557379 A7 B7___ 五、發明説明（i ) [技術領域] 本發明係有關於一種包含有光纖區塊和繞射光柵之光 模組與其製作方法。 [習知背景] 目前’結合光纖區塊和微型透鏡基板之光模組可用來作 為光通信用裝置，而該光模組係使來自發光元件之光經由 光纖射入微型透鏡而可取出準直光，或使業經準直之光經 由微型透鏡射入光纖者，·其具體構造係顯示於第8圖（a ) 〜（c ) 〇 第8圖（a)所示之光模組係插有光纖ι〇1之光纖區塊 102與形成有微型透鏡1〇3之微型透鏡基板隔著透明 間隔物105而一體形成者，同圖之（b )所示之光模組係將 光纖區塊102直接固著於微型透鏡基板1〇4者，同圖之（c ) 所示之光模組係將光纖區塊102與微型透鏡基板1〇4固著 於基座106者。 又’第9圖係於光纖區塊1〇2插入多數光纖，並於 伤支型透鏡基板104形成多數對應前述多數光纖IQ!之微型 透鏡103 ’且舉例來說’ s亥構造揭示於日本專利公開公報 特開平2-123301號中。 前述微型透鏡基板104係藉以下方法製成，即：經由掩 膜於玻璃基板表面進行離子交換而形成折射率不同之領域 的方法，將高折射率樹脂填入藉蝕刻而形成之凹部内的方 法，將紫外線硬化樹脂沖壓成形於玻璃基板表面之2p成 形法，及溶膠凝膠法（Sol-Gel)等。 本紙張尺度適用中國國家標準（CNS) A4规格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁)557379 A7 B7___ V. Description of the Invention (i) [Technical Field] The present invention relates to a light module including a fiber block and a diffraction grating and a method for manufacturing the same. [Knowledge background] At present, an optical module combining an optical fiber block and a micro lens substrate can be used as an optical communication device, and the optical module allows light from a light emitting element to enter the micro lens through an optical fiber to be collimated. Light, or the collimated light entering the optical fiber through a micro lens, the specific structure is shown in Figure 8 (a) ~ (c) 〇 The optical module shown in Figure 8 (a) is inserted with optical fiber The optical fiber block 102 of ι〇1 and the micro lens substrate on which the micro lens 10 is formed are integrally formed through a transparent spacer 105. The optical module shown in (b) of the figure directly connects the optical fiber block 102. Those who are fixed on the micro lens substrate 104, and the optical module shown in (c) of the same figure are those who fix the optical fiber block 102 and the micro lens substrate 104 on the base 106. Fig. 9 shows that the majority of optical fibers are inserted in the optical fiber block 102, and a plurality of miniature lenses 103 corresponding to the aforementioned majority of the optical fiber IQ! Are formed on the wound support lens substrate 104. For example, the shai structure is disclosed in Japanese patent Japanese Unexamined Patent Publication No. 2-123301. The aforementioned micro lens substrate 104 is manufactured by a method of forming a field with a different refractive index through ion exchange on a surface of a glass substrate through a mask, and a method of filling a high refractive index resin into a recess formed by etching. , 2P molding method of press-molding an ultraviolet curable resin on the surface of a glass substrate, and a sol-gel method (Sol-Gel). This paper size applies to China National Standard (CNS) A4 (210X297 mm) (Please read the precautions on the back before filling this page)
557379 一 A7 ----B7_ 五、發明説明（） • 另一方面，光纖區塊102係於矽基板等上相距一定間隔 形成V槽，且將光纖固定於該等v槽内。又，除該構造以 外’亦有一已知構造係預先於不銹鋼基板或玻璃基板上形 成孔’並將光纖插入固定於該孔。 欲提高通信精度時，須使光模組之光纖與微型透鏡之光 軸致’右光轴偏移’如第8圖及第9圖所示，物體光便 m 無法與光軸平行。 目前已揭露之如前所述之光模組之光軸調整法有曰本 專利公開公報特開平9-061666號中所揭示之方法。該習知 技術係將具有與光纖區塊及準直透鏡陣列之排列節距相同 排列節距之格栅狀圖案的光罩設置於用以檢測光束形狀之 檢測器之前，且利用該檢測器感應經由光纖區塊射入準直 透鏡陣列，並進而由準直透鏡陣列射出之光中，未遭該光 罩遮蔽而通過之光，並調整光纖區塊及準直透鏡陣列之相 對位置俾使相當於各光纖之光束形狀呈現均等。 不只曰本專利公開公報特開平9-061666號，習知之光 - 軸調整法皆是移動光纖區塊或微型透鏡基板中任一方以進 ▲ 行調整，故需要特別之移動裝置，且調整本身亦極粗糙。 尤其，光模組中結合有多數光纖與多數微型透鏡，且微 型透鏡基板上係可以較高精度地將微型透鏡排列成1維或 2維狀’但光纖區塊上必須形成槽或穿設孔，又，由於光 纖自身外徑不均一且對應光纖外徑之中心位置不均一，所 以無法高精度地將多數光纖排列成1維或2維狀。 又’如第8圖所示’包含有多數光纖之光纖區塊中，各 本紙張尺度適用中國國家標準（CNS〉A4規格（2】0X297公釐） (請先閲讀背面乏注意事項再填寫本頁) 訂— :線丨 557379 A7 __ B7_ 五、發明説明（3 ) 光纖偏移之方向及量參差不齊，即使配合一條光纖而調整 光軸，其他光纖之光軸調整仍會惡化。 [發明之揭示] 用以解決前述課題之第1發明之光模組係構造成：包 含保持有光纖之光纖區塊及一面與該光纖區塊密接之透明 區塊，而於該透明區塊與該光纖區塊相反之側面設有繞射 光柵’該繞射光柵係使從前述光纖射出之來自一方之光學 系統的光與光纖光軸平行或以預定之角度朝另一方之光學 系統射出’或者將由另一方之光學系統射入之光朝光纖端 面聚集的構造。 又，第2發明之光模組係構造成：包含保持有光纖之 光纖區塊及與該光纖區塊相隔預定距離而配置之透明區 塊’而於該透明區塊與該光纖區塊相對之面設有繞射光 柵，該繞射光柵係使從前述光纖射出之來自一方之光學系 統的光與光纖光軸平行或以預定之角度朝另一方之光學系 統射出，或者將由另一方之光學系統射入之光朝光纖端面 聚集的構造。 月ϊ述光纖若為多數時，亦對應該等光纖而設置多數繞 射光柵’且為對應各光纖之位置偏移，各繞射光栅之折射 率也不同。 繞射光栅是由例如光折變（光折射率）材料所構成者。 由於在本發明中’該繞射光栅可依各光纖而變更特性，故 若個別進行光軸調整，便可獲得相同結果。 又’本發明之光模組之製作方法係··將一面形成有光 本紙張尺度適用中國國家標準（CNS) A4規格（21〇><297公釐） (請先閲讀背面之注意事項再填寫本頁)557379 A7 ---- B7_ V. Description of the invention () • On the other hand, the optical fiber blocks 102 are formed on silicon substrates with a certain interval to form V grooves, and the optical fibers are fixed in these v grooves. In addition to this structure, there is also a known structure in which a hole is formed in a stainless steel substrate or a glass substrate in advance and an optical fiber is inserted and fixed in the hole. In order to improve the communication accuracy, the optical axis of the optical module and the micro lens must be caused to ‘shift the right optical axis’ as shown in FIGS. 8 and 9. The object light m cannot be parallel to the optical axis. The method of adjusting the optical axis of the optical module as previously described is disclosed in Japanese Patent Laid-Open Publication No. 9-061666. The conventional technique is to set a photomask having a grid pattern with the same arrangement pitch as the arrangement pitch of the optical fiber block and the collimating lens array before the detector for detecting the shape of the beam, and use the detector to sense The light that enters the collimator lens array through the fiber optic block, and then passes through the light from the collimator lens array without being shielded by the mask, and adjusts the relative positions of the fiber optic block and the collimator lens array to be equivalent The beam shape of each fiber is uniform. Not only is the Japanese Patent Laid-Open Publication No. 9-061666, the conventional light-axis adjustment method is to move either one of the optical fiber block or the micro lens substrate for adjustment, so a special mobile device is required, and the adjustment itself is also Extremely rough. In particular, most optical fibers and most micro lenses are combined in the optical module, and the micro lens substrate can be arranged in a 1-dimensional or 2-dimensional shape with high accuracy. However, grooves or through holes must be formed in the optical fiber block. Moreover, since the outer diameter of the optical fiber itself is not uniform and the center position corresponding to the outer diameter of the optical fiber is not uniform, it is impossible to arrange most of the optical fibers into a one-dimensional or two-dimensional shape with high accuracy. And 'as shown in Figure 8' in the fiber block containing most of the fibers, each paper size applies the Chinese national standard (CNS> A4 specification (2) 0X297 mm) (please read the precautions on the back before filling in this Page) Order —: Line 丨 557379 A7 __ B7_ V. Description of the invention (3) The direction and amount of fiber deviation are uneven. Even if the optical axis is adjusted with one optical fiber, the optical axis adjustment of other optical fibers will still deteriorate. [Invention [Reveal] The optical module of the first invention for solving the foregoing problem is configured to include an optical fiber block that holds an optical fiber and a transparent block that is in close contact with the optical fiber block, and the transparent block and the optical fiber A diffractive grating is provided on the opposite side of the block. 