TW562911B - Refillable ampule and method re same - Google Patents

Abstract

A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

Description

562911 V. Description of the invention (1) Related applications This application is also under review and is currently under review by the United States Patent Application No. 0 9/0, filed by StePhen H, Siegele, et al. On January 26, 1998. 1 3, 3 2 7 Partial applications for "Chemical Refill System for High Purity Chemicals". In addition, the US Patent Application No. 09/0 1 3, 3 2 7 "Refilling of High-Purity Chemicals" by Stephen H, Siegele, et al., Dated January 26, 1998 The "system" case is incorporated in this application for your reference.

This application is U.S. Patent No. 5,7 1 1,3 5 4 filed by Stephen J, Siegele et al. On June 7, 1995 and published on January 27, 1998. Part of the serial application for "Water Level Control System of High Purity Chemical Conveying System". This patent is related to U.S. Patent Application No. 0 9/0 1 3, 3 2 7 "Chemicals of High-Purity Chemicals" filed by Stephen J., Siegele, et al. On January 26, 1998. "Refill System" was reviewed together. In addition, U.S. Patent No. 5,71 1,354, "High Purity," filed by Stephen J., Siegele, et al. On June 7, 1995 and published on January 27, 1998 The "Water Level Control System for Chemical Conveying System" case is incorporated into this application for your reference.

This application is U.S. Patent No. 5,5 6 2, 1 32, filed by Stephen J, Siegele et al. On June 7, 1995 and published on October 8, 1996. "Container containers for high-purity chemical delivery systems". This patent was filed with US Patent No. 5,711, 3 54, filed with Stephen H, Siegele et al. On June 7, 1995 and published on January 27, 1998. "High purity chemicals

C: \ 2D-CODE \ 91-09 \ 91115800.ptd

562911 V. Description of the invention (2) Water level control system of the delivery system "was reviewed together. In addition, U.S. Patent No. 5, 5 62, 1 32, filed by Stephen J, Siegele et al. On June 7, 1995 and published on October 8, 1996 "Container container for product conveying system" is incorporated in this application for your reference. This application is U.S. Patent No. 5,5 9 0, 6 9 5 filed by Stephen H, Siegele, et al. On June 7, 1995 and published on January 7, 1997. The "manifold system for high-purity chemical delivery system" is part of a continuous application. The patent was filed with US Patent No. 5,7 11,3 5 4 which was filed with Stephen H, Siegele et al. On June 7, 1995 and published on January 27, 1998. No. "Water level control system for high-purity chemical delivery system" was reviewed together. In addition, the US Patent No. 5,590, 695, filed by Stephen J, Siegele, et al. On June 7, 1995 and published on January 7, 1997, "High-Purity Chemical Delivery" The "manifold system of systems" case is incorporated in this application 'for your reference. This application is U.S. Patent No. 5,8 7 8,7 9 3, filed on March 12, 1997 by Stephen J, Siegele et al. And published on March 9, 1999. "Refillable ampoule and its manufacturing method" part of the serial application. The patent was filed with US Patent No. 5,59 0,6 9 5 which was filed by Stephen J, Siegele, et al. On June 7, 1995 and published on January 7, 1997. The "manifold system for high-purity chemical delivery system" was reviewed together. In addition, the application was filed by Stephen J, Siegele, et al on March 12, 1997 and in March 1999.

C: \ 2D-CODE \ 91-09 \ 91115800.ptd Page 5 562911 V. Description of the Invention (3) US Patent No. 5,878,793 published on the 9th "Refillable Ampoule and Its Manufacturing Method" case, This application is incorporated for your reference. This application is U.S. Patent No. 5,6 0 7,0 0, filed on November 28, 1994 by Stephen J, Siegele, et al. And published on March 4, 1997. Part of the continuous application for "No. 2 Chemical Refill System for High Purity Chemicals". This patent was examined together with US Patent Application No. 08 / 184,226, filed by Stephen J, Siegele, et al., On January 19, 1994, and is now abandoned. In addition, this US patent application filed by Stephen J., Siegele et al. On November 28, 1994, and published on March 4, 1997, was 5,606,200. Case No. "Chemical Refill System for High-Purity Chemicals" was incorporated into this application for your reference. This application is a partial continuous application of US Patent Application No. 08/184, 226, filed by Stephen J, Siegele et al. On January 19, 1994, and has now been abandoned. In addition, the U.S. Patent Application No. 08 / 184,226, filed by Stephen J, Siegele, et al. On January 19, 1994, has been abandoned and is hereby incorporated into this application for your consideration. This application is part of a serial application of US Patent Application No. 08 / 683,178, filed by Stephen J, Siegele et al. On July 18, 1996, and has been abandoned. In addition, by Stephen 由,

Siegele et al., US Patent Application No. 0 8/683, 1 78, filed on July 18, 1996 and is now abandoned, is incorporated into this application for your consideration.

C: \ 2D-CODE \ 91-09 \ 91115800.pld Page 6 562911 V. Description of the invention (4) " * This application was submitted by Stephen H, Siegele et al., April 2, 1993. It was filed on the 8th and announced on November 14, 1995: US Patent No. 5, 4 6 5, 7 6 "Serial Refilling System for High-Purity Chemicals" ~ Partial Application. This patent was previously filed with stephen H,

Siegele et al., U.S. Patent No. 5,590.0,95, filed on June 7, 1995 and published on January 7, 1997, `` Manifold System for High-Purity Chemical Delivery Systems The case was examined. In addition, the author identified one by Stephen H, Siesele, and the other by U.S.A. Λ Γ West 70 April 28, 1993 5 t Five years, November 14th, the United States Patent No. = Tai The “Re-Chemical Refilling System for Chemicals” application case is incorporated in the May case of this application for your reference. Technical Field of the Invention ^ The field of the present invention is about the manifold and water level of the chemical oral product delivery system ^, especially the second aspect of chemically reliable high purity chemicals: 2 1 is more about-a kind of high security The manifold for pollution-free operation uses the Linghua pre-product conveying system, which uses the invention to minimize the number of valves and tube sets to replace the tank. Used in integrated circuit manufacturing. Satisfactory production capacity. Followers :; Postgraduate with ultra-high purity, the requirements of the purity of the source chemical will gradually decrease with the size of the circuit, to maintain a reduction in the thickness of the dielectric layer between the supply, and to increase the pollution ^ ° This is because the follower line Distance and medium have an adverse effect. Wood is easier to use for electronic characteristics of integrated circuits. It is a kind of silane (TEOS) used in integrated circuits. The ultra-high purity chemical produced by TEOS ^ is tetraethyloxy with the formula (C2H50) 4Si. TEOS has been extensive

562911 V. Description of the invention (5) It is used for manufacturing integrated circuit such as chemical vapor deposition (CVD) to form silicon dioxide films. The conformal membranes are produced at high temperatures and low pressures (LpcvD) or in plasma enhanced and atmospheric reactors (PECVD, APCVD) at low temperatures when TEOS molecules decompose. TEOS is typically used as an application of undoped 2 and ^ -doped intermediate dielectric layers, interlayer dielectric layers, sidewall spacers, and trench fills. Integrated circuit manufacturers usually require T E 0 S with a purity of 99.999999% (8-9 s +%) for metal patterns. In general, the τ £ 〇S must exhibit a purity of 99.99% or more. This high purity is necessary to maintain satisfactory production capacity. However, it is also necessary to use special equipment to store and transport the high-purity 7 £: 03 to the CVD reaction chamber. Traditionally, high-purity TEOS is delivered from a small container called an ampoule to a CVD reaction chamber.倶 has long believed that ampoules cannot be metallic and that no metal can come in contact with this high-purity TEOS or other supply chemicals in the ampule. Based on the belief that high-purity TEOS and other high-purity supply chemicals used in the semiconductor manufacturing industry may decompose from metal ions to cause pollution, the industry has rejected the use of metal ampoules. Therefore, the ampoules are used exclusively by the industry. When these relatively small quartz ampoules become empty ampoules, they are simply replaced with a full ampule. The ampoule is not refilled in the manufacturing area. The empty Anxun was returned to a chemical manufacturer that could wash and refill the Anxun. The inconvenience of using a quartz ampoule is that it must be replaced frequently due to its small size, increasing the possibility of equipment damage. Furthermore, the 'quartz ampoule is easy to break, and because of its design, it cannot be used for multiple purposes. Meanwhile, the resistance of quartz

