C感光性樹脂成分)、 1T This paper size is applicable to China National Standard (CNS) A4 specification (210 × 297 mm) -11-574611 A7 B7 V. Description of the invention (9) (Please read the precautions on the back before filling this page) The oxidant (A) is used to capture excess components within the free radicals generated by the photopolymerization initiator (B) and improve the accuracy of the pattern scale. Therefore, the blending ratio of the (A) component is blended at a certain ratio in the range of 5 to 60% by weight of the (B) component. And in the present invention, the so-called (a). The compounding ratio (% by weight) of the component is calculated by using A / BX 100 (but A and B are (A) component and (B) component (weight portion)) If the illuminance of the partial pressure mercury lamp is increased, the amount of free radicals generated by the photopolymerization initiator will increase. Therefore, depending on the degree, the optimum amount of hindered phenolic antioxidants is necessary. It should be set to The I-ray illuminance and the blending ratio (% by weight) of the (A) component of the ultraviolet exposure device satisfy the following relationship: ① When the I-line degree is 5 to 15 m W / cm 2, the blending ratio of (A) is 5 ~ 30% by weight, ②I-line illumination is 15 ~ 40mW / cm2, (A) is 30% ~ 60% by weight. The photopolymerization initiator is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The compounding amount of (B) may be set in inverse proportion to the illuminance of the ultraviolet exposure device used in the photocuring reaction of the colored photosensitive resin composition, and may be set. That is, 5 to 15 m W / cm 2 is used. It is necessary to promote the hardening reaction when the low-illuminance ultraviolet exposure device is used, so that the component (B) The blending ratio is preferably a large blending amount of 6.0 to 9.0 wt% of the photosensitive resin component (c). The blending ratio (wt%) of the component (B) is B / CX 1 0.00 ( However, B and C are the blending amount (weight) of (B) and (C) components. This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) -12- 574611 A7 B7 V. Invention Explanation ((Please read the precautions on the back before filling in this page)) Furthermore, the film thickness at this time is when the film thickness is 0.5 ~ 2. 0 # m film, the compounding ratio of (B) component is set to 6 _ 〇 ~ 7.0 wt%, 2. 〇 ~ 4 · 0 // m thick film, it is more suitable to set the blending ratio of component (B) to 7.0 ~ 9.0 wt%. Also, 15 ~ In the case of a high-illuminance ultraviolet exposure device under 40 mW / cm2, it is necessary to set the blending ratio of the photopolymerization initiator (B) to 5 · 0 ~ 7_0% by weight in order to suppress the hardening reaction. In addition, when the film thickness at this time is 0 · 5 ~ 2. 0 // m, the compounding ratio of the component (B) is set to 5 · 0 ~ 6 · 0% by weight, 2.〇 ~ 4.0 # m For thick film, (B) It is more preferable to set it to 6.0 to 7.0% by weight. (C) The blending ratio of the photosensitive resin component is in addition to the requirements of the coating characteristics of the colored photosensitive resin composition or the thickness of the pattern film. Various regulations can be given. The type of photosensitive resin may also vary, but it is generally appropriate to set the range of 10 to 3% by weight in the coloring photosensitive resin composition also included in the solvent. The blending ratio of (D) disperse pigments printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs also varies according to the type of pigment used or the color purity of the required color filter, but generally the (C) component of the resin component The ratio of the total of the (E) component, that is, the ratio of the total weight of the pigment to the total amount of the resin component (hereinafter referred to as P / B) is preferably in a range of 0.3 to 0.8. The colored photosensitive resin composition of the present invention is preferably applied so as to be dissolved or diluted in a solvent to facilitate application. As for the solvent used for this purpose, for example, ethylene glycol monobutyl ether, ethylene glycol monohexyl ether, and ethylene glycol monobenzene can be sized according to the Chinese National Standard (CNS) A4 specification (21〇 > < 297 mm) ~ 574611 Α7 Β7 V. Description of the invention (1) (Please read the notes on the back before filling this page) Basic ether, propylene glycol monomethyl ether, propylene glycol monophenyl ether, diethylene glycol dimethyl Various glycol ethers such as ether, triethylene glycol dimethyl ether, acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, isophorone, Pentoquinon, N-methylpyrrolidone, fluorene-butane Ketones such as esters, ethers such as butyl ether, dioxane, tetrahydrofuran, alcohols such as methoxybutanol, diacetone alcohol, butanol, isopropanol, hydrocarbons such as toluene, xylene, and hexane Esters, such as ethyl acetate, butyl acetate, ethyl benzoate, and the like. By