TW567213B - Rubber composition for washing mold - Google Patents
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- TW567213B TW567213B TW89122957A TW89122957A TW567213B TW 567213 B TW567213 B TW 567213B TW 89122957 A TW89122957 A TW 89122957A TW 89122957 A TW89122957 A TW 89122957A TW 567213 B TW567213 B TW 567213B
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567213 五、發明說明(1) 【發明的詳述】 【發明目的】 【發明所屬領域及該領域的現有技術】 成、物是有關於清除模具上之污染物。清潔用橡膠合 ”明’更具體地說明是關於以橡膠為主要成份,經 以=合物、無機化合物粒子及其他添加劑而獲得 β 4用&成物的發明。該發明合成物可用於模且, 可使用於製造半導體所使用的模具。 八、j疋 田& ί以ί固型樹脂為原料的壓模或加熱成型的工藝所使 用的模具中’隨著作業工藝的進行,入模具的污 將在以後/54 Ϊ 殘來,這一殘留下來的物質 4反復進行的作業工藝中起污染作用,這樣不僅會 造的產品的不良,還會在以後成型過程Π 内的:鍤二、九。包括成型物被碳化所產生的碳化殘留物在 的Γίΐΐϋ 一般在製作結構複雜的成型物或成型物 了保鳟7雷政別顯著,舉例來說,在半導體製造過程中為 工ϋ φ,而以熱固型樹脂進行圍繞的組裝工藝(emc成型 作i也難於""唯種/染現象成了重要的問題,即使通過手工 物將更堅勃地:在=著;作業的不斷進行’碳化殘留 的作用。 在槟具上,從而使模具不可能再起到正常 模具—定時間或次數的作業後,必須清除留在 n μ μ為了有效地進行這種清潔作業,現在正 趨使用梃種熱固型脂的清潔方法。567213 V. Description of the invention (1) [Detailed description of the invention] [Objective of the invention] [Field of the invention and prior art in the field] The finished product is related to the removal of contaminants on the mold. Cleaning rubber compound "Ming" is more specifically about the invention of using β as the main component, and using β compounds, inorganic compound particles, and other additives to obtain β 4 & products. The composition of the invention can be used in molds Moreover, it can be used for the molds used in the manufacture of semiconductors. 8. J 疋 田 & ί The mold used in the stamping or thermoforming process using the solid resin as the raw material is used in the mold as the work process progresses. Fouling will remain in the future / 54 Ϊ. This remaining substance 4 will play a role in contamination in the repeated operation process. This will not only cause the product to be defective, but also in the subsequent molding process: 锸 二 、 九Including the carbonized residue produced by the carbonization of the molded product, it is generally used in the production of complex molded products or molded products. It is remarkable that, for example, the semiconductor manufacturing process is ϋ, and The assembly process surrounded by thermosetting resins (emc molding is also difficult to " " the seeding / dyeing phenomenon has become an important issue, even by hand will be more robust: Carry out the role of 'carbonization residue'. On the mold, so that the mold can no longer function as a normal mold-after a fixed time or number of operations, it must be removed and left in n μ μ In order to effectively perform this cleaning operation, it is now being Cleaning methods that use a variety of thermosetting greases.
567213 五、發明說明(2) 這種清潔方法 模具内,隨著施加 同一般的良型工藝 被清潔用樹脂團收 清潔了。 這種清潔用樹 主成份的兩種。以 月b較低,並會留下 ’消耗很多的時間 清潔用樹脂(稱為,, 所需要的時間也短 氣味,並會引起二 作業環境惡化。 【將發明付諸實施 本的目正是消 去就一直等待解決 現有技術的基礎上 刺激性的氣味和煙 第二個目的就 後所產生的殘留物 二次污染。 第三個目的提 更優良的清潔效果 第四個目的是 核用固體狀態的清潔用樹脂,將其注入 熱加壓力,密封模具,使清潔用樹脂如 一樣被熱固,同時破化殘留物等污染物 ’因此隨著取下清潔用樹脂,模具也被 脂有以蜜胺樹脂為主成份的和以橡膠為 蜜胺為主成份的清潔用樹脂,其清潔效 樹脂殘留物,這一殘留物需要手工清除 和勞力。相反地,以橡膠為主要成份的 清潔橡膠”)具有優良的清潔性能,清潔 ,,會產生較多的焦油,發出很剌激的 次污染(即起模杆周圍重新被污染)使 所需要的技術課題】 ^現有技術的如上技術問題,解決從過 的技術問題。具體來說,首先要消除在 ^用蜜胺及橡膠的工藝中所產生的具有 ΐΪΓϊ有以手工進行的蜜胺樹脂工蓺 或在橡膠樹脂工藝中所產生的焦油: 通過發揮比現有的蜜脸椒Η匕丄 來縮短時間。