TW565864B - Apparatus for manufacturing laminated member - Google Patents

Abstract

A manufacturing speed for a laminated member for every layer is increased to improve productivity and at the same time a small-sized manufacturing apparatus capable of being practically realized is provided. A base plate is mounted at a linear predetermined segment path in such a way that it can be reciprocated and moved up and down, each of one to a plurality of an insulating layer forming means for discharging ceramics slurry or insulating resin paste, conductive layer forming means for injecting conductive paste by an ink jet system and drying means for drying said slurry, paste are arranged side by side on the segment path, the thin film layer having a predetermined electrode pattern arranged thereon is formed on the ceramics insulating layer wile the base plate reciprocates by once to several times over the segment path, and these operations are repeated.

Description

5 items 64 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 31. Description of the Invention (Technical Field) The present invention relates to a device for manufacturing a laminated body, and in particular, relates to a capacitor, an inductor, Manufacturing equipment for laminated electronic components such as resistors, magnetic bodies, and filters. 2. Description of the Related Art Until now, it has been known that a typical method for manufacturing a ceramic laminated body as a typical laminated body is to apply a ceramic coating to a long carrier film made of a polyethylene terephthalate film or the like by a doctor blade method. Then, the conductor is printed on it by screen printing, and the ceramic thin film layer is formed after drying. Thereafter, the thin film layer is peeled from the carrier film, and at the same time, the position of the internal conductor pattern of K is cut into a predetermined shape. A method of sequentially stacking thin film layers (refer to Japanese Patent Publication No. 10-159 2 9 published in Heisei 10). However, according to this conventional method, since the thin film layers formed on the carrier film are peeled off one by one and then they are laminated, the peeler mechanism and the laminating mechanism are needed, which not only enlarges the device, In addition, productivity is deteriorated, and at the same time, there is a problem of accuracy in order to superimpose the positions of the films once they have been peeled off and layer them. Furthermore, as another manufacturing method, we have known a method of directly laminating a thin film layer by repeating the steps of forming an insulating layer and a predetermined conductor pattern on a gold substrate (refer to Japanese Patent No. 9-232174 published in Heisei 9). Bulletin). According to this patent publication, the substrate can be moved in the X and Y directions by using a mechanism such as a servo motor and a ball screw. However, as an example, a metal endless belt may be used instead of the substrate. , Along -4- This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 mm) -----— — — — — — II (Please read the precautions on the back before this page) · _ Line · 565864 Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 __B7_ V. Description of the invention () The direction of travel of the above-mentioned annulus, K specifies the required number of adhesive liquid ejection heads and the required number of fishing conductor ejection heads As the endless belt advances in one direction, a laminate is gradually produced. However, even in the case where a metal endless belt is used instead of the upper substrate, there are also the need to increase the number of placement of the adhesive liquid ejection head and the conductor / jet head, and drying of the insulating layer and the conductor layer in order to improve productivity. Devices, false crimping devices, and true crimping devices. Furthermore, if the recycling zone of the formed concrete layer is considered, it is the same as the prior art. It requires a large floor area to increase the size of the device and increase equipment costs. And so on. In addition, since the ceramic adhesive liquid and the functional material conductive material are repeatedly sprayed from the adhesive liquid ejection head and the conductive material ejection head to form a layered body over the substrate moving in the X and Y directions, it is difficult to ensure the flatness of each layer. . That is, in the above-mentioned prior art, since the surface of the thin film layer formed by spraying the ceramic adhesive liquid or the functional material conductor # will form minute irregularities, there is a problem that the flatness of the upper layer becomes worse. The internal accuracy of the laminate becomes a question. In addition, since a flat ceramic layer is formed by spraying a ceramic bonding solution, there is a problem that this spraying operation requires a lot of time. In addition, if a layer composed of internal circuit elements is formed on the upper ceramic layer and a thin film layer is formed, a recessed portion is generated between the electrode layers in the layer composed of the internal circuit elements, thereby damaging the thin film layer. When the thin film layer is laminated, the flatness of the thin film layer is likely to cause a void to occur in the sintered electronic component due to the voids generated in the recessed portions. The present invention was developed in view of the above-mentioned existing technical problems. The purpose of the present invention is -5- this paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page )

565864 Employee Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs, printed A7 B7 5. The description of the invention () is to increase productivity by increasing the manufacturing speed of each layer of the laminated body (including the laminated substrate), and to provide practical and miniaturized inexpensively Manufacturing device. Another object of the present invention is to provide a laminated body manufacturing apparatus which does not hinder practical use even if the working surface is rotated for miniaturization. It is another object of the present invention to provide a laminated body manufacturing apparatus capable of producing a high-quality laminated body with high internal accuracy at a high manufacturing speed by forming a thin film layer having a conductor pattern with high flatness and high accuracy. Such a laminated body manufacturing apparatus of the present invention includes a base plate provided on a linear predetermined section path to reciprocate and move up and down, and on the section path, one or more ejected ceramic bonding solutions or Insulating layer forming device of insulating resin, conductive layer forming device for spraying conductive layer by ink jet method, and drying device for drying upper adhesive liquid and conductive layer, the substrate is reciprocated one or more times on the above path. During the movement, a thin film layer provided with a predetermined conductor pattern is formed on the insulating layer, and these processes are repeated to form a laminated body. That is, the upper stack manufacturing device is characterized by having one or a minimum number of insulating layer forming devices, a conductive layer forming device, and a drying device in parallel, which enables the substrate to reciprocate on a linear section path in which they are arranged. , And it is possible to efficiently perform a predetermined operation in each of the programs during the forward movement and the reverse movement. The above-mentioned insulating layer forming device, the conductor calendar forming device and the drying device are coordinated. The operation procedures such as a procedure for forming an insulating layer from a ceramic adhesive or an insulating resin paste, and a procedure for forming a conductor layer from a conductor are appropriately set. The drying process performed by the drying device is very frequent, so -6- this paper size applies the Chinese National Standard (CNS) A4 specification (210 '297 mm) ----- l! T -------- -(Please read the precautions on the back before filling out this page) 565864 Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention () At least 1 涸 of these 1 or more drying devices are arranged in the above range Approximately the center of the path, M effectively improves work efficiency. This drying device can be any one of heating or warm air method, light irradiation method, laser irradiation method, or hot-plate crimping method using a pseudo crimping device described later. Semi-hardened state without sticking to hands. The above-mentioned insulating layer forming apparatus may employ a conventionally known doctor blade method, inkjet method, or roller coating method. However, in order to improve the accuracy corresponding to the densification of the insulating layer, it is preferable to use at least one of the inkjet methods. However, for the part where the insulating layer is formed on one layer of the thin film layer, the upper blade method and the roller coating method can also be adopted, that is, the inkjet method and other methods can be arbitrarily combined. For example, if a conductor layer (electrode layer) is formed on the above-mentioned insulating layer and M forms a thin film layer, a recessed portion will be generated between these electrode layers, which will damage the flatness of the thin film layer. When these thin film layers are laminated, At this time, voids are generated in the recessed part of the upper cymbal, which is the cause of voids in the sintered electronic component. In order to ensure the flatness of the upper insulating layer, it is necessary to fill the recessed portion with an insulating layer. For this reason, the above-mentioned insulating layer forming device should include a recessed portion that can be formed between the electrode layers formed by the conductor layer forming device or removed. A predetermined area outside the area of the conductor layer is filled with a ceramic adhesive liquid or an insulating resin paste. At this time, the inking method is used in the insulating layer forming device. In addition, when the laminated body is used for an inductor, it is necessary to form a via electrode for connecting a conductor layer (electrode layer) of the upper and lower film layers. -7-This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) I-— — — — 111 ^ · ΙΙ — — — — — — (Please read the notes on the back before filling this page 565864 ΚΙ B7 V. Description of the invention (Because the above-mentioned conductor layer forming device is an inkjet method, the device can also be used to form a through-hole electrode. That is, it is best to use the above-mentioned conductor layer forming device to apply the inkjet method to the above-mentioned conductor. Conductor 賫 is sprayed on the pattern to form a through-hole electrode. In addition, as usual, a through-hole may be formed on the insulating layer by a thin-film layer inkjet method, and the through-hole electrode may be filled into the through-hole to form the through-hole electrode. A laser drilling method using a punching device. At this time, an additional laser punching device is provided on the path of the upper loop, and the through-holes made by the laser punching device are filled with the above-mentioned inkjet-type conductor layer forming device. The conductor 賫 forms a through-hole electrode. In order to uniformize the fine unevenness generated on the ceramic adhesive liquid, insulating resin paste, and conductor 逑 of the upper film layer, and to ensure flatness, The layer is uniformized to improve the lamination accuracy. It is best to press the top of the layer at the appropriate time when a thin film layer is formed each time. To this end, an additional hot plate is set on the above path of the upper substrate movement. A dummy crimping device composed of a roller and the like. Furthermore, as described above, if a hot plate is used for the dummy crimping device, the drying device and the dummy crimping device can be used at the same time. In addition, the operation timing of the dummy crimping device is also However, each time a layer is formed, please read the precautions of Sj first. Page IIIIIIII Ordering the ceramics on the outside of the printing plate printed on the plate by the consumer cooperative of the Intellectual Property Bureau of the Ministry of Mining and Economics. Cheng Qianyin, a kind of person from Fu Hezhong who touched the task of security and protection, is indeed an intermediate energy structure, which is concave. When the body is moving, it has a layered chamber and a film. In the middle of the complex, the thin back layer is formed. The good layer is extremely false. When the electricity is to be installed or when the shape is required, the fixed moving tree is pressed once and the edge is not false or the aforementioned absolute K. History goes up or the film is as thin as liquid Paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) 565864 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention () Ceramic adhesive, dried resin, The conductor is pressed, and the roller having extremely small adhesiveness on the surface is brought into contact with the adhesive dust-removing roller. Therefore, a ceramic adhesive liquid, an insulating resin paste, and a conductor coated by an inkjet method or the like are used. After being dried by the drying device to a level where it is not sticky, the fine unevenness is evenly and evenly formed by contacting the pressing roller, and the particles detached from the convex part are attached to the pressing roller and removed, and adhere to the pressing roller. The particles Η on the dust collector are removed. In addition, the base plate may be set on a work table such that the base plate reciprocates and moves up and down in a predetermined interval. A plurality of support members are provided above the upper work table, and one or more ceramics are detachably bonded. Insulating layer forming units of liquid or insulating resin, isolayer forming units of spray conductors, and dryer units are mounted on these supporting members, and the substrate is on the insulating layer during one or more reciprocating movements in the above-mentioned section. A thin-film layer having a predetermined conductor pattern is formed, and these processes are repeated to form a laminate. The above-mentioned insulating layer forming unit and conductor layer forming unit adopt a generally known doctor blade method, inkjet method, or roller coating method. However, in order to improve the accuracy corresponding to the densification of the conductor layer and the insulating layer, the conductor calendar forming unit is preferred. The inkjet method is adopted, and at least one of the insulating layer forming units is an inkjet method. However, on the portion where the insulating layer is formed on one layer of the thin film layer, the above-mentioned doctor blade method and roller coating method are adopted, that is, the inkjet method and other methods are arbitrarily combined. When the above-mentioned conductor layer forming unit adopts the inkjet method, it can also be used. -9- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) -------- Order --- ------ Wire (Please read the precautions on the back before filling this page) 565864 Α7 Β7 V. Description of the invention () Units form through-hole electrodes that connect the conductor layers of the upper and lower film layers. That is, it is possible to manufacture a laminated body for an inductor having a through-hole electrode. In addition, the upper through-hole electrode can be punched through the insulating layer of the thin film layer as usual, and the through-hole can be filled with a conductive microphone. In this case, a laser drilling method is preferably used as a drilling device. Specifically, it further has a configuration in which a laser drilling device for detachably mounting a through-hole in the insulating layer is mounted. In addition, in order to uniformly ensure the unevenness of the micro-ffl unevenness generated on the ceramic adhesive liquid of the thin film layer and the insulating resin paste, the uniformity of the lamination is improved to improve the lamination accuracy. When appropriate, such as a thin film layer, press the top of the layer. For this purpose, it is further provided with a structure for detachably mounting a dummy crimping device for pressing the above-mentioned film layer at an appropriate time. This dummy crimping unit is provided with a hot plate, a roller, and the like. In the case of using the dummy crimping unit with this hot plate, the above-mentioned dryer unit functions as well, so the dryer unit can be omitted. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. In addition, the working timing of the dummy coupling unit can also be that each time a single film layer is formed or each time a multiple film layer is formed, the substrate that is further reciprocated moves forward each time. Either one of the hour or the mobile time. Further, in order to check the insulation layer formed by the above-mentioned insulation layer forming unit and the conductor layer forming unit, and the accuracy of the completion of the conductor layer, a CCD camera unit needs to be provided. In other words, a CCD camera unit is detachably mounted to detect the state of the upper film layer and perform imaging. Using this camera unit, the table of the formed film calendar at an appropriate time-10- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 565864 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the Invention (1) The camera is imaged, and the image processing is performed to detect whether there is a defective state such as a pinhole of the insulating layer or a disconnection of the conductor layer caused by the blockage of the nozzle hole of the inkjet nozzle. In addition, a rotary drum may be provided by rotating a polygonal rotary drum that cuts a flat working surface that is continuous with Burma on the outer periphery. A rotary drum may be installed on the outer periphery of the rotary drum. A film supply mechanism for laying a film on the concrete surface. When the rotary drum is stopped, the working surface facing the working surface is provided with one or more insulating layers that discharge ceramic bonding liquid or insulating resin. A device for forming a conductor layer by spraying a conductor material with an inkjet method and a drying device for drying the upper adhesive liquid and the conductor. During each rotation of the rotary drum, the carrier film on the surface is insulated. At least one thin film layer in which a predetermined conductor pattern is arranged is formed on the layer, and a laminated body is formed by repeating such a rotation operation. That is, it is characterized in that a work table is formed on the work surface on the outer periphery of each rotating drum that rotates intermittently, and a laminated body is formed by forming or drying a solid insulating layer and / or a conductor layer on each work table. In addition, the carrier film laid on each work surface reliably maintains the laminated state of the thin film layer. On the upper drum, in order to closely contact the upper carrier film with each of its working surfaces, it is preferable to provide suction holes for vacuum suction from the inside of the working surface of the rotating drum. The carrier film is adsorbed and held on the work surface. In addition, in order to increase the manufacturing speed of the thin film layer, in other words, to reduce the time required for the rotary drum to rotate once, after forming the insulating layer or the conductor layer, -1 1- This paper size applies the Chinese National Standard (CNS) A4 specification ( 210 X 297 mm) — — — — — I — — — — — — — — 111 — — ill — — — — — — (Please read the notes on the back before filling this page) 565864 A7 B7 V. Invention Explanation () It is best to immediately dry the upper surfaces of these layers, and directly arrange the above-mentioned drying devices on the working tables behind the above-mentioned insulation layer forming device or conductor layer forming device, respectively. The drying device may be any one of heating, warm air, light irradiation, laser irradiation, or a hot-plate compression method that also uses a dummy crimping device or a crimping device (true crimping) described later. A semi-hardened state in which the upper insulating layer and the conductive layer are not adhered. The upper insulation layer forming device adopts a conventionally known doctor blade method, inkjet method, or roller coating method. However, it is preferable that at least 1 of them adopt an inkjet method on a work table that improves the accuracy corresponding to the densification of the insulation layer. . However, for the part where the insulation calendar is formed on one layer of the thin film layer, the above-mentioned doctor blade method and roller coating method can also be adopted, that is, the ink jet method and other methods can be arbitrarily combined. When the insulating layer forming device and the conductive layer forming device are inkjet systems, it is important to control the position of the inkjet nozzle. When the conductor layer forming device starts working on each work surface, the device attaches a reference mark on the carrier film, and is disposed opposite to a work table on which the conductor layer forming device and an ink-jet-type insulating layer forming device are arranged. c CD camera,

The Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs printed a description, and when it was thin, it was fixed on top of it. Take over. Distinct chemical treatments are processed into layers to form a uniform shape of the edge and the shape of the homogeneous map. The method must be placed on the ground and recorded on the ink. Record it as a time scale. The surface should be 2-level. Margin assembly Sense-1 The upper layer of the upper layer used for the above-mentioned platform and the margin for the insulting and insolation of the stacking machine installation surface is enough to be able to take shape after the image is taken. In addition, this layer is in good condition. The paper size of the guide is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). 565864 Α7 Β7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs () The through-hole electrode of the conductive layer (electrode layer) of the film layer. Since the above-mentioned conductive layer forming device is an inkjet method, it is also possible to form a through-hole electrode using this conductive layer forming device. That is, it is preferable that the above-mentioned conductor layer forming device sprays a conductor paste on the upper conductor pattern by an inkjet method to form a through-hole electrode. At this time, it is also possible to arrange the conductor layer forming device and the insulating layer forming device on the same workbench. The insulating layer forming device is used to fill the electrode layer formed by the conductor layer forming device with a ceramic adhesive solution or an insulating resin paste. Insulation. In addition, in order to uniformize the fine unevenness generated in the ceramic adhesive liquid, insulating resin paste, and conductors of the thin film layer to ensure flatness, uniformize the lamination, and improve the lamination accuracy, it is best to press the thin film layer. Above. For this purpose, an additional dummy crimping device is arranged on one of the working tables of the rotary drum to laminate the film layer at an appropriate time. In addition, the operation timing of the dummy crimping device may be any one of when a single thin film layer is formed, or when a multiple thin film layer is formed each time. Furthermore, after forming an insulating layer on each work surface by rotating the rotary drum by a predetermined number, it is necessary to recover the laminated body from the rotary drum. For this purpose, a cutting device capable of cutting the carrier film on each working surface and cutting the laminated body is provided on the above-mentioned working table of the upper drum, and a recyclable device is provided on the next working table. The laminated body recovery mechanism of the divided laminated body. Furthermore, in a good arrangement of the cutting device and the laminated body recovery mechanism, the cutting device is the next working table on which the above-mentioned dummy crimping device is arranged, and the laminated body recovery mechanism is a work of the upper rotary drum. Stop at the bottom of the work surface. -13- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm)