C: \ 2D-C0DE \ 91-09 \ 91115800.ptd Page 8 562911 V. Description of the invention (6) The thermal property has its limits, making it difficult to control the temperature of the ampoule. In addition, the lack of effective sealing between quartz and stainless steel has caused serious leakage problems in the past. Μ ... In order to solve the problem of quartz ampoule, at least one ultra-high-purity chemical mouth supplier (Advanced Delivery & Chemical System, 0 mouth division) overthrow the industry's high-purity supply source chemicals. I 兴 金属 相Contact with confidence and developed a stainless steel ampoule. This ampoule-purity TEOS and other high-purity supply-source chemistry σ are used to directly dry the Q / U to U.S. equipment. Like a quartz ampoule, when it becomes empty, it is returned to the supplier for washing and refilling. To refill, there are still many problems with the use of stainless steel ampoules, making it necessary to replace them frequently. At the same time, it has a small volume. It was used as an optical sensor for high-purity TEOS in ampoules. It has a low water ^ central rod. (It uses a light emitting diode and a built-in detector. Unfortunately, the device ) It needs high maintenance, because if it collides with it, the light detection of the rod will be easy, and the adjustment circuit of the sensor is susceptible to calibration deviation and offset. Instead, a signal should be output. These problems can lead to ampoule flow =, 'cause false sense of empty or full ampoule. Another L ^ = of the optical sensor leads to premature removal, rupture during washing and washing, and requires frequent replacement. = Fang, Qi 4 It is easy to transport metal ions to contaminate the high-purity chemical, although bran metal particles and reactors have been widely used in more reliable metals in the past; =, the optical sense is to solve the frequent replacement of stainless steel ampoules' barrels. Refill the smaller stainless steel Qian Jiaxi Wentong with the optical water level sensor, the barrel also uses optical ^ Zhuzi water level

C: \ 2D-CODE \ 9l-09 \ 9lll5800.ptd 562911

F's debt test. And the son-in-law tile L in the aforementioned structure, but returned to the supplier's volume and weight, washed and transported, the physical vibration of the ampoule is more, so the source chemical 'Low water level' in turn leads to higher frequency of problems. Furthermore, in the refilling structure, the second optical sensor in the ampoules needs to have a problem with all of the sensors), so that the refilling process indicates that the ampoule is full. In some cases, it is necessary to make another hole in the ampoule. The effect of this hole is negative, because it will create additional possibilities such as leaks and contamination points. To overcome the problems associated with optical sensors, a metal water level sensor was used to detect the low water level of high purity chemicals in five gallon container containers. The: The water level sensor is generally composed of a stainless steel ring buoy, which is fixed on a hollow shaft made of stainless steel. The buoy contains a fixed magnet. The digital reed relay is fixed at a fixed position on the inner side of the shaft at the alarm trigger point. When the pontoon passes the reed relay, the fixed magnet will change its state, which will cause a low water level warning condition to be displayed. A ^ can changer will replace it. Because the magnetic reed switch is a low-fault mechanical switch and provides reliable on / off switching, the digital magnetic reed relay used in metal buoy water level sensors is suitable for the supply of chemicals in the separate cylinder. Low water level detection is more reliable. As in the past, the user never fills the empty five-gallon container ’, but sends it back to the chemical supplier for washing and filling as usual. 562911 V. Description of the invention (8) Low = position 2 is a foreign-style tube sensor. Recently, it is also used in stainless steel ampoules — ί, & the user is no longer filling the ampoules, and only used for purity or other In general, when the metal water level sensor indicates a high ☆ # and 4, when the water level of the source chemical of the π purity is low, the second & M ^ Β + full filled ampoules will replace it. When AnQin is used for any refilling, purity blue or other: The use of metal water level sensors in :: is higher than that in refilling systems; η: water level of chemicals. Induction using movable parts = * Bottle Asia does not use floating sensors or other devices. Because the industry firmly believes that gold and metal ions fall on the 0th day and metal ions? Sliding contact will cause the metal particle purity TEOS or other high tons to pollute the transportation system, and the high reactor used in the system is not used for re-use; the source chemical '... belongs to the water level sense ampoule system to replace the barrel two because of the independent system The bucket or eight-w® f female ° watts are replaced after use. Furthermore, 71, puppets or ampoules are attached before refilling for reuse: strip washing and refilling. Sourced by supply at a distance. =: ^ The amount of floating metal pontoons in an independent system is limited to one fill. And run out of process. On the other hand, $ ^, I am a genius, I ’m filling my wounds regularly, I ’m old, I ’m refilling the system, I ’m using this ampoule every time.

^ In the system, the ampoule is never finished between refills. L ΐ other high-purity supply ... Therefore, the integrated circuit source chemical supplier-there is always an uncertain burden {, the cover continues to be the same;

562911 V. Description of the invention (9) ΐ = After the time of filling, the accumulation of metal ions and metal particles in the ampoule can reach 2 ^ 2 to an unacceptable level. In view of this concern, even if it is understood that the gangster and water level sensor are more reliable in the refilling system, the ampoules used in the refilling system-all are equipped with optical sensors or non-moving parts. sensor. As described above, because the optical sensor requires a high degree of maintenance and is prone to frequent errors, the container chemical using the optical sensor is refilled. The reliability of the system-direct quality. When the optical sensor fails to detect a low or empty water level, the ampoule will dry out during the CVD process. As mentioned earlier and 'this will destroy the entire batch of crystal JUs, which will then cost tens to millions of dollars for processing or processing. In other words, "When the optical sensor fails to detect a high" full "water level" during the refilling process, the ampoule will be overfilled, which may cause damage to the equipment and expensive high-purity supply chemicals. (Approximately USD 2,000 per gallon to TEOS purity) (9, usually a grade-or grade, clean room environment), contamination or damage to other equipment cleaned, damage to the wafer in process, and cause serious damage. Personal safety asks the stomach. In the past, 'to avoid these problems, semiconductor manufacturing businesses have used refill systems with additional optical water level sensors to reduce the impact of sensor failure.' Other types of water level sensors (not the aforementioned float type sensors have been used). ), Use a certain time to refill, refill a small fixed amount or refill-quantitative chemicals. Refill systems such as Yanhai are facing a crisis of failure due to non-linear staggered induction technology, uncertainty of refill volume, lack of chemical filling, closed system component calibration errors, or lack of reliable supply sources Derived from chemical level measurement

562911 V. Characteristics of invention description (10). Therefore, a reliable containerized chemical refilling system is needed, which is supplied to the place where high chemical purity must be maintained, and it must have a high degree of error-free refilling confidence. Invention of the invention. The present invention provides a manifold and water level detection design for a chemical delivery system, and in particular, it relates to a highly reliable, high-purity chemical container chemical rotation system. Tube and replace the tank with a minimum of valves and tube sets. The invention substantially eliminates or reduces the defects and problems related to the water level sensing design developed for the chemical A transport system previously developed. Μ

Based on this, it is an object of the present invention to provide a container chemical conveying system for other chemicals of the high-purity chemical σ type as described above, but its branch pipe of °° 2 t and a container chemical conveying system Use this: method. People $ < = Specially set pipes and tanks, their methods and tanks can be replaced without risk of pollution. This is especially useful for refillable container handling systems. Heterocharge-purity chemistry The features and advantages of the Moon Reveal and other purposes' will be more clearly understood from the detailed description of the limbs and the accompanying drawings. Good car. For a more complete understanding of the invention and its advantages, please cooperate ^

The following detailed description, similar reference to the flat number system, Θ formula, Lingzhong: can, leisure, you are not similar to those who have similar characteristics, detailed description of the preferred embodiments of the present invention are illustrated in the drawings to indicate different Similar and corresponding elements of the drawings. Painful numbering

562911

Compared with the "Long 1", it is clear that the -2n ancestral system of a high-purity chemical refilling system is composed of three main functional components: container tank 2b: two "type stainless steel ampoule 30 and control unit 40. The In the chemical room of the container tank 22 \ =, the room is equipped with a rotary bite tube / cleaning panel. The refillable stainless steel ampoule 30 is a high-purity TE0S or other high-degree source chemical The product is sent to a semiconductor manufacturing equipment such as a CVD reactor, and the control unit 40 monitors the refill operation 'and monitors the water level of the container.

The container chemical refilling system 18 has two basic operation modes: a normal processing operation and a refilling operation mode. Under normal processing operations, the refillable ampoule 30 conveys high-purity TEOS or other high-purity supply chemicals to the semiconductor manufacturing equipment through the outlet passage 32. The exit channel 32 is connected to a semiconductor processing device using a conventional processing connection method. In this specific example, the refillable ampoule 30 includes an optical sensor 34 to pass a low-water-level signal to the CVD reactor via a conventional low-water-level sensor / reactor interface circuit as shown in FIG. 13. . When a low water level signal is transmitted, when the equipment is manufactured, the equipment will use the 4 Lu's, for example, its normal low water level preset procedure according to its normal customary operation mode.

