KR20020062137A - Apparatus and method for manufacturing liquid crystal display device - Google Patents

Abstract

PURPOSE: An apparatus and method for manufacturing a liquid crystal display device are provided to avoid cell gap ununiformity in a laminated substrate and to reduce the tact time. CONSTITUTION: An apparatus for manufacturing a liquid crystal display device is equipped with an upper surface plate(31), a lower surface plate(34), an LCD device(10) prepared by laminating at least two glass substrates(2) with a specified gap and disposed between the upper and lower surface plates, supporting mechanisms to support the lower surface plate, and moving mechanisms(39, 40) to move the supporting mechanism. The supporting mechanism comprises a contact mechanism(36a) to be in contact with at least one side of the LCD device, an elastic mechanism(35) and a rigid body(37) supporting the contact mechanism and the elastic mechanism.

Description

Apparatus and method for manufacturing liquid crystal display device

BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to liquid crystal display elements as main components such as projectors, projection TVs, and the like, and more particularly, to an apparatus and a manufacturing method for liquid crystal display elements according to the adhesion (press molding) of the liquid crystal display elements or the sealing after liquid crystal injection. .

In recent years, the liquid crystal display element which adhere | attached the silicon wafer substrate and the glass substrate has advanced the application to a projector, a projection TV, a head mounted display, etc., and the production quantity is expanding gradually. The general liquid crystal display element 10 is shown in FIG. As shown in FIG. 5, the liquid crystal display device 10 includes a glass substrate 2 having a transparent conductive film 1 on its surface and a silicon IC substrate 4 having a pixel electrode (display area) 3 on its surface. ) Are opposed to each other and fixed with a seal adhesive 7 composed of an adhesive and a spacer 6 to determine the gap (cell gap), and the liquid crystal 5 (see Fig. 6) described later is injected into the cell gap. The antireflection film 8 is provided on the surface of the glass substrate 2 and is configured. 9 is a liquid crystal injection hole which consists of sealing parts.

Here, as a method of obtaining the liquid crystal display element 10 (liquid crystal injection cell) in the state before sticking the glass substrate 2 and the silicon IC substrate 4 to inject the liquid crystal 5, there are various methods as follows. . The liquid crystal display element 10 shown in FIGS. 7-10 shows the liquid crystal injection cell in the state before inject | pouring the liquid crystal 5. As shown in FIG.

For example, in the method described in Japanese Patent Laid-Open No. 6-18829, as shown in FIG. 7, a liquid crystal display element 10 is provided between an upper plate 11 and a lower plate 12 formed of a pair of rigid bodies. There is a method of inserting and pressing (rigid-rigid configuration). In addition, as shown in FIG. 8, a method of inserting and pressing the liquid crystal display element 10 between the upper plate 13 made of stainless steel or ceramic material and the lower plate 14 made of air bag (rigid body-). Airbag configuration). Further, for example, as a method described in Japanese Patent Application Laid-Open No. 6-222318, as shown in FIG. 9, a stainless steel or ceramic material provided on an upper plate 15 made of a rigid body and an air bag 16. There is a method of inserting and pressing the liquid crystal display element 10 between the lower platen 17 which is a rigid body such as a rigid body.

Moreover, as shown in FIG. 10, between the upper plate 18 which consists of stainless steel or a ceramic material, and between the lower plate 19 which consists of stainless steel or ceramic materials which are the same material as the upper plate 18, a liquid crystal display is shown. There is also a method of inserting and pressing the element 10 (rigid-rigid / elastic (rubber) configuration). In the method of FIG. 10, the structure in which the lower platen 19 is supported by the elastic body 20 is adopted. In addition, when an arrow is shown in the figure, the arrow shows the direction in which a force acts.

Moreover, as another method, for example, as shown in Unexamined-Japanese-Patent No. 11-64866, there exists a combination example (method of using a steel plate or an elastic buffer sheet for a pair of air bags). In the method of pressing in these press apparatuses, after securing a cell gap with said spacer 6, the adhesive agent is hardened by ultraviolet irradiation or heating which is not shown in figure, and the cell of the liquid crystal display element 10 is obtained. After that, after injecting the liquid crystal 5 from the above-described liquid crystal 5 injection hole 9, the liquid crystal display element 10 as shown in Fig. 6 is obtained by sealing the injection hole 9.

By the way, as a method of sealing the injection hole of such a liquid crystal display element, the liquid crystal in the vicinity of the liquid crystal injection hole of the liquid crystal injection cell after liquid crystal injection is wiped, and a sealing agent is apply | coated to a liquid crystal injection hole with a dispenser, and the said sealing agent is changed by a capillary phenomenon. The technique of preventing the liquid crystal injection hole by impregnating the inside of a liquid crystal injection hole and solidifying the said sealing agent by ultraviolet irradiation or heating, for example, Unexamined-Japanese-Patent Nos. 9-15616, 2000-35588, and 2000-206545 And the like.

Hereinafter, a conventional liquid crystal injection encapsulation method will be described with reference to FIGS. 16A to D. 16A to D are schematic cross-sectional views of a liquid crystal injection cell 200 showing a conventional method for sealing a liquid crystal display element. In Figs. 16A to 16D, the same reference numerals are given to substantially the same parts as Figs. 5 to 10 for convenience. In the same figure, a is a sectional side view of the liquid crystal injection cell 200 after the liquid crystal 150 is injected, and as is clear from this figure, for example, the glass substrate 120 after the liquid crystal 150 is injected, The silicon substrate 130 is in a state where the side portion thereof is widened (convex).

Therefore, after this liquid crystal 150 injection, the side part (liquid crystal display surface) is pressed from the side so that it may be set as the normal liquid crystal injection cell 200 (FIG. 16B). In addition, in FIG. 16B, 150a is a liquid crystal portion overflowing from the liquid crystal injection port 190. Next, after wiping the liquid crystal portion 150a overflowed from the liquid crystal injection hole 190 (FIG. 16C), the side pressure is sequentially reduced while applying the encapsulant 180 to the liquid crystal injection hole 190. By irradiating the encapsulant 180 with ultraviolet light, the liquid crystal injection hole 190 is blocked (encapsulated) by the encapsulant 180 (FIG. 16D).

First, the press molding apparatus and method of the liquid crystal display element mentioned above have the following problems. In the method as shown in Fig. 7 (rigid-rigid configuration), in the two surface plates (rigid bodies 11 and 12) constituting the apparatus, a predetermined parallelism (± 0.3 μm) is used as the mechanical precision for securing the cell gap. It is difficult to ensure that the pressure is uneven, so that there is a problem that the press pressure to the substrate becomes nonuniform, causing a defect in the cell gap forming process, that is, the cell gap becomes nonuniform. Therefore, although the configuration of Japanese Patent Laid-Open No. 6-18829 shown in Fig. 7 takes a method of giving feedback to the pressurization while measuring the cell gap, such an apparatus requires an enlargement of the apparatus and a very precise pressurization control. Therefore, there also existed a problem that it took too long to prepare the liquid crystal display element 10.