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 _B7__ 5. Description of the invention () In addition, it can also be formed above the work table, and can be installed in and out of the insulating layer to discharge ceramic adhesive liquid or insulating resin materials. A device for spraying the conductor layer of the conductor 赍 by an inkjet method and a drying device for drying the adhesive solution and the conductor material. By passing the insulating layer forming device, the drying device and the conductor layer forming device in and out of the workbench, A film layer provided with a predetermined conductor pattern is formed on the insulating layer on the stage, and this insulating layer forming device, a drying device, and a conductor layer forming device are repeatedly used to form a laminated body composed of the predetermined film layer. That is, it is characterized in that the working table is a fixed type, and an insulating layer forming device which enters and exits above the working table, a conductive layer forming device and a drying device form an insulating layer on the working table, and a conductive layer is formed on this insulating layer. The insulating layer and the conductor layer are dried, and these processes are repeated, and the laminate is laminated on a stationary work table. The drying device K may be any one of a heating or warm air method, a light irradiation method, a laser irradiation method, or a hot-plate crimping method, so that the insulating layer and the conductor layer are in a semi-hardened state without being touched by hands. In addition, the insulating layer forming device and the conductive layer forming device are generally marketed by a doctor blade method, an inkjet method, or a roller coating method. However, in order to improve the accuracy corresponding to the densification of the conductive layer and the insulating layer, it is best to use a spraying method. Ink way. Furthermore, when a conductor layer is formed on the insulating layer to form a thin film layer, a recessed portion is generated between these electrode layers, and the flatness of the thin film layer is impaired. When these thin film layers are laminated, the recessed portion is caused by the aforementioned recessed portion. The generation of voids causes the occurrence of voids in the sintered electronic component. In order to confirm -14- this paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ill —-— I! I! Til! ---. (Please read the precautions on the back before filling in this Page) Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 B7 V. Description of the invention () To ensure the flatness of the above-mentioned insulating layer, it is necessary to fill the concave recessed portion with the insulating layer. The inkjet method is used to fill a ceramic bonding solution or an insulating resin paste between electrode layers formed by a conductor layer forming device. In addition, it is also possible to spray a ceramic adhesive liquid or an insulating resin material by an inkjet method to form an insulating layer having a through hole, and spray the conductor paste in the through hole from a conductor layer forming device constituted by the inkjet method. To form a conductor pattern and a via electrode formed in this via. In doing so, no additional punching device is required, which is extremely beneficial for reducing equipment costs and equipment footprint. Of course, for the part where the insulating layer is completely formed on one layer of the thin film layer, the above-mentioned doctor blade method, inkjet method or roller coating method can also be arbitrarily used. At this time, a laser drilling device is used to punch through holes in the insulating layer. A via hole electrode is formed by spraying a conductor layer formed in the via hole on a conductor layer forming device constituted by an inkjet method. Moreover, it is advantageous to reduce the installation space by integrating the insulating layer forming device, the dry-refining device, the conductor layer forming device, and the laser drilling device around the upper work table. At this time, it is assumed that the insulation layer forming device, the drying device, the conductor layer forming device, and the laser drilling device can be individually accessed from above the work table in a case where all four sides of the work platform are opened. Structure, when a laser drilling device is not needed, it has an insulation layer forming device, a drying device and a conductor layer forming device that can be separately accessed from above the workbench from three aspects, assuming that only two In this aspect, K can be dispersed in two aspects and set up side by side or side by side. -15- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back first) (Fill in this page again) Order --------- Line 565864 Printed by the Consumers' Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention () Insulation layer forming device, drying device, conductor layer forming device and laser Hole punching device, these devices can independently enter and exit above the workbench. That is, an arrangement plan of each device is set according to the layout of the open portion on the workbench. In addition, when a dummy crimping device for pressing one or more thin film layers is provided each time, the fine unevenness generated on the thin and thin film layers is uniform, and the adhesion of each thin film layer is improved. Is very effective. The fine unevenness generated on the film layer by false crimping can obtain a good flatness and levelness of the insulating layer and conductor calendar K and each film layer, so that the shape of the laminated body can be prevented from collapsing during true crimping in advance. Wait. In addition, the dummy crimping timing at which the dummy crimping device operates may be any one of forming a thin film layer each time, or forming a plurality of thin film layers each time. In addition, when the dummy crimping device is provided in such a manner that a space for laminating the above-mentioned film layer is secured between the dummy work table and the dummy work table, it can be said that it is advantageous for miniaturization of the device. In addition, a good specific structure of the crimping device is a structure capable of applying a predetermined light pressure on a pressure plate that can be controlled to move up and down, and a structure that applies a predetermined light pressure to a pressing roller that reciprocates in the left and right directions. . In addition, as a device for performing true crimping after the false crimping, a crimping device is provided above the work table, and an insulating layer forming device for discharging a ceramic adhesive liquid or an insulating resin material is used to spray the conductor paste by an inkjet method. The conductor layer forming device and the drying device for drying the upper adhesive liquid and the conductor paste can be installed between each workbench and the crimping device. When the insulation layer forming device, the drying device and the conductor layer forming device are retracted, at least the space for lamination above the work table is not at least -16- This paper size applies to the Chinese National Standard (CNS) A4 specification ( 210 X 297 mm) ------------- 1 ------ Order --------- line (Please read the precautions on the back before filling this page) Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 _____ B7 V. Description of the invention () «Interconnecting interrupting device and at least a vacuum device used to form a vacuum atmosphere in the laminated space. Each time the above-mentioned insulating layer forming device, drying device and conductor layer forming device are repeatedly entered and exited, a crimping device is used to perform false crimping when a desired number of thin film layers are formed, and false crimping is laminated at a predetermined number of film layers. The breaking device closes the above-mentioned space for the lamination, and while the vacuum device is operating, it is very effective to perform true compression bonding to the laminated body. The crimping device may have a structure that is used in both false crimping and true crimping, or may be separately provided with a crimping device in crimping and a crimping device in true crimping. In the case of separate installation, for example, the dummy crimping device adopts a pressing roller type which can reciprocate in and out of the space of the stack, and the true crimping device uses a pressure plate type. In the case of dual use, one example is a pressure plate press type. The purpose of true crimping is to fix the layers by removing air remaining between the electrode layers of the insulating layer as described above. For this reason, as described above, each time when one to a plurality of thin film layers are formed, a dummy crimping is performed with a crimping device to form a laminate having a predetermined number of film durations, and then the stack above the work table is blocked by a blocking device. With the space, while the vacuum device such as a fan is operating, the laminated body is really pressure-bonded with a predetermined pressure. The blocking device may be a sliding window, a shutter, or the like. The pressure-bonding device is not limited to the pressure plate, and K may be a pressing roller that reciprocates as described above. In order to add different pressure to the false crimping and true crimping, when the roller is pressed, the transmission device that supports the pressing roller can be controlled to move up and down. It is best to use a transmission device that can change the applied pressure. 0 -17- This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) -------- ^ --------- line (Please read the precautions on the back before filling this page ) 565864 Α7 Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention () In addition, the laminated body for manufacturing purposes is formed by alternately laminating insulating calendars and conductor layers to a predetermined number of thin film layers. The worktable or the insulating layer forming device, the conductor layer forming device, and the drying device as described in detail above can be controlled to move up and down, and are relatively arranged. When it is opposed to the work table, it is lowered to a predetermined amount each time the ceramic adhesive liquid or insulating resin material is ejected (sprayed) and each time the conductor is sprayed. It is opposite to the insulation calendar forming device, conductor layer forming device, and drying device. In the case of the same method, control is performed such that the ceramic adhesive liquid or the insulating resin is ejected (sprayed) every time and each time the conductor paste is ejected, and raised to a predetermined amount. In addition, it is an insulating layer laminating device provided with overlapping edge sheets, a conductive layer forming device for spraying conductors on the insulating sheet, and an insulating layer forming device for spraying ceramic adhesive liquid or insulating resin materials on the same insulating sheet. By repeatedly using the above-mentioned devices, a laminated body manufacturing device may be used to form a laminated body having a thin film layer provided with a predetermined conductor pattern between each of the insulating sheets of the multilayer insulating sheet. That is, its special feature is to form one or a minimum number of insulating layers in parallel. The device and the conductor layer forming device make the base plate reciprocate on a linear section path provided with these devices, and move forward. A predetermined operation can be efficiently performed in each step during the movement and the return movement. The above-mentioned insulating layer forming apparatus employs a conventionally known doctor blade method, inkjet method, or roller coating method, but in order to improve the accuracy corresponding to the densification of the edge layer, the inkjet method is preferably used. In addition, the base plate can also be set to reciprocate and move up and down on a linear predetermined section path, and on this section path, -1 8-(Please read the precautions on the back before -11 Page) &gt; 5J · line · This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) Printed by the Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs 565864 Α_ _7 B7. During the one or more top conductor layer forming devices and the above-mentioned insulation layer forming device, during the one or more reciprocating movements of the top substrate on the path of the top section, the insulating sheet is supplied by the above-mentioned insulating sheet laminating device, and the top sheet is provided by the top sheet. The conductor layer forming device and the above-mentioned insulating layer forming device form a thin film layer provided with a predetermined conductor pattern on this insulating sheet, and repeat these processes to form a laminated body. In addition, the upper conductor layer forming device may be a conductor layer forming unit that sprays a conductor, and the above-mentioned insulating layer forming device is an insulating layer forming unit that discharges a ceramic adhesive liquid or an insulating resin paste, so that the substrate can be used in a predetermined interval. The base plate is set on the work table in K-movement and up-and-down movement, and a plurality of support members are arranged above the work table, and one or more upper insulation layer forming units and the above-mentioned conductor layer forming units are detachably detachable. Mounted on these support parts. In addition, a rotary drum may be provided such that a polygonal rotary drum that is divided into flat areas on the outer peripheral surface is rotated in a discontinuous manner. When the rotary drum is stopped, the rotary drum may be operated against the operating surface. On the stage, one or more upper insulation sheet lamination devices, the above-mentioned insulation layer forming device, and the above-mentioned conductor layer forming device are respectively provided, and each time the upper drum is rotated, the above-mentioned insulation sheet is laminated. At least one thin-film layer provided with a predetermined conductor pattern is formed on the insulating sheet of the upper work surface supplied by the device, and a laminated body is formed by repeating this rotation operation. In addition, if a suction hole for vacuum suction is provided from the inside of the work surface of the rotary drum, and the insulating sheet is held on the work surface through the suction hole, the tension state of the carrier film M can be made close to each work surface. then. -19- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) ------- It --------- (Please read the notes on the back before filling in this Page) 565864 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention () Further, it is also possible to have the above-mentioned insulating sheet lamination device, the upper insulation layer forming device and the above-mentioned conductor layer forming device These devices are installed above and below the base plate, respectively, so that these insulating sheet lamination devices, insulation layer forming devices and conductor layer forming devices come in and out above the base plate, and a thin film layer provided with a predetermined conductor pattern is formed on the insulation plate on the base plate. These devices are repeatedly put in and out to form a laminated body. Further, in any of the above inventions, if a pressing device for pressing the upper surface of the insulating sheet when the insulating sheets are overlapped is provided, since the upper surface of the insulating sheet is pressed by the pressing device, the upper surface of the insulating sheet is flattened. The accuracy of lamination of the next thin film layer is improved. At the same time, due to the improved adhesion between the insulating sheet and the thin film layer, the layers are homogeneously integrated to provide a high-quality laminated body. Furthermore, it is also possible to provide a pressing device on the base plate for pressing the insulating sheet when the insulating sheets are overlapped when appropriate. The insulating sheet stacking device, the upper conductor layer forming device, and the upper insulating layer forming device should be respectively placed on the substrate. These devices are installed above and below the substrate, and when these insulating sheet stacking devices, conductor layer forming devices, and insulating layer forming devices are retracted, at least blocking devices are provided to prevent the space for stacking above the substrate from communicating with the air. And at least a vacuum device used to form a vacuum atmosphere in the space for lamination, while the above-mentioned blocking device is used to close the space for lamination to operate the vacuum device, while pressing by the pressing device, the insulating sheet is repeatedly laminated Device, an insulating layer forming device, and a conductor layer forming device which are formed in and out of a laminated body. Examples of the insulating resin 賫 include epoxy resin and polyimide resin. -20- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling out this page) Order: -line · 565864 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Consumption Cooperative Preparation A7 B7 V. Explanation of the invention () In addition, as the glass composite material, a doping substance (for example, MgO, CaO, Al203, K20, etc.) is used as a glass composite material. ZnO, etc.) is a mixture of glass powder and ceramics such as alumina, mullite, cordierite, and quartz as raw materials. As the crystallized glass material, crystallized glass such as cordierite gadolinium, cx hectorite, etc. raw material. In addition, for the conductor 赍 used for the conductor pattern, for example, a rhenium-based conductor material, tungsten W, molybdenum Mo, manganese Mn, or the like is used, and for a conductor fluorescent used for a via electrode, a silver-based material having a small conductor resistance is used. The conductor material is, for example, silver, silver-palladium, silver platinum, silver-palladium-platinum, and the like. In addition, as the conductor W of the resistance pattern, carbon, carbon-silver, or the like is used. In addition, the materials of the above-mentioned ceramic adhesive solution, insulating resin, and conductor paste may contain a photo-hardening material which promotes drying by light. <Specific Embodiment> Hereinafter, embodiments of the present invention will be described with reference to the drawings. The following describes an embodiment of the present invention. In this embodiment, the case of a multilayer capacitor and a multilayer inductor as multilayer electronic components will be described. In the manufacturing apparatus of an inductor, the manufacturing process repeats the following steps. A ceramic adhesive is applied from an insulating layer forming apparatus, and an electrode pattern is formed on the insulating layer using a conductor forming apparatus to form a thin film layer. The i-th invention will be described with reference to the laminated body manufacturing apparatus shown in FIGS. 1 to 17. Figure 1 shows the outline of the manufacturing equipment, and the equipment is arranged in the figure -2 1-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ---------- ---------- Order --------- line (please read the precautions on the back before filling this page) 565864 A7 B7_ V. Description of the invention () Inside the case shown The movable table 2 is mounted on a linear horizontally arranged guide rail 1 in a reciprocating manner, and an upper portion of the movable table 2 is formed by a stainless steel base plate 3 that can be moved up and down. The base plate 3 is formed by the above-mentioned guide rail 1 and reciprocates. The moving section path la. The section path la is a straight path having a width approximately the same as the width and width of the base plate 3, and a blade, an inkjet nozzle, and the like as the insulating layer forming device C are provided on the upper part thereof, and the inkjet as the conductive layer forming device E is provided. The nozzle, as a thermal irradiation device, a photothermal irradiation device, or the like of the drying device L, is further appropriately provided with an additional laser drilling device P and a dummy crimping device. The length of this section path la is about 1.5 to 2 in. 〇 Driven by a drive source such as a servo motor, pulse motor, stepping motor, etc., and a screw shaft rotated by the drive path, the movable table 2 follows the above section path. The long direction (X direction) of la is reciprocated, so that the base plate 3 is moved along the path of laminar interval la, and the controller controls its moving direction and speed. In addition, the substrate 3 is moved up and down at the same time by using a drive source such as a servo motor, a pulse motor, a stepping motor, and the rotating screw glaze. The controller 3 controls the up and down movement according to the lamination process to make the substrate 3 Fall in order. A plurality of nozzles are arranged at small intervals in the direction K across the 逑 interval path la as inkjet nozzles for the above-mentioned insulating layer forming device C and conductor layer forming device E, and are also provided along the cross direction of the interval path la. Drying device L. Fig. 2 is a first embodiment of the first invention, showing a manufacturing apparatus for a laminated body A1 for a sensor, which has a light irradiation device L disposed as a drying device at approximately the center of the section path la, Configured in two one-by-one paper sizes that apply Chinese National Standard (CNS) A4 specifications (210 x 297 mm) (please read the precautions on the back first to write this page) I!

n 1 nn ^ OJf n ϋ ϋ nnnn I Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economy 565864 Α7 Β7 V. Description of the Invention The structure of the device E and the drill-injection device C that sprays the adhesive liquid from the inkjet nozzle. When the substrate 3 is moved from the table 4 on the left to the table 5 on the right, it is referred to as moving forward and moving in the opposite direction. When moving, it is called recovery movement, which indicates the working state of the light irradiation device L, the conductor nozzle E, and the adhesive liquid nozzle C, the parts that coat the lower end of them, or the working state when the substrate 3 arrives. In addition, this point It is the same up to the eighth embodiment below. In this first embodiment, the operation procedures of (a) to (e) in Fig. 2 are performed. In Fig. 2 (a), when the base plate 3 is performed from the stage 4 When moving forward for the first time, the left adhesive liquid nozzle C and the light irradiation device L work, and the adhesive liquid nozzle C sprays the ceramic adhesive liquid to form a base insulating layer 10 of a predetermined area on the substrate 3 (for details, see section Figure 10) and then illuminated by light The insulation layer 10 is dried by placing it in a non-sticky, semi-hardened state (for details, refer to Fig. 15). In Fig. 2 (b), when the above-mentioned return movement is performed, the right adhesive liquid The nozzle C, the conductor paste nozzle E, and the light irradiation device L work. From this adhesive liquid nozzle C, a ceramic adhesive liquid is sprayed on a region excluding the conductive pattern 12a on the base insulating layer 10 to form a spacer insulating layer 11 (detailed (For details, refer to Figure 11). Then, the base plate 3 passes under the conductive material nozzle E, and the conductive material nozzle E sprays the conductive material to form the electrode layer 12 on the upper electrode pattern 12a (for details, refer to Figure 12). After that, when the substrate 3 passes through the light irradiating device L, the above-mentioned spacer insulating layer 11 and electrode layer 12 formed on a predetermined pattern are dried. 23- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 male) %) Read the note of Sj first

II Page II Li III 565864 Α7 B7 V. Description of the invention () Then in Figure 2 (c) when the substrate 3 is moved forward again, the left-side adhesive liquid nozzle C, the conductor 赍 nozzle E, and the light irradiation device L work. . The adhesive liquid nozzle C is used to spit out the ceramic adhesive liquid on the area except the through-hole electrode portion 14a on the upper diaphragm insulation layer 11 and the electrode layer 12 to form the insulating layer 13 (for details, refer to FIG. 13). Then, the substrate 3 passes under the conductor paste nozzle E, and the conductor paste is sprayed from the conductor nozzle E to form a through-hole electrode layer 14 on the upper electrode pattern 14a (for details, refer to FIG. 14). Furthermore, the winding step is formed on the thin film layer of the base insulating layer 10 in FIG. 2 (a), and a one-step reciprocating step of the substrate 3 is formed on the thin film layer in FIG. 2 (b) (c). The electrode layer 12 of the hole electrode 14 and the thin film layer S1 composed of the spacer insulating layer 11 and the insulating layer 13. Thereafter, the operation of repeating the second drawing (d) and (e) in FIG. 2 (b) (c) and repeating the above operation is repeated to produce a beta calendar A 1 for an inductor in which a plurality of thin film layers S1 are laminated. . Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (please read the precautions on the back before «i write this page)« This laminate A1, where the thickness of the above-mentioned film layer S1 is about 20 ~ 200 / zffi and its stack The number of layers is about ten layers, for example, on the table 5 of the device, or moved to another place for true compression bonding, and then sintered to obtain a sensor. In addition, in the drawing, only a few conductor patterns are shown on the thin film layer S1 on the drawing, but in practice, multiple patterns are formed on the thin film layer S1 such that a plurality of inductors can be obtained from the laminated body A1. . This is the same in the actual travel example below. Figure 3 is the second embodiment of the first invention, showing that the paper size used for capacitors is in accordance with the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 565864 A7 B7 5. Description of the invention () Laminate A2 The manufacturing device has a light irradiating device L that is distributed as a drying device at a substantially central portion of the section path la. On this stage 4 side, only an adhesive liquid nozzle C for ejecting a ceramic adhesive liquid from an inkjet nozzle is arranged. The other side has a configuration in which a conductor love nozzle E that ejects a conductor mic from an inkjet nozzle and an adhesive liquid nozzle C that ejects a ceramic adhesive liquid from an inkjet nozzle. That is, in the case of a capacitor, since the above-mentioned through-hole electrode is not needed, the conductive material nozzle E on one side is omitted. This omitted conductor paste nozzle E can be removed but it can be configured as usual but not working. In this second embodiment, operations (a) to (d) in Fig. 3 are performed. In FIG. 3U), when the substrate 3 is initially moved forward from the stage 4, the adhesive liquid nozzle C on the left side and the light irradiation device L operate, and the ceramic adhesive liquid is sprayed on the substrate 3 by this adhesive liquid nozzle C. The insulating layer 20 having a predetermined area is then dried by the light irradiation device L. In Fig. 3 (b), when the upper base plate 3 is moved back, the adhesive liquid nozzle C, the conductor nozzle E, and the light irradiation device L on the right side start to work. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed the adhesive liquid nozzle C to spray the ceramic adhesive liquid on a predetermined area on the insulating layer 20 to form a spacer insulation calendar 21. Then, the substrate 3 passed under the conductor bud nozzle E. A conductive paste is sprayed from the conductive nozzle E, and an electrode layer 22 is formed on the uncoated region of the spacer insulating layer 21. Thereafter, when the substrate 3 passes through the light irradiation device L, the above-mentioned spacer insulating layer 21 and electrode layer 22 formed on a predetermined pattern are dried. Then, a thin film （S2 composed of the electrode layer 22 and the insulating layers 21, 20 is formed in Figs. After that, the rehearsal was repeated for the 3rd figure (c) of the 3rd figure (a) (b) above. -25- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 565864 A7 B7 Five economy Printed by the Consumer Cooperative of the Ministry of Intellectual Property Bureau and the description of the invention ((d), to produce a capacitor body A2 for a capacitor in which a plurality of film layers S2 are laminated. FIG. 4 is a third embodiment of the first invention. For example, it shows an apparatus for manufacturing an S-layer body A3 for an inductor, which has a light irradiating device L as a drying device spaced at approximately the center portion of the section path ia and its left and right sides. Adhesive liquid nozzle C is arranged between the light irradiation devices L and L on one side, and a conductor love nozzle E is arranged between the light irradiation devices L and L on the other side (the stage 5 side). In this third embodiment, the operations of (a) to (d) in FIG. 4 are performed. In FIG. 4 (a), when the base plate 3 is moved forward from the stage 4 for the first time, the adhesive liquid nozzle C, the conductor material nozzle E, and the center and right light irradiation devices L are operated. The ceramic adhesive liquid is sprayed from the adhesive liquid nozzle C to form a predetermined surface on the substrate 3. The base insulating layer 30 is dried when the base insulating layer 30 passes under the central light irradiating device L, and then the base insulating layer 30 passes through the conductor paste nozzle E to form a conductor material when it passes under the conductor paste nozzle E. The electrode layer 32 made of a predetermined conductor pattern is dried as the electrode 餍 32 passes under the right-side light irradiation device L. In FIG. 4 (b), when the upper base plate 3 is moved back, the adhesive liquid nozzle C It works with the left-side light irradiation device L. From this adhesive liquid nozzle C, the ceramic adhesive liquid is sprayed as between the electrode layers 32 buried on the upper base insulating layer 30 to form the spacer insulating layer 31. When -26- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the notes on the back _ write this page) Order: 565864 Printed by A7 B7, Consumer Cooperative of Intellectual Property Bureau, Ministry of Economic Affairs Explanation () The insulation calendar 31 of the separator is dried when passing through the left side light irradiation device L. Next, in FIG. 4 (c), when the substrate 3 is moved forward again, the adhesive liquid nozzle C and the conductor bud nozzle E, the center and right light irradiation device L . 'The adhesive liquid nozzle C sprays a ceramic adhesive liquid on a predetermined area on the above-mentioned spacer insulating layer 31 and electrode layer 32 to form an insulating layer 33. After the insulating layer 33 is dried by a light irradiation device L, When the substrate 3 passes under the conductor 赍 spraying device E, the conductor 喷嘴 nozzle E sprays the conductor 胥 on the uncoated area of the above-mentioned insulating layer 33 to form a through-hole electrode 34. This through-hole electrode 34 is irradiated by the right-side light device L Then, in FIG. 4 (d), when the substrate 3 is moved back again, the conductor paste nozzle E, the adhesive liquid nozzle C, and the center and left light irradiation devices L are operated. The conductor 赍 nozzle E sprays conductors on the insulating layer 33 and the through-hole electrode 34 to form an electrode layer 32 composed of a predetermined conductor pattern. The electrode layer 32 is dried by a light irradiation device L. When the substrate 3 is dried, When passing under the adhesive liquid nozzle C, the adhesive liquid nozzle C sprays the ceramic adhesive liquid on the uncoated area of the upper electrode layer 32 to form a spacer insulating layer 31. The left light irradiation device L is dried. After the upper picture 4 (a) to (d) M, the base plate 3 is repeatedly reciprocated to the fourth picture (c) (d), that is, a conductor layer 32 having a via electrode 34 and an insulating layer 31, 33 can be obtained. The laminated body A3 for an inductor, which is formed by laminating the thin film layer S3. According to this third embodiment, each layer is dried by a drying device each time an insulating layer or an electrode layer is formed, so that the insulating layer of the separator can be improved. -27- This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) -------- ^ -------- I (Please read the notes on the back before filling (This page) 565864 Printed by A7 B7, Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention () 31. Coating or printing accuracy of electrode layer 32, insulation layer 33 and via electrode 34. Fig. 5 is a fourth embodiment of the first invention, showing a manufacturing apparatus for a laminated body A4 of a capacitor, which has a light irradiation device L provided on the section path la as in the third embodiment described above, and The structure of the liquid junction nozzle C and the conductor paste nozzle E. In this fourth embodiment, the operations of FIGS. 5 (a) to (d) are performed. In Fig. 5 (a), when the substrate 3 is moved forward from the stage 4 for the first time, the adhesive liquid nozzle C, the conductor nozzle E, and the center and right light irradiation devices L are operated. The ceramic bonding liquid is sprayed from the bonding liquid nozzle C to form an insulating layer 40 of a predetermined area on the substrate 3, and the base insulating layer 40 is dried when it passes under the central light irradiation device L, and then the insulating layer 40 is discharged from the conductive material nozzle E When passing downward, the conductor paste is sprayed from the conductor nozzle E to form an electrode layer 42 composed of a predetermined electrode pattern. This electrode 餍 42 is dried when it passes under the right-side light irradiation device L. In Fig. 5 (b), when the above-mentioned substrate 3 is moved back, the adhesive nozzle C and the left-side light irradiation device L operate. From this adhesive liquid nozzle C, the ceramic adhesive liquid is sprayed as between the electrode layers 42 buried on the upper insulating layer 40 to form a spacer insulating layer 41. When the spacer insulating layer 41 is irradiated from the left side under the device L Dry when passing. Further, in FIG. 5 (a) (b) of the substrate 3 reciprocating, a thin film 餍 S4 composed of the conductor layer 42 and the insulating layers 40, 41 is formed. After that, the flail repeats the above figure 5 (a) (b), figure 5 (c)-2 8-This paper size applies the Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read first (Notes on the back then fill out this page)

