TW571088B - Detecting inclusions in transparent sheets - Google Patents

Detecting inclusions in transparent sheets Download PDF

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Publication number
TW571088B
TW571088B TW090107806A TW90107806A TW571088B TW 571088 B TW571088 B TW 571088B TW 090107806 A TW090107806 A TW 090107806A TW 90107806 A TW90107806 A TW 90107806A TW 571088 B TW571088 B TW 571088B
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Taiwan
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light
item
patent application
scope
solid medium
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TW090107806A
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Chinese (zh)
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Harrie James Stevens
C Charles Yu
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Corning Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G01N15/0211—Investigating a scatter or diffraction pattern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0061—Investigating dispersion of solids in solids, e.g. petrography

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  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

This light scattering technique for size measurement is based on the fact that an illuminated particle (inclusion) serves as a secondary radiation source in a manner which is related to its size. This technique allows for detection of inclusions in the interior of transparent solid media, such as bulk glass. When illuminated with a beam of monochromatic light such as a laser beam as the primary light source, the angular distribution of the scattered intensity originated from the inclusion in the micron to submicron range, is a function of intensity, wavelength and index of refraction. A lens and light trap block the primary light for reaching a detector. The light trap, however, allows the secondary scattered light to reach the detector.

Description

571088 五、發明説明（f ) 技術領域： 本發明侧於—種在關介㈣如翻的 塑膠中感測小雜質之方法與裝置。大型破璃例如為高純ΐ 熔融石夕石（HPFS)為固體介質之另外一項範例。 、'峻 發明背景： 在玻璃中感測小的(微米以及次微米）雜質永遠是 挑戰工作。對於感測各種顆粒之困難在於聚焦之深度，靈、 敏性，解減。顯微鏡具有㈣制次微米綱之雜質，然 而其具有非常狹窄的焦點深度以及在高倍放大情況下取^ 區域為很小。感測小的雜質為非要的。假如單獨地使 用顯微鏡，這些限制使其幾乎不可能對大型玻璃進行分析。 已使用擴散反射/散射以鑑別雜質。在繪製其位置後，雜質 能夠更進一步藉由顯微鏡鑑定出。儘管如此，擴散反射 射方法之感測限制極限為5微米及低至丨微米。除此，破^ 厚度再-人些斗地党到顯微鏡技術聚焦狹窄之深度所限制。 經濟部中央標準局員工消費合作社印製 另外一方面，懸浮於流體介質例如為液體或氣體中之 小顆粒此夠藉由散射光線方法例行性地加以量測。固體破 璃中雜質與懸浮於流體中顆粒間之差異為重要的。一項差 異在於玻璃中雜質為靜止的。其集中值通常非常低，即訊 號強度非常微弱，其非常難以由噪訊中區分出。噪訊為表 面感測（表面訊號）與深度感測（内部訊號）間之串音。除此 ，玻璃中雜質位置為重要的資訊。由於流體介質中懸浮顆 粒之動態特性，其位置無法繪製。因而，目前存在儀器無法 設計具有顆粒位置之繪製能力。儘管如此，我們發現在懸 本纸張尺賴财_^ΪΤ〇Ν8)Α4^( 210X297^) 571088 A7 B7 五、發明説明（工） 浮於流體介質中顆粒量測之原理能夠適用於固體玻璃中之 雜質量測。 發明大要： 本發明方法以及儀器設計使用光線散射原理以直接地 量測固體介質中之雜質。本發明再設計之裝置預期作 散於流體介質中顆粒尺寸之量測以達成大型玻璃中雜質之 感測。我們目前能夠描緣出玻璃中雜質之位置。該結果直 接地適用於HPFS光學遮罩以及LCD玻璃之雜質感測。 對於尺寸量測之光線散射方法主要利用被照射顆粒（ 或雜質）能夠作為與其尺寸大小相關之第二輻射光源。在 利用單色光束使用雷射光束作為主要光源照射時，由微米 至次微米範圍内之雜質所發出散射光線強度之角度分佈為 下列情況之函數。散射強度之角度分佈為下列因素之函數 關係，包含散射光線與入射光束，入射光線之波長，以及與 相對於外圍介質之顆粒折射率。 附圖簡單說明： 第一圖（圖1)顯示出產生準直帶狀光束之產生。 經濟部中央標準局員工消費合作社印裝 第二圖（圖2)顯示出玻璃雜質量測組件之示意圖。 附圖元件數字符號說明： 振盪反射鏡12;圓形光束14;透鏡16;帶狀光束18; 雜質20;玻璃22;向前散射光線24;光線捕獲器26;感測 器28。 