TW548763B - Wire bonding capillary having alignment features - Google Patents
Wire bonding capillary having alignment features Download PDFInfo
- Publication number
- TW548763B TW548763B TW086119249A TW86119249A TW548763B TW 548763 B TW548763 B TW 548763B TW 086119249 A TW086119249 A TW 086119249A TW 86119249 A TW86119249 A TW 86119249A TW 548763 B TW548763 B TW 548763B
- Authority
- TW
- Taiwan
- Prior art keywords
- capillary
- indicator
- patent application
- scope
- item
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 16
- 230000002079 cooperative effect Effects 0.000 claims description 7
- 230000000875 corresponding effect Effects 0.000 claims description 6
- PCTMTFRHKVHKIS-BMFZQQSSSA-N (1s,3r,4e,6e,8e,10e,12e,14e,16e,18s,19r,20r,21s,25r,27r,30r,31r,33s,35r,37s,38r)-3-[(2r,3s,4s,5s,6r)-4-amino-3,5-dihydroxy-6-methyloxan-2-yl]oxy-19,25,27,30,31,33,35,37-octahydroxy-18,20,21-trimethyl-23-oxo-22,39-dioxabicyclo[33.3.1]nonatriaconta-4,6,8,10 Chemical compound C1C=C2C[C@@H](OS(O)(=O)=O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2.O[C@H]1[C@@H](N)[C@H](O)[C@@H](C)O[C@H]1O[C@H]1/C=C/C=C/C=C/C=C/C=C/C=C/C=C/[C@H](C)[C@@H](O)[C@@H](C)[C@H](C)OC(=O)C[C@H](O)C[C@H](O)CC[C@@H](O)[C@H](O)C[C@H](O)C[C@](O)(C[C@H](O)[C@H]2C(O)=O)O[C@H]2C1 PCTMTFRHKVHKIS-BMFZQQSSSA-N 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 11
- 230000006870 function Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
- H01L2224/78302—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/788—Means for moving parts
- H01L2224/78821—Upper part of the bonding apparatus, i.e. bonding head, e.g. capillary or wedge
- H01L2224/78822—Rotational mechanism
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01075—Rhenium [Re]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
Abstract
Description
經濟部中央標準局員工消費合作社印製 548763 A7 B7 五、發明説明（1 ) 發明技術領域 廣義來說，本發明與製造積體電路晶片之封裝期間， 線連接製程中所使用的毛細管及接線方法有關，詳細地說 ，與接線毛細管的對齊特性有關。 發明背景 典型的積體電路晶片封裝是將積體電路晶片固定於引 線框，並搞合此兩部分形成封裝。積體電路晶片與引線框 可被密封。典型來說，晶片包括位於晶片周圍的若干接墊 ，接墊間有一定的間距。典型的引線框四周也包括若干引 線。例如，有種引線框的形狀為長方型，長方型的每個邊 都有若干引線，每條引線都是細長形。 每個引線框都有X方向與γ方向。X方命垂直於一對 相對侧，Y方向垂直於另一對相對侧。每一條引線的形狀 相對較窄長，它的方向定義引線軸。任何引線框的引線軸 在X或Y方向延伸，或在X或γ方向加上一補償角度。每條 引線所補償的角度都不相同。從引線框某一邊的中央向角 落引線移動，引線軸的角度補償也從垂直角加上一角度增 量。同樣地’接線路徑也是由接些到對應引線的方向所定 義。接線沿著接線路徑延伸，對任一組的接藝與引線而言 ’接線路徑在X或Y方向延伸，或是從X或Y方向加上一補 償角度。 為將積體電路晶片耦合到引線框的引線，經常要用到 接線技術。接線機上應該架有一軸接線。接線可能穿過一 (請先閲讀背面之注意事項再填寫本頁)Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 548763 A7 B7 V. Description of the invention (1) Technical field of the invention In a broad sense, during the packaging of the present invention and the manufacturing of integrated circuit chips, the capillary and wiring method used in the wire connection process Related, in detail, is related to the alignment characteristics of the wiring capillary. BACKGROUND OF THE INVENTION A typical integrated circuit chip package is a package in which an integrated circuit chip is fixed to a lead frame and the two parts are combined. Integrated circuit wafers and lead frames can be sealed. Typically, a wafer includes several pads located around the wafer, with a certain distance between the pads. A typical lead frame also includes several leads around it. For example, one type of lead frame has a rectangular shape, and each side of the rectangular shape has