TW573153B - Apparatus and method for manufacturing liquid crystal display device - Google Patents

Apparatus and method for manufacturing liquid crystal display device Download PDF

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Publication number
TW573153B
TW573153B TW90127685A TW90127685A TW573153B TW 573153 B TW573153 B TW 573153B TW 90127685 A TW90127685 A TW 90127685A TW 90127685 A TW90127685 A TW 90127685A TW 573153 B TW573153 B TW 573153B
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Taiwan
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liquid crystal
cell
substrate
crystal display
silicon
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TW90127685A
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Chinese (zh)
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Nozomi Okochi
Masami Sonda
Ko Hamagami
Ichiro Machida
Masaki Mochizuki
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Victor Company Of Japan
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Priority claimed from JP2001008643A external-priority patent/JP3758504B2/en
Priority claimed from JP2001160218A external-priority patent/JP3879438B2/en
Application filed by Victor Company Of Japan filed Critical Victor Company Of Japan
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Publication of TW573153B publication Critical patent/TW573153B/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • G02F1/13392—Gaskets; Spacers; Sealing of cells spacers dispersed on the cell substrate, e.g. spherical particles, microfibres
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/80001—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by connecting a bonding area directly to another bonding area, i.e. connectorless bonding, e.g. bumpless bonding
    • H01L2224/808—Bonding techniques
    • H01L2224/8085—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
    • H01L2224/80855—Hardening the adhesive by curing, i.e. thermosetting
    • H01L2224/80874—Ultraviolet [UV] curing

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Description

573153 A7 B7 五、發明説明（彳） 【發明所屬之技術領域】 本發明是關於投影器、投影電視等内部重要組件之液 晶顯示元件、特別是關於該液晶顯不兀件的接合（加壓成型） 或注入液晶後密封之液晶顯不兀件製造裝置及製造方法。 【先行技術】 近來、接合在矽晶圓基板及玻璃基板的液晶顯示元件 常被應用在投影器及投影電視、抬頭顯示器等且生産量亦 日漸增加。第五圖係顯示一般液晶顯示元件10。如第五圖 所示液晶顯示元件10係由表面具有導電膜1的玻璃基板2和 表面附有畫素電極（顯示區域）3的矽1C基板4相對向、爲了 決定間隔（晶胞間隔）大小、用由黏合劑與塡充劑6而成的封 裝黏合劑7固定、在晶胞間隔中注入後述的液晶5(參照第六 圖）、在該玻璃基板2的表面設置防止反射膜8。還有9爲液晶 注入口密封部分。 有下列各種方法可接合玻璃基板2和矽1C基板4、得到 未灌入液晶5状態的液晶顯示元件1 〇(液晶注入晶胞）。第七 圖至桌十圖所不液晶顯不兀件1 〇係顯7^未灌入液晶5前的液 晶晶胞。 例如日本特開平6- 1 8829號公報所記載的方法如第七圖 所示、由一對剛體製成上機床工作台丨丨與下機床工作台i 2 、於其間插入液晶顯示元件1 〇之加壓成型法。（剛體-剛體構 造）。還有如第八圖所示、由不銹鋼或陶瓷材所製成的上機 床工作台13與氣囊式下機床工作台14、於其間插入液晶顯 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） I----r----- (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 -4- 573153 A7 B7 五、發明説明（2) (請先閲讀背面之注意事項再填寫本頁} 示元件10的壓縮成型法。（剛體-氣囊構造）。再例如日本特 開平6-2223 1 8號公報上所記載的方法、如第九圖所示由剛體 構成的上機床工作台15與位於氣囊16上方由不銹鋼或陶瓷 材等剛體所構成的下機床工作台1 7、於其間插入液晶顯示 元件10之加壓成型法。（剛體-剛體/氣囊構造）。 另外還有如第十圖所示、由不銹鋼或陶瓷材所製成的 上機床工作台1 8與上機床工作台1 8同一材質之不銹鋼或陶 瓷材所製成的下機床工作台19之間插入液晶顯示元件1〇之 加壓成型法。（剛體-剛體/彈性體（橡膠）構造）。該第十圖的 方法係採用彈性體20來支撐下機床工作台19。另外圖面中 箭頭符號是表示力的作用方向。 還有一些其他方法、例如日本特開平U-64 866號公報所 示、利用氣囊作搭配的例子（在一對氣囊上放置剛板或使用 彈性緩衝墊）。這些壓縮裝置的加壓成型法、藉由前記塡充 劑6確定晶胞間隔後、用附圖未標示的紫外線照射或加熱使 黏著劑固化、得到液晶顯示元件10的晶胞。 經濟部智慧財產局員工消費合作社印製 隨後從前記液晶5之注入口 9注入液晶5後密封該注入口 9、得致如第六圖的液晶顯示元件10。 但是該密封液晶顯示元件注入口的方法在注入液晶後 擦拭液晶注入口附近的液晶時、塗佈於液晶注入口的密封 劑會因配分器所産生的毛細管現象將該密封劑含混於液晶 注入口内部、經紫外線照射或加熱硬化該密封劑將液晶注 入口封閉的技術在例如日本特開平9-15616號公報、日本特 開平2000- 3 5 5 88號公報、日本特開平2000-206545號公報等均 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） JT] — 573153 A7 B7 五、發明説明（3 ) 有記載。 以下係參照第十六圖（a)〜（d)説明以往液晶注入密封方 法°第十六圖（a)〜（d)係顯示以往液晶顯示元件密封方法之 液晶注入晶胞200模式切面圖。爲了方便、將第十六圖⑷〜 (d)實際上與第五圖及第十圖相同部分用不同符號加以標示 。同第十六圖（a)係爲已注入液晶150的晶胞200橫切面圖。 如圖淸楚所示、例如注入液晶150後玻璃基板120和矽基板 130其側面成擴張（外凸）状態。 . 因此該側邊（液晶顯示面）注入該液晶150後從側面加壓 使其爲正常之液晶注入晶胞200(第十六圖（b))。還有該第十 六圖（b)的150a係從液晶注入口 190溢出之液晶部分。其次是 擦拭由液晶注入口 190溢出的液晶部分150a之後的第十六圖 (c)、將密封劑1 80塗布於液晶注入口 1 90同時漸次減輕側壓 、其後再藉由圖未標示的紫外線照射該密封劑1 80使密封劑 180封塞（密封）液晶注入口 190(第十六圖（d))。 【發明所欲解決之課題】 首先，上述液晶顯示元件之加壓成型裝置與方法有以下 問題點。第七圖所示之方法（剛體-剛體構造），爲了確保晶 胞間距、構成該裝置的二個機床工作台（剛體Π、12)之機械 精確度卻很難保持在指定的平行度（± 〇·3 )、造成施於基 板的壓縮力不均引起製作過程中的晶胞間隔在不良、即晶 胞間隔不均的問題。因此，第七圖所示之曰本特開平6- 1 8829 號公報的構造、在測定晶胞間隔的同時修正加壓、所需的 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -6 _ —-----r----- (請先閲讀背面之注意事項再填寫本頁) -訂 經濟部智慧財產局員工消費合作社印製 573153 A7 B7 五、發明説明（4 ) 方法是將裝置.大型化、並有非常精巧的壓縮控制卻也造成 在製作液晶顯示元件1 〇費時的問題。 另外如第八圖所示的方法（剛體-氣囊構造），IC矽基板4 的基底爲氣囊14的關係、該氣囊14會造成張力不均、壓縮 時仍會産生壓力不均。亦即，即使採用該第八圖的方法仍會 産生晶胞間隔不均的問題。 再者，如第九圖所示的方法（剛體/剛體/氣囊構造）、壓縮 時的壓力均一性尙稱良好、但是基底爲氣囊1 6的關係、會 引起玻璃基板2和矽1C基板4間橫向偏離無法産生準位精確 度、另外橫向偏離也會造成滑動刮痕的問題。亦即，即使採 用該第九圖的方法仍會産生晶胞間隔不均的問題。 如第十圖所示的方法（剛體-剛體/彈性體（橡膠）構造），可 保持壓力的均一性、但是因爲構成下機床工作台的剛體1 9( 不銹鋼或陶瓷材）其基底爲橡膠等彈性體20、很難避免如前 述的橫向偏離問題。亦即，即使採用該第十圖的方法仍會 産生晶胞間隔不均的問題。而且，該晶胞間隔不均所製成的 液晶顯示元件10應用在投影機及投影電視時會導致投射畫 面上明暗不均（陰影）、或在三色合成時造成色塊。 另外根據前述加壓裝置的壓縮方法、在加壓成型之際 作爲剛體的上定盤11，1 3，15，1 8、若例如和玻璃基板2間混入 來自外部的汚染物（大小爲5 〜100 左右）的話、（很難避 免該問題）在局部、即汚染物四周亦會産生晶胞間隔不均的 問題。而控制晶胞間隔均一性則是利用氦氖雷射光千擾基 板形成干涉紋（fringe)、基板面内僅有未滿兩條同心圓狀 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X297公釐） I-----r----- (請先閱讀背面之注意事項再填寫本頁) 、1Τ 經濟部智慧財產局員工消費合作社印製 573153 A7 B7 五、發明説明（5 ) (請先閱讀背面之注意事項再填寫本頁) 干涉紋（一條爲〇 · 3 )、以一條以内爲佳。理由是右控制在 此上下的話、則可在後段製程的液晶注入及密封等加以修 正。 但是若干涉紋數目過多或不成同心圓状、甚至爲局部 混亂干涉紋（局部的晶胞間隔不均）的話、在後段製程很難修 正、爲製造良率低下的主因。因此在壓縮兩片基板（玻璃基 板2和矽1C基板4)之際，必須施壓平均且具有不産生橫向偏 離的構造。 視察上述問題得到的見解是例如若不介於玻璃基板與 剛體之上機床工作台之間，有異物大小之脫出部分時不會 有局部施力，因此、就不容易造成晶胞間隔局部不均的問 題。因此該發明人等全心檢討想出不使基板表面歪曲起伏 過大影響兩機床工作台的吻合精確度、在進行壓縮成型之 際，平均施壓於兩基板、並在兩基板間進行平行状態補正使 其不發生橫向偏離、且可保持指定的晶胞間隔作接合的液 晶顯本兀件製造裝置、本發明的目的係提供如上述液晶顯 示元件製造裝置。 經濟部智慧財產局員工消費合作社印製 本發明的目的係提供一種液晶顯示元件製造方法且可 提高良率、可以解決例如混於基床工作台與玻璃基板間的 汚染物所造成局部晶胞間隔不均。 另外上述液晶顯示元件的液晶注入密封法有以下問題 點。第十六圖所説明的以往技術前提是在由兩片基板貼合 而成的液晶注入胞200中注入塡充劑1 60來保持間隔。第五 圖及第六圖所顯示應用在該技術於晶注入胞内沒有塡充劑 -8- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公羡） 573153 A7 B7 五、發明説明（6 ) 的液晶顯示元件、在進行側面加壓時有基板相互碰觸之虞 。在該情況下即使暫時控制氣壓來進行側面加壓與減壓都 很難獲得均一且精確度高的晶胞間隔。 而且最近對於液晶顯示元件影像顯示要求趨於高速應 答、液晶顯示元件的晶胞間隔也由以往的5 以上到3 、 甚至於接近1 ，因此對於晶胞間隔均一性要求就更嚴格。這 是因爲要減低顯示影像明暗不均及色塊等。 因此爲了因應該嚴格的要求、在製造過程中晶胞間隔 的管理十分重要、而且必須正確監控從注入液晶後液晶顯 示元件的側面加壓及解壓還有塗布密封劑的時間經過變化 和晶胞間隔變化。 側面加壓前後有確認晶胞間隔均一性的光學式干涉紋 監控法，但是對於前述晶胞間隔均一性要求在0.1 以内之高 精度、在干涉紋上的次微米範圍監控下，無法因應對晶胞 間隔如此嚴格的要求。 考察以上的問題得知，爲了獲得如前記之高精確度晶胞 間隔均一性、在晶胞製程上必須要有測定晶胞間隔的製程 、發生誤差（超過均一性的範圍）的話、當時即刻進行修正、 完成最後製程所得的晶胞間隔即可合於所求範圍内。 因此本發明人全心檢討的結果、有機性地加以配置包 含液晶注入後即測定晶胞間隔的測定機構、及加壓解除後 測定晶胞間隔機構等、可均一修正液晶注入後的晶胞間隔 而得均一性良好晶胞間隔之液晶顯示元件製造裝置及製造 方法，本發明目的係提供一種關於液晶顯示元件製造裝置及 ------r----- (請先閲讀背面之注意事項再填寫本頁)573153 A7 B7 V. Description of the invention (彳) [Technical field to which the invention belongs] The present invention relates to a liquid crystal display element such as a projector, a projection television, and other important internal components, and in particular, to the bonding (pressure molding) of the liquid crystal display element. ) Or liquid crystal display element manufacturing device and manufacturing method sealed after the liquid crystal is injected. [Advanced technology] Recently, liquid crystal display elements bonded to silicon wafer substrates and glass substrates are often used in projectors, projection televisions, head-up displays, etc. and the production volume is increasing. The fifth diagram shows a general liquid crystal display element 10. As shown in the fifth figure, the liquid crystal display element 10 is composed of a glass substrate 2 having a conductive film 1 on the surface and a silicon 1C substrate 4 with a pixel electrode (display area) 3 on the surface, so as to determine the interval (cell interval). The glass substrate 2 is fixed with an encapsulating adhesive 7 made of an adhesive and a filler 6, and a liquid crystal 5 (see FIG. 6) described later is injected into the cell space. An antireflection film 8 is provided on the surface of the glass substrate 2. There are 9 sealed portions for the liquid crystal injection port. The following methods can be used to bond the glass substrate 2 and the silicon 1C substrate 4 to obtain a liquid crystal display element 10 in which the liquid crystal 5 is not filled (the liquid crystal is injected into the cell). The liquid crystal display element 10 shown in the seventh to the tenth tables is the display unit 7 and the liquid crystal cell before the liquid crystal 5 is filled. For example, the method described in Japanese Patent Application Laid-Open No. 6- 1829 shows the upper machine table 丨 丨 and the lower machine table i 2 with a pair of rigid bodies as shown in the seventh figure, and a liquid crystal display element 1 is inserted between them. Pressure forming method. (Rigid-body structure). There is an upper machine table 13 made of stainless steel or ceramic material and an airbag-type lower machine table 14 as shown in the eighth figure, and a liquid crystal display is inserted in between. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297). (Mm) I ---- r ----- (Please read the notes on the back before filling out this page) Order printed by the Intellectual Property Bureau's Consumer Cooperatives of the Ministry of Economic Affairs -4- 573153 A7 B7 V. Invention Description (2 ) (Please read the precautions on the back before filling out this page} The compression molding method for element 10 is shown. (Rigid body-airbag structure). For example, the method described in Japanese Patent Application Laid-Open No. 6-2223 1 No. 8, such as the ninth As shown in the figure, the upper machine tool table 15 composed of a rigid body and the lower machine tool table 17 composed of a rigid body such as stainless steel or ceramic material located above the airbag 16 are press-molded by inserting a liquid crystal display element 10 therebetween. Rigid body / airbag structure) In addition, as shown in the tenth figure, there is a lower machine tool made of stainless steel or ceramic made of stainless steel or ceramic material. Inserted between tables 19 The crystal display element 10 is press-molded. (Rigid-Rigid / Elastomer (rubber) structure). The method of this tenth figure uses an elastic body 20 to support the lower machine tool table 19. In addition, the arrow symbol in the figure is Indicates the direction of the force. There are other methods, such as the example shown in Japanese Unexamined Patent Publication No. U-64 866, using airbags as a match (place a rigid plate on a pair of airbags or use an elastic cushion). These compression devices After the unit cell interval is determined by the pre-filled filler 6 according to the above-mentioned press molding method, the adhesive is cured by irradiation or heating with ultraviolet light not shown in the drawing to obtain the unit cell of the liquid crystal display element 10. Employees ’consumption by the Intellectual Property Bureau of the Ministry of Economic Affairs The cooperative prints and then injects the liquid crystal 5 from the injection port 9 of the aforementioned liquid crystal 5 and seals the injection port 9 to obtain the liquid crystal display element 10 as shown in Fig. 6. However, the method of sealing the liquid crystal display element injection port wipes the liquid crystal after the liquid crystal is injected. When injecting liquid crystal near the inlet, the sealant applied to the liquid crystal injection port may contain the sealant inside the liquid crystal injection port due to the capillary phenomenon generated by the dispenser. Ultraviolet irradiation or heat hardening of the sealant to seal the liquid crystal injection port is disclosed in, for example, Japanese Patent Application Laid-Open No. 9-15616, Japanese Patent Application Laid-Open No. 2000- 3 5 5 88, Japanese Patent Application Laid-Open No. 2000-206545, and the like. The dimensions are applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) JT] — 573153 A7 B7 5. The description of the invention (3) is described. The following is a description of the conventional liquid crystal injection sealing with reference to the sixteenth figures (a) to (d) Method ° The sixteenth pictures (a) to (d) are cross-sectional views showing the liquid crystal injection cell 200 mode of the conventional liquid crystal display element sealing method. For convenience, the sixteenth pictures (i) to (d) are actually the same as the fifth picture The same parts as in the tenth figure are marked with different symbols. The same as the sixteenth figure (a) is a cross-sectional view of the unit cell 200 into which the liquid crystal 150 has been injected. As shown in FIG. 2, for example, the side surfaces of the glass substrate 120 and the silicon substrate 130 after the liquid crystal 150 is injected