In addition, in the method as shown in Fig. 8 (rigid-air bag configuration), since the lower surface of the silicon IC substrate 4 is the air bag 14, a nonuniformity of tension occurs in the air bag 14, and again, Pressure unevenness occurs at the time of pressing. That is, even with the method of FIG. 8, there is a problem that the cell gap is still uneven.

Moreover, in the method as shown in Fig. 9 (rigid-rigid / airbag configuration), the pressure uniformity at the time of pressing is good, but since the base is the air bag 16, the glass substrate 2 and the silicon IC There is a case that slippage occurs between the substrates 4 laterally, and this does not result in adhesion accuracy, and there is a problem of causing slip marks by slipping laterally. That is, even with this method of FIG. 9, there was still a problem that the cell gap became nonuniform.

In the method as shown in Fig. 10 (rigid-rigid / elastic (rubber) configuration), the pressure uniformity is maintained, but the base of the rigid body (stainless steel or ceramic material) 19 constituting the bottom plate is made of rubber or the like. Since it is the elastic body 20, it is difficult to avoid sliding sideways as mentioned above. That is, even with this method of FIG. 10, there is a problem that the cell gap is still nonuniform. The nonuniformity of the cell gap is a cause of nonuniformity (shading) of contrast on the projection screen or color unevenness when three colors are combined when the liquid crystal display element 10 thus obtained is applied to a projector or a projection TV.

In addition, according to the method of pressing in the above-mentioned press apparatus, when press-molding, it is possible to, from the outside, between the top plate 11, 13, 15, 18, which is a rigid body, and the glass substrate 2, for example. When foreign matter (the size is about 5 μm to about 100 μm) is mixed (this point is difficult to avoid), there is also a problem that nonuniformity of the cell gap occurs locally, that is, around the foreign matter. The cell gap uniformity is a fringe (stripe) in the case of using the interference of helium neon laser light, and it is preferable that the cell gap uniformity is less than two (one is 0.3 μm), preferably less than one, in a concentric shape in the substrate surface. This is because such a degree can be modified in the liquid crystal injection and encapsulation step of the subsequent step.

However, in the case where the number of fringes or more than this is not concentric, furthermore, when there are local fringe disturbances (local cell gap non-uniformity), it is difficult to correct them in a later step, which is a factor of lowering the product ratio of manufacture. . Therefore, when both the substrates (the glass substrate 2 and the silicon IC substrate 4) are pressed, there is a need for a configuration in which pressure is uniformly applied to the substrate and no slip occurs horizontally.

Considering the above problems, for example, if there is a large amount of foreign material escape between the glass substrate and the top plate, which is a rigid body, it is difficult to produce local force and local cell gap unevenness is unlikely to occur. do. Therefore, the present inventors have diligently studied, and do not depend greatly on the warp and the irregularities of the substrate surface and the fitting accuracy of both plates, and are uniformly pressured when both substrates are pressed, without slipping horizontally between the two substrates. It is the object of this invention to provide the manufacturing apparatus of the liquid crystal display element which the surface of a board | substrate correct | amends to a parallel state, and can make a cell gap uniform and sticking.

Moreover, an object of this invention is to provide together the manufacturing method of the liquid crystal display element which eliminates the local cell gap nonuniformity which arises, for example by mixing a foreign material between a surface plate and a glass substrate, and achieves a high product ratio.

On the other hand, the liquid crystal injection sealing method of the liquid crystal display element mentioned above has the following problems. The prior art described with reference to FIG. 16 is based on the premise that there is a spacer 160 for maintaining a gap in the liquid crystal injection cell 200 to which two sheets are attached. When this technique is used for a liquid crystal display element without a spacer in a liquid crystal injection cell as shown in Figs. 5 and 6, there is a fear that the substrates may come into contact by side pressure. Assuming such a case, even if side pressure and pressure reduction are performed by air pressure control, it is difficult to obtain high-precision cell gap uniformity.

Moreover, in recent years, high-speed response is required for image display of a liquid crystal display element, and the cell gap of the liquid crystal display element is made small from 5 micrometers or more to 3 micrometers, and even near 1 micrometer conventionally, and accordingly, the demand for a cell gap uniformity is accordingly It is becoming strict. This is because there is a demand for reducing contrast and color unevenness of the display image.

Therefore, in order to meet this stringent requirement, cell gap management at the manufacturing stage is important, and cell gap changes that change with the passage of time from the liquid crystal injection to the side pressure and release of the liquid crystal display device, and also to the application of the encapsulant, can be accurately corrected. You need to monitor.

In addition, there is a method of monitoring the optical interference stripe to check the cell gap uniformity before and after lateral pressing, but the above-mentioned demand for cell gap uniformity is within 0.1 μm, and the submicron area in the interference stripe is monitored. Does not meet the demand for such stringent cell gap uniformity.

Considering the above problems, in order to obtain high-precision cell gap uniformity, the cell gap measurement is performed in the required process in the process of manufacturing the liquid crystal cell, and there is an error there (over the range of uniformity). In this case, if correction is made at that point, there is knowledge that the gap of the liquid crystal cell which has finished the final process will be obtained as being within the range to be obtained.

Therefore, as a result of earnestly examining, the present inventors organically arrange and arrange each mechanism including a cell gap measuring mechanism immediately after liquid crystal injection, a cell gap measuring mechanism after pressure release, and the like, thereby correcting the uneven cell gap uniformity after liquid crystal injection. The invention provides a manufacturing apparatus and a manufacturing method of a liquid crystal display element capable of obtaining good cell gap uniformity, and an object of the present invention is to provide a manufacturing apparatus and a manufacturing method of such a liquid crystal display element.

BRIEF DESCRIPTION OF THE DRAWINGS The whole figure which shows one Example of the liquid crystal display element manufacturing apparatus as a press molding apparatus which concerns on this invention.

Fig. 2 is a schematic view showing the main parts of an embodiment of a liquid crystal display device manufacturing apparatus as a press-molding apparatus according to the present invention.

3 is an explanatory view of essential parts of a top plate constituting a liquid crystal display device manufacturing apparatus as a press-molding apparatus according to the present invention.

4 is an explanatory diagram of another principal part of the upper plate constituting the liquid crystal display element manufacturing apparatus as the press-molding apparatus according to the present invention.

Fig. 5 is an exploded perspective view showing the component parts of a general liquid crystal display element.

6 is an explanatory diagram of a configuration of a general liquid crystal display element.

7 is an explanatory view of the main parts constituting a conventional liquid crystal display device manufacturing apparatus.

8 is an explanatory view of another main part of the conventional liquid crystal display device manufacturing apparatus.

Fig. 9 is another explanatory diagram illustrating another main component of the conventional liquid crystal display device manufacturing apparatus.

Fig. 10 is another explanatory diagram illustrating another main component of the conventional liquid crystal display device manufacturing apparatus.

Fig. 11 is an overall view showing an embodiment of a liquid crystal display element manufacturing apparatus as a liquid crystal injection encapsulation apparatus according to the present invention.

It is typical sectional drawing which shows the manufacturing method of the liquid crystal display element as a liquid crystal injection sealing method which concerns on this invention.

Fig. 13 is a perspective view showing the structure of a liquid crystal display element.