S…脂或橡膠樹月旨 改善在清潔模具時(特別是在清潔半導567213 V. Description of the invention (2) This cleaning method The inside of the mold is cleaned by the resin mass for cleaning with the application of the normal good process. This cleaning tree has two main ingredients. The month b is low, and it will leave a lot of time for cleaning resin (called, the time required is also short odor, and it will cause the deterioration of the working environment. [The purpose of putting the invention into practice is Elimination has been waiting to solve the irritating odor and smoke on the basis of the existing technology. The second purpose is the secondary pollution of the residue. The third purpose is to improve the cleaning effect. The fourth purpose is to use nuclear solid state. The cleaning resin is injected with heat and pressure to seal the mold, so that the cleaning resin is cured as well as the pollutants such as residues. Therefore, as the cleaning resin is removed, the mold is also coated with honey. Cleaning resins containing amine resin as the main component and rubber containing melamine as the main component have cleaning effect resin residues. This residue requires manual removal and labor. On the contrary, cleaning rubber containing rubber as the main component ") Has excellent cleaning performance, clean, will produce more tar, emit very sub-contamination (that is, re-contamination around the ejector rod) makes the required technical issues ^ The above-mentioned technical problems of the prior art, to solve the past technical problems. Specifically, first, the melamine resin produced in the process of using melamine and rubber must be eliminated. The tar produced in the resin process: By reducing the time compared with the existing honey-faced peppers and daggers, S ... grease or rubber tree is intended to improve the cleaning of molds (especially when cleaning semiconductors)
5162-3542-PF.ptd 第5頁 567213 五、發明說明(3) 體的模具時)所產生的氣味和煙霧造成的不良作業環境。 【發明的組成】 為了達到這一目的,本發明合成物以橡膠為主要成 份’經與清潔用化合物、硬化劑及無機添加劑要加工助劑 等混合而得到。具體來說,上述清潔用橡膠合成物,在合 成物總重量中橡膠含量在3〇 —6〇%,無機添加物在2〇 —6〇%, 清潔化合物在1 - 2 0 %,硬化劑在〇 · 5 - 5 %。 上述橡膠成份在受到熱量和壓力時,由於硬化劑的作 用,會在模具内被硬化,污染物也會隨之被消除。用於本 發明的橡膠可從乙烯—丙二烯單聚物橡膠(EpDM)、天然橡 膠(NR)、二苯乙烯-丁烯橡膠(SBR)、丁二烯橡膠(BR)、氣 丁橡膠(CR)、硝基-丁二烯橡膠(NRB)氟化橡膠、聚丙烯橡 膠、矽橡膠及丁基橡膠中選擇一種或兩種以上的混合物, 或這物質的衍生物,其甲EpDM和⑽混合橡膠更佳。 當上述橡膠成份進入模具並受到熱和壓力作用時,在 硬化劑的作用下被硬化,成為包含清潔用化合物、吸收劑 和污染物的混合體。在使用時將起清潔作用的化合物加入 無機添加物中,然後使其與橡膠混合,加工成片狀等形 狀。這種片狀橡膠在模具内吸收污染物後被硬化,硬化 f片被取下時染物物也隨之被消除,所以作業方便、效 咼,並且清潔化合物和無機添加物也沾在硬化橡膠上一 被消除,所以可以改善二次污染問題。 唣 上述清潔化合物的作用是使污染物從模具脫離, 包含於無機吸收劑中混進橡膠。這種清潔化合物的代表ς5162-3542-PF.ptd Page 5 567213 V. Description of the invention (3) When the mold of the body) is produced, the bad working environment caused by odor and smoke. [Composition of the invention] In order to achieve this object, the composition of the present invention is obtained by mixing rubber as a main component 'with a cleaning compound, a hardener, and an inorganic additive and a processing aid. Specifically, the rubber composition for cleaning mentioned above has a rubber content of 30-60%, an inorganic additive of 20-60%, a cleaning compound of 1-20%, and a hardener of 0.5-5%. When the above rubber components are subjected to heat and pressure, they will be hardened in the mold due to the role of the hardener, and contamination will be eliminated accordingly. The rubber used in the present invention can be selected from ethylene-propadiene monopolymer rubber (EpDM), natural rubber (NR), stilbene-butene rubber (SBR), butadiene rubber (BR), air-butadiene rubber ( CR), nitro-butadiene rubber (NRB) fluorinated rubber, polypropylene rubber, silicone rubber and butyl rubber, or a mixture of two or more of them, or a derivative of this material, a mixture of formic EpDM and fluorene Rubber is better. When the above-mentioned rubber component enters the mold and is subjected to heat and pressure, it is hardened under the action of a hardener, and