are in an expanded (outward convex) state. Therefore, the side (liquid crystal display surface) is injected with the liquid crystal 150 and then pressurized from the side to make it a normal liquid crystal injection cell 200 (sixteenth figure (b)). Also, 150a in the sixteenth figure (b) is a liquid crystal portion overflowing from the liquid crystal injection port 190. The second is the sixteenth figure (c) after wiping the liquid crystal portion 150a overflowing from the liquid crystal injection port 190, applying the sealant 1 80 to the liquid crystal injection port 1 90 while gradually reducing the side pressure, and then using the unlabeled The sealant 180 is irradiated with ultraviolet rays to seal (seal) the liquid crystal injection port 190 with the sealant 180 (sixteenth figure (d)). [Problems to be Solved by the Invention] First, the above-mentioned pressure molding apparatus and method for a liquid crystal display element have the following problems. In the method shown in Figure 7 (rigid-rigid structure), in order to ensure the cell spacing, the mechanical accuracy of the two machine tables (rigid bodies Π, 12) constituting the device is difficult to maintain the specified parallelism (± (3)), the compressive force applied to the substrate is uneven, which causes a problem that the cell spacing is poor during the manufacturing process, that is, the cell spacing is uneven. Therefore, as shown in the seventh figure, the structure of JP-A-6-18829, the correction of the pressure while measuring the cell interval, and the required paper size are applicable to the Chinese National Standard (CNS) A4 specification (210X297). %) -6 _ —----- r ----- (Please read the notes on the back before filling out this page)-Order printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 573153 A7 B7 V. Description of the invention ( 4) The method is to increase the size of the device and have very delicate compression control, but it also causes a time-consuming problem in manufacturing the liquid crystal display element. In addition, as shown in the eighth method (rigid body-airbag structure), the base of the IC silicon substrate 4 is the relationship between the airbag 14. The airbag 14 causes uneven tension, and pressure unevenness is generated even when compressed. That is, even with the method of the eighth figure, the problem of uneven cell spacing still occurs. Furthermore, the method (rigid body / rigid body / airbag structure) shown in the ninth figure, the pressure uniformity during compression is good, but the base is the relationship between the airbag 16 and the glass substrate 2 and the silicon 1C substrate 4 Lateral deviation cannot produce the level of accuracy, and lateral deviation can also cause the problem of sliding scratches. That is, even if the method of the ninth figure is used, the problem of uneven cell spacing still occurs. The method shown in the tenth figure (rigid body-rigid body / elastomer (rubber) structure) can maintain the uniformity of pressure, but because the rigid body 19 (stainless steel or ceramic material) constituting the lower machine table is made of rubber, etc. The elastic body 20 is difficult to avoid the lateral deviation problem as described above. That is, even with the method of the tenth figure, the problem of uneven cell spacing still occurs. In addition, the liquid crystal display element 10 made of the uneven cell spacing may cause uneven brightness (shadow) on the projection screen when applied to a projector and a projection television, or may cause color patches when combining three colors. In addition, according to the compression method of the aforementioned pressurizing device, the upper plate 11, 1 3, 15, 18 as a rigid body during press molding, if, for example, contamination from the outside (size 5 to 5) is mixed with the glass substrate 2 100 or so), (it is difficult to avoid this problem), the problem of uneven cell spacing also occurs locally, that is, around the pollutant. The uniformity of the cell spacing is controlled by using a helium-neon laser light interference substrate to form interference fringes. There are only less than two concentric circles in the substrate surface. This paper applies the Chinese National Standard (CNS) A4 specification (210 X297 mm) I ----- r ----- (Please read the precautions on the back before filling this page), 1T Printed by the Intellectual Property Bureau Employee Consumption Cooperative of the Ministry of Economic Affairs 573153 A7 B7 V. Invention Description (5 ) (Please read the precautions on the back before filling out this page) Interference patterns (one is 0.3), preferably within one. The reason is that if the right control is up and down, it can be corrected in the liquid crystal injection and sealing of the later process. However, if the number of interference patterns is too large or non-concentric, or even local chaotic interference patterns (local uneven cell spacing), it is difficult to correct the latter process, which is the main cause of low manufacturing yield. Therefore, when compressing two substrates (glass substrate 2 and silicon 1C substrate 4), it is necessary to apply pressure evenly and have a structure that does not cause lateral deviation. The insights obtained by inspecting the above problems are, for example, that if it is not between the glass substrate and the machine tool table above the rigid body, there will be no local force when there is a part of the size of the foreign matter, so it is not easy to cause the cell cell to be locally Both problems. Therefore, the inventors and others have devoted themselves to reviewing the fact that the substrate surface does not distort and fluctuate excessively, which affects the accuracy of the two machine tool tables. When performing compression molding, the average pressure is applied to the two substrates, and the parallel state correction is performed between the two substrates. A liquid crystal display element manufacturing device capable of preventing lateral deviation and maintaining a predetermined cell interval for bonding, and an object of the present invention is to provide a liquid crystal display element manufacturing device as described above. The purpose of printing the present invention is to provide a method for manufacturing a liquid crystal display element, which can improve the yield, and can solve, for example, the local cell interval caused by the pollutants mixed between the bed table and the glass substrate. Uneven. In addition, the liquid crystal injection sealing method of the liquid crystal display element has the following problems. The conventional technique described in FIG. 16 is based on the assumption that the liquid crystal injection cell 200 formed by bonding two substrates is filled with a filling agent 160 to maintain a gap. The fifth and sixth figures show that the technology is applied in the crystal implantation cell without cymbal filling. -8- This paper size applies Chinese National Standard (CNS) A4 specification (210X297 public envy) 573153 A7 B7 V. Description of the invention ( 6) In the case of a liquid crystal display element, the substrates may touch each other during side pressure. In this case, it is difficult to obtain a uniform and highly accurate cell interval even if side pressure and pressure reduction are performed by temporarily controlling the air pressure. In addition, recently, the requirements for image display of liquid crystal display elements tend to respond at high speeds, and the cell interval of the liquid crystal display element has also changed from 5 to 3, or even close to 1 in the past. Therefore, the uniformity of the cell interval is even more stringent. This is because it is necessary to reduce uneven brightness and color patches of the displayed image. Therefore, in order to meet stringent requirements, the management of the cell interval during the manufacturing process is very important, and the pressure and decompression of the side of the liquid crystal display element after the liquid crystal is injected, and the change in the time of applying the sealant and the cell interval must be properly monitored. Variety. There is an optical interference pattern monitoring method for confirming the uniformity of the cell interval before and after side pressure. However, the above-mentioned uniformity of the cell interval is required to be within 0.1 micrometers, and the submicron range on the interference pattern cannot be used to respond to the crystal. Intercellular spacing is such a strict requirement. Examining the above problems, we learned that in order to obtain the high-precision uniformity of the cell interval as described above, a process for measuring the cell interval must be performed on the cell process. If an error occurs (beyond the range of uniformity), it will be performed immediately. The cell interval obtained by modifying and completing the final process can be combined within the required range. Therefore, as a result of the intensive review by the present inventors, an organic arrangement including a measurement mechanism for measuring the cell interval immediately after liquid crystal injection and a cell interval measurement mechanism after release of pressure can be uniformly corrected for the cell interval after liquid crystal injection. In order to obtain a liquid crystal display device manufacturing device and manufacturing method with a good cell spacing, the purpose of the present invention is to provide a liquid crystal display device manufacturing device and ------ r ----- (Please read the note on the back first (Fill in this page again)

、1T 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） _ g - 573153 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（7 ) 製造方法。 【用以解決課題之手段】 本發明鑒於相關問題點提供以下之構成。 於至少有兩片玻璃基板持指定間隔接合的元件基板（10) 上作加壓成型之液晶顯示元件製造裝置（30)其特徴具備有、 保持前記元件基板之一片玻璃基板於下方的上機床工 作台（31)、 和保持前記元件基板之另一片玻璃基板於上方的下機 床工作台（3 4)、 和支撐前記下機床工作台的支撐機構（35,36,37)、 和可移動前記支撐機構的移動機構（39,40)、 前記支撐機構至少由與前記下機床工作台下方吻合的 吻合機構（36a)、 和彈性機構（35)以及支撐該吻合機構、彈性機構的剛體 (37)所構成，當起動移動機構作前記元件基板之加壓成型時 、前記元件基板會因前記下機床工作台之傾斜方向使前記 吻合機構接受具自由度之施力、而由前記彈性機構吸收該 施力、而使前記至少有兩片的玻璃基板互相補正成實際平 衡状態。 於玻璃基板（2)和矽1C基板（4)持指定間隔接合的元件 基板（10)上作加壓成型之液晶顯示元件製造裝置（30)其特徴 具備有、 保持前記玻璃基板下方的上機床工作台（3 1)、 ------r----- (請先閱讀背面之注意事項再填寫本頁)1T Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives This paper is printed in accordance with the Chinese National Standard (CNS) A4 specification (210X 297 mm) _ g-573153 A7 B7 Printed by the Employees ’Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (7) Manufacturing method. [Means for Solving the Problems] The present invention provides the following constitutions in view of related problems. A liquid crystal display device manufacturing device (30) for pressure molding on an element substrate (10) with at least two glass substrates bonded at a specified interval is specially equipped with a glass substrate that holds and holds one of the preceding element substrates on a lower machine tool. Table (31), and a lower machine tool table (34) holding another glass substrate of the preceding element substrate, and a supporting mechanism (35, 36, 37) for supporting the previous machine tool table, and a movable antecedent support The moving mechanism (39, 40) of the mechanism, the preamble support mechanism are at least composed of an anastomosis mechanism (36a), which is fitted under the machine table of the preamble, and an elastic mechanism (35), and a rigid body (37) supporting the anastomosis mechanism and elastic mechanism. When the moving mechanism is started to press the preform element substrate, the preform element substrate will cause the preform anastomosis mechanism to receive a force with a degree of freedom due to the inclination of the machine table of the preform, and the preform elastic mechanism will absorb the force. And make at least two glass substrates in the preface complement each other into an actual balanced state. A liquid crystal display device manufacturing device (30) for press molding a glass substrate (2) and a silicon 1C substrate (4) bonded at a predetermined interval on a device substrate (10). Workbench (3 1), ------ r ----- (Please read the precautions on the back before filling this page)