詳細說明 我們解決兩項設計之問題以有效地使用光線散射技術571088 V. Description of the invention (f) Technical field: The present invention focuses on a method and a device for sensing small impurities in Guan Jieru Ruan plastic. Large-scale glass breaking is, for example, high-purity concrete fused fused stone (HPFS) as another example of a solid medium. Background of the Invention: Sensing small (micron and sub-micron) impurities in glass is always a challenging task. The difficulty in sensing various particles lies in the depth of focus, sensitivity, sensitivity, and reduction. The microscope has impurities of submicron scale, but it has a very narrow depth of focus and a small area under high magnification. Sensing small impurities is optional. These restrictions make it almost impossible to analyze large glasses if a microscope is used alone. Diffusion reflection / scattering has been used to identify impurities. After plotting its location, the impurities can be identified further with a microscope. Nevertheless, the sensing limit of the diffuse reflection method is 5 microns and as low as 丨 microns. In addition to this, the thickness of the crack is limited by the depth of the people to the narrow depth of microscope technology. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs On the other hand, small particles suspended in a fluid medium such as liquid or gas can be routinely measured by the scattered light method. The difference between impurities in solid glass and particles suspended in a fluid is important. One difference is that the impurities in the glass are stationary. Its concentration value is usually very low, that is, the signal strength is very weak, and it is very difficult to distinguish it from noise. Noise is a crosstalk between surface sensing (surface signal) and depth sensing (internal signal). In addition, the location of impurities in the glass is important information. Due to the dynamic nature of suspended particles in fluid media, their positions cannot be plotted. Therefore, there are currently instruments that cannot design a drawing capability with particle positions. Nevertheless, we found that the paper ruler Lai Choi_ ^ ΪΤ〇Ν8) Α4 ^ (210X297 ^) 571088 A7 B7 V. Description of the invention (work) The principle of particle measurement floating in a fluid medium can be applied to solid glass Miscellaneous mass measurement. Summary of the invention: The method and instrument design of the present invention uses the principle of light scattering to directly measure impurities in solid media. The redesigned device of the present invention is expected to measure the size of particles dispersed in a fluid medium to achieve the sensing of impurities in large glass. We are currently able to trace the location of impurities in the glass. This result is directly applicable to the impurity detection of HPFS optical masks and LCD glass. The light scattering method for size measurement mainly uses the irradiated particles (or impurities) as the second radiation source related to its size. When using a monochromatic beam to irradiate with a laser beam as the main light source, the angular distribution of the intensity of scattered light emitted by impurities in the range of micrometers to submicrons is a function of the following conditions. The angular distribution of the scattering intensity is a function of the following factors, including scattered light and incident light, the wavelength of the incident light, and the refractive index of the particles relative to the surrounding medium. Brief Description of the Drawings: The first figure (Figure 1) shows the generation of a collimated ribbon beam. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs. Description of the numerical symbols of the drawing elements: oscillating mirror 12; circular beam 14; lens 16; strip beam 18; impurities 20; glass 22; forward scattered light 24; light trap 26; sensor 28. Detailed description We address two design issues to effectively use light scattering technology

本紙張尺度適财關CNS ) ( 210^297^tT 571088 五、發明説明（$ ) A7 B7 經濟部中央榡準局員工消費合作社印製 作為玻璃雜質之量測。 質濃度值太低因而大部間2^讯號強度。玻璃中雜 中。因而，最常見固定角产〜個雜質位於光束路徑 於入射光束為固定心排列（感測器放置相對 使其成為相的^ 舰光線強度 下列設計解41=測㈣ 成雜號感測以標定玻璃X-"之移動而達 ^ w g、數觸作因素對雜質猶之精確性成測 =及，環時間產生影㈣ 早，改變帶狀光束之寬度(w)及長度(L)， 2ΓίΧ—η移動速度，以及使用光學/電子訊號加強裝 置例如據波器以及截斷器。對於每一方式存在特定之選 主要關鍵在於求得平衡的組合以達到目標。 可以廣泛地蓋測各種固體介質。通常，固體介質可為 任何之透明玻璃，娜，結晶材料，玻璃陶究等。特別地， 要挑戰為制光遮罩制之高純麟融⑨石中的雜質。’ 們需要感測在HPFS中氣態以及耐火性之雜質。 、 固體介質之透明度廣泛地變化。明顯地，假如介質為 半透明，感測糸統將無法很精確。我們發現介質内部透明 度至少為65%。優先地，透明度應該至少為90%。 圖1顯示出藉由使用振盪反射鏡產生準直帶狀光束之 範例，其中心軸位於凸透鏡焦點位置處。使用帶狀光束藉 由使用振盪反射鏡將大大地減少檢視，該反射鏡中心軸位 •擇 主 我 衣、、氏張尺度適用+關家標準（CNS ) A4規格（210X297公釐） έ> (請先閱讀背面之注意事項再填寫本頁)The paper scale is suitable for financial and financial purposes (CNS) (210 ^ 297 ^ tT 571088) 5. Description of the invention ($) A7 B7 The measurement of glass impurities printed by the Consumer Cooperatives of the Central Government Bureau of the Ministry of Economic Affairs. The mass concentration value is too low and most of them 2 ^ signal strength. Miscellaneous in glass. Therefore, the most common fixed-angle product is located at the beam path. The incident beam is arranged at a fixed center (the sensor is placed relatively so that it becomes a phase). 41 = Measurement of miscellaneous number is used to calibrate the movement of glass X- " ^ wg, the accuracy of impurities and other factors to measure the accuracy of the impurity = and, the impact of the ring time is early, change the band-shaped beam Width (w) and length (L), 2Γίχ—η moving speed, and the use of optical / electronic signal strengthening devices such as wave receivers and truncators. There are specific options for each method. The main key is to obtain a balanced combination to achieve Objectives. It can cover a wide range of solid media. Generally, the solid media can be any transparent glass, glass, crystalline material, glass ceramics, etc. In particular, it must be challenged in the high-purity fused vermiculite made of light shielding. Impurities. We need to sense the gaseous and refractory impurities in HPFS. The transparency of solid media varies widely. Obviously, if the media is translucent, the sensing system will not be very accurate. We found that the internal transparency of the media is at least 65%. Preferentially, the transparency should be at least 90%. Figure 1 shows an example of the generation of a collimated ribbon beam using an oscillating mirror, with the central axis at the focal point of the convex lens. Using a ribbon beam by using oscillation The mirror will greatly reduce the viewing. The center axis position of the mirror is selected. • Choose the main clothing, the scale of the scale, and the family standard (CNS) A4 specification (210X297 mm). (Please read the precautions on the back first. (Fill in this page)