Fig. 14 is a sectional view showing the structure of a liquid crystal display element.

15 is a view for explaining the effect of the present invention.

It is typical sectional drawing of the liquid crystal cell which shows the sealing method of the conventional liquid crystal display element.

※ Explanation of code about main part of drawing ※

1: transparent conductive film 2: glass substrate

3: pixel electrode (display area) 4: silicon IC substrate

5: liquid crystal 6: spacer

7: thread adhesive 8: antireflection film

9: liquid crystal injection hole (sealing part) 10: liquid crystal display element (element substrate)

11, 13, 15, 18, 31: Top plate 12, 17, 19, 34: Bottom plate

14, 16: air bag 20: elastomer

21: alignment film 22: alignment film

30, 300: manufacturing apparatus of liquid crystal display element

32: frame portion 33: center protrusion

35: elastic body (rubber) 36: center pin

36a: tip 37: rigid body

38: transparent hole 39: gonio stage

40: air cylinder 310: cell transfer robot

320: liquid crystal injection complete cell cassette 330: encapsulant cell cassette

340: Liquid crystal presence detection mechanism (first mechanism)

350: second apparatus 360: third apparatus

370: fourth apparatus 380: fifth apparatus

390: center index table 400: liquid crystal injection completion cell

The present invention has been made in view of these problems, and provides the following configuration.

(a) The manufacturing apparatus of the liquid crystal display element for press-molding the element substrate 10 by which at least 2 glass substrates are stuck by predetermined space, WHEREIN: It is assumed to hold one glass substrate of the said element substrate at the lower surface side. Move the van 31, the lower plate 34 for holding the other glass substrate of the element substrate on the upper surface side, the support mechanisms 35, 36, 37 for supporting the lower plate and the support mechanism. And a support mechanism (36a) for contacting at least the lower surface side of the lower plate, the elastic mechanism (35), and a rigid body (37) for supporting these contact mechanisms and the elastic mechanism. In the press molding of the element substrate by the movement of the moving mechanism, the element substrate is subjected to a force having a degree of freedom in the inclination direction of the lower plate by the contact mechanism, The force is absorbed by this, and the said at least 2 glass substrates were comprised so that it may be corrected in substantially parallel state mutually, The manufacturing apparatus 30 of the liquid crystal display element characterized by the above-mentioned.

(b) In the manufacturing apparatus of the liquid crystal display element for press-molding the liquid crystal display element 10 by which the glass substrate 2 and the silicon IC board 4 are stuck at predetermined intervals, the said glass substrate is provided in the lower surface side. An upper plate 31 for holding, a lower plate 34 for holding the silicon IC substrate on the upper surface side, support mechanisms 35, 36, 37 for supporting the lower plate and the movement for moving the support mechanism. Mechanisms 39 and 40, wherein the support mechanism includes at least a contact mechanism 36a for contacting the lower surface side of the lower plate, an elastic mechanism 35, and a rigid body 37 for supporting these contact mechanisms and the elastic mechanism. In the press molding of the liquid crystal display element by the movement of the moving mechanism, the silicon IC substrate receives a force having a degree of freedom in the inclination direction of the lower plate by the contact mechanism, but the force is applied by the elastic mechanism. Absorption And the silicon IC substrate is configured to be corrected in a substantially parallel state with respect to the glass substrate.

(c) In the configuration of (a) and (b), the protrusions 32 and 33 are integrally formed on the lower surface side of the upper surface plate so that only the protrusions are formed in the molding by the movement of the moving mechanism. An apparatus 30 for manufacturing a liquid crystal display element, which is configured to be in contact with a substrate.

(d) In the manufacturing method of the liquid crystal display element for press-molding the liquid crystal display element 10 by which the glass substrate 2 and the silicon IC board 4 are stuck at predetermined intervals, the transparent conductive film 1 is formed on the surface. Is installed on the lower surface side of the upper surface plate 31, the silicon IC substrate to which the seal adhesive 7 is applied in advance is provided on the upper surface side of the lower surface plate 34, and the lower surface plate is air. Raised by the cylinder 40, the silicon IC substrate angle is adjusted by the angle adjusting means 39 in the previous step in which the silicon IC substrate is in contact with the glass substrate, after which the air cylinder is raised again to By applying a predetermined pressing force to the lower platen, giving the silicon IC substrate a force having a degree of freedom in the inclination direction of the lower platen, and absorbing the force by the elastic mechanism 35, The glass substrate and the silicon IC substrate are fixed by correcting in a substantially parallel state with respect to the glass substrate, and then irradiating the yarn adhesive with ultraviolet rays to cure the yarn adhesive. Manufacturing method.

(e) Liquid crystal display device for injecting and sealing liquid crystal 5 into a liquid crystal injection cell 400 in which two substrates 2 and 4 are adhered, provided with a liquid crystal injection hole 9, and a cell gap is formed. An apparatus for manufacturing a device, comprising: a first measuring mechanism 35 for measuring the cell gap immediately after injecting a liquid crystal into the liquid crystal injection cell, a heating mechanism 35 for heating the liquid crystal injection cell, and the liquid crystal A pressurizing mechanism 36 for pressing a predetermined region of the injection cell, a liquid crystal wiping mechanism 36 for wiping the liquid crystal 5a pushed by the pressurizing mechanism, and an encapsulant for sealing the liquid crystal injection hole ( 130, a sealing agent applying mechanism 36 for applying the sealant, a sealing agent wiping mechanism 36 for wiping excess sealing agent among the sealing agents applied by the sealing agent applying mechanism, and pressurization by the pressing mechanism. A second measuring instrument for measuring the cell gap after stopping (37), an ultraviolet irradiation mechanism 37 for curing the sealing agent by irradiating ultraviolet light to the sealing agent when the cell gap uniformity in the second measuring mechanism is within a predetermined range, and in the liquid crystal inlet An image processing mechanism (38) for detecting a penetration amount of said encapsulant is provided.

(f) Liquid crystal display element for inject | pouring and sealing the liquid crystal 5 into the liquid crystal injection cell 400 by which two board | substrates 2 and 4 are adhered, the liquid crystal injection hole 9 is provided, and a cell gap is formed. In the manufacturing method of the said WHEREIN: The 1st measuring process of measuring the said cell gap immediately after inject | pouring a liquid crystal into the said liquid crystal injection cell, the heating process of heating the said liquid crystal injection cell, and the predetermined | prescribed area | region from the outside of the said 2 board | substrate A pressurizing step for pressurizing, a wiping step for wiping the liquid crystal 5a pushed from the liquid crystal inlet by the pressurizing step, a coating step for applying the encapsulant 130 to the liquid crystal inlet, and pressurization by the pressurizing step A second measurement step of stopping the cell gap and measuring the cell gap; and irradiating ultraviolet light to the encapsulant when the cell gap uniformity reaches a predetermined range in the cell gap measurement in the second measurement step. circa The hardening process to make it chemical, and the detection process for detecting the penetration amount of the sealing agent in the said liquid crystal injection port are included, The manufacturing method of the liquid crystal display element characterized by the above-mentioned.