using one or two or more of these solvents, the composition is dissolved, mixed or dispersed to form a uniform solution suitable for coating. In the colored photosensitive resin composition of the present invention, additives such as a surfactant, a coupling agent, a filler, a plasticizer, and an adhesion promoter may be added as necessary. Embodiments of the Invention Generally, antioxidants have an effective function of trapping free radicals. In the case of free radical species caused by a photopolymerization initiator or a resin, the polymerization reaction can be suppressed and the line thickness of the pattern can be suppressed. When the consumer ’s cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the optimum amount of added antioxidants, although the effect of controlling the thickness of the bottom width compared to the top width of the pattern can be observed, this is a pattern surface that is easy to contact with oxygen in the atmosphere Departments are prone to cause oxygen inhibition reactions due to peroxy radicals. Compared with problems such as the formation of rough surface patterns and excessive reduction in the width of the top due to the fact that antioxidants are not added, it can be estimated that the addition of anti- In the case of an oxidant, it captures peroxy radicals and inhibits the action of oxygen to inhibit the reaction. This paper size applies to China National Standards (CNS) A4 specifications (210X297 Gongchu 1 _ λ A _ 574611 A7 _____B7_ V. Description of the invention ((Please read the precautions on the back before filling this page)) Next, the description has been adopted. A method for producing a color filter of a photosensitive resin composition. First, the colored photosensitive resin composition is applied to glass or the like by a coating machine such as a spin coater, a bar coater, a sprayer, or a printing method. The substrate is dried to a specified thickness to obtain a colored coating plate. This coating plate is exposed through a photomask, using a light source such as an ultra-high pressure mercury lamp, a high-pressure mercury lamp, a metal halide lamp, or a far-ultraviolet lamp, to make the coating film sensitive. The hardened resin is light-cured. Next, the exposed coating plate is exposed to an alkali aqueous solution such as an alkali metal carbonate such as sodium carbonate, an alkali metal hydroxide such as sodium hydroxide, or an organic base such as tetramethylammonium hydroxide. Or in the shower, alkaline development and water washing are performed to form a pattern on the substrate. Second, the pattern is formed on the substrate and the resin component in the pattern is heated and hardened. Each of the colored photosensitive resin compositions of green, blue, and blue repeats this operation three times and makes a color filter. And in the present invention, it must be a coating, drying step, exposure step, and alkaline development step, but other steps may also be used. Let ’s set up another method. Example The following is printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, based on the examples and comparative examples, to explain the present invention in detail. Raw materials used in the manufacture of color filters in this example and comparative examples And the abbreviation is as follows. C photosensitive resin component)

c - 1 :六丙烯酸二季戊四醇酯及五丙烯酸二季戊四 醇酯之混合物;日本化藥(股)製造商品名D Ρ Η A -15- 本紙張尺度適用中國國家標隼(CNS ) A4規格(210 X297公釐)c-1: Mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate; Nippon Kayaku Co., Ltd. product name D Ρ Η A -15- This paper size applies to China National Standard (CNS) A4 (210 X297) Mm)

5746U A7 B7 五、發明説明(作 (請先閲讀背面之注意事項再填寫本頁) C 一 2 :使於9 ,9 一雙(酚)苐之環氧基化合物內 與丙烯酸反應而得的環氧基丙烯酸酯之酸酐聚縮合物之丙 二醇單甲基醚乙酸酯溶液;新日鐵化學(股)製造的商品 名V 2 5 9ME及同公司製造的商品名V3 Ο 1ME之重 纛比5 2 . 9 : 4 7 · 1之混合物(樹脂固形分濃度= 5 6 · 1 重量 % )。 (其他樹脂成分) F— 1:3,3’ ,5,5,—四甲基〜4,4,— 酚二縮水甘油基醚 (光聚合引發劑) B - 1 : 2 —甲基一 1— 〔4 —(甲基硫代)苯基〕 —2 -嗎啉基丙烷一 1 一酮 B-2 : P,P —二乙基胺基二苯基酮 B — 3 : 2 -(4 —甲氧基苯乙烯基)—4 ,6 —雙 (三氯甲基)一 1,3,5 -三啡(受阻酚系抗氧化劑) 經濟部智慧財產局員工消費合作社印製 A— 1 :季戊四醇基一肆(3, 一(3,5 —二第三 丁基一 4 -羥基苯基)丙酸酯 A — 2 :十八院基—3 -(3,5 —二第三丁基—4 -羥基苯基)丙酸酯 A— 3 :三乙二醇—雙〔3 — (3 —第三丁基—5 — 甲基一 4 一羥基苯基)丙酸酯 A— 4: 1 ,6 —己二醇—雙一〔3— (3 ,5 —二 -16 - 本紙張尺^^國國家標準(CNS ) A4規格(210X297公釐) 574611 A7 —........—- 五、發明説明(β 第三丁基一 4 一翔基苯基)丙酸酉旨〕 (分散顏料) (請先閲讀背面之注意事項再填寫本頁) D — 1 :將 £ 型酞靑藍顏料(c. !· pigment ν〇· ρβ-15:6 )以顏料濃度1 4 . 2重量%分散於丙二醇單曱基醚乙酸 酉旨溶劑內而成者。 (溶劑) G - 1 :丙二醇單甲基醚乙酸酯 G— 2 :二乙二醇二甲基醚 (矽烷偶合劑) Η - 1 : Chisso (股)製造的商品名s — 5 Γ 0 (界面活性劑) I — 1 :住友3 Μ (股)製造的商品名Flowlarcl FC-430 經濟部智慧財產局員工消費合作社印製 又於實施例、比較例之彩色瀘光片的評估項目及方法 係如下所述。 (評估項目及方法) (膜厚) 採用觸針或膜厚計(東京精密(股)製造的商品名 SURFCOM )並予沏J定。 -17- 本紙張尺度適用中國國家標隼(CNS ) A4規格(210X297公釐) 574611 A7 B7 五、發明説明(0 (線寬) (請先閱讀背面之注意事項再填寫本頁) 採用測長顯微鏡(股)NIKON製造的商品名X D -2 0),測定彩色濾光片像元圖案之指定位置的線寬’對 光罩寬度1 0 0 //m,以線粗度率未滿± 6%時爲0,在 該値以上時則判定成X。 (附著性) 用顯微鏡觀察顯影後的像元圖案,以對基板之剝離或 圖案邊緣部分之粗糙不平未被發現者以〇< 良好 >,有部 分被發現者以△(稍微不良),全部區域上被發現有則爲 X (不良)。 (表面粗糙) 目視觀察已製造的彩色濾光片表面,將無曇霧者評估 成〇(良好)、有曇霧者評估成X (不良)。 經濟部智慧財產局員工消費合作社印製 (顯影邊際) 顯微鏡觀察以顯影時間6 0秒製備的像元圖案,將未 被發現有剝離或極端的線粗度者評估〇(良好)發現有剝 離或極端的線粗度者評估成X (不良)。 