571088 Α7 Β7 五、發明説明（斗） 經濟部中央榡準局員工消費合作社印製 於凸透鏡焦點位置處。雷射為優先作為產生帶狀光束之光 源。 圖2顯示出玻璃雜質量測組件之示意圖。主要（帶狀） 光束藉由光線捕獲器加以阻隔，該捕獲器將防止光束進入 感測器。當雜質截取入射光線時，其作為第二輻射光源。 主要向前散射光線，除了少部份被光線捕獲器吸收外，藉由 透鏡聚集地投射進入感測器。此大大地提昇訊號強度。玻 璃放置於透鏡之焦點平面上（f)，在义方向來回地移動以及 在z方向逐步地移動。假如玻璃厚度超過透鏡之焦點深度 (△f)，能夠在y方向加入額外地逐步移動以含概完整感測範圍。 光線捕獲器能夠由金屬，塑膠，合金等材料所構成。我 們能夠使用黑色鍍鋁金屬。 雜質可分類為兩種：固體雜質，其由未熔融或外界材料 片狀物所構成；空隙雜質，通常為氣泡所構成。固體雜質通 常為使用來形成玻璃之原料中的結晶玻璃或微小雜質；配 製玻璃所使用容器壁面之耐火材料片狀物；玻璃流體所通 過管線之壁面的鉑片狀物所構成。固體雜質為不透明的或 清澈的。空隙雜質或氣泡以目視難以檢視。儘管如此，這 些雜質需要加以計數以及適當地加以分析。下列範例將提 供非常良好技術以感測這些内部之雜質。範例： 一塊HPFS約為60英付碟狀物以及厚度在6Π至1 〇"之間 變化。對於6”尺寸光遮罩基質，直徑60”碟狀物首先切割為 本紙張尺度適用中國國家標準（CNS〉Α4規格（210Χ297公釐） Τ (請先閱讀背面之注意事項再填寫本頁)571088 Α7 Β7 V. Description of the Invention (Battle) Printed by the Consumers' Cooperative of the Central Government Bureau of the Ministry of Economic Affairs at the focal position of the convex lens. Laser is preferred as a light source for generating a band-shaped beam. FIG. 2 shows a schematic diagram of a glass impurity measuring device. The main (striped) beam is blocked by a light trap, which will prevent the beam from entering the sensor. When an impurity intercepts incident light, it acts as a second radiation source. The scattered light is mainly forward, except that a small part of it is absorbed by the light catcher, and is projected into the sensor by the lens collectively. This greatly increases the signal strength. The glass is placed on the focal plane of the lens (f), moves back and forth in the sense direction and gradually moves in the z direction. If the thickness of the glass exceeds the depth of focus (△ f) of the lens, additional stepwise movements can be added in the y direction to include a nearly complete sensing range. The light catcher can be made of metal, plastic, alloy and other materials. We can use black aluminized metal. Impurities can be classified into two types: solid impurities, which are composed of unmelted or external material flakes, and void impurities, which are usually composed of air bubbles. Solid impurities are usually composed of crystalline glass or tiny impurities in the raw materials used to form glass; refractory flakes on the wall surface of the container used to prepare the glass; platinum flakes on the wall surface of the pipeline through which the glass fluid passes. Solid impurities are opaque or clear. Void impurities or bubbles are difficult to visually inspect. Nonetheless, these impurities need to be counted and properly analyzed. The following examples will provide very good techniques for sensing these internal impurities. Example: A piece of HPFS is about 60 inches and the thickness varies from 6Π to 10%. For the 6 ”size light mask substrate, the 60” diameter dish is cut first. This paper size is applicable to the Chinese national standard (CNS> Α4 size (210 × 297 mm)) (Please read the precautions on the back before filling this page)

訂 571088 A7 -- ——--— ----- 五、發明説明（5 ) 6· 25πχ6· 25”碟狀物完全厚度之方塊。每一方塊再切割為 許多厚度約為0· 25"之板狀物。6· 25，，χ6· 25，，χ〇· 25,，板狀物 加以重疊以及再粗略地拋光以及隨後傳送通過檢視處理過 程。 下列為本發明之範例，其使用來感測光學遮罩毛胚中 可能存在之雜質。使用於光學遮罩應用中HPFS熔融矽石一 項規定為並無尺寸大於2微米之雜質（對於高級終端應用為 1微米）。在玻璃中小尺寸雜質之感測為挑戰工作。在一項 實施例中，系統包含15mW氦氖雷射（波長為633nm)，凸透鏡， 及光二極體感測器。光線捕獲器由黑色錢紹長條所構成。 檢視使用原型之測試，結果為非常令人鼓舞的。系統 顯示出相同的感測限制能力，如同使用顯微鏡方格檢視方 法。已感測出如所決疋大約2微米尺寸之雜質類似物體。 元成早一片狀物之檢視時間約為1分鐘，而使用顯微鏡/方 格檢視法完成相同情況則需要1小時。 除了這些實施例，熟知此技術者能夠作出上述本發明 之許多改變及變化而不會脫離本發明之精神及範圍。 (請先閱讀背面之注意事項再填寫本頁)Order 571088 A7----- --- ----- V. Description of the invention (5) 6 · 25πχ6 · 25 "dish with full thickness. Each square is cut into many thicknesses of about 0 · 25 " Plates. 6.25, χ6 · 25, χ〇 · 25 ,, plates are superimposed and then rough polished and then passed through the inspection process. The following are examples of the present invention. Detect possible impurities in optical mask hair embryos. HPFS fused silica used in optical mask applications is defined as no impurities larger than 2 microns (1 micron for advanced end-use applications). Small-sized impurities in glass Sensing is a challenging task. In one embodiment, the system includes a 15mW helium-neon laser (wavelength 633nm), a convex lens, and a photodiode sensor. The light trap is made of a black Qianshao strip. View Tests using prototypes were very encouraging. The system showed the same sensing limit as the microscope grid inspection method. Impurity-like objects of approximately 2 microns in size have been detected as determined. Yuan Cheng Early one The inspection time of the object is about 1 minute, and it takes 1 hour to complete the same situation using the microscope / grid inspection method. In addition to these examples, those skilled in the art can make many changes and variations of the present invention without departing from the present invention. The spirit and scope of the invention (Please read the notes on the back before filling out this page)