Example

BEST MODE FOR CARRYING OUT THE INVENTION A preferred embodiment of the present invention will be described below with reference to the accompanying drawings. In addition, although the Example described below is a suitable specific example of this invention, technically preferable various limitations are attached, but the scope of the present invention does not mention the meaning in particular that limits this invention in the following description, It is not limited to an aspect.

First, the manufacturing apparatus and manufacturing method of this invention as a press molding apparatus and method of a liquid crystal display element (liquid crystal injection cell) are demonstrated. Fig. 1 is an overall view showing the manufacturing apparatus of the liquid crystal display element according to the present embodiment, Fig. 2 is a schematic view of the principal parts of the manufacturing apparatus of the liquid crystal display element according to the present embodiment, and Fig. 3 is a part of the manufacturing apparatus of the same liquid crystal display element. 4 is an explanatory diagram of another essential part of the upper plate that constitutes the manufacturing apparatus of the liquid crystal display element. In addition, the same part as the above-mentioned conventional example uses the same code | symbol, and the detailed description is abbreviate | omitted.

1 is an overall view showing a preferred embodiment of the apparatus 30 for manufacturing a liquid crystal display element. 1 to 4, 31 is a top plate made of, for example, synthetic quartz glass, 32 is a frame part integrally formed on the top plate 31, and 33 is a central protrusion formed inside the frame part. to be. In addition, the action | action of the said frame part 32 and the center protrusion 33 is mentioned later. 2, illustration of the frame part 32 is omitted.

As the rigid top plate 31, for example, in addition to the above-described synthetic quartz glass, light in the ultraviolet region in the vicinity of 365 nm such as fused quartz glass, Pyrex glass (Short's registered trademark), and Tenfax glass (Short's registered trademark) The material which permeates easily is preferable.

34 is a suitable example to configure a half hajeong example ceramic material, zirconia (ZrO _2). The transparent hole 38 is provided in the substantially center part, and 35 is an elastic body (rubber) which supports the said lower plate 34, For example, a low elastic rubber is suitable. 36 is a center pin which is three-dimensionally installed in the substantially center portion of the rigid body 37 and penetrates the inside of the transparent hole 38 of the elastic body 35 and contacts one side of the lower plate 34. It is formed in substantially circular arc shape. In addition, the said rigid body 37 and the center pin 36 can use metal materials, such as stainless steel, a ceramic material, etc., for example.

39 is provided below the lower plate 34, and has a goniometer not shown inside so as to adjust the angle in advance when the substrate is adhered, and 40 is the goni stage ( 39) It is an air cylinder installed at the bottom.

Here, the method of obtaining the liquid crystal display element 10 using the manufacturing apparatus 30 of the liquid crystal display element which becomes this invention is mainly demonstrated with reference to FIG. 1, FIG. 2, if necessary, FIG. 5, FIG. .

As a specific example, fused quartz glass is used for the side top plate 31 which contacts the glass substrate 2, and zirconia is used for the side bottom plate 34 which contacts the silicon IC substrate 4, and an elastic body Hanneite which is a low elastic rubber is used as (35), and it is arrange | positioned in the order shown using the generally used steel materials as the rigid body 37, and the center pin 36 processed the stainless steel screw tip to spherical shape. Used one.

This is to finely adjust the contact between the steel as the lower body 34 side rigid body 37 and the center pin 36 and the contact between the tip of the center pin 36 and the zirconia as the ceramic material as the lower plate 34. It is for. However, it is not limited to this form as mentioned above.

First, as described with reference to FIG. 5, a top plate made of Corning's # 1737 glass, which is a glass substrate 2 of a liquid crystal display device having an antireflection film 8 and a transparent electrode film 1 required on the surface, is made of a transparent rigid body. It is fixed by adsorption on the lower surface side of (31). Next, Kyoritsu where Yakshi Kasei Co., Ltd. product SW-3.2 D1 spacer ball 6 was mixed in the outer periphery of the display area 3 on the silicon IC board 4 of the liquid crystal display element 10. ) After applying the main seal adhesive 7 (WR series) manufactured by Science Industries, Ltd., the silicon IC substrate 4 is suction-fixed to the upper surface side of the lower platen 34.

At this time, the tip portion 36a of the center pin 36 is in contact with one side (lower surface side) of the lower platen 34. That is, when both substrates are press-molded, one side of the lower platen 34 receives a one-point load from the center pin tip portion 36a, so that the silicon IC substrate 4 on the lower platen 34 side of the lower platen 34 The force is applied with degrees of freedom in the tilt direction. This force is called a convenience force. However, this biasing force is substantially absorbed by the elastic body (rubber) 35 by arranging the lower plate 34 and the elastic body (rubber) 35 as described above. Therefore, when the silicon IC substrate 4 is later subjected to a predetermined pressing force from the downward direction by the air cylinder 40, since the pressure is uniformly applied to the substrate surface, there is no possibility of slipping horizontally. . That is, cell gap uniformity is maintained.

For this reason, at the time of press molding, even if the silicon IC substrate 4 is inclined, the press proceeds while both the substrates are subjected to cell gap correction so as to mimic the spacer balls 6 in the seal adhesive 7. Thereby, desired cell gap uniformity is maintained in the adhesion process of the liquid crystal display element 10, For example, a favorable result can also be obtained also with the request of one fringe. For this reason, when the liquid crystal display element 10 is applied to a projector or a projection TV, it can greatly contribute to shading and color unevenness improvement. Moreover, this result is linked to shortening the tact time of the process to facilitate correcting the cell gap uniformity in the later liquid crystal injection and encapsulation process.

Next, the silicon IC board 4 side lower plate 34 is lifted by the air cylinder 40, and the silicon IC board 4 is placed at a straight root position immediately before the silicon IC board 4 is in contact with the glass substrate 2. The angle of the IC board 4 is adjusted so that the glass substrate 2 and the silicon IC board 4 become parallel by a goniometer not shown in the Goniometer stage 39 provided below the lower plate 34. . In addition, the said adjustment can be abbreviate | omitted from manufacture of the 2nd liquid crystal display element, when using the board | substrate of the same specification.

Then, by operating the air cylinder 40 again, the lower plate 34 is pressurized to a pressing force of 0.1 MPa (0.63 kgf) to 0.3 MPa (3 kgf). In addition, if the pressure is outside the range of, for example, less than 0.1 MPa (0.63 kgf) or 0.3 MPa (3 kgf) or more, as described above, the fringe (stripe) in the case of using helium neon laser light interference is used. It has been experimentally demonstrated that the condensation in the plane is less than two (one is 0.3 μm), preferably not within one. Moreover, as a result of various experiments, preferable pressing force was the conditions of 0.25 MPa vicinity.

Next, positioning of both board | substrates 2 and 4 is performed. This is done by positioning based on the substrate outline reference. It is of course possible to carry out by detecting the alignment mark on the substrate (not shown) by the CCD and adjusting the XY stage of the surface plate.

The provision of a predetermined pressing force (0.1 MPa (0.63 kgf) to 0.3 MPa (3 kgf)) to the lower plate 34 by the air cylinder 40 is maintained for about 30 seconds from the start of contact of both substrates 2 and 4. Thereby, the empty cell which liquid crystal does not enter between both board | substrates 2 and 4 is completed.