becomes a mixture containing a cleaning compound, an absorbent, and a contaminant. During use, the cleaning compound is added to the inorganic additive, and then it is mixed with rubber and processed into a sheet or the like. This sheet-shaped rubber is hardened after absorbing pollutants in the mold, and the dyed matter is eliminated when the hardened f-piece is removed, so the operation is convenient and effective, and cleaning compounds and inorganic additives are also stained on the hardened rubber. One is eliminated, so the problem of secondary pollution can be improved.唣 The role of the above cleaning compounds is to release the pollutants from the mold, and the rubber is contained in the inorganic absorbent. Representative of this cleaning compound
567213 五、發明說明(4) 質有氨基醇系化合物、羥基及異吡唑系列合物等,其中氨 基醇系化合物、異吡唑系列更有效。 上述氨基醇系列化合物的例子有2 -氨基乙醇、2 - ( 2 -氨基乙氧基)乙醇、單乙醇胺、二乙醇胺、2 -氨基-2-乙基 -1,3-丙二醇、2-氨基-2(經基甲基)-1,3-丙二醇、2-氨基 4-經基-6-甲基嗦咬、2-(2 -氨基乙基氨基)乙醇、2 -氨基 -3 -羥基吡啶、三乙醇胺、乙醇胺氫氯化物、3 -氨基-1 一丙 醇、2-氨基-1-丙醇、1—氨基—2-丙醇、3-氨基-1,2-丙二 醇、3 -氨基-1-丙醇乙烯基醚、2 -氨基酚、2 -氨基苯基醇 、3-氨基酚、4-氨基酚、4-甲基-1,2, 4-三唑-3, 5 -二酮、 二丁基氨基)乙醇、2-(乙基氨基)乙醇等。 上述經基及異D比嗤系列化合物的例子有2 -經基笨醢胺 4經基本酿胺、2 -沒基本味坐、1-(2_經基乙基)贩嗦、 (2 -羥基乙基)哌啶、卜(2 -羥基甲基)-2 -吡咯烷、2, 4-二 經基-6-甲基嘧啶、2, 4_二氨基-6-羥基吡啶、2-羥基乙基 肼、4-(羥基曱基)咪唑、2-乙基-4-曱基咪唑、l-(3 -氨基 丙基)咪唑、2 -羥基乙基肼、卜(2 -羥基乙基)—2 -咪唑烷酮 、咪唑、4 -咪唑甲醇、2 _咪唑乙醇、2 -咪唑烧酮等。 上述清潔用化合物要根據清潔能力和是否產生焦油決 定清潔橡膠合成物的成份是否合適。舉例來說,用於清潔 半導體模具的橡膠合成物’應選擇可以有效地使模具内的 污染物脫離模具且能夠較好地與橡膠樹脂混合的儘合物。 上述清潔化合物可使用如上所示常質中的一種或兩種 以上的混合物,例如以氨基酵系列為主要成份,在此基礎567213 5. Description of the invention (4) The amino alcohol compounds, hydroxyl groups, and isopyrazole series compounds are the most effective ones. Among them, amino alcohol compounds and isopyrazole series are more effective. Examples of the above-mentioned amino alcohol series compounds include 2-aminoethanol, 2- (2-aminoethoxy) ethanol, monoethanolamine, diethanolamine, 2-amino-2-ethyl-1,3-propanediol, and 2-amino- 2 (Methylmethyl) -1,3-propanediol, 2-amino4-Methyl-6-methylamidine, 2- (2-aminoethylamino) ethanol, 2-amino-3 -hydroxypyridine, Triethanolamine, ethanolamine hydrochloride, 3-amino-1 monopropanol, 2-amino-1-propanol, 1-amino-2-propanol, 3-amino-1, 2-propanediol, 3-amino-1 -Propanol vinyl ether, 2-aminophenol, 2-aminophenyl alcohol, 3-aminophenol, 4-aminophenol, 4-methyl-1,2,4-triazole-3, 5-dione, Dibutylamino) ethanol, 2- (ethylamino) ethanol, and the like. Examples of the above-mentioned compounds of the acyl group and the iso-D ratio are 2-mercaptobenzylamine, 4-basic amine, 2-basic flavor, 1- (2-methylethyl) amidine, (2-hydroxy Ethyl) piperidine, bu (2-hydroxymethyl) -2-pyrrolidine, 2,4-diamidyl-6-methylpyrimidine, 2, 4-diamino-6-hydroxypyridine, 2-hydroxyethyl Hydrazine, 4- (hydroxyamido) imidazole, 2-ethyl-4-amidoimidazole, l- (3-aminopropyl) imidazole, 2-hydroxyethylhydrazine, (2-hydroxyethyl) — 2-imidazolidinone, imidazole, 4-imidazole methanol, 2-imidazole ethanol, 2-imidazolone, and the like. The above-mentioned cleaning compound determines whether the composition of the cleaning rubber composition is appropriate depending on the cleaning ability and whether or not tar is generated. For example, the rubber composition for cleaning semiconductor molds should be selected as a perfect compound which can effectively remove the contaminants in the mold from the mold and can be well mixed with the rubber resin. The above-mentioned cleaning compounds can use one or a mixture of two or more of the normal substances shown above, for example, based on the amino fermentation series as the main component.