'The diffractive grating is such that the light from one optical system emitted from the aforementioned optical fiber is parallel to the optical axis of the optical fiber or is emitted toward the other optical system at a predetermined angle.' A structure in which light incident from one optical system is focused toward the end face of the optical fiber. The optical module of the second invention is structured to include an optical fiber block holding an optical fiber and a predetermined distance from the optical fiber block. The transparent block is provided with a diffraction grating on the side of the transparent block that is opposite to the optical fiber block. The diffraction grating makes the light from one optical system emitted from the optical fiber parallel to the optical axis of the optical fiber, or A structure in which a predetermined angle is emitted toward the optical system of the other party, or light incident from the optical system of the other party is collected toward the end face of the optical fiber. If the optical fiber is majority, a plurality of diffraction gratings are also provided corresponding to the optical fiber. And in order to correspond to the positional deviation of each optical fiber, the refractive index of each diffraction grating is also different. The diffraction grating is made of, for example, a photorefractive (light refractive index) material. Because in the present invention, the diffraction grating can be The characteristics of each optical fiber are changed, so if the optical axis is adjusted individually, the same result can be obtained. Also, the method of making the optical module of the present invention is to form one side with light. The paper size is applicable to Chinese National Standard (CNS) A4. Specifications (21〇 > < 297mm) (Please read the precautions on the back before filling this page)
4557379 A7 B7 五、發明説明 折變材料層之透明區塊與保持有光纖之光纖區塊密接俾使 該光折變材料層位於與光纖相反之側，又，將來自雷射光 源之雷射光分割成物體光和參考光，使該物體光射入保持 於該光纖區塊之光纖，再將該來自光纖之物體光和該參考 光重合於该光折變材料層’並於該光折變材料層形成可對 應藉該重合而產生之光度之強弱的繞射光栅。 儀| 又’本發明之光模組之另一製作方法係：將保持有光 纖之光纖區塊和一面形成有光折變材料層之透明區塊相隔 預定間隔配置成該光折變材料層與該光纖區塊相對，又， 將來自雷射光源之雷射光分割成物體光和參考光，使該物 體光射入保持於該光纖區塊之光纖，再將該來自光纖之物 體光和該參考光重合於該光折變材料層，並於該光折變材 料層形成可對應藉該重合而產生之光度之強弱的繞射光 栅。 又’刖述參考光可為具有可覆蓋透明區塊全體有效面 積之光束截面積的準直光，或者亦可為具有可覆蓋形成於 前述透明區塊之各繞射光柵有效面積之光束截面積的準直 又，若欲為可覆蓋各繞射光栅有效面積之業經分割之 參考光，前述者是準備微型透鏡陣列，並利用其他光纖區 塊使參考光射入該微型透鏡陣列，經由該微型透鏡睁列之 各微型透鏡而將光束截面積可覆蓋有效面積之準直光照射 於構成光模、组之各燒射光栅。 又，使前述業經平直之參考光之高斯光束腰位於與所 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) .訂· :線 B7 五、發明說明（5 ) 7成之繞射光栅相隔預定距離的位置，又，前述參考光宜 為由 (請先閱讀背面之注意事項再填寫本頁) /、所形成之繞射光柵相隔預定距離之位置散射的散射 球面波。 利用前述之構造，即使光纖與光軸之間多少有偏移， 仍可藉繞射光栅而偏轉光束之方向使物體光朝所期望方向 射出。 又’由於以預先業經固定之光纖為前提而利用參考光 η己錄各繞射光柵，所以可對應各偏移而將物體光偏轉於參 考光之方向。因此，即使光纖區塊中光纖之排列精度未必 特別正確，仍可射出方向一致之光束陣列。 且’多數光纖和與其對應之多數繞射光柵係可同時且 個別進行調整。 [發明之實施形態] 以下，說明本發明之實施型態。第1圖（a )及（b )係 顯不本發明之光模組中，當光纖及微型透鏡為單一時之例 的截面圖。第1圖（a)所示之光模組1係將光纖區塊2 與透明區塊3密接而構成者，且光纖區塊2係於矽基板2 j 上形成槽或孔22，並將單一模式光纖23固定於該槽或孔 2 2。光纖區塊2並不限於前述構造，例如，亦可為預先於 不銹鋼基板或玻璃基板上形成孔，並將光纖插入固定於該 孔的構造。 在透明區塊3與光纖區塊2相反之側面設置繞射光柵4 俾使物體光與光軸平行而射出。在本實施例中，繞射光栅 4係可使物體光之光路與光軸平行，並且亦可發揮作為射 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 557379 A7 B7 五、發明説明（ 出平行光之聚光透鏡的作用。 (請先閲讀背面之注意事項再填寫本頁) 又’第1圖（b )所示之光模組1係將光纖區塊2與透 明區塊3固著於基座5,且於透明區塊3面向光纖23射出 端之面設有繞射光柵4。 依第2圖說明用以形成前述繞射光柵4之機構。光模組 1疋以第1圖（a )所示者為例。首先，將透明區塊3與光 纖區塊2密接。又，在透明區塊3與光纖區塊2相反之側 面預先形成光折變聚合物層6。光折變聚合物層6是具有 可對應照射光之強度而使折射率變化，並於光照射停止後 將”亥變化固疋之特性的材料。亦可使用其他具有前述特性 之光折變（光折射率）材料。 、可丨 又，在第2圖中，11係作為發光源之半導體雷射，12 係用以將來自半導體雷射之雷射光分割成物體光和參考光 之光分割機構，13係使參考光成為與光軸平行之光並由與 物體光相反之側射入光折變聚合物層6的透鏡。 :線丨 藉透鏡13使前述參考光成為具有可覆蓋形成於光折變 聚合物層6之繞射光柵4有效面積之光束截面積的準直 光，又，使業經準直之參考光之高斯光束腰位於與光折變 聚合物層6相隔預定距離的位置，又，參考光為由與光折 變聚合物層6相隔預定距離之位置散射的散射球面波。 如前所述般，使利用分割機構12所分割之物體光射入 光纖23，並使由光纖23射出之物體光射入光折變聚合物 層6。另一方面，使利用分割機構12所分割之參考光由相 反之側照射至光折變聚合物層6。 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公旋） -9- 557379 A7 __B7 五、發明説明（7 ) 如此一來，物體光與參考光便會重合於光折變聚合物層 6而形成干涉條紋。該干涉條紋係可對應光度之強弱者， 如刖所述般，由於光折變聚合物層具有可對應照射光之強 度而使折射率變化，並於照射光停止後將該變化固定之特 性，故於光折變聚合物層6可記錄對應干涉條文之繞射光 柵4 〇 如此一來，業經記錄之繞射光柵4會發揮使由光纖23 射出之物體光朝參考光之方向，即，與光纖23之光軸平行 而射出的特性。（按全像術原理，利用物體光與參考光所記 錄之繞射光柵係可在物體光射入時，使其朝原參考光之方 向繞射。） 又’亦利用同樣方法製作第1圖（b )所示之光模組。 第3圖係顯示本發明之光模組中，當光纖及微型透鏡為 多數時之例的截面圖，第4圖係從第3圖之A-A方向箭頭 所視之圖’在本實施例係於光纖區塊2保持有排列成1維 或2維狀之光纖23，並使透明區塊3與光纖區塊2之一面 密接’且於該透明區塊3設有用以對應各光纖23之繞射光 柵4。光模組亦可為第1圖（b )所示之構造。 當光纖23是多數時，由於光纖23之偏移各有不同，故 用以使由各光纖23射出之物體光與光軸成平行狀之各繞 射光栅4在各部分之特性也不同。 第5圖係說明第3圖之光模組之製作方法的圖示。該製 作方法係使利用光分割機構7所分割之物體光經由光纖8 射入光纖區塊2之各光纖23。另一方面，使參考光經由光 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐）4557379 A7 B7 V. Description of the invention The transparent block of the layer of refractive material is tightly connected with the block of optical fiber holding the optical fiber, so that the layer of photorefractive material is located on the opposite side of the optical fiber, and the laser light from the laser light source is divided into objects Light and reference light, so that the object light enters the optical fiber held in the optical fiber block, and then the object light from the optical fiber and the reference light are superimposed on the photorefractive material layer and formed correspondingly on the photorefractive material layer. Diffraction gratings of light intensity generated by this coincidence. Yi | Another method for manufacturing the optical module of the present invention is: arranging the optical fiber block holding the optical fiber and the transparent block formed with a photorefractive material layer on one side to arrange the photorefractive material layer and the optical fiber at a predetermined interval. The blocks are opposite, and the laser light from the laser light source is divided into object light and reference light, so that the object light is incident on the optical fiber held in the optical fiber block, and the object light from the optical fiber is overlapped with the reference light. Diffraction gratings are formed on the photorefractive material layer and on the photorefractive material layer to correspond to the intensity of light produced by the superposition. It is also stated that the reference light may be a collimated light having a cross-sectional area of a light beam that can cover the entire effective area of the transparent block, or a cross-sectional area of a light beam that can cover the effective area of each diffraction grating formed on the transparent block. If you want to divide the reference light that can cover the effective area of each diffraction grating, the former is to prepare a micro-lens array, and use other optical fiber blocks to make the reference light enter the micro-lens array and pass the micro-lens array. Each micro-lens of the lens is opened, and collimated light whose cross-sectional area of the beam can cover the effective