Furthermore, while continuing this holding for about 10 seconds, the ultraviolet-ray light of 365 nm which is not shown in figure is irradiated about 3000 mJ to the seal | sticker adhesive 7 part from the upper surface plate 31 side which consists of fused quartz glass, and the said The seal adhesive 7 is fixed by curing.

After this, the liquid crystal 5 is injected from the liquid crystal injection port 9 into the empty cell, and then the liquid crystal display element 10 required is obtained by sealing the liquid crystal injection port 9 with an adhesive. The injection encapsulation device and method of the liquid crystal will be described later.

About cell gap uniformity by the series of adhesion conditions mentioned above, it is 90% or more of the number of created board | substrates, and the number of fringes which are the index which shows uniformity is one or less (the cell gap difference in a center and the tip is 0.3 micrometer or less) Result was obtained. Therefore, according to this embodiment, the tact time can be greatly shortened.

Here, with reference to FIG. 3, FIG. 4, the frame part 32 which becomes a protrusion part, and the center protrusion part 33 are demonstrated. In FIG. 3, the frame part 32 is integrally formed in one side of the upper surface plate 31. As shown in FIG. As shown in FIG. 1, the width (interval) of the frame portion 32 is approximately equal to the distance between the spacers 6 of the seal adhesive 7 so that the glass substrate 2 and the silicon IC substrate 4 are bonded in a normal state. The dimensions are the same. In addition, in FIG. 4, the center protrusion 33 is formed integrally with the same thickness, for example in the center part of the frame part 32 further. In addition, when the thickness t of the frame part 32 is set to a thickness larger than the foreign matter size, for example, 100 μm or more, foreign matters such as dust are mixed between the upper plate 31 and the glass substrate 2. Even in this case, since the foreign matter is settled in the frame portion 32, for example, local nonuniformity of the cell gap is unlikely to occur.

In addition, in the case of the structure of the frame portion 32 described above, for example, when the warpage of the silicon IC substrate 4 is large and the central portion of the glass substrate 2 is broken, as shown in FIG. 4, the frame portion ( By adopting a configuration in which the central protrusion 33 formed at the same thickness, for example, is further provided at the center portion 32), it can be prevented in advance. In the above embodiment, the frame portion 32 is formed in a ro-shape or the like, but the frame portion 32 is not limited thereto.

In this way, the protrusions (frame portion 32, center protrusion 33) are integrally formed on the upper plate 31, and only the protrusions are free when forming by moving the moving mechanism (air cylinder 40, etc.). By configuring the substrate 2 to be in contact with the substrate 2, even if the foreign matter adheres to the glass substrate 2, the foreign material is not directly pressurized by the upper plate 31. Since the film does not get dirty (which leads to display quality deterioration in the projected image) and the glass substrate 2 is not pressed through the foreign matter, local cell gap nonuniformity can be avoided. Thereby, it can contribute to the product ratio improvement in a liquid crystal display element process.

In addition, although the glass substrate 2 and the silicon IC board 4 were used as the board | substrate in the present Example, it demonstrated, but the element substrate is comprised only by a glass substrate, using a glass board instead of the silicon IC board 4, of course. Will be.

Next, the manufacturing apparatus and manufacturing method of this invention as a liquid crystal injection sealing apparatus and method in a liquid crystal display element are demonstrated. 11 is an overall view of a suitable embodiment showing an apparatus for manufacturing a liquid crystal display element according to the present embodiment, FIG. 12 is a schematic cross-sectional view showing a method for manufacturing a liquid crystal display element according to the present embodiment, and FIG. 13 is the same liquid crystal display. The perspective view which shows an element structure, FIG. 14 is a cross-sectional view, and FIG. 15 is explanatory drawing which shows the implementation result of a sealing process. In addition, the same part as the above-mentioned conventional example uses the same code | symbol, and the detailed description is abbreviate | omitted.

11 is a general view of one suitable embodiment showing the apparatus 300 for manufacturing a liquid crystal display element according to the present embodiment. In Fig. 11, 310 is a cell transfer robot, 320 is a liquid crystal injection-completed cell cassette, 330 is an encapsulating cell cassette, 340 is a liquid crystal presence inspection mechanism to be the first mechanism, and 305 has a cell gap measuring mechanism and a cell heating mechanism. 2nd mechanism, 360 is a 3rd mechanism which consists of a cell pressurization mechanism, a liquid crystal wiping mechanism, an encapsulant applying mechanism, an encapsulant wiping mechanism, a pressurization control mechanism, etc., 370 is a cell gap measuring mechanism, an ultraviolet irradiation mechanism, a cell heating mechanism Etc., the fourth mechanism 380, the encapsulant penetration amount measuring mechanism (image processing mechanism) constituting the fifth mechanism, and the 390, the center index table disposed at approximately the center of the first mechanism 340 to the fifth mechanism 380. The center index table 390 is configured to be free to rotate in one direction.

Here, the method of obtaining the above-mentioned liquid crystal display element 10 supplied to the manufacturing apparatus 300 of the liquid crystal display element which concerns on a present Example is demonstrated with reference to FIG. 13, FIG.

First, Corning Corporation # 1737 glass, which is the glass substrate 2 of the liquid crystal display element 10 provided with the antireflection film 8 and the transparent electrode film 1 previously required on the surface, and the reflection which receives the driving voltage supply from the CMOS transistor. An alignment film 21, 22 is formed on each of the silicon IC substrate 4 having the pixel electrode 3 on the surface, and yak-si is formed around the pixel electrode (display area) 3 of the silicon IC substrate 4 as one substrate. After applying the main seal adhesive 7 (WR series) manufactured by Kyoritsu Chemical Industry Co., Ltd., incorporating the Hwaseong SW series spacer ball 6, press molding the substrates 2 and 4 described above. It adheres by and adheres. As a result, a cell gap is formed between the substrates 2 and 4. 5 and 6, the illustration of the alignment films 21 and 22 is omitted.

After this, both of the adhesively bonded substrates 2 and 4 are conveyed in a vacuum chamber (not shown), and the liquid crystal prepared in the vacuum chamber is injected from the liquid crystal injection port 9 to form a liquid crystal injection completed cell 400 (FIG. 12). After that, the liquid crystal injection hole 9 is sealed so that the liquid crystal display element 10 is completed. In addition, the liquid crystal 5 to be injected uses a nematic liquid crystal.

Next, the manufacturing apparatus 300 of the liquid crystal display element which concerns on a present Example WHEREIN: The point which corrects the nonuniform cell gap uniformity after liquid crystal injection, and obtains favorable cell gap uniformity is demonstrated substantially.

A feature of the apparatus 300 for manufacturing a liquid crystal display element according to the present embodiment is to have a function of measuring a cell gap after liquid crystal injection and after applying an encapsulant to the cell and releasing pressure to the cell side. Moreover, the cell gap measurement result after liquid crystal injection also has the pressurization condition control function to the cell side surface. By this, the nonuniform in-plane cell gap after liquid crystal injection is corrected by cell side pressurization, and the absolute value of the cell gap which changes with the passage of time after the release of the pressurization is obtained, whereby the cell gap uniformity in the cell surface is the best. In this case, the encapsulant 130 (see Fig. 12) can be cured by ultraviolet irradiation to maintain good cell gap uniformity.