5162-3542-PF.ptd 第7頁 5672135162-3542-PF.ptd Page 7 567213
上添加少量羥基及異吡唑 以使用上述化合物外的其 使用。 系列清潔化合物。根據情況還可 他化合物,或與上述化合物混合 成物4 上述清:化合物的使用量網狀輸送機為合 成物…重的1-20%,正確地說為3 —1〇%, =果她合物含量低於上述範圍的下限確 留物,並會使硬化因難/ 硬化後會在模具内留下殘 ^述無機添加物的作用是為清潔化合物的混合起組份 作用和吸收並消除在作中產生的具有刺激性的氣味和煙霧 所以作為機添加料,可以使用無機化合物中具有組份 作用和有利於吸形成刺激性氣味和煙霧的物質。這種無機 添加料的代表例子有二氧化矽、活性氧化鋁(Activated Alumina)、矽膠、鉅化矽、非結晶矽酸鋁(Am〇rph〇us Aluminosi 1 icate)、結晶矽酸鋁等。其中採用矽膠、非結 晶矽酸鋁和結晶矽酸鋁更佳。這些物質可以單獨使用,也 可以兩種以上混合使用。 非結晶矽酸鋁的例子有矽藻土、高嶺土、白土等,結 晶矽酸鋁有34種以上的沸石和約1 〇 〇多種合成沸石等。天 然沸石的具體例子有方沸石(Anal cime)、菱沸石 (chabaxi te)、鈉菱沸石(Gmel ini te)、柱沸石 (Epistilbite)、剝沸石(Heulandite)、輝沸石(Stilbite )、愛 丁沸石(Edingtonite)、中沸石(Mesolite)、釀酒沸Add a small amount of hydroxyl and isopyrazole to use other than the above compounds. A series of cleaning compounds. According to the situation, other compounds, or mixed with the above-mentioned compounds, can be obtained. 4 The above-mentioned clear: the amount of compounds used in the mesh conveyor is synthetic ... 1-20% of weight, or 3-10%, = fruit. The content of the compound is lower than the lower limit of the above range, and it will cause hardening. It will leave a residue in the mold after hardening. The role of the inorganic additive is to act as a component and absorb and eliminate the cleaning compound. The irritating odor and fumes generated during the operation are used as organic additives, which can be used in inorganic compounds that have a component effect and are beneficial to the formation of irritating odors and fumes. Representative examples of such inorganic additives include silicon dioxide, activated alumina, silicon gel, giant silicon, amorphous aluminum silicate (AmOrphus Aluminosi 1 icate), crystalline aluminum silicate, and the like. Among them, silicone, non-crystalline aluminum silicate and crystalline aluminum silicate are more preferable. These may be used alone or in combination of two or more. Examples of non-crystalline aluminum silicate include diatomite, kaolin, white clay, and the like. There are more than 34 types of zeolites and about 1,000 types of synthetic zeolites. Specific examples of natural zeolites include anal cime, chabaxi te, gmel ini te, epistilbite, heulandite, stilbite, and zeolite (Edingtonite), Mesolite, Boiling
5162-3542-PF.ptd 第8頁 567213 五、發明說明(6) 石(Brewsterite)、福沸石(Faujasite)、钳沸石(Viseite )、歐復彿石(Offretite)、絲光彿石(Mordenite)專’合 成沸石的具體例子有沸石A、沸石L、沸石T、沸石K - G、彿 石ZK-5、沸石X、沸石Y、沸石ZSM-5、沸石D、沸石S、沸 石R、沸石P、沸石Z-21、沸石S等。 本發明合成物的效果,根據焦機添加料細孔的多少而 有所差異細孔多的更優良。與細孔較小的矽酸鹽相比, 具有適當大的細孔(約3 - 2 0 A )的沸石對本發明合成物更為 有效。細孔大小在6 A以上的更佳。如果細孔太小,會導 致上述刺激性氣味和煙霧的物質難以被吸入細孔内的結果 。但是如果採用細孔較小的無機化合物,為了發揮所望的 特性,可使合成物内的含量比提高到比具有適當細孔大小 的無機化合物更高的程度以補充這一不足。 無機添加物的含量在合成物總重的2〇 — ,更正確地 說為30-50%。只要不影響清潔效果,便可提高到上述含量 在本發明合物中,具有當受熱時引起橡膠分子間交聯 從而使橡膠硬化的硬化劑,其典型例子有2,5_二甲基_2 5 2T(第上-丁基過氧)_己炔_3、二—第三''丁基過氧:匕物、 ’5 —甲基-2,5-雙-(第三-丁基過氧)一己炔、第三_ 枯基過氧化物、雙-(第三_了基過氧—卜丙基)_苯7二丁二 環己烷 二=、4, 4_二-第三-丁基過氧U基戊酸、[三: 土過氧笨甲酸、i,卜二-第三-丁基過氧—3,3,5一三甲基 苯甲醯過氧化物、雙一(2, 4 — 曱醯)-過5162-3542-PF.ptd Page 8 567213 V. Description of the invention (6) Brewsterite, Faujasite, Viseite, Offretite, Mordenite 'Specific examples of synthetic zeolites include zeolite A, zeolite L, zeolite T, zeolite K-G, zeolite ZK-5, zeolite X, zeolite Y, zeolite ZSM-5, zeolite D, zeolite S, zeolite R, zeolite P, Zeolite Z-21, zeolite S, etc. The effect of the composition of the present invention varies depending on the number of pores of the coke machine feed, and the more the pores are more excellent. Compared to silicates with smaller pores, zeolites with reasonably large pores (about 3-20 A) are more effective for the composition of the present invention. The pore size is more preferably 