實施例1 以表1記載的配合,製備著色感光性樹脂組成物。於 •18- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 574611 A7 ___ B7 __ 五、發明説明(作 表1 ,光聚合引發劑配合率係對感光性樹脂成分之比例, 受阻酚系抗氧化劑之配合率係對光聚合引發劑之比例。 (請先閲讀背面之注意事項再填寫本頁) 採用旋塗器將此著色感光性樹脂組成物塗布於5英吋 X 5英吋之玻璃基板上至使乾燥後的膜厚成1 · 2 5 // m 後,在2 5 °C之溫度下充分自然乾燥至塗膜表面上不生成 指觸現象爲止,於已形成的乾燥塗膜之上,使被覆以線1 空間二1 0 0 //m/1 〇 〇//m之負片型光罩,將曝光間 隙調整成1 7 5 // m上,採用I線照度9 m W / c m 2 ( Ushio電機(股)製造的照度計,商品名:U I T - 1 〇 1 /受光器U V D - 3 6 5 P D測定的値)之超高壓水銀燈 (Hhech (股)製造的商品名:Η T E 5 0 5 5 )照射 2 0 0 m j / c m 2之紫外線並進行感光部分之光硬化反應 〇 經濟部智慧財產局員工消費合作社印製 其次,在0 . 4 %碳酸鈉水溶液中,對此曝光完畢的 塗板進行2 5 °C 3 0秒鐘及6 0秒鐘之浸漬顯影及2 K 壓力之噴佈水洗(基板及噴佈噴射部在離開1 0 c m之狀 態),使於玻璃基板上形成藍色之像元圖案,評估圖案線 寬及玻璃基板間之附著性、塗膜表面粗糙度、顯影邊際。 結果,如表1所示得良好的。 實施例2 _ 除受阻酚系抗氧化劑由A - 1變更成A - 2外,餘以 與實施例1相同的配合,以相同的條件製造彩色濾光片並 進行評估,如表1所示般而得良好的結果。 本紙張尺度適用中國國家標隼(CNS ) A4規格(210X297公釐) ~\〇1 " 574611 A7 ______B7 五、發明説明(作 复施例3 (請先閲讀背面之注意事項再填寫本頁) 除光聚合引發劑配合率由6·50%降至5.50% ’受阻酚系抗氧化劑由A - 1變更成a 一 3,配合率由 1, 4 . 〇 %增至4 0 . 0 %,紫外線曝光裝置變更成丨線 照度2 3 m W / c m 2者(大日本Screen (股)製造)外, 餘以與實施例1相同配合,以相同條件製造彩色濾光片並 進行評估,如表1所示般可得良好的結果。 實施例4 除將光聚合引發劑配合率由6 · 5 0%增至7 · 5 0 %受阻酚系抗氧化劑由A - 1變更成A - 4,將著色感光 性樹脂組成物塗膜之膜厚由1 · 2 5 // m增至3 · 0〇 # m以外,餘以與實施例1同樣的配合,相同的條件製造 彩色濾光片並進行評估,如表1所示般,可得良好的結果 經濟部智慧財產局員工消費合作社印製 實施例5 除將光聚合引發劑配合率由6 . 5 Ο %增至5 . 5 Ο %,受阻酚系抗氧化劑由1 4 · 0 %增至4 0 . 0 %,將 紫外線曝光裝置改變成I線照度2 3 m W/ c m 2者(大日 本Screen (股)製造)外,餘以與實施例1相同的配合, 相同的條件製造彩色濾光片並進行評估,如表1所示,可 得良好的結果。 -20- 本紙張尺度適用中國國家標隼(CNS ) a4規格(210X297公釐) 574611 A7 B7 五、發明説明(作 寰施例r (請先閱讀背面之注意事項再填寫本頁) 除將受阻酚系抗氧化劑配合率由4 0 . 0 %增至 5 5 . 0 %外,餘以與實施例5相同的配合,相同的條件 製造彩色濾光片並進行評估,如表2所示,可得良好的結 果。 實施例7 除將光聚合引發劑配合率由6 · 5 0 %增至7 . 5〇 % ’著色感光性樹脂組成物塗膜之膜厚由1 . 2 5 // m增 至3 . 0 0 // m外,餘以與實施例1相同的配合,相同的 條件製造彩色彳慮光片並進行評估’如表2所不,而得良好 的結果。 實施例85746U A7 B7 V. Description of the invention (for (please read the precautions on the back before filling this page) C-2: The ring obtained by reacting acrylic acid compound in 9,9-bis (phenol) hydrazone with acrylic acid The propylene glycol monomethyl ether acetate solution of the oxyacrylic acid anhydride polycondensate; the trade name V 2 5 9ME manufactured by Nippon Steel Chemical Co., Ltd. and the trade name V3 0 1ME manufactured by the same company. 2.9: 4 7 · 1 mixture (resin solids concentration = 5 6 · 1% by weight). (Other resin components) F—1: 3,3 ', 5,5, —tetramethyl ~ 4,4 , — Phenol diglycidyl ether (photopolymerization initiator) B-1: 2 -methyl-1-[4- (methylthio) phenyl] -2 -morpholinylpropane-1 1 ketone B- 2: P, P —diethylaminodiphenyl ketone B — 3: 2-(4-methoxymethoxystyryl) -4,6-bis (trichloromethyl) -1,3,5- Triphine (Hindered Phenol Antioxidant) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A-1: Pentaerythritol-based 1- (3,5- (3,5-Di-tertiary-butyl-4-hydroxyphenyl) propionic acid Ester A 2: octadecyl-3- (3,5-di-tert-butyl-4-hydroxyphenyl) propionate A-3: triethylene glycol-bis [3-(3 -tert-butyl- 5-methyl-4 monohydroxyphenyl) propionate A-4: 1, 6-hexanediol-bis-1 [3 -— (3,5 —di-16)-National paper standard (CNS ) A4 specification (210X297 mm) 574611 A7 —........ —- V. Description of the invention (β third butyl-4 a Xiangylphenyl) propionate purpose] (dispersed pigment) (please Read the notes on the back before filling this page) D — 1: Disperse the £ -type phthalocyanine blue pigment (c.! · Pigment ν〇 · ρβ-15: 6) in the propylene glycol monodisperse at a pigment concentration of 14.2% by weight Glycol ether acetate is produced in a solvent. (Solvent) G-1: Propylene glycol monomethyl ether acetate G-2: Diethylene glycol dimethyl ether (silane coupling agent) Η-1: Chisso ( ) — 5 Γ 0 (surfactant) I — 1: Sumitomo 3 Μ (share) trade name Flowlarcl FC-430 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Evaluation Project of Color Cases The method is as follows. (Evaluation items and methods) (Film thickness) Use a stylus or film thickness gauge (trade name SURFCOM manufactured by Tokyo Precision Co., Ltd.) and make J. -17- This paper size applies to China Standard (CNS) A4 specification (210X297 mm) 574611 A7 B7 V. Description of invention (0 (line width) (Please read the precautions on the back before filling out this page) Use a trade name manufactured by NIKON XD -2 0), to measure the line width at the specified position of the color filter pixel pattern 'versus the mask width 1 0 0 // m, if the line thickness ratio is less than ± 6%, it is 0, which is above 値Then it is judged as X. (Adhesiveness) Observe the developed pixel pattern with a microscope to peel off the substrate or roughen the edges of the pattern. Those who have not been found are “good”, and some who are found are “delta” (slightly bad). X (bad) was found in all areas. (Rough surface) The surface of the manufactured color filter was visually observed, and those without fog were evaluated as 0 (good) and those with fog were evaluated as X (bad). Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (margin of development) Microscopy observes the pixel pattern prepared at a development time of 60 seconds, and evaluates those who have not found peeling or extreme line thickness. 