area is irradiated to each of the burning gratings constituting the optical mode and group. In addition, the Gaussian beam waist of the aforementioned straight reference light is located in accordance with the Chinese paper standard (CNS) A4 (210X297 mm) of the paper size (please read the precautions on the back before filling this page). ·: Line B7 V. Description of the invention (5) 70% of the diffraction gratings are separated by a predetermined distance, and the above reference light should be the reason (please read the precautions on the back before filling this page) /, the formed winding Scattering spherical waves scattered by a grating at a predetermined distance. With the aforementioned structure, even if there is a slight offset between the optical fiber and the optical axis, the direction of the light beam can be deflected by the diffraction grating so that the object light is emitted in a desired direction. Also, since the reference light η is used to record the respective diffraction gratings on the premise that the optical fiber is fixed in advance, the object light can be deflected in the direction of the reference light in response to each offset. Therefore, even if the alignment accuracy of the optical fibers in the optical fiber block is not necessarily correct, a beam array with the same direction can be emitted. Moreover, most of the optical fibers and corresponding diffraction grating systems can be adjusted simultaneously and individually. [Embodiments of the invention] Hereinafter, embodiments of the invention will be described. Figures 1 (a) and (b) are cross-sectional views showing an example when the optical fiber and the micro lens are single in the optical module of the present invention. The optical module 1 shown in FIG. 1 (a) is formed by closely connecting the optical fiber block 2 and the transparent block 3, and the optical fiber block 2 is formed in the silicon substrate 2 j to form a slot or hole 22, and The mode fiber 23 is fixed to the groove or hole 2 2. The optical fiber block 2 is not limited to the aforementioned structure. For example, it may be a structure in which a hole is formed in a stainless steel substrate or a glass substrate in advance, and an optical fiber is inserted into and fixed to the hole. A diffraction grating 4 is provided on the opposite side of the transparent block 3 and the optical fiber block 2 so that the object light is emitted in parallel with the optical axis. In this embodiment, the diffraction grating 4 can make the light path of the object parallel to the optical axis, and can also be used as the standard of the paper. The Chinese national standard (CNS) A4 specification (210X297 mm) 557379 A7 B7 V. Description of the invention (The function of a condenser lens that emits parallel light. (Please read the precautions on the back before filling out this page) The optical module 1 shown in Figure 1 (b) is a combination of the optical fiber block 2 and the transparent area The block 3 is fixed to the base 5, and a diffraction grating 4 is provided on the surface of the transparent block 3 facing the emitting end of the optical fiber 23. The mechanism for forming the above-mentioned diffraction grating 4 is described according to FIG. 2. Optical module 1 疋Take the example shown in Fig. 1 (a) as an example. First, the transparent block 3 and the optical fiber block 2 are tightly connected. In addition, a photorefractive polymer layer 6 is formed in