6 A or more. If the pores are too small, it will result in the above-mentioned irritating odor and fumes being difficult to be sucked into the pores. However, if an inorganic compound with smaller pores is used, in order to achieve the desired characteristics, the content ratio in the composition can be increased to a higher level than an inorganic compound with an appropriate pore size to supplement this deficiency. The content of the inorganic additive is 20 to the total weight of the composite, more precisely 30-50%. As long as it does not affect the cleaning effect, it can be increased to the above content. In the compound of the present invention, it has a hardener that causes rubber molecules to crosslink when heated to harden the rubber. Typical examples are 2,5_dimethyl_2 5 2T (upper-butylperoxy) _hexyne_3, di-third `` butylperoxy: Dagger, '5-methyl-2,5-bis- (third-butyl peroxy) (Oxygen) monohexyne, tertiary cumyl peroxide, bis- (tertiary alkoxyperoxy-propylpropyl) _benzene 7 dibutyldicyclohexanedi = 4, 4, 4-di-tertiary-butyl Peroxy U-valeric acid, [three: terephthalic acid, i, bis-tertiary-butylperoxy-3,3,5-trimethylbenzidine peroxide, bis (2, 4 — 曱 醯) -over
567213 ------ ------ 五、發明說明(7) ~^ ------ 氧化物、硫等。其中雙-(第三〜 4-二-第三-丁基過氧-正—丁基戊广過氧―1-丙基)-苯與4, 清潔合成物結別有效。硬化劑的^,於評⑽與⑽混合橡膠 説為1-4%。 、置為〇·5-5%’更正確地 根據具體用途’可以加蜜胺助 、 )作為清潔輔助劑。纖維素等物曾。劑或纖維素(cellul〇se ,從而提高清潔工藝的效率。♦、可抑>制清潔橡膠的流動 ,加入量應在合成物總重的卜2〇%。入每些清潔辅助成份時 有時為了以肉眼觀察污毕铷η τ 7木物疋否脫離模且 ,其典型的物質有氧化鈦等,可、二:使用色科 Α物。 1文用一種或兩種以上的混 在不影響本發明合成物特性的^ @ π _ w r玍的則提下,可添加其他化 合物或混合物。 &他化 本發明是有關利用上述合成物清潔模具特別是半導體 製造工藝用模具的方法的。其過程如下··首先向模具内加 入一定量的上述橡膠合成物,施加16〇 — 21〇 °c的溫度的 15-100 kgf/cm2的壓力,持續2-1〇分鐘,使合成物硬化成 模具内設計形狀並使模具内的污染物被吸收到硬化橡膠 樹脂内,然後同硬化橡膠一同被消除。這種清潔過程要以 同樣方法反復進行,直到污染物被完全清除。這種清潔過 輕進行2-5次比較合適。特別是通過多次反復處理後,可 完全消除起模杆(E j e c t P i η)而的污斑,並可完全解決過 去有關清潔橡膠等未得到解決的問題。另外本發明清潔方 法不需對二次污染的手工清除作業。為了提高其他作業效567213 ------ ------ V. Description of the invention (7) ~ ^ ------ Oxides and sulfur. Among them, bis- (third to 4-bis-third-butylperoxy-n-butylpentanylperoxy-1-propyl) -benzene and 4, cleaning compounds are effective. The ^ of the hardener is 1-4% in the case of the mixed rubber with ⑽ and ⑽. If it is set to 0.5-5% ', it can be added more accurately according to the specific use', and melamine can be used as a cleaning aid. Cellulose and others. Agent or cellulose (cellulose, thereby improving the efficiency of the cleaning process. ♦, can suppress > the flow of cleaning rubber, the amount of addition should be 20% of the total weight of the composition. When each cleaning auxiliary ingredients are included In order to observe the stained 铷 η τ 7 wood objects with or without the mold, the typical substances are titanium oxide, etc., two: Use the color Division A. 1 use of one or two or more kinds of mixing does not affect ^ @ Π _ wr 玍, which is characteristic of the composition of the present invention, can be added, and other compounds or mixtures can be added. &Amp; Others The present invention relates to a method for cleaning a mold, especially a mold for a semiconductor manufacturing process, using the above composition. The process is as follows: First, a certain amount of the rubber composition is added to the mold, and a pressure of 15-100 kgf / cm2 at a temperature of 16-20 ° C is applied for 2-10 minutes to harden the composition into a mold. The internal design shape allows the contaminants in the mold to be absorbed into the hardened rubber resin and then eliminated with the hardened rubber. This cleaning process is repeated in the same way until the contaminants are completely removed. This cleaning It is more appropriate to perform it lightly 2-5 times. Especially after repeated treatments, the stain on the ejector pin (E ject P i η) can be completely eliminated, and the unresolved problems such as cleaning rubber in the past can be completely solved. In addition, the cleaning method of the present invention does not require manual removal of secondary pollution. In order to improve the efficiency of other operations