0 (Good) Extreme line thicknesses are evaluated as X (bad). Example 1 A colored photosensitive resin composition was prepared with the compounding described in Table 1. At • 18- This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 574611 A7 ___ B7 __ 5. Description of the invention (for Table 1, the blending ratio of the photopolymerization initiator is the proportion of the photosensitive resin component, The compounding ratio of the hindered phenol-based antioxidant is the ratio of the photopolymerization initiator. (Please read the precautions on the back before filling this page.) Use a spin coater to apply this colored photosensitive resin composition to 5 inches X 5 inches. Inch glass substrate until the film thickness after drying becomes 1 · 2 5 // m, then it is dried naturally at 25 ° C until no finger touch is formed on the surface of the coating film. On the coating film, cover the negative film mask with line 1 space 2 1 0 0 // m / 1 〇〇 // m, adjust the exposure gap to 1 7 5 // m, and use I line illumination 9 m W / cm 2 (Ushio Electric Co., Ltd. light meter, trade name: UIT-1 〇1 / receiver UVD-3 6 5 PD measurement 値) ultra-high pressure mercury lamp (Hhech (share) trade name: Η TE 5 0 5 5) irradiate 2 0 mj / cm 2 with ultraviolet light and perform photo-hardening reaction of the photosensitive part 〇 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, followed by immersion and development at 25 ° C for 30 seconds and 60 seconds in a 0.4% sodium carbonate aqueous solution and 2 K pressure. Water-washing (the substrate and the spray-jetting part are at a distance of 10 cm), so that a blue pixel pattern is formed on the glass substrate, and the pattern line width, the adhesion between the glass substrates, and the surface roughness of the coating film are evaluated. And development margin. The results are as shown in Table 1. Example 2 _ Except that the hindered phenol-based antioxidant was changed from A-1 to A-2, the same coordination as in Example 1 was used, and the same conditions were used. The color filter was manufactured and evaluated, and good results were obtained as shown in Table 1. This paper size applies to China National Standard (CNS) A4 (210X297 mm) ~ \ 〇1 " 574611 A7 ______B7 V. Description of the invention (repeat example 3 (please read the precautions on the back before filling in this page) In addition to reducing the photopolymerization initiator mixing ratio from 6.50% to 5.50% 'Hindered phenolic antioxidant changed from A-1 to a -3, the compounding ratio increased from 1.4% to 4.0%, UV The line exposure device was changed to 丨 line illumination 2 3 m W / cm 2 (manufactured by Dainippon Screen Co., Ltd.), and the color filter was manufactured and evaluated under the same conditions as in Example 1, as shown in the table. Good results were obtained as shown in Example 1. Example 4 Except for increasing the blending ratio of the photopolymerization initiator from 6.50% to 7.50%, the hindered phenolic antioxidant was changed from A-1 to A-4. The film thickness of the coating film of the colored photosensitive resin composition was increased from 1 · 2 5 // m to 3 · 0〇 # m, and a color filter was manufactured and evaluated under the same conditions as in Example 1 under the same conditions. As shown in Table 1, good results were obtained. Example 5 printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. In addition to increasing the photopolymerization initiator mixing ratio from 6.50% to 5.5%, hindered phenol The antioxidants were increased from 14.0% to 40.0%, and the ultraviolet exposure device was changed to an I-line illumination of 2 mW / cm2 (manufactured by Dainippon Screen Co., Ltd.). 1 The same formulation and evaluation were performed under the same conditions and conditions, and as shown in Table 1, good results were obtained. -20- This paper size applies to China National Standard (CNS) a4 specification (210X297 mm) 574611 A7 B7 V. Description of the invention (for example, (Please read the precautions on the back before filling this page) Except it will be blocked The phenolic antioxidant compounding ratio was increased from 40.0% to 55.0%, and a color filter was manufactured and evaluated under the same compounding conditions as in Example 5, as shown in Table 2. Good results were obtained. Example 7 Except that the blending ratio of the photopolymerization initiator was increased from 6.50% to 7.50% 'The film thickness of the coating film of the colored photosensitive resin composition was increased from 1. 2 5 // m Except for 3. 0 0 // m, a color filter was manufactured and evaluated with the same cooperation and the same conditions as in Example 1, and as shown in Table 2, good results were obtained. Example 8

除光聚合引發劑B - 1配合率改變成2 . 5 0%,B - 3配合率改變成2 · 0 0 %,受阻酚系抗氧化劑配合率 經濟部智慧財產局員工消費合作社印製In addition to the photopolymerization initiator, the blending ratio of B-1 is changed to 2.5%, and the blending ratio of B-3 is changed to 2.0%. The blending ratio of hindered phenolic antioxidants is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs.