、1T b. 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） -10- 573153 A7 B7 五、發明説明（8 ) 和保持前記矽1C基板於上方的下機床工作台（34)、 和支撐前記下機床工作台的支撐機構（35,36,37)、 (請先閲讀背面之注意事項再填寫本頁) 和可移動前記支撐機構的移動機構（39,40)、 前記支撐機構至少由與前記下機床工作台下方吻合的 吻合機構（36a)、 和彈性機構（35)以及支撐該吻合機構、彈性機構的剛體 (37)所構成，當起動移動機構 作前記液晶顯示元件之加 壓成形時、前記矽1C基板會因前記下機床工作台之傾斜方 向使前記吻合機構接受具自由度之施力、而由前記彈性機 構吸收該施力、而使前記矽1C基板對於前記玻璃基板互相 作補正成實際平衡状態。 (c) 以上記（a)、（b)之構成，該液晶顯示元件製造裝置 (30)其特徴爲於前記上機床工作台下方有一體成型之突起部 (3 2,3 3)、當起動前記移動機構作成型時只有該突起部與前 記玻璃基板吻合。 經濟部智慧財產局員工消費合作社印製 (d) 於玻璃基板（2)和矽1C基板（4)持指定間隔接合的 元件基板（10)上作加壓成型之液晶顯示元件製造方法其特徴 爲、 安裝表面具有透明導電膜（1)之前記玻璃基板於上機床 工作台（31)之下方、安裝已預先塗敷封裝黏合劑（7)之前記 矽1C基板於下機床工作台（34)之上方、用空氣塡充容器提 昇前記下機床工作台、在前記矽1C基板與前記玻璃基板接 觸前用角度調整手段（39)調整前記矽1C基板的角度、之後 再度提昇前述空氣塡充容器並施與指定壓力於前記上機床 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X297公釐） _ ^ 573153 經濟部智慧財產局員工消費合作社印製 A7 B7五、發明説明（9 ) 工作台、前記下機床工作台自由傾斜方向施力於前記矽1C 基板上、並由彈性機構（35)吸收前記施力、而使前記矽1C 基板對於前記玻璃基板作實際平衡状態補正、其次用紫外 線照射前記封裝黏合劑使其固化、緊貼前記玻璃基板與前 記矽1C基板。 接合兩片基板（2,4)留有液晶注入口（9)、將液晶（5)注入 並封閉形成之液晶注入晶胞（4〇〇)之液晶顯示元件製造裝置 其特徴爲設置有，測定前記液晶注入晶胞在注入液晶後的前 記晶胞間隔之第一測定機構（35)、和加熱前記液晶注入晶胞 之加熱機構（35)、和擦拭施壓前記加壓機構而擠出的液晶 (5)之液晶擦拭機構（36)、和封閉前記液晶注入口塗敷封閉 劑（130)之封閉劑塗敷機構（36)、和擦拭前記封閉劑塗敷機 構所導致塗敷多餘的封閉劑之封閉劑擦拭機構（36)、和前記 加壓機構於停止加壓後測定前記晶胞間隔之第二測定機構 (3 7 )、和前記第二測定機構在晶胞間隔均一性合於指定範圍 之際、用紫外線照射前記封閉劑使其固化之紫外線照射機 構（37)、和檢測於前記液晶注入口的前記封閉劑浸透量之畫 像處理機構（38)。 接合兩片基板（2,4)留有液晶注入口（9)、將液晶（5)注入 並封閉形成之液晶注入晶胞（400)之液晶顯示元件製造方法 其特徴爲包含有，測定前記液晶注入晶胞在注入液晶後的前 記晶胞間隔之第一測定製程、和加熱前記液晶注入晶胞之 加熱製程、和施壓於前記兩片基板外側的指定領域之加壓 製程、和擦拭施壓前記加壓製程而由前記液晶注入口擠出 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -12- -----r----- (請先閱讀背面之注意事項再填寫本頁) 訂 b 573153 A7 B7 五、發明説明（1〇) 的液晶（5a)之液晶擦拭製程、和塗敷封閉劑（13〇)於前記液晶 注入口之塗敷製程、和前記加壓製程於停止加壓後測定前 露己晶胞間隔之第二測定製程、和前記第二測定機構在測定 晶胞間隔均一性合於指定範圍之際、用紫外線照射前記封 閉劑使其固化之固化製程、和檢測於前記液晶注入口的前 言己封閉劑浸透量之檢測製程。 【發明實施型態】 以下將適於本發明之實施例根據添附圖面加以説明。 以下所述之實施例爲適合本發明之具體實例，附帶有多種技 術性限制，本發明之範圍並不只限於以下所記載之説明，並非 僅只侷限於這些情況。 首先，液晶顯示元件（液晶注入晶胞）之加壓成型裝置及 方法用本發明之製造裝置及製造方法加以説明。第一圖係 顯示關於本實施例之液晶顯示元件製造裝置之全體圖、第 二圖係爲本實施例液晶顯示元件製造裝置之主要部分槪略 圖、第三圖爲構成液晶顯示元件製造裝置上機床工作台之 主要部分説明圖、第四圖爲構成液晶顯示元件製造裝置上 機床工作台之其他主要部分説明圖。還有和前記以往實例 相同部分採同一符號、省略詳細説明。 第一圖係顯示液晶顯示元件製造裝置30之實施好例之 全體圖。關於第一圖至第四圖的3 1爲例如合成矽玻璃所製 之上機床工作台、32爲一體成型於該上機床工作台31上的 外框部、33爲位於該外框内側所形成的中央突起部。關於 -----r---^f衣—— (請先閲讀背面之注意事項再填寫本頁)、 1T b. This paper size is in accordance with Chinese National Standard (CNS) A4 specification (210 X 297 mm) -10- 573153 A7 B7 5. Description of the invention (8) and the lower machine tool table with the silicon 1C substrate above ( 34), and note the support mechanism (35, 36, 37) of the machine table before the support, (please read the precautions on the back before filling this page), and the movable mechanism (39, 40) of the movable support mechanism, the preface The support mechanism is at least composed of an anastomosis mechanism (36a), an elastic mechanism (35), and a rigid body (37) supporting the anastomosis mechanism and the elastic mechanism, which are matched with the lower part of the machine tool table. During the press forming, the prescriptive silicon 1C substrate will cause the prescriptive anastomosis mechanism to receive a force with a degree of freedom due to the inclination direction of the prescriber machine table, and the prescriptive elastic mechanism will absorb the force, so that the prescriptive silicon 1C substrate will be applied to the prescriptive glass The substrates complement each other into an actual balanced state. (c) The structure described in (a) and (b) above. The liquid crystal display device manufacturing device (30) is characterized in that an integrally formed protrusion (3 2, 3 3) is provided below the machine tool table in the previous note. When the preamble moving mechanism is used for molding, only the protruding portion coincides with the preamble glass substrate. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (d) A method for manufacturing a liquid crystal display element that is press-molded on a glass substrate (2) and a silicon 1C substrate (4) and a component substrate (10) joined at a specified interval. 1. The mounting surface has a transparent conductive film (1) before the glass substrate is placed under the upper machine table (31), and the silicon 1C substrate is installed on the lower machine table (34) before the packaging adhesive (7) is installed. Above, note the machine table before lifting the container with air, and use the angle adjustment method (39) to adjust the angle of the silicon 1C substrate before contacting the silicon 1C substrate with the glass substrate. With the specified pressure, the paper size of the machine is applicable to the Chinese National Standard (CNS) A4 specification (210 X297 mm) _ ^ 573 153 printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of invention (9) Workbench, I wrote down the machine tool table in a free tilt direction to apply force to the memo silicon 1C substrate, and the elastic mechanism (35) absorbed the memo force, so that the memo silicon 1C substrate was applied to the memo glass. The actual balance correction for the substrate, followed by irradiation with ultraviolet curing adhesive prior to encapsulation in mind, referred to close the front glass substrate and the front substrate referred silicon 1C. A device for manufacturing a liquid crystal display device that joins two substrates (2, 4) with a liquid crystal injection port (9) and a liquid crystal injection cell (400) formed by injecting and sealing the liquid crystal (5). The first measurement mechanism (35) of the preamble liquid crystal injection cell after the liquid crystal injection, the first measurement mechanism (35) for heating the prewrite liquid crystal injection cell, and the liquid crystal extruded by wiping the prepress pressure mechanism (5) The liquid crystal wiping mechanism (36), the sealing agent coating mechanism (36) for applying a sealing agent (130) to the sealing liquid crystal injection port, and the application of excess sealing agent by wiping the sealing agent coating mechanism The sealant wiping mechanism (36), the second measurement mechanism (37) that measures the cell interval of the previous cell after the pressure is stopped, and the second cell that measures the uniformity of the cell interval within the specified range In this case, an ultraviolet irradiation mechanism (37) for curing the pre-blocking agent with ultraviolet rays and an image processing mechanism (38) for detecting the permeation amount of the pre-blocking agent at the pre-filled liquid crystal injection port. A method for manufacturing a liquid crystal display element that joins two substrates (2, 4) with a liquid crystal injection port (9) and a liquid crystal injection cell (400) formed by injecting and sealing the liquid crystal (5). The first measurement process of the previous cell interval after the liquid crystal is injected into the cell, the heating process of heating the previously injected liquid crystal cell, the pressing process of pressing the specified area on the outside of the two substrates, and the wiping pressure The pre-pressurization process is extruded from the pre-press liquid crystal injection port. The size of this paper is applicable to China National Standard (CNS) A4 (210X297 mm) -12- ----- r ----- (Please read the note on the back first Please fill in this page again) Order b 573153 A7 B7 V. Description of the invention (10) The liquid crystal wiping process of the liquid crystal (5a), and the coating process of applying the sealant (13) to the liquid crystal injection port of the previous note, and the previous note The second measurement process of measuring the cell interval before exposure is stopped after the pressurization is stopped, and the second measurement mechanism described above is used to measure the cell interval uniformity within a specified range, and then irradiate the sealer with ultraviolet rays to cure it. Curing process, Note before detecting the amount of saturation of the liquid crystal injection port before blocking agent detector Introduction hexyl process. [Inventive implementation mode] The embodiments suitable for the present invention will be described below with reference to the attached drawings. The embodiments described below are specific examples suitable for the present invention, with various technical limitations attached. The scope of the present invention is not limited to the descriptions described below, and is not limited to these cases. First, a pressure-molding device and method for a liquid crystal display element (liquid crystal-injected cell) will be described using the manufacturing device and manufacturing method of the present invention. The first figure is an overall view of the liquid crystal display element manufacturing device of the present embodiment, the second figure is a schematic view of a main part of the liquid crystal display element manufacturing device of the present embodiment, and the third figure is a machine tool constituting the liquid crystal display element manufacturing device. An explanatory diagram of the main part of the table, and the fourth diagram are explanatory diagrams of other main parts constituting the machine tool table on the liquid crystal display element manufacturing device. In addition, the same reference numerals are used for the same parts as in the previous examples of the previous description, and detailed descriptions are omitted. The first figure is an overall view showing a good example of the liquid crystal display element manufacturing apparatus 30. For the first to fourth figures, 31 is, for example, an upper machine tool table made of synthetic silica glass, 32 is an outer frame portion integrally formed on the upper machine tool table 31, and 33 is formed inside the outer frame. Central protrusion. About ----- r --- ^ f 衣 —— (Please read the notes on the back before filling this page)

、1T I# 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） _ 13 _ 573153 A7 B7 五、發明説明（Ή) 該外框部32、中央突起部33之作用於後詳述。至於第二圖 則省略外框部32的圖示。 作爲上機床工作台3 1之剛體，例如前記的合成矽玻璃以 外、溶解矽玻璃、派勒斯玻璃（Short公司註冊商標）、 Tenppax玻璃（Short公司註冊商標）等等、以容易透過365nm 附近紫外線領域光之材質爲佳。 34爲下機床工作台構造例如陶瓷材、以二氧化鈷（Z:r〇2) 爲佳。35爲支撐前記下機床工作台34之彈性體（橡膠）、於約 中央部設有穿孔38、以例如低彈力橡膠爲佳。36 立於剛體37之中央部、貫穿前記彈性體35之穿孔38與 下機床工作台34—面吻合之中心柱、中心前端部分36a則略 成圓弧状。另外前記剛體37以及中心柱36可用不銹鋼等金 屬材料或陶瓷材等。 39設於下機床工作台34之下方、可事先調整基板接合 時的角度、内有附圖未標示具測角器的測角台、40爲設於 該測角台39下方的空氣塡充容器。 在此使用本發明液晶顯示元件製造裝置30而得致液晶 顯示元件10之方法，主要爲第一圖、第二圖，合倂參照第五圖 、第六圖加以説明。 具體實施例爲對於與玻璃基板2面接觸的上機床工作台 31則用溶解矽玻璃、與矽1C基板面接觸的下機床工作台34 則用二氧化鈷（Zr02)、彈性體35則用低彈性橡膠的水磷銨鎂 石剛體37則使用一般的鋼材依圖示順序配置、中心柱36則 用不銹鋼製螺釘其前端部分加工爲球状。 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇χ297公釐)' -----r----- (請先閲讀背面之注意事項再填寫本頁)、 1T I # Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The paper size is applicable to the Chinese National Standard (CNS) A4 (210X 297 mm) _ 13 _ 573153 A7 B7 V. Description of the invention (Ή) This frame section 32 The function of the central protrusion 33 will be described in detail later. As for the second figure, illustration of the outer frame portion 32 is omitted. As the rigid body of the upper machine tool table 31, for example, other than the synthetic silica glass described above, dissolved silica glass, Pyrex glass (registered trademark of Short Company), Tenppax glass (registered trademark of Short Company), etc., to easily transmit ultraviolet rays near 365nm The material of the area light is preferred. 34 is a lower machine table structure such as ceramic material, and cobalt dioxide (Z: r02) is preferred. Reference numeral 35 is an elastic body (rubber) for supporting the machine tool table 34, and a perforation 38 is provided at about the center. For example, a low-elastic rubber is preferred. 36 The central post standing at the center of the rigid body 37, the perforation 38 penetrating through the elastic body 35 mentioned above and the lower machine table 34, and the central front end portion 36a are slightly arc-shaped. In addition, the rigid body 37 and the center post 36 may be made of a metal material such as stainless steel or a ceramic material. 39 is located below the lower machine table 34, which can adjust the angle when the substrates are joined in advance, there is an angle measuring table with a goniometer not shown in the drawing, and 40 is an air filling container located below the angle measuring table 39 . The method for obtaining the liquid crystal display element 10 by using the liquid crystal display element manufacturing device 30 of the present invention is mainly shown in the first figure and the second figure, and described with reference to the fifth figure and the sixth figure. The specific embodiment is that for the upper machine tool table 31 in contact with the glass substrate 2 surface, dissolved silica glass is used, the lower machine tool table 34 in contact with the silicon 1C substrate surface uses cobalt dioxide (Zr02), and the elastomer 35 uses low The ammonium hydrophosphite rigid body 37 of elastic rubber is arranged in the order shown in the figure using general steel materials, and the center portion 36 is processed into a spherical shape by using stainless steel screws at the front end portion. This paper size applies Chinese National Standard (CNS) A4 specification (21〇χ297mm) '----- r ----- (Please read the precautions on the back before filling this page)