In addition, in the configuration of the manufacturing apparatus 300 of the liquid crystal display element, the release of the pressure on the side of the cell and at the same time, the optimum in the liquid crystal injection hole 9 of the encapsulant 130 in accordance with the cell gap uniformity that changes over time. In order to obtain the penetration amount of, the heating mechanism of the liquid crystal injection completed cell 400 is provided. In addition, the viscosity of the encapsulant 130 may be lowered by heating the liquid crystal injection completed cell 400, and the impregnation speed into the liquid crystal injection hole 9 may be controlled.

Moreover, as a manufacturing method for solving the said subject, the following method was obtained. First, cell gap measurement after liquid crystal injection is performed (FIG. 12B). Usually, after liquid crystal injection, as shown in FIG. 2A, as a cell gap uniformity, the center of a surface is often convex. At this time of cell gap measurement, heating to the liquid crystal injection completed cell 400 for controlling the impregnation of the encapsulant 130 in a later step is also performed.

Next, the pressurization condition to the side surface of the liquid crystal injection completed cell 400 is determined based on the cell gap measurement result, and the cell side is pressurized with air pressure to form a concave shape near the center of the plane (FIG. 12C).

At this time, the liquid crystal 5a pushed out of the liquid crystal injection completion cell 400 by pressing is wiped (FIG. 12D).

Next, the sealing agent 130 is apply | coated to the liquid crystal injection hole 9 by the dispenser which is not shown, for example (FIG. 12E).

Next, pressurization of the cell side is released, and the uneven state of the cell surface is advanced to a uniform state. The sealing agent 130 penetrates into the liquid crystal injection hole 9 because the inside of the liquid crystal injection completed cell 400 is in a reduced pressure state by the pressure release. At this time, the excess sealing agent 130 of the liquid crystal injection hole 9 is wiped (FIG. 12F).

At this point, cell gap measurement is resumed and heating to the liquid crystal injection completed cell 400 is also resumed (Fig. 12G).

When the in-plane uniformity of the cell gap becomes good (within ± 0.05 μm), the encapsulant 130 in the liquid crystal injection hole 9 is irradiated with ultraviolet rays and cured (FIG. 12H).

Thereafter, the amount of penetration of the encapsulant 130 in the liquid crystal injection port 9 is taken as an image, and completion of encapsulation is determined by image processing (FIG. 12I).

Hereinafter, in the manufacturing apparatus 300 of the liquid crystal display element which concerns on a present Example, about the point which correct | generates the nonuniform cell gap uniformity after liquid crystal injection, and obtains a favorable cell gap uniformity, referring FIG. 11, FIG. It demonstrates more concretely.

As shown in FIG. 12A, the liquid crystal injection-completed cell 400 into which the liquid crystal 5 is injected is set in the liquid crystal injection-complete cell cassette 320 of FIG. 11. Next, the liquid crystal injection completed cell 400 is extracted from the liquid crystal injection completed cell cassette 320 by the cell transfer robot 310 one by one, and the first stage, that is, the liquid crystal presence inspection mechanism that is the first mechanism ( 340).

In the liquid crystal presence inspection mechanism 340 which is a 1st mechanism, whether the liquid crystal 5 has entered in the liquid crystal injection completion cell 400 is confirmed. If the liquid crystal 5 can be checked therein, the liquid crystal injection completed cell 400 is installed on the center index table 390, and then the center index table provided with the liquid crystal injection completion cell 400 is installed. 390 rotates clockwise, for example, and conveys the said liquid crystal injection completed cell 400 to the 2nd mechanism 350 which has a next stage, ie, a cell gap measuring mechanism and a cell heating mechanism.

As shown in FIG. 12B, in the second mechanism 350, cell gap measurement of the transferred liquid crystal injection completed cell 400 and heating to the liquid crystal injection completion cell 400 are performed. The cell gap measurement is performed by software for calculating the interference light in the long wavelength region. It is preferable to perform heating to the liquid crystal injection completion cell 400 at 40 to 60 degreeC, Preferably it is around 50 degreeC. Heating is performed by the method of closely contacting the block in which the sheath heater is embedded to one surface of the liquid crystal injection completed cell 400.

When the cell gap measurement of the liquid crystal injection completed cell 400 and the heating to the liquid crystal injection complete cell 400 are completed, the liquid crystal injection complete cell 400 is installed on the center index table 390. The center index table 390 in which the liquid crystal injection completed cell 400 is installed is rotated clockwise, for example, so that the next stage, that is, the cell pressing mechanism, the liquid crystal wiping mechanism, the sealing agent applying mechanism, and the sealing agent wiping mechanism The liquid crystal injection completed cell 400 is conveyed to the third mechanism 360 made of a pressure control mechanism or the like.

12C to 12F, in the third mechanism 360, the liquid crystal brought by the center index table 390 based on the result of the cell gap measurement to the liquid crystal injection-completed cell 400 by the second mechanism 350. The pressurization by air pressure is performed by the cell pressurization mechanism from the outer side of both board | substrates 2 and 4 of the injection completion cell 400. At this time, the part which contacts both board | substrates 2 and 4 is outside the display area as the liquid crystal display element 10, and pressurization to 0.5 MPa is possible.

The contact portion material is preferably urethane, viton, or the like, but is not limited to these materials. Further, the contact portion is preferably made of a material which does not leak pressurized air. Further, preferred conditions for pressurization were 0.1 to 0.2 MPa. Moreover, since pressurization time can be controlled, 10 second-30 second are preferable. As mentioned above, the 3rd mechanism 360 also has the liquid crystal wiping mechanism which wipes the liquid crystal 5a pushed out from the liquid crystal injection port 9 of the liquid crystal injection completion cell 40 simultaneously with this pressurization. And by this pressurization, the cell gap uniformity in the surface of the liquid crystal injection completed cell 400 becomes concave (FIG. 12D).

Moreover, the ultraviolet curable sealing agent 130 which is a Nagase Industries Co., Ltd. product is apply | coated with a sealing agent application mechanism with the dispenser which is not shown in figure. Moreover, as mentioned above, the 3rd mechanism 360 is provided with the sealing agent wiping mechanism which wipes the excess sealing agent 130 after this application | coating. After the pressurization step, the pressurization control mechanism is released (decompressed) by the pressurization control mechanism to be atmospheric pressure. By releasing the pressurization, the encapsulant 130 is drawn into the liquid crystal inlet 9, and the liquid crystal inlet 9 is sealed (FIG. 12F).

In this way, the liquid crystal injection-completed cell 400 in which the cell pressurization, liquid crystal wiping, sealing agent application, sealing agent wiping, press release by the pressure control, etc. in the third mechanism 360 is finished is the center index table 390. After being installed on the table, the center index table 390 in which the liquid crystal injection completed cell 400 is installed is rotated clockwise, for example, to the next stage, that is, a cell gap measuring mechanism, an ultraviolet irradiation mechanism, a cell heating mechanism, or the like. The liquid crystal injection completed cell 400 is conveyed to the fourth mechanism 370.