由1 4 . 0 %增至4 0 . 0 %,紫外線曝光裝置改變成I 線照度2 3 m W/ c m 2者,著色感光性樹脂組成物塗膜之 膜厚由1 · 2 5 // m增加至3 · 0 0 // m外,餘以與實施 例1相同的配合,相同的條件製造彩色濾光片並進行評估 ,如表2所示,可得良好的結果。 實施例9 -21 - 本紙張尺度適用中國國家標準(CNS ) A4規格(210X 297公釐) 574611 A7Increased from 14.0% to 40.0%, the ultraviolet exposure device was changed to an I-line illumination of 2 3 mW / cm2, and the film thickness of the coating film of the colored photosensitive resin composition was changed from 1 · 2 5 // m When the value is increased to 3 · 0 0 // m, a color filter is manufactured and evaluated under the same conditions and conditions as in Example 1. As shown in Table 2, good results can be obtained. Example 9 -21-This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm) 574611 A7

五、發明説明(A (請先閲讀背面之注意事項再填寫本頁) 除採用I線^射2 3 m W/ c m 2之超高壓水銀燈並照 射2 Q 〇 m j / c m 2之紫外線,進行感光部分之光硬化反 應外,以與貫施例1相同的條件,製造彩色濾光片並進行 曰平估。結果示h表2 ’惟因於圖案之底部線寬因被發現有 6 %以上的線粗度,故線寬判定雖然被判定成χ之不良, 但圖案附著性、表面粗糙度、顯影邊際等線寬特性係良好 的。 實施例1〇 除採用I線照射2 3 m W/ c m 2並照射2 0〇 m j / c m 2之紫外線,進行感光部分之光硬化反應外,餘 以與實施例7相同的條件製造彩色濾光片並進行評估。結 果示於表2 ’惟由於圖案之底部線寬因被發現有6 %以上 的線粗度’故線寬判定雖然被判定成X之不良,但圖案附 著性、表面粗糙度、顯影邊際等線寬特性係良好的。 實施例1 1 經濟部智慧財產局員工消費合作社印製 除採用I線照度9 m W/ c m 2並照射2 0〇 m j / c m 2之紫外線,進行感光部分之光硬化反應外,餘 以與實施例8相同的條件製造彩色濾光片並進行評估。結 果示於表2 ,惟由於圖案之底部線寬因被發現有6 %以上 的線粗度,故線寬判定雖然被判定成X之不良,但圖案附 著性、表面粗糙度、顯影邊際等線寬特性係良好的。 本紙張尺度適用中國國家標隼(CNS ) A4規格(210X297公釐) _ 22 574611 A7 B7 五、發明説明(20 U交例1 (請先閱讀背面之注意事項再填寫本頁) 除不配合受阻酚系抗氧化劑,且以光聚合引發劑/3 -2配合率爲1 〇 0 %外,餘以與實施例1相同的條件,製 造彩色濾光片並進行評估。結果示於表3,惟由於圖案之 底部線寬因被發現有6 %以上的線粗度,故線寬判定雖然 被判定成X之不良,但圖案附著性及表面粗糙度並不良好 〇 比較例?, 除不配合受阻酚系抗氧化劑,且以光聚合引發劑/3 -3配合率爲〇 · 8 0 %外,餘以與實施例1相同的條件, 製造彩色濾光片並進行評估。結果示於表3,惟由於圖案 之底部線寬因被發現有6 %以上的線粗糙度,故線寬判定 雖然被判定成X之不良。又圖案附著性及表面粗糙度並不 良好。 比較例3 經濟部智慧財產局員工消費合作社印製 除不配合受阻酚系抗氧化劑外,餘以與實施例9相同 的條件製造彩色濾光片並進行評估。結果示於表3 ,惟由 於圖案之底部線寬因被發現有6 %以上的線粗糙度,故線 寬判定雖然被判定成X之不良。 比較例4 除不配合受阻酚系抗氧化劑外,餘以與實施例7相同 -23- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 574611 A7 __ B7 五、發明説明(2) 的條件製造彩色瀘光片並進行評估。結果示於表3,惟由 於圖案之底部線寬因被發現有6 %以上的線粗糙度,故線 (請先閲讀背面之注意事項再填寫本頁) 見判定雖然被判定成X之不良,又圖案附著性及表面粗糙 度並不良好。。 比較例5 除不配合受阻酚系抗氧化劑,B - 2配合率爲 〇.5 0 %,B — 3配合率爲1 . 5 0 %外,係光聚合引 發劑之以外,以與實施例1 〇相同的條件製造彩色濾光片 並進行評估。結果示於表3,惟由於圖案之底部寬因被發 現有6 %以上的線粗度,故線寬判定雖然被判成X之不良 。又圖案附著性、表面粗糙度及顯影邊際並不良好。 比較例6 除自由基捕捉劑由受阻酚系抗氧化劑變更成受阻胺系 光安定劑(1 , 2 , 2 , 6 , 6 —五甲基一4 , 經濟部智慧財產局員工消費合作社印製V. Description of the invention (A (please read the precautions on the back before filling in this page) Except using the I line to shoot an ultra-high pressure mercury lamp of 2 3 m W / cm 2 and irradiate with 2 Q 〇mj / cm 2 of ultraviolet light Except for a part of the photo-hardening reaction, a color filter was manufactured and evaluated under the same conditions as in Example 1. The results are shown in Table 2 'only because the bottom line width of the pattern was found to be more than 6% The thickness of the line, so the line width is judged to be χ, but the line width characteristics such as pattern adhesion, surface roughness, and development margin are good. Example 10 Except the use of I-line irradiation 2 3 m W / cm 2 and irradiated with ultraviolet light of 200 mj / cm 2 to carry out the photo-hardening reaction of the photosensitive portion, and a color filter was manufactured and evaluated under the same conditions as in Example 7. The results are shown in Table 2 The bottom line width was found to have a line thickness of more than 6%. Therefore, although the line width determination was judged to be poor in X, the line width characteristics such as pattern adhesion, surface roughness, and development margin were good. Example 1 1 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A color filter was manufactured and evaluated under the same conditions as in Example 8 using an I-line illuminance of 9 m W / cm 2 and irradiation with 200 mj / cm 2 of ultraviolet light to perform a photo-hardening reaction of a photosensitive portion. It is shown in Table 2. However, because the bottom line width of the pattern was found to have a line thickness of more than 6%, the line width determination was judged to be a poor X, but the line width such as pattern adhesion, surface roughness, and development margin The characteristics are good. This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) _ 22 574611 A7 B7 V. Description of invention (20 U case 1 (Please read the precautions on the back before filling this page ) A color filter was manufactured and evaluated under the same conditions as in Example 1 except that the hindered phenol-based antioxidant was not blended, and the photopolymerization initiator / 3 -2 blending ratio was 100%. In Table 3, the line width at the bottom of the pattern was found to have a line thickness of 6% or more. Although the line width determination was judged to be X, the pattern adhesion and surface roughness were not good. Comparative example? In addition to not containing hindered phenolic antioxidants A color filter was manufactured and evaluated under the same conditions as in Example 1 except that the photopolymerization initiator / 3 -3 compounding ratio was 0.80%. The results are shown in Table 3, but due to the bottom of the pattern The