訂 經濟部中央標準局員工消費合作社印製 用 -適 度 尺 張 -紙 本 準 ί榡 f家Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs-Moderate Rule-Paper Accredited

Claims (1)

571088 A8 B8 C8 D8 六、申請專利範圍 1· 一種在固體介質中感測雜質之裝置，其包含： 光源，其具有主要入射光束； 固體介質，其具有至少一個雜質位於其中，雜質截取主要 入射光線以及形成第二照射光源之向前散射光線； 包含光線捕獲器之透鏡；以及 感測器，其中光線捕獲器阻隔主要光束以及避免光束進 入感測器，以及在其中透鏡以及光線捕獲器能夠使大部份 向前散射光線投射進入感測器。 2.依據申請專利範圍第1項之裝置，其中固體介質為三雄性 ，其具有内部深度及外側表面，雜質位於内部深度範圍内。 3·依據申請專利範圍第1項之裝置，其中固體介質為大型玻 璃。 4. 依據申請專利範圍第1項之裝置，其中固體介質為玻璃材 料或塑膠。 5. 依據申請專利範圍第1項之裝置，其中固體介質為高純度 之熔融矽石。 6. 依據申請專利範圍第1項之裝置，其中固體介質為透明玻 璃片狀物。 經濟部中央標準局員工消費合作社印製 7·依據申請專利範圍第1項之裝置，其中主要光束為雷射光 束。 8·依據申請專利範圍第1項之裝置，其中透鏡為凸透鏡形式 以及光線捕獲器由低反射性表面之不透明材料所構成。 9.依據申請專利範圍第6項之裝置，其中低反射性表面為黑 色鍍鋁金屬。 … 衣紙張尺度適用中國國家襟準7^[S )八4祕（^7〇x297公着—) 571088 A8 B8 C8 D8 申請專利範圍 經濟部中央標準局員工消費合作社印製 ίο·依據申請專利範圍第（項之裝置，其中感測器為光 體。 11·依據申請專利範圍第㈣之裝置，其中感測器為二維CCD 陣列。 12. 依據申請專利範圍第㈣之裝置，其中感測雜質尺寸為（ 微米或次微米範圍。13. -種在固體介質中感測雜質之處理過程，其包含下 驟： 投射光源通·體介f，該統具有主要人射光束，固體 介質具有至少一個雜質在其中； 雜質截取主要入射光線以及形成第二照射光源之向前散 射光線； 投射主要光束及第二光束進入具有光線捕獲器之透鏡； 利用光線捕獲器阻隔主要光束，因而防止該光束進入感 測器；以及 投射大部份向前散射光線通過光線捕獲器進入感測器。 14·依據申請專利範圍第13項之裝置，其中固體介質為三維 性，其具有内部深度及外側表面，雜質位於内部深度範圍内 15.依據申請專利範圍第13項之處理過程，其中固體介質為 大型玻璃。 16·依據申請專利範圍第13項之處理過程，其中固體介質為 玻璃材料或塑膠。 17·依據申請專利範圍第13項之處理過程，其中固體介質為 南純度之纟容融秒石。 (請先閱讀背面之注意事項再填寫本頁) 訂 Φ 本紙張尺度適用中國國家榡準（CNS) ( 210x297公着） 571088 A8 B8 C8 D8 六、申請專利範圍 18. 依據申請專利範圍第11項之處理過程，其中固體介質為 透明玻璃片狀物。 19. 依據申請專利範圍第11項之處理過程，其中主要光束為 雷射光束。 20. 依據申請專利範圍第11項之處理過程，其中感測雜質尺 寸為1微米或次微米範圍。 ------Γ---- (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印製 表紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）571088 A8 B8 C8 D8 6. Scope of patent application 1. A device for sensing impurities in a solid medium, comprising: a light source having a main incident light beam; a solid medium having at least one impurity located therein, the impurities intercepting the main incident light And a forward scattered light forming a second illuminating light source; a lens including a light capturer; and a sensor in which the light capturer blocks a main light beam and prevents the light beam from entering the sensor, and in which the lens and the light capturer can make large Part of the forward scattered light is projected into the sensor. 2. The device according to item 1 of the scope of patent application, wherein the solid medium is a trimale, which has an inner depth and an outer surface, and the impurities are located within the inner depth range. 3. The device according to item 1 of the scope of patent application, in which the solid medium is large glass. 4. The device according to item 1 of the patent application scope, wherein the solid medium is glass material or plastic. 5. The device according to item 1 of the scope of patent application, wherein the solid medium is high-purity fused silica. 6. The device according to item 1 of the patent application scope, wherein the solid medium is a transparent glass sheet. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 7. The device according to item 1 of the scope of patent application, in which the main beam is a laser beam. 8. The device according to item 1 of the scope of the patent application, wherein the lens is in the form of a convex lens and the light trap is made of an opaque material with a low reflective surface. 