-------- Order --------- Line I Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 B7 V. Description of the invention () (d) The operation to produce laminated A capacitor laminate A 4 having a plurality of thin film layers S 4. In this fourth embodiment, it is also possible to improve the coating or printing accuracy of the spacer insulating layer 41, the electrode layer 42, and the insulating layer 40. FIG. 6 is a fifth embodiment of the first invention, showing a manufacturing apparatus for a laminated body A5 for an inductor, which is provided with a light irradiation device L provided as a drying device at a substantially central portion of the section path la, The adhesive liquid nozzle C is arranged on the left side (stage 4 side), and the conductive nozzle K is arranged on the right side (stage 5 side). In this fifth embodiment, the operations of FIGS. 6 (a) to (e) are performed. In FIG. 6 (a), when the substrate 3 is moved forward from the stage 4, the adhesive liquid nozzle C, the light irradiation device L, and the conductor material nozzle E all work. The ceramic liquid is sprayed from the adhesive liquid nozzle C. The liquid forms a base insulating layer 50 of a predetermined area on the substrate 3, and the base insulating layer 50 is dried when it passes under the light irradiation device L. Then, when the base insulator 餍 50 passes under the conductor nozzle E, the conductor material nozzle E sprays the conductor material to form an electrode layer 52 composed of a predetermined electrode pattern. In FIG. 6 (b), when the substrate 3 is moved back The light irradiation device L and the adhesive liquid nozzle C work. The electrode layer 52 formed in FIG. 6 (a) is dried while passing under the light irradiation device L, and then is buried between the electrode layers 52 on the upper base insulating layer 50 through the adhesive solution nozzle C. Ground sprayed ceramic adhesive liquid to form the separator -29- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 1 II I --- — — — — — — — II (Please read first Note on the back, please fill out this page) 565864 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy Next, in Fig. 6 (c), when the substrate 3 is moved forward again, the light irradiation device L and the conductor paste nozzle E are operated. When the above-mentioned spacer insulating layer 51 formed in FIG. 6 (b) passes through the light irradiating device L and is dried, when passing through the conductive body nozzle E, the conductor paste nozzle E sprays the conductor in love. A through-hole electrode 54 is formed at a predetermined position on the upper electrode layer 52. Next, in FIG. 6 (d), when the substrate 3 is moved back again, the adhesive liquid nozzle C and the light irradiation device L operate. After the upper through-hole electrode 54 formed in FIG. 6 (C) is passed under the light irradiation device L and dried, the adhesive liquid nozzle C projects ceramics on the uncoated area of the through-hole electrode 54. The adhesive liquid forms an insulating layer 53. In FIG. 6U), when the base plate 3 is moved forward again, the light irradiation device L and the conductor yoke E are operated when this base plate is moved forward. The insulating layer 53 formed in FIG. 6 (d) is dried by the light irradiation device L, and then the conductive layer nozzle E is formed on the above-mentioned insulating layer 53 and the through-hole electrode 54 by a conductive nozzle E. The conductive layer is formed by a predetermined electrode pattern Of electrode calendar 52. After the above-mentioned Figures 6 (a) to (e), the base plate 3 is repeatedly passed through the second Figures 6 (b) to (e), and the electrode layer 52 and the insulating layer 51 with the through-hole electrode 54 overlapped can be obtained. According to the fifth embodiment, the number of steps for forming the thin film layer S5 is increased. However, the adhesive liquid nozzle C, the conductor / nozzle E, and the light can be irradiated. The number of devices L is the smallest, so that the length of the interval path la can be shortened. -30- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) — — — — — — — — — — — illllll — — — (Please read the notes on the back before filling in this Page) 565864 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention () Figure 7 is a sixth embodiment of the first invention, showing a manufacturing device for a laminated body A6 of a capacitor. On the section path la, similarly to the fifth embodiment, the adhesive liquid nozzle C is arranged on the left side of the light irradiation device L, and the conductor nozzle E is arranged on the right side of the light irradiation device L. In this sixth embodiment, the operations (a) to (b &gt;) in Fig. 7 are performed. In Fig. 7 (a), when the base plate 3 is moved forward from the table 4 for the first time, the nozzle is stuck. C, the light irradiation device L and the conductor material nozzle E all work. First, a ceramic bonding liquid is sprayed from the bonding liquid nozzle C to form an insulating layer 60 of a predetermined area on the substrate 3. When the insulating layer 60 is removed from the light irradiating device L, When the insulation layer 60 passes through the conductor 賫 nozzle E, the conductor 賫 nozzle E sprays the conductor 賫 to form an electrode layer 62 composed of a predetermined electrode pattern. In Fig. 7 (b), the substrate 3 During the return movement, the light irradiating device L and the adhesive liquid nozzle C work. The upper electrode layer 6 formed in Fig. 7 (a) is lowered from the light irradiating device L. After passing through, the adhesive liquid is dried. Nozzle C, which is sprayed with ceramic adhesive liquid between the electrode layers 62 and 2 buried on the above-mentioned insulating layer 60 to form a spacer insulating layer 6 1 〇 In FIG. 7 (c), the substrate 3 does not reach the stage 5 The short range of the position on the way, in detail, the position of the base plate 3 from the stage 4 to the position passing the light irradiation device L During this period, the light irradiating device L and the adhesive liquid nozzle C work. During this short period moving forward, it is formed from Figure 7 (b) -31- This paper size applies Chinese national standards ( CNS) A4 specification (210 X 297 public love) ------------------- 丨 order --------- line (Please read the precautions on the back first (Fill in this page again) 565864 Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. The above-mentioned spacer insulation layer 61 of the description of the invention is dried when it passes under the light irradiation device L, and the base plate 3 is removed from the When the liquid mixture nozzle C passes underneath, the ceramic liquid is sprayed from the adhesive liquid nozzle C to form an insulating layer 60 on the upper electrode layer 62. Thereafter, in FIG. 7 (d), the substrate 3 is moved forward, When this is moved forward, the light irradiation device L and the conductor paste nozzle E work. When the insulation layer 60 formed in FIG. 7 (c) is dried by the light irradiation device L, the conductor 赍 nozzle E is sprayed on the insulation layer 60. The conductor paste forms an electrode layer 62 composed of a predetermined electrode pattern. After the above-mentioned FIGS. 7 (a) to (d), the above-mentioned steps are repeated. 7 (b) to (d), that is, a capacitor-removed laminated body A6 in which a thin film layer S6 composed of a conductor layer 62 and insulating layers 60 and 61 can be obtained. In this sixth embodiment, it is also possible to make The number of the liquid junction nozzle C, the conductor love nozzle E, and the light irradiation device L are minimized, so that the length of the section path la can be shortened. Fig. 8 is a seventh embodiment of the first invention, which is a laminated body for an inductor The manufacturing apparatus, specifically, when a through-hole for forming a through-hole electrode is manufactured by the laser drilling device P. That is, it has a section of the path la except for the adhesive liquid nozzle corresponding to the fifth embodiment. C. In addition to the light irradiation device L and the conductor sound nozzle E, a laser drilling device P is also provided. A plurality of such laser drilling devices P are arranged at a slight interval in a direction transverse to the interval path la, and each laser head is connected to a laser generator (not shown). In this seventh embodiment, the operations (a) to (e) in Fig. 8 are performed. 0 32-This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) I--I- ------ IIIIIII ^ 11111111 (Please read the precautions on the back before filling out this page) 565864 A7 B7 V. Description of the invention () In Figure 8 (a), when the base plate 3 moves from the stage 4 to the first step forward When moving, the adhesive liquid nozzle C% light irradiation device L and the conductor material nozzle E work. The adhesive liquid nozzle C sprays the ceramic adhesive liquid to form a base insulating layer 70 of a predetermined area on the substrate 3. When the base insulating layer 70 Drying is performed when passing under the light irradiation device L. When the base insulating layer 70 passes under the conductor nozzle E, the conductor nozzle E sprays the conductor to form an electrode layer 72 composed of a predetermined electrode pattern. In FIG. 8 (b), the base plate 3 is restored. When moving, the light irradiation device L and the adhesive liquid nozzle C operate. The conductor layer 72 formed in FIG. 8 (a) is dried as it passes under the light irradiation device L, and then is sprayed as shown in FIG. 8 between the electrode layers 72 embedded in the upper base insulating layer 70 from the adhesive solution nozzle C. The ceramic adhesive liquid forms a spacer insulating layer 71. Next, in Fig. 8 (c), when the substrate 3 is moved forward again, the adhesive liquid nozzle C, the light irradiation device L, and the upper laser punching device P are operated. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. When the substrate 3 passes under the adhesive liquid nozzle C, the adhesive liquid nozzle C sprays a ceramic adhesive liquid to cover all of the above-mentioned spacer insulating layer 71 and electrode layer 72 to form an insulating layer. 73. The insulating layer 73 is dried when it passes under the light irradiation device L. Next, when the substrate 3 passes under the laser drilling device P, the laser drilling device P punches through holes 75 through the electrode layer 72 at predetermined positions on the insulating layer 73. Secondly, in Figure 8 (d), the base plate 3 starts to move back from the stage 5. -33- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public € A7 B7 565864 V. Description of the invention) But In the short section where the base plate 3 does not return to the midway position of the stage 4, in detail, the base plate 3 moves back and forth between the stage 5 and the position passing the light irradiation device L ·, during which the light The irradiation device L and the conductor nozzle E work. Also, during the short-term return movement, when passing through the conductor material nozzle E, the conductor sound nozzle E ejects the conductor material into the through hole 75 to form a through hole electrode 74. This through-hole electrode 74 is dried by the light irradiation device L. On the other hand, when moving forward in a short interval, a conductive sound nozzle E forms an electrode in a predetermined pattern on the insulating layer 73 and the through-hole electrode 74. Layer 72. Thereafter, in FIG. 8 (e), when the substrate 3 is moved back, the adhesive liquid nozzle C and the light irradiation device L work. When the above-mentioned conductor layer 72 formed in FIG. 8 (d) is removed from the light irradiation device After drying under L, it is bonded by The nozzle C sprays a ceramic adhesive liquid on the uncoated area of the electrode layer 72 to form an insulating layer 71. After the above-mentioned Figs. 8 (a) to (e) K, the above-mentioned Figs. 8 (c) to (e) are repeated, That is, it is possible to obtain the same overlay body for an inductor as in the above-mentioned fifth embodiment. In addition, this seventh embodiment replaces the through-hole electrodes described in the first, third, and fifth embodiments. In the example, the laser drilling device can be used as an example, and it has been described in the case of the fifth embodiment, but it can also be applied to the first and third embodiments. Fig. 9 is the eighth embodiment of the first invention. The example shows a manufacturing apparatus for a laminated body for an inductor, and in particular, a case where a dummy crimping device is attached to the upper section path la. -34- This paper standard is applicable to China National Standard (CNS) A4 ( 210 X 297 mm) ------------- (Please read the notes on the back before filling out this page) — Order --------- line; Intellectual Property Bureau of the Ministry of Economic Affairs Printed by employee consumer cooperatives Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by employee consumer cooperatives 565864 A7 B7 V. Description of the invention () In the false crimping device, It is sufficient to use a pressure plate and a pressing roller that can be moved up and down by K. In this eighth embodiment, an example is shown in which the pressing roller R is arranged on the section path la of the first embodiment. The eighth embodiment (FIG. 9) Because it has the same process as the operation of the first embodiment shown in FIG. 2 already explained, for the sake of convenience, the same symbols are added to the figure and the description of them is omitted. A pressing roller R is vertically movable between the irradiation device L and the right-hand conductor material nozzle E, and the pressing roller R is working (moving downward) in FIG. 9 (c). That is, during the operations of the above-mentioned FIG. 9 (c), the insulating layer 13 formed with the through-hole electrode 14 is dried from under the light irradiation device L, and the pressing roller R is moved downward to the position where it is moved forward. On the substrate 3, the thin film 餍 is press-bonded by pressing the upper surface of the through-hole electrode 14 and the insulating layer 13. Through this false crimping, the fine unevenness generated on the thin film layer is uniformly homogenized, and the adhesion to the lower thin film layer is improved. In addition, in the case of the first embodiment, the dummy crimping device has been described, but it is obviously applicable to other embodiments, and the arrangement can be arbitrarily set. Fig. 16 shows a good form of the above-mentioned dummy crimping device. In FIG. 16, the surface of the roller that is rotatably disposed on the supporting member 100 ′ is freely rotated by pressing the roller R, and the surface of the roller is rotatably disposed on the support member 100 ′. The contact with this surface makes the contact state of the two remain unchanged but can be set up and down K -35- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ----- --- Order --------- line (please read the precautions on the back before filling out this page) 565864 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Α7 Β7 V. Description of the invention () Supporting parts 100 ' . When the upper pressing roller R is operated as described above, the thin film layer is press-bonded by pressing the upper surface of the through-hole electrode 14 and the insulating layer 13 as described above. The particles Η adhere to the surface and are removed from the film layer, and the particle pieces adhered to the pressing roller R are transferred from the pressing roller 到 to the surface of the dust-removing roller 100 having high adhesion. Then, the particulate sheet transferred to the dust removing roller 1G0 may be removed and cleaned from the dust removing roller 100 at an appropriate time, or it is preferable to remove the particulate sheet by bringing a peeling member (not shown) into contact with the dust removing roller 100. In the above-mentioned embodiment, the case where the adhesive liquid nozzle using the inkjet method is described as the insulating layer forming device, but the adhesive liquid head C ′ and / or using the doctor blade method as shown in FIG. 17 may be used. A coating roller method in which a ceramic adhesive solution is applied to a contact surface of the roller by rotating the roller. In particular, when the ceramic bonding solution is completely applied in a predetermined area, such as the base insulating layer 10, the insulating layer 20, and the like, a doctor blade method and a coating roller method may be used. In addition, even when the spacer insulating layer is filled and coated after the conductor layer or the like is formed, the conductor layer or the like can be sufficiently dried by a drying device to employ a doctor blade method. In the above-mentioned embodiment, the case where the substrate 3 forms a thin film layer during one or two reciprocations is described. However, in order to increase the layer thickness of the ceramic adhesive liquid, the number of reciprocations may be increased arbitrarily. In addition, this first invention is not limited to the description of the embodiment as long as it is along the gist thereof, and the arrangement, number, operation process, etc. of each device such as the above-mentioned insulating layer forming device can be appropriately changed. -36- This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) --- I! I i 1 I!! T ------ (Please read the notes on the back before filling (This page) 565864 Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention () The following describes the laminated device manufacturing device of the second invention shown in Figures 18 to 28. Figures 18 to 20 show the entire device. The outline of the case is shown in FIG. 18. The casing 4 is formed by assembling the left and right side walls 4b, 4b and the back wall portion 4c of the casing on the upper side of the casing base portion 4a with a width of about 2a, thereby sturdy The support wall 4 d is configured by being disposed on the back wall portion 4 c, and a two- or three-part transparent cover 4 e can be installed on the front side to be opened and closed. In addition, the cabinet 4 is provided with a display portion and a console at appropriate places such as the front side of the cabinet base portion 4 a as shown in the figure, and the cabinet base portion 4 a and the cabinet back wall portion 4 c are arranged inside. Configure the control box and wiring device (omitted in the figure). The upper casing 4 is provided with an operation table 5 on the upper portion of the chassis base portion 4 a. The operation table 5 is a table composed of several small areas on the upper casing base portion 1 and is arranged in the front-rear direction. On the extended left and right guide rails 15, it can move in a short distance along the front-rear direction (Y-axis direction), and is driven by a drive source M composed of a servo motor, a pulse motor, a stepper motor, and rotated by these motors. The drive shaft (screw shaft) 35 reciprocates in the direction of the y-axis. In addition, the worktable .5 lays two guide rails 25, 25 spaced back and forth parallel to the support wall 4d on the upper surface, and a movable table 2 is mounted on the two guide rails 25, 25, and the movable table 2 can be moved along the guide rail 25 , 2 5 reciprocates in the left-right direction (X-axis direction). The movable table 2 is controlled by a reciprocating movement of a driving source M composed of a servo motor, a pulse motor, a stepping motor and a driving shaft (.screw shaft) 45 rotated by these motors in the X-axis direction, and an air piston 2a, In this can -37-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) — — III — — — — — — IIIIIII · 111111. (Please read the precautions on the back before filling in this Page) • Line Mining · 565864 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Α7 Β7 V. Description of the invention () A base plate 3 made of non-embroidery net is installed on the moving platform 2. Therefore, the base plate 3 is reciprocated in a predetermined interval along the X-axis direction by the driving source M and the driving sleeve 45 along the supporting wall 4 d in parallel, and the driving source M and the driving shaft 35 are moved in a short distance along the Y-axis direction. The inner piston moves back and forth, and the air piston 2 a moves up and down. The above-mentioned reciprocating movement of the base plate 3 in the X-axis direction is between the one end side table ST1 (the solid line position in FIG. 18) and the other end side table ST2 (the two-dot one-dash line position in FIG. 18) of the worktable 5. Move back and forth within. Moreover, the reciprocating movement and the up-and-down movement of the base plate 3 are controlled by the control device of the control box not shown in the figure, and the data of the control device can be adjusted by the console section. On the other hand, the support wall 4d of the back wall portion 4c of the casing is provided with a support member 7 composed of two support rods 17, 17 arranged at an upper and lower interval, and the support rods 17 and 17 of each group配 配 nut 孔 27。 Disposed between the nut holes 27. The support member 7 includes a plurality of sisters (in the example in the figure, seven groups) of the support member 7 arranged at a predetermined interval in the X direction, so that each of the support rods protrudes horizontally on the work table 5. One or more insulating layer forming units as the insulating layer forming device can be attached and detached separately, the conductive layer forming unit as the conductive layer forming device, the drying unit as the drying device, and the punching unit as the punching device. , As a false crimping unit and a camera unit of the false crimping device. Specifically, an insulation layer forming unit, a conductor layer forming unit, and a drying unit are necessary, and one or more of them must be installed, but a punching unit, a dummy crimping unit, and a camera unit are selectively installed as required. -3 8 ~ This paper size applies to China National Standard (CNS) A4 (2KM 297mm) _ 丨 丨 丨-丨 &quot; · 丨 丨 丨 丨-!! -Ware I --Order: 丨-! -! · (Please read the precautions on the back before filling out this page) Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 Α7 Β7 V. Description of the invention Liquid adhesive bonding liquid spraying unit (specifically, the bonding liquid nozzle) C, in the upper conductor layer forming unit, the conductor spraying unit (specifically, the conductor Nozzle) E. In the upper drying unit, an example of a light-irradiating unit L in which the ceramic adhesive liquid and the conductor paste are dried to a non-sticky state by light irradiation is used. The adhesive liquid nozzle unit C is composed of a plurality of inkjet nozzles arranged at a small interval, and the ceramic adhesive liquid is sprayed from the selected nozzle. Similarly, the conductor nozzle No. E is also configured of a plurality of inkjet nozzles at a small interval. , Spray conductor 賫 from the selected nozzle. In the upper punch unit, a laser punching device P having a small interval and a plurality of laser punching heads is used. In the above-mentioned dummy crimping device, a pressing roller R configured to move up and down is used. An example of the roller crimping unit is a CCD camera unit Q composed of a CCD camera. The laser drilling unit P connects the above-mentioned laser units and a laser generator, emits laser light from the selected laser unit, and punches holes in the insulating layer. The roller crimping unit R presses the upper surface of the thin film layer composed of the formed insulating layer and the conductor layer at a proper time to perform false crimping. The CCD camera unit Q captures the surface image of the upper diaphragm layer and transmits it to the image processing device at an appropriate time. Each of the above units, namely the adhesive liquid nozzle unit C, the conductor nozzle unit E, the light irradiation unit L, the laser drilling unit P, the pressing roller unit R and the CCD camera unit Q have the same shape formed on the respective upper parts. Support-39- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------- I ------- (Please read the precautions on the back before filling this page ) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 B7 V. Description of the invention () The structure of the mounting part 37 of component 7. That is, each mounting portion 37 has a rectangle of approximately the same length as the support rod 17 of the upper support member 7, and two mounting holes 37a, 37a penetrating in the rectangular long direction are formed at intervals of K, and two mounting holes 37a, In the middle of 37a, a shaft hole 37b9 is punched through in the rectangular long direction, and a cylindrical retainer 37d (refer to FIG. 21) is attached to the mounting holes 37a, 37a so as to receive a ball 37c with a small diameter and rotate. . Each of the above-mentioned devices C, E, L ·, P, R, and Q, when using them, inserts the support stems 17 of the upper support members 7 into the mounting rings 37d of their respective mounting portions 37 so as to penetrate through the mounting holes. 37a, after that, insert the fastening bolt B into the shaft hole 37b, and screw the front end into the nut hole 27 of the support wall 4d, and fix the mounting portion 37 on the support wall 4d tightly, so as to place the devices at the prescribed positions on. Moreover, the mounting portion 37 can be pulled out from the support stem 17 by removing the above-mentioned fastening bolt B. You can install or remove each unit or replace each unit. Next, Fig. 22 shows another embodiment of the above-mentioned support member 7 (a symbol 47 is added to this support member for explanation). In Fig. 22, each support member 47 is a support member in which rail portions 7a are formed on both sides of the lower end portion of a rectangular plate of an appropriate thickness and a nut hole 7b is provided in the front central portion. A plurality of support members 47 are fixedly arranged at predetermined intervals in the X-axis direction K on the support wall 4 d on the back wall portion 4 c of the casing, and project horizontally on the work table 5. On the other hand, the installation of each of the above units C, E, L, P, R and Q -40- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 B7 V. Description of the invention () Part 57 is inserted into the track part 7 of the upper support part 47. The embedded part 7c is formed in the long direction, and it supports the above support The front side of the component 47 is connected to the baffle plate 7b in a body-type manner, and the fastening bolt B can be rotatably mounted on the baffle plate 7d. Insert the embedded part 7c of the mounting part 57 of each of the above units C, E, L, P, R, and .Q into the track part 7a of the support member 47, and press the baffle 7d in front of the support member 47. The fastening bolt B is screwed into the nut hole 7b for fixing, and the mounting part 57 is fixed on the support wall 4d to place the upper devices C, E, L, P, R, and Q at predetermined positions. Furthermore, FIG. 18 shows the first embodiment of the second invention. The light irradiating unit L is disposed at a substantially central portion of the section between the stages ST1 and ST2, and the conductor love ejection unit E and the adhesive are respectively disposed on both sides thereof. The fluid injection unit C has a configuration in which a CCD camera unit Q is disposed above the stage ST1. In addition, reference numeral 80 shown in FIG. 18 is an adhesive liquid tank for supplying the ceramic adhesive liquid to the adhesive liquid ejection unit C, and in the same figure, 90 is a conductor groove for supplying conductive material to the conductive body ejection unit E. The first embodiment of the second invention is a case of manufacturing a plutonium body for an inductor, and its operation procedure will be described with reference to Fig. 23. In FIG. 23, when the substrate 3 is moved from the stage ST1 to the stage ST2, it is a forward movement time, and when it is moved in the reverse direction, it is a recovery movement time. It shows the light irradiation unit L, the conductor 齑 spray unit Ε, the adhesive liquid spray unit C, and The CCD camera unit Q omits their respective mounting portions 37, 57 and the working state of the components that coat their lower ends or the working state when the base plate 3 arrives. In the first embodiment, the workers in (a) to (e) in Figure 23 are performed. -4 1- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm)