5162-3542-PF.ptd 5672135162-3542-PF.ptd 567213
實施例 根據橡雪種類變化進行的測試) (實施例1 - 5 實施例1 在100克天然橡膠(NR)中加入70克乙醇胺A 、30克u—二—第三-丁基過氧-二異丙基苯 )400克SILCA、50克氧化鈦,經混合後放入測試用模 具(仏(^?28乂28)中,在170-175。(:溫度和6〇](以/(:1112壓力、 條件下使其硬化約4 〇 〇秒鐘,測試其硬化性、彈性、加工 時的投熱性、加熱引起的清潔化合物的飛散、橡謬本身氣 味、作業特性等。其結果如表1所示。 實施例2 - 5 以SBR (實施例2)替代NRBR,各做用高粘度EPDM (實 施非例3)、低粘度EPDM (實施例4)及EPDM同BR的混合橡膠 (實施例5 ),除此之外與實施例1的方法相同,測試的結果 顯不如下表1。Example Test Based on Variation of Oak and Snow Types) (Examples 1 to 5 Example 1 To 100 g of natural rubber (NR) was added 70 g of ethanolamine A and 30 g of u-di-third-butylperoxy-di Isopropylbenzene) 400 g of SILCA and 50 g of titanium oxide were mixed and placed in a test mold (仏 (^? 28 乂 28), 170-175. (: Temperature and 60)) (//: It was hardened for about 400 seconds under 1112 pressure and conditions, and tested for its hardenability, elasticity, heat input during processing, scattering of cleaning compounds caused by heating, odor of oak, and operating characteristics. The results are shown in Table 1. Example 2-5 SBR (Example 2) was used in place of NRBR, and high-viscosity EPDM (Example 3), low-viscosity EPDM (Example 4), and a mixed rubber of EPDM and BR (Example 5) were used. ), Except that the method is the same as that of Example 1, and the test results are not as shown in Table 1 below.
5162-3542-PF.ptd 第11頁 567213 五、發明說明(9)5162-3542-PF.ptd Page 11 567213 V. Description of Invention (9)
【表1: 實施例 硬化It 加工^# 清潔彳说物飛散 氣味 作業性 相對揉合爷價 1 D 高 嚴重 嚴重 無 E E 2 D 高 _般 一般 嚴重 C C 3 B 高 嚴重 嚴重 —般 C C 4 C 低 少 少 _般 A B 5 A 低 少 少 —般 A A (註)A、很好 B:好 C: 一般 D:不好 E:很不好 *上述比較值為對實施例丨—5的結果進行比較評價的數值, 並非包含以後實施例結果的綜合比較數值。 (實施6_13 :根據清潔化合物含量變化進行的測試) 實施例6 除了將ME A作除清潔化合物加入合成物總重的丨%外, ^以實施例5相同的條件調製法潔橡膠合成物後,測試其 清潔程度、在作工藝中產生刺激性氣味和煙霧的程度、起 f杆(Eject Pin)的二次污染程度、及清潔化合物的飛散 疋否業作業環境有害等情況,測試結果表列如下(表2 )。 貫施例7 -1 3 測试條件除將清潔化合物的含量各變為1 % (實施例 I)、3% (實施例8)、5% (實施例9)、7% (實施例1〇)、9% 施例^)、11% (實施例12)、2〇% (實施例13)外,其他 條件同實施例6相同,其結果表列如下。[Table 1: Examples of hardening It processing ^ # Clean narratives scattered odor workability relative mixing price 1 D high serious serious no EE 2 D high _ average severe CC 3 B high serious severe-general CC 4 C low Less _ Normal AB 5 A Low Less-Normal AA (Note) A, Very Good B: Good C: Fair D: Not Good E: Very Bad * The above comparison values are for comparative evaluation of the results of Example 丨 -5 The numerical values do not include the comprehensive comparative values of the results of the later examples. (Implementation 6_13: Test based on changes in cleaning compound content) Example 6 Except that ME A was added as a 丨% of the total weight of the cleaning compound, ^ After preparing the clean rubber composition under the same conditions as in Example 5, Test the cleanliness, the degree of irritating odor and smoke generated in the process, the degree of secondary pollution from the Eject Pin, and the scattering of cleaning compounds. The operating environment is harmful. The test results are listed below. (Table 2 ). Example 7-1 3 Test conditions Except changing the content of the cleaning compound to 1% (Example I), 3% (Example 8), 5% (Example 9), 7% (Example 1) ), 9% Example ^), 11% (Example 12), 20% (Example 13), other conditions are the same as in Example 6, and the results are listed below.