several leads, and each lead is elongated. Each lead frame has an X direction and a γ direction. The X square is perpendicular to one pair of opposite sides, and the Y direction is perpendicular to the other pair of opposite sides. The shape of each lead is relatively narrow and long, and its direction defines the lead axis. The lead axis of any lead frame extends in the X or Y direction or adds a compensation angle in the X or γ direction. The compensation angle is different for each lead. From the center of one side of the lead frame to the corner drop lead, the angle compensation of the lead axis is also increased by an angle from the vertical angle. Similarly, the 'wiring path' is also defined by the direction to the corresponding leads. The wiring extends along the wiring path. For any group of arts and leads, the wiring path extends in the X or Y direction, or a compensation angle is added from the X or Y direction. To couple integrated circuit wafers to the leads of a lead frame, wiring techniques are often used. There should be a shaft connection on the wiring machine. The wiring may pass through one (please read the precautions on the back before filling this page)
、1T 本紙張尺度適财晒( 2ΗΓΧ297公釐） 經濟部中央標準局員工消費合作社印製 548763 A7 --------B7 五、發明說^777^ 毛細管，該毛細管架於接線機的角形臂上。角形臂可被操 縱在垂直或水平方向移動毛細管。典型接線機的接線由 毛細管的尖端伸出，並包括一加熱或產生火花的裝置，以 對接線的端點加熱。鎔融的接線形成一球狀，藉角形臂操 縱毛細管將其置於目標接墊。 當接線接合於此接墊後，即釋出足夠長度的接線，以 允4毛細管移動到引線框之目標引線靠近内端的位置。毛 細管被操縱將接線連接到目標引線的内端並切斷接線，因 此，此時從毛細管尖端伸出的接線是懸空的，以便進行下 一個目標引線與目標接墊間的接合。任何適用的接合型式 都可用來接合接整或引線，包括球接合、缝接合或楔接合 。例如，接墊處可用球接合，引線處可用縫接合。接合時 封裝必須加熱，因此也要施加超音波能量。 積體電路晶片的封裝愈來愈小且封裝内的引線數量愈 來愈多，此導致晶片上所需的接墊數量愈來愈多，且其間 的距離愈來愈密，引線與引線框也是相同情況，接線技術 的問題由此而生。 接線毛細管的出口端通常稱為毛細管面。早期毛細管 的面為圓形。圓形面的缺點是接合間的空間受到限制。例 如，在完成某接墊的接合後，如果毗鄰接墊靠的太近，當 在接合鄰接塾時’毛細管面可能撞擊到前一個接點。解 決此缺點的方法是使用非圓形面的接線毛細管。例如，美 國專利5,544,804即是此類型的方法，併為本文參考。該Test et al.專利說明的Bo wTI™毛細管具有非圓形的面。Β0ν/πΤΜ -4- 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁)、 1T The paper size is suitable for printing (2ΗΓ × 297mm) Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 548763 A7 -------- B7 V. Invention ^ 777 ^ Capillary, which is mounted on the wiring machine. Angled arm. The angular arm can be manipulated to move the capillary in a vertical or horizontal direction. The wiring of a typical wiring machine extends from the tip of a capillary tube and includes a heating or sparking device to heat the ends of the wiring. The fused wire forms a sphere and is placed on the target pad by the angled arm manipulating the capillary. When the wiring is bonded to this pad, the wiring of sufficient length is released to allow the 4 capillaries to move to the position where the target lead of the lead frame is near the inner end. The capillary is manipulated to connect the wire to the inner end of the target lead and cut the wire. Therefore, the wire protruding from the capillary tip is suspended at this time for the next target lead to be joined to the target pad. Any suitable joint type can be used to join joints or leads, including ball joints, seam joints, or wedge joints. For example, balls can be used at the pads and seams can be used at the leads. The package must be heated during bonding, so ultrasonic energy is also applied. The package of integrated circuit chip is getting smaller and smaller, and the number of leads in the package is increasing, which results in more and more pads required on the chip, and the distance between them is getting denser, so are the leads and the lead frame. In the same situation, the problem of wiring technology arises. The exit end of the wiring capillary is often referred to as the capillary face. The face of early capillaries was round. The disadvantage of circular faces is that the space between the joints is limited. For example, after the bonding of a pad is completed, if the adjacent pad is too close, the 'capillary surface may hit the previous contact when the adjacent pad is being joined. The solution to this disadvantage is to use a non-circular faced capillary tube. For example, U.S. Patent 5,544,804 is this type of method and is incorporated herein by reference. The Test et al. Patent describes a Bo wTI ™ capillary with a non-circular face. Β0ν / πΤΜ -4- This paper size is applicable to Chinese National Standard (CNS) Α4 specification (210X297 mm) (Please read the precautions on the back before filling this page)
548763 經濟部中央榡準局員工消費合作社印製 A7 五、發明説明（3 ) 毛細管的形狀包括一對凹形對邊與一對凸形對邊。 BowTI™毛細管的長軸延伸橫過凸形對邊的中點，並通過 BowTI™的中心。細管可做到的球接合比圓形 面的毛細管更密，原因是凹形對邊避開撞擊毗鄰的接點。 BowTITM&可做其它類型的接合，包括缝接合。 使用非圓面之毛細管的要求是，毛細管面的長軸必須 很精確地與引線框的X或γ方向、或目標引線的長軸、或 所需的接合路徑對齊。非圓面毛細管的精準對齊特別困難 ’因為毛細管面的尺寸相對較小（例如4-8密爾）。特別由 於積體電路晶片封裝的尺寸不斷縮小，若毛細管未能正確 對齊，製造期間將導致有瑕疵的接合。此可能由很多因素 造成，包括毛細管面在接墊、引線、或兩者上的定位不正 確。若對齊不正確，將導致毛細管撞擊及/或損壞已完成 的接合，致使發生瑕疵的接合。習知的毛細管及接合技術 還存在其它的問題、缺點及不便。 發明概述 本發明的目的是為滿足接線所用之毛細管的需要。 本發明的另一目的是為滿足現行接線技術的需要。 本發明的另一目的是提供接線機所用的毛細管，在將 毛細管裝入接線機期間很容易對齊。 本發明的另一目的是提供接線機所用的毛細管，在接 線過程中很容易對齊與重對齊。 本發明的另一目的是提供一種毛細管，在使用期間很 〇 - 規格(21〇Χ2975¥1------ (請先閲讀背面之注意事項再填寫本頁)548763 Printed by the Consumers' Cooperative of the Central Government Bureau of the Ministry of Economic Affairs A7 V. Description of Invention (3) The shape of the capillary includes a pair of concave opposite sides and a pair of convex opposite sides. The long axis of the BowTI ™ capillary extends across the midpoint of the convex opposite edge and passes through the center of the BowTI ™. A thin tube can achieve a denser ball joint than a round capillary, because the concave opposite side avoids the impact of adjacent junctions. BowTITM & can make other types of joints, including seam joints. The requirement for using a non-circular capillary tube is that the major axis of the capillary surface must be precisely aligned with the X or γ direction of the lead frame, or the major axis of the target lead, or the desired bonding path. The precise alignment of non-circular capillaries is particularly difficult because of the relatively small size of the capillary surface (for example 4-8 mils). In particular, as the size of integrated circuit chip packages continues to shrink, if the capillaries are not aligned properly, defective joints will result during manufacturing. This can be caused by many factors, including incorrect positioning of the capillary face on the pad, lead, or both. Improper alignment will cause the capillary to hit and / or damage the completed joint, resulting in a defective joint. There are other problems, disadvantages, and inconveniences with the conventional capillary and joining techniques. SUMMARY OF THE INVENTION The object of the present invention is to meet the needs of capillaries for wiring. Another object of the present invention is to meet the needs of current wiring technologies. Another object of the present invention is to provide a capillary tube for a wiring machine, which can be easily aligned during installation of the capillary tube into the wiring machine. Another object of the present invention is to provide a capillary tube for a wiring machine, which can be easily aligned and realigned during the wiring process. Another object of the present invention is to provide a capillary tube, which has a very 〇-specification during use (21〇 × 2975 ¥ 1 ------ (Please read the precautions on the back before filling this page)
548763 A7548763 A7
谷易建立及/或檢査對齊。 要達到本發明的這些與其它目的，提供一種用於接線 機的毛細管。該毛細管具有管狀的本體與長軸。該毛細管 包括至少一個與本體合併的指示器，因此，毛細管的角對 A對應到管狀本體之長軸上至少一個指示器的角位置。 按本發明各方面，指示器可為被動式或主動式，以及 接觸式或非接觸式。指示器可為電子式、機械式、光學式 或磁式。該毛細管可併入接線機中。接線機可包括偵檢器 指示器的偵檢信號或由指示器提供信號。 按本發明的另一具體實例，提供一種可使毛細管角對 齊的方法。為達此目的，要建立毛細管的第一既定角對齊 毛細管結合第一指示器，因此第一指示器的角位置對應 到毛細管的角對齊。第-指示料第—角位置被偵測以^ 定毛細管的角對齊。第一指示器的第一角位置與第一既定 角=齊比較，以決定毛細管從第一既定角位置開始的第一 補償角。接著毛細管旋轉第一補償角的量與方向。 圖式概述 經濟部中央襟準局員工消費合作社印製 (請先閲讀背面之注意事項再填寫本頁) 為更透徹瞭解本發明及其進一步的特徵與優點，現請 連同附圖參間以下說明，其中： 圖1是按本發明之第一具體實例的毛細管對齊結構； 圖2是圖1之毛細管沿著圖1中2_2箭頭的截面圖；， 圖3是圖1之毛細管沿著則中”箭頭的底視圖|以及 圖4是按本發明之第二具體實例的接線機。 6 本紙張尺賴财_家標準（公羞） 548763 A7 五、發明説明（5 ) 發明詳述 典型的接線機包括接線轴，接線可為任何適用材料， 如金。接線饋入導引裝置，即一般所知的毛細管。此毛細 管的功用亦作為接合工具。毛細管固定於接線機的臂，即 所謂的角形臂。本發明的毛細管結合一或多個指示器，於 毛細管安裝入接線機時，以及操縱毛細管提供積體電路晶 片與引線框之引線間之連接期間，用以輔助毛細管的對齊 處理。從指示器上發出的信號被一或多的檢測器接收。該 信號指示毛細管的旋轉對齊，以及沿著毛細管面延伸的軸 方向。 接線系統包括一具有角形臂的接線機。毛細管固定於 角形臂内，從線軸將接線導引至積體電路晶片封裝上旳各 接合點。毛細管上有一或多個指示器，可提供一或多個信 號，由距毛細管一段距離的一或多個偵檢器接收。該信號 指示毛細管的旋轉對齊。同時，該信號也指示毛細管面的 軸方向。每一個信號都具有一相對信號強度，該強度顯示 毛細管面與既定所欲對齊的比較。 經濟部中央標準局員工消費合作社印製 (請先閲讀背面之注意事項再填寫本頁) $ 操作期間，毛細管旋轉至第一旋轉對齊，毛細管面的 軸在第一方向延伸。偵測器接收第一信號以指示何時到達 第一旋轉對齊。接著將毛細管導引到第一接合點，在第一 接合點(例如積體電路晶片上的接墊)完成第一接合。 接著旋轉該毛細管重對齊到第二旋轉對齊，以使毛細 管面的轴在與第一方向不同的第二方向延仲。接著將毛細 管導引到第二接合點，在第二接合點(例如引線框的引線) -7-Gu Yi establishes and / or checks alignment. To achieve these and other objects of the present invention, a capillary tube for a wiring machine is provided. The capillary has a tubular body and a long axis. The capillary includes at least one indicator integrated with the body, so that the angular pair A of the capillary corresponds to the angular position of at least one indicator on the long axis of the tubular body. According to aspects of the invention, the indicator may be passive or active, and contact or non-contact. The indicator can be electronic, mechanical, optical or magnetic. This capillary can be incorporated into the wiring machine. The wiring machine may include or be provided with a detection signal from a detector indicator. According to another embodiment of the present invention, a method for aligning capillary angles is provided. To achieve this, a first predetermined angular alignment of the capillary is established. The capillary is combined with a first indicator, so the angular position of the first indicator corresponds to the angular alignment of the capillary. The first-indicator corner position is detected to align the corners of the capillary. The first angular position of the first indicator is compared with the first predetermined angle = to determine the first compensation angle of the capillary starting from the first predetermined angular position. Then the capillary rotates the amount and direction of the first compensation angle. Schematic overview Printed by the Consumer Cooperatives of the Central Government Bureau of the Ministry of Economic Affairs (please read the notes on the back before filling this page). Among them: FIG. 1 is a capillary alignment structure according to a first specific example of the present invention; FIG. 2 is a cross-sectional view of the capillary of FIG. 1 along the arrow 2_2 in FIG. 1; Bottom view of the arrow | and FIG. 4 is a wiring machine according to a second specific example of the present invention. 6 This paper ruler Lai Cai_Home Standard (public shame) 548763 A7 V. Description of the invention (5) Typical wiring machine detailed in the invention Including the connection shaft, the connection can be any suitable material, such as gold. The connection is fed into the guide device, which is generally known as a capillary. The function of this capillary is also used as a joining tool. The capillary is fixed to the arm of the connection machine, the so-called angular arm The capillary of the present invention is combined with one or more indicators, and is used to assist the capillary during the installation of the capillary into the wiring machine and the operation of the capillary to provide the connection between the integrated circuit chip and the lead of the lead frame. Assists capillary alignment. The signal from the indicator is received by one or more detectors. This signal indicates the rotational alignment of the capillary and the direction of the axis extending along the capillary surface. The wiring system includes a wiring machine with angled arms The capillary is fixed in the angled arm, and leads are guided from the bobbin to the joints on the integrated circuit chip package. There is one or more indicators on the capillary, which can provide one or more signals. Received by multiple detectors. This signal indicates the rotation alignment of the capillary. At the same time, this signal also indicates the axis direction of the capillary surface. Each signal has a relative signal intensity, which shows the comparison of the capillary surface with the intended alignment. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) $ During operation, the capillary is rotated to the first rotation alignment, and the axis of the capillary surface extends in the first direction. The detector receives A first signal to indicate when the first spin alignment is reached. The capillary is then guided to the first junction, at A first bonding point (such as a pad on a integrated circuit wafer) completes the first bonding. Then the capillary is rotated to realign to a second rotational alignment, so that the axis of the capillary surface extends in a second direction different from the first direction . Then guide the capillary to the second junction, at the second junction (such as the lead of the lead frame) -7-