565864 A7 B7 V. Description of the invention () Sequence 0 In Figure 23 (a), when the base plate 3 is moved forward initially, the left-side adhesive liquid ejection unit C and light irradiation unit L work, and this adhesive liquid ejection unit C sprays a ceramic adhesive solution to form a base insulating layer 100 (see FIG. 10 in detail) on the substrate 3, and then the insulating layer 100 is dried by the light irradiation unit L to make it non-tacky. (See Figure 15 for details). In Fig. 23 (b), when the substrate 3 is moved back, the adhesive liquid ejection unit C, the conductor paste ejection unit E, and the light irradiation unit L on the right side operate. This adhesive liquid spraying unit C sprays a ceramic adhesive liquid on a region excluding the electrode pattern portion 102a on the upper base insulating layer 100 to form a spacer insulating layer 101 (refer to FIG. 11 in detail). Then, the substrate 3 When passing under the conductive paste spraying unit E, the conductive paste is sprayed by the conductive grate spraying unit E, and an electrode layer 102 is formed on the upper electrode pattern portion 102a (see FIG. 12 in detail). Thereafter, when the substrate 3 passes through the light irradiation unit L, the above-mentioned spacer insulating layer 101 and electrode layer 102 formed on a predetermined pattern are dried. When the substrate 3 returns to the stage ST1, the CCD camera unit Q operates to image the surfaces of the formed insulating layer 101 and electrode layer 102. Then, in FIG. 23 (c), when the substrate 3 is moved forward again, the left-side adhesive liquid ejection unit C, the conductor paste ejection unit E, and the light irradiation unit L operate. Due to the adhesive liquid spraying unit C, the above-mentioned spacer insulation layers 101 and -42 are removed. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the precautions on the back first) Fill out this page) ------Order! — — — — — Line j • Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 B7 V. Description of the invention () Spray the ceramic bonding solution on the area outside the through-hole electrode part i04a on the electrode layer 102 to form insulation Layer 103 (refer to FIG. 13 in detail), and then, when the substrate 3 passes under the conductor paste spraying unit E, the conductor 赍 sprays the element E to spray the conductor sound, and a through hole is formed on the upper through hole electrode portion 104a. Hole electrode 104 (refer to FIG. 14 for details). Furthermore, a thin film layer of the base insulating calendar 100 is formed in FIG. 23 (a) of the upper case. On it, in FIG. 23 (b) (c) of the substrate 3 which is reciprocated once, a through-hole electrode 104 is formed. The electrode layer 102 and the thin film layer S7 made of the insulating layers 101 and 103 are then repeated. Then, the above-mentioned operations of FIG. 23 (b) (c) and FIG. 23 (d) (e) are repeated successively to produce a laminate. Laminate A7 for inductors having a multi-layer thin film layer. In addition, in the above-mentioned FIG. 23 (b) or FIG. 23 (d), the captured surface image is transmitted to an image processing device (not shown in the figure), and the presence or absence of pinholes and Whether the electrode layers 102 and 104 are disconnected. When it is detected, the process may be stopped during the process to remove the thin film layer during manufacture from the substrate 3, and the adhesive liquid spraying unit C and the conductor material spraying unit E shall be inspected and replaced. Bad inkjet nozzle with holes blocked. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) Figure 2 4 shows the second embodiment of the second invention, showing the production of a laminated body A8 for capacitors. A light irradiating unit L is provided at a substantially central portion between the stages ST1 and ST2. Only the adhesive liquid ejecting unit C is disposed on the stage ST1 side, and the conductor fluorescent ejecting unit E and the adhesive liquid ejecting unit C are disposed on the other side. Hua Cheng, a CCD camera unit Q, is arranged above the stage ST1. That is, in the case of a capacitor, the above-mentioned through-hole electrode is not required. 43- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). (Centi) 565864 A7 B7 V. Description of the invention (), the conductor K on one side is omitted from the injection unit E. (Please read the precautions on the back before filling out this page) In this second embodiment, proceed to Figure 24 (A) ~ (d). In Figure 24 (a), when the base plate 3 is moved forward, the side adhesive liquid ejection unit C and the light irradiation unit L. are operated, and the adhesion is exhausted. The spraying unit C sprays the ceramic bonding liquid on the base plate 3 A predetermined area of the insulating layer 120 is then dried by the light irradiation unit L. In FIG. 24 (b), when the upper base plate 3 is moved back, the adhesive liquid spraying unit C on the right and the conductor Cang are sprayed. Unit E and light irradiation unit L work 0. This adhesive liquid ejection unit C sprays ceramic adhesive liquid on a predetermined area on the insulating layer 120 to form a spacer insulating layer 121. Second, when the substrate 3 is ejected from the conductive sound ejection unit E, When passing downwards, the conductor 喷射 is sprayed by the conductor ejection unit E to form a conductor layer 122 on the uncoated area of the above-mentioned spacer insulating layer 121. After that, when the substrate 3 passes under the light irradiation unit L, The above-mentioned spacer insulation layer 121 and conductor layer 122 formed on the prescribed pattern are dried. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. When the substrate 3 returns to the stage ST1, the upper CCD camera unit Q works to The surface of the insulating layer 121 and the conductor layer 122 is imaged, and the surface image for inspecting the inkjet nozzle is transmitted to the image processing device in the same manner as described above. Moreover, in the substrate shown in FIG. (b), A thin film layer S2 composed of the conductor layer 122 and the insulating layers 120 and 121 is formed. Thereafter, the above-mentioned figure 24 (a) (b), figure 24 (c) -44- are repeatedly repeated in this paper. CNS) A4 specification (210 X 297 mm) 565864 A7 B7 i. Description of the invention () (d) Operation to produce a laminated body A8 for a capacitor laminated with a plurality of thin film layers S2. Figure 25 is the second A third embodiment of the invention shows a case where a laminated body A9 for inductors is manufactured. The light irradiating unit L is disposed at a substantially central portion between the stages ST1 and ST2 and on the left and right sides thereof. An adhesive liquid spraying unit C is arranged between the light irradiation units L and L of the stage ST1), and a conductive paste spraying unit E is arranged between the other light irradiation units L and L, and a CCD camera unit is arranged above the stage ST1 The composition of Q. In this third embodiment, the operations (a) to (d) in Fig. 25 are performed. In Fig. 25 (a), when the substrate 3 is initially moved forward, the adhesive exhaustion unit C, the conductor #injection unit E, and the center and right-side light irradiation units L operate. The ceramic bonding liquid is sprayed from the bonding liquid spraying unit C to form a base insulating layer 130 of a predetermined area on the substrate 3, and the base insulating layer 130 is dried when passing through the central light irradiation unit L, and then, when the base insulating layer 130 When passing under the conductor / ejection unit E, the conductor paste is ejected by the conductor paste ejection unit E to form an electrode layer 132 having a predetermined electrode pattern. This electrode layer 132 is dried when it passes under the light irradiation unit L on the right side. In Fig. 25 (b), when the substrate 3 is moved back, the adhesive liquid ejection unit C and the left light irradiation unit L operate. From this adhesive liquid spraying unit C, a ceramic adhesive liquid is sprayed as between the electrode layers 132 buried on the above-mentioned base insulating layer 130 to form a spacer insulating layer. -45- This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the notes on the back before filling out this page) Order --------- Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 B7 V. Description of Invention () 131, drying when the spacer insulating layer 131 passes under the light irradiation unit L on the left side. Then, when the substrate 3 returns to the stage ST1, the above-mentioned CCD camera unit Q works, and images the surface of the formed insulating layer 131 and electrode layer 132, which is the same as the upper case, and will be used to check the surface of the inkjet nozzle. The image is transmitted to the image processing device. Next, in Fig. 25 (c), when the substrate 3 is moved forward again, the viscous liquid jetting unit C, the conductor jetting unit E, and the central and right-side light irradiation units L · work. The adhesive liquid spraying unit C sprays a ceramic adhesive liquid on a predetermined area on the upper spacer insulating layer 131 and the electrode layer 132 to form an insulating layer 133. After the insulating layer 133 is dried by the light irradiation unit L, When the substrate 3 passes under the conductive material spraying unit E, the conductive paste spraying unit E sprays a conductive paste on the area where the insulating layer 133 is not coated to form a through-hole electrode 134. This through-hole electrode 134 is dried by the right-side light irradiation unit L. Next, in Fig. 25 (d), when the substrate 3 is moved back again, the conductor 賫 spray unit E, the adhesive liquid spray unit C, and the center and left side light irradiation units L · work. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the conductor paste spray unit E, sprays the conductor 賫 on the insulating layer 131 and the through-hole electrode 134 to form an electrode layer 132 composed of a predetermined electrode pattern, and the light is irradiated to the insulation unit L. After the layer 133 is dried, when the substrate 3 passes under the adhesive liquid spraying unit C, the adhesive liquid spraying unit C sprays the ceramic adhesive liquid on the uncoated area of the upper electrode layer 132 to form a spacer insulation. Layer 13 1. This spacer insulation layer 131 is fed by the left-side light irradiation unit L-46- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 565864 Printed by A7 B7, Employee Cooperative of Intellectual Property Bureau, Ministry of Economic Affairs Description of the invention () Line drying. Then, when the substrate 3 returns to the stage ST1, the upper CCD camera unit Q is operated, and the surfaces of the formed insulating layer 131 and the electrode layer 132 are imaged. 0 After the images (a) to (d) M of FIG. 25 are passed, Repeating the reciprocating movement of the base plate 3-25 times (c) and (d), it is possible to obtain a stack for inductors, in which a thin film layer S3 composed of an electrode layer 132 having a through-hole electrode 134 and insulating layers 131 and 133 is laminated. Layer body A9. According to this third embodiment, since the layers are dried by the light irradiation unit L each time the insulating layer and the electrode layer are formed, the spacer insulating layer 13 1, the electrode layer 132, the insulating layer 133, and the passivation layer can be improved. Coating or printing accuracy of the hole electrode 134. Fig. 26 is a fourth embodiment of the second invention, showing a case where a laminated body A10 for capacitors is manufactured, and a light irradiation unit L is distributed at a substantially central portion between the stages ST1 and ST2, and an adhesive is arranged on the left side thereof. The liquid injection unit C is configured with a conductor 赍 injection unit E on the right and a CCD camera unit Q on the stage ST1. In this fourth embodiment, the operations (a) to (d) in Fig. 26 are performed. In Figure 26 (U), when the substrate 3 is moved forward for the first time, the bonding liquid spraying unit C, the light irradiation unit L and the conductor material spraying unit E all work. First, the bonding liquid spraying unit C sprays ceramic bonding. The liquid forms an insulating layer 14Q of a predetermined area on the substrate 3, and is dried when the insulating layer 140 passes under the light irradiation unit L. -47- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) -------- Order ------ --- line j 565864 A7 B7 V. Description of the invention () Then, when the insulation calendar 14 passes through the conductor paste spray unit E, the conductor sprays the conductor to form an electrode layer composed of a prescribed electrode pattern. 142. In Fig. 26 (b), when the above-mentioned base plate 3 is moved back, the light-emitting unit L and the adhesive-liquid injection unit C are operated. The conductive layer 142 formed in FIG. 26 (a) is dried as it passes under the light irradiation unit L, and is then sprayed by the adhesive liquid spraying unit C between the electrode layers 142 embedded in the insulating layer 140 as described above. The adhesive liquid forms the spacer insulating layer 141. Then, when the substrate 3 returns to the stage ST1, the above-mentioned CCD camera unit Q operates to image the surfaces of the formed insulating layer 141 and the electrode layer 142. Next, in FIG. 26 (c ), In a short section where the base plate 3 does not reach the position on the stage ST2, in detail, the base plate 3 reciprocates in a section from the stage ST1 to a position passing the light irradiation unit L, during which the light irradiation units L and The adhesive liquid spraying unit C operates. Furthermore, when moving forward in this short interval, the above-mentioned spacer insulation calendar 141 formed in FIG. 26 (b) is dried when it passes under the light irradiation unit L, and the substrate 3 is discharged from the adhesive liquid ejection unit C when it moves back. When passing downward, a ceramic bonding liquid is sprayed from the bonding liquid spraying unit C to form an insulating layer 140 on the electrode layer 142. When the substrate 3 returns to the stage ST1, the CCD camera unit Q operates in the same manner as described above, and the surface of the formed insulating layer 14G is imaged. Secondly, in Figure 26 (U), the base plate 3 is moved forward. When this _ 4 8-this paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the precautions on the back first) (Fill out this page) ·% t fill in the order book --------- Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 B7 Printed by the Employee Cooperative Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs When moving forward, the light irradiation unit L and the conductor «injection unit E operate. After the insulating layer 140 formed in FIG. 26 (_c) is dried by the light irradiation unit L, the conductor spraying unit E sprays the conductor 罾 on the upper insulating layer 140 to form an electrode layer 142 composed of a predetermined electrode pattern. After loading (a) ~ (d) K of Fig. 26 and repeating Fig. 26 (b) ~ (d) of Fig. 26, a thin film layer S4 composed of an electrode layer 142 and insulating layers 140 and 141 can be obtained. Laminate A10 for capacitors. In this fourth embodiment, it is also possible to minimize the number of the bonding fatigue spray unit C, the conductor love spray unit E, and the light irradiation unit L, so that the moving distance of the substrate 3 can be shortened. Fig. 27 is a fifth embodiment of the second invention, and shows a case where a ytterbium layer for an inductor is manufactured, and in particular, a case where a via hole for forming a via electrode is formed by a laser drilling device P. That is, it has a configuration in which in addition to the adhesive liquid ejection unit C, light irradiation unit L, conductor beam ejection unit E, and CCD camera unit equivalent to the second embodiment, a laser drilling device P is provided. . In this fifth embodiment, the operation steps (a) to (e) in Fig. 27 are performed. In Figure 27 (U), when the substrate 3 is moved forward for the first time, the bonding liquid spraying unit C, the light irradiation unit L, and the conductive paste spraying unit E work, and the bonding liquid spraying unit C shoots the ceramic bonding liquid. A base insulating layer 150 having a predetermined area is formed on the substrate 3 and dried when the base insulating layer 150 passes under the light irradiation unit L. When the base insulating layer 150 passes under the conductor / jetting unit E, -49- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