line width was found to have a line roughness of more than 6%. Therefore, although the line width determination was judged to be a bad X. The pattern adhesion and surface roughness were not good. A color filter was manufactured and evaluated under the same conditions as in Example 9 except that the hindered phenol-based antioxidant was not added. The results are shown in Table 3. However, the line width at the bottom of the pattern was found to be more than 6%. Line roughness, so the line width determination is judged to be X defective. Comparative Example 4 Same as Example 7 except that the hindered phenol-based antioxidant is not used. 23- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 574611 A7 __ B7 V. Description of the invention (2 ) Under conditions of manufacture and evaluation. The results are shown in Table 3. However, because the bottom line width of the pattern was found to have a line roughness of more than 6%, the line (please read the precautions on the back before filling this page). The pattern adhesion and surface roughness were not good. . Comparative Example 5 Except that the hindered phenol-based antioxidant was not blended, the blending ratio of B-2 was 0.50%, and the blending ratio of B-3 was 1.50%. Except for the photopolymerization initiator, it was the same as that of Example 1. 〇 A color filter was manufactured and evaluated under the same conditions. The results are shown in Table 3. However, because the bottom width of the pattern was found to have a line thickness of more than 6%, the line width determination was judged to be a bad X. In addition, the pattern adhesion, surface roughness, and development margin were not good. Comparative Example 6 The free radical scavenger was changed from a hindered phenol-based antioxidant to a hindered amine-based light stabilizer (1,2, 2, 6, 6, 6-pentamethyl-4), printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

Pyrelyclinyl )癸酸酯外,餘以與實施例1相同的配合,相 同的條件製造彩色瀘光片並進行評估。結果受阻胺系光安 足劑之i谷解性惡劣’以旋塗器塗布光阻油墨於玻璃基板狀 若觀察塗布後的表面狀態,故不溶成分之夾雜物及多數存 在的而未能良好的塗布狀態’故並不合適。 將上述實施例1 - 1 1之結果示於表1及表2,比較 例1〜5之結果示於表3。且表2係接續表1 ,向左的前 頭記號係意指相同的意義。因此,表2之向左前頭,係可 連續至表1並予讀出。 •24- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 574611 A7 B7 五、發明説明(淖 CA ^ 2 m o 〇 〇〇〇Except for Pyrelyclinyl) caprate, a color phosphor film was produced and evaluated under the same conditions as in Example 1 under the same conditions. Result The hindered amine-based light-footing agent has poor disintegration properties. If a photoresist ink is applied to a glass substrate with a spin coater, if the surface state after coating is observed, the inclusions of insoluble components and most of them are not good. The coating state is not suitable. The results of Examples 1 to 11 are shown in Tables 1 and 2, and the results of Comparative Examples 1 to 5 are shown in Table 3. And Table 2 is the continuation of Table 1. The left-hand front sign means the same meaning. Therefore, the heading to the left of Table 2 can be continued to Table 1 and read out. • 24- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 574611 A7 B7 V. Description of the invention (淖 CA ^ 2 m o 〇 〇〇〇〇

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I—I 蘅担迪陋虼 【.§1 _塞 【rso/AVS】 s陛韜宋s 【s】 7/j $ ft »#剝 蠢 雲 靈 【%】 讲1¾迪骧 s§l 本紙張尺度適用中國國家標準(CNS ) Λ4規格(210X297公釐) -27- 574611 A7 B7 五、發明説明(2$ 發明之功效 本發明之著色感光性樹脂組成物,對光聚合引發劑以 一定比例配合以受阻酚系抗氧化劑,故可提供在不損及圖 案附著性等之圖案尺度精確度優越的彩色瀘光片之製造方 法。 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 28- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) ·;? 畔ί宇:第90116276號專利,請案 修正|民國92年1月30日修正 申請曰其 a 90^¾ T 月 3 曰 案 號 90116276 類 別 &03F ^/〇ό^ 以上各欄由本局填註) 發明 新型 名稱 發明 創作/ 申請人 1 則月如 修至 #^388 A4 C4 574611 || |專利説明書 中 文 英 文 姓 名 國 籍 住、居所 姓 名 (名稱) 國 籍 住、居所 (事務所) 代表人 姓 名 彩色濾光片之製造方法及笤色光敏性樹脂組成物I—I 迪 迪迪迪 [.§1 _sai [rso / AVS] s 陛 taosong s [s] 7 / j $ ft »# stripping stupid cloud spirit [%] speak 1¾ di 骧 s§l paper Standards apply to Chinese National Standards (CNS) Λ4 specifications (210X297 mm) -27- 574611 A7 B7 V. Description of the invention (2 $ Effect of the invention The colored photosensitive resin composition of the present invention is formulated with a certain proportion of the photopolymerization initiator With hindered phenol-based antioxidants, we can provide a method for manufacturing color calenders with excellent pattern scale accuracy without compromising pattern adhesion. (Please read the precautions on the back before filling this page) Intellectual Property of the Ministry of Economic Affairs Printed by the Bureau ’s Consumer Cooperatives 28- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) ·; PAN LYU: Patent No. 90116276, please amend the application Said a 90 ^ ¾ T month 3 Case No. 90116276 Category & 03F ^ / 〇ό ^ The above columns are filled out by this Office) Invention name, invention, creation / applicant 1 month, as revised to # ^ 388 A4 C4 574611 || | Patent Specification Chinese English Name Nationality Live Place Name (name) nationality live, the manufacturing method dwelling (firm) representative's name and broom color of the color filter photosensitive resin composition