9. The device according to item 6 of the patent application, wherein the low-reflective surface is black aluminized metal. … Applicable to China ’s national standard 7 ^ [S) Eighty-four Secrets (^ 70 × 297) — 571088 A8 B8 C8 D8 Patent Application Scope Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs The device of item (in which the sensor is a light body. 11. The device according to item ㈣ of the patent application range, wherein the sensor is a two-dimensional CCD array. 12. The device according to item 范围 of the patent application range, which detects impurities The size is (micron or sub-micron range. 13.-A process for sensing impurities in a solid medium, including the following steps: a projection light source through the body f, the system has a main human beam, the solid medium has at least one Impurities are in it; the impurities intercept the main incident light and the forward scattered light forming the second illuminating light source; project the main light beam and the second light beam into the lens with the light trap; use the light trap to block the main light beam, thereby preventing the beam from entering the sense And a device that projects most of the forward scattered light into the sensor through a light trap. 14. A device according to item 13 of the scope of patent application, Medium solid medium is three-dimensional, it has internal depth and external surface, and impurities are located in the range of internal depth. 15. According to the processing procedure of the patent application scope item 13, the solid medium is a large glass. 16. According to the patent application scope item 13 The processing process, in which the solid medium is glass material or plastic. 17. The processing process in accordance with item 13 of the scope of application for patents, in which the solid medium is South Rongrongrongrong second stone. (Please read the precautions on the back before filling in this Page) Order Φ This paper size applies to China National Standards (CNS) (210x297) 571088 A8 B8 C8 D8 VI. Application for patent scope 18. According to the process of application for patent scope No. 11, the solid medium is a transparent glass sheet 19. The process according to item 11 of the scope of patent application, wherein the main beam is a laser beam. 20. The process according to item 11 of the scope of patent application, wherein the sensing impurity size is in the range of 1 micron or sub-micron. ------ Γ ---- (Please read the notes on the back before filling out this page) Order the staffing cooperation of the Central Standards Bureau of the Ministry of Economic Affairs Printing paper table scale applicable Chinese National Standard (CNS) A4 size (210X297 mm)
TW090107806A 2000-03-29 2001-03-29 Detecting inclusions in transparent sheets TW571088B (en)

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