565864 A7 B7 V. Description of the invention () The conductor 赍 spray unit E sprays a conductor to form an electrode layer 152 composed of a predetermined electrode pattern. In Fig. 27 (b), when the upper base plate 3 is moved back, the light emitting unit L and the adhesive liquid ejecting unit C are operated. The electrode layer 152 formed in FIG. 27 (a) is dried while passing under the light irradiation unit L, and then sprayed as described above by the adhesive liquid spraying unit C and buried between the electrode layers 152 on the base insulating layer 150. The ceramic bonding liquid forms a spacer insulating layer 1 5 1. Then, when the substrate 3 returns to the stage ST1, the upper CCD camera unit Q is operated, and the surfaces of the formed insulating layer 151 and the electrode layer 152 are imaged. Next, in Fig. 27 (c), when the substrate 3 is moved forward again, the adhesive liquid ejection unit C, the light irradiation unit L, and the above-mentioned laser drilling unit P operate. When the substrate 3 passes under the adhesive liquid ejection unit C, the adhesive liquid ejection unit C ejects the ceramic adhesive liquid to form an insulating layer 153 covering all of the above-mentioned spacer insulating layer 151 and the electrode layer 152. The insulating layer 153 is dried when passing under the light irradiation unit L. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. When the base plate 3 passes under the laser drilling unit P, the laser drilling unit P punches through holes in the predetermined position of the insulating layer 153. 15 5. Secondly, in FIG. 27 (d), the base plate 3 starts to move back from the stage ST2, but in the short interval where the base plate 3 does not return to the position of ST1, in detail, the base plate 3 is from the stage ST2 to the passing light irradiation unit. The paper size of the location of L applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 565864 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention () Forward movement, during which the light irradiation unit L and the conductor paste spray unit E are operated. Moreover, during the return movement in this short section, when passing through the conductor paste spray unit E, the conductor 胥 spray unit E 呗 shoots the conductor 赍 into the through hole 155 to form a through hole electrode 15.4. This through hole electrode 154 Dry when passing through unit L. On the other hand, when moving forward in a short interval, the conductor injection unit E forms an electrode layer 152 in a predetermined pattern on the insulating layer 153 and the via electrode 154. Thereafter, in Fig. 27 (e), the adhesive liquid ejection unit C and the light irradiation unit L are operated when the substrate 3 is moved back. After the electrode layer 152 formed in FIG. 27 (d) is dried while passing under the light irradiation unit L, the adhesive liquid spraying unit C sprays ceramic bonding on the uncoated area of the upper electrode layer 152液 forms an insulating layer 151. Then, when the substrate 3 returns to the stage ST1, the above-mentioned CCD camera unit Q works to image the surfaces of the formed insulating layer 151 and electrode layer 152. 0 After the images (a) to (e) of FIG. 27 are passed, Repeating the above drawings (c) to (e) of FIG. 27, a laminated body for an inductor similar to the second embodiment can be obtained. Fig. 28 is a sixth embodiment of the second invention, showing a case where a laminated body for an inductor is manufactured, and in detail, a roller crimping unit including a pressing roller R as a dummy crimping device is attached; Situation. Specifically, an example is shown in which the roller crimping unit is added to the arrangement configuration of the first embodiment. -51- This paper size applies to China National Standard (CNS) A4 specifications &lt; 210 X 297 mm) I1IIIIII1I — IIIIIII 1 ^? 1111111-^^ ^^^ (Please read the precautions on the back before filling this page) 565864 Α7 Β7 V. Description of the invention () Because it has been described according to Fig. 23 that it is Fig. 28 of the working procedure of this sixth embodiment, for convenience of explanation, the same reference numerals are added to the figures and the corresponding They are explained, but a roller crimping unit R is provided between the central light irradiation unit L and the right conductor paste spraying unit E so as to move up and down, and the roller crimping unit β is working in FIG. 28 (c) (Move Downward). That is, during the operations of the upper part of FIG. 28 (c), the insulating layer 103 formed with the through-hole electrode 1G4 is dried while passing through the light irradiation unit L, and the roller crimping unit R is moved downward to the ongoing state. On the substrate 3 moved forward, the thin-film layer is press-bonded by pressing the upper surface of the through-hole electrode 104 and the insulating layer 103. By this false crimping, the fine unevenness generated on the film calendar is uniformly homogenized, and the adhesion to the lower film layer is improved. Since the specific structure of the upper roll pressure-contact unit R is the same as that of the above-mentioned Fig. 16, detailed description thereof will be omitted. In addition, in the above embodiments, each time when the base plate 3 moves forward or moves back, the base plate 3 moves downward with the downward movement of the movable table 2, and this downward movement distance is equivalent to the forward movement or the return movement The thickness of the insulating layer and the conductor layer formed at the time always keeps the distance between each unit and the top of the forming layer constant. In addition, the base plate 3 can be moved a shorter distance than the movement in the Z axis direction of the movable table 2. However, it can be used for the length (in the Z axis direction) in which each unit travels inward after being installed on the support member. Length) Corresponds to the base-52- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before writing this page) ¾. Intellectual Property Bureau, Ministry of Economic Affairs Printed by the employee consumer cooperative 565864 A7 B7 V. Description of the invention () The position of the disc is adjusted below. (Please read the precautions on the back before filling this page.) Furthermore, in the above-mentioned embodiments, the specific structure, arrangement, and operation procedures of each unit such as the insulation calendar forming unit, the conductor layer forming unit, etc. have been described, but The arrangement, number, operation procedure, etc. may be appropriately changed as long as it is along the gist of the present invention and is not limited to the description of the examples. For example, the insulating layer forming unit K may be of a scraper type, and the supporting parts for mounting each unit are not limited to the structure of Fig. 20 or Fig. 22, or the CCD camera unit may be arranged above the stage ST2, and each time the substrate advances Take a picture of the surface map when moving or returning to move. Next, the laminated body manufacturing apparatus of the third invention shown in FIGS. 2 to 39 is described. FIGS. 29 and 30 show the outline of the manufacturing apparatus. The vertical support wall 4 f constituting the front part of the casing 4 can be used. A rotary drum 160 is rotatably installed, and a supply mechanism 170 for supplying the carrier film f to the rotary drum 160 is arranged near the lower side of the rotary drum 160. A laminated body manufactured by recycling is disposed directly below the rotary drum 160 for recycling. Agency 180. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints a motor M and a deceleration control device for driving the rotating drum 160 in the casing 4 together, and it is not shown in the figure, but it is equipped with a ceramic containing adhesive. Liquid junction box, conductor paste box for containing conductors, vacuum structure, control box, and wiring device. The rotary drum 160 is a polygonal drum made of metal such as stainless steel (the example in the figure is a 12-corner shape). The rotary drum 160 is divided into flat working surfaces 160a on the outer periphery of the rotary drum 160, and a vacuum is generated on each working surface 160a. Suction effect of the suction hole 161. The rotating drum 160 is continuously rotated or intermittently rotated by the above motor. -53- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm). Explanation of the invention () The rotary drum is set in the same manner. When the carrier film f is supplied from the carrier film supply mechanism 170 to the rotary drum, the rotary drum 160 is continuously rotated, and the carrier film f is rolled around the outer periphery and laid on each work surface of the upper cymbal. 16Qa. In addition, in the stopped state during the intermittent rotation of the rotary drum 160, a workbench or a standby workbench for performing each operation against each work surface 16Qa of the upper cymbal is disposed, and an insulation layer forming device is appropriately arranged on these workbenches. , Conductor layer forming device, drying device, imaging device, pressing device, dummy crimping device, cutting device, etc. Specifically, in FIGS. 29 and 31, the rotating drum 160 is intermittently rotated in the clockwise direction, and one position in the stopped state is referred to as the first ST1, and the clockwise direction is the second ST2. In the case of the third ST3 and the twelfth ST12. The ST1 is used as a preparation table, and the ST2 is used as a mounting table for the carrier film f. An adhesive liquid injection unit C and a CCD camera unit Q are provided on ST3, a dry unit L is provided on ST4, and a pressing unit is provided on ST5. R, a conductor wheat spray unit E and a CCD camera unit Q are provided on ST6, and a drying unit L is provided on ST7. In addition, the above-mentioned ST8 is provided with an adhesive liquid spraying unit C, a conductive spraying unit E and a CCD camera unit Q, a drying unit 1 is installed on ST9, a dummy crimping unit R is installed on ST1D, and ST11 is installed on A cutting device is provided, and the ST 12 is located directly below the rotary drum 160 and is a collection table for collecting the above-mentioned laminated body A. Configure the upper devices, namely the insulation layer forming unit C, the conductor forming unit E, the pressing unit R ", the CCD camera unit Q, and the false crimping unit R, cut -54- This paper size applies to China National Standard (CNS) A4 Specifications (210 X 297 mm) II III — — — —III — — — — ^ «— — — — — — II Awl (Please read the notes on the back before filling this page) 565864 A7 _ B7 V. Description of the invention () Break unit X so that they can be detachably mounted on each support frame 4g mounted on the above-mentioned support wall 4f. The adhesive liquid ejection unit C is composed of a small interval of K and a plurality of inkjet nozzles. An example of an inkjet method that sprays ceramic adhesion from this selected nozzle. Similarly, the conductor love ejection unit E is also composed of a plurality of inkjet nozzles with a small interval, and has an inkjet method that sprays a conductor paste from the selected nozzle. An example shows a case where the drying unit L uses a drying machine that dries the ceramic adhesive liquid and the conductor to a non-sticky, semi-hardened state by hot air blowing. In addition, the ceramic adhesive liquid and the conductor can also be irradiated with light.賫 dry The dryer is used as the drying unit L. The pressing device uses a freely rotating pressing roller and has the same structure as the above-mentioned invention. The upper surface of the thin film layer composed of the formed insulating layer and the conductive layer is uniformized and pressed. In the above-mentioned adhesive liquid spraying unit C and conductor material spraying unit E, the working surface 160a can be configured to move in the X-axis direction (the circumferential direction of the rotary drum 160) and the Y-axis direction (the width direction of the rotary drum 160). These inkjet nozzles are provided, and the amount of movement can be controlled. At the same time, these inkjet nozzles can be movably arranged in the Z-axis direction (contact and separation direction) that moves vertically up and down on the working surface 160a, and can This amount of movement is controlled. Further, in the pressing unit R ", its pressing roller is disposed so that it can move in the X-axis direction and the Z-axis direction. The CCD camera unit Q shoots the reference film on the rear carrier film f or the initial formed insulating layer and transmits it to the image processing device. Therefore, this paper size applies the Chinese National Standard (CNS) A4 (210 X 297 mm) ) -------------- ^ (Please read the notes on the back to write this page)

• H ϋ I Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 B7 V. Description of the invention () In order to make the above-mentioned adhesive liquid spraying unit C, conductor wheat spraying unit E, and the insulation layer (the surface of the coating object) The position coincidence can control the positions of the X and Y axis directions of the unit C and E. The dummy crimping unit β shows an example of a pressure plate 190 moving up and down along the Z-axis direction on the working surface 160a. The lowering of the pressure plate 190 presses each layer or multiple layers on the working surface 160a. The upper surface of the formed insulating layer and the thin-film layer composed of the electrode 进行 was temporarily crimped. The cutting unit X is an example of a cutter 210 provided on the working surface 160a so that the K can move in the X-axis direction and the Z-axis direction. The carrier on the working surface 160a is cut by the lowering of the cutter 210. The film f is separated from the carrier film f of other regions. The film supply mechanism 170 takes out the carrier film f from a film roll 171 wound with a carrier film f made of a synthetic resin film such as polyethylene terephthalate, and supplies the carrier film f to the rotary drum 160. The guide arm 172, the interrupter 173, and the tension roller 174 are configured. The guide arm 172 can be placed near the second ST2 where the rotating drum 160 is located, and can be shaken away from the working surface 160a. When approaching the working surface 160a, the carrier film f is extrapolated in contact with the carrier film f (see FIG. 31) Since the rotating drum 1660 is sucked by the vacuum of the suction hole 161, the front end of the film f is sucked and rotated continuously once. Therefore, the carrier film f is rotated on the rotation 160 to lay on each working surface 160a. The above-mentioned cutter 173 cuts off the carrier film f and separates them after the rotating drum 160 stops once. -56- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read first Note on the back, please fill in this page again.) Order ··--· Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, printed by employee consumer cooperatives 565864 A7 B7 V. Description of the invention () The laminated body recovery mechanism 180 is arranged on the 12th above where the rotary drum 16G is located The table ST12 is composed of a recovery table 181 that moves up and down directly below the rotary drum 160 and a driving mechanism 182 that retracts the recovery table 181 up and down and a recovery arm 1 8 3 that rotates in the opposite direction. This recovery mechanism 180, In the final stage of forming a laminate on the carrier film f by a predetermined number of rotations of the drum 160, the separated carrier film is cut by the cutting unit X on the second stage "11 to reach the twelfth stage ST12. When the suction operation is stopped, the recovery body 181 receives the laminated body A attached to the upper carrier film f, and stores it in the recovery box 184 through the recovery arm 183 (refer to FIG. 31). The operation procedure of manufacturing the laminated body A by the rotary drum 160. First, as described above, the rotary drum 160 is rotated once in a row, and a carrier film f is laid on each working surface 160a of the rotary drum 160 (see FIG. 31). Then, when the rotary drum 160 is intermittently rotated, the operation process illustrated in FIG. 32 is started. In addition, FIG. 32 illustrates the manufacturing of a laminated body for an inductor. In FIG. 32 (a), when the rotary drum 160 is When the working surface 160a of ST is stopped on ST3, the bonding liquid spraying unit C works on the ST3. This bonding liquid spraying unit C moves along the X-axis direction while spraying the ceramic bonding liquid to form a predetermined area on the carrier film f. Base insulation calendar 220 (refer to section 3 4 for details) ) In Fig. 32 (b), when the working surface 160a. Is moved to ST4, the drying unit L of the ST4 makes the upper surface of the above-mentioned insulating base layer 220 dry. CNS) A4 size (210 X 297 mm) (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

565864 A7 B7 V. Description of the invention () Drying becomes a semi-hardened state that is not sticky. In FIG. 32 (c), when the working surface 160a moves to ST5, at this ST5, the pressing unit R "works, and its pressing roller contacts the base insulating layer 220 and moves in the X-axis direction. Therefore, The fine unevenness generated on the base insulating layer 220 by the inkjet method is uniformly realized and homogenized. Next, in FIG. 32 (d), when the working surface 160a is moved to ST6, in this ST6, the conductor material The spraying unit E works, and this conductive spraying unit E sprays conductive materials on the base insulating layer 220 while moving in the X-axis direction to form an electrode layer 2 2 2 composed of a predetermined pattern and at a predetermined position on a diagonal line. The reference mark 221 is formed (refer to FIG. 35 in detail). In addition, the reference mark 221 is formed only when the first indwelling rotation of the rotary drum 160 is rotated. In FIG. 32 (e), the upper work surface 160a is moved to When it is on ST7, the upper surface of the conductor layer 222 is dried by the drying unit L of the ST7. Next, in FIG. 32 (f), when the working surface 160a reaches ST8, the adhesive liquid spraying unit C and the ST8 Conductor / Ejection Unit E works, this The liquid-injection unit C binds the liquid to form the spacer insulation layer 223. In addition, the conductor asset injection unit E printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs — the plane moves along the X-axis direction at the predetermined position of the electrode layer 2 2 2 The upper conductor 赍 is formed to form a through-hole electrode 2 2 4 (refer to FIG. 36 in detail). In addition, the above-mentioned adhesive liquid injection unit C and the conductor love injection unit E are operated, and the reference mark is marked by the CCD camera unit Q of ST8. 221 Takes pictures and controls the X-Y axis coordinates of the adhesive liquid ejection unit C and the conductor material ejection unit E using this mark 221 as a reference. -5 8-This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 565864 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention () In Figure 32 (g), when the above-mentioned working surface 160a moves to ST9, The drying device "L" dries the upper diaphragm insulation layer 2 2 3 and the through-hole electrode 2 24. After that, the working surface 160a passes through ST10 to ST12 to ST2 without any operation, and moves to ST3 again. In Figure 32 (h), When the working surface 160a stops at ST3, the ST 3 adhesive liquid spraying unit C works. This adhesive liquid spraying unit C sprays ceramic adhesive liquid while moving in the X-axis direction. This time, the upper through hole is removed. An insulating layer 22 5 is formed on the area outside the electrode 224. In addition, the upper adhesive liquid injection unit C is operated, and the C CD camera unit Q of ST 3 images the upper reference mark 221 and the adhesive liquid injection unit C. X-Y coordinates. In Fig. 32 (i), when the working surface 160a is moved to ST4, the upper surface of the insulating layer 2 2 5 is dried by the drying device L of the ST4 in the same manner as in the upper case. In Fig. 32 (i), when the working surface 160a moves to ST5, the ST5 pressing device R "works, and its pressing roller moves in the X-axis direction while contacting the insulating layer 2 2 5 to isolate the insulation. The fine unevenness generated on the layer 2 2 5 is uniformed. In Fig. 32 (k), when the upper work surface 160a moves to ST6, the ST 6 conductor jetting unit E is operated, and the conductor jet is sprayed. Unit E sprays conductive material on the through-hole electrode 224 and the insulating layer 225 while moving in the X-axis direction. In the same manner as above, an electrode calendar composed of a predetermined pattern is formed. 2 2 〇59- This paper standard applies to Chinese national standards (CNS) A4 specification (210 X 297 mm) I ------------- III I --- Λ (Please read the notes on the back before filling this page) 565864 A7 B7 V. Description of the invention () In addition, the position of the conductor injection unit E is controlled by the C CD camera unit Q as described above. In FIG. 32 (1), when the upper work surface 160a is moved to ST7, it is the same as the 32nd above. (E) Similarly, the upper surface of the electrode layer 222 is dried. Next, in FIG. 32 (in) When the upper work surface 160a reaches ST8, as in the above-mentioned Fig. 32 (f), the adhesive liquid ejection unit C and the conductor ejection unit E operate to form the spacer insulating layer 223 and the via electrode 224. In Fig. 32 In (η), when the working surface 160a is moved to ST9, the spacer insulating layer 2 23 and the through-hole electrode 2 2 4 are dried in the same manner as in FIG. 32 (g). Thereafter, the above-mentioned first step is repeated. 32 (h) to (U), a plurality of thin film layers composed of an insulating layer 223, 2 2 4 and an electrode calendar 2 2 2, 2 2 4 are laminated a predetermined number of times, but the next 32nd is implemented at an appropriate time during this period. Figure (〇). In Figure 32 (〇), when the work surface 160a is moved to ST10 and stopped, the false pressing device β operates, and the pressure plate 190 is lowered to the insulation surface formed on the work surface 160a. Pressing is performed on the top to perform false compression bonding. Therefore, the tight adhesion between the film layers can be improved. In addition, ST8 during the last rotation of the rotating drum 160 is formed by the adhesive liquid ejection unit C and the conductor material ejection unit E. The spacer insulating layer 223 and the via electrode 224 are formed as the uppermost layer The pseudo insulation layer 226. In the final rotation of the rotating drum 160, the second step 32 is performed after the upper step 32 (0) as the next step (p). In the 32th step (p), When the working surface 160a moves to ST11 and stops, the cutter 210 of the cutting device X descends and cuts and separates the operation. -60- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love) (Please read the precautions on the back before filling this page) Order --------- Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 ___________ B7 V. Description of the invention () Carrier film on surface 160a f. (Please read the precautions on the back before filling in this page.) In addition, the above-mentioned process is used to produce a multilayer laminate for the inductor All. The daylight layer All for the inductor is extrapolated from the working surface 160a to the recovery stand 181 of the laminated body recovery mechanism 1.80 in ST12, as described above, and is stored in the recovery box 184 by the recovery arm 183. In the drawing, few electrode patterns are displayed on the thin film layer, but in fact, multiple patterns can be formed on the thin film layer such that a plurality of inductors can be obtained from the laminated body All. Also, in the above program description, the case where the work program is sequentially performed with one work surface 160a as a reference has been described. However, in ST3 to ST9, each work is performed simultaneously by each device in each work surface 160a of the rotary drum 160. Fig. 33 shows a procedure for manufacturing a laminated body for a capacitor from the upper drum 160. In the case where the A12 capacitor laminated body is printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the structure of the through-hole electrode described in the operating procedure of the upper inductor is not provided, and only the 33th ST8 equivalent to it is described. Figures (f), (in) and Figure 33 (h) of ST3 after the second rotation are different from Figure 32, and descriptions of other parts of the same program are omitted. In FIG. 33 (f), in the above ST8, the adhesive liquid ejection unit C and the conductor material ejection unit E are arranged, but in this procedure, only the adhesive liquid ejection unit C operates, and the conductive paste ejection unit E does not operate. That is, when the working surface 160a reaches ST8, the ST8 adhesive liquid spraying unit C is moved in the X-axis direction while being removed in Figure 33 (d). -61- This paper size applies the Chinese National Standard (CNS) A4 Specifications (210 X 297 public love) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 __B7__ V. Description of the invention () The ceramic adhesive solution is sprayed on the area outside the conductor layer 222 to form the spacer insulation layer 2 2 3 This operation is also the same as in Fig. 33 (in). In Fig. 33 (h), when the operation surface 160a stops at ST3, the ST 3 adhesive liquid spraying unit C is sprayed while moving in the X-axis direction. The ceramic adhesive liquid has an insulating layer 225 formed on all the upper surfaces of the spacer insulating layer 223 and the conductive layer 222 formed in FIG. 33 (f). Furthermore, it can be manufactured according to the procedure in FIG. 33. A multilayer body A12 for an inductor is formed by laminating a plurality of thin film layers composed of insulating layers 223, 225, and an electrode layer 222. Fig. 37 shows another embodiment of a manufacturing apparatus. The manufacturing apparatus of Fig. 37 is provided with The same rotating drum 160 illustrated in the figure, the membrane The feeding mechanism 170 and the stack recovery mechanism 180 have a configuration in which a doctor blade-type adhesive liquid spraying unit C 'is used in one of the insulating layer forming devices, and a laser drilling device P is added. ST1 is the mounting platform for the carrier film f. A doctor blade adhesive liquid injection device C 'and a CCD camera unit Q are provided on ST2. A drying device L is provided on ST3 and an additional laser drilling is provided on ST4. Unit P, and ST5 to ST12 are the same as the above-mentioned Fig. 31. The adhesive liquid spraying unit C 'applies the ceramic adhesive liquid from its doctor blade to the entire width of the doctor blade to form an insulating layer (refer to Fig. 39). Work is performed in the programs (a) and (h) shown in Figure 38. The laser drilling unit P is composed of a plurality of laser heads with a small interval of K. Each laser head is connected to a laser generator, and is appropriately controlled by a control section. Location selection -62- This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) — — — — — — — — — — — — — — — — — — — — — — — — Please read the notes on the back before filling (This page) 565864 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ___ B7_ V. Description of the invention () The laser head works to emit laser light from the selected laser head. The above-mentioned laser drilling unit P rotates between the rotating drums 160. It does not work during the first rotation, and works after the second rotation K. That is, in the work program shown in FIG. 38, because the laser drilling unit P does not work during the last rotation, FIG. 38 (a ) ~ (I), except that the adhesive liquid spraying unit C 'is applied to the upper surface of the ceramic adhesive liquid (Fig. 38 (a) (h)), and the description of the procedures (a) ~ (i) of Fig. 32 the same. Further, in Fig. 38 (i) (k), the laser drilling unit P and the pressing unit R "are operated as follows. In Fig. 38 (j), when the working surface 160a of the rotary drum 160 stops at ST4, The ST4 laser drilling unit P works. The laser drilling unit P is moved along the X-axis direction and within a specified range, that is, the upper part of the through-hole electrode 224 formed in FIG. 38 (f) is irradiated with laser light to make the communication The hole electrodes 2 2 4 are exposed. That is, in FIG. 38 (h), the upper part of the through-hole electrode 224 formed in FIG. 33 (f) is applied by using the above-mentioned adhesive liquid spraying unit C ′. The insulation calendar is covered, and the part of the insulation layer is scattered by laser irradiation to expose the through-hole electrodes 2 2 4. In Fig. 38 (k), when the working surface 160a moves to ST5, the unit R is pressed at ST5. Work, its pressing roller moves in the X-axis direction while making contact with the above-mentioned insulating layer 225. Therefore, in Fig. 38 (j), the adhesive liquid debris scattered on the insulation calendar is adhered to the pressing roller and removed from the insulation layer. In addition, after Figure 38 (k) K, it has been explained with Figure 32 -63- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -------- ^ --------- (Please read the notes on the back before filling out this page) 565864 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. (k) ~ (P) of the invention description () The same procedures (1) to (q) were used to produce a laminated body All for the inductor. In each of the above embodiments, the adhesive liquid ejection units C, C ', the conductor love ejection unit E, the pressing unit R ", and the cutting off Unit X, etc., moves in the X-axis direction every time the rotary drum 160 rotates intermittently, but this movement distance is equivalent to the thickness of the formed insulating layer and electrode layer, so that each unit can always maintain a certain distance from the formation layer. In the above embodiment, the specific structure, configuration, and operation procedures of each unit such as the adhesive liquid spraying unit C, C ', the conductor asset spraying army E, the pressing unit R', the false pressing unit R, and the cutting unit X have been described. However, as long as it does not deviate from the gist of the present invention, it is not limited to the above description, and may be appropriately changed. The arrangement, number of units, working procedures, etc. Next, the laminated body manufacturing apparatus according to the fourth invention will be described, in which FIGS. 40 to 42 show the first embodiment, and FIG. 43 shows the second embodiment. Figs. 44 to 46 show a third embodiment, and Figs. 4 to 7 to 49 show a fourth embodiment. First, the first embodiment shown in Figs. 40 to 42 will be described. This manufacturing apparatus is shown in Figs. 40 and 41. As shown in the figure, there is an insulating layer forming device C and a spraying device for spraying a ceramic adhesive liquid on a support table 250 which is provided with a body 251, and one of the left and right positions (positions in the X-axis direction) sandwiching the body 251 is disposed. The conductor layer forming device E of the conductor 齑 is configured with a drying device L for drying the adhesive solution or the conductor paste on the other side. The body 251 has a lower plate 251a of a body having a shape of 圼 when viewed from the side. Moving ground (K-controlled movement in the Z-axis direction) -6 4-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------------ 丨 隹------- 丨 Order nn · ϋ · ϋ ϋ ϋ I line (Please read the precautions on the back before filling this page) 5658 64 A7 B7 V. Description of the invention (Printing and disposing work table ST of the employee's consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, on the upper plate 251c of the same body, can be controlled to move up and down (K-controlled movement in the Z axis direction) The work station ST supports a crimping device R ′, and a space between the upper surface of the work table ST and the crimping device R ′ is used as a space S for the laminated body. In the lower position of the support, a ball screw mechanism with servo motors, pulse motors, stepping motors and other K-electrically controllable motors as the driving source is mounted on a table control mechanism 2 5 3 The upper and lower crimping device R ′ is provided with a ball screw mechanism and a guide device such as a ball screw mechanism using a motor that can similarly control the pressure plate 254 as a driving source, and a guide device. A structure supported on the upper plate 251c of the main body in an up-and-down manner. The insulation layer forming device C is a unit composed of a plurality of inkjet nozzles with a small interval of K. The ceramic adhesive liquid is sprayed from a nozzle selected therefrom. In the same manner, the conductor layer forming apparatus E is also a unit composed of a plurality of inkjet nozzles with a small interval of K. The conductor is ejected from a nozzle selected from a control device (not shown) that connects them. The inkjet method of the paste is the same for each embodiment. In this embodiment, as shown in FIG. 40 and FIG. 41, a ball screw mechanism, a guide device, and the like are provided by using an electrically controllable motor such as a servo motor, a pulse motor, and a stepping motor as a driving source. The control moving device 260 moves from the side to the body 251 (approaching and leaving) to the front end of the support arm 2 60a which can be controlled to move in the left-right direction (X-axis direction). Insulating layer forming device C, conductor layer forming 65. This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) Please read the notes on the back first

