經濟部中央標準局員工消費合作社印f 556286 A7 ____B7 五、發明説明（I ) 微小透鏡(Micro Lens)被用於許多高級光學產品上，如數位相 機，投影機及第三代液晶顯示器背光板上或反射式LCD用之前 光板，尤其珀於LCD背光板上其可節省一半以上成本，因傳統 背光板，都須在導光板上加一層擴散片及二層聚光片(3M公司專 利產品），其中聚光片就佔整個背光模組50%以上成本，為了降 底成本因而本創作人曾研發出一種在導光板上製作許多微小透鏡 直接一艟射出成形來取代傳統的聚光片（如專利申請第87102474 號液晶顯示器前光板） 由於微小透鏡的製作技術需要用到LIGA (Lithographice Palvanoformung and Abformung)技術，因此需要光阻及曝光機加 上無塵家、黃光室、純水系統，廢水處理等設施，其投資非常昂 貴’通常微小透鏡在Ιμπι〜ΙΟμτη間較容易製作，因光阻塗佈容易， 曝光也容易，但在ΙΟμιη以上至1〇〇μιη(背光板所用的微透鏡粒徑 約20〜80μπι)間則是越厚越難做，因此須用到厚膜光阻，曝光則 必須改用深紫外光或同步輻射X-光才能夠用，又因其曝光面積都 不大一般都在8"以内（台灣同步輻射中心最大只能做到6吋），若 要特別設計給14”面積使用的曝光設備則曝光設備將花費龐大可 能要上億元台幣，所以利用光阻曝光顯影方式製作直徑2〇μιη以 上的微小透鏡，且大面積(14’’以上），以目前設備真的是一件非常 難的工程且極昂貴。 有鑑於上述之困難處經本創作人多次的思考與實驗，終於開 發出一種製造微透鏡的新方法且微透鏡直徑在2〇μιη〜ι〇〇μιη製作 上也很容易，即以熱塑性有機材料塗層來取代光阻，而用雷射光 取代曝光機，直接以雷射光將不要的有機層打掉，此方法的優點 (諸先Μ讀背面之注意事項再填寫本頁)Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs f 556286 A7 ____B7 V. Description of the Invention (I) Micro Lens are used in many advanced optical products, such as digital cameras, projectors and backlight boards of third-generation LCD monitors Or the reflective LCD used before the light plate, especially on the LCD backlight board, it can save more than half of the cost, because the traditional backlight board, you must add a layer of diffuser and two layers of light condensing sheet (3M company patented products), The light-condensing sheet accounts for more than 50% of the cost of the entire backlight module. In order to reduce the cost, the author has developed a method of making a lot of tiny lenses on the light guide plate and directly ejecting them to replace the traditional light-condensing sheet (such as a patent Application No. 87102474 front light panel for liquid crystal display) Because LIGA (Lithographice Palvanoformung and Abformung) technology is required for the production technology of micro lenses, a photoresist and exposure machine plus a clean room, yellow light room, pure water system, and wastewater treatment are required. And other facilities, the investment is very expensive. 'Usually small lenses are easier to make between 1μπι and 10μτη, which is easy to apply due to photoresist. Exposure is also easy, but the thicker the more difficult it is between 10 μm and 100 μm (the diameter of the micro lens used for the backlight is about 20 to 80 μm), so a thick film photoresist must be used, and exposure must be changed to Deep ultraviolet light or synchrotron X-ray can only be used, and because the exposure area is not large, it is generally within 8 " (Taiwan synchrotron radiation center can only achieve 6 inches at the maximum), if it is specially designed for 14 ”area Exposure equipment will cost huge exposure may cost hundreds of millions of Taiwan dollars, so the use of photoresist exposure and development method to produce micro lenses with a diameter of more than 20 μm, and a large area (14 '' or more), with the current equipment is really a In view of the above-mentioned difficulties, after many thoughts and experiments by the author, a new method for manufacturing microlenses was finally developed and the diameter of the microlenses was 20 μm to 5 μm It is also very easy to replace the photoresist with a thermoplastic organic material coating, and use laser light to replace the exposure machine, and directly remove unnecessary organic layers with laser light. The advantages of this method Notes on filling out this page)
經濟部中央標準局貝工消費合作社印义 556286 A7 -------B7 發明説明~一 一—-— 為它不需黃光室，不需昂貴的厚膜光阻材料，不須光罩，當然也 不需要深紫外光或Χ_光曝光機，也不需要純水及廢水處理^程 也更簡4 ,投資設備也很便宜，此方法要製作大面積2〇"以上沒 問題，只要有一台精密的X、Υ移動平台及一雷射光機器即可。/ 鲶配合圖示說明本發明微小透鏡的製作方法敬請參閱： 第一圖係傳統製作微小透鏡的方法 第二圖係本發明製作微小透鏡的方法 照片一係本發明微小透鏡之實物照片 傳統「微小透鏡的製作方法」如圖一所示，首先在平面玻璃 基板或碎晶片基板上利用旋轉塗佈方式(Spj^j coating)塗上一層光 阻層，再利用曝光顯影使光阻顯影，後再將不要的光阻去除，剩 下粒狀的光阻經加溫使光阻軟化其表面縮收及表面張力的關係會 形成半球面狀，即成為許多微小半球面狀，後再將其表面蒸鑛上 金屬層，德之導電以利後段電鎊模具成形，最後再利用電鑄模配 合射出成型機射出透明的微小透鏡組。 本發明「微小透鏡的製作方法」如圖二所示，首先採用熱塑 性有機材料(如壓克力膠水，光阻液)利用旋轉塗佈或轉印塗佈使 之附著於平面基板上(玻璃基板或矽晶片），再用雷射光(U.V雷射 或紅外線雷射皆可，但U.V雷射聚焦點可更小)姓刻熱塑性有機 材料層，被雷射光打到的區域會氣化輝發掉最後會剩下的粒狀熱 塑性有機材料經加溫處理，因表面張力及縮收會使其粒狀熱塑性 有機材料表面形成球化現象，如照片一所示，後再經蒸鍍上金屬 導電層即可電鑄造模，最後將電鑄模配合射出成犁機將微小透鏡 於射出成型。 (請先M讀背面之注意事項再填寫本頁}Yinyi 556286 A7 ------- B7 of the Central Standards Bureau of the Ministry of Economic Affairs of the People's Republic of China ----------- B7 Invention Description ~ One by one ----It does not require a yellow light chamber, expensive thick film photoresist materials, and no light The cover, of course, does not require deep ultraviolet light or X-ray exposure machines, nor does it require pure water and wastewater treatment. The process is also simpler. 4, investment equipment is also very cheap. This method requires a large area. As long as there is a precise X, Υ mobile platform and a laser machine. / 鲶 With the illustration to illustrate the manufacturing method of the micro lens of the present invention, please refer to: The first picture is a traditional method of making a micro lens. The second picture is a method of making a micro lens of the present invention. As shown in Figure 1, firstly, a photoresist layer is applied on a flat glass substrate or a broken wafer substrate by spin coating (Spj ^ j coating), and then the photoresist is developed by exposure and development. The unnecessary photoresist is removed, and the remaining granular photoresist is heated to soften the photoresist. The relationship between surface shrinkage and surface tension will form a hemispherical shape, that is, it will become many micro hemispherical shapes. The metal layer on the steamed ore is conductive to facilitate the formation of the latter electric pound mold, and finally, the transparent micro lens group is shot by using an electroforming mold and an injection molding machine. The "manufacturing method of the micro lens" of the present invention is shown in Fig. 2. First, a thermoplastic organic material (such as acrylic glue, photoresist liquid) is attached to a flat substrate (glass substrate) by spin coating or transfer coating. Or silicon wafer), and then use laser light (UV laser or infrared laser can be used, but the focus of the UV laser can be smaller). The thermoplastic organic material layer is engraved. The area hit by the laser light will vaporize and glow. Finally, the remaining granular thermoplastic organic material is subjected to a heating treatment. Due to surface tension and shrinkage, the surface of the granular thermoplastic organic material will form a spheroidization phenomenon, as shown in the first photo, and then a metal conductive layer is deposited by evaporation. That is, the electroformed mold is formed, and finally the microformed lens is formed by cooperating with the electroformed mold to form a plow. (Please read the notes on the back before filling this page}
經濟部中央標準局貝工消費合作社印製 556286 A7 ~ 1 -------------------- — _ 五、發明説明（3 ) " —-- 本發明方法有機材料層一定必須採用熱塑性材料，不可採用 熱固性材料，因在加溫過程才能達到球面化(即透鏡功能），熱塑 性材料目前市場上很多，如塗料、膠水、溶膠(香蕉油松香膠水) 等皆可用，其中當然也包含光阻材料，但光阻材料用於本發明方 法有點貴，且係直接以雷射光打掉，並非只是曝光而已，本發明 技術和傳統方法不一樣。 另有關大面積的塗佈可不採用旋轉塗佈法，可採用乾膠膜貼 合方法，用乾膠膜貼合面積可做得很大如40吋以上適用於背投 影式TV的投影面板使用（内有許多微小透鏡設計），乾膠膜熱塑 性有機材料可用PE、PP、熱溶膠膜層等材料。 本創作微小透鏡的製作方法主要目的用於液晶顯示器背光模 組之導光板上之設計以節省成本屎提高亮度(不須擴散片及聚光片 而微小透鏡具有聚光作用可提高亮度），另還可設計成前光板(反 射式LQD用光源）。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公漦） (請先聞讀背面之注意事項再填寫本頁】Printed by Shellfish Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Inventive method The organic material layer must be made of thermoplastic materials. Thermosetting materials cannot be used. The spherical surface (that is, the lens function) can be achieved during the heating process. There are many thermoplastic materials on the market, such as coatings, glues, and sols (banana oil rosin glue) All are available, of course, including photoresist materials, but the photoresist materials used in the method of the present invention are a bit expensive and are directly destroyed by laser light, not just exposure. The technology of the present invention is different from traditional methods. In addition, for large-area coating, the spin coating method may not be used, and the adhesive film bonding method may be used. The adhesive film bonding area can be made as large as 40 inches or more suitable for rear projection TV projection panels ( There are many tiny lens designs inside), thermoplastic organic materials for dry film can be made of PE, PP, thermosol film and other materials. The main purpose of the production method of creating the micro lens is to design the light guide plate of the backlight module of the liquid crystal display to save costs and increase the brightness (the diffuser and the condenser are not needed, and the micro lens has the function of condensing to improve the brightness). Can also be designed as a front light plate (reflective LQD light source). This paper size applies to Chinese National Standard (CNS) A4 (210X297 cm) (Please read the precautions on the back before filling in this page)