FIG. 2 illustrates a preferred configuration of the control panel 52 of the control unit 40. The control panel 52 includes five switches: a "main power" switch, a "press to test light" switch, a "discard fill" switch, a "press to fill" switch, and a "press to mute" switch. With reference to Figure 15, the operation of these switches is explained in detail as follows. The control panel 52 also includes several illuminated indicators to report the container

V. Description of the invention (12) 20 and ampoule 30 Sinochem "normal volume", "state of" ^. The light-emitting indicators include filling "," Anfan is not refilled ", empty valley product", "Ampoule is re- Fill the ampoule at a high water level. " "", "Ampoules at double high water levels" and "Amp Refer to Figure 2 for details of the a method of operation. 'During the processing operation, a set of control unit 40's preferred normal processing operation, the set will not change. Therefore," One Two One The water level of the supply source chemical should be “low volume” or “Mei Liu ^ hanging volume” indicator light should remain on. But only if. The water level in the container 20 is replaced by a full container, as explained in detail. In the following description, the operation of the induction sensor will be brighter after normal processing to show that it is dry and dry. The female ampoule is not being filled. The indicator light should still be refilled. 30 Φ ^ System is not in refilling Mode. Because it can be dried with a purity circle or other high-purity sources. The water level of the mouth will change after normal processing operations. The "ampule is high" means that the light (which is on when the refill process is completed) will remain on, and the surface purity of TEOS or other high-purity supply chemicals The water level in the refillable ampoule 30 is lower than the "ampoules at high water level" trigger point 41 of the metal water level sensor 39. ° Question 7 / It should be noted that if the "ampoules at double high water level" indicator light is on like the "safety is at high water level" during the refilling process, the "ampoules at double high water level" indicator light will remain on , High purity supply in ampoule 30 = chemical drop to metal water level sensor 3 9 "ampoules at double high water level" trigger point

C: \ 2D-CODE \ 91-09 \ 91]] 5800.ptd Page 15 562911 V. Description of the invention (13) 4 1 a or less. In this case, the water level of the chemical will fall through the "Ampoule in High Water Level" trigger zone, which causes the "Ampoule in High Water Level" indicator to light up and then go out as described above. The refill procedure is initiated automatically or semi-automatically. This semi-automatic procedure manually assembles the ampoule 30 to the refill structure by the stupefying author. This is done by closing the outlet valve 36 on the ampoule 30. In addition, the operator will confirm that the inlet valve 38 is closed. Because high-purity TEOS or other high-purity source chemicals are sent under pressure to certain CVD reactors under inert gas such as helium during normal operation, the ampoule 30 may need to be decompressed and evacuated. In order to smoothly carry out the high, high degree T "or other high-purity supply source chemical transfer process. The standard method used in the vapor deposition technology is reduced. After the decompression step, the vacuum / Pressure valve 37 is provided for Xu ⑽ ⑽ @ @ π 二 中. For other ampoules, the top of the factory; no problematic application situation, there is no pressurized heart semi-automatic refilling process requires operators Press the button in Figure 2. The “press” button on the control panel 52 of the one 40 is the “press to fill” switch, and the control sheet S is turned on: two presses to read. Application Status ’High-purity TEQS or other high-purity: The chemicals in Road 4: then flow from the container 20 into the ampoule 30. The supply source valve 42 is preferably a pneumatic valve. Only when the pressure is controlled with one breath 丨 | S-I η ζ »" 4 is the valve 4 2 when it is installed ^^ The early system 40 is sent through the channel 48 to send the day 4 #, and may be on the next day On. Used to open

C: \ 2D-CODE, 9 bu 09, 9chuan 5800.ptd page 16 562911

The flow of controlled pressure of air or other equipment such as compressed dry air is controlled by the control unit. Referring to Figures 15, 15A and 15B, the control pressure of valve 42 can be nitrogen pressurized gas. The solenoid valve is controlled by the solenoid valves in the channel 4 8 4 0. The operation of the solenoid valve is as follows: When the container 20 is opened with, for example, helium, the inert gas forces the device 20 through the refilling line 4 4 Metal water level sensor 3 9. Metal water level Two different types of water for the source chemical. The metal water level sensor 3 9 is also a point type water level sensor and can be a medium or metal water level sensor 3 9 type. The trigger point 41 is used for the situation, and the trigger point 41 is used for the situation. Continuously pressurize the inert gas with high purity supply chemicals to the ampoule 30. The sensor assembly 2 1 includes a high sensor 3 9 and dual water level sensing with a detection and positioning function. It can be a single water level sensor. There are two triggering points 4 1 and 4 1 for detecting the "Am" in the ampoule 30. Therefore, when the valve 4 2 is from the container water level metal water bottle 30, the supply is Better. Or multiple triggers. More specific examples a. Double water level "(full)" Dual high water. When the metal water level sensor 3 9 detects that the ampoule 3 is full, a signal via the cable 47 单元 to the control unit. In response to the signal, the control unit 40 closes the pneumatic valve 42 without operator intervention. At the same time, the control unit 40 generates two audible and recognizable alarm signals on the control panel 52. If the metal position The trigger point 41 of the "high water level" of the sensor 39 is not activated. The "shuangnan water level" trigger point 4 1 a of the metal water level sensor 39 will be replaced, and it will be triggered by a separate circuit in the control unit 40 via the cable 47. The control unit is instructed to inform that the ampoule 30 is full. This “double-height” alert is a safety feature.

562911 V. Description of the invention (15) Overfilling of the security paper 30 'and stop the refilling when the electricity of the "high water level" warning circuit fails, and refer to the figure [5, ΐ5Α * ΐ5β 咩 ί 下 礼 H t The metal water level sensor 39 is only a single-level water level sensor / position. In addition, the system is unable to provide safe water. The control unit 40 is in contact with the metal water level in the container 20 via the cable 26 at the same time. The metal water level Ϊ 39 in the remote container is set at the remaining 2 ()% of the supply source. It is better to use the supply chemicals ... It is also possible to use other trigger points depending on the specific processing requirements. If the confession of Mae and σ by ^ female is permanent (which is usually only refilled = board 52 will have-identifiable ^ "medium low \ =, low struggling control surface of the control unit 40" instructions. If supply The source chemistry will hear the alarm, there will be-identifiable ;; filling is generated on the control panel 52, ... stop and re-control 2 early Wu 40 can be structured at the same time during the refill process to manually = , The operator will receive the refillable type 1 full of identifiable or recognizable 卩 卩-nTt u co flew the shameless private hope, by manually pressing the button on the control surface twist to stop the refilling process .Similarly, it can provide a full: open / self: closed structure. This can be completed automatically (pneumatic is 2 / ,, move the vacuum / pressure valve π, and a pressure sensor is placed in the channel of the ampoule 3 1 inside._The pneumatic valve and pressure sensor are then connected to the control unit Tian An " Wat 30. At the beginning of the refilling process, a specific vacuum is drawn to make high-purity supply chemicals easily flow into the ampoule 30. The pressure in the channel 31 is sensed.

562911 V. Description of the invention (16) Jie will notify the control early Yuan 40. In back to Japan. P ^ 7 π n Shikou „Tian Shishi — [^, the control unit 40 will close the pneumatic reading 37 and open the refilling process in the refilling line 44 at the same time. The milking valve in the road 44 42 'So it will start automatically with the help of Figure 3, a detailed description of a particularly good performance Liu Cui 9 rw; q 彳 + u 1 to call the best collection container 20 is as follows. Set clothes this year 002 2 to 3 1 6 L electro-polishing does not make money. The potential of the steel is "A" & The container 20 usually has five plus two grains. However, the car's large-capacity tanks can be used as fish, i, L, _J, and 20 containers, including ten and twenty gallon containers. For example one or-π ice m ^ ^ J A smaller container of one gallon container also

0 container container 2 〇 # Use L7 white, Gaonan W, and Zhuang> — It is used to self-supplied the high-purity TEOS collection ash south purity supply source chemical money 5rong bad qn # 丄 土Soil ^ Zikoukou transport master female mouth tile 30. The supply source chemical is a continuously pressurized inner container having, for example, helium, such as helium < rr raw milk tank, to immediately refill the refillable ampoule 30 as needed. The inert gas is supplied through the inlet ㈣. The inlet valve 64 is connected to the passage ⑽ of the delivery / washing manifold 22 and communicates with the passage 88, and the delivery / washing manifold 22 is in communication with a source of inert gas. The outlet valve 66 is also connected to the refill line 44 using the manifold 22. Therefore, when the container 20 is pressurized with II gas or other appropriate gas and the pneumatic valve 42 is opened, the purity TEOS or other high-purity chemical source is forced to pass through the outlet pipe 60, the outlet valve 66, Qiguan 22, and then The filling line 44 and the inlet valve 38 enter the refillable ampoule 30 again.

In a specific example, the container 20 is provided with a metal water level sensor assembly 2 1 ′ 4 assembly 2 1 including a metal water level sensor 39, which is a bipolar reed switch group triggered by a metal buoy 24. Become better. We should know that other types of triggers (such as Hall-effect sensors) may be used. The bipolar reed switch is in direct surface contact with the control unit 40 via a cable 26. Metal $

C: \ 2D-CDDE \ 91 -09 \ 91115800.ptd Page 19 562911 V. Description of the invention (17) The position sensor 39 is a double-water level sensor, among which the person switches. Although it is similar to the refillable ampoule 30, it includes a two-reed spring connected with a Gan Ding metal water sensor 39, but it can contain any desired number of tongues. In order to detect the water level of one bismuth supply source chemical, further t., Y A digital vertical metal water level sensor 3 9 words, or have individual # 用 甘 ώ 独 筒 24. The operation principle behind the stationery's own metal floating metal water level sensor 39 is described in detail in conjunction with the single water level metal sensor 39 shown in Figs. The metal water sensor 39 is composed of a ring-shaped metal pontoon 24 made of stainless steel or other non-magnetic materials that are not easily lifted and micro-materials. Alternatively, the metal floats with fluoropolymer or other coatings that are not prone to chemical changes. * The material made by Tufujia is 316L stainless steel. The metal buoy 24 includes a fixed wire 0 and a center stone 23 and is fixed on a hollow metal shaft 28. However, the bottom of the shaft 28 is sealed and extended into the ampoule 30 to prevent high-purity supply chemicals from flowing up into the shaft. In addition, the metal shaft 28 is preferably made of electropolished 3 16L stainless steel or other materials that are not easily changed chemically. Alternatively, the shaft 28 is made of a non-magnetic material coated with a compound or other coatings that are not easily chemically altered. A digital magnetic reed relay switch RS is fixed in a fixed position at a preset alarm trigger point in the port 2 and 8 of the shaft. This trigger point corresponds to, for example, the "empty volume" trigger point. A ring 4 6 is permanently connected to one end of the shaft 2 8 to connect to the container 0. An additional reed relay switch RS can be added in the shaft 28 to form a multi-level water level detector. For example, if the second reed relay switch Rs is added to the second fixed trigger point in the shaft 28, a double water level float sensor is established.

562911 V. Description of the invention (18). An additional reed relay may be added for testing. '(, When any water level detection ring 2 7 is used to stop the metal buoy 2 4 20, the buoy will not be on the entire shaft 28: & filling the container 20 along the entire shaft when it becomes empty 28 slide back down. =, And does not require the container. In this structure, the upper retaining ring 27 may be discarded. Second, it should be noted that if there is a need for the metal buoy 24 to slide away from the shaft 28. The retaining ring 27 is lowered to It is better to prevent brands or other suitable and difficult to pick up show steel, Kalrez including shaft 28, metal buoy 24 and buckle 27. 21 is better after electropolishing. The metal water, the sensor assembly metal The surface finish of the parts is good before Ra20 soil electro-polishing. All wetted metal water level sensors 39 work well. Above the upper retaining ring, the supply source chemical ring 27 maintained by the metal buoy 24. When the liquid water level drops = Centered top shift. When the magnetic field of the fixed magnet flashes the magnetic tongue; = 2: For the shaft 28 down 24, it is in the "sinking" position. When the magnetic tongue is at the second level ;: Metal pontoon lamp circuit. This The output signal passes through the cable 26: two =, complete the alarm circuit in finger 40. Rabbit, spring 2 5 pass Figures 4 and 5 of the control chart illustrate the use of a magnetic tongue that is normally closed and normally closed. However, or the cylinder 24 passes through the reed relay relay cry: :: When the metal is floating RS in the dental event. Therefore, the alarm is fixed to the magnet 23 The magnetic reed switch will be turned on. 丨 The monthly condition is informed by the way of turning on the closed relay contact that has been turned on. The jade contactor or closed should be as described above, preferably concrete and water level type metal sensor. Device C: \ 2D-CODE \ 91-09 \ 9II15800.ptd Page 21 562911 Description of the invention (19) — ^: Water level metal sensor 3 9 is simply a second magnetic tongue cage ::::: RS is fixed and set at the required alarm trigger point. Shaft 28: :: Two-piece ocean tube 24 can trigger two reed switches. If a metal sensor is used, Ray # 2 7 Φ 4 female rm works h h vertical Notify the control unit 40. It is better; the "wire" of the subject is used to supply the source chemical of the state m of the switch. The trigger point should be set to the remaining volume "trigger point. # In the column, this That is, corresponding to the "low second sensor architecture, a fixed knot shaft 28 is included, and the magnet It is made of —hinge coupling tube. When the buoy is turned, the floating switch RS made of solid material changes the state of the reed relay from on; the device is changed to off. The horse is closed or cooperated with now from Figure 6 And 7, detailed ampoule 30 with 31 6L electropolished non-ampoules 30 has a capacity of 2.3 liters, 1 plus, and 1.6 plus life depends on the processing needs. Refillable ampoules are described above. 30 It is better to refill with rusty steel structure. Generally speaking ~ but can provide a wide range of volumes (including 1 · 3 women, 2 gallons and 5 gallons). The size of the ampoule is only the vacuum / pressure valve 3 7 allows to be i + ancient ten CVD ampoules) with an inert body such as helium at " Female ^ 30 (which is usually a lot of pressure. The valve also has the function of refilling or refilling the ampoule 30 during the continuous re-hanging process. The rain allows the ampoule 30 to be decompressed and vacuum applied. The outlet valve 36 of the system 18 is connected to the refillable tube. During normal processing operations, the supply chemicals are sent to the semi-conducting filling ampoule 30 to an outlet tube 32, which is a liquid high-purity TEOS or other high-purity body. Processing equipment. So the normal processing operation $,

562911 V. Description of the invention (20) = or other inert plus M gas is added 30% by heart. The ampoule is administered with 30 internal recesses, cranial crests + α, and the purity of the chemical source of the mandarin duck's mouth. It is forced to lead to the purity chamber or other high-liquid to the radon reaction chamber through 32 of the empty tubes and five of 33 / mouth outlets. Valves 36 to 1 are not all shown on the chart, allowing% 3 :. Two people / attentioners ’pipe 33 and in general, the pipe 33 is displayed along the device assembly 45 ... The system is positive t # #. Induction W WF 方 延 #, to allow ^ m to come out and form a wide range of VD processing, so there is no need to add ^. ~ A schematic diagram of the circuit of the proton induction state 34 is shown in FIG. 14. Low water level optical sensor 34 via cable 35 will :: Low water level ^ ^ ^ η, ^ elbow, number up to a stand-alone alarm module,, (I 7Z π π νbu panel or via a temperature controller (But without the control-optical sensor, it can be contacted with the temperature controller ::,! ;; =, stand-alone alarm module alarm module or temperature control editor and reactor, independent: = two actions Between the closed and refilled pipelines. The interval 38 is normal during the refilling: Γ 白 i is continuously refilled. The valve is-automatic M in the fully automatic position, and the pneumatic one is better. = The device assembly 21 contains at least one single-water level metal sensor: 32: The metal t-position sensor 39 is preferably a dual-water level sensor, with trm position "... double high water level". The metal water level sensor U1 Monsoon water level sensor 39 is the same as described in Figs. 4 and 5.

C: \ 2D-CODE \ 91-09 \ 91115800.ptd Page 23 562911 V. Description of the invention (21), operation =. The metal water level sensor 39 exemplified in FIG. 6 is a kind of refillable ampoule with special soil of double water level type which has the trigger points of “water level” 41 and “double high water level” ... In Figure 8. The two metal water level sensor assemblies 21 in FIG. 8 and each metal water level sensor package s-metal water level sensor 39. The first assembly 55 series is for cumulative measurement of high monthly conditions. As mentioned above, it is preferable that the metal water level sensor 39 is a dual water level sensor as described in FIG. 6. The second assembly 58 is used to detect the low water level condition. The low water level metal water level sensor 58 is a single water level pontoon sensor to notify the CVD reactor that the water level of the supply source chemical in the ampoule 30 has reached the low water level. Stand-alone alarm module or temperature control unit, and end normal processing operation #. The cable has two wires. These two wires are used to make surface contact with the semiconductor processing equipment. In particular, the two wires are connected through pins 2 and 2 of the interface circuit described in FIG. When the metal water level sensor M is used, pin 3 is left untouched. Based on the above description, it can be known that the metal water level sensor assembly 2 i can have various structures. The examples illustrated in FIGS. 9 to 12 are only a few of the existing preferred architectures. FIG. 9 illustrates a metal water level sensor assembly 21 for a refillable ampoule 30, which includes a metal having a “high water level” trigger point 4 丨 and a “double high water level” trigger point 4 1 a and two trigger points. Water level sensor 3 9. FIG. 10 illustrates a metal water level sensor assembly 21 'for a refillable ampoule 30, which includes two water level sensors 39. FIG. The first 49 is a dual water level sensor as described in Figure ^. The second 50 detects low water conditions. The low water level metal water level sensor 50 is a single water level sensor, which will ampoule 30 C: \ 2D-CODE \ 91-09 \ 91115800.ptd page 24 562911

= The source water level has reached the low water level. The CVD reactor, vertical alarm module, or temperature control unit is notified, and normal processing operations are terminated. The high water level metal water level sensor 49 is a dual water level floating meat sensor with a “^ water level”, a trigger point 41, and a “double high water level” trigger point 4 丨 a as described above. This structure has the advantage that only one hole is required to be provided in the lid 43 of the ampoule for the water level sensor of the supply chemical, so the possibility of contaminating the supply chemical is reduced. The cable 35 is provided with six wires. Four of the six wires terminate in the control panel shown in Figures 5, 5, 5 A, and 5B, which are used to make surface contact with the semiconductor processing equipment. More specifically, the two wires are connected through pins 1 and 2 of the interface circuit described in FIG. 13. When the metal water level sensor 39 is used, pin 3 is not in contact. Figure 1 An example of a container container 2 〇 Metal water level sensor assembly 2 j, 5 metal metal water level sensor assembly includes a trigger point set at the "empty volume" trigger point and full volume trigger point Double water level type metal water level sensor 3 9. This full-volume trigger point is for high-purity supply source chemical suppliers to fill the container 20 after washing and servicing the barrel. FIG. 12 illustrates a metal water level sensor assembly 21 for a container 20. The metal water level sensor assembly includes a trigger set to measure water levels of "empty volume", "valley volume" and "full volume". Point three water level type metal water level sensor 3 9. Similarly, the full volume trigger point is used by high-purity supply source chemical suppliers to fill the container 20 after washing and servicing the barrel. 'With reference to FIGS. 8 to 12, the method of connecting the metal water level sensor assembly 2 to the ampoule 30 will be described in detail. A ring 46 is used to permanently connect one end of the shaft 28 to the metal

562911 V. Description of the invention (23) The benefit assembly 21 is connected to the ampoule 30. The ferrule 46 is preferably made of 31 虬 stainless steel, and the preferred connection method is welding. The structure 2 of the water level sensor assembly 21 uses the ferrule 46 and the clamp 61 and the clamp is used for two purposes: 6 = The type of the flange on the sanitary pipe is more suitable; the U edge surface of the extended pipe 63: 4 62 'presses against the top of the ampoule cap 43-65, holding the ferrule 4 :. : Use flange surface. The clamp 61 is locked by rotating the vinyl O-shaped ring 67 (set in the hand of the person to buy the old 矣 * ⑴: +: t four gases to compress, so it provides a leak-free seal. It is connected to the water level sensor assembly 21 and the ampoule 30 by welding the bolt of the screw-type connector with the shaft 28. This =: the binding material on the lid 43 of the screwdriver ampoule 30 is connected = Now cooperate with Figures 2, 15, and 15 "d15B 'to detail the operation of the control unit 40. The AC power of 10 volts. The factory power supply is claw power, see the standard ϋ type grounding female plug provided by group CS1. The electric ingress filter theft assembly L1. The filter assembly L1 adjusts the nearest outgoing line and connects the AC power to the main power switch. The output L1 also provides the grounding of the chassis. The main power switch SW1 of the filter is double Knife Double Throw (DPDT) jump type, at the upper left corner of the control unit 40-4 air control panel 52. Ά 'and two rails on the neutral side for switching between on and off. Switching exchange: the main switch SWi is connected to Fuse F1. The fuse is based on the quarter; the main power supply is AG size (a quarter of an inch by 11 a quarter of an inch). 562911 V. Description of the invention (24) It is set in the control unit 4 0. Adjust, switch and fuse the AC wheeler _ +, tower M, and connect to the linear power supply, and provide / Λ input ^ place. ^ The supply PS1 is installed in the control unit 40 circuit. The weekly twenty-four volt DC power is waste to the control unit 4. Electrical !! 隹 "tf product" circuit 83 will be explained in detail first. Above the chemical source point of the source in 0, "24 goes up ... The upper position triggers RS1 to turn on and the" low ^ Λ wide 'low valley product "inductive relay switch opens and the valley product" indicator LED1 Off. (Five relay switches are displayed on the control panel 0 people iC, in fact, the relays 4 == only in the type represented. In the container.) The switch is within the metal water level sensor assembly 21. Each time in the container container 20, a _ μ r T 0 # ^ nr ^ The X level drops to the "low water level" trigger point and the "low volume" indicator LEDt = ". The induction relay switch is off Closed circuit 85, when the supply source chemistry in the container 20 is 7 Air-i: ΐ t ”When the angle of the horn is above, the 'float 24 floats upward, and turns (connected to ^ 7' Γ, the Sa state switch RS2 is turned on, and the control relay RY 1 coil C pins 2 to 7) Power off. Two relays (N 0, Hammer Cong, She 0 Tian, and k power are normally turned on when RY1 is powered off: (pins 8 to 6) on, and off when relay RY1 is thunder Ππ ”1 ^ Q ^„ "Electric inch 'the normally closed (N · C ·) contact (pin G 芏 D) is closed, and" when the main hall RYi is powered off, the nc indicator LED3 lights up . When the relay is charging. ·· The contacts (pins 1 to 4) are closed, and the continuity is filled. Page 27 C: \ 2D-CODE \ 9l-〇9 \ 91115800.ptd 562911 V. Description of the invention (25) When the product water level drops to the "empty water level", the buoy 24 sinks, and the "empty volume" induction relay is below the trigger level, and the relay state coil (pins 2 to 7) is energized. When the relay switch R :: Snow, the N. 〇 contacts (pins 8 to 6) are closed, and "off * °, two LED2 lights up. When the relay Rn, the two products: indicator light W turns on, and the "normal volume" indicator LED3 goes out. When contact = ^ foot 8 to power, the nc contacts (connected.) And the refill circuit breaks down to explain the "double high water level" circuit 86 of the ampoule. When the product water level in the ampoule 30 drops to the "double high water level, The buoy 24 of the position type metal water level sensor 39 is relative to that :: The starting point 41a sinks, and the ampoule 3η "the ancient place π and the same water level" touches ^ ° it ^ M PV9 Q "The inductive state relay switch RS3 is turned on. Therefore, the control bismuth electric wY2 coil (pins 2 to 7) is powered off. When the power is turned off, the N.〇. Contacts (pins 8 to 6) are turned on, and "Energy ... The ancient RY2 indicator LED4 is off. When the relay RY2 is de-energized, the two. The two pins 8 to 6) are turned on and the air control V1n coil is disconnected t, and ^ 妾 is turned on. When the relay RY2 is de-energized, the Nc contacts (closed and turned on again) Fill the circuit. J _ When the product water level in the ampoule 30 exceeds the "dual high water level" trigger point 4i a, the float 24 of the dual water level metal water level sensor 39 rises relative to the "dual water level" trigger point 41 a, and The “double-height” sensor relay switch RS3 is turned off. Therefore, the control relay RY2 coil (pins 2 to 7) is energized. When the electrical appliance RY2JI is powered, the N.〇 • contacts (pins 8 to 6) are closed, and the field "ampoules double south" means that the LED 4 is not on. When the relay RY2 is powered on, the

iiim

Page 28 C: \ 2D-CODE \ 91-09 \ 911I5800.ptd 562911

When the N.O. contacts (contacts 8 to 6) are closed, and the N.O. coils which are energized and the valve Vi is closed, the N C, ... charging process. When the relay " 2-way ⑶.C. Contact (pins 1 to 4) is open, and the refill circuit breaks the "1, 鬲" circuit 87, when the product water level in the ampoule 30 is 卩 夂 5 咼 water level "trigger point 4 jzhikoukou oregano's buoy relative to 4p and under-position metal water level sensor 39: π and the other side "Hai" South Water Level "trigger point sensor relay switch ^ α α Ugly female mouth tile ask" to 7 ) Power off. The A system relay uses 3 coils (pins 2 to U break the tail. When the relay RY3 is powered off, it will be turned on, and "A — Α θ ^ N · 0 · contact (When pin 8 to thunder, M" female 0 asked ”Means that the LED 5 is off. When the relay RY3 is off: μ 啫 N · C. The contacts (pins 1 to 4) are closed and refilled when the supply source chemical level in the ampoule 30 is raised or exceeded. At 11:00, the double water level of 18 megabytes from a & door X position "— two = water level type metal water level sensor 39 floats 24, coil Γ pin relay switch RS4 off I control relay · Λ circle ( Pins 2 to 7) are energized. Pins 8 to 6) are turned off when relay RY3 is energized, and the "Ango Watt High" indicator light UD5 lights up. 0. When the energized relay RY3 is energized, these N · C. The contacts (pins 1 to 4) are turned on, and the charging circuit is disconnected. Dange now details the refill circuit 82. Before the refill process starts, the "= fill" switch SW2 is turned on, and the "abandon fill" switch is turned off. The relay RY4 coil (pins 2 to 7) is de-energized, the Nc contacts / pins 8 to 5) are off 'and the "ampoules are not filling" indicator light UD7 is lit = the Ν · 0 · contacts (pin 8 To 6) Open, and "the ampoule is being refilled" led6 \ from

562911 V. Description of the invention (27) ^ 烕, the N.O. contacts (pins 8 to 6) C. The coil is powered off, and the electromagnetic coil 12 is closed. When the " = and no control pressure is applied through the channel 40; the pneumatic U magnetic valve V2 is closed

Pit: Temple 2: 5 :: Filling process, the stomach "presses to fill" switch SW2 is the temple soil female closer, the control relay "^ ^ ^ ^ ^ to .μ) power. When RY4 is powered, N. 0. Contact (Pin 1 at this time or two: Energize relay RY4 and latch in the energized state. '5. Release the "press and fill" switch SW2 when released. Pin ^' Continue the refill process 'The nc contacts (the receiver is owed, and the "ampule is not filling" indicator LED7 is off. On the same day, the N. 0 second contacts (pins 8 to 6) are closed, and "the ampoule is being refilled" ^ No light LED6 lights up. Finally, the N. contact (pins 8 to 6) is closed, the NC solenoid valve V2 is opened, the control pressure is applied to the pneumatic valve 42 through the channel 48: and the pneumatic valve 42 is opened. The supply source chemicals for the container 20 can now flow through the refill line 44 to the ampoule 30. The end of the refill process is completed in one of six ways: 1. Fork type 1. Cut-off control pressure: Pneumatic valve 4 2 closes to end the refilling process. Mode 2, cut off the power supply, the N · C · solenoid valve v 2 is powered off, and solenoid valve v 2 is closed. When this When the N. C. solenoid valve V2 is closed, no control pressure is applied to the pneumatic valve 42 through the passage 48. Therefore, the pneumatic valve 42 is closed and the refilling process is ended. Mode 3: Give up filling: If the operator presses "Abandon Fill" switch 562911

562911

562911

The relay RY5 is de-energized and the contact power of the RY5 sensor S1 is unlocked. Hold mute. , And at the same time will be connected to the sound so the audible signal will still be maintained. When the refilling process is over, the control relay RY4 is powered off. The ^ C · contact (pins 8 to 5) is closed and passes through Nc · contacts of RY5, to 5). ′ The sound sensor s 丨 is powered on, so that the audible signal sounds. I7 According to the operator's discretion, the audible signal may be muted by pressing the "earless" switch S W 4. When s f 4-closes the base directly, the female thunder cries dvu, 罝 closes, the control relay wRY5 is energized and latched as described above. Then, the N c contact pins 8 to 5) are turned on, and the acoustic sensor S1 is powered off. At the same time, the Ν · 〇. Contacts (pins 1 to 3) are closed, and the relay RY5, which is in the energized state, is energized to the sub-latch. At this time, you may release the switch and press the "no sound" switch SW4, and the audible signal will close the program, and the next refilling process ends. "When you press and hold the" press and test indicator "switch SW5, complete the test circuit 86 and connect the power to LED1, LED2, LED3, LED4, LED5, LED6, LED7 and sound sensor S1, so all these indicators are powered on . Each of the diode anodes of the test circuit 86 is connected to a variety of indications in a parallel manner. The direct agitation diode anodes of the circuit 4 are connected. This cuts off the possibility that any energized path is inoperative. The diodes D9, D14, D19, D20, D22, and D23 are all connected in parallel with their cathodes close to the positive power line across their individual relay coils. When the coil that has been energized is de-energized, the generated magnetic field rapidly disintegrates' and generates an instantaneous voltage of opposite polarity to the excitation voltage passing through the coil end. The diodes D9, D14, D19, D20, D22, D23 are

C: \ 2D-CODE \ 91-09 \ 91115800.ptd Page 33 562911 V. Description of the invention (31) The amount of pressure in the direction of its forward bias. This architecture protects the quiet electrical environment of high-voltage tips that are damaged by arcing. Figure 16 illustrates an example of a valve with manifolds 22 connected upwards: a processing isolation valve 70, a low-pressure exhaust valve 73, and an emergency room 69. A special manifold with 16 can be set according to the processing. It lies in the refill line isolation valves 7 0 7 0 and 7 2. Based on this change, one of the best ways to further reduce the system manifold 22 from the manifold 89 illustrated in FIG. 16 is to completely reduce the system manifold 22. In addition to using the isolation valve 70, A specific example of the isolation of the valve 73 and the conveying gas, and an example of the operation of the manifold in Zhuqi processing. When the container 20 newly provides a discharge path, and the stored contacts can be released, the switch may cause the coil to be energized by electricity, and at the same time, it provides a chemistry that has a more bifurcated tube 2 2 Partial view of the rooms 6-9. Independent container container 20. The manifold 22 includes six delivery gas isolation valves 71, a container return valve 72, a shutoff valve 74, and a vacuum supply valve 75. Obviously the chemical equipment is available with one or more manifolds. This is detailed in FIG. 17. Manifolds and Figures in Figure 17 • A blocking valve 76 includes a container return valve 72 and. Therefore, the blocking valve 76 replaces the separate valve in FIG. 16 and the high-purity supply chemical will not stay in the channel 89 of the filling pipe 44. This is because the stop valve 7 6 is used because of the disconnection. Therefore, the manifold in Figure 17 is in danger of contamination. The limbs are detailed in Figure 18. In this specific example, a shut-off valve 7 6 for the tank return valve 72 and a processing line are separated by a vacuum / pressure shut-off valve 9 丨 for the low-pressure drain valve 71. Again, the basic operation is the same as detailed in Figure 7. Therefore, the different descriptions can be applied to all three specific barrel replacements. Isolate and refill the pipeline with manifold 2 2

Page 34 562911 V. Description of the Invention (32) 44 is preferred. This helps prevent system contamination. No operation for the refilling system 18 is required. $: Pipe 22 is connected in parallel, and the tank input_ will need to be linked—adjusted; two = ^ use the divergence, the tank output valve 64 will need to be connected to the refill "44 The milk group source is placed in the refilling pipeline, and the inlet valve 38 of the refill party and son-in-law 30 and the physical isolation compartment 70 of the container 20 are closed, and the valve 7 is closed. The downstream processing pipeline ": 6 八?": Everywhere f Ϊί: 7T0 is isolated from the atmosphere. Gas transmission isolation valve 7 knife 1],: = 77 in the alum s road, the gas transmission pipeline 7 ', k Between the valve 64 and the supply gas supply source, the inlet of the square and the jacket is 20, the exhaust valve 73 is placed in the vacuum line 78 i and the line 44 is refilled. However, the container: CGI is pressurized or pressurized or Vacuum. = Closed valve 74 is a normally closed valve, and a pneumatic valve is used to close the valve. Air pressure will close the valve immediately. Usually " closed. Use milk-actuated normally closed valve in the manifold and cry, The door of the factory i got: the valve becomes an emergency shut-off valve. When the e: 〇 brother and the supply are started, all the S will be closed and the two valves will be closed. The second valve is 75 square meters; 、、、、、。 Vacuum supply line 78 〇field ... 彳 彳, vacuum will be provided to normal operation, the manifold 22 is connected to the pneumatic valve 42 of the conveyor to control the refilling path 44 during the operation Under construction, emergency clearance

111 | 111

C: \ 2D-C0DE \ 91-09 \ 91115800.ptd

Page 35 562911 V. Description of the invention (33) Closed valve 74 is opened, and the gas transmission compartment 7 is opened. The processing pipeline is separated by 70, and the vacuum gas shutoff valve 75 is closed. The low exhaust valve ^ is closed, and the tank is refluxed. The valve 72 is closed, and the tank inlet valve "opens and the tank outlet valve ⑼ opens. Production: ΐ?: Installation 2ν: The following better procedures are used to prevent the transport of high-purity and dry σσ Baixian, the high-purity chemical must be depressurized and isolated from manifold j: Second, clean the manifold. After cleaning, disconnect and remove the empty container. Then, set The newly filled container tank 2 0. Shore needle, and its ambiguities & Cui Zhuang # operation interface Hai, then, the manifold should be cleaned: put 3 if the tank into the leak test. Make again. The container tank 20 is started to discharge the high-purity residues remaining in the manifold 22 and close the container tank 20. The following is to be printed, isolated, and decompressed, unless otherwise specified: The best person. (I should open it during the note.) Make sure that the tank returns ^ 7 ^ Close „Closed 74 should be in the following flow, Yingli σ broadcast from 7 tank back muscle valve 72 Close, the tank return valve should be in the wooden structure. Then, close the processing line isolation valve 70. Of. Canning outlet valve 66. Close the delivery gas isolation module and open the valve; close the valve 75 and the low-pressure exhaust valve 73. Wait until the manifold pressure gauge 92: sell :: έ; zero psia, this takes about four minutes. Lean out approximately close the tank inlet valve 64. Close the low-pressure exhaust valve 73, the gas isolation valve 7 1 and the tank θ & μ 7 9 ”, 'Open the conveyance 箄 waiting car Η Η Open the container tank outlet_, and return the container 72, container outlet 嶋 and Lose; = off = container opening container inlet 64. The above steps are repeated several times as follows: Jiakai Page 36 C: \ 2D-CODE \ 91-09 \ 91115800.ptd 562911 V. Description of the invention (34) At least five times. Finally, the tank inlet valve 64 should be closed. To clean the manifold before disassembling the empty tank 20, it is better to perform the following steps. Open the tank return valve 72 and the low-pressure exhaust valve 7 3. Wait about 30 seconds to discharge as much as possible the high-purity chemicals remaining in the manifold. Close the low-pressure exhaust valve 7 3 and open the delivery gas isolation valve 71. Wait for about four seconds and then close the delivery gas isolation Valve 7 1. Open the low-pressure exhaust valve for about ten seconds'. Ai Liang-Zhu Shidan closed. Repeat the closing of the low-pressure exhaust valve 7 3 and the opening of the transport gas isolation valve 71, wait for about four seconds and then Close the transport gas isolation valve 7 丨, exhaust it at low pressure, open it for about ten seconds, and then close it again (this is at least nineteen The next step is better.) Then, close the vacuum gas shut-off valve 75 and wait for about three seconds. After that, open the low-pressure exhaust valve 73 for about five seconds. 乂 Remove and remove the empty collecting tank 20, the following steps are preferred. 'Add M gas to helium f (with helium as the positive pressure. Open the tank inlet and outlet valves 64 and 66. Cooperate with appropriate work and support the tank outlet valve 66, To prevent rotation, and then loosen the connection of 66, and remove the tank outlet pipe 79. Similar to the port valve, the tank inlet pipe 88. The pressure of the port pressure gas during the entire process and 俟 :::, disassembly: It should flow smoothly Tank inlet and outlet pipes 88, air pollution before connecting a new tank. The water level sensor was removed. The township Lan'an 2 stop manifold was moved away from the empty container tank 20 queen chain and belt. Small is to set a full container tank 20, and put the container tank into the covering body in a gradual manner, and ^ γ ^ step is better. Be careful with the opposite operation safety from the empty container tank 20 disassembly Belt and chain. And outlet valve 66 to inlet and outlet pipes 88 and 7 :. connected = tank inlet valve 64 connected to water level Reactor

562911 V. Description of the invention (35) Cable and close the transmission gas isolation valve 71. Before proceeding to the next step, close the valve 75 and the low-pressure exhaust valve 73. Approximately ten valves 7 3 and open the delivery gas isolation valve 71. Close the transfer gas isolation valve 71 and vacuum as a leak tester, check the tank connection for leaks, clean the manifold, and connect. To clean the manifold, the tank inlet and outlet flow valves 7 2, the vacuum gas shut-off valve 75, and the lower ten seconds, the low-pressure exhaust valve 73 should close the valve 71 for about four seconds, and then close it Opening and closing the delivery gas isolation valve 71 opens the low-pressure exhaust valve 73 for about fifteen seconds and then closes it. Close the tank return valve 72. To house the manifold isolation valve 71 in a normal operating framework. Then slowly open the tank inlet valve 6 6. Adjust the pressure regulator to the isolating line isolation valve 7 〇. In addition, the manifold 22 can also be used for cleaning. To this end, the valve of the cleaning and emptying process is opened and the pneumatic valve 4 2 is closed. The same element can only open downstream valves to the leak test. After turning on the vacuum gas for a few seconds, turn off the low-pressure exhaust for a few seconds (preferably four seconds), and then the gas will be shut off for 7 5. Take advantage of the leaks at the inlet and outlet. If it is set so that the normal operating valves 64 and 66 are closed, the tank pressure relief valve 73 should be opened first. About closed. Turn on the transport gas isolation. Repeat the low pressure exhaust valve 73 and close (preferably at least nineteen times). In winter, make sure that the vacuum gas shut-off valve 75 and the valve 22 'have been slowly opened on the manifold, and then slowly open the delivery port valve 64', and then slowly open the required delivery pressure, and open and empty the refill line 44. In order to isolate the processing pipeline for the incoming light, if necessary, the extra is the end point to be cleaned and emptied.

C: \ 2D-CODE \ 91-09 \ 91115800.ptd Page 38 562911 V. Description of the invention (36) and cleaning. It is recommended that the time for cleaning and emptying should be extended to allow the emptying and cleaning of all lines to be completely evacuated. Although the container chemical refilling system of the present invention has been described in detail in conjunction with high-purity TEOS, as known to those skilled in the art, the system has many other applications for high-purity source chemicals. An exemplary list of various high-purity supply source chemicals that can be used in the chemical refill system of the present invention is shown in Table 1. Table 1 Borazine tetrabutadiene carbon tetrachloroethane trichloroethane trifluoromethane tri-pseudo-pseudo-methylene tris (trimethyl) borate digas methane neobutoxide titanium diethyl sulphate titanium isopropyl Ester hexafluoroacetamidate propionate ethanol titanium copper (I) -trimethylphosphine tetragas fossil ethyl boronic acid tetra-diethylammine

C: \ 2D-CODE \ 91-09 \ 91115800.ptd Page 39 562911 ί, Description of invention (37) Diethyl phosphate triethyl hypophosphite difluorenyl phosphate titanium tetrafluoride ethanol titanium trimethyl orthosilicate * New propoxytitanium ring tetrasilyl isobutoxytitanium trimethylsilyl boron trifluoride silica. Although the present invention has been described in detail, it should be understood that it is possible to make various changes, substitutions and interchanges in this case. , Has not deviated from the spirit and scope of the present invention as claimed in the scope of the patent application described below. Description of component number 1 pin 2 pin 3 pin 4 pin 5 pin 6 pin 7 pin 8 pin 12 Electromagnetic reading

C: \ 2D-CODE \ 91-09 \ 91115800.ptd Page 40 562911 V. Description of the invention (38) 18 Refill system 20 Container tank 21 Metal water level sensor assembly 22 Manifold 23 Magnet 24 Metal pontoon 25 Electric wire 26 Cable 27 Retaining ring 28 Hollow metal shaft 30 Ampoule 31 Channel 32 Outlet channel / outlet tube 33 Hollow line 34 Optical sensor 35 Cable 36 Outlet valve 37 Vacuum / pressure valve 38 Inlet valve 39 Metal water level sensor 40 Control unit Channel 40 41 `` Safety at South Water Level '' 41a `` Ampoule at Double High Water Level '' 42 Valve

mm

C: \ 2D-CODE \ 91-09 \ 91115800.ptd Page 41 562911 V. Description of the invention (39) 4 3 Cover 44 Refilling pipeline 45 Optical sensor assembly 46 Ferrule 4 7 Cable 48 Channel 4 9 High water level metal level sensor / first metal level sensor 5 0 Low water level metal level sensor / second metal level sensor 52 Control Panel 55 First metal level sensor assembly 58 Second metal level sensor Device assembly 6 0 outlet line 61 clamp 62 flange surface 63 line 64 inlet valve 6 5 locking knob 6 6 outlet valve 67 0-ring 69 chemical chamber 70 processing isolation valve 71 conveying gas isolation valve 72 container tributary Valve 73 Low-pressure exhaust valve

C: \ 2D-C0DE \ 91-09 \ 91115800.ptd Page 42 562911 V. Description of the invention (40) 7 4 Emergency stop valve 75 Vacuum supply valve 7 6 Blocking valve 77 Conveying gas line 78 Vacuum line 79 Tank outlet pipe 8 2 Refill circuit 83 "Low volume" circuit 84 Acoustic circuit 86 Test circuit / "Double high water level" circuit 86 87 "Ampoule high" circuit 88 Channel / tank inlet pipe 89 Channel 91 Vacuum / pressure block valve 92 Pressure gauge 99 CS1 Cable Group D 9 Diode D1 4 Diode D1 7 Diode D1 9 Diode D20 Diode D22 Diode D23 Diode

C: \ 2D-CODE \ 91-09 \ 91115800.ptd Page 43 562911 V. Description of the invention (41) F1 Fuse L1 Filter assembly LED1 indicator LED2 "empty volume" indicator LED3 "normal volume" indicator LED4 "Ampoule double height" indicator LED 5 "Ampoule south" means no LED 6 "Ampoule is filling" indicator LED7 "Ampule is not filling" indicator PS1 Linear power supply RS Digital magnetic reed relay switch RS1 "Low "Volume" inductive relay switch RS2 "Empty volume" inductive relay switch RS3 "Double height" sensor relay switch RS4 "Ampoule" sensor relay switch RY1 control relay RY2 control relay RY3 control relay RY4 control relay RY5 control relay S1 Acoustic sensor SW1 Main power switch SW2 "Press to fill" switch SW3 "Abandon fill" switch

C: \ 2D-CODE \ 91-09 \ 91115800.ptd Page 44 562911 V. Description of the invention (42) SW4 "Press to silence" switch SW 5 "Press to test indicator" VI Air control valve V2 Air Control valve

C: \ 2D-CODE \ 91-09 \ 91115800.ptd Page 45 Brief Description of the Drawings Figure 1 is a schematic diagram of a noodle system according to the present invention; refilling and transportation of Taonan purity chemicals Figure 2 is according to the present invention-rendering Front view of the control panel of the early system of the industrial system. Figure 3 is a five-plus-type high-purification ". Figure 4 is a specific example-water level :: a partial cross-sectional side view of the theft; The sensor is in the "on" position. Fig. 5 is a schematic view of the carved port "closed" position according to the present invention. The early water level buoy control sensor is shown in Fig. 6 as a side view according to the present invention; Partial sectional view of the filled ampoule FIG. 7 is shown in FIG. 6 and FIG. 8 is another view according to the present invention; a schematic side view of the surface; Side view of switch assembly; Metal for filling container with eight limbs Figure 10 is a side view of another switch assembly with carved position according to the present invention; 11 is a side view of the revolving assembly according to the present invention; a row of container containers Metal water level switch Figure 12 is a side view of another closed assembly according to the present invention; a specific example of the metal water level for a container is opened. Figure 13 is a conventionally known adjusting body manufacturing equipment and a $ Road schematic diagram; optical water level sensor

562911 Brief description of the diagrams Figure 14 is a schematic diagram of a conventional optical water level sensor circuit; Figures 15, 15A and 15B are schematic diagrams of a control circuit for a control unit; Figure 16 is a schematic diagram of a specific example according to the present invention. Front view of the manifold erection; FIG. 17 is a front view of the manifold erection for a specific example of the present invention; and FIG. 18 is a schematic view of the manifold erection for a specific example of the present invention.

C: \ 2D-CODE \ 91-09 \ 91115800.ptd Page 47

Claims (1)

562911 'It contains a low water level signal and the first metal capacity. ≫ A repurchasing system for directional chemicals, including: a first metal container for storing high purity chemicals, two outlets, and a first water level sensor. The first water level sensor is provided in a 0- = two metal container for storing high-purity water pumps, which includes a magnetic field, and a mouth and a second water level sensor. 'And produce at least-low-water two-speaking tigers one and five Haidi two water level sensors are arranged in the second metal container; A refilling pipeline, which is removably connected to the first: the inlet of the container and the outlet of the second metal container; a first valve in the refilling pipeline; an inert, gas pressure source, For communicating with the inside of the second metal container; . The dagger unit is electrically connected to the first water level sensor, the second water level sensor two, and the first valve of the Hai, wherein the first valve system is opened in response to the control unit receiving from the first water level sensor. The low water level signal allows high-purity chemicals to be input into the first metal container. Then, the first valve is closed in response to the high water level signal received by the control unit from the first water level sensor, and the high levels are terminated. Input of purity chemicals; and a sigma manifold comprising: a transport gas line, the second metal container; and an inert gas supplied from the inert gas pressure source A second valve disposed in the refilling pipeline, wherein the second valve can be closed to isolate the second metal cryogenic outlet valve from part of the refilling pipeline; 562911 VI. Patent application scope A third valve is arranged in the conveying gas pipeline, wherein the third valve can be closed to isolate the inert gas pressure source from the inlet valve of the second metal container; A device for connecting a vacuum source to the gas transmission line; and a device for returning the inert gas pressure source and the vacuum source to at least part of the refilling line, the at least part of the refilling line not being used by the second The valve is isolated. 2. The high-purity chemical refilling system according to item 1 of the patent application, wherein the first metal container comprises stainless steel. 3. The high-purity chemical refilling system of item 2 of the patent application, wherein the second metal container comprises stainless steel. 4. If the high-purity chemical refilling system of item 1 of the patent application scope, wherein the first valve is a normally closed pneumatic valve. 5. If the high-purity chemical refilling system of item 1 of the patent application scope, wherein the second metal container further includes an inlet pneumatic valve that is integrated with the inlet. 6. If the high-purity chemical refilling system of item 1 of the patent application scope, wherein the second metal container further includes an outlet pneumatic valve integrally with the outlet. 7. The high-purity chemical refilling system of item 1 of the patent application scope, wherein the first water level sensor is a stainless steel metal float sensor. 8. The high-purity chemical refilling system of item 1 of the patent application scope, wherein the second water level sensor is a stainless steel metal float sensor. 9. A method for refilling a first metal container using a patent application C: \ 2D- (DDE \ 91-09 \ 91] 15800.ptd Page 49 562911 Six high-purity chemical refilling systems covering the scope of item 1 of the patent application, including ... U-gas is used to pressurize the The two metals are allowed to cry; :: start the first M to respond to the control unit from the low water level of the first water, and allow high-purity chemicals from the first :: belongs to the first metal container; And, 'genus: Close the first -M' in response to the control unit crying from the first water level to the high-water level letter E, and terminate the high-purity chemical from the first:: genus. The current state turns into the first metal container . It belongs to the 10 · plant high-purity chemical refilling system, including: a first metal container for storing high-purity chemicals, which includes an inlet and an ancient outlet and a first water level sensor, and generates at least one low A water level signal, a south water level signal in the mouth, the first water level sensor is disposed at an outlet of the first metal container, a second metal container, and a second water level sensing refilling pipeline, and the second gold-first valve, It is under an inert gas pressure a control unit, a reactor and The first valve unit receives a high-purity chemical input slogan for storing high-purity chemicals from the first water level. The first valve unit includes a water-level induction sensor and generates at least one low-water level receiver disposed in the second metal container. ; Removably connect the outlet of the first metal container that belongs to the container; refill the pipeline in 5h; the source is used to communicate with the interior of the second metal container; communicate with the first water level sensor, the first Two water level senses, where the first valve system is opened in response to the low water level signal received by the control sensor to allow the first metal container, and then the first valve is closed 562911 VI. The scope of patent application is closed in response to the high water level signal received by the control unit from the first water level sensor to terminate the input of high-purity chemicals; and a manifold including: a processing pipeline isolation A valve in the refilling pipeline to isolate the second metal container from part of the refilling pipeline: a transport gas isolation valve for isolating the second metal container from the inert gas pressure source; A low-pressure exhaust valve in the gas line; and a container return valve in the gas delivery line. 11. The high-purity chemical refilling system of claim 10, wherein the first metal container comprises stainless steel. 1 2. The high-purity chemical refilling system according to item 11 of the patent application scope, wherein the second metal container comprises stainless steel. 1 3. The high-purity chemical refilling system according to item 10 of the patent application scope, wherein the first valve is a normally closed pneumatic valve. 1 4. The high-purity chemical refilling system according to item 10 of the patent application scope, wherein the second metal container further includes an inlet pneumatic valve that is integrated with the inlet. 15. The high-purity chemical refilling system according to item 10 of the patent application scope, wherein the second metal container further comprises an outlet pneumatic valve having an outlet integrally with the outlet. 16. The high-purity chemical refilling system according to item 10 of the patent application scope, wherein the first water level sensor is a stainless steel metal float sensor. 1 7. The high-purity chemical refilling system as described in the scope of patent application No. 10 C: \ 2D-CODE \ 91-09 \ 91115800.ptd Page 51 562911 6. Scope of patent application, where the second water level sensor is a stainless steel metal float sensor. 1 8. A method for refilling the first metal container, using a high-purity chemical refilling system such as the scope of patent application No. 10, comprising: pressurizing the second metal container with an inert gas; opening the first metal container A valve in response to a low water level signal received by the control unit from the first water level sensor, and allowing high-purity chemicals to be input from the second metal container into the first metal container; and closing the first valve in response The control unit receives a high water level signal from the first water level sensor, and terminates the high-purity chemical input from the second metal container to the first metal container. C: \ 2D-mDE \ 91-09 \ 91115800.ptd Page 52