METHOD FOR PRODUCING COLOR FILTER AND COLORED PHOTOSENSITIVE RESIN COMPOSITION (1) 東學 (2) 板原俊英 (3) 藤城光一 (1)日本 (2)日本 曰本 裝 (1)日本國千葉縣木更津市築地一番地 新曰鐵化學股份有限公司電子材料開發中心内 2)日本固千葉縣木更津市築地一番地 新曰鐵化學股份有限公司電子材料開發中心内 (3)日本國千葉縣木更津市築地一番地 新曰鐵化學股份有限公司電子材料開發中心内 (1)新曰鐵化學股份有限公司 新曰鐵it学ί朱式会社 (1)日本 (1)日本國東京都品川區西五反田t丁目二一#一 一號 (1)大和屋II喜 木纸張尺度適用中®國家標隼(CNS ) A4現格(2丨0X29*7公釐) 訂 線 574611 申讀曰期 9〇 年 7 月 3日 案 號 90116276 類 則 (以上各欄由本局填註) 補充 A4 C4METHOD FOR PRODUCING COLOR FILTER AND COLORED PHOTOSENSITIVE RESIN COMPOSITION (1) Eastern Studies (2) Itahara Toshiyuki (3) Fujishiro Koichi (1) Japan (2) Japanese Yakuzai (1) Japan's Tsukiji, Kisarazu, Chiba Prefecture In Saito Chemical Co., Ltd. Electronic Material Development Center 2) In Shikiji, Kisarazu, Chiba Prefecture, Japan Shinto Iron Chemical Co., Ltd., Electronic Material Development Center, Shinjuku, Ichiban, Tsukiji, Kisarazu, Chiba Prefecture, Japan Co., Ltd. Electronic Material Development Center (1) Shinyue Iron Chemical Co., Ltd. Shinyue Iron Science Institute Zhu Zhu Club (1) Japan (1) Nishi Gotanda Tchome No. 21, Shinagawa-ku, Tokyo, Japan # 一 一号(1) Yamatoya II Kigi Paper Standards Applicable® National Standard (CNS) A4 (2 丨 0X29 * 7mm) Line 574611 Application date: July 3, 1990 No. 90116276 Class rule (The above columns are filled out by this bureau.) Supplement A4 C4

訂 線 裝Ordering

Claims (1)

574611 公告本 第901 16276號專利申請案 中文申請專利範圍修正本574611 Bulletin No. 901 16276 Patent Application Chinese Patent Application Amendment (請先閱讀背面之注意事項再填寫本頁) 1 . 一種彩色濾光片用著色感光性樹脂組成物,係包 含(A )受阻酚系抗氧化劑,(B )光聚合引發劑,(C )由感光性樹脂、感光性單體及感光性寡聚體而成之群體 選擇的至少一種之感光性樹脂成分,及(D )分散顏料爲 必須成分而成,其中(A )受阻酚系抗氧化劑之摻合率在 (B)光聚合引發劑之5〜6 〇重量%之範圍,且(B) 光聚合引發劑之摻合率在(C )感光性樹脂成分之5〜9 重量%之範圍。 2 · —種彩色濾光片之製造方法,係將含有(A )受 阻酚系抗氧化劑,(B )光聚合引發劑,(C )感光性樹 脂成分及(D )分散顏料爲必須成分之著色感光性樹脂組 成物塗布於透明基板上,至成指定的乾燥膜厚並予乾燥後 經濟部智慧財產局員工消費合作社印製 ’以(a )利用紫外線曝光裝置之曝光,(b )利用驗水 溶液之顯影之各步驟爲必須步驟而成,其中(A )受阻酚 系抗氧化劑之摻合率在(B )光聚合引發劑之5〜6 0重 量%之範圍,且(B )光聚合引發劑之摻合率在(C )感 光性樹脂成分之5〜9重量%之範圍。 3 .如申請專利範圍第2項之彩色濾光片之製造方法 ,其中前述受阻酚系抗氧化劑係由三乙二醇雙·〔 3 -( 3 一第三丁基一5-甲基一4一羥基苯基)丙酸酯〕、1, 本紙張尺度適用中國國家揉準(CNS ) A4規格(210X297公釐) 574611 A8 B8 C8 ___ D8 、申請專利範圍 6 —己二醇—雙〔3— (3 ,5 —二第三丁基—4 —羥基 苯基)丙酸酯〕、季戊四醇基—肆〔3 — ( 3,5 -二第 Ξ丁基—4 一羥基苯基)丙酸酯〕、十八烷基一 3 一(3 ’ 5 -二第三丁基—4—羥基苯基)丙酸酯、1,3,5 〜三甲基—2 ,4,6 —參(3 ,5 —二第三丁基—4一 羥基苄基)苯、2,6—二第三丁基—4 —乙基酚、2, 2’ 一亞甲基雙(4 一甲基一 6 -第三丁基酚)、4, 4’ 一硫代一雙(3 -甲基一 6 -第三丁基酚)、4, 4’ 一亞丁基一雙(3 -甲基—6 —第三丁基酚)、1 , 1 ’ 3 -參(2 —甲基—4 一羥基一 5 —第三丁基苯基) 丁院、1 ,3 ,5 —參(4 一經基;基)苯及肆〔亞甲基 3 -(3,5 - 一'弟二丁基—4, 一經基苯基丙酸醋 )甲烷而成之群體選出的至少一種以上的化合物。 (請先閱讀背面之注意事項再填寫本頁) 利 專 請中 申其 如, .法 4 方 造 製 D 或 項 2 第 圍 酞 係 料 顏 散 分 之 片 光 。 S0 色散 彩分 之料 項顏 3 藍 第菁 之 5 片爲, 光度 濾 照 色線 彩射 之 I 項之 3 置 第.裝 或光 項 曝 2 線 第外 圍紫 軍 ) 利 a 專 C 請中 申其 如, •法 5 方 造 製 經濟部智慧財產局員工消費合作社印製 一紙 本 5 2之 m劑 C 化 \氧 W 抗 m系 酣 丄阻一 受 ο 爲 厚 膜 5 2 6 之 分 成 範 旨 之樹 %[4 量光 重感 ο ) 3 C 圍 在 率 合 摻且 Β ο 請 中 w 申其m 如 ,ο .法 4 6 方 一 造 5 製 1 橡 家 一國 j國 中 用 B A 5 C 之 ,劑 m發 # 引 ο 合 .聚 光 在 率 。 合圍 摻範 之.之 ►ΜΜϋ 齊少 發量 引重 合 ο 聚 · 光7 之 C 片 ’ 光爲m 濾度 # 色照 ο 彩線· 之射 2 項 I 一 3 之 5 第置· 或裝ο 項光爲 21曝厚 第Ϊ膜 a ^ 51紫2rm _ Λ—y I i a c 專c \ A 釐 1公 7 29 X 2 574611 A8 B8 C8 D8 申請專利範圍 A )受阻酚系抗氧化劑之摻合率在(B )光聚合引發劑之 3 0〜6 〇重量%之範圍,且(B )光聚合引發劑之摻合 率在(C)感光性樹脂成分之5 · 〇〜6 . 〇重量%之範 圍。 7 ·如申請專利範圍第2項或第3項之彩色瀘光片之 製造方法’其中(a )紫外線曝光裝置之I射線照度爲5 〜15mW/cm2,膜厚爲 2.〇〜4.〇#m,(A) 受阻酚系抗氧化劑之摻合率在(B )光聚合引發劑之5〜 3 0重量%之範圍,且(b)光聚合引發劑之摻合率在( C )感光性樹脂成分之7 . 〇〜9 · 〇重量%之範圍。 8 ·如申請專利範圍第2項或第3項之彩色濾光片之 製造方法’其中(a )紫外線曝光裝置之I射線照度爲 15 〜40mW/cm2,膜厚爲 2·〇 〜4·〇#πι,( A )受阻酚系抗氧化劑之摻合率在(β )光聚合引發劑之 3 0〜6 0重量%之範圍,且(b )光聚合引發劑之摻合 率在(C)感光性樹脂成分之6 · 〇〜7 . 〇重量%之範 圍0 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家揉準(CNS ) A4規格(210 X 297公釐)(Please read the precautions on the back before filling this page) 1. A colored photosensitive resin composition for color filters, which contains (A) hindered phenolic antioxidants, (B) photopolymerization initiators, (C) A photosensitive resin component selected from the group consisting of a photosensitive resin, a photosensitive monomer, and a photosensitive oligomer, and (D) a disperse pigment are essential components, in which (A) a hindered phenol-based antioxidant The blending ratio is in the range of 5 to 60% by weight of the (B) photopolymerization initiator, and the blending ratio of the (B) photopolymerization initiator is in the range of 5 to 9% by weight of the (C) photosensitive resin component. . 2 · —A method for manufacturing a color filter, which uses (A) a hindered phenol-based antioxidant, (B) a photopolymerization initiator, (C) a photosensitive resin component, and (D) a disperse pigment as essential components. The photosensitive resin composition is coated on a transparent substrate to a specified dry film thickness and dried. It is printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs to print with (a) exposure using an ultraviolet exposure device, and (b) using an aqueous solution. Each step of development is a necessary step, wherein the blending rate of (A) hindered phenol-based antioxidant is in the range of 5 to 60% by weight of (B) the photopolymerization initiator, and (B) the photopolymerization initiator The blending ratio is in a range of 5 to 9% by weight of the (C) photosensitive resin component. 