567213 五、發明說明(10) 【表2】567213 V. Description of the invention (10) [Table 2]
實施例 清潔力 刺激氣味的發i 煙霧的發生 權具^欠污染 飛敵對作業 環_彩響 相嫩错 6 無效 A A A A - 7 C A A A A C 8 B B B A B A 9 A C C B C A 10 A D C C D B 11 A D D D D C 12 A E E E E E 13 A E E E E E (註)A :很好B :好C : 一般D :不好E :很不好 *上述比較值為對實施例6-13的各結果進行比較評價的數 值,並非包含以前或以後實施例結果的綜合比較數值。 (實施例14-21:根據無機添加物含量和細孔大小進行的測 試) 實施例1 4 除加入30 0克細孔大小為4 A的沸石A (重量20%)外, 以與實施例5相同的條件調製合成物後,加入測試用模具 (MQFP 28x28)中在 1 70 - 1 75 °C 溫度和 60 Kgf/cm2 的壓力條 件下進行約400秒的硬化,測試產生刺激性氣味的程度、 煙霧發生程度和作業性等,測試結果表列如下(表3 )。 實施例15-21 除使用沸石A 30% (實施例15)、沸石A 40% (實施例 16)、沸石A 50% (實施例17)要沸石X (平均細孔大小7· 4 A 20% (實施例18)、沸石X 30% (實施例19)、沸石X 40°/〇Example Cleanliness Stimulation Smell i Smoke generation right ^ Unpolluted Flying hostile operation ring_Colorful ring phase tender error 6 Invalid AAAA-7 CAAAAC 8 BBBABA 9 ACCBCA 10 ADCCDB 11 ADDDDC 12 AEEEEE 13 AEEEEE (Note) A: Very good B: Good C: Fair D: Not good E: Very bad * The above comparison values are the values for comparative evaluation of the results of Examples 6-13, and are not comprehensive comparison values including the results of previous or later examples. (Examples 14-21: Tests based on the content of inorganic additives and pore size) Example 1 4 Except adding 300 g of zeolite A with a pore size of 4 A (20% by weight), it was the same as Example 5 After the composition was prepared under the same conditions, it was added to a test mold (MQFP 28x28) and hardened at a temperature of 1 70-1 75 ° C and a pressure of 60 Kgf / cm2 for about 400 seconds. The degree of irritating odor was measured, The degree of smoke generation and workability are listed below (Table 3). Examples 15-21 In addition to using zeolite A 30% (Example 15), zeolite A 40% (Example 16), zeolite A 50% (Example 17) zeolite X (average pore size 7.4 A 20% (Example 18), Zeolite X 30% (Example 19), Zeolite X 40 ° / 〇
5162-3542-PF.ptd 第13頁 567213 五、發明說明αι) (實施例20)及沸石X 50% (實施例21)外,以與實施例14相 同的條件進行測試,測試結果表列如下(表3 )。 【表3】5162-3542-PF.ptd Page 13 567213 V. Description of the invention α) (Example 20) and zeolite X 50% (Example 21), tested under the same conditions as in Example 14, the test results are listed below (table 3 ). 【table 3】
雜例 懦生 14 ⑤ ⑤ C 15 ④ ④ B 16 ③ ③ B 17 © ③ C 18 ③ ③ C 19 0 0 B 2D ① ① B 21 ① ① C (註)A :很好B :好C : 一般D :不好E :很不好 ①·很少②·少③:一般④:嚴重⑤:很嚴重 *上述比較值為對實施例1 4 - 2 1的各結果進行比較評價的數 直’並非包含以前實施例結果的綜合比較數值。 實施例2 2 除將硫、1,卜二-第三-丁基過氧一3, 3, 5-三甲基環己 烷、雙-(第三-丁基過氧—卜丙基)—苯、4,4—二—第三-丁基 過氧-正-丁基戊酸作為硬化劑使用外,以與實施例7相同土 的條件調製合成物後進行了比較。測試結果,由於硫的分 解引起了模具腐蝕,特別是在需要5一6個月有效期的;1半77 體製造用模具中使用時多少有些問題,而丨,卜二-第三一丁 基過氧-3, 3, 5-三曱基環己烷雖然初期硬化反應;決,^是Miscellaneous cases 14 ⑤ ⑤ C 15 ④ ④ B 16 ③ ③ B 17 © ③ C 18 ③ ③ C 19 0 0 B 2D ① ① B 21 ① ① C (Note) A: Very good B: Good C: Fair D : Not good E: Very bad ① · Rare ② · Less ③: Fair ④: Severe ⑤: Very serious * The above comparison values are straightforward for comparison and evaluation of the results of Examples 1 4-21 1 Comprehensive comparison of results from previous examples. Example 2 2 In addition to sulfur, 1,2-di-third-butylperoxy-3, 3,5-trimethylcyclohexane, bis- (third-butylperoxy-butylpropyl) -benzene, 4,4-Di-tert-butylperoxy-n-butylvaleric acid was used as a hardener, and the composition was prepared under the same conditions as in Example 7 and compared. Test results, due to the decomposition of sulfur caused mold corrosion, especially in the need for a period of 5 to 6 months; the use of molds in the production of half of the 77 body is somewhat problematic. Although the initial hardening reaction of oxygen-3, 3, 5-trisylcyclohexane;