、1T 經濟部智慧財產局員工消費合作社印製 573153 A7 B7 五、發明説明（12 ) ' 這是爲了要微調作爲下機床工作台34面的剛體37之鋼 材和中心柱36之間的固定、和作爲中心柱36的前端部分36a 和下機床工作台34的陶瓷材之二氧化鈷（Zr02)的接觸。但是 ，如前所述該型態並無特別之限定。 首先如第五圖之説明，液晶顯示元件的玻璃基板2其表面 必須預先設有防止反射膜8、透明電極膜1爲康寧公司所製 # 1 737玻璃、由透明剛體之上機床工作台3丨的下方吸附固定 。其次在液晶顯示元件10的矽1C基板4於顯示區域3外圍混 入Yakushi化成公司所製SW-3.2D1間隔球6、再塗敷協立科 學産業公司所製MAINSHIRU封裝黏合劑7(WR系列）後、將 該砂IC基板4吸附固定於下機床工作台3 4之上方。 此時中心柱36的前端部分36a與下機床工作台34的一方 (下方）吻合。亦即兩基板作加壓成型之際下機床工作台34 — 邊受中心柱前端部36a點施力、下機床工作台34側的矽1C 基板4則接受下機床工作台34自由傾斜方向的施力。該施力 稱之爲偏倚力。但是如前記所配置有下機床工作台34以及 彈性體（橡膠）35之構成、實際上該偏倚力被彈性體（橡膠）35 所吸收。因此之後該矽1C基板4被施予來自空氣塡充容器 40下方之指定壓力時、壓力可平均施力於該基板面、不會 有發生橫向偏移之虞。亦即可保持晶胞間隔均一。 因此加壓成型時假設即使矽1C基板4偏傾、該兩片基 板也會像封裝黏合劑7中的間隔球6 —樣、一邊修正晶胞間 隔同時進行加壓。因此液晶顯示元件10在接合製程可保持 所要的均一晶胞間隔、如只出現一條干擾帶之良好結果。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 一 ------r----- (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 573153 A7 ___B7__ 五、發明説明（13) 因此將液晶顯示元件10應用於投影器或投影電視時、對於 陰影、色塊改善有很大的貢獻。再者該結果可簡單地修正 後段製程液晶注入與封裝製程晶胞間隔均一性、直接縮短 製程的處理時間。 其次，因上昇空氣塡充容器40使得位於矽1C基板4側的 下機床工作台34也被升高、當該矽1C基板4到達將與玻璃 基板2接觸的前進位置之際、設於下機床工作台34下方測角 台39内藏有圖未標示之測角器可調整玻璃基板2與矽1C基 板4之平行。而且若使用相同型式基板於製造第二片液晶顯 示元件時即可省略該調整。 其後再度起動空氣塡充容器40、施加0.1MPa(0.63Kgf) 〜0.3MPa(3Kgf)的壓縮力於下機床工作台34。若爲該壓縮力 範圍外，如未滿0.1Mpa(0.63Kgf)或超過0.3Mpa(3Kgf)、如前記 利用氨氖雷射光干涉之條紋則在基板面內，不限於成爲不定2 條同心圓狀（1條且0.3 // m )較佳則不限於1條以內之情形可 由實驗得知經各種實驗證明理想的壓縮力爲0.25Mpa左右。 其次進行兩基板調準定位。此係根據基板外型基準進 行調準定位。另外圖未標示基板上準位標記可用CCD(電荷 耦合元件）檢測、當然也可調整機床工作台的XY縱橫移動 載物台。 空氣塡充容器40施予下機床工作台34的指定壓縮力爲 (0.1MPa(0.63Kgf)〜0.3Mpa(3Kgf))從兩基板2,4接觸開始保持 約30秒。據此完成兩基板2,4間無液晶的空晶胞。 在隨後十秒鐘持續進行同時、用圖未標示的365nm紫外 ^紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ ------r----- (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 573153 A7 _ B7 五、發明説明（14) 線光以約3000焦耳照射從上機床工作台3丨側到封裝黏合劑7 的溶解矽玻璃、硬化固定該封裝黏合劑7。 (請先閲讀背面之注意事項再填寫本頁) 之後於空晶胞液晶注入口 9注入液晶5、用黏合劑密封 固定該液晶注入口 9、可得所要的液晶顯示元件10。關於液 晶注入抬4裝置及方法於後詳述。 關於晶胞間隔均一性在前記一連串接合條件下、作爲 均一性指標的干擾紋在製成基板90%以上可得一條以下（相 當於中央和邊際的晶胞間隔差爲〇.3以下）之結果。因此根 據本實施例可大幅地縮短處理時間。 經濟部智慧財產局員工消費合作社印製 在此參照第三圖、第四圖説明突起部分的外框部分32 、中央突起部分33。關於第三圖的外框部分32與上機床工 作台3 1之一邊一體成型。如第一圖所示外框部分32的寬度（ 間隔）、在玻璃基板2與矽1C基板4以正常状態黏接、成爲密 封與黏合劑7的間隔球6之間隔略呈相等的尺寸。關於第四 圖的中央突出部分33、位於比外框部分32更接近中央部分 、與外框同厚度一體成型。該外框部分32的厚度t比汙染物 的大小還大、假設爲100 以上的話、即使汙染物等混入上 機床工作台31與玻璃基板2之間、該汙染物可被收納於該外 框部分32之内、而不易造成局部晶胞間隔不均的問題。 前記外框部分32的構造假設發生矽1C基板4的過度歪 曲使玻璃基板2的中央部分産生凹陷現象的話、如第四圖位 於比外框部分32更接近中央的部分、例如若採用同一厚度 形成中央突出部分33、可防範於未然。還有該實施例之外 框部分32採口字形状、並無設限、當然也可以採用如田字 -17· 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 573153 A7 B7 五、發明説明（15) 形状。 如此，於上機床工作台31與突起部（外框部分32、中央突 出部分33) —體成型、當移動機構（空氣塡充容器40)起動成 型時、只有該突起部分與玻璃基板2吻合、假設即使有汙染 物附著於玻璃基板2、因爲沒有直接在上機床工作台3 1加壓 於該汙染物、不會壓扁汙染物而汙染玻璃基板2表面（與投 射影像顯示品質惡化有關）、也不會藉著汙染物加壓於玻璃 基板2、可避免局部晶胞間隔不均。因此在液晶顯示元件製 程上有助於提高良率。 另外本實施例之基板係舉玻璃基板2和矽1C基板4爲例 作説明、當然即使是採用玻璃基板取代矽1C基板4、只用 玻璃基板構成元件基板亦可。 其次是液晶顯示元件之液晶注入密封裝置及方法、關 於本發明之製造裝置以及製造方法説明如下。第十一圖係 顯示關於本實施例液晶顯示元件製造裝置之理想實施例全 體圖、第十二圖係顯示本實施例液晶顯示元件製造方法之 模式切面圖、第十三圖係顯示同液晶顯示元件構造之斜視 圖、第十四圖爲相同之切面圖、第十五圖係顯示密封製程 實施結果之説明圖。與前記以往例相同部分採同一符號、 省略詳細説明。 第十一圖係顯示關於本實施例液晶顯示元件製造裝置 300之理想實施例全體圖。第十一圖310爲晶胞輸送機器人 、320爲已注入液晶晶胞卡匣、330爲已密封晶胞卡匣、340 爲第一機構之檢測液晶有無機構、350爲具有晶胞間隔測定 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ 18 —-----r----- (請先閲讀背面之注意事項再填寫本頁) 訂 如 經濟部智慧財產局員工消費合作社印製 573153 A7 B7 五、發明説明（16) 機構及晶胞加熱機構之第二機構、360爲具有晶胞加壓機構 、擦拭液晶機構、封閉劑塗敷機構、封閉劑擦拭機構、加 壓控制機構等之第三機構、370爲具有晶胞間隔測定機構、 紫外線照射機構、晶胞加熱機構等之第四機構、380爲第五 檄構封閉劑浸透量測定機構（影像處理機構）、390爲配置於 第一機構340〜第五機構380中心部分的中心索引台、該中 心索引台390爲同一方向可自在迴轉之構造。 關於使用本實施例液晶顯示元件製造裝置300而得液晶 顯示元件10之方法參照第十三圖、第十四圖加以説明。 首先、液晶顯示元件10的玻璃基板2其表面必須預先設 有防止反射膜8、透明電極膜1爲康寧公司所製#1737玻璃、 和表面具有接受來自CMOS電晶體的驅動電壓供給之反射 畫素電極3之矽1C基板4、各自形成配向膜21，22、於矽1C 基板4的畫素電極（顯示領域）3外圍混入Yakushi化成公司所 製SW系列的間隔球6、再塗敷協立化學産業公司所製 MAINSHIRU封裝黏合劑7(WR系歹[J)後、前記兩基板2,4以上 述之壓縮成型接合黏結。因此形成兩基板2,4間的晶胞間隔 。另外上述第五圖及第六圖省略配向膜21，22之圖示。 其後接合黏接後的兩基板2,4被搬送至圖未標不的真空 槽内、在該真空槽内將準備好的液晶由液晶注入口 9注入、 已注入液晶晶胞400(參照第十二圖）後封閉前記之液晶注入 口 9、完成液晶顯示元件10。還有注入的液晶5採用向列 (nematic)型液晶。 接著是大略説明關於本實施例液晶顯示元件製造裝置 I-----r----- (請先閱讀背面之注意事項再填寫本頁)1T printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 573153 A7 B7 V. Description of the invention (12) 'This is to fine-tune the fixation between the steel of the rigid body 37 as the surface of the lower machine table 34 and the center column 36, and The front end portion 36 a of the center post 36 is in contact with cobalt dioxide (Zr02), which is a ceramic material of the lower machine table 34. However, as described above, this type is not particularly limited. First, as illustrated in the fifth figure, the surface of the glass substrate 2 of the liquid crystal display element must be provided with an anti-reflection film 8 in advance, and the transparent electrode film 1 is # 1 737 glass made by Corning Corporation. Adhesive fixed below. Next, the silicon 1C substrate 4 of the liquid crystal display element 10 is mixed with the SW-3.2D1 spacer ball 6 manufactured by Yakushi Chemical Co., Ltd. outside the display area 3, and then coated with MAINSHIRU packaging adhesive 7 (WR series) manufactured by Kyoritsu Scientific Industries. 2. The sand IC substrate 4 is adsorbed and fixed above the lower machine table 34. At this time, the front end portion 36a of the center post 36 coincides with one (lower) side of the lower machine table 34. That is, when the two substrates are press-molded, the lower machine tool table 34 — while receiving the force from the front end 36a of the center column, the silicon 1C substrate 4 on the lower machine tool table 34 side receives the free tilt direction of the lower machine tool table 34. force. This force is called bias. However, as described above, the lower machine table 34 and the elastic body (rubber) 35 are configured, and in fact, the biasing force is absorbed by the elastic body (rubber) 35. Therefore, when the silicon 1C substrate 4 is applied with a predetermined pressure from below the air filling container 40, the pressure can be evenly applied to the substrate surface without risk of lateral displacement. That is, the unit cell interval can be kept uniform. Therefore, it is assumed that even if the silicon 1C substrate 4 is deflected during press molding, the two substrates will be pressed like a spacer ball 6 in the packaging adhesive 7 while correcting the cell interval. Therefore, the liquid crystal display element 10 can maintain a desired uniform cell interval during the bonding process, such as a good result when only one interference band appears. This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) I ------ r ----- (Please read the notes on the back before filling this page) Order the staff of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by a consumer cooperative 573153 A7 ___B7__ 5. Description of the invention (13) Therefore, when the liquid crystal display element 10 is applied to a projector or a projection television, it greatly contributes to the improvement of shadows and color patches. Furthermore, the result can simply modify the uniformity of the liquid crystal injection in the later process and the cell spacing of the packaging process and directly reduce the processing time of the process. Next, the lower machine tool table 34 located on the silicon 1C substrate 4 side is also raised by the ascending air filling the container 40. When the silicon 1C substrate 4 reaches the advance position to be in contact with the glass substrate 2, it is set on the lower machine tool. The angle measuring table 39 below the worktable 34 contains a not-shown goniometer to adjust the parallelism of the glass substrate 2 and the silicon 1C substrate 4. And if the same type of substrate is used to manufacture the second liquid crystal display element, this adjustment can be omitted. After that, the air filling container 40 was started again, and a compression force of 0.1 MPa (0.63 Kgf) to 0.3 MPa (3 Kgf) was applied to the lower machine table 34. Outside the range of compressive force, if it is less than 0.1Mpa (0.63Kgf) or more than 0.3Mpa (3Kgf), as described above, the fringe using ammonia-neon laser light interference will be on the substrate surface, and it is not limited to being two concentric circles. (1 and 0.3 // m) It is better not to be limited to less than 1. It can be known from experiments that the ideal compression force is proved to be about 0.25Mpa through various experiments. Secondly, the two substrates are aligned and positioned. This system performs alignment and positioning according to the outline of the substrate. In addition, the level mark on the substrate is not shown in the figure. It can be detected by CCD (Charge Coupled Device). Of course, the XY vertical and horizontal moving stage of the machine tool table can be adjusted. The specified compressive force applied by the air filling container 40 to the lower machine table 34 is (0.1 MPa (0.63 Kgf) to 0.3 Mpa (3 Kgf)) and is held for about 30 seconds from the contact between the two substrates 2,4. This completes the empty cell with no liquid crystal between two and two substrates. For the next ten seconds, the 365nm UV ^ paper size not shown in the figure is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) _ ------ r ----- (Please read first Note on the back, please fill in this page again.) Order printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 573153 A7 _ B7 V. Description of the invention (14) The line of light is illuminated by about 3000 Joules from the upper machine table 3 to the packaging adhesive 7 dissolves the silica glass, and hardens and fixes the packaging adhesive 7. (Please read the precautions on the back before filling this page.) Then inject liquid crystal into the empty cell liquid crystal injection port 9 and seal and fix the liquid crystal injection port 9 with an adhesive to obtain the desired liquid crystal display element 10. The liquid crystal injection device and method will be described in detail later. About the uniformity of the cell interval Under the series of joint conditions described above, the interference pattern as an index of uniformity can be obtained at more than 90% of the substrate (corresponding to the difference between the central and marginal cell intervals of 0.3 or less). . Therefore, according to this embodiment, the processing time can be greatly reduced. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The outer frame portion 32 and the central projection portion 33 of the protruding portion will be described here with reference to the third and fourth drawings. With regard to the third figure, the outer frame portion 32 is formed integrally with one side of the upper machine table 31. As shown in the first figure, the width (interval) of the outer frame portion 32 is adhered to the glass substrate 2 and the silicon 1C substrate 4 in a normal state, and the interval between the spacer balls 6 which becomes the seal and the adhesive 7 is slightly equal. The central protruding portion 33 of the fourth figure is located closer to the central portion than the outer frame portion 32 and is formed integrally with the outer frame with the same thickness. The thickness t of the outer frame portion 32 is larger than the size of the contaminants. If it is 100 or more, even if the contaminants are mixed between the upper machine table 31 and the glass substrate 2, the contaminants can be stored in the outer frame portion. Within 32, it is not easy to cause the problem of uneven unit cell spacing. In the structure of the preamble frame 32, if the silicon 1C substrate 4 is excessively distorted and the central portion of the glass substrate 2 is depressed, as shown in the fourth figure, it is located closer to the center than the outer frame portion 32. For example, if it is formed with the same thickness The central protruding portion 33 can be prevented beforehand. In addition, the outer frame portion 32 of this embodiment adopts a mouth shape, and there are no restrictions. Of course, Rutian -17 can also be used. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 573153 A7 B7 5. Description of the invention (15) Shape. In this way, when the upper machine table 31 and the protrusions (the outer frame portion 32, the central protruding portion 33) are integrally formed, when the moving mechanism (air filling container 40) is started to form, only the protrusions coincide with the glass substrate 2, Assume that even if there are pollutants attached to the glass substrate 2, because the pressure is not directly applied to the machine tool table 31, the surface of the glass substrate 2 will not be contaminated by squeezing the pollutants (related to the deterioration of the projection image display quality), It also does not pressurize the glass substrate 2 by contaminants, which can avoid uneven cell spacing. Therefore, it helps to improve the yield of the liquid crystal display device. In addition, the substrate of this embodiment is described by taking a glass substrate 2 and a silicon 1C substrate 4 as an example. Of course, even if a glass substrate is used instead of the silicon 1C substrate 4, only a glass substrate may be used to constitute the element substrate. Next is a liquid crystal injection sealing device and method for a liquid crystal display element, and a manufacturing device and a manufacturing method of the present invention are described below. The eleventh figure is an overall view of the ideal embodiment of the liquid crystal display element manufacturing device of the present embodiment, the twelfth figure is a schematic sectional view showing the method of manufacturing the liquid crystal display element of this embodiment, and the thirteenth figure is the same as the liquid crystal display The oblique view of the element structure, the fourteenth figure is the same cross-sectional view, and the fifteenth figure is an explanatory diagram showing the implementation result of the sealing process. The same reference numerals are used for the same parts as the previous examples, and detailed descriptions are omitted. The eleventh figure is an overall view showing an ideal embodiment of the liquid crystal display element manufacturing apparatus 300 of this embodiment. The eleventh figure is the cell transport robot, 320 is the injected liquid crystal cell cassette, 330 is the sealed cell cassette, 340 is the first mechanism to detect the presence of liquid crystal, and 350 is the cell with cell interval measurement. Standards are applicable to China National Standard (CNS) A4 specifications (210X297 mm) _ 18 —----- r ----- (Please read the notes on the back before filling this page) Order as an employee of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the consumer cooperative 573153 A7 B7 V. Description of the invention (16) The second mechanism of the mechanism and the unit cell heating mechanism, 360 is the unit with the unit cell pressure mechanism, the wipe liquid crystal mechanism, the sealant coating mechanism, the sealant wipe mechanism, A third mechanism such as a pressure control mechanism, 370 is a fourth mechanism including a cell interval measurement mechanism, an ultraviolet irradiation mechanism, and a cell heating mechanism, etc., 380 is a fifth structure sealer permeation amount measurement mechanism (image processing mechanism), Reference numeral 390 denotes a central index table disposed at the center of the first mechanism 340 to the fifth mechanism 380, and the central index table 390 is a structure capable of freely rotating in the same direction. A method of obtaining the liquid crystal display element 10 using the liquid crystal display element manufacturing apparatus 300 of this embodiment will be described with reference to Figs. 13 and 14. First, the surface of the glass substrate 2 of the liquid crystal display element 10 must be provided with an antireflection film 8 in advance, the transparent electrode film 1 is # 1737 glass manufactured by Corning Corporation, and the surface has a reflective pixel that receives a driving voltage from a CMOS transistor Silicon 1C substrate 4 for electrode 3, forming alignment films 21, 22 respectively, pixel electrodes (display area) 3 on silicon 1C substrate 4 are mixed with spacers of SW series manufactured by Yakushi Kasei Corporation 6, and coated with Kyoritsu Chemical After MAINSHIRU Packaging Adhesive 7 (WR series 歹 [J) manufactured by Sangyo Corporation, the two substrates 2 and 4 described above are bonded and bonded by the compression molding described above. Therefore, the cell spacing between the two substrates 2 and 4 is formed. In addition, the fifth and sixth figures described above omit the illustration of the alignment films 21 and 22. Thereafter, the two substrates 2 and 4 bonded and bonded are transported to a vacuum chamber not shown in the figure, and the prepared liquid crystal is injected through the liquid crystal injection port 9 in the vacuum chamber, and the liquid crystal cell 400 has been injected (see the first section). (Figure 12) The previously mentioned liquid crystal injection port 9 is closed, and the liquid crystal display element 10 is completed. The injected liquid crystal 5 is a nematic liquid crystal. The following is a brief description of the liquid crystal display device manufacturing device I ----- r ----- (please read the precautions on the back before filling this page)

、1T 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -19- 573153 A7 B7 五、發明説明（17) 300、於液晶注入後修正不均一的晶胞間隔而得致均一性良 好晶胞間隔之點。 (請先閲讀背面之注意事項再填寫本頁) 本實施例液晶顯示元件製造裝置300其特徴爲具有測定 液晶注入後及塗敷封閉劑於晶胞及測定晶胞側面加壓解放 後的晶胞間隔之機能。還有根據液晶注入後晶胞間隔測定 的結果進行由晶胞側面控制加壓條件之機能。因此可用晶 胞側面加壓進行液晶注入後引起的面内晶胞間隔不均之矯 正、且可隨著加壓解放後時間經過的變化掌握晶胞間隔的 絕對値、於面内晶胞間隔均一性最佳時點用紫外線照射硬 化封閉劑130(參照第十二圖）維持良好的晶胞間隔均一性。 該液晶顯示元件製造裝置300在解放晶胞側面加壓的同 時配合時間變化掌握晶胞間隔均一性、獲得封閉劑1 30於液 晶注入口 9内的最佳浸透量、具有加熱已注入液晶晶胞之加 熱機構。且加熱於該已注入液晶晶胞400會降低封閉劑1 30 的黏性、可控制液晶注入口 9之含浸速度。 經濟部智慧財產局員工消費合作社印製 爲了解決前記課題之製造方法採用以下方法。首先進 行液晶注入後的晶胞測定。（第十二圖（b))。液晶注入後如 第二圖（a)所示晶胞間隔均一性通常爲面中央呈凸状居多。 當測定該晶胞間隔時、後段工程爲了控制封閉劑130的含浸 、會對已注入液晶晶胞400進行加熱。 其次根據晶胞間隔測定結果決定加壓於已注入液晶晶 胞400側面的條件、晶胞側面會因空氣壓之加壓使面中央附 近呈内凹状（第十二圖（c))。 此時擦拭因加壓已注入液晶晶胞400而擠出的液晶5a(第 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X297公釐） _如- 573153 A7 ____B7_ 五、發明説明（18) 十二圖（d))。 (請先閲讀背面之注意事項再填寫本頁) 其次是用例如圖未標示的配分器將封閉劑1 30塗敷於液 晶注入口 9(第十二圖（e))。 接下來是解放晶胞側面加壓使晶胞面的凹凸呈均一状 態。前記的解放加壓使已注入液晶晶胞400内成減壓状態、 使得封閉劑130向液晶注入口 9進行滲透。此時擦拭液晶注 入口 9多餘的封閉劑130(第十二圖（f))。 從該時間點開始再次測定晶胞間隔、同時再對已注入 液晶晶胞400進行加熱（第十二圖（g))。 當晶胞間隔面内均一性良好時（± 0.0 5 以内）用紫外線 照射液晶注入口 9内的封閉劑130使其固化（第十二圖（h))。 之後掌握液晶注入口 9内封閉劑130之浸透量影像、依 影像處理判定封閉完畢（第十二圖（〇)。 以下係關於本實施例液晶顯示元件製造裝置300於液 晶注入後修正不均一的晶胞間隔而得致均一性良好晶胞間 隔之點參照第十一圖、第十二圖再進一歩具體説明。 經濟部智慧財產局員工消費合作社印製 如第十二圖（a)注入液晶5之已注入液晶晶胞400組裝於 第十一圖的已注入液晶晶胞卡匣3 20内。其次從已注入液晶 晶胞卡匣320内用晶胞搬送機器人310將前記已注入液晶晶 胞400單片逐次取出送至最先的載物台、即第一機構檢測液 晶有無機構340。 於第一機構之檢測液晶有無機構340確認已注入液晶晶 胞400内是否注入有液晶5。而且確認有液晶5後將該已注入 液晶晶胞400載置於中心索引表390上、載置該已注入液晶 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 〇1 - 573153 A7 B7 五、發明説明（19) 晶胞400的中心索引台390、例如是以順時針方向旋轉至下 一個載物台、即將該已注入液晶晶胞400搬送至具有晶胞間 隔測定機構及晶胞加熱機構之第二機構350。 如第十二圖（b)、第二機構350測定搬送來的已注入液晶 晶胞400之晶胞間隔且對該已注入液晶晶胞4〇〇進行加熱。 晶胞間隔的測定是用軟體解析計算位於長波長領域的干擾 光。加熱已注入液晶晶胞400以40°C〜60°C爲佳、最好是50 °C前後。用嵌入外套加熱器的區塊密接已注入液晶晶胞4〇〇 的單面進行加熱。 測定已注入液晶晶胞4 0 0之晶胞間隔和加熱該已注入液 晶晶胞400完畢' 將該已注入液晶晶胞400載置於中心索引 台390上、例如是以順時針方向旋轉至下一個載物台、亦即 將該已注入液晶晶胞400搬送至具有晶胞加壓機構、擦拭液 晶機構、封閉劑塗敷機構、封閉劑擦拭機構、加壓控制機 構等之第三機構360。 如第十二圖（c)〜第十二圖（f)、第三機構360根據在第二 機構350測定已注入液晶晶胞400之晶胞間隔結果、從來自 中心索引台390的已注入液晶晶胞400之兩基板2,4 的外側開始進行晶胞加壓結構之空氣壓加壓。此時與 兩基板2,4接觸的部分爲液晶顯示元件10之顯示領域外圍、 可加壓至0.5Mpa。 接觸部分的材質可用氨基甲酸樹脂，微通等、這些材料 並無特別限定。還有接觸部分以不使加壓空氣外漏的材質 爲佳。加壓的理想條件爲0.1〜0.2Mpa。可控制加壓時間以 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ 22 - ------η----- (請先閱讀背面之注意事項再填寫本頁) 訂 b. 經濟部智慧財產局員工消費合作社印製 573153 A7 B7 五、發明説明（2〇) (請先閱讀背面之注意事項再填寫本頁) 10〜30秒爲佳。如前所記第三機構360在加壓的同時也具有 擦拭由已注入液晶晶胞400的液晶注入口 9擠出的液晶5之機 構。而且藉由該加壓使已注入液晶晶胞400面内的晶胞間隔 均一性呈内凹状態（第十二圖（d))。 接著以圖未標示之配分器將長瀨産業公司所製的紫外 線固化型封閉劑1 3 0用封閉劑塗敷機構塗敷。如前所記之第 三機構360設有在塗敷後擦拭多餘的封閉劑130之封閉劑擦 拭機構。於前記加壓製程後用加壓控制機構解放（減壓）施加 之壓力恢復至大氣壓力。藉著解放加壓封閉劑1 30被引至液 晶注入口 9將該液晶注入口 9封閉（第十二圖（f))。 如此於第三機構360進行晶胞加壓、液晶擦拭、封閉劑 塗敷、封閉劑擦拭、用加壓控制作加壓解放等完畢後的已 注入液晶晶胞400載置於中心索引台390後、例如是以順時 針方向旋轉至下一個載物台、亦即將該已注入液晶晶胞400 搬送至具有晶胞間隔測定機構、紫外線照射機構、晶胞加 熱機構等之第四機構370。 經濟部智慧財產局員工消費合作社印製 如第十二圖（g)〜第十二圖（h)、第四機構370首先用晶 胞間隔測定機構測定加壓解放後的已注入液晶晶胞400之晶 胞間隔。此時晶胞加熱機構再次加熱該已注入液晶晶胞400 。加熱方法與前記相同、用嵌入加熱器的區塊密接已注入 液晶晶胞400的單面進行加熱。前記之晶胞間隔測定爲以毎 一單位時間測定隨著時間經過變化的晶胞間隔、當晶胞間 隔均一性平坦時、用紫外線機構照射已滲透至液晶注入口 9 的封閉劑130。封閉劑130因此固化、晶胞間隔也停止變化（ 本紙張尺度適用中國國家標準（CNS ) A4規格（21GX 297公釐) 573153 A7 B7 21 五、發明説明（ 第十一圖（h))。還有本實施例之晶胞間隔均一性範圍在土 0.05 以内。 (請先閱讀背面之注意事項再填寫本頁) 如此於第四機構370進行晶胞間隔測定、紫外線照射、 晶胞加熱等完畢後的已注入液晶晶胞400、載置於前記之中 心索引台390後、載置該已注入液晶晶胞400之中心索引台 390例如是以順時針方向旋轉至下一個載物台、即將該已注 入液晶晶胞4 0 0搬送至具有封閉劑浸透量測定機構（影像處理 機構）之第五機構380。 如第十二圖⑴第五機構380爲將滲入液晶注入口 9内的 封閉劑130浸透量用封閉劑浸透量測定機構（影像處理機構 )CCD相機擷取攝影資料、影像處理預先設定判斷基準、進 行封閉製程之合格判定。 如此於第五機構3 80進行合格判定完畢後的已注入液晶 晶胞400、載置於前記之中心索引台390後、載置該已注入 液晶晶胞400之中心索引台390例如是以順時針方向旋轉、 即將該已注入液晶晶胞400搬送至前記第一機構之檢測液晶 有無機構340。 經濟部智慧財產局員工消費合作社印製 若搬送至第一機構之檢測液晶有無機構340的已注入液 晶晶胞400爲良品的話、該已注入液晶晶胞400會如圖箭頭 方向所示搬送回收至已封閉晶胞卡匣内。若搬送的已注入 液晶晶胞400爲不良品的話則回收至圖未標示的NG晶胞卡 匣内。根據以上已注入液晶晶胞400爲液晶顯示元件1 〇、被 當作投影器、投影電視等的重要組件使用。 第十五圖係顯示有關本實施例之液晶顯示元件製造裝 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -24- 573153 A7 _____B7 五、發明説明（22) (請先閲讀背面之注意事項再填寫本頁) 置3 00所製造的液晶顯示元件封閉後晶胞間隔測定値之説明 Η °同圖（a)爲液晶注入後的値、同圖（b)爲封閉固化後的値 °周圍的晶胞間隔爲液晶顯示元件1〇影像顯示領域四角的 平均値。而均一性則是中心値到周圍値的差、該値若越接 近零的話表示均一性越好。 根據該測定結果顯示液晶注入後之均一性於封閉劑固 化後有很大改善、除了注入後均一性特別差的元件三號和 元件七號以外、封閉劑固化後的均一性均可維持在0.1 以 下、可知可得相當良好的晶胞間隔均一性。另外，在此的加 壓條件一定、關於元件三號和元件七號若分別變更加壓條 件、於封閉劑固化後亦可得良好均一性。因此關於本實施 例液晶顯示元件製造裝置及液晶顯示元件製造方法可得顯 示影像品質優秀的液晶顯示元件。 【發明效果】 經濟部智慧財產局員工消費合作社印製 如以上詳細説明、作爲加壓成型裝置之本發明製造裝 置具備有、保持元件基板（液晶顯示元件）的玻璃基板於下方 的上機床工作台、和保持元件基板（液晶顯示元件）的矽1C 基板（或其他玻璃基板）基板於上方的下機床工作台、和支撐 該下機床工作台的支撐機構、和移動該支撐機構的移動機 構、支撐機構至少由與下機床工作台下方吻合的吻合機構 、和彈性機構以及支撐該吻合機構、彈性機構的剛體所構 成、當起動移動機構作元件基板（液晶顯示元件）之加壓成型 時、元件基板（液晶顯示元件）會因下機床工作台之具自由度 本紙張尺度適用中國國家標準（CNS ) A4規格（210'〆297公釐） - ~~ 573153 A7 B7 五、發明説明（23) (請先閲讀背面之注意事項再填寫本頁) 傾斜方向使吻合機構受力、而由彈性機構吸收該力、而使 坡璃基板與矽1C基板（或均爲玻璃基板）互相補正成實際平 衡状態。 因此假設加壓成型時即使兩片基板偏傾、該兩片基板 也會像封裝黏合劑中的間隔球一樣、一邊修正晶胞間隔同 時進行加壓。因此在接合製程可保持所要的晶胞間隔均一 性、如要求只出現一條干擾紋之良好結果。因此可簡單地 調整後段製程液晶注入與封裝製程之晶胞間隔均一性、直 接縮短製程的處理時間。而且將本發明所製造的液晶顯示 元件應用於投影器或投影電視時、對於陰影、色塊之改善 有很大的貢獻。 經濟部智慧財產局員工消費合作社印製 另外、於上機床工作台下方有一體成型之突起部、當 移動機構起動加壓成型時、只有該突起部分與玻璃基板吻 合、假設即使有汙染物附著於玻璃基板、因爲沒有直接在 上機床工作台加壓於該汙染物、不會壓扁汙染物而汙染玻 璃基板表面（與投射影像顯示品質惡化有關）、也不會藉著汙 染物加壓於玻璃基板、可避免局部晶胞間隔不均。因此在 液晶顯示元件製程上有助於提高良率。 再者爲加壓成型方法之本發明之製造方法、安裝表面 具有透明導電膜之玻璃基板於上機床工作台之下方、安裝 已預先塗敷封裝黏合劑之矽1C基板於下機床工作台之上方 、用空氣塡充容器提昇下機床工作台、矽1C基板與玻璃基 板接觸前用角度調整手段調整矽1C基板的角度、之後再度 提昇空氣塡充容器並施與指定壓力於前記下機床工作台、 -26- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 573153 A7 B7 五、發明説明（24) (請先閲讀背面之注意事項再填寫本頁) 下機床工作台自由傾斜方向施力於矽1C基板上、並由彈性 機構吸收該施力、而使矽1C基板對於玻璃基板作實際平衡 状態補正、其次用紫外線照射封裝黏合劑使其固化、因玻 璃基板與矽1C基板會緊密接合、可避免局部晶胞間隔不均 、在液晶顯示元件製程上有助於提高良率。 作爲液晶注入封閉裝置之本發明製造裝置具有測定液 晶注入晶胞在注入液晶後的晶胞間隔之第一測定機構、和 加熱液晶注入晶胞之加熱機構、和加壓於液晶注入晶胞指 定範圍之加壓機構、和擦拭因施壓加壓機構而擠出的液晶 之液晶擦拭機構、和封閉液晶注入口而塗敷封閉劑之封閉 劑塗敷機構、和擦拭封閉劑塗敷機構所導致塗敷多餘的封 閉劑之封閉劑擦拭機構、和加壓機構於停止加壓後測定晶 胞間隔之第二測定機構、和第二測定機構在晶胞間隔均一 性合於指定範圍之際、用紫外線照射封、閉劑使其固化之 紫外線照射機構、因設有檢測液晶注入口封閉劑浸透量之 畫像處理機構、可修正液晶注入後晶胞間隔的不均、而獲 得良好的晶胞間隔均一性。 經濟部智慧財產局員工消費合作社印製 還有、液晶注入封閉方法之本發明製造方法包含有測 定液晶注入晶胞在注入液晶後的晶胞間隔之第一測定製程 、和加熱液晶注入晶胞之加熱製程、和施壓於兩片基板外 側的指定領域之加壓製程、和擦拭該加壓製程而導致由液 晶注入口擠出的液晶之液晶擦拭製程、和塗敷封閉劑於液 晶注入口之塗敷製程、和加壓製程於停止加壓後測定晶胞 間隔之第二測定製程、和第二測定製程在測定晶胞間隔均 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ 27 _ 573153 A7 ^__ B7 五、發明説明（25) 一性合於指定範圍之際、用紫外線照射前記封閉劑使其固 化之固化製程、和檢測於液晶注入口的封閉劑浸透量之檢 測製程、可修正液晶注入後晶胞間隔的不均、而獲得良好 的晶胞間隔均一性。 【圖面之簡單説明】 第一圖係顯示有關本發明液晶顯示元件製造裝置當作 壓縮成型裝置實施例之全體圖。 第二圖係顯示有關本發明液晶顯示元件製造裝置當作 壓縮成型裝置實施例之主要部分槪略圖。 第三圖係顯示有關本發明液晶顯示元件製造裝置當作 壓縮成型裝置之上機床工作台主要部分説明圖。 第四圖係顯示有關構成本發明液晶顯示元件製造裝置 當作壓縮成型裝置之上機床工作台其他主要部分説明圖。 第五圖係顯示一般液晶顯示元件的構成零件之分解側 視圖。 第六圖係顯示一般液晶顯示元件的構成零件之構成説 明圖。 第七圖係構成以往液晶顯示元件製造裝置之主要零件 説明圖 第八圖係構成以往液晶顯示元件製造裝置之其他主要 零件説明圖。 第九圖係構成以往液晶顯示元件製造裝置之其他主要 零件説明圖。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） .28 -" 一"" I ^---r -- (請先閲讀背面之注意事項再填寫本頁)1, 1T Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives. This paper is printed in accordance with Chinese National Standard (CNS) A4 (210X 297 mm) -19- 573153 A7 B7 V. Description of the invention (17) 300. Corrected after liquid crystal injection Uneven cell spacing results in a point of good cell uniformity. (Please read the precautions on the back before filling in this page) The liquid crystal display device manufacturing device 300 of this embodiment is characterized by having a unit cell after measuring liquid crystal injection, applying a sealant to the unit cell, and measuring the unit cell after pressure release. The function of the interval. There is also the function of controlling the pressurization condition from the side of the cell based on the results of the measurement of the cell interval after liquid crystal injection. Therefore, the in-plane cell interval unevenness caused by liquid crystal injection can be corrected by the side cell pressure, and the absolute interval of the cell interval can be grasped with the change of time after liberation, and the cell interval is uniform in the plane. When the properties are optimal, the hardening sealant 130 (see FIG. 12) is irradiated with ultraviolet rays to maintain good unit cell uniformity. The liquid crystal display device manufacturing device 300 is capable of mastering the uniformity of the cell interval while liberating the side pressure of the cell, grasping the uniformity of the cell interval, obtaining the optimal penetration amount of the sealant 1 30 into the liquid crystal injection port 9, and heating the injected liquid crystal cell. Of heating mechanism. Moreover, heating the injected liquid crystal cell 400 will reduce the viscosity of the sealant 1 30 and control the impregnation speed of the liquid crystal injection port 9. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The following methods are used to solve the manufacturing problems mentioned above. The unit cell measurement after liquid crystal injection is performed first. (Figure twelve (b)). After the liquid crystal is injected, as shown in the second figure (a), the uniformity of the cell spacing is usually convex in the center of the plane. When the cell interval is measured, in order to control the impregnation of the sealant 130 in the later stage, the injected liquid crystal cell 400 is heated. Secondly, according to the measurement result of the cell interval, the conditions for pressurizing the side of the injected liquid crystal cell 400 are determined. The side of the cell will be concave due to the pressure of the air pressure (Figure 12 (c)). At this time, wipe the liquid crystal 5a extruded due to the injection of the liquid crystal cell 400 under pressure (this paper size applies the Chinese National Standard (CNS) A4 specification (210 X297 mm) _such as 573153 A7 ____B7_ V. Description of the invention (18 ) Figure twelve (d)). (Please read the precautions on the back before filling this page) Secondly, apply the sealant 1 30 to the liquid crystal injection port 9 with a dispenser not shown in the figure (Figure 12 (e)). The next step is to press the side of the liberated cell to make the unevenness on the cell surface uniform. The liberation pressure mentioned above makes the liquid crystal cell 400 injected into a decompressed state, so that the sealant 130 penetrates into the liquid crystal injection port 9. At this time, wipe the excess sealant 130 of the liquid crystal injection port 9 (Fig. 12 (f)). From this time point, the cell interval is measured again, and at the same time, the injected liquid crystal cell 400 is heated again (Figure 12 (g)). When the in-plane uniformity of the cell interval is good (within ± 0.0 5), the sealing agent 130 in the liquid crystal injection port 9 is irradiated with ultraviolet rays to be cured (Fig. 12 (h)). Then grasp the image of the amount of penetration of the sealant 130 in the liquid crystal injection port 9 and determine that the sealing is completed according to the image processing (Figure 12 (0). The following is about the unevenness correction of the liquid crystal display device manufacturing device 300 of this embodiment after the liquid crystal injection. The unit cell is spaced to achieve uniformity. The points of the unit cell are well-defined. Refer to Figures 11 and 12 for further details. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs as shown in Figure 12 (a). The injected liquid crystal cell 400 of 5 is assembled in the injected liquid crystal cell cassette 3 20 of the eleventh figure. Then the cell transfer robot 310 is used to transfer the previous liquid crystal cell from the injected liquid crystal cell cassette 320. The 400 single pieces are sequentially taken out and sent to the first stage, that is, the first mechanism detects the presence or absence of the liquid crystal mechanism 340. The first mechanism detects the presence or absence of the liquid crystal mechanism 340 to confirm whether the liquid crystal 5 has been injected into the liquid crystal cell 400. Also confirm After the liquid crystal 5 is placed, the injected liquid crystal cell 400 is placed on the central index table 390, and the injected liquid crystal is placed on this paper. The size of the paper applies to the Chinese National Standard (CNS) A4 specification (210X297 mm). 〇1-573153 A7 B7 V. Description of the invention (19) The center index stage 390 of the unit cell 400, for example, is rotated clockwise to the next stage, that is, the liquid crystal unit cell 400 that has been injected is transported to a unit cell interval. The second mechanism 350 of the measuring mechanism and the unit cell heating mechanism. As shown in FIG. 12 (b), the second unit 350 measures the cell interval of the injected liquid crystal cell 400 and sends the injected liquid crystal cell 4o. 〇The heating is performed. The cell interval is measured by software to calculate the interference light in the long-wavelength area. The liquid crystal cell 400 that has been injected is preferably heated at 40 ° C ~ 60 ° C, preferably around 50 ° C. It is embedded by The block of the jacket heater is in close contact with one side of the liquid crystal cell 400 which has been injected for heating. The cell interval of the liquid crystal cell 400 which has been injected and the heating of the injected liquid crystal cell 400 is completed. The unit cell 400 is placed on the center index table 390, for example, it is rotated clockwise to the next stage, that is, the injected liquid crystal unit cell 400 is transported to the unit with a unit cell pressurizing mechanism, a wipe liquid crystal mechanism, and a sealant. Coating mechanism, sealant The third mechanism 360 of the wiping mechanism, the pressure control mechanism, etc. As shown in the twelfth figure (c) to the twelfth figure (f), the third mechanism 360 measures the crystal that has been injected into the liquid crystal cell 400 according to the second mechanism 350. As a result of the cell separation, the air pressure of the cell pressurizing structure is started from the outside of the two substrates 2, 4 of the liquid crystal cell 400 which have been injected from the central index table 390. At this time, the parts in contact with the two substrates 2, 4 are The periphery of the display area of the liquid crystal display element 10 can be pressurized to 0.5Mpa. The material of the contact portion can be urethane resin, micro-pass, etc. These materials are not particularly limited. There is also a material of the contact portion so as not to leak the pressurized air. Better. The ideal conditions for pressurization are 0.1 ~ 0.2Mpa. Controllable pressurization time Applies Chinese National Standard (CNS) A4 specification (210X297 mm) to this paper size _ 22------- η ----- (Please read the precautions on the back before filling this page ) Order b. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 573153 A7 B7 V. Description of the invention (20) (Please read the notes on the back before filling this page) 10 ~ 30 seconds is better. As mentioned previously, the third mechanism 360 also has a mechanism for wiping the liquid crystal 5 extruded from the liquid crystal injection port 9 into which the liquid crystal cell 400 has been injected while pressurizing. Furthermore, the uniformity of the cell spacing in the plane of the liquid crystal cell 400 that has been injected into the liquid crystal cell is concaved by this pressurization (Figure 12 (d)). Next, a UV-curable sealant 130 manufactured by Nagase Sangyo Co., Ltd. was coated with a sealant coating mechanism using a dispenser not shown in the figure. As mentioned previously, the third mechanism 360 is provided with a sealant wiping mechanism that wipes the excess sealant 130 after coating. After the aforementioned pressurization process, the pressure applied by the pressurization control mechanism is released (decompressed) to return to atmospheric pressure. The liquid crystal injection port 9 is closed by being released to the liquid crystal injection port 9 by releasing the pressurizing sealant 1 30 (Figure 12 (f)). In this way, the liquid crystal cell 400 which has been injected into the third indexing unit 360 after the unit cell pressurization, liquid crystal wiping, sealant coating, sealant wiping, and pressurization control for press release are placed on the center index table 390. For example, it is rotated clockwise to the next stage, that is, the liquid crystal cell 400 that has been injected is transferred to a fourth mechanism 370 including a cell interval measuring mechanism, an ultraviolet irradiation mechanism, and a cell heating mechanism. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the twelfth figure (g) to twelfth figure (h). The fourth mechanism 370 first uses the cell interval measuring mechanism to measure the injected liquid crystal cell 400 after pressurization and liberation. The unit cell interval. At this time, the cell heating mechanism heats the injected liquid crystal cell 400 again. The heating method is the same as that described above. The block embedded in the heater is used to tightly contact one side of the liquid crystal cell 400 that has been injected to heat. In the foregoing description, the unit cell interval is measured by measuring unit cell intervals over time with a unit time. When the uniformity of the unit cell interval is flat, the blocking agent 130 which has penetrated into the liquid crystal injection port 9 is irradiated with an ultraviolet mechanism. As a result, the sealing agent 130 is solidified, and the cell interval also stops changing. (This paper size applies the Chinese National Standard (CNS) A4 specification (21GX 297 mm). 573153 A7 B7 21. 5. Description of the invention (Figure 11 (h)). Also In this example, the uniformity range of the cell interval is less than 0.05. (Please read the precautions on the back before filling this page.) After the cell interval measurement, ultraviolet irradiation, and cell heating are completed in the fourth mechanism 370, After having been injected into the liquid crystal cell 400 and placed on the central index table 390 of the preamble, the central index table 390 on which the injected liquid crystal cell 400 is placed is rotated clockwise to the next stage, for example, The injected liquid crystal cell 400 is transported to a fifth mechanism 380 having a sealant permeation amount measuring mechanism (image processing mechanism). As shown in FIG. 12, the fifth mechanism 380 penetrates the sealant 130 which penetrates into the liquid crystal injection port 9. Blocking agent impregnation amount measurement mechanism (image processing mechanism) CCD camera captures photographic data, image processing sets judgment criteria in advance, and performs the pass judgment of the closed process. After the pass judgment is completed, the liquid crystal cell 400 has been injected and placed on the center index table 390 of the preamble, and the center index table 390 on which the liquid crystal cell 400 has been placed is rotated clockwise, for example, the injected The liquid crystal cell 400 is transferred to the first institution to detect the existence of the liquid crystal mechanism 340. It is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. If the liquid crystal unit 400 that has been transferred to the first institution to detect the liquid crystal presence mechanism 340 is a good product, The injected liquid crystal cell 400 will be transported to the closed cell cassette as shown by the arrow direction. If the injected liquid crystal cell 400 is a defective product, it will be recovered to the NG cell cassette not shown in the figure. According to the above, the liquid crystal cell 400 that has been injected is a liquid crystal display element 10, and is used as an important component of a projector, a projection television, etc. The fifteenth figure shows the dimensions of the paper used in the manufacture of the liquid crystal display element of this embodiment. Applicable to China National Standard (CNS) A4 specification (210X297mm) -24- 573153 A7 _____B7 V. Description of invention (22) (Please read the notes on the back before filling (This page) Description of the cell interval measurement after the liquid crystal display element