| 4 pages I through IIII Thread 565864 Α7 B7 5. Description of the invention () Device E, each device C, E can enter and exit the above-mentioned space S for stacking, and this insulation layer forming device C enters and exits the stack A ceramic bonding solution is sprayed in the space S to form an insulating layer, and the conductor layer forming device E is used to enter and exit the lamination space S to form a nozzle conductor on the insulating layer to form an electrode layer. The drying device L shows a case where the ceramic adhesive liquid and the conductor are dried to a non-sticky, semi-hardened state by the first embodiment. In addition, it is also possible to use a drying unit that dries the ceramic adhesive solution and the conductor paste by light irradiation as a drying device. In the same manner as described above, the insulating layer forming device C and the conductive layer forming device E are disposed on the opposite side of the body 251. On the side, a ball screw mechanism including a servo motor, a pulse motor, a stepping motor and the like that can be electrically driven as a driving source, and a control moving device 280 such as a guide device are provided to move from the side to the body 251 ( The front end of the support arm 280a, which can be moved in the left and right directions (X axis direction) in such a manner as to approach and leave, can enter and leave the above-mentioned space S for stacking. 0 When the insulating layer forming unit C enters each time For the space S for lamination, the ceramic bonding solution is sprayed to form an insulating layer, and similarly each time the conductor formation unit E enters the lamination space S to spray the conductor materials to form the electrode layer. These units C, Ε are backed up by this drying device. L faces each layer into the same lamination space S, and the insulating layer and the electrode layer are dried to a semi-hardened state. In addition, each time the ceramic bonding liquid is sprayed with the insulating layer forming unit C and the conductor 賫 is sprayed with the conductor layer forming unit, the upper work table ST is controlled to be lowered to a predetermined amount (Z-axis direction), and the crimping is performed. Device R ', by pressing -6 6 ~ This paper size applies Chinese National Standard (CNS) A4 specification (210 x 297 public love) (Please read the precautions on the back before filling this page) -------- Order --------- line; printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed 565864 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed A7 B7 V. Description of the invention () The decline of board 2 5 4 The upper surface of the thin film layer composed of the semi-hardened insulating layer and the conductor layer formed on the work table ST is temporarily pressurized with a predetermined light pressure with a pressure plate 254 on one or more layers, and the upper surface of the thin film layer is pressed. The resulting fine unevenness uniformity ensures flatness and levelness and makes the layers more closely adhered. Next, an operation procedure for manufacturing a laminated body using the manufacturing apparatus of the first embodiment will be described. Fig. 42 shows a case where a laminated body A13 for an inductor is manufactured. That is, the following procedure is sequentially performed: In FIG. 42 (a), the insulating layer forming unit C enters the lamination space S while spraying ceramic adhesive from each adhesive liquid spray nozzle on a predetermined area of the work table ST. The liquid is mixed, and an insulating layer 2 70 serving as a base is formed on this work table ST. In Fig. 42 (b), when this insulating layer forming unit C is retracted, the drying device L enters the stacking space S, and the upper surface of the insulating layer 270 is dried to a non-sticky semi-hardened state. In FIG. 42 (c), when the drying unit L is retracted, the conductor layer forming unit E enters the stacking space S, and the desired conductor 賫 is selected from the semi-hardened insulating layer 270 which becomes the base. The spray nozzle sprays the conductor, and an electrode layer 271 having a predetermined wiring pattern is formed on the insulating layer 270. In Fig. 42 (d), the drying unit L is similarly entered, and the electrode layer 271 is semi-dried. In Fig. 42 (e), the drying unit L is retracted, and the insulating layer forming unit C enters the lamination space S on one side, and the ceramic bonding liquid is sprayed from the selected bonding liquid spray nozzle to bond Liquid filling remains in the electrode layer 271 -6 7-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) IIII 1 II ------丨 丨 Order I ------ -Line (please read the precautions on the back before filling this page) 565864 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (), recessed part 2 between 271 forms a spacer insulation Layer 2 7 3. In Fig. 42 (f), the insulating layer forming unit C retracts, and the drying unit L enters the stacking space s again, and the spacer insulating layer 273 is dried to a semi-hardened state. In Fig. 42 (g), the drying unit L is moved backward and back, and the conductor layer forming unit E enters the stacking space S, and the conductor material is sprayed from the selected carcass paste spray nozzle to form a through-hole electrode 274. Next, in FIG. 42 (h), the conductor layer forming unit is retracted. The drying unit L dries this through-hole electrode 274 to a semi-hardened state. In FIG. 42 (i), the drying unit L moves backward. Except for the end portion of the through-hole electrode 274, ceramic bonding is sprayed through each of the selected adhesive liquid spray nozzles of the insulating layer forming unit C entering the stacking space S to form an insulating layer 275. In FIG. 42 (j), the insulating layer forming unit C is retracted. The insulation layer 2 7 5 is dried with the drying unit L to a semi-hardened state. Then, in Fig. 42 (U), the film layer is temporarily pressure-bonded with the pressure plate 254. Then, repeating the above-mentioned Figs. 42 (C) to (k) as one cycle and repeating the false-pressed laminate in sequence until a predetermined number of false-presses are formed as shown in Fig. 42 (U). The inductor A13. Further, in Fig. 42, (1) to (q) corresponding to Figs. 42 (c) to (k) are continuously described, and the procedures corresponding to (i) to (k) above are omitted. In addition, in the first embodiment, since the insulating layer forming device C and the conductive layer forming device E both adopt the inkjet method, after the insulating layer forming device C having the through hole is formed by the insulating layer forming device C in the previous procedure, Can be inserted in-6 8-1 This paper size is applicable to China National Standard (CNS) A4 specifications (210 X 297 Public Love 1 (please read the precautions on the back first and then «ί write this page) 54 should be ordered: • line" 565864 A7 B7 V. Description of the invention () The procedure of filling the through-hole electrode in the through-hole is used as a half-way procedure to form a laminated body. Next, a second embodiment will be described. This second embodiment relates to a device for manufacturing a laminated body for a capacitor. Because the basic structure of the manufacturing device is the same as the first embodiment described above, the following procedures of the manufacturing procedure shown in Figure 43 (g &gt; as the upper figure 42 U) to (f) are performed using the pressure plate 2 5 4 pairs The thin-film layer composed of the insulating layer 270 and the conductor layer 271 is subjected to a false crimping process. Then, the upper graph (a) to (g) of FIG. 42 are repeated as a cycle (h) to (η), until As shown in (f), a laminated body A14 for a capacitor formed by a predetermined number of dummy crimps is formed. 〇 Next, the third embodiment shown in FIGS. 4 to 46 will be described. In this practical example, a laser drilling device P is provided on the front support 250 of the body 251, and the laser drilling device P is used on the insulating layer. An example of punching a through hole and filling the through hole electrode with the through hole. The laser drilling device P is a ball screw mechanism that uses an electrically controllable motor as a driving source and a control and moving device such as a guide. 2 9 0, in the past Fang Ke K approaches and moves away from the body 251 and supports the front end of the support arm 290a configured to move in the Y-axis direction. A long-shaped support arm 290b extending in the left-right direction (X-axis direction) is provided. The X-axis direction can control and move to support the laser drilling unit P with a laser head, and then the laser drilling unit P is connected to a laser generator, and the control movement in the Y-axis direction of the control moving device 290 is also used. The laser drilling unit P of the wrist 290 b is controlled to move in the X-axis direction, so that the laser drilling device P enters the stacking space S from the front open portion of the body 251, and the laser light emitted from the laser head is applied to the insulating layer. All -69- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ------------ ¾ (Please read the precautions on the back before (Fill in this page) Order --------- Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 B7 V. Description of the Invention () Secondly, the manufacturing equipment using the embodiment shown in Figures 4 and 6 will be explained. The operation procedure of the laminated body for the sensor body is the same as that of the first embodiment shown in Figs. 46 (a) to (d), and Fig. 46 (e) shows the adhesive solution remaining in the electrode layer. The recessed portion 272 on 271, and then the procedure of forming an insulating layer 275 on the entire area above it, and then the drying procedure of FIG. 46 (f) is performed, and the pressing layer 254 of FIG. 46 (g) is used for the insulating layer. The thin film layer composed of the electrode layer is subjected to a procedure of false compression bonding. Then, in Fig. 46 (h), by controlling the laser drilling device P, a through hole 274a is formed by laser processing at a desired position of the upper insulating layer 270. Next, in FIG. 46 (i), the via hole 274a is filled with a conductive paste to form a via electrode 274, and the conductor is sprayed on a predetermined wiring pattern to form an electrode layer 271, and then in FIG. 46 (j), This electrode layer 271 is dried. Then, the recessed portion 272 remaining on the conductor layer 271 is filled with the adhesive solution again, and an insulating layer 2 7 5 is formed on the entire area above it. Fig. 46 (after 10, proceed to Fig. 46 (1 ), And the dummy crimping operation is performed in Fig. 46 (B). Next, the above-mentioned Fig. 46 (h) ~ (πι) are repeated one by one to form a loop as shown in Fig. 46 (g ') The laminated body A15 for an inductor, which is formed by temporarily crimping a predetermined number of thin film layers as shown. In FIG. 46, (η) to (h) to (j) to (j) to (j) to (j) to (h) to (j) are successively described. p), and omit the procedures equivalent to (k) ~ U) above. The fourth embodiment shown in Figs. 47 to 49 will be described below. This embodiment shows a laminated body manufacturing apparatus that performs not only the false crimping but also the true crimping in the upper body 251. -70- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before writing this page if)

I ---- Order --------- Line "Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 B7 V. Description of the invention () The structure different from the first to third embodiments of the above is that: The body 251 is a hollow box-shaped inner body; openings 251b, 251b are formed on the two opposite sides of the body 251 for the upper insulation layer forming device C, the drying device L, and the conductor layer forming device E to enter and exit; And a shut-off device 关闭 that closes the two side openings 251b, 251b so that the stacking space S on the work table ST does not communicate with the outside air; and M and forms a vacuum atmosphere in the stacking space S The vacuum device 1. In the figure, a manufacturing device that does not use a laser drilling device is shown. The opposite openings 251b and 251b on the body 251 are provided with sliding windows or shutters that constitute a blocking device H. This shut-off device Η closes the openings 25 1b and 25 1b so as not to communicate with the outside air in the stacking space S. The vacuum device 1 is an exhaust device (multi-leaf fan) that exhausts the air in the stacking space S to the outside. , Axial flow fan) is provided on the upper plate 251c of the body 251. Also, in this embodiment The crimping device R 'used at the time of the false crimping is also used as the crimping device at the time of the true crimping. In addition, the manufacturing device shown in the third embodiment of the upper part provided with a laser drilling device is located in front of the body 25 1 The part is also made as an open part, forming a three-sided open type, and a window or a sliding door that can slide up and down should be provided in the open part to constitute a blocking device. In this embodiment, when an insulating layer and an electrode layer are formed, Each open portion 251b is kept in an open state. When the insulating layer forming device C, the drying device L, and the conductive layer forming device E are used each time, the laser drilling device P enters and exits the stacking space S from these open portions 251b. These devices C, L, E, and P are returned to the machine's origin position (backward position) -71- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the back first Please pay attention to this page and fill in this page) Order --------- Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 B7 V. Description of the invention (.) When the required number of film layers are formed during the manufacturing process , And perform false compression bonding on the film layer. After the number of layers of the thin film layer is temporarily crimped, each of the open portions 251b is closed with a blocking device, so that the lamination space S is not in communication with the outside air. The vacuum device 1 is used to eliminate the Air, while performing true compression bonding (g ') on the laminated body CS with a predetermined pressure stronger than that of the false compression bonding (see FIG. 49). In this way, it is possible to provide a communication from a space S for lamination, Open the open part 251b of the two-way to four-way body 251, so that the insulating layer forming device C, the drying device L, and the conductive layer forming device E, and the laser drilling device P enters and exits into the stacking space S when necessary, and provides a window Or the shutter closes these open portions 251b and a vacuum device 1 is provided to evacuate the stacking space S to form a tight arrangement of the devices C, L, E, and P around the body. It is a device for manufacturing a laminated body by true pressure bonding K. Next, a fifth invention will be described. This fifth invention uses an insulating sheet, and an electrode is formed on the insulating sheet. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (please read the precautions on the back before this page); Line-time Figure 50 illustrates the outline of the manufacturing device of the fifth invention. This laminated body manufacturing apparatus is arranged in a casing (not shown), and the movable table 2 can be reciprocally mounted on a linear and horizontally arranged guide rail 1 and provided on the upper portion of the movable table 2 The base plate 3 made of stainless steel which can be moved up and down constitutes a work table 5, and the above-mentioned guide rail 1 forms an interval path la allowing the base plate 3 to reciprocate. These structures are the same as those of the embodiment of the first invention. The section path la is a straight path having a width approximately equal to the width of the base plate 3, and an ink jet sprayer 7 as an insulation calendar forming device C is provided on the upper part thereof. 2 ~ This paper size applies the Chinese National Standard (CNS) A4 specification ( (210 X 297 mm) 565864 A7 B7 V. Description of the invention () The nozzle and the inkjet nozzle as the conductor layer forming device E can also be appropriately combined with an additional pressing roller as the pressing device R and a laser punching device P Laser drilling unit. The length of this section path is about 1.5 ~ 2a. In addition, insulating sheet lamination devices K are arranged on both sides of this section path la. With a servo motor or pulsed motor drive (not shown) and a screw shaft rotated by it, the movable table 2 is reciprocated along the long direction (X direction) of the above-mentioned section path, and the base plate 3 is along the above-mentioned section path. Move, and its direction and speed are controlled by the controller. The base plate 3 is also moved up and down by a drive source of a servo motor or a pulse motor and a screw shaft rotated by the drive source. The up-and-down movement of the base plate 3 is controlled by the controller to sequentially lower the base plate 3 in accordance with the lamination program. The ink-jet nozzles as the insulating layer forming device C and the conductor layer forming device E are a plurality of nozzles arranged at minute intervals along the direction M across the path of the section 逑, and the pressing means ϋ also extends along the section of the section path. Provisioning. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs In addition, it is preferable to unitize the upper insulating layer forming device C, the conductor calendar forming device E, the pressing device R, and the laser drilling device P, and make it accessible when necessary. Adjustable setting position. For example, as shown in FIG. 55 and FIG. 56, the support wall 4 d is provided on a portion that becomes the back side of the work table 5, and one or more units are detachably mounted on the support wall 4 d. The above-mentioned insulating layer forming device C, conductive layer forming device E, pressing device R, and laser drilling device P. Since this is the same as the second invention described above, the same reference numerals are used, and descriptions thereof are omitted. The upper insulation sheet stacking device K, as shown in Fig. 54, is provided by an output mechanism 310 that outputs a ribbon T with an insulation sheet ZS attached to it. The size of the paper is adapted to the Chinese National Standard (CNS) A4. Specifications (210 X 297 mm) 565864 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention () The insulation sheet ZS peeled off by object T and transferred to the adsorption transfer mechanism 3 2 0 on the base plate 3 Make up. The above-mentioned ribbon T is composed of an insulating H ZS having a sheet-like ceramic green sheet adhered to the surface of a belt-shaped carrier film k made of a synthetic resin film such as polyethylene terephthalate. The output mechanism 310 has a ribbon T that can be rolled out by the take-up roller 3 12 to output the output roller 311 and is slidably matched with the carrier film k side of the ribbon T in the path between output and winding. A peeling mechanism 3 3 0 provided with an acute angle portion 313 at an end portion on the downstream side (end portion on the side in the conveyance direction) bends the ribbon T conveyed into an acute angle. When the output mechanism 310 is used, since the ribbon T is bent into an acute angle when passing through the upper acute angle portion 313, the insulating sheet ZS attached to the surface can be peeled off. The suction conveying mechanism 3 2 0 is a suction section 321 that sucks or releases the insulating sheet ZS by a vacuum mechanism and can move up and down and can move horizontally along the guide rail 323. The suction section 321 is disposed on the side of the suction section 321. The lower cutting blade 322 is configured, and the suction conveying mechanism 320 sucks and conveys the insulating sheet ZS which is output from the output mechanism 310 and is peeled from the ribbon T and cut into a predetermined shape by the cutting blade 322, and is stacked on the base plate 3 On the prescribed position. In addition, the above-mentioned insulation) = {the laminating device K represents an example of a configuration in which a strip-shaped insulating sheet ZS is cut and stacked on the substrate 3, but an insulating sheet ZS having a predetermined shape may be stacked on the substrate 3 in advance. On the composition. Repeat the insulation / lamination procedure for stacking the insulation sheet ZS according to the above manufacturing equipment (refer to Figure 52 (a) and (d), (h)) ·, spray on the insulation HZS -74- This paper size is applicable to China Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page) Order --------- Line. 565864 A7 B7 V. Description of the invention () Conductor calendar forming procedure (refer to Fig. 52 (b) and (0, (j)) ·, forming an insulating layer forming procedure of spraying a ceramic bonding liquid for a spacer on the insulating sheet zs (see Fig. 52 (c) and (G)) and other procedures, it is possible to form a laminated body for a sensor body at a thickness of 1.6 mm between the respective insulation sheets ZS of the multilayer insulation sheet ZS and a thin film layer provided with a predetermined electrode pattern. A detailed description of the manufacturing process of the upper case is given as an example. (Refer to Fig. 51 (a) and Fig. 52 (a).) The insulating sheet ZS is arranged on the base plate using the adsorption and conveying mechanism 3 2 0 on the left insulating sheet laminating device K. 3. Above, when the base plate 3 is moved from the left end side to the right end side, the conductor is ejected from the inkjet nozzle of the right conductor layer forming apparatus E (refer to FIG. 51 (a )), A conductive layer 341 having a predetermined area is formed on the insulating sheet ZS (refer to FIG. 5 (b)), and the ceramic bonding liquid is sprayed from the inkjet nozzle of the insulating layer forming apparatus C while the substrate 3 is being moved. (Refer to FIG. 51 (a)), an insulating layer 340 is formed between the electrode layers 341 on the insulating sheet ZS and the adjacent portion of the electrode layer 341, thereby forming a thin film layer composed of the electrode layer 341 and the insulating layer 340, S16 (Refer to Fig. 52 (c)). Then, on the electrode layer 3 41 and the insulating layer 3 4 0, an insulating sheet ZS is stacked by the right side suction transfer mechanism 320 (refer to Fig. 51 (b) and 52). (D)) 〇 Further, when the substrate 3 is moved from the right end side to the left end side, the uppermost insulating sheet ZS is crimped to the electrode layer 341 and the insulating layer 3 4 below by the pressing of the right pressing device R 0 (refer to Fig. 51 (b)), during the movement of the base plate 3, the laser punching device P is used as the insulating sheet at the uppermost layer -75- This paper standard applies the Chinese National Standard (CNS) A4 specification ( 210 X 297 mm) (Please read the precautions on the back before filling out this page) Employees ’Intellectual Property Bureau, Ministry of Economic Affairs, Consumer Cooperation Printed