5162-3542-PF.ptd 第14頁 567213 五、發明說明(12) 能全硬,,相反地,雙一(第三-丁基過氧+丙 二、曰ί 2 i 1 一_第二-丁基過氧""正'丁基戊酸在EPDM和⑽ m成中br起加快硬化的作用’所以使用最少的硬化5162-3542-PF.ptd Page 14 567213 V. Description of the invention (12) It can be completely hard, and conversely, bis (third-butylperoxy + propylene, ί 2 i 1 1_second- Butylperoxy " " n-Butylvaleric acid accelerates hardening in EPDM and ⑽m, so the least hardening is used
劑也能達到完全硬化。 & ^1C 比較例 我們使用現產品中的一種NCR (蜜胺樹脂:日本 =η γγ=ί)和n—cs__ (清潔橡膠樹脂: 業環境污染等綜合項目。…煙霧及由於飛散引起作 測試結果使用NCR時,在硬化/清潔 體對眼精有刺激作用,並且硬化樹脂片 的: =染,完全清潔模具所需時間很長 、一i欠 90-120分鐘),為了消除二次污 : :N-CS,00產生了刺激性 ^章1 :方 清潔能力肖,與本發明清潔後化了作業壤境’ 潔效果弱。 4橡膠合成物的測試結果相比清 【發明效果】 产地ίΓ月清潔橡膠合成物’可以通過無機添加物相當程 類清潔過程中所產生的刺激i 污染,從^ΐΓί:二=清所產生的二次 時間,另外還可以大::盖:幅度縮短清潔作業的 的污染利用橡膠清潔時在起模杆產生The agent can also achieve complete hardening. & ^ 1C Comparative Example We use one of the NCR (melamine resin: Japan = η γγ = ί) and n-cs__ (clean rubber resin: a comprehensive item of environmental pollution in the industry, etc.) in the current product .... Smoke and testing due to scattering Results When using NCR, the hardened / cleaned body has an irritating effect on the eye essence, and the hardened resin sheet: = dyeing, it takes a long time to completely clean the mold, less than 90-120 minutes), in order to eliminate secondary stains: : N-CS, 00 produces irritation ^ Chapter 1: Fang cleaning ability Xiao, and the present invention cleans the operating soil environment after cleaning. The cleaning effect is weak. 4 Test results of rubber compound compared to Qing [Invention effect] The origin of the clean rubber compound of origin ΓΓ can be contaminated by the irritant i generated during the cleaning process of inorganic additives, which can be converted from ^ ΐΓί: 二 = 清 的The secondary time can also be large :: Cover: Shorten the pollution of cleaning operation. It is generated in the ejector rod when cleaning with rubber.
5162-3542-PF, Ptd 第15頁 567213 五、發明說明 此外,由於可以增加合成物的清潔化合物的含量,所 南清潔效果。本發明清潔橡膠合成物不僅可以用於 半導體成型模纟’逅可以詩擠壓成型機 ^用^ 利用領域也得到了很大的擴展。 M4等’其 還有,本發明清潔工藝與蜜胺樹脂工藝相比,一回产 潔作業時間得到大幅度的縮短(蜜胺樹脂· 9 〇 —丨2 〇分鐘,胃 本發明:35-45分鐘),大大提高了作業效率,並且”不^需要 蜜胺工藝所要求的(Lead Frame),從而可以帶來經濟效 果。 、〆5162-3542-PF, Ptd Page 15 567213 V. Description of the invention In addition, because the content of the cleaning compound of the composition can be increased, the cleaning effect is improved. The clean rubber composition of the present invention can be used not only in semiconductor molding dies, but also in extrusion molding machines. The field of use has also been greatly expanded. M4 and so on. Also, compared with the melamine resin process, the cleaning process of the present invention has greatly shortened the time of one-time cleaning (melamine resin · 90—20 minutes, the present invention: 35-45 Minutes), which greatly improves the operating efficiency, and "does not require the Lead Frame required by the melamine process, which can bring economic effects."
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KR10-2000-0024247A KR100454389B1 (en) | 1998-01-26 | 2000-05-06 | Rubber composition for cleaning mold |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105773882A (en) * | 2016-04-19 | 2016-07-20 | 上海东恒化工有限公司 | Composition for die cleaning and die cleaning method |
CN112553009A (en) * | 2020-11-28 | 2021-03-26 | 无锡市科宇橡胶模具厂 | Cleaning agent for rubber mold and using method thereof |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105773882A (en) * | 2016-04-19 | 2016-07-20 | 上海东恒化工有限公司 | Composition for die cleaning and die cleaning method |
CN112553009A (en) * | 2020-11-28 | 2021-03-26 | 无锡市科宇橡胶模具厂 | Cleaning agent for rubber mold and using method thereof |
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