3. The method for manufacturing a color filter according to item 2 of the scope of patent application, wherein the aforementioned hindered phenol-based antioxidant is made of triethylene glycol bis · [3-(3 -third butyl-5 -methyl 4 Monohydroxyphenyl) propionate], 1, this paper size is applicable to China National Standard (CNS) A4 (210X297 mm) 574611 A8 B8 C8 ___ D8, patent application scope 6 —hexanediol — double [3— (3,5-Di-tertiary-butyl-4-hydroxyphenyl) propionate], Pentaerythritol-methyl [3 -— (3,5-Di-tertiarybutyl-4-4-hydroxyphenyl) propionate] Octadecyl-1,3- (3'5-di-tert-butyl-4-hydroxyphenyl) propionate, 1,3,5 ~ trimethyl-2,4,6—ginseng (3,5 —Di-tertiary butyl-4-hydroxybenzyl) benzene, 2,6-di-tertiary butyl-4-ethylphenol, 2, 2′-methylenebis (4-monomethyl-6-third Butylphenol), 4, 4 'monothio-bis (3-methyl-6-third butylphenol), 4, 4' monobutylene-bis (3-methyl-6-third butyl) Phenol), 1, 1 '3 -ginseng (2-methyl-4 4-hydroxyl- 5 —Third butylphenyl) Dingyuan, 1, 3, 5 — ginsinyl (4-coryl group; benzene) and benzene [methylene 3-(3, 5-mono-dibutyl-4, At least one compound selected from the group consisting of methylphenylpropionate) and methane. (Please read the notes on the back before filling out this page.) Please use the following method to make a claim.... Method 4 to make D or item 2 of the phthalate-based material Yan scattered light. S0 Dispersion and Coloring Material Item Yan 3 Blue Dijing 5 pieces are: Photometric filter color line color shot of the 3rd item I. Install or light item exposure 2nd line of the peripheral purple army) Lee a Special C Please click Shen Qiru, • The 5th party made a printed copy of the 5th agent of the Ministry of Economics and Intellectual Property Bureau of the Ministry of Economic Affairs and the consumer cooperative to print a chemical agent, oxygen, and resistance to the m system. It is divided into thick film 5 2 6 Fan Zhizhi% [4 Amount of light and weight ο) 3 C encircling and blending B ο please ask w to apply its m such as, ο. Method 4 6 party one make 5 system 1 oak family country j country use BA 5 C 之 , 剂 m 发 # 引 ο Concentration rate. Enclosing the fan. The ►ΜΜϋ Qi hair volume and weight coincidence ο poly · light 7 of the C film 'light is m filter degree # 色 照 ο color line · shot 2 item I 3 5 5th set or install 21 exposed thick film ^ 51 purple 2rm _ Λ-y I iac special c \ A 0.11 male 7 29 X 2 574611 A8 B8 C8 D8 patent scope A) The blending rate of hindered phenolic antioxidants is in (B ) 30 to 60% by weight of the photopolymerization initiator, and (B) the blending ratio of the photopolymerization initiator is in the range of 5.0 to 6.0% by weight of the (C) photosensitive resin component. 7 · If the method of manufacturing a color phosphor film according to item 2 or item 3 of the scope of the application for patent, 'where (a) the I-ray illuminance of the ultraviolet exposure device is 5 to 15 mW / cm2, and the film thickness is 2.0 to 4. #m, (A) The blending ratio of the hindered phenol antioxidant is in the range of 5 to 30% by weight of the (B) photopolymerization initiator, and (b) the blending ratio of the photopolymerization initiator is in (C) the photosensitive The range of 7.0% to 9.0% by weight of the resin component. 8 · If the method of manufacturing a color filter of item 2 or item 3 of the scope of patent application ', wherein (a) the I-ray illuminance of the ultraviolet exposure device is 15 to 40 mW / cm2, and the film thickness is 2.0 to 4.0. # πι, (A) the blending rate of the hindered phenolic antioxidant is in the range of 30 to 60% by weight of the (β) photopolymerization initiator, and (b) the blending rate of the photopolymerization initiator is (C) Photosensitive resin composition 6 · 〇 ~ 7. % by weight range 0 (Please read the precautions on the back before filling out this page) Printed by the Intellectual Property Bureau Staff Consumer Cooperatives of the Ministry of Economic Affairs This paper applies to Chinese standards (CNS) ) A4 size (210 X 297 mm)
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KR100482953B1 (en) * 2003-04-15 2005-04-15 삼성전자주식회사 Color filter composition, method and apparatus for manufacturing color filter using the same
JP4407410B2 (en) * 2004-07-15 2010-02-03 Jsr株式会社 Radiation sensitive composition for color filter and preparation method thereof
JP4292132B2 (en) * 2004-09-24 2009-07-08 株式会社 日立ディスプレイズ Liquid crystal display
KR101119818B1 (en) * 2004-12-07 2012-03-06 주식회사 동진쎄미켐 Photoresist composition for colour filter and preparation method of liquid crystal display colour filter using the same
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TWI416174B (en) * 2006-06-01 2013-11-21 Nippon Steel & Sumikin Chem Co Resit composition for color filter, method for making such composition and color filter using such composition
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TWI559079B (en) * 2008-11-18 2016-11-21 Sumitomo Chemical Co Photosensitive resin composition and display device
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