manufactured at 3 00 is sealed. ° The same figure (a) is after the liquid crystal is injected, and the same figure (b) is the crystal around 値 ° after the sealing and curing. The cell interval is the average 値 of the four corners of the image display area of the liquid crystal display element 10. The uniformity is the difference between the center 値 and the surrounding 、. The closer the 値 is to zero, the better the uniformity. According to the measurement results, it is shown that after the liquid crystal is injected, The uniformity is greatly improved after the sealant is cured. Except for the third and seventh components, which have particularly poor uniformity after injection, the uniformity after curing of the sealant can be maintained below 0.1, which shows that it is quite good. Unit cell uniformity. In addition, the pressure conditions here are constant, and if the pressure conditions are changed for component No. 3 and component 7, respectively, good uniformity can be obtained after the sealant is cured. Therefore, regarding the liquid crystal display element manufacturing device and the liquid crystal display element manufacturing method of this embodiment, a liquid crystal display element having excellent display image quality can be obtained. [Effects of the Invention] The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed as detailed above, the manufacturing apparatus of the present invention, which is a press molding apparatus, includes a glass substrate holding and holding a component substrate (liquid crystal display element) on the lower machine table. , And a silicon 1C substrate (or other glass substrate) that holds the element substrate (liquid crystal display element) substrate above the lower machine tool table, a support mechanism that supports the lower machine tool table, and a moving mechanism and support that moves the support mechanism The mechanism is composed of at least an anastomosis mechanism that fits under the lower machine table, an elastic mechanism, and a rigid body that supports the anastomosis mechanism and elastic mechanism. When the moving mechanism is activated for press molding of the element substrate (liquid crystal display element), the element substrate (Liquid crystal display element) Due to the freedom of the lower machine table, the paper size is applicable to the Chinese National Standard (CNS) A4 specification (210'〆297 mm)-~ 573153 A7 B7 V. Description of the invention (23) (Please (Read the precautions on the back before filling in this page.) The tilting direction forces the anastomosis mechanism, and the elastic machine Absorb this force, and the slope glass substrate 1C silicon substrate (glass substrate or both) corrected to the actual state of equilibrium with each other. Therefore, it is assumed that even if the two substrates are deflected during press molding, the two substrates are pressed like a spacer ball in the packaging adhesive while correcting the cell interval. Therefore, the desired unit cell spacing uniformity can be maintained during the bonding process, and if only one interference pattern is required, a good result is obtained. Therefore, the uniformity of the cell interval between the liquid crystal injection and the packaging process of the rear-stage process can be simply adjusted, and the processing time of the process can be directly reduced. Furthermore, when the liquid crystal display element manufactured by the present invention is applied to a projector or a projection television, it greatly contributes to the improvement of shadows and color patches. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. In addition, there is an integrally formed protrusion under the upper machine table. When the moving mechanism starts press molding, only the protrusion is consistent with the glass substrate. It is assumed that even if pollutants adhere to The glass substrate is not directly pressurized to the pollutant on the upper machine table, does not flatten the pollutant and contaminate the surface of the glass substrate (related to the deterioration of the projection image display quality), and does not pressurize the glass by the pollutant. The substrate can avoid uneven cell spacing. Therefore, it helps to improve the yield in the manufacturing process of the liquid crystal display element. Furthermore, the manufacturing method of the present invention is a press molding method. A glass substrate having a transparent conductive film on the mounting surface is positioned below the upper machine table, and a silicon 1C substrate coated with a packaging adhesive is mounted above the lower machine table. 1. Use the air filling container to lift the machine tool table. Before the silicon 1C substrate contacts the glass substrate, adjust the angle of the silicon 1C substrate using the angle adjustment method. After that, lift the air filling container again and apply the specified pressure to the machine tool table. -26- This paper size is in accordance with Chinese National Standard (CNS) A4 (210X297 mm) 573153 A7 B7 V. Description of the invention (24) (Please read the precautions on the back before filling this page) Free tilt direction of the machine table Apply force on the silicon 1C substrate, and absorb the force by the elastic mechanism, so that the silicon 1C substrate compensates for the actual balance of the glass substrate, and then irradiate the packaging adhesive with ultraviolet rays to cure it, because the glass substrate and the silicon 1C substrate will be tight. Bonding can avoid uneven local cell spacing and help improve the yield in the manufacturing process of liquid crystal display elements. The manufacturing device of the present invention as a liquid crystal injection sealing device includes a first measurement mechanism for measuring a cell interval of a liquid crystal injection cell after the liquid crystal is injected, a heating mechanism for heating the liquid crystal injection cell, and a predetermined range of pressure applied to the liquid crystal injection cell. A pressure applying mechanism, a liquid crystal wiping mechanism that wipes out the liquid crystal extruded by the pressure applying pressure mechanism, a sealing agent applying mechanism that seals the liquid crystal injection port and applies a sealing agent, and a coating caused by wiping the sealing agent application mechanism The sealant wiping mechanism applying the excess sealant, the second measuring mechanism for measuring the cell interval after the pressure is stopped, and the second measuring mechanism using ultraviolet rays when the uniformity of the cell interval is within a specified range, using ultraviolet rays. Ultraviolet irradiation mechanism that irradiates the sealer and sealant to cure it, because it is equipped with an image processing mechanism that detects the penetration amount of the sealant of the liquid crystal injection port, it can correct the unevenness of the cell interval after liquid crystal injection, and obtain good uniformity of the cell interval . Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, and the method for manufacturing the liquid crystal injection sealing method of the present invention includes a first measurement process for measuring the cell interval of the liquid crystal injection cell after the liquid crystal is injected, and heating the liquid crystal injection cell. A heating process, a pressurizing process that presses a specified area outside the two substrates, a liquid crystal wiping process that wipes out the liquid crystal injection port caused by the pressurizing process, and applies a sealant to the liquid crystal injection port. The coating process, and the pressurization process are used to determine the cell interval after the pressurization is stopped. The second measurement process and the second measurement process are used to determine the cell interval. The paper size applies the Chinese National Standard (CNS) A4 (210X297 mm) ) _ 27 _ 573153 A7 ^ __ B7 V. Description of the invention (25) When the properties are within the specified range, the curing process of curing the sealer with ultraviolet rays before irradiation and the penetration of the sealant at the liquid crystal injection port The detection process can correct the unevenness of the cell interval after the liquid crystal is injected, and obtain good uniformity of the cell interval. [Brief description of the drawings] The first figure is an overall view showing an embodiment of the liquid crystal display device manufacturing apparatus of the present invention as a compression molding apparatus. The second figure is a schematic diagram showing a main part of an embodiment of the liquid crystal display device manufacturing apparatus of the present invention as a compression molding apparatus. The third figure is an explanatory diagram showing a main part of a machine tool table on which the liquid crystal display element manufacturing apparatus of the present invention is regarded as a compression molding apparatus. The fourth diagram is an explanatory diagram showing other main parts of a machine tool table constituting the liquid crystal display element manufacturing apparatus of the present invention as a compression molding apparatus. The fifth figure is an exploded side view showing constituent parts of a general liquid crystal display element. The sixth diagram is an explanatory diagram showing the constitution of components of a general liquid crystal display element. The seventh diagram is an explanatory diagram of main parts constituting a conventional liquid crystal display element manufacturing apparatus. The eighth diagram is an explanatory diagram of other main parts constituting a conventional liquid crystal display element manufacturing apparatus. The ninth figure is an explanatory diagram of other main components constituting a conventional liquid crystal display element manufacturing apparatus. This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) .28-" 一 " " I ^ --- r-(Please read the precautions on the back before filling this page)

、1T 經濟部智慧財產局員工消費合作社印製 573153 A7 B7 五、發明説明（26) 第十圖係構成以往液晶顯示元件製造裝置之其他主要 零件説明圖。 第十一圖係有關將本發明液晶顯示元件製造裝置當作 液晶注入密封裝置實施例之全體圖。 第十二圖係顯示有關將本發明液晶顯示元件製造方法 當作液晶注入密封方法的模式切面圖。 第十三圖係顯示液晶顯示元件的構造之側視圖。 第十四圖係顯示液晶顯示元件的構造之切面圖。 第十五圖係爲了説明本發明之效果圖。 第十六圖係顯示以往液晶顯示元件密封方法其液晶月包 模式之切面圖。 【圖號説明】 1 透明導電膜 2 玻璃基板 3 畫素電極（顯示領域） 4 矽1C基板 5 液晶 6 塡充劑 7 封裝黏合劑 8 防止反射膜 9 液晶注入口（密封部） 10 液晶顯示元件（元件基板） 11，13,15,18,31 上機床工作台 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐) :29 - ^ ------:---r -- (請先閱讀背面之注意事項再填寫本頁) 訂 k. 經濟部智慧財產局員工消費合作社印製 573153 A7 B7 五、發明説明（27) 經濟部智慧財產局員工消費合作社印製 12,17,19,34 下機床工作台 14,16 氣囊 20 彈性體 21 配向膜 22 配向膜 30,300 液晶顯示元件製造裝置 32 外框部分 33 中央突出部分 35 彈性體（橡膠） 36 中心柱 36a 中心前端部分 37 剛體 38 穿孑L 39 測角台 40 空氣塡充容器 310 晶胞輸送機器人 320 已注入液晶晶胞卡匣 330 密封劑晶胞卡匣 340 檢測液晶有無機構（第一機構） 350 第二機構 360 第三機構 370 第四機構 380 第五機構 390 中心指示台 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -30- 573153 A7 B7 五、發明説明（28) 400 已注入液晶晶胞 (請先閱讀背面之注意事項再填寫本頁) •衣 訂 L·. 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -31 -Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs of the 1T. 573153 A7 B7 V. Description of the invention (26) The tenth picture is an explanatory diagram of other main parts constituting a conventional liquid crystal display device manufacturing device. The eleventh figure is an overall view of an embodiment in which the liquid crystal display device manufacturing device of the present invention is used as a liquid crystal injection sealing device. The twelfth figure is a schematic sectional view showing a method for manufacturing a liquid crystal display element of the present invention as a liquid crystal injection sealing method. The thirteenth figure is a side view showing the structure of the liquid crystal display element. The fourteenth figure is a sectional view showing the structure of a liquid crystal display element. The fifteenth figure is a diagram for explaining the effect of the present invention. The sixteenth figure is a cross-sectional view showing a liquid crystal monthly mode of a conventional liquid crystal display element sealing method. [Illustration of drawing number] 1 Transparent conductive film 2 Glass substrate 3 Pixel electrode (display area) 4 Silicon 1C substrate 5 Liquid crystal 6 Filler 7 Sealing adhesive 8 Anti-reflection film 9 Liquid crystal injection port (sealed portion) 10 Liquid crystal display element (Element substrate) 11,13,15,18,31 On the machine table, the paper size is applicable to China National Standard (CNS) A4 specification (210X 297 mm): 29-^ ------: --- r- -(Please read the notes on the back before filling out this page) Order k. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 573153 A7 B7 V. Description of the Invention (27) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 12,17 , 19,34 Lower machine table 14,16 Airbag 20 Elastomer 21 Alignment film 22 Alignment film 30,300 Liquid crystal display device manufacturing device 32 Outer frame portion 33 Central protruding portion 35 Elastomer (rubber) 36 Center pillar 36a Center front end portion 37 Rigid body 38 Piercing L 39 Angle table 40 Air filling container 310 Cell transfer robot 320 Liquid crystal cell cassette 330 Sealant Cell cassette 340 Detection of liquid crystal presence (first mechanism) 350 Second Organization 360 Third Organization 370 Fourth Organization 380 Fifth Organization 390 Central Instruction Desk (Please read the notes on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (210X 297 mm) -30 -573153 A7 B7 V. Description of the invention (28) 400 The liquid crystal cell has been injected (please read the precautions on the back before filling out this page) • Binding L .. The paper printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs applies to this paper China National Standard (CNS) A4 Specification (210X297 mm) -31-

Claims (1)

A8 B8 C8 D8 573153； 丨公舌 六、申請專利範圍1 附件2 : 第901 27685號專利申請案 中文申請專利範圍修正本 民國92年4月14日修正 1·一種液晶顯示元件之製造裝置，屬於至少有兩片玻璃 基板持指定間隔接合的元件基板上作加壓成型之液晶顯示 元件製造裝置其特徴具備有、 保持前記元件基板之一片玻璃基板於下方的上機床工 作台、 和保持前記元件基板之另一片玻璃基板於上方的下機 床工作台、 和支撐前記下機床工作台的支撐機構、 和可移動前記支撐機構的移動機構、 前記支撐機構至少由與前記下機床工作台下方吻合之 吻合機構、和彈性機構以及支撐該吻合機構、彈性機構的 剛體所構成、當移動前記移動機構作前記元件基板之加壓 成形時、前記元件基板會因前記下機床工作台之自由傾斜 方向使前記吻合機構受力、而由前記彈性機構吸收該力、 而使前記至少兩片玻璃基板互相補正成實際平衡状。 2 · —種液晶顯示元件之製造裝置，屬於玻璃基板和矽 IC基板持指定間隔接合的液晶顯示元件上作加壓成型之液 晶顯示元件製造裝置其特徴具備有、 保持前記玻璃基板於下方的上機床工作台、. 和保持前記矽1C基板於上方的下機床工作台、 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先聞讀背面之注意事項再填寫本頁) 、1T LP 經濟部智慧財產局員工消費合作社卬製 573153 A8 B8 C8 D8 六、申請專利範圍2 和支撐前記下機床工作台的支撐機構、 和可移動前記支撐機構的移動機構、 (請先閱讀背面之注意事項再填寫本頁) 前記支撐機構至少由與前記下機床工作台下方吻合的 吻合機構、 和彈性機構以及支撐該吻合機構、彈性機構的剛體所 構成、當移前記動移動機構作前記液晶顯示元件之加壓成 形時、前記矽I c基板會因前記下機床工作台之自由傾斜方 向使前記吻合機構受力、而由前記彈性機構吸收該施力、 而使前記矽IC基板對於前記玻璃基板作補正成實際平衡状 態。 3·如申請專利範圍第1項或第2項所記載之液晶顯示元件 之製造裝置、其中前記上機床工作台下方有一體成型之突 起部、當移動前記移動機構作加壓成型時、只有該突起部 分與前記玻璃基板吻合。 4. 一種液晶顯示元件之製造方法，屬於加壓成型於玻璃 基板和矽1C基板持指定間隔接合的液晶顯示元件上之液晶 顯示元件製造方法其特徴爲、 經濟部智慧財產局員工消費合作社印製 安裝表面具有透明導電膜之玻璃基板於上機床工作台 之下方、 安裝已預先塗敷封裝黏合劑之矽1C基板於下機床工作 台之上方、 用空氣塡充容器提昇下機床工作台、於前記矽IC基板 與玻璃基板接觸前用角度調整手段調整矽IC基板的角度、 之後再度提昇空氣塡充容器並施與指定壓縮力於前記下機A8 B8 C8 D8 573153; 丨 Male tongue VI. Patent application scope 1 Annex 2: Amendment of Chinese patent application scope No. 901 27685 Patent application Amendment on April 14, 1992 1. A manufacturing device for liquid crystal display elements, belonging to A liquid crystal display device manufacturing apparatus for press-molding at least two glass substrates bonded at predetermined intervals on a component substrate is provided with an upper machine tool table that holds one glass substrate of the preceding element substrate below, and holds the preceding element substrate. The other piece of glass substrate above the lower machine tool table, and the support mechanism supporting the pre-press machine tool table, and the movable mechanism of the movable pre-note support mechanism, the pre-note support mechanism is at least an anastomosis mechanism that matches the lower machine tool table. , And the elastic mechanism and the rigid body supporting the anastomosis mechanism and the elastic mechanism, when the pre-movement mechanism is moved to press-form the pre-element substrate, the pre-element anastomosis mechanism will be caused by the free tilt direction of the machine tool table The force is absorbed and absorbed by the previous elastic mechanism Referred to the front of at least two glass substrates to each other into a corrected actual equilibrium shape. 2 · A device for manufacturing a liquid crystal display device, which belongs to a device for manufacturing a liquid crystal display device which is press-molded on a liquid crystal display device where a glass substrate and a silicon IC substrate are connected at a specified interval. Machine tool table, and lower machine tool table holding the previous silicon 1C substrate on the top, this paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page) 1T LP Employee Consumer Cooperative System of the Intellectual Property Bureau of the Ministry of Economic Affairs 573153 A8 B8 C8 D8 6. Scope of patent application 2 and the support mechanism of the machine tool table before the support, and the mobile mechanism of the movable support mechanism of the preamble, (Please read the back first Please note this page before filling in this page.) The preamble support mechanism is composed of at least the anastomosis mechanism, the elastic mechanism, and the rigid body supporting the anastomosis mechanism and the elastic mechanism, which are matched with the underside of the machine table. When press-molding a display element, the pre-printed silicon I c The work station consisting of an inclined direction of the front mechanism referred stapling force, and the force absorbed by the first resilient means in mind, the former referred to the silicon IC substrate to the front glass substrate referred to as corrected to the actual equilibrium state. 3. The manufacturing device for the liquid crystal display device as described in the first or second item of the patent application scope, where the preface has an integrally formed protrusion under the machine tool table. When moving the preface movement mechanism for pressure molding, only this The protruding portion coincides with the aforementioned glass substrate. 4. A method for manufacturing a liquid crystal display element, which belongs to a method for manufacturing a liquid crystal display element that is pressure-molded on a liquid crystal display element that is bonded to a glass substrate and a silicon 1C substrate at a specified interval. It is specially printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economy A glass substrate with a transparent conductive film on the mounting surface is positioned below the upper machine table, a silicon 1C substrate pre-coated with an encapsulating adhesive is mounted above the lower machine table, and the lower machine table is filled with an air-filled container. Before the silicon IC substrate and the glass substrate contact, adjust the angle of the silicon IC substrate with an angle adjustment method, and then raise the air to fill the container again and apply the specified compression force to the pre-recorded machine. 本紙張尺度適财目目家辟（CNS) A4· (21GX297公董） -2 - 573153 A8 B8 C8 D8 六、申請專利範圍3 R 1作台、下機床工作台自由傾斜方向施力於前記矽1C基 板上 ' 並由彈性機構吸收前記施力、而使矽1C基板對於玻 璃基板作實際平衡状態補正、其次'用紫外線照射前記封裝 黏合劑使其固化、使前記玻璃基板與矽IC基板緊密接合。 5.一種液晶顯示元件之製造裝置，屬於接合兩片基板並 留有液晶注入口、注入並封閉液晶形成液晶注入晶胞之液 晶顯示元件製造裝置其特徴爲設置有、測定前記液晶注入 晶胞在注入液晶後的前記晶胞間隔之第一測定機構、 和加熱前記液晶注入晶胞之加熱機構、 和加壓於前記液晶注入晶胞指定領域之加壓機構、 和擦拭施壓前記加壓機構而擠出的液晶之液晶擦拭機 構、 和封閉前記液晶注入口塗敷封閉劑之封閉劑塗敷機構 和擦拭gu 封閉劑塗敷機構所導致塗敷多餘的封閉劑 之封閉劑擦拭機構、 和前記加壓機構於停止加壓後測定前記晶胞間隔之第 二測定機構、 和即日B弟一測定機構在晶胞間隔均一性合於指定範圍 之際、用紫外線照射前記封閉劑使其固化之紫外線照射機 構、 和檢測於前記液晶注入口的前記封閉劑浸透量之畫像 處理機構。 6 · —種液晶顯示元件之製造方法，屬於接合兩片基板並 (請先閱讀背面之注意事項再填寫本頁) 、1T i# 經濟部智慧財產局員工消費合作社印製 丁 J' - - t - Λ -3 - 573153 A8 B8 C8 ___ D8 六、申請專利範圍4 留有液晶注入□、注入並封閉液晶形成液晶注入晶胞之液 晶顯示元件製造方法其特徴爲包含有、測定前記液晶注入 晶胞在注入液晶後的前記晶胞間隔之第一測定製程、 和加熱前記液晶注入晶胞之加熱製程、 和從外側施壓於前記兩片基板指定領域之加壓製程、 和擦拭施壓前記加壓製程而由前記液晶注入口擠出的 液晶之液晶擦拭製程、 和塗敷封閉劑於前記液晶注入口之塗敷製程、 和前記加壓製程於停止加壓'後測定前記晶胞間隔之第 二測定製程、 和關於前記第二測定製程在測定前記晶胞間隔均一性 合於指定範圍之際、用紫外線照射前記封閉劑使其固化之 固化製程、 和檢測於前記液晶注入口的前記封閉劑浸透量之檢測 製程。 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印，¾ 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） -4 -The paper size is suitable for financial projects (CNS) A4 · (21GX297 public director) -2-573153 A8 B8 C8 D8 VI. Patent application scope 3 R 1 Workbench, lower machine worktable free tilt direction exerts force on the silicon On the 1C substrate, the preload is absorbed by the elastic mechanism, so that the silicon 1C substrate corrects the actual balance state of the glass substrate. Secondly, the preprint packaging adhesive is irradiated with ultraviolet rays to cure it, and the preprint glass substrate and the silicon IC substrate are tightly bonded. . 5. A liquid crystal display device manufacturing device, which belongs to a liquid crystal display device manufacturing device that joins two substrates and has a liquid crystal injection port, and injects and seals liquid crystal to form a liquid crystal injection cell. The first measurement mechanism for the cell interval of the preceding cell after the liquid crystal is injected, the heating mechanism for heating the cell for the preceding liquid crystal injection cell, the pressing mechanism for applying pressure to the specified area of the cell for the preceding liquid crystal injection cell, and the pressing mechanism for applying pressure to the front cell Extruded liquid crystal liquid crystal wiping mechanism, sealing agent coating mechanism for sealing compound applied to seal liquid crystal injection port and sealing agent wiping mechanism for applying excess sealing agent caused by wiping gu sealing agent coating mechanism, and The second measuring mechanism that measures the cell interval before the pressure mechanism stops the pressurization, and the first measurement unit of the same day B, when the uniformity of the cell interval is within a specified range, irradiates the ultraviolet rays with the sealing agent for curing the fore-mentioned sealing agent to ultraviolet rays. A mechanism, and an image processing mechanism that detects the penetration amount of the sealant in the preceding liquid crystal injection port. 6 · —A method of manufacturing liquid crystal display elements, which belongs to two substrates and (please read the precautions on the back before filling out this page), 1T i # Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. -Λ -3-573153 A8 B8 C8 ___ D8 VI. Patent application scope 4 Liquid crystal display element manufacturing method with liquid crystal injection remaining □, injecting and sealing liquid crystal to form liquid crystal injection cell, which specifically includes and measures the liquid crystal injection cell before the measurement The first measurement process of the cell interval of the previous cell after the liquid crystal injection, the heating process of heating the previously injected liquid crystal cell, the pressurization process of applying pressure from the outside to the specified area of the two substrates of the previous cell, and the wiping and pressing of the previous cell. The liquid crystal wiping process of the liquid crystal extruded from the liquid crystal injection port of the foregoing process, the coating process of applying a sealant to the liquid crystal injection port of the foregoing process, and the second pressing process to measure the second cell interval of the previous cell after the pressure is stopped. The measurement process and the second measurement process of the preamble are sealed when the uniformity of the cell interval of the preamble is within a specified range, and the prescript is irradiated with ultraviolet rays. Cured curing process, and before the detection of the front liquid crystal injection port referred referred permeation amounts of blocking agent detection process. (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, ¾ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -4-
TW90127685A 2001-01-17 2001-11-07 Apparatus and method for manufacturing liquid crystal display device TW573153B (en)

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JP2878521B2 (en) * 1992-03-27 1999-04-05 アルプス電気株式会社 Manufacturing method of liquid crystal display element
JPH06123865A (en) * 1992-05-29 1994-05-06 Sintokogio Ltd Production equipment for liquid crystal panel
JP2665319B2 (en) * 1994-10-13 1997-10-22 信越エンジニアリング株式会社 Glass substrate heating device for liquid crystal display panel
JPH0922016A (en) * 1995-07-07 1997-01-21 Sony Corp Cell gap controller and its control method
JPH11223823A (en) * 1998-02-06 1999-08-17 Toshiba Corp Method and device for manufacturing liquid crystal display panel
JP2000035588A (en) * 1998-07-17 2000-02-02 Hitachi Ltd Method and device for end-sealing of liquid crystal cell

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