12G and 12H, first, in the fourth mechanism 370, the cell gap of the liquid crystal injection completed cell 400 after the pressure release is measured by the cell gap measuring mechanism. At this time, the heating to the liquid crystal injection completed cell 400 is restarted by the cell heating mechanism. The heating method is performed by bringing the sheath heater embedding block into close contact with one surface of the liquid crystal injection completed cell 400 in the same manner as above. In the above-described cell gap measurement, the cell gap that changes with the passage of time is measured for each unit time, and when the cell gap uniformity is flat, the encapsulant 130 penetrated into the liquid crystal injection hole 9 is subjected to the ultraviolet irradiation mechanism. Irradiate UV light. Thereby, the sealing agent 130 hardens | cures and cell gap change stops (FIG. 12H). In the present embodiment, the cell gap uniformity range is within ± 0.05 μm.

In this way, the liquid crystal injection completed cell 400 in which the cell gap measurement, ultraviolet irradiation, cell heating, etc. in the fourth mechanism 370 is completed is installed on the center index table 390 described above, and then the liquid crystal injection completed cell ( The center index table 390 in which the 400 is installed is rotated clockwise, for example, and the liquid crystal injection completed cell is moved to a fifth mechanism 380 having a next stage, that is, an encapsulant penetration amount measuring mechanism (image processing mechanism). Return 400.

As shown in Fig. 12I, in the fifth mechanism 380, the penetration amount of the encapsulant 130 in the liquid crystal injection port 9 is inputted as photographing data to a CCD camera which is an encapsulant penetration amount measurement mechanism (image processing mechanism), and is imaged in advance by image processing. The pass judgment as a sealing process is performed by the set criterion.

In this way, the liquid crystal injection completed cell 400 in which the pass determination in the fifth mechanism 380 is completed is installed on the center index table 390, and then the center index table 390 in which the liquid crystal injection completion cell 400 is installed. For example, it rotates clockwise and conveys the said liquid crystal injection completion cell 400 to the liquid crystal presence test mechanism 340 which is said 1st mechanism.

The liquid crystal presence inspection mechanism 340 which is a 1st mechanism conveys the said liquid crystal injection completion cell 400 in the arrow direction, as shown in the case of the conveyed liquid crystal injection completion cell 400, and the sealing cell cassette ( 330). In addition, when the conveyed liquid crystal injection completion cell 400 is not good goods, it collect | recovers it in the NG cell cassette which is not shown in figure. By the above, the liquid crystal injection completion cell 400 is used as a liquid crystal display element 10 as a period component, such as a projector and a projection TV.

FIG. 15: is explanatory drawing which shows the cell gap side standing after sealing the liquid crystal display element produced by the manufacturing apparatus 300 of the liquid crystal display element which concerns on a present Example. The same figure a is the value after liquid crystal injection, and the same figure b is the value after bag hardening. The peripheral cell gap is an average value of the four corners of the image display area of the liquid crystal display element 10, and the center value is the center value of the image display area. In addition, the uniformity is the difference between the central value and the peripheral value, and the closer to 0 this value shows, the better the uniformity is.

According to this measurement result, the uniformity after liquid crystal injection shows the big improvement after hardening of sealing agent, and especially the element No. which had bad uniformity after injection. 3 and element No. Except 7, the uniformity after hardening of sealing agent is less than 0.1 micrometer, and it turns out that very good cell gap uniformity is obtained. In addition, the pressurization condition is made constant here, and element No. 3 and element No. Also about 7, favorable uniformity can be obtained after sealing hardening by changing pressurization conditions. Therefore, the liquid crystal display element obtained by the manufacturing apparatus of the liquid crystal display element which concerns on a present Example, and the manufacturing method of a liquid crystal display element is what is excellent in display image quality.

As described in detail above, the manufacturing apparatus of the present invention as a press molding apparatus includes an upper plate for holding a glass substrate of an element substrate (liquid crystal display element) on a lower surface side, and a silicon IC substrate (or other element of the element substrate (liquid crystal display element). A lower plate holding the glass substrate) on the upper surface side, a supporting mechanism for supporting the lower platen, and a moving mechanism for moving the supporting mechanism, wherein the supporting mechanism includes at least a contact mechanism and an elastic mechanism in contact with the lower surface side of the lower plate. And a rigid body that supports these contact mechanisms and elastic mechanisms, and the element substrates (liquid crystal display elements) are inclined by the contact mechanisms at the time of press molding of the element substrates (liquid crystal display elements) by the movement of the moving mechanism. Direction, but the force is absorbed by the elastic mechanism, and the glass substrate and the silicon IC substrate (or glass substrates) Substantially composed so that the correction to the parallel state.

For this reason, even when both board | substrates are inclined at the time of press molding, press molding advances while the said board | substrate receives a cell gap correction so as to mimic the spacer ball in a seal adhesive. Thereby, desired cell gap uniformity is maintained in the adhesion process of a board | substrate, and a favorable result can also be obtained also about the requirement of one fringe, for example. This facilitates adjustment of the cell gap uniformity in the liquid crystal injection and encapsulation step of the subsequent step, and thus leads to shortening of the tact time of the step. And when the liquid crystal display element manufactured by this invention is applied to a projector or a projection TV, it can greatly contribute to shading and color unevenness improvement.

In addition, by forming a protrusion integrally on the lower surface side of the upper plate, and configuring the protrusion only to contact the glass substrate during press molding due to the movement of the moving mechanism, even if foreign matter adheres to the glass substrate, Since the foreign material is not directly pressurized by the upper surface plate, no foreign material is crushed to dirty the glass substrate surface (which leads to deterioration of display quality in the projected image) and no pressure is applied to the glass substrate through the foreign material, thereby preventing local cell gap unevenness. Can be avoided. Thereby, it can contribute to the product ratio improvement in a liquid crystal display element process.

Moreover, in the manufacturing method of this invention as a press molding method, the glass substrate which has a transparent conductive film on the surface is installed in the lower surface side of an upper surface plate, The silicon IC board | substrate which previously applied the seal | sticker adhesive was provided in the upper surface side of a lower surface plate, By raising by the air cylinder, the angle of the silicon IC substrate is adjusted by the angle adjusting means in the previous step in which the silicon IC substrate is in contact with the glass substrate. After this, the air cylinder is raised again to give a predetermined pressing force to the lower platen, The silicon IC substrate is applied to the silicon IC substrate with a degree of freedom in the inclination direction of the lower plate, and the force is absorbed by the elastic mechanism to correct the silicon IC substrate in a substantially parallel state with respect to the glass substrate. Ultraviolet rays were used to cure the seal adhesive and to fix the glass substrate and the silicon IC substrate. Which it is possible to avoid a non-uniform cell gap, thereby contributing to improve the product ratio in the liquid crystal display device process.