565864 A7 B7 V. Description of the invention (through the through hole 342 at a predetermined position of ZS, and then during the movement of the substrate 3, the conductor is sprayed from the inkjet nozzle of the conductor layer forming device E on the left side (refer to FIG. 51 (b)), The above-mentioned through-hole 342 is filled with this electrode conductor to form a through-hole electrode 3 4 3, and an electrode layer 341 of a predetermined area is formed on the insulating sheet ZS (refer to FIG. 52 (f)). The inkjet nozzle of the forming device C sprays the ceramic bonding liquid (refer to FIG. 51 (b)), and an insulating layer 3 4 0 is formed between the electrode layers 341 on the insulating sheet ZS and adjacent portions of the electrode layers 341, so that A thin-film layer S16 composed of an electrode layer 341 and an insulating layer 3 4 0 is formed (refer to FIG. 52 (g)). Thereafter, the conductive layer 341 and the insulating layer 340 are stacked and insulated by the adsorption transfer mechanism 320 in sequence. Program of the sheet ZS and operation of the pressing device laser drilling device P, the conductor layer forming device E, and the insulating layer forming device C (refer to Fig. 51 (C) and 52 (h) to (j)), and A laminated body A16 for an inductor is formed on the substrate 3. The above procedure is an example of the production of a laminated body for an inductor. Manufacturing process, but the above-mentioned manufacturing apparatus can also manufacture the laminated body A17 for capacitors illustrated in FIG. 53. Here, the process at this time is not described in detail, and it is basically omitting the laser printing process in the winding process. The procedure performed by the hole device P. Next, the laminated body manufacturing device of the sixth invention shown in Figs. 5 to 7 will be described. Fig. 57 shows the outline of the manufacturing device, that is, a vertical support wall not shown in the figure is rotatable. The rotary drum 160 is mounted, and an insulating sheet laminating device K in the manufacturing apparatus of the fifth invention described above is disposed near the lower side of the rotary drum 16G. The insulating sheet ZS is stacked on the rotary drum. -76- This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) ------------- Installation --- (Please read the precautions on the back first to write this Page) Order: Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs .. :::-565864 A7 B7 V. Description of the invention () The insulation sheet lamination device K, K on the working surface 160a, and the recovery is arranged under the rotating drum 160 The laminated body recovery mechanism 180 of the manufactured laminated body. (Please read the (Please fill in this page for the matters needing attention.) The manufacturing device includes a motor (not shown) that drives the upper drum rotating drum 160 and a deceleration control device, a bonding liquid tank that contains a ceramic bonding liquid, and a conductive paste box that contains a conductor. The vacuum mechanism, control box, and wiring device that evacuates the rotary drum .160. The rotary drum 160 is a polygonal drum made of metal such as stainless steel, like the third invention of the upper case (the example in the figure is: 12 corners), and the outer peripheral surface is divided into flat working surfaces 160a, and at the same time, a large number of suction holes 161 are formed in each working surface 160a that can generate a vacuum suction effect. These suction holes 161 have a configuration in which a slide breaker 350 provided on the back side of the working surface 16fla is opened when the insulating sheet ZS is sucked, and closed when the insulating sheet ZS is detached. The rotating drum 116 is rotated by a motor to rotate continuously or intermittently. When the rotation is stopped, the insulating sheet ZS supplied by the adsorption conveying structure 320 of the insulating sheet laminating device K can be adsorbed on the adsorption conveying mechanism 3 2 0. The working surface 160a of the portion 321 is opposite. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The above-mentioned insulating sheet stacking device K has substantially the same configuration as the insulating sheet stacking device of the manufacturing apparatus of the fifth invention, and therefore K will not be described in detail. In short, the belt T composed of the insulating sheet ZS and the carrier film k is output from the drum 311, and is wound on the winding drum 312, and the peeling mechanism 3 3 is used during the path between the output and the winding. 0 Peel off the insulating sheet ZS from the ribbon T, and use the cutting blade 3 2 at the same time 2. Cut it into a predetermined shape, and then suck it by the suction unit 321 to transfer it to the work surface -77- paper size Applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 565864 A7 B7 V. Description of the invention () 160a is superimposed on the working surface 160a after facing the position. In addition, the rotary drum 160 is provided with a work table or a standby table, and in the stopped state during intermittent rotation, each work is performed against each of the work surfaces 160a, and these work tables ST are appropriately arranged in a clockwise direction. The first pressing device R1, the laser drilling device P, the conductive layer forming device E, the insulating layer forming device C, the second pressing device R2, and the like are provided. Furthermore, if necessary, the laser drilling device P and the conductive layer forming device E, Each device of the insulating layer forming device C is provided with a CCD camera unit Q. Each of the first pressing device R1, the laser drilling device P, the conductor layer forming device E, and the insulating layer forming device C has a working surface 160a in the X-axis direction (the circumferential direction of the rotating drum 160) and the Y-axis direction. (The width direction of the rotating drum 16G), and can control this amount of movement, and can move up and down in the Z-axis direction (contact and separation direction) perpendicular to the working surface 160a, and can control this amount of movement . The second pressing device R2 is an example of a pressure plate that moves up and down in the Z-axis direction on the work surface 160a, and the laminate is stacked on the work surface 160a in the final stage of pressing by lowering the pressure plate. In order to improve the adhesion between the insulating sheet and the electrode layer and the insulating layer, the layers are made uniform. In addition, the CCD camera unit Q captures the fiducial mark on the insulating sheet with M and transfers it to the image processing apparatus. Based on this, the above-mentioned laser drilling device P, conductor layer forming device E, and insulating layer forming device are used. C Positioned in the X-axis direction and the Y-axis direction for position control, or used to find pinholes in the insulation layer and broken wires in the electrode layer. In addition, the above-mentioned laminated body recovery mechanism 180 uses a rotating drum 160-7 8-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the precautions on the back before moving (Write this page) • -Good i &lt; —Order --------- line k Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Α7 Β7 V. Description of the invention ( In the final stage of forming the laminated body on the working surface 160a by a predetermined number of rotations, the laminated body is received by the recovery table 181, and then the device is stored in the recovery box 184 by the recovery arm 183 (see FIG. 31 above). When the laminated body recovery mechanism 180 receives the laminated body, by closing the slide breaker 350 on the back side of the working surface 160a of the recovery stage 181, the suction hole 161 of the 16 Da working surface is closed to stack the laminated body. The body disengages the role of the vacuum attraction inside the rotating drum 160. In addition, according to the above manufacturing equipment, when the rotating drum 160 intermittently rotated in the clockwise direction is stopped, the insulating sheet laminating device K, the first pressing device R1, and the laser punching are arranged to face each of the working surfaces of the above 160 a. The device P, the conductor layer forming device E, the insulating layer forming device C, the second pressing device 82, and the laminated body recovery mechanism 180 are operated to produce a laminated body. The operation sequence of the above devices and mechanisms will not be described in detail here. However, for example, in the case of manufacturing a laminated body for an inductor, in accordance with the laminated sequence shown in FIG. 52 above, when the rotary drum 160 is intermittently rotated, In the stopped state, the above-mentioned devices and mechanisms opposed to the respective working surfaces 160a are operated, and a layer II body can be manufactured. In addition, in the above-mentioned manufacturing apparatus, a preferred embodiment in which a pressing device including a first pressing device βΐ and a second pressing device R2 is provided is provided. However, any one of the pressing devices is omitted. When setting the insulation sheet, or after stacking the last insulation sheet, press the top of the insulation sheet with a pressing device without omitting one of them. Next, a laminated body manufacturing apparatus of a seventh invention shown in FIG. 58 will be described. This manufacturing device has: the body 361 is set on the support table 3 6 0, and the paper size is -79-. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) --- I--I--I- i! articles! (Please read the precautions on the back before filling out this page) Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 B7 V. Description of the invention () One of the left and right positions (positions in the X axis direction) of this body 361 is equipped with spray The insulating layer forming device C of the ceramic adhesive liquid and the conductive layer forming device E of the spray conductor 賫, and the laser drilling device P, K for passing through holes are arranged on the insulating sheet ZS, and the upper part of the insulating sheet ZS is pressed by a roller. The first pressing device R1 has a configuration in which an insulating sheet laminating device K is provided on the other side. The body 361 has a lower plate 361a of a box-shaped body having openings 361b and 361b formed on two opposite sides, and a base plate 3 6 2 is movably arranged (movably controlled along the Z axis direction). The upper plate 36 1a of the main body can be controlled to move up and down (controllable to move along the Z axis direction) and the base plate 3 6 2 枏 to support the second pressing device R2 on the ground, and the upper surface of the base plate 362 and the second pressing device R2 The space used as the stacking space S plus K is used as a stack. Further, on each lower side of both ends of the upper plate 361c of the body 361, blocking devices Η, Η, which open and close the openings 361b, 361b, such as a sliding window or a shutter, are provided. A vacuum device 1 for placing a vacuum atmosphere on the stacking space S when the two interrupting devices Η, Η are not placed in communication with outside air is placed on the upper side. The above-mentioned base plate 362 has a table control mechanism 3 704 formed by a ball screw mechanism and a guide device, which are electrically driven by a servo motor, a stepping motor, and the like that are connected to the support, and are provided as a driving source. The structure of the vertical control movement, and the second crimping device R2, in this embodiment has a pressure plate control composed of a ball screw mechanism with a controllable motor as a driving source and a guide device. The mechanism 3 80 is configured to support the pressing plate on the upper plate 361 c of the main body so as to be vertically movable. -8 0-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) — — — — — — — — — — — — — — — — 11 — — — — — — &lt; (Please read the precautions on the back before filling this page) 565864 Α7 Β7 V. Description of the invention () Insulation layer forming device C, conductor layer forming device E, laser drilling device P, and first pressing device 11 The control arm 331 is a directional control device 390 which is provided at the front end of the support arm 391 and has a ball screw mechanism and a guide device, which are driven by an electrically controllable motor such as a servo motor and a stepping motor. A structure that can be moved (approached and separated) from the side toward the body 361 to enter and exit the above-mentioned stacking space S. The insulating sheet laminating device K is composed of an output mechanism 310 that can peel off the insulating sheet ZS from the strip T that has the same structure and output as the insulating sheet laminating device K of the above-mentioned manufacturing device, and adsorbs the tape from the belt shape. The insulation H ZS from which the object T is peeled off is configured by a suction transfer mechanism 3 2 0 that transfers it to the base plate 362. The above-mentioned adsorption and conveying mechanism 320 printed by the employee's consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs has: an adsorption section 321 that adsorbs or releases the insulating sheet ZS by a vacuum mechanism, and is vertically arranged at the front end of the support arm 400, The rear end portion of the support arm 400 can be horizontally moved along a guide rail 323 fixed to a support wall (not shown), and a downward cutting blade 322, κ is provided on the side of the suction portion 321. The suction part 321 is adapted to suck and transport the insulating tape ZS peeled off by the above-mentioned output mechanism 310 and cut with a cutting blade 3 2 2, and then stack it on a predetermined position on the base plate 362. Therefore, according to the above manufacturing equipment, the insulating sheet laminating device K, the insulating layer forming device C, the conductive layer forming device E, the laser drilling device P, and the first pressing device R1 are put in and out of the laminating space, and are placed on the substrate. A thin film layer provided with a predetermined electrode pattern is formed on the insulating sheet ZS on 362. After repeating these devices in and out to form a laminated body, the devices are retracted and covered with left and right -8 1-This paper size applies to China Standard (CNS) A4 specification (210 X 297 mm) 565864 A7 B7 V. Description of the invention () Breaking device Η, Η Close the two openings 361b, 361b, and use the vacuum device 1 to remove the air in the stacking space S, and further The second pressing device R 2 is used to pressurize the laminated body (true compression bonding) to remove air remaining between the insulating H ZS and the thin film layer and inside the thin film layer, so as to improve the adhesion between the insulating sheet ZS and the thin film layer. All layers are homogeneous and integrated. The operation sequence of each of the above devices and mechanisms is not described in detail, but for example, in the case of manufacturing a multilayer body for an inductor, the upper devices are moved in and out according to the stacking sequence shown in FIG. 52 above. The floor space S is sufficient. In addition, the above manufacturing apparatus shows a preferred embodiment in which both the first pressing device R1 and the second pressing device R2 are provided as pressing devices, but the first pressing device R1 may be omitted and the insulation may be laminated each time. When the sheet ZS is used, or after the last insulating sheet ZS is laminated, the second pressing device R2 is used to perform false compression bonding and true compression bonding on the top of the insulating sheet. In addition, the manufacturing apparatus may have a configuration in which the blocking device and the vacuum device are omitted, and the upper surface of the insulating sheet is pressed in an atmosphere of atmospheric pressure. Also, in the manufacturing process of the laminated body shown in FIG. 52, the process of forming the electrode layer and the process of forming the insulating layer (FIGS. 52 (b) and (c), and (f) and (G)) Upside down. In addition, the laminated body manufactured by the present invention may not only follow the described inductors and capacitors, but may also include laminated electronic components such as laminated substrates, resistors, and magnetic bodies. According to the present invention, since the insulating layer forming device, the conductive layer forming device, and the drying device are provided on the linear section path of the base plate reciprocating, the procedures are effectively performed during the forward movement of the base plate and the reciprocating movement. -82- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 x 297 mm) (Please read the precautions on the back before filling out this page) Packing 1 1 n Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 565864 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention () The company can efficiently produce each thin film layer of the laminated body, and can shorten the manufacturing time of these laminated bodies to improve productivity . In addition, as long as the necessary and minimum number of the above-mentioned insulating layer forming devices, conductor layer forming devices, and drying devices can be provided in parallel, the necessary length of the path between the upper and lower sections can be shortened, and a practical small device can be provided. This provides an inexpensive manufacturing apparatus. Moreover, because at least one of the drying devices can be arranged in the approximate central portion of the path of the upper loop, K can effectively connect the mine to perform the insulation layer formation process and the conductor layer (electrode layer, resistor, magnetic body, etc.) formation process. And other work procedures, and can minimize the path of the movement zone of the substrate, and promote miniaturization of the device. In addition, if an inkjet method is used on at least one K in the upper insulation layer forming device, an insulation layer filled with a ceramic bonding solution or an insulating resin #, etc., in the recessed portion between the electrode layers can be formed with high accuracy. It is possible to remove the cause of the occurrence of voids, ensure the flatness of the insulating layer, and ensure the quality of the manufactured electronic component. In addition, because the upper conductor layer forming device sprays the conductor layer by an inkjet method, the conductor layer forming device can be used to directly spray the conductor layer on the electrode pattern, and it is possible to accurately and reliably perform the hole formation without forming a through hole. A via electrode is quickly formed. On the other hand, even when a through-hole coupling is made by a laser drilling method, a conductor layer can be filled with a conductor layer forming device, and a through-hole electrode can be accurately formed. Because it can be crimped on top of the formed film layer, it can be -8 3-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -------- ^- -------- ^ (Please read the notes on the back before filling this page) 565864 A7

V. Description of the invention () Enough to planarize the unevenness on the insulating layer and the electrode pattern formed by the insulating layer forming device and the conductor layer forming device, improve the lamination accuracy of the next film layer, and increase the accuracy with the lower film layer. The tight adherence of each calendar enables homogeneous integration of each calendar, thereby providing a high-quality laminated body. In addition, in addition to the above-mentioned pseudo-crimping function, fine particles of ceramic adhesive or conductive materials can be removed so that they do not mix with each other, so that a higher quality laminated body can be manufactured. Because the prescribed work can be performed efficiently in the programs when the substrate is moved forward and when it is reciprocated, the thin film layers of the laminated body can be efficiently produced, and the manufacturing time of these laminated bodies can be shortened to improve productivity. . In addition, since the upper insulating layer is formed into a unit, the conductor layer forming unit and the drying unit can be separately mounted on and detached from the casing, and the units can be easily assembled, and by changing the unit's The arrangement can be set on a manufacturing device of a multilayer electronic component such as a capacitor, an inductor, a resistor, a magnetic body, and a multilayer substrate, and thus it is possible to provide an inexpensive and compact device having a wide range of applications. In addition, because the upper insulating layer forming unit and the conductor layer forming unit use an inkjet method, it is possible to form a fine and dense layer, and it is possible to fill a recessed portion between the electrode layers with a ceramic bonding solution or the like to form a high-precision layer. The insulating layer enables the conductor paste to be filled with a conductor layer forming unit even when a through hole is punched out by a laser drilling method, thereby forming a through hole electrode with high accuracy. Furthermore, since the false compression bonding is performed on the formed thin film layer, the unevenness on the insulating layer formed by the insulating layer forming unit, the conductive layer forming unit, and the electrode pattern can be uniformly planarized, thereby improving the next thin film-8 4 -This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling out this page) 0. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

A nnn in ϋ II ϋ I ϋ I n 1 I nn ϋ nn II in I ϋ nn ϋ I ϋ B— ϋ I 565864 Printed by A7 B7 of the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Accuracy and improved adhesion to the underlying thin film layer make each layer homogeneous and integrated, thereby providing a high-quality laminated body. In addition, since the surface state of the formed thin film layer is detected by the CCD camera unit, pinholes in the insulating layer and disconnection of the electrode layer can be found. Therefore, the yield of the laminated body can be improved, and the productivity can be improved. In addition, it can be found that the nozzle holes of inkjet nozzles and the like are clogged for easy maintenance inspection. Because of the intermittent rotation of the polygonal rotating drum and performing predetermined operations on each work surface, each layer of the laminated body can be efficiently produced, and multiple laminated bodies can be produced simultaneously, so it can be shortened. Manufacturing time improves productivity. In addition, since each working surface is rotated by a rotary drum, the company can provide a compact manufacturing apparatus with a small equipment footprint. In addition, since the carrier film wound on the rotating drum is used, it is possible to reliably maintain the laminated state of the thin film layers on the work surface, and it is easy to recover the laminated body. Further, the tension state of the carrier film K can be brought into close contact with each work surface. Furthermore, the time required for one rotation of the rotary drum can be shortened, and the manufacturing speed of the thin film layer can be increased to improve productivity. In addition, if the inkjet nozzle method is used for the insulating layer forming device, a dense insulating layer can be formed to improve the insulation accuracy. At the same time, the position of the conductor layer forming device can be accurately formed by controlling the insulating layer forming device of the inkjet method. Electrode pattern. In addition, the upper surface of the insulating layer formed by the inkjet method can be flattened and uniformized to achieve homogenization, and a laminated body such as an inductor having a through-hole electrode can be easily and reliably manufactured. Binder-85- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ----------------- 111 ------ line (Please read the precautions on the back before filling in this page) 565864 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention () and the fine unevenness generated on the conductors are uniformized to ensure flatness The lamination is uniform and improves the lamination accuracy. In addition, the laminated body formed on each working surface of the rotary drum can be easily and surely recovered, and a structure can be easily arranged in the installation space of the cymbal body recovery mechanism. Because the insulation layer forming device, the conductor layer forming device, and the drying device can be installed above and below the work table, respectively, after the work table position is determined, the insulation layer forming device, the conductor layer forming device, and the drying device can be used. A predetermined operation is performed by entering and exiting to form a thin film layer, so that each thin film layer of the laminated body can be efficiently produced, and by increasing the manufacturing speed of these laminated bodies, manufacturing time can be shortened and productivity can be improved. In addition, when the inkjet method is used as the insulating layer forming device, the conductor layer and the insulating layer can be formed with high accuracy and density. In addition, the insulating layer can be formed by filling the recessed portions remaining between the electrode layers with the ceramic adhesive solution, so that the cause of the voids can be eliminated, the flatness of the insulating layer can be ensured, and the electronic components manufactured can be effectively maintained. quality. In addition, through-holes are formed by an ink-jet-type insulating layer forming device, and an ink-jet-type conductor layer forming device is used to fill the through-hole electrodes between the electrode layers in the through-holes, so that the through-holes can be accurately and accurately formed. Via electrode. In addition, when the film layer is temporarily crimped with the dummy crimping device, the insulation layer formed by the insulating layer forming device and the conductor layer forming device and the unevenness on the conductive pattern can be evenly planarized, thereby improving the stacking of the next film layer. The layer accuracy is improved and the close adhesion with the lower film layer is made so that each layer is homogeneous and integrated. 8 6- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Please read the precautions on the back page IIIII Line appeal 565864 A7 B7 V. Description of the invention () To form a high-quality laminated body, and at the same time, it can prevent the 'problem such as shape collapse during true compression bonding, which reduces the yield. Furthermore, when a layout in which the dummy crimping device is arranged on the work table facing each other across the space of the stack is used, the only remaining upper space around the work table can be effectively used to install the dummy crimping device. Under the function of the device, further miniaturization is achieved, making the entire device more compact and solid. Furthermore, when each device (insulating layer forming device, drying device, conductor layer forming device, etc.) is retracted, a stacking space above the worktable can be closed so that the stacking space is not in communication with outside air. The interrupting device and the vacuum device for forming a vacuum atmosphere in the stacking space can provide a small and convenient space that can be compact and convenient for stacking the stacked body while performing the real crimping operation. Manufacturing device. In addition, when a structure is provided in which the laser drilling device can be moved in and out of the work table, even if an insulating layer forming device such as a doctor blade coating method or a roller coating method is used to form an insulating layer, a through hole can be formed, and the through hole can be formed. Through-hole electrodes are formed with high accuracy. In addition, since an insulating layer forming device, a drying device, a conductor layer forming device, and a laser drilling device are arranged around the above-mentioned work table, a through hole and a through-hole electrode are formed by punching and stacked. When a manufacturing apparatus of a laminated body is subjected to false compression bonding or true compression bonding, the miniaturization and space saving of the manufacturing device can be achieved. Since a thin film layer having a predetermined electrode pattern is formed between the insulating sheets of the multilayer insulating sheet, the insulating sheet is sandwiched between the thin film layers, so that the flatness of each thin film layer can be improved. -87- This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) (Please read the note on the back 3 to write this page) Binding------- Staff of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the Consumer Cooperative 565864 Α7 B7 V. Description of the invention () In addition, because the insulating sheet is stacked on the thin film layer, it is more flat than an insulating layer formed by spraying a ceramic bonding solution (the upper and lower layers of the film layer with the electrode layer) Insulation layer) can shorten the working time. Therefore, in addition to being able to accurately form a thin film layer having an electrode (conductor) pattern with high accuracy, it is possible to form an insulating layer above and below the thin film layer from an insulating sheet in a short time. As a result, it is possible to efficiently Produces high-quality laminates with high internal accuracy. In addition, since predetermined operations are effectively performed in each program when the substrate is moved forward and when it is reciprocated, the thin film layers of the laminated body can be efficiently produced, and the manufacturing time of these laminated bodies can be shortened and improved. Productive. In addition, since only the necessary and minimum number of the above-mentioned insulating layer forming devices and conductor layer forming devices are required to be provided in parallel, the required length of the section path can be set short, and a practical compact device can be provided. Since the number of devices is small, an inexpensive manufacturing device can be provided. Furthermore, since each of the above-mentioned insulation layer forming devices and conductor layers are formed into a unit, and it can be attached to and detached from the casing, the arrangement of these units is easy to perform, and by changing The arrangement of each unit can respond to the production needs of a variety of laminates, and can provide a small device that is inexpensive and has a wide range of uses. Furthermore, because the polygonal rotating drum is intermittently rotated and predetermined operations are performed on each of its working surfaces, each layer of the laminated body can be efficiently produced, and multiple laminated bodies can be simultaneously produced. , So it can shorten manufacturing time and improve productivity. -8 8-This paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) ------------- (Please read the precautions on the back before filling this page) Order --------- Line. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A7 B7 V. Description of the invention () kjcd · Figure, Figure 4 U) ~ (d) show the third embodiment The side of the work procedure (please read the precautions on the back before filling this page) tsa · garden, Fig. 5 (a) ~ (d) are side views showing the work procedure of the fourth embodiment; (Fig. 6 U) ~ (E) is a side view showing a work program of the fifth embodiment; (a) to (d) of the seventh picture are side views showing a work program of the sixth embodiment; and (a) to (e) of FIG. 8 are A side view showing a working procedure of the seventh embodiment