advance on the side of the transparent block 3 opposite to the optical fiber block 2. The photorefractive polymer layer 6 is a material that can change the refractive index according to the intensity of the irradiated light, and after the light irradiation is stopped, it has the property of changing the solid state. Other photorefractive materials having the aforementioned characteristics (light Refractive index) material. ， 可 丨 Again, in the second figure, 11 series is used as the light source Of semiconductor lasers, 12 is a light dividing mechanism for dividing laser light from semiconductor lasers into object light and reference light, and 13 is a reference light that is parallel to the optical axis and emitted from the side opposite to the object light Lens of the light-refractive polymer layer 6. The line of reference light makes the aforementioned reference light a collimated light having a cross-sectional area of a light beam that can cover the effective area of the diffraction grating 4 formed in the light-refractive polymer layer 6, and, The Gaussian beam waist of the collimated reference light is located at a predetermined distance from the photorefractive polymer layer 6, and the reference light is a scattering spherical wave scattered by a predetermined distance from the photorefractive polymer layer 6. As described above, the object light divided by the dividing mechanism 12 is made to enter the optical fiber 23, and the object light emitted by the optical fiber 23 is made to enter the photorefractive polymer layer 6. On the other hand, the object divided by the dividing mechanism 12 is made to The reference light is irradiated from the opposite side to the photorefractive polymer layer 6. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 revolution) -9- 557379 A7 __B7 V. Description of the invention (7) Light and reference light will overlap the photorefractive polymer layer 6 to form interference fringes. The interference fringes can correspond to the intensity of the light, as described above, because the photorefractive polymer layer has the intensity corresponding to the light irradiated. The refractive index is changed, and the change is fixed after the irradiation light is stopped. Therefore, the photorefractive polymer layer 6 can record the diffraction grating 4 corresponding to the interference clause. In this way, the recorded diffraction grating 4 will play a role The characteristic of making the object light emitted by the optical fiber 23 toward the direction of the reference light, that is, emitted parallel to the optical axis of the optical fiber 23. (According to the principle of holography, the diffraction grating system recorded using the object light and the reference light can be When the object light is incident, make it diffract in the direction of the original reference light. ) Again, the optical module shown in FIG. 1 (b) is also produced by the same method. FIG. 3 is a cross-sectional view showing an example when the optical fiber and the microlens are plural in the optical module of the present invention, and FIG. 4 is a view seen from the arrow AA in FIG. The optical fiber block 2 holds the optical fibers 23 arranged in a one-dimensional or two-dimensional shape, and the transparent block 3 and the one face of the optical fiber block 2 are closely contacted with each other. Raster 4. The optical module may have a structure as shown in FIG. 1 (b). When there are a large number