Moreover, the manufacturing apparatus of this invention as a liquid crystal injection sealing apparatus is a 1st measuring mechanism for measuring the said cell gap immediately after inject | pouring a liquid crystal into a liquid crystal injection cell, the heating mechanism for heating a liquid crystal injection cell, and a liquid crystal injection cell. A pressurizing mechanism for pressing a predetermined region of the liquid crystal, a liquid crystal wiping mechanism for wiping a liquid crystal pushed out by the pressurizing mechanism, a sealing agent applying mechanism for applying a sealing agent for sealing a liquid crystal injection hole, and the sealing An encapsulant wiping mechanism for wiping excess encapsulant in the encapsulant applied by the first application mechanism, a second measuring mechanism for measuring the cell gap after stopping the pressurization by the pressurizing mechanism, and a second measuring mechanism. When the cell gap uniformity in the predetermined range is reached, an ultraviolet irradiation mechanism for irradiating ultraviolet light to the sealing agent to cure the sealing agent, and sealing at the liquid crystal inlet Since the image processing mechanism for detecting the first penetration amount is provided, the nonuniform cell gap uniformity after liquid crystal injection can be corrected to obtain good cell gap uniformity.

Moreover, the manufacturing method of this invention as a liquid crystal injection encapsulation method has the 1st measuring process of measuring the cell gap immediately after inject | pouring a liquid crystal into a liquid crystal injection cell, the heating process of heating a liquid crystal injection cell, and predetermined | prescribed from the outside of two board | substrates. A pressurizing step of pressing the region of the wafer, a wiping step of wiping the liquid crystal pushed out of the liquid crystal injection hole by the pressing step, an application step of applying an encapsulant to the liquid crystal injection hole, and a pressing of the pressing step to stop the cell gap. In the 2nd measuring process to measure, and the cell gap measurement in a 2nd measuring process, when the cell gap uniformity became a predetermined range, the hardening process of irradiating an ultraviolet-ray to a sealing agent and hardening a sealing agent, and a liquid crystal Since it includes a detection step for detecting the amount of encapsulant penetration in the injection hole, it is possible to correct uneven cell gap uniformity after liquid crystal injection, thereby providing good cell gap uniformity. The liquid crystal display element which has is obtained.

Claims (6)

In the manufacturing apparatus of the liquid crystal display element for press-molding the element board | substrate with which at least 2 glass substrates are adhering at predetermined intervals, An upper plate for holding one glass substrate of the element substrate on a lower surface side; A lower plate for holding another glass substrate of the element substrate on an upper surface side; A support mechanism for supporting the lower platen, A moving mechanism for moving the support mechanism; The support mechanism is composed of at least a contact mechanism in contact with the lower surface side of the lower plate, an elastic mechanism, and a rigid body supporting these contact mechanisms and the elastic mechanism, In press molding of the element substrate by the movement of the moving mechanism, the element substrate receives a force having a degree of freedom in the inclination direction of the lower plate by the contact mechanism, but the force is absorbed by the elastic mechanism, An apparatus for manufacturing a liquid crystal display device, wherein the glass substrate of the sheet is configured to be substantially corrected in parallel with each other. In the manufacturing apparatus of the liquid crystal display element for press-molding the liquid crystal display element by which a glass substrate and a silicon IC board | substrate are adhered at predetermined intervals, An upper plate to hold the glass substrate on a lower surface side; A lower plate for holding the silicon IC substrate on an upper surface side; A support mechanism for supporting the lower platen, A moving mechanism for moving the support mechanism; The support mechanism is composed of at least a contact mechanism in contact with the lower surface side of the lower plate, an elastic mechanism, and a rigid body supporting these contact mechanisms and the elastic mechanism, In the press molding of the liquid crystal display element by the movement of the moving mechanism, the silicon IC substrate receives a force having a degree of freedom in the inclination direction of the lower plate by the contact mechanism, but the force is absorbed by the elastic mechanism. A silicon IC substrate is configured to be corrected in a substantially parallel state with respect to the glass substrate. The method according to claim 1 or 2, Protruding portion integrally formed on the lower surface side of the upper plate, The said liquid crystal display element manufacturing apparatus characterized by the structure comprised so that only the said protrusion part may contact the said glass substrate at the time of shaping | molding by the movement of the said moving mechanism. In the manufacturing method of the liquid crystal display element for press-molding the liquid crystal display element by which a glass substrate and a silicon IC board | substrate are adhered at predetermined intervals, The said glass substrate which has a transparent conductive film on the surface is provided in the lower surface side of an upper plate, The silicon IC substrate to which the yarn adhesive is applied in advance is installed on the upper surface side of the lower platen, The lower plate is lifted by an air cylinder, and the angle of the silicon IC substrate is adjusted by angle adjusting means in the previous step in which the silicon IC substrate is in contact with the glass substrate. After this, the air cylinder is raised again to apply a predetermined pressing force to the lower platen, to give the silicon IC substrate a force having a degree of freedom in the inclination direction of the lower platen, and absorb the force by an elastic mechanism. Correcting the silicon IC substrate to a substantially parallel state with respect to the glass substrate, Next, the seal adhesive is irradiated with ultraviolet rays to cure the seal adhesive, and the glass substrate and the silicon IC substrate are fixed to each other. In the manufacturing apparatus of the liquid crystal display element for inject | pouring and sealing a liquid crystal in the liquid crystal injection cell in which two board | substrates adhere | attach, a liquid crystal injection port is formed, and a cell gap is formed, A first measuring mechanism for measuring the cell gap immediately after injecting liquid crystal into the liquid crystal injection cell; A heating mechanism for heating the liquid crystal injection cell; A pressing mechanism for pressing a predetermined region of the liquid crystal injection cell; A liquid crystal wiping mechanism for wiping liquid crystals pushed out by pressurization by the pressing mechanism; A sealing agent applying mechanism for applying a sealing agent for sealing the liquid crystal injection hole; An encapsulant wiping mechanism for wiping excess encapsulant out of an encapsulant applied by the encapsulant applying mechanism; A second measuring mechanism for measuring the cell gap after the pressurization by the pressing mechanism is stopped; An ultraviolet irradiation mechanism for curing the sealing agent by irradiating ultraviolet rays to the sealing agent when the cell gap uniformity in the second measuring mechanism is within a predetermined range; An image processing mechanism for detecting a penetration amount of the encapsulant in the liquid crystal injection port is provided. In the manufacturing method of the liquid crystal display element for inject | pouring and sealing a liquid crystal in the liquid crystal injection cell in which two board | substrates adhere | attach, a liquid crystal injection port is formed, and a cell gap is formed, A first measurement step of measuring the cell gap immediately after injecting the liquid crystal into the liquid crystal injection cell; A heating step of heating the liquid crystal injection cell; A pressing step of pressing a predetermined area from the outside of the two substrates; A wiping step of wiping the liquid crystal pushed out of the liquid crystal injection hole by the pressing step; An application step of applying a sealing agent to the liquid crystal injection hole; A second measurement step of measuring the cell gap by stopping pressurization by the pressing step; A curing step of curing the encapsulant by irradiating ultraviolet light to the encapsulant when the cell gap uniformity reaches a predetermined range in the cell gap measurement in the second measurement step; And a detection step for detecting the amount of encapsulant penetration in the liquid crystal injection hole.