IjezI, Fig. 9 (a) to (e) are rounded circles showing an operation procedure of the eighth embodiment, and Fig. 10 is an enlarged view showing an insulation layer formation procedure using an insulation layer forming apparatus; Fig. 11 It is an enlarged view showing a spacer insulating layer forming procedure using an insulating layer forming device. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. FIG. 12 is an enlarged view showing an electrode layer forming procedure using an insulating layer forming device. FIG. 14 is an enlarged view showing an insulating layer forming process using an insulating layer forming apparatus. FIG. 14 is an enlarged view showing a via hole electrode forming process using a conductor layer forming apparatus. FIG. 15 is an enlarged view showing a drying process using a drying apparatus. Figure; -9 0-This paper size applies Chinese National Standard (CNS) A4 (210X297 mm) 565864 A7 B7 V. Description of the invention () Drawing 16 is an enlarged view showing a specific example of a false crimping device; (please (Read the precautions on the back before filling in this page.) Figure 17 is an enlarged view showing another embodiment of the insulating layer forming apparatus. Figure 18 is a diagram showing a laminated body manufacturing apparatus according to the second invention. Fig. 19 is a partially cut-away side view of Fig. 18; Fig. 20 is an oblique view illustrating the installation structure of each unit; Fig. 21 is an enlarged partial sectional view showing the installation structure of each unit; Fig. 22 FIG. 23 is a perspective view illustrating another example of a mounting structure of each unit. FIGS. 23 (a) to (e) are front views illustrating an operation procedure of the first embodiment of the second invention. FIGS. 24 (a) to (d) ) Is a front view illustrating the working procedure of the second embodiment; FIGS. 25 (a) to (d) are front views illustrating the working procedure of the third embodiment; FIGS. 26 (a) to (d) are explanatory views A front view of the working procedure of the fourth embodiment; FIGS. 27 (a) to (e) are front views illustrating the working procedure of the fifth embodiment; (U) to (e) of FIG. 28 are operations illustrating the sixth embodiment. Front view of the program; Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 29 is a front view showing the outline of the laminated body manufacturing apparatus of the third invention. Figure 30 is a reverse view of the apparatus of Figure 29. Figure 31 It is an enlarged view of the main part in Fig. 29; Figs. 32 (a) to (P) are operations showing the first embodiment of the third invention- 91- This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm) 565864 A7 ___B7_ V. Description of the invention () Outline drawing of the procedure; Figure 33 (U) to (p) are illustrations of the second embodiment Outline of the working procedure (please read the precautions on the back before filling this page) Figure, · Figure 34 is an enlarged sectional view of the working procedure for forming an insulating layer using an adhesive liquid spraying unit; Figure 35 is a conductive paste spraying device An enlarged cross-sectional view of an operation procedure for forming an electrode layer and a fiducial mark; FIG. 36 is an enlarged cross-sectional view of an operation procedure for forming a barrier insulating layer and a through-hole electrode using an adhesive liquid spraying device and a conductor layer forming device; An enlarged view of a main part of another embodiment of the manufacturing apparatus, which is opposed to FIG. 29; FIGS. 38 (a) to (q) are schematic diagrams of a procedure for manufacturing a laminated body using the apparatus of FIG. 37; 39 is an enlarged cross-sectional view of an operation procedure for forming an insulating layer using an adhesive liquid spraying device of a doctor blade method; FIG. 40 is a front cross-sectional view schematically showing a first embodiment of a laminated body manufacturing apparatus of a fourth invention; Printed by the Intellectual Property Cooperative of the Ministry of Intellectual Property, Figure 41 shows a plan cross-sectional view of the body that crosses Figure 40; Figures U) to (r) are procedures for manufacturing laminated bodies (for inductors) Fig. 43 is a schematic diagram of a first embodiment; Figs. 43 (a) to (f ') are schematic diagrams of a second embodiment illustrating a procedure for manufacturing a laminated body (for a capacitor); and Fig. 44 is a schematic diagram showing a third embodiment Example of a side view of a Mann body manufacturing device, in which the drying device is omitted; -92- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 565864 Printed by A7 _B7___ 5. Description of the invention () Figure 45 schematically shows a plane cross-section circle that crosses the body; Figures 46 (a) to (g,) are outline circles explaining a procedure for manufacturing a laminated body according to the third embodiment; Fig. 47 schematically shows a front side view of a day-layer body manufacturing apparatus according to a fourth embodiment; Fig. 48 schematically shows a plan cross-sectional view of a cross-section of a machine body; Fig. 49 is a schematic diagram showing a true crimping state; Fig. 50 The lamination of the fifth invention is schematically shown Front view of the manufacturing apparatus; Section 51) U) to (c) are cross-sectional views showing a manufacturing process of a day-layer body according to the manufacturing apparatus; and Section 5 2 (a) to U) are more detailed stacked bodies FIG. 53 is a cross-sectional view showing another example of a laminated body manufactured by the same manufacturing apparatus; FIG. 54 is an enlarged view of an insulation / layering apparatus; FIG. 55 is a view showing a removable An oblique view of an example of a configuration in which an insulating layer forming unit, a conductor layer forming unit, and a pressing unit are respectively mounted on a supporting wall; FIG. 56 is a view showing a detachably attaching an insulating layer forming unit, a conductive layer forming unit, and a pressing unit A perspective view of another example of the configuration on the supporting wall; FIG. 57 is a front view of the laminated body manufacturing apparatus of the sixth invention; FIG. 58 is a front circle of the laminated body manufacturing apparatus of the seventh invention. -93- (Please read the precautions on the back before filling this page) This paper size is applicable to China National Standard (CNS) 8 4 specifications (210X 297 mm) 565864 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Description of the invention () Symbol description la .... Interval path 2 ... • • Movable stage 3____ • Base plate 11… • • Barrier insulation layer 12… • Electrode (conductor) layer 13…… Insulation layer 14… • Via electrode 140. Insulation layer 160… • Rotating drum 161. • Attachment hole 160a • • Working surface 170. • .Supply mechanism 180…, Laminate recovery mechanism 181 * • Recycling table 183… .Recycling arm 184 • Recycling box 190…. Platen 311 · • • Roller 312 · · • Take-up roller 320... With attached conveying mechanism 321... Suction section 322. • • • Cutting blade 350 &quot; 361,,. Body 361c, • upper plate 390 ..… mobile device 391 .. • support arm 1 Α… »• day Body C____, adhesive liquid spraying device E____, guide layer forming device f____. Carrier film Η ____ 2Mit, · Interruption device L____ • Drying device P____ Light punching device Q · ... • CCD camera unit R____ pressure roller R1 ... 1 Pressing device R2…… 2nd pressing device R,… • Pressing device R ”.. Pressing unit S____ • Space S1… • Film layer τ ____ • Ribbon-94- (Please read the precautions on the back before filling (Page) This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm)

Claims (1)

565864 A8 B8 C8 D8 __ VI. Scope of patent application (please read the precautions on the back before filling out this page) 1. A laminated body manufacturing device, which includes: reciprocating on a linearly defined path, and moving up and down A base plate is provided, and one or more insulating layer forming devices capable of discharging ceramic adhesive liquid or insulating resin materials are respectively arranged along the path of the section, and the conductive layer forming device for ejecting the conductors by an inkjet method is provided, and the above A drying device for drying the adhesive solution and the conductor; the substrate is formed on the insulating layer with a predetermined electrode (conductor) pattern during the one or more reciprocating movements on the section path, and these processes are repeated to form Laminated body. 2. The laminated body manufacturing device according to item 1 of the patent application, characterized in that at least one of the drying devices is arranged at a substantially central portion of the path of the upper loop. 3. For a laminated body manufacturing device according to item 1 of the patent application scope, at least one of the insulating layer forming devices sprays a ceramic adhesive liquid or an insulating resin 依 by an inkjet method to form an insulating layer. 4. For a laminated body manufacturing device in the scope of patent application No. 1 or 3, printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy, where the insulating layer forming device includes a recessed portion between the electrode layers formed by the conductive layer forming device Alternatively, a predetermined region excluding the region where the electrode layer is formed is filled with a ceramic adhesive solution or an insulating resin paste. 5. For the laminated system and manufacturing device in the scope of patent application No. 1, it is characterized in that the conductor layer forming device sprays on the above electrode pattern according to the inkjet method. -95- This paper standard applies to China National Standard (CNS) A4 Specifications (210 X 297 mm) 565864 A8 B8 C8 D8 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs VI. Patent application scope Radio conductors form through-hole electrodes. 6. The laminated body manufacturing device according to item 1 of the scope of patent application, characterized in that a laser drilling device for punching through holes is provided on the above-mentioned insulating layer, and the above-mentioned conductor layer forming device is used to fill the conductor fee into the drilling hole. Through-hole electrodes formed by the device form through-hole electrodes. 7. A laminated body manufacturing device, comprising: a base plate is provided for reciprocating and up-and-down movement on a linear predetermined section path, and one or more spit-out ceramic bonding liquids are respectively provided on the section path. Or an insulating layer forming device of an insulating resin wheat, a conductive layer forming device that sprays conductive materials by an inkjet method, and a drying device that dries the adhesive liquid and the conductor; the upper base plate is once or more along the path of the section. During the reciprocating movement, a thin film layer provided with a predetermined electrode (conductor) pattern is formed on the insulating layer. These processes are repeated to form a laminated body, and a dummy crimp is provided to press the above-mentioned thin film layer when appropriate. Device. 8. The laminated body manufacturing device according to item 7 of the scope of patent application, characterized in that the dummy crimping device is in contact with a ceramic adhesive liquid or an insulating resin 赍, a conductor green, which is dried by a drying device, and has A very small sticky pressing roller brings the sticky dust-removing roller into contact with the roller. 9. A laminated body manufacturing device, comprising: a base plate can be reciprocated and moved up and down in a predetermined section on a workbench, and the workbench -96- This paper size is applicable to the Chinese National Standard (CNS) A4 specification ( 210 X 297 mm) (please read the notes on the back side and fill in this page) _ MM w Μ MM an ·! · W side ϋ ϋ ϋ I ii atf ϋ nnn I n ϋ ϋϋ an nnnn I ϋ-565864 A8 B8 C8 D8 6. Scope of patent application (please read the precautions on the back before filling out this page) There are multiple supporting parts above, and one or more of them will spit out ceramic adhesive liquid or insulation Resin, insulating layer forming device, conductive layer forming device for spraying conductive paste, and drying device are detachably mounted on these supporting members, and the substrate is formed on the insulating layer during one or more reciprocating movements on the above-mentioned section path. A thin film layer having a predetermined conductor pattern is arranged, and these processes are repeated to form a laminate. 10. The laminated body manufacturing device according to item 9 of the application, wherein the conductor layer forming device is an inkjet method that sprays a conductor to form a conductor layer, and at least one of the insulating layer forming devices is a sprayed ceramic adhesive. Liquid-jet or ink-jet system with insulating resin or insulating resin. 11. The laminated body manufacturing device according to item 9 of the scope of patent application, which is further characterized in that the above-mentioned support member is a laser drilling device detachably provided in the insulating layer to punch through holes. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs12. A laminated body manufacturing device such as any one of claims 9-11, which is characterized in that the laminated support film is further detachably provided on the upper support member Press the upper dummy crimping device at the appropriate time. 13. The device for manufacturing a layered body according to item 12 of the application, further comprising a CCD camera device detachably provided on the upper support member to detect the state of the thin film layer and perform imaging. -97- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 565864 A8 B8 C8 D8 VI. Application for patent scope 18. If the laminated body manufacturing device of the 17th scope of the patent application, its characteristics When the upper conductor layer forming device starts to work on each work surface, the device attaches a reference mark to a carrier film, and works to arrange the above-mentioned conductor layer forming device and an ink-jet-type insulating layer forming device. The station is equipped with a C CD camera, and performs image processing on the upper fiducial mark taken by the camera to determine the positions of the conductor layer forming device and the insulating layer forming device. 19. The laminated body manufacturing device according to item 14 of the patent application, characterized in that the insulating layer forming device forms an insulating layer by an inkjet method, and a dummy crimping device for pressing the insulating layer is arranged on the following workbench. . 20. The laminated body manufacturing device according to item 14 of the scope of patent application, characterized in that a conductor layer forming device and an insulating layer forming device are arranged on one workbench of the rotary drum, and the conductor layer is sprayed with the body layer forming device. A through-hole electrode is formed on the formed electrode pattern, an insulating layer forming device is used, and an insulating layer is formed by filling a ceramic adhesive solution or an insulating resin paste between the electrode layers formed by the conductor layer forming device. 21. If the daytime layer manufacturing device according to item 14 of the scope of patent application, it is a dummy crimping device that is provided on a working table of the above-mentioned rotating drum and is arranged to press the above-mentioned film layer at an appropriate time. 22 · —Special layer manufacturing equipment, its special features include: -99- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs δ * nn «ϋ nn II ϋ — 1 11 ϋ II— nn II -1- i-I n I i ^ i 11 ϋ II-n — ϋ I 565864 0 ^ 888 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, and applied for a patent encircling device. With the upper insulation layer forming device, the drying device and the conductor layer forming device repeatedly entering and exiting above the workbench, the insulation layer on the workbench A thin film layer in which a predetermined conductive pattern is arranged is formed, and the insulating layer forming device, the drying device, and the conductive layer forming device are repeatedly put in and out to form a laminate including a predetermined thin film layer. 25. The laminated body manufacturing device according to item 24 of the patent application, further comprising a dummy crimping device for pressing one or more thin film layers each time these thin film layers are formed. 26. The laminated body manufacturing device according to claim 25 in the scope of patent application, characterized in that the above-mentioned false crimping device is disposed above the workbench, and at the same time, a space for stacking the upper film layer is ensured between the dummy crimping device and the workbench. . 27 · A laminated body manufacturing device, comprising: a crimping device is provided above a work table, and a ceramic bonding solution or an insulating resin is ejected between each of the work table and the crimping device. The insulating layer forming device sprays the conductive layer forming device of the conductor 和 and the drying device for drying the adhesive solution or the conductive paste in an inkjet manner. When the insulating layer forming device, the drying device, and the conductive layer forming device are retracted, at least Provide a blocking device to prevent the stacking space above the work table from communicating with the outside air, and at least a vacuum device to form a vacuum atmosphere in the stacking space; whenever the upper insulation layer forming device, drying device, and conductor are repeatedly installed Layer-10 1- This paper size applies to China National Standard (CNS) A4 (210 X 297 meals) -------- ^ --------- ^ ^ W1 (Please read the back first Please note this page before filling in this page) 565864 A8 B8 C8 D8 VI. Patent application scope (please read the precautions on the back before filling this page) When the device enters and exits to form the required number of film layers, press with the crimping device, When a predetermined pressure to the film layers, the blocking means blocking the laminated space, one side of the vacuum device is operated, the side crimp the crimping means true laminate. 28. The laminated structure manufacturing device according to any one of claims 24-27, wherein the above-mentioned insulating layer forming device sprays a ceramic adhesive liquid or an insulating resin paste by an inkjet method to form a laminated body. 29. The laminated body manufacturing device according to any one of claims 24-27, characterized in that the upper insulating layer forming device is an inkjet method, and a ceramic bonding liquid is filled between the electrode layers to form an insulation by spraying. Floor. 30. A kind of laminated body manufacturing device, which includes the following features: Employees 'Cooperatives' Seal of the Intellectual Property Bureau of the Ministry of Economic Affairs? Above the work table, an insulating layer forming device capable of ejecting ceramic adhesive liquid or insulating resin materials can be installed in and out of the working table. The conductive layer forming device capable of spraying the conductors by an inkjet method and the above-mentioned adhesive liquid and conductive paste are dried. In the drying device, the above-mentioned insulating layer forming device, the drying device, and the conductor layer forming device are moved in and out of the workbench, and a thin film layer with a predetermined conductor pattern is formed on the workbench insulating layer. The drying device and the conductor layer forming device are used to form a laminated body composed of a predetermined thin film layer. The above-mentioned insulating layer forming device is an inkjet method, and an insulating layer having through holes is formed by spraying. -102- This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 565864 Α8 Β8 C8 D8 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 6. Scope of patent application 31. In the multilayer body manufacturing device of this item, the conductive layer forming device is a method for forming a via electrode in an upper via hole by spraying a conductive paste by an inkjet method. 32. If the layered body manufacturing device according to item 27 of the patent application scope, it is characterized in that a laser is provided above the upper work table, which can pass through the work table and the crimping device to punch through holes in the insulating layer. A punching device, and a conductor hole is filled in the through-hole punched out by the laser drilling device by the above-mentioned conductor layer forming device to form a through-hole electrode. 33. The laminated body manufacturing device according to item 32 of the application, which is characterized in that an insulating layer forming device, a drying device, a conductor calendar forming device, and a laser drilling device are collectively arranged around the upper work table. 34. A laminated body manufacturing apparatus comprising: an insulating sheet laminating apparatus for stacking insulating sheets; a conductor layer forming apparatus for spraying a conductor on the insulating sheet; and discharging a ceramic adhesive liquid or an insulating resin material into the insulation. The on-chip insulating layer forming device uses the above-mentioned devices repeatedly to form a laminated body having a thin-film layer in which a predetermined conductor pattern is arranged between each insulating ridge of a multilayer insulating sheet. 35. The laminated body manufacturing device according to item 34 of the scope of patent application, which includes the following features: It can reciprocate and move up and down on a straight line in a predetermined interval -103- ------------ ---- ^ --------- ^ IAWI (Please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 public love) 565864 A8 B8 C8 D8 6. The scope of the patent application is to dynamically set the base plate, and one or more of the above-mentioned conductor layer forming device and the upper insulation layer forming device are respectively set on the section path, and the upper base plate is on the above section path. During one or more reciprocating movements, an insulating sheet is supplied from the upper insulation sheet laminating device, and a thin film layer provided with a predetermined conductor pattern is formed on the insulating sheet by the upper conductor layer forming device and the above-mentioned insulation layer forming device. These processes are repeated to form a laminate. 36. The laminated body manufacturing device according to claim 35, wherein the conductor layer forming device is a conductor layer forming unit that sprays conductor materials, and the insulating layer forming device is an insulation that discharges a ceramic adhesive liquid or an insulating resin paste. The layer forming unit places the base plate on the work table such that the base plate can be reciprocated and moved up and down in a predetermined interval, and a plurality of support members are arranged above the work table, and one or more of the above-mentioned insulating layer forming units and conductors are simultaneously installed. The layer forming unit is detachably mounted on these support members. 37. The laminated body manufacturing device according to item 34 of the scope of patent application, comprising: a polygonal rotary drum having a flat working surface that is continuously divided on the outer periphery and capable of intermittent rotation; and when the rotary drum is stopped One or more of the above-mentioned insulating sheet laminating device, the above-mentioned insulating layer forming device, and the above-mentioned conductive layer forming device are respectively arranged on the working table facing the above-mentioned working surface. -104- This paper standard is applicable to China National Standard (CNS) A4 (210 X 297 mm) — — — — — — — — — — — — — — — — III — 11111111-(Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 565864 A8 B8 C8 D8 6. Scope of patent application (please read the precautions on the back before filling this page) During each rotation of the rotary drum, the above-mentioned operation and surface insulation provided by the upper insulation M stacking device On the sheet, at least one thin film layer in which a predetermined conductor pattern is arranged is formed, and a lamination is formed by repeatedly performing a rewinding operation. 38. The laminated body manufacturing device according to item 34 of the scope of patent application, which comprises: the above-mentioned insulating moon lamination device, the upper insulation layer forming device, and the above-mentioned conductor layer forming device are provided above and below the base plate, respectively. The insulating sheet stacking device, the insulating calendar forming device and the conductor layer forming device are put in and out above the base plate, and the insulating sheet on the base plate is formed with a thin film layer provided with a predetermined conductor pattern, and these devices are repeatedly put in and out to form Laminated body. 39. The laminated body manufacturing device according to item 38 of the scope of patent application, which includes: a printing device printed by an employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, which is provided with an insulating sheet stacked on the base plate, and can press the insulating sheet when appropriate. The above-mentioned insulating sheet stacking device, the above-mentioned conductive layer forming device, and the upper insulating layer forming device may be separately installed above the base plate. At the same time, when these insulating sheet stacking devices, conductive layer forming devices, and insulation are provided, When the layer forming device is retracted, at least a blocking device that can prevent the stacking space above the substrate from communicating with the outside air, and a vacuum device that can at least form a vacuum atmosphere in the stacking space. Standard (CNS) A4 specification (21〇χ 297 mm) 1. A8 B8 C8 D8 565864 6. The scope of the patent application is to use the above-mentioned blocking device to block the above-mentioned stacking space to make the vacuum device work, while using the upper pressing device to press By repeatedly stacking the upper insulating sheet laminating device, the insulating layer forming device, and the conductor layer forming device in and out of the stack, Body. Please read the notes on the back first and then fill out this page. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs.