TW567519B - Fixing seat of glass substrate - Google Patents

Fixing seat of glass substrate Download PDF

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Publication number
TW567519B
TW567519B TW91109848A TW91109848A TW567519B TW 567519 B TW567519 B TW 567519B TW 91109848 A TW91109848 A TW 91109848A TW 91109848 A TW91109848 A TW 91109848A TW 567519 B TW567519 B TW 567519B
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Taiwan
Prior art keywords
glass substrate
cover body
low
coating
scope
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TW91109848A
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Chinese (zh)
Inventor
Kuei-Wen Jeng
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Teco Information Systems Co Lt
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Publication of TW567519B publication Critical patent/TW567519B/en

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Abstract

The present invention is a fixing seat of glass substrate, which is for fixing a glass substrate. A spin coating process is proceeded on the glass substrate by disposing the glass substrate on a coating mechanism for phosphor powder totem coating operation. The fixing seat comprises a spin carrier, an external mask body and a low-pressure sucking unit. The lower end of the external body has opening shape to form a rectangular opening for accommodating the said glass substrate. The upper end of the external mask body is connected to the said spin carrier. The spin carrier has low-pressure gas pipeline inside, and is connected to the said low-pressure sucking unit, so that the low-pressure sucking unit is accommodated inside the external mask body, and can attract the said glass substrate for proceeding the spin coating process for phosphor powder totem coating operation.

Description

567519 五、發明說明(1) 本發明係有關於一種玻璃基板固定承座,尤指一種可 使場發射顯示器之陽極板的螢光粉體圖騰製作,以習知的 陰極射線管顯示屏螢光粉體圖騰塗佈之製程進行,並可同 時減少塗佈原料的流失,有效控制下塗佈原料的使用量, 以及降低塗佈原料的殘留與不良塗佈等之玻璃基板固定承 座。 按’習知的平面顯示器 機二極體平面顯示器、薄膜 器等具有面平且厚度較薄之 各有其工作模式與發光機制 器及場發射顯示器,係以電 示器之陽極板螢光粉團被電 顯示態樣,此與習知的陰極 尤其以陽極部份,該等顯示 之顯不屏結構近乎等同。567519 V. Description of the invention (1) The present invention relates to a fixed base for a glass substrate, in particular to a fluorescent powder totem capable of making an anode plate of a field emission display, and a conventional cathode-ray tube display screen fluorescent The powder totem coating process is carried out, and it can reduce the loss of coating materials at the same time, effectively control the amount of coating materials used, and reduce the residue of the coating materials and the glass substrate fixing support such as poor coating. According to the conventional flat display machines, such as diode flat displays, thin film devices, etc., which have a flat surface and a thin thickness, each has its working mode, light emitting mechanism, and field emission display. It is based on the anode plate fluorescent powder of the electric display. The mass is displayed electrically, which is almost the same as the conventional cathode, especially the anode part. The display structure of these displays is almost the same.

係指稱如液晶平面顯示器、有 電聚顯示器或場發射平面顯示 特徵者’而前述各態樣顯示器 ’其中以所謂的薄膜電漿顯示 子激發或場激發模式使該等顯 子激發轉換為光子,而表現其 射線管之發光顯示機制近似, 器之陽極板結構與陰極射線管 極板ΐ第;示有-種習知的場發射顯示器之 (或導電層):上::::玻璃基板11、-黑紋層1 又如第二圖所示,5 :體層1 3及-反射鋁膜層1 4 少具有一顯示屏面盤2° $陰極射線管之顯示屏結構2 ’It refers to those who display features such as a liquid crystal flat display, an electro-polymer display, or a field emission flat display, and the aforementioned various displays, in which the so-called thin-film plasma display or field excitation mode is used to convert these exons into photons, The luminescent display mechanism of the ray tube is similar, and the anode plate structure of the device is the same as that of the cathode ray tube plate; it shows a conventional field emission display (or conductive layer): upper :::: glass substrate 11 、 -Black Grain Layer 1 As shown in the second figure, 5: Body layer 1 3 and -Reflective aluminum film layer 1 4 have at least one display panel 2 ° $ Cathode ray tube display structure 2 ''

塗佈一黑紋層(圖ϊ ) ί二該顯示屏面盤2 1之内側面 於該螢光粉體層(圖敗Α 、上覆螢光粉體層(圖略) 此,陰極射線管之Ξ ^再覆-反射鋁膜層(圖略), 極板(如第一圖5 Γ局部層體結構與場發射顯示之 不近乎無異,惟差別在於陰極射線Coat a black grain layer (Figure)) ί 2 The inner surface of the display panel 21 is on the fluorescent powder layer (Figure A, overlying the fluorescent powder layer (not shown)) Ξ ^ Repeat-reflective aluminum film layer (not shown), polar plates (as shown in Figure 5) The local layer structure and field emission display are similar, but the difference lies in the cathode ray.

第4頁 567519Page 4 567519

與場發射顯示器各該陰極結構上之不同。 請一併參閱第一圖及第二圖所示,上 : = 之結構差異在於:_射顯:以 ,璃基板1 i係為一面平薄片之玻璃平才反,而該』極: 線官所谓的顯示屏面盤2 1係由一管裙部2 2圍繞於該顯 不屏面盤2 1之面盤四周所構成的矩形盤狀體,故兩者間 在結構上之差異,會使得於螢光粉塗覆之技術上各有區別 〇This is different from each cathode structure of a field emission display. Please refer to the first picture and the second picture together. The difference in the structure of the upper: = lies in the following: _emission: the glass substrate 1 i is a flat sheet of glass, and the "pole": the line official The so-called display panel 21 is a rectangular disc-shaped body composed of a tube skirt 22 surrounding the panel of the display panel 21, so the structural difference between the two will make There are differences in the technology of phosphor coating.

^如第三圖所示,習知的陰極射線管之顯示屏的塗佈製 程係以一種旋轉塗佈之厚膜塗佈技術,其主要塗佈機構3 =含一塗佈機構載體3 1 、一連接承座32、一顯示屏固 疋承座3 3及一旋轉驅動裝置3 4 ;其中之塗佈機構載體 3 ^係用以提供該塗佈機構3於一執道(圖略)中運行, 另該連接承座3 2則可使上述顯示屏固定承座3 3依製程 需要而有^角度變化,而該顯示屏固定承座3 3用以固著 顯示,以進行塗佈作業,且該顯示屏固定承座3 3係藉由 上述旋轉驅動裝置3 4之驅動而以z軸轴心進行旋轉動作 ;該塗佈機構3之製程作業步驟如下: 步驟一、如第三圖A所示,將顯示屏固定承座3 3仰 一角度’使顯示屏内面盤微傾朝上,而後下塗佈原料於顯 示屏内面盤; 1^ As shown in the third figure, the conventional cathode ray tube display screen coating process is a spin-coating thick film coating technology, and its main coating mechanism 3 = contains a coating mechanism carrier 3 1, A connecting base 32, a display fixing base 3 3, and a rotary driving device 3 4; the coating mechanism carrier 3 ^ is used to provide the coating mechanism 3 to run in a channel (not shown) In addition, the connection socket 32 can change the angle of the display screen fixing socket 33 according to the needs of the manufacturing process, and the display screen fixing socket 3 3 is used to fix the display for coating operations, and The display fixing base 3 3 is rotated by the z-axis axis by the driving of the rotation driving device 34 described above. The manufacturing process of the coating mechanism 3 is as follows: Step 1. As shown in FIG. 3A , Tilt the display holder 3 3 at an angle 'to make the inner panel of the display slightly tilt upward, and then apply the raw material to the inner panel of the display; 1

步驟二 '亦如第三圖A所示,維持顯示屏固定承座3 3之角度二低速延轉使塗佈料完全覆料至顯示屏内面盤; v驟—、如第三圖B所示,將顯示屏固定承座3 3改Step 2 'is also as shown in the third picture A, maintaining the angle of the display fixed support 3 3 2 low-speed delay rotation so that the coating material is completely covered to the display panel; v step—as shown in the third picture B , The display fixed support 3 3 change

第5頁 567519 五、發明說明(3) 2使?示屏略朝1",再以高速迴轉使塗佈料成膜並 ^ ^ ^ 藉一回收機構(圖略)將溢出之塗佈料回收 步 佈料熱 步 步 步 藉 產生: 、紅色 一鋁膜 而 已知的 及薄膜 其製程 而,各 式及高 騰,雖 寸的面 形成之 較差較 製作限 體之製 驟四、 烘乾; 驟五、 p驟六、 鱗七、 由以上 黑紋圖 螢光粉 層等。 就場發 製作模 蝕刻製 相較於 該製作 壓靜電 可簡化 板等優 點面積 難滿足 制更多 程模式 如第三圖c所示,將顯示屏内面盤之成膜塗 依所需之圖 顯像使圖騰 將顯像後之 至少七道製 騰、綠色螢 團圖騰等, 射顯示器之 式至少有: 程模式,由 陰極射線管 模式仍各有 吸附模式, 製程、降低 點,但其於 或條紋線寬 未來高解析 ,又,所謂 ,雖製作之 騰進行曝光; 成型; 顯示屏内面盤乾燥。 程步驟程序循環重複製作將依序 光粉團圖騰、藍色螢光粉團圖騰 最後在於其上覆上一壓克力膜及 陽極板 網板印 於係適 顯示屏 其優劣 不利用 印製原 面板所 亦較大 度之要 的薄膜 圖騰較 之製作 刷式、 用於平 塗佈之 ,例如 曝光顯 料之用 印製成 ’對於 求,另 餘刻製 細微, 方式而言 高壓靜電 板玻璃基 製程較為 :其中之 影方式即 量及可製 之螢光粉 成品之解 對於小尺 程模式係 最終成品 ,以目前 吸附模式 板製作, 簡化,然 網板印刷 可製程圖 作較大尺 圖騰上所 析度要求 寸面板之 採用半導 可有較佳Page 5 567519 V. Explanation of the invention (3) 2? The display screen is slightly towards 1 ", and then the coating material is formed into a film by high-speed rotation and ^ ^ ^ borrows a recycling mechanism (figure omitted) to recover the overflowing coating material step by step. The film is known and the manufacturing process of the film is various and high, although the formation of the inch surface is worse than the production of the limited body. Step 4, drying; Step 5, p, Step 6, Scale 7, from the black pattern above Light powder layer and so on. Compared with this method, the production of die-etching on the spot can simplify the board and other advantages. The area is difficult to meet the more process mode. For example, the totem will display at least seven totems, green fireball totems, etc., and the display mode has at least: process mode, the cathode ray tube mode still has adsorption mode, process, lower point, but it is or streaked The line width will be high-resolution in the future, and, so-called, although it is made for exposure; molding; the inner panel of the display screen is dry. The process steps are repeated in a cycle.The sequential light powder totem and the blue fluorescent powder totem are finally covered by an acrylic film and an anode plate screen printed on the system display.The advantages and disadvantages do not use the printing original. The required film totem of the panel is larger than that of the brush type, which is used for flat coating, for example, the exposed material is printed by printing. The basic process is relatively: the shadow method is the amount and the solution of the fluorescent powder product can be made. For the small-scale process mode, the final product is produced with the current adsorption mode board, which is simplified, but the screen printing process can be made into a larger scale totem. The above analysis requires that the use of semiconducting panels can have better

56/MV 五、發明說明(4) 丨作,且ί作設;1 :二t較小僅能侷限於小尺寸面板之製 板螢光粉圖騰製作若‘『高产:於中大型尺寸之陽極 1佳對策。 令?又回解析度之要求者顯然仍需一較 沿用陰極射線管顯示屏:n:極板要求,®此若能 極板之塗佈佈::備套用☆場發射顯示器陽 管由於在玻璃結構上仍士 :當:| :面=板巧極射線 套用場發射顯示器平面陽極二 2,因此,右引用設備 如第四圖所示有::。 丨=顯示屏之管裙部2…,故所會ί I顯示;尚= 射線管之 I無管裙部2 1而無法夾ί 1之、,、。構’故平面%極板將因 丨…二、陰極射線管之顯示屏因有管裙部2 1,於下塗佈 ΐ ί,進行,速延轉覆料,藉管裙部2 1的阻擋轉折可Ξ 塗,充分覆蓋於内面盤表面,以有效控制塗佈料量而平 面陽極板亦因無該管裙部2工,故在低速延轉覆料過程將 造成塗佈料流失、增加塗佈料量,甚至難以全面 |個平面陽極板之表面。 二、溢出之塗佈料可能沾染於設備之週邊區域,使得 1 國 567519 五、發明說明(5) 後段製程之烘 物掉入塗佈面 有鑑於場 示屏在螢光粉 與顯示屏之結 面陽極板無法 轉承座上以進 良一種玻璃基 極射線 螢光粉 中大型 滿足產 本 座,其 螢光體 之平面 本 座,其 用量, 本 座,其 玻璃基 剝落於 為 管之顯 體塗佈 尺寸及 業之需 發明之 係可固 圖騰製 陽極板 發明之 係於進 以降低 發明之 係可減 板固定 塗佈面 了達成 乾而殘 上而產 發射顯 體塗層 構又有 直接固 行螢光 板固定 示屏螢製程, 高解析 求。 主要目 著平面 程實施 的製作 另一目 行螢光 塗佈料 又一目 少於旋 承座之 而造成 上述之 留, 生不 示器 有近 顯著 著於 粉體 承座 光粉 實施 場發 更進而 良。 之平面 似之結 之差異 陰極射 之塗佈 ,以使 塗佈機 於該平 射顯示 於以後之製程將因此殘留 陽極 構, ,俾 線管 製程 平面 構上 面玻 器之 板與 惟, 使場 之顯 ;職 玻璃 ,得 璃基 平面 陰極射 各該平 發射顯 示屏塗 是,發 基板可 以習知 板上以 陽極板 線管之顯 面陽極板 示器之平 佈機構旋 明人乃改 固著於陰 的顯示屏 期可製作 ,並同時 的’在於可提供一種玻璃基板固定承 玻璃基板,使原陰極射線管之顯示屏 於玻璃基板上,而進行場發射顯示器 〇 的,在於可提供一種玻璃基板固定承 粉體圖騰製作可有效運用塗佈料之使 之成本。 的’在於可提供一種玻璃基板固定承 轉塗佈製程中因溢出之塗佈料附著於 週邊區域,減免溢出之塗佈料脫落或 不良塗佈之結果。 目的,本發明係提供一種玻璃基板固56 / MV V. Description of the invention (4) 丨 work, and 1 design; 1: two small t can only be limited to small-sized panels made of fluorescent powder totem production if 'high yield: in the medium and large size anode 1 best countermeasure. make? Obviously, those who want to return to the resolution still need a more conventional cathode ray tube display: n: polar plate requirements, if this can be coated with the polar plate :: ready to use ☆ field emission display anode tube is on the glass structure Still: When: | :: face = plate clever polar ray applied field emission display plane anode II2, so the right reference device is as shown in the fourth figure ::.丨 = The tube skirt 2 of the display screen, so I will display I; still = the tube tube I has no tube skirt 2 1 and cannot be clamped 1 ,,,. The structure of the flat electrode will be caused by the second and the second. The display screen of the cathode-ray tube has a tube skirt 2 1 and is coated underneath. The turning can be painted, fully covering the surface of the inner disk to effectively control the coating material volume, and the flat anode plate also does not have the tube skirt. Therefore, the coating material will be lost and the coating will be increased at a low speed. The amount of cloth is even difficult to comprehensively | the surface of a flat anode plate. 2. Spilled coating material may be contaminated in the peripheral area of the device, making Country 567519 V. Description of the invention (5) The baked material in the latter stage of the process falls into the coating surface. The surface anode plate cannot be transferred to the base to enter a glass base ray fluorescent powder medium and large size to meet the production base, the flat surface of the phosphor, the amount of the base, the base, the glass substrate is peeled off for the display of the tube The size of the coating layer and the industry need to be invented can be fixed totem anode plate. The invention is to reduce the system of the invention. The plate can be fixed to reduce the coating surface. Direct fixed-line fluorescent board fixed screen display process, high resolution. The main purpose of the plane is to produce another line of fluorescent coating material which is less than the rotation of the socket, which causes the above-mentioned retention. The display device is significantly more significant than the powder bearing. good. The difference between the plane-like knot and the cathode-ray is applied, so that the coating machine will display the anode structure in the subsequent process due to the flat-plane display. Display glass, glass-based flat cathode cathode, each flat-emission display screen is painted, the substrate can be used to know the flat surface of the anode plate wire tube, the flat cloth mechanism of the anode plate indicator, the Mingren is fixed It can be produced in the display screen period of the shade, and at the same time, it is to provide a glass substrate fixed to the glass substrate, so that the display screen of the original cathode ray tube is on the glass substrate, and the field emission display is to provide a glass. The production of the substrate fixed support totem can effectively use the cost of the coating material. It is because it can provide a result of the coating material overflowing to the surrounding area due to the overflow of the coating material in the process of glass substrate fixing and transfer coating, so as to prevent the overflowing coating material from falling off or poor coating. Purpose, the present invention is to provide a glass substrate

第8頁 567519 五、發明說明(6) 定承座,其係用以固定一玻璃基板,以令該玻璃基板於一 塗佈機構上進行螢光粉圖騰塗佈作業之旋轉塗佈製程,進 而製成場發射顯示器之陽極板;該固定承座包括一旋轉載 體、一外罩本體及一低壓吸引單元;其中之外罩本體下端 呈開放狀以形成一矩形開口,可供上述玻璃基板容置,而 該外罩本體上端則與上述旋轉載體相連結,該旋轉載體内 部設有低壓氣體管路’並與上述低壓吸引單元相連結,以 令該低壓吸引單元容置於該外罩本體内部,而能吸附上述 玻璃基板以進行螢光私圖騰塗佈作業之旋轉塗佈製程。 為了使 貝審查委員能更進一步瞭解本發明之特徵及 技術内谷’清參閱以下有關本發明之詳細說明與附圖,然 而所附圖式僅提供參考與說明用,並非用來對本發明加以 限制者。 & 口月參閱第五圖’係為本發明之平面示意圖。本發明係 提供一種玻璃基板固定承座,該固定承座5主要白姓/旋 轉載體5卜一外罩本體52、一低壓吸弓5丨單Jg、複 數定位擋塊5 4、複數供水管5 5及複數出水口 5 7 ;其 中:Page 8 567519 V. Description of the invention (6) The fixed bearing is a spin coating process for fixing a glass substrate so that the glass substrate can perform a fluorescent powder totem coating operation on a coating mechanism, and then The anode plate of the field emission display is made; the fixed base includes a rotating carrier, a cover body and a low-pressure suction unit; wherein the lower end of the cover body is open to form a rectangular opening, which can be accommodated by the glass substrate, and The upper end of the cover body is connected with the rotating carrier, and a low-pressure gas pipeline is provided inside the rotating carrier, and is connected with the low-pressure suction unit, so that the low-pressure suction unit is housed inside the cover body and can absorb the above-mentioned The glass substrate is a spin coating process for performing a fluorescent private totem coating operation. In order to enable the review committee to further understand the features and techniques of the present invention, please refer to the following detailed description and drawings of the present invention, but the drawings are provided for reference and illustration purposes only, and are not intended to limit the present invention. By. & Refer to the fifth figure 'is a schematic plan view of the present invention. The invention provides a glass substrate fixed seat. The fixed seat 5 mainly includes a white surname / rotary carrier 5, a cover body 52, a low-pressure suction bow 5 丨 single Jg, a plurality of positioning stops 5 4, and a plurality of water supply pipes 5 5 And multiple outlets 5 7; of which:

該旋轉載體5 1係與上述之外罩本體5 2連姓一體, 並藉由一塗佈機構6 (如第六圖Α所示)提供支g與旋轉 運動,且該旋轉載體5 1内覆一與上述低壓吸引單元5 3 相連結之低壓氣體管路(圖略),俾使該低壓 5 3得以減壓以吸附玻璃基板。 引早 該外罩本體5 2係為一半開放式外罩,其下端呈開放The rotating carrier 5 1 is integrated with the above-mentioned outer cover body 52, and provides a support g and a rotating motion by a coating mechanism 6 (as shown in FIG. 6A), and the rotating carrier 5 1 is covered with a The low-pressure gas pipeline (not shown) connected to the low-pressure suction unit 5 3 allows the low-pressure 5 3 to be decompressed to adsorb the glass substrate. Early in the morning The body 5 2 of the cover is a semi-open cover with an open lower end

ipi 第9頁 567519 五、發明說明(7) 狀以形成一矩形開口 (如第五圖A所示),上端則如上所 述與該旋轉載體5 1相連結;該外罩本體5 2下端之矩形 開口係大於玻璃基板之外圍,此開口之長寬比例與玻璃基 板之長寬比例實質相等,並由該外罩本體5 2之上端至下 端漸漸擴大,以供玻璃基板容置於該外罩本體5 2内部且 為上述之低壓吸引單元5 3所吸附。 該外罩本體5 2内壁四周之水平向形成有一共面之空 間區域5 6,該空間區域5 6之長、寬係與玻璃基板之長 、寬實質相等,且該空間區域5 6的共平面與上述該外罩 本體5 2下端之矩形開口的共平面相平行,並與該旋轉栽 體5 1之軸心Z軸(如第五圖B所示)垂直,以供破螭基 板安置於其上,且玻璃基板四周與該空間區域5 6四周相 密合。 上述該等定位擋塊5 4係分佈設置於該外罩本體5 2 内壁與空間區域5 6相鄰近之處,且該等定位擋塊5 4位 於該空間區域5 6上方,藉以輔助該低壓吸引單元5 3吸 引玻璃基板固著及定位之所需;該低壓吸引單元5 3可為 一低壓吸盤,其係利用一減壓裝置(圖略)使其内壓力& 於大氣壓,進而吸引玻璃基板固著同時於旋轉塗佈製程造 行時不致使玻璃基板脫落。 上述該等供水管5 5係由上而下順勢設置於該外罩 體5 2内壁處上,且與一設置於該旋轉載體5 1内部之給 水管路(圖略)相連通’以提供機構外部液體流動之通 ;另,該等供水管5 5與上述該等出水口 5 7相連通,π 可ipi page 9 567519 V. Description of the invention (7) to form a rectangular opening (as shown in the fifth figure A), the upper end is connected to the rotating carrier 5 1 as described above; the rectangular shape of the lower end of the cover body 5 2 The opening is larger than the periphery of the glass substrate. The length-width ratio of the opening is substantially equal to the length-width ratio of the glass substrate, and gradually expands from the upper end to the lower end of the cover body 5 2 for the glass substrate to be accommodated in the cover body 5 2 The inside is adsorbed by the above-mentioned low-pressure suction unit 53. A horizontal plane around the inner wall of the housing body 5 2 forms a coplanar space region 56. The length and width of the space region 56 are substantially equal to the length and width of the glass substrate, and the coplanarity of the space region 56 is The coplanar plane of the rectangular opening at the lower end of the cover body 52 is parallel to and perpendicular to the axis Z axis (as shown in the fifth figure B) of the rotating plant 51 for the broken substrate to be placed thereon. And the periphery of the glass substrate is in close contact with the periphery of the space area 5 6. The above-mentioned positioning stops 5 4 are distributed and arranged near the inner wall of the cover body 5 2 and the space area 56, and the positioning stops 54 are located above the space area 56 to assist the low-pressure suction unit. 5 3 is required for fixing and positioning the glass substrate; the low-pressure suction unit 53 may be a low-pressure suction cup, which uses a pressure reducing device (not shown) to make its internal pressure & At the same time, the glass substrate does not fall off during the spin coating process. The above-mentioned water supply pipes 5 5 are arranged on the inner wall of the outer cover 5 2 from top to bottom, and communicate with a water supply pipe (not shown) provided inside the rotating carrier 5 1 to provide the exterior of the mechanism. The liquid flows; in addition, the water supply pipes 5 5 are connected to the above-mentioned water outlets 5 7.

567519567519

五、發明說明(8) 於旋轉塗佈製程中提供出水,俾使殘留於該外罩本體5 2 内壁之塗料’隨著該等出水口 5 7 —併於製程中被稀釋甩 開或被回收,以降低該外罩本體5 2内壁之塗料殘留;同 時,於旋轉塗佈製程中,該外罩本體5 2、低壓吸引單-5 3以及該等供水管5 5係可共同沿該旋轉載體5 1之轴 心Z轴(如第五圖B所示)旋轉。 是以,藉由上述之構造組成,即可得到本發明之破 基板固定承座。 如第六圖A所示,本發明係為一種玻璃基板固定承座 ’該固定承座5係可用以固定一平面玻璃基板,以令破璃 基板於塗佈機構6進行螢光粉圖騰塗佈作業之旋轉塗佈製 程;其中,該固定承座5係藉由其低壓吸引單元5 3將破 璃基板固接於外罩本體5 2内之空間區域5 6上,並以其 内部之定位擋塊5 4使玻璃基板定位; " 如第六圖B所示,隨後藉一連接承座6 1改變該固定 承座5之角度’以令該外罩本體5 2下端之矩形開口朝向 一清洗槽6 2 ’該清洗槽6 2内覆清洗溶液喷口,以使清 洗液喷向位於該外罩本體5 2内之玻璃基板的塗佈面,同 時藉由该旋轉載體5 1的轉動,即可使該外罩本體5 2及 玻璃^板f生轉動,以清潔玻璃基板的塗佈面·, 士惠ΐ f ^ C所示’藉由一加熱板6 3所形成的加熱區對 f,基板進行熱輕射乾燥,以去除水份而使玻璃基板保持 如圖/、D所示,令該連接承座6 1作轉動,以使該外V. Description of the invention (8) Provide water in the spin coating process, so that the paint remaining on the inner wall of the cover body 5 2 is followed by the water outlets 5 7 — and diluted in the process and thrown away or recycled. In order to reduce the paint residue on the inner wall of the cover body 52, at the same time, in the spin coating process, the cover body 5 2, the low-pressure suction sheet -5 3, and the water supply pipes 5 5 can work together along the rotation carrier 5 1 The axis Z axis (as shown in the fifth figure B) rotates. Therefore, with the above-mentioned structure and composition, the broken substrate fixing seat of the present invention can be obtained. As shown in the sixth figure A, the present invention is a glass substrate fixing base. The fixing base 5 can be used to fix a flat glass substrate, so that the broken glass substrate can be coated with fluorescent powder totem on the coating mechanism 6. The spin coating process of operation; wherein, the fixed base 5 is used to fix the broken glass substrate to the space area 5 6 inside the cover body 5 2 by its low-pressure suction unit 5 3, and uses its internal positioning stopper 5 4 to position the glass substrate; " As shown in FIG. 6B, then a connection socket 6 1 is used to change the angle of the fixed socket 5 'so that the rectangular opening at the lower end of the cover body 5 2 faces a cleaning tank 6 2 'The cleaning tank 6 2 is covered with a cleaning solution spout, so that the cleaning solution is sprayed onto the coating surface of the glass substrate inside the cover body 5 2, and at the same time, the outer cover can be made by the rotation of the rotary carrier 51. The body 52 and the glass plate f are rotated to clean the coated surface of the glass substrate. As shown by Shi Hui's f ^ C, f and the substrate are lightly fired by a heating zone formed by a heating plate 63. Dry to remove the water and keep the glass substrate as shown in Figure /, D, so that the connection The pedestal 61 is rotated to make the outer

Ϊ1ΙΗ 567519 五、發明說明(9) ' ------ Ϊ if 之矩形開口朝上,但該旋轉載體5 1之軸 軸不兀王與水平面相垂直,同時以缓速進行旋轉,並 塗::I艾:^行下塗佈料動作,再藉由緩速延轉動作使 ;充刀覆蓋於玻璃基板的塗佈面上;由於玻璃基板的 $佈面上有該外罩本體5 2之遮擋,故可於旋轉過程中令 =佈料的流動方向僅限於玻璃基板的塗佈面上,而不致使 塗佈料流失,進而有效控制塗佈料的使用量; 如圖六Ε所示,再令該連接承座6 1作轉動使該固定 座5略微朝下,且該旋轉載體5 1進行高速旋轉以使塗 ==上之塗佈料均勻成膜,另於該固定承座5外設一回收 ς 6 5 ’以將因高速旋轉而溢出之塗佈料回收,同時, :f該外罩本體5 2内的出水口 5 7 ,於此時設定出水, 罢殘留黏附^該外罩本體5 2内壁的塗佈料移除入回收 :6 5 ;故該等出水口 5 7之設計,可避免塗佈料因日 ,,累積於該外罩本體5 2内壁,而影響玻璃基板的吸 寸固著’甚至累積之殘留物剝落掉落至塗佈面上影響 之缺失產生; 如圖六F所示,再次令該固定承座5進入乾燥區以加 熱板6 6進行熱輻射乾燥; 隨後即可進行曝光顯影等製程,以製作完成一場發 顯示器之陽極板。 因此’藉由本發明之玻璃基板固定承座,至少可复 以下幾點優點: 、为 一、本發明可使場發射顯示器陽極板之螢光粉圖騰製Ϊ1ΙΗ 567519 V. Description of the invention (9) '------ Ϊ The rectangular opening of if is facing upward, but the axis of the rotating carrier 51 is not perpendicular to the horizontal plane, and it is rotated at a slow speed and painted. :: I Ai: ^ The coating material moves under the line, and then it is caused by the slow delay rotation; the knife is covered on the coating surface of the glass substrate; because the cover body 5 2 It can be blocked during the rotation, so the flow direction of the cloth is limited to the coating surface of the glass substrate, so that the coating material is not lost, and the amount of coating material is effectively controlled; as shown in Figure 6E, Then, the connection base 61 is rotated to make the fixed base 5 slightly downward, and the rotary carrier 51 is rotated at a high speed to uniformly form the coating material on the coating ==, and outside the fixed base 5 Set a recycling ς 6 5 ′ to recover the coating material overflowing due to high-speed rotation, and at the same time,: f the water outlet 5 7 in the cover body 5 2, set the water at this time, and leave the residue ^ the cover body 5 2 The coating material on the inner wall is removed and recycled: 6 5; Therefore, the design of these water outlets 5 7 can avoid the coating material due to the day. , Accumulated on the inner wall of the cover body 52, and affected the suction of the glass substrate, and even the accumulated residue was peeled off and dropped onto the coating surface. As shown in FIG. 6F, the fixed bearing was again caused. The base 5 enters the drying area to heat the plate 6 6 for thermal radiation drying; then, processes such as exposure and development can be performed to produce an anode plate for displaying a display. Therefore, by using the glass substrate fixing base of the present invention, at least the following advantages can be restored: 1. For the present invention, the present invention can make a fluorescent powder totem for the anode plate of a field emission display.

567519 、發明說明(10) 私’利用習知的陰極射線管顯示屏之螢光屏製程之改良進 行’以製作高解析及中大型等面板之需求,並使原螢光粉 圖騰製程更具有產業利用價值。 二、本發明可有效控制塗佈料量,避免塗佈原料流 失,以降低原料成本。 三、本發明可排除殘留於外罩本體内壁之塗佈料,以 減少塗佈面不良的發生。 之使用目的,而解決 性,完全符合發明專 敬請詳查並賜准本案 綜上所述,本發明確可達到預期 習知之缺失,又因極具新穎性及進步 利申請要件,爰依專利法提出申請, 專利,以保障發明人之權利。 惟以上所述僅為本發明 拘限本發明之專利範圍,故 内容所為之等效結構變化, 内,合予陳明。 之車父佳1 & 舉凡運施例,非因此即 均同理明說明書及圖式 白包含於本發明之範圍567519, Description of the invention (10) Privately use the improvement of the conventional fluorescent screen manufacturing process of the cathode ray tube display screen to make high-resolution, medium and large-scale panels, and make the original phosphor totem process more industrial. Use value. 2. The invention can effectively control the amount of coating material, avoid the loss of coating materials, and reduce the cost of materials. 3. The present invention can eliminate the coating material remaining on the inner wall of the cover body to reduce the occurrence of coating surface defects. The purpose of use, and the solution, are completely in line with the invention. Please check and grant the case. In summary, the present invention can indeed achieve the expected lack of knowledge. Laws file applications and patents to protect the rights of inventors. However, the above is only the scope of the present invention, which limits the patent scope of the present invention. Therefore, the equivalent structural changes of the content are hereby incorporated by Chen Ming. Che Fu Jia 1 & For example, if not, it is the same as the description and drawings. It is included in the scope of the present invention.

567519 圖式簡單說明 第一圖 係習知場發射顯示器陽極板之結構示意圖 第 圖 圖 意 示 之 構 結 屏 示 顯 之 管 線 射 極 陰 知 習 係 圖 意 示 。之 圖式 意模 示業 面作 平程 之製 構構 機機 佈佈 塗塗 知知 習習 係係 A 圖圖 三三 第第 圖 意 示 之 式 模 業 作 程 製 構 機 佈 塗 知 習 係 B 圖 三 第 圖 意 示 之 式 模 業 作 程 製 構 機 佈 塗 知。 習} 係三 C 圖 三 第 ABABCDEF 明 1 圖圖圖圖圖圖圖圖圖圖 說知 四五五五六六六六六六 號習 第第第第第第第第第第 符ί 圖 〇 意圖 示意 之示 構面 機平 佈之 塗明 知發 習本 係係 圖 意 示 面 平 之 。上 圖構 意機 示佈 視塗 仰於 之設 明明 發發 本本 係係 圖圖圖 意意意 示示示 之之之 式式式 模模模 業業業 作作作 程程程 製製製 明明明 發發發 本本本 係係係 圖圖圖 意意意 示示示 之之之 式式式 模模模 業業業 作作作 程程程 製製製 明明明 發發發 本本本 #,## 三四五六567519 Brief description of the diagram The first diagram is a schematic diagram of the structure of the anode plate of a conventional field emission display. The diagram of the structure shown in the diagram shows the structure of the tube emitter cathode. The schematic diagram of the pattern manufacturing machine is shown in Figure A. The cloth painting and coating system is shown in Figure A. Figure 3. The schematic diagram of the pattern manufacturing machine is shown in Figure B. Figure 3. The figure shows the coating process of the mold industry. Xi} Department Three C Figure Three Number ABABADEF Ming 1 Figure Figure Figure Figure Figure Figure Figure Figure Figure No. 4 5 5 5 6 6 6 6 The painting of the flat surface machine is clearly known. The above picture shows the layout of the machine. The book is clearly issued. This is a diagram of the model shown in the diagram. The model industry is made as a process. hair hair intended meaning intended to show a diagram illustrating the system of FIG present books of Department of FIG formula formula formula die mold for molding industry for the process industry sector for the braking system braking Mingming Ming Cheng Cheng hair hair books present #, ## thirty-four May Six

第14頁 567519 圖式簡單說明 1 陽極板 1 1 平面玻璃基板 1 2 黑紋層 1 3 螢光粉體層 1 4 反射鋁膜層 2 顯示屏結構 2 1 顯示屏面盤 2 2 管裙部 3 3 1 塗佈機構 塗佈機構載體 3 2 連接承座 3 3 顯示屏固定承座 3 4 旋轉驅動裝置 4 1 夾具 【本發明】 5 固定承座 外罩本體 定位擋塊 空間區域 5 1 旋轉載體 52 5 3 低壓吸引單元 54 5 5 供水管 56 5 7 出水口 6 塗佈機構 6 1 連接承座 6 2 清洗槽 6 3 加熱板 6 4 下料搶 6 5 回收裝置 6 6 加熱板Page 14 567519 Brief description of the drawings 1 Anode plate 1 1 Flat glass substrate 1 2 Black texture layer 1 3 Fluorescent powder layer 1 4 Reflective aluminum film layer 2 Display structure 2 1 Display panel 2 2 Tube skirt 3 3 1 Coating mechanism coating mechanism carrier 3 2 Connecting socket 3 3 Display fixing socket 3 4 Rotary driving device 4 1 Fixture [Invention] 5 Fixed bearing housing body positioning block space area 5 1 Rotating carrier 52 5 3 Low-pressure suction unit 54 5 5 Water supply pipe 56 5 7 Water outlet 6 Coating mechanism 6 1 Connection socket 6 2 Washing tank 6 3 Heating plate 6 4 Blanking grab 6 5 Recovery device 6 6 Heating plate

Claims (1)

567519 六、申請專利範圍 1 、一種玻璃基板固定承座,其係用以固定一玻璃基板, 以令該玻璃基板於一塗佈機構上進行螢光粉圖騰塗佈 作業之旋轉塗佈製程,進而製成場發射顯示器之1%極 板;該固定承座包括: 一旋轉載體,内部設有低壓氣體管路; 一外罩本體,其上端與該旋轉載體相連結’下端則呈 開放狀以形成一矩形開口’以供上述之玻璃基板容 置;及 一低壓吸引單元,用以吸附上述之玻璃基板’並與該 旋轉載體之低壓氣體管路相連結而容置於該外罩本 體内部。 2、 如申請專利範圍第1項所述之玻璃基板固定承座,其 中該,走轉載體内部更設有給水管路,且於該外罩本體 内壁由上而下順勢設置有複數供水管,並使該等供水 管與該給水管路相連通。 3、 如申請專利範圍第2項所述之玻璃基板固定承座,其 更設有複數出水口,且該等出水口係與該等供水管相 連通。 4、 如申請專利$1圍第1項所述之玻璃基板固定承座,其 中該外罩本體之上端至下端係漸漸擴大。 5、 如申請專利範圍第4項所述之玻璃基板固定承座,其 中該外罩本體内壁四周之水平向係形成有一共面之空 間區域,該空間區域之長、寬與上述玻璃基板之長、 寬相等,且該空間區域的共平面與上述該外罩本體下567519 VI. Application for Patent Scope 1. A glass substrate fixing base, which is used for fixing a glass substrate, so that the glass substrate can perform a spin coating process of a fluorescent powder totem coating operation on a coating mechanism, and further The 1% pole plate of the field emission display is made; the fixed base includes: a rotating carrier with a low-pressure gas pipeline inside; a cover body whose upper end is connected to the rotating carrier; the lower end is open to form a A rectangular opening 'for the aforementioned glass substrate to be accommodated; and a low-pressure suction unit for adsorbing the aforementioned glass substrate' and connected to the low-pressure gas pipeline of the rotating carrier to be accommodated inside the cover body. 2. The glass substrate fixed socket as described in item 1 of the scope of the patent application, wherein the water carrier is further provided with a water supply pipe, and a plurality of water supply pipes are provided along the inner wall of the cover body from top to bottom. The water supply pipes communicate with the water supply pipe. 3. As the glass substrate fixed socket described in item 2 of the scope of patent application, it is further provided with a plurality of water outlets, and these water outlets are connected with the water supply pipes. 4. The glass substrate fixing base as described in the first item of the application for patent $ 1, wherein the upper end to the lower end of the cover body is gradually enlarged. 5. The glass substrate fixing base as described in item 4 of the scope of the patent application, wherein the horizontal direction around the inner wall of the cover body forms a coplanar space area, and the length and width of the space area are the same as the length of the glass substrate. The width is the same, and the coplanarity of the space area is under the cover body. 567519 六、申請專利範圍 端之矩形開口的共平面相平行。 6 7 8 、如申請專利範圍第5項所述之玻璃基板固定承座,其 更包括複數定位擂塊,該等定位擋塊係分佈設置於該 外罩本體内壁與空間區域相鄰近之處,藉以辅助該低 壓吸引單元吸附上述玻璃基板固著及定位之所需。 、如申請專利範圍 中該等定位擋塊 、如申請專利範圍 中該低壓吸引f 基板固定承座’其 上方。 基板固定承座’其 第6項所述之玻璃 係位於該空間區域 第1項所述之玻璃 元係為一低壓吸盤567519 VI. Scope of patent application The coplanar ends of the rectangular openings are parallel. 678. The glass substrate fixing seat as described in item 5 of the scope of patent application, further comprising a plurality of positioning blocks, the positioning stops are distributed and arranged near the inner wall of the cover body and the space area, thereby It assists the low-pressure suction unit to absorb the needs for fixing and positioning the glass substrate. Such as the positioning stopper in the scope of the patent application, such as the low-pressure suction f substrate fixing base ′ above the scope of the patent application. The substrate fixing base ’is the glass described in item 6 is located in the space area. The glass described in item 1 is a low-pressure suction cup.
TW91109848A 2002-05-10 2002-05-10 Fixing seat of glass substrate TW567519B (en)

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