of optical fibers 23, since the offset of the optical fibers 23 is different, the characteristics of the diffraction gratings 4 used to make the object light emitted from each optical fiber 23 parallel to the optical axis are different in each part. Fig. 5 is a diagram illustrating a method of manufacturing the optical module of Fig. 3. In this manufacturing method, the object light divided by the light dividing mechanism 7 is made incident on each optical fiber 23 of the optical fiber block 2 through the optical fiber 8. On the other hand, let the reference light pass through. The paper size is in accordance with China National Standard (CNS) A4 (210X297 mm).
-10- 557379 A7 B7 五、發明説明 分割機構9及微型透鏡陣列1〇射入光折變聚合物層6，接 著和前述實施例相同，於光折變聚合物層6形成對應物體 光與參考光之干涉條紋的繞射光栅4。 在圖示之例中，係使參考光之光束截面積可覆蓋光折變 聚合物層6之各繞射光柵4的有效面積，亦可使用一準直 透鏡取代微型透鏡陣列10而使參考光成為具有可覆蓋光 折變聚合物層6全體有效面積之光束截面積的準直光。 第6圖係顯示光模組之另一實施例的圖示。該實施例係 於透明區塊3之外側配置透明罩15以保護繞射光柵4。 又，此時，利用密封材16將繞射光柵4之外側密封。 以上實施例係顯示藉形成繞射光栅，可使由光模組1 射出之物體光與光軸呈平行之例，依本發明亦可積極地使 物體光對光軸以預定角度射出。即，第7圖係說明光模組 製作方法之另一實施例的圖示，在該實施例中係使參考光 對光轴以預定角度射入。 由於當繞射光栅4之記錄形成時之參考光是與實際使 用狀態時射出之光同一方向，故若使參考光以預定角度射 入，便可形成對應該入射角之繞射光栅4。 [產業可利用性] 如以上所說明者，依本發明，藉繞射光柵偏轉光束方向 且聚光’利用此可在不使用透鏡下使物體光成為平行光而 朝所期望方向射出。 又’由於以預先業經固定之光纖為前提而利用參考光記 錄各繞射光栅’所以可對應光纖之個別偏移而將物體光偏 本紙張尺度適用中國國家標準（CNS) A4規格（210父297公|〉 (請先閲讀背面之注意事項再填寫本頁)-10- 557379 A7 B7 V. Description of the invention The segmentation mechanism 9 and the microlens array 10 are incident on the photorefractive polymer layer 6, and then the same as in the previous embodiment, the photorefractive polymer layer 6 forms the corresponding object light and reference light. Diffraction grating 4 of interference fringes. In the example shown in the figure, the cross-sectional area of the light beam of the reference light can cover the effective area of each of the diffraction gratings 4 of the photorefractive polymer layer 6. A collimating lens can also be used instead of the micro lens array 10 to make the reference light into Collimated light having a beam cross-sectional area that covers the entire effective area of the photorefractive polymer layer 6. FIG. 6 is a diagram showing another embodiment of the optical module. In this embodiment, a transparent cover 15 is disposed outside the transparent block 3 to protect the diffraction grating 4. At this time, the outside of the diffraction grating 4 is sealed with a sealing material 16. The above embodiment shows an example in which the diffraction light can be used to make the object light emitted by the optical module 1 parallel to the optical axis. According to the present invention, the object light can also be actively emitted at a predetermined angle to the optical axis. That is, Fig. 7 is a diagram illustrating another embodiment of the method of manufacturing the optical module, in which the reference light is incident on the optical axis at a predetermined angle. Since the reference light when the recording of the diffraction grating 4 is formed is the same direction as the light emitted in the actual use state, if the reference light is incident at a predetermined angle, the diffraction grating 4 corresponding to the incident angle can be formed. [Industrial Applicability] As described above, according to the present invention, the beam direction is deflected by the diffraction grating and the light is condensed ', so that the object light can be made into a parallel light without using a lens and can be emitted in a desired direction. And 'Because the pre-fixed optical fiber is used as the premise, the reference grating is used to record the diffraction gratings', so the object light can be deflected according to the individual offset of the optical fiber. Public |〉 (Please read the notes on the back before filling this page)
.、可I :線 -11 - 557379 A7 ~--- B7 五、發明説明^ ) "—〜 "~ ---. 、 可 I: Line -11-557379 A7 ~ --- B7 V. Description of the invention ^) "-~ " ~ ---
9 J 轉於參考光之方向。因此，即使光纖區塊中光纖之排列精 又未必特別正破，仍可射出方向一致之光束陣列。 (請先閲讀背面之注意事項再填寫本頁) 由於特別是即使當光纖區塊保持有多數光纖時，亦可同 時製作對應個別光纖之偏移的繞射光栅，故效果極佳。 [圖式之簡單說明] 第1圖（a )及（b )係顯示本發明之光模組中，當光纖 及微型透鏡為單一時之例的截面圖。 第2圖係說明第〗圖（a )所示之光模組之製作方法的 圖示。 第3圖係顯示本發明之光模組中，當光纖及微型透鏡為 多數時之例的截面圖 第4圖係從第3圖之A-A方向箭頭所視之圖 第5圖係說明第3圖所示之光模組之製作方法的圖示 第6圖係顯示光模組之另一實施例的圖示。 第7圖係說明光模組製作方法之另一實施例的圖示。 第8圖係說明習知光模組之不佳處的圖示。 第9圖係說明習知光模組之不佳處的圖示。 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） -12- 557379 A7 ~ B7 五、發明説明（1Q ) . [元件標號表] 1.. .光模組 2，102…光纖區塊 > 3…透明區塊 4…繞射光柵 5，106…基座 6.. .光折變聚合物層 7,9，12...光分割機構 8,23，101...光纖 10.. .微型透鏡陣列 11.. .半導體雷射 13.. .透鏡 15.. .透明罩 1 6...密封材 2 1…石夕基板 ◦ 22···槽或孔 • 103…微型透鏡 • 104...微型透鏡基板 105…透明間隔物 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公釐） -----------------------裝------------------?τ------------------線 (請先閲讀背面之注意事項再填寫本頁) -13-9 J turns in the direction of the reference light. Therefore, even if the alignment of the optical fibers in the optical fiber block is not necessarily straight forward, a beam array with the same direction can be emitted. (Please read the precautions on the back before filling in this page.) Since the diffraction grating corresponding to the offset of individual fibers can be made at the same time, especially when the fiber block holds a large number of fibers, the effect is excellent. [Brief description of the drawings] Figures 1 (a) and (b) are cross-sectional views showing an example when the optical fiber and the micro lens are single in the optical module of the present invention. Fig. 2 is a diagram illustrating a method of manufacturing the optical module shown in Fig. (A). Fig. 3 is a cross-sectional view showing an example when the optical fiber and the microlens are plural in the optical module of the present invention. Fig. 4 is a view viewed from the AA direction arrow of Fig. 3. Fig. 5 is an explanation. Illustration of the manufacturing method of the optical module shown in Fig. 6 is a diagram showing another embodiment of the optical module. FIG. 7 is a diagram illustrating another embodiment of a method of manufacturing an optical module. FIG. 8 is a diagram illustrating the disadvantages of the conventional optical module. FIG. 9 is a diagram illustrating the disadvantages of the conventional optical module. This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) -12- 557379 A7 ~ B7 V. Description of the invention (1Q). [Component reference table] 1 ... Optical module 2, 102 ... Fiber zone Blocks> 3 ... Transparent blocks 4 ... Diffraction gratings 5, 106 ... Bases 6 ... Photorefractive polymer layers 7, 9, 12 ... Light splitting mechanisms 8, 23, 101 ... Optical fibers 10. .. Micro lens array 11. .. Semiconductor laser 13... Lens 15... Transparent cover 1 6. Sealing material 2 1. Shi Xi substrate ◦ 22... 104 ... Miniature lens substrate 105 ... Transparent spacer The size of this paper is applicable to China National Standard (CNS) A4 specification (210X297 mm) --------------------- --------------------? Τ ------------------ line (Please read the precautions on the back first Refill this page) -13-