經濟部中央標準局員工消費合作社印製 548763 五、發明説明（6 ) 完成第二接合。 接著毛細管可旋轉回第一方向或第三方向繼績接合動 作(例如積體電路晶片上的第二接墊）。毛細管的旋轉是指 不器與债檢器合作的結果，此兩者合作產生信號指示毛細 管的旋轉對齊與重對齊。非圓形面的毛細管特別需要精確 的旋轉能力。當完成接合，理想情沉是非圓形面的軸與接 口的方向對齊。例如，毛細管面的軸沿著引線軸對齊。此 外，當園繞積體電路晶片封裝完成接線，可改變接合的方 向。本發明適合改變接合的方向。此外，整個毛細管對齊 系統的其它方面揭示於美國專利申請案號__，（Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 548763 V. Invention Description (6) The second joint is completed. The capillary can then be rotated back to the first direction or the third direction to continue the bonding operation (such as the second pad on the integrated circuit wafer). Capillary rotation is the result of cooperation between the device and the debt detector, which together produce a signal indicating the rotation alignment and realignment of the capillary. Capillary with a non-circular face particularly requires precise rotation. When the joining is completed, the ideal situation is that the axis of the non-circular surface is aligned with the direction of the interface. For example, the axis of the capillary face is aligned along the lead axis. In addition, when the round-wound integrated circuit chip package is completed with wiring, the direction of bonding can be changed. The invention is suitable for changing the direction of joining. In addition, other aspects of the entire capillary alignment system are disclosed in U.S. Patent Application No. __, (
Attorney Docket No· TI-24970)，已授讓予德州儀器公司 。此申請案於1996年12月19曰提出申請，併入本文供參考 〇 細部如圖1所示，毛細管10固定於接線機的角形臂92 上。毛細管10具有一管狀本體，包括柱身部2〇，它與尖端 部30結合。毛細管1〇的長軸延伸通過毛細管的内部，方向 如圖1中AA線所示。接線插入進口端4〇，通過毛細管1〇的 内部，從毛細管10的出口端50伸出。如圖3所示，毛細管 的面以非圓形面60為佳，將在下文中詳細說明。 柱身部20為圓柱形，其截面如圖2所示。不過，也可 採用其它形狀’只要接線能穿過毛細管1Q的内部即可。例 如，毛細管10的截面可為長方形或橢圓形。毛細管1〇的内 部以利用内徑Di與外徑D。定義為佳。整支毛細管10的内徑 Α最好不變。不過，如果毛細管的壁厚不變，將隨D。 (請先閲讀背面之注意事項再填寫本頁)Attorney Docket No. TI-24970), has been granted to Texas Instruments. This application was filed on December 19, 1996 and is incorporated herein by reference. The details are shown in Figure 1. The capillary 10 is fixed to the angled arm 92 of the wiring machine. The capillary tube 10 has a tubular body including a cylindrical portion 20, which is combined with the tip portion 30. The long axis of the capillary 10 extends through the inside of the capillary, and the direction is shown by the AA line in FIG. 1. The wiring is inserted into the inlet end 40, passes through the inside of the capillary 10, and protrudes from the outlet end 50 of the capillary 10. As shown in Fig. 3, the surface of the capillary is preferably a non-circular surface 60, which will be described in detail later. The cylindrical portion 20 is cylindrical, and its cross section is shown in FIG. 2. However, other shapes may be used as long as the wiring can pass through the inside of the capillary 1Q. For example, the cross section of the capillary 10 may be rectangular or oval. The inside of the capillary tube 10 uses an inner diameter Di and an outer diameter D. Defined as good. The inner diameter A of the entire capillary 10 is preferably unchanged. However, if the capillary wall thickness does not change, it will follow D. (Please read the notes on the back before filling this page)
CNS ) A4規格（210X297公釐） 548763 A7CNS) A4 size (210X297 mm) 548763 A7
經濟、邵中央標準局員工消費合作社印製 改變。 尖端部30從第一點31開始縮小（此點即是柱身部20與 尖端部30的交界處），到位於毛細管1〇出口端的第二點％ 。尖端部30在第一點31處的外徑等於柱身部2〇的外徑D。 。尖端部30位於第二點32的外徑是既定值，它小於第一點 31的外徑值。 毛細管10可為任何材料。不過，以由高強度的陶瓷材 料製成為佳。 如圖2所示，毛細管1〇的截面為圓形。毛細管1〇由外 表面11與内表面12所定義。在毛細管1〇的管狀本體上有許 多指不器100、105、110、115。雖然圖中只顯示4個指示 器，但指示器的數量可為一或多個。指示器位於毛細管1〇 的外表面11。這些指示器可於毛細管1〇成形後再各別固定 於毛細管10的外表面11。例如，視指示器的材質，指示器 利用適合的接著材料將其穩固地接合於毛細管表面。 另一方面，指示器也可於製作毛細管期間與毛細管一 體成形。例如，指示器可於毛細管10成形表面的同時固定 於其表面。此有助於確保指示器的角對齊與毛細管面之長 抽的相對位置正確。操作期間，毛細管10所欲的角對齊對 應到沿著毛細管1〇之管狀本體之長抽AA上至少一個指示 器的角位置。 至少一個指示器是主指示器。例如圖2中的指示器1〇〇 是主指示器。主指示器1〇〇是用來提供毛細管1〇之精確起 始對齊的指示器。其它的指示器105、110、115是副指示 -9- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) 訂 J— 548763 經濟部中央標準局員工消費合作社印製 Α7 Β7 五、發明説明（8 ) 器·，用來決定毛細管10的補償角度，或於接線期間提供 毛細管10的重對齊。主指示器100與副指示器 間有一縱向距離，可在副指示器的上方或下方。其目的是 為容易分辨何者為主指示器。操作期間，主指示器在毛細 管10上的位置相對於毛細管10的第一既定角對齊。一個副 指示器也可被置於對應於毛細管10的第二既定角對齊。每 一個指示器的位置，以靠近入口40比靠近出口50為佳。如 此，指示器與毛細管尖端間才能有足夠的淨空，偵檢器的 感應功能才不致受接線機操作的影響。同樣地，如果指示 器太靠近毛細管10的尖端，它可能會因來自加熱器的孰而 受損。 μ 指示器的尺寸視各別用途而定，指示器的型式則視指 示器所需的功能而定。至少在某些應用中，指示器的尺寸 以水平向較窄，縱向較長為佳。寬度較窄是為了防止偵檢 器被感應，除非毛細管的對齊不正確。縱向較長的原因是 為了較大的縱向區域都能執行感應功能。換句話說，能在 ，長的縱向空間偵檢到指示器或來自指示器的信號。指示 器的縱向尺寸至少須與橫向尺寸相同。最好縱向尺寸能比 橫向尺寸大，甚至縱向尺寸至少是橫向尺寸的兩倍更佳。 ^於何種形狀較佳，乃視指示器的種類、應用與所欲的功 能而定。長方形是最常見的形狀。不過，其它形狀也可適 用，如圓形、三角形或橢圓形。 指π器的類型也很多，包括被動及主動的指示器。不 過，以被動式為佳。其優點是指示器内不需使用電源、化 -10- ( CNS ) Μ規格（ -：- —------0! (請先閲讀背面之注意事項再填寫本頁) 訂 έτ 548763 經濟部中央標準局員工消費合作社印製 Α7 Β7 五、發明説明（9 ) 學藥劑、或複雜的電子電路。指示器也以無接觸式為佳。 此表示指示器不需要為了提供對齊之感應功能而碰觸到任 何外部組件。 例如’指示器可以是光學指示器。該指示器可以是著 於毛細管外壁的色帶。例如，白色的毛細管外表面可以塗 上黑色：銀白色或其它可為偵檢器感應之各種顏色的色帶 做為指示器。另者，指示器也可是反射器或鏡面，或表面 高度拋光的材料。 如果使用色帶，該色帶可為偵檢裝置16〇所偵檢。偵 檢裝置160包括偵檢器161與162。161的縱向位置對應於主 指示器，162的縱向位置對應於副指示器。债檢器161與162 偵測指示器或指示器所提供的信號。例如，偵檢器161與162 可為雷射偵檢器，以檢測毛細管1〇表面上的光學色帶指示 器。 … 如果使用鏡子，來自光源的光束(圖中未顯示)可直接 射向鏡子，從鏡子反射的光束由一或多個偵檢器接收。偵 檢器應定位，以便當指示器的位置對應到所欲的既定對齊 時，接收反射的光束。例如，主指示器100在毛細管1〇^ 的位置，當主指示器100在第一既定位置時，毛細管1〇即 完全正確地位於起始對齊。當毛細管1〇位於出口的面仞是 非圓形面時，此特別有用。例如圖3是沿著圖2之毛細管⑺ 之3-3線的面60底視圖。非圓形的毛細管面6〇具有一縱轴 B-B，舉例來說，它與引線框70的的χ軸對齊。操作期間 ，軸ΒΒ與目標引線的縱軸對齊(圖中未顯示）。當主指示^ -11 - 本纸張尺度適用中國國家標準（CNS ) Α4規格（210 X 297公釐） (請先閲讀背面之注意事項再填寫本頁)Economic, Shao Central Standard Bureau employee printing cooperative print changes. The tip portion 30 is reduced from the first point 31 (this point is the junction of the cylindrical portion 20 and the tip portion 30), and reaches the second point% at the exit end of the capillary tube 10. The outer diameter of the tip portion 30 at the first point 31 is equal to the outer diameter D of the cylindrical portion 20. . The outer diameter of the tip portion 30 at the second point 32 is a predetermined value, which is smaller than the outer diameter value of the first point 31. The capillary 10 can be of any material. However, it is preferably made of a high-strength ceramic material. As shown in FIG. 2, the cross section of the capillary 10 is circular. The capillary 10 is defined by an outer surface 11 and an inner surface 12. There are many fingers 100, 105, 110, 115 on the tubular body of the capillary tube 10. Although only four indicators are shown in the figure, the number of indicators can be one or more. The indicator is located on the outer surface 11 of the capillary 10. These indicators can be respectively fixed to the outer surface 11 of the capillary tube 10 after the capillary tube 10 is formed. For example, depending on the material of the indicator, the indicator securely engages the capillary surface with a suitable bonding material. Alternatively, the indicator may be integrally formed with the capillary during the capillary production. For example, the indicator may be fixed to the surface of the capillary 10 while it is being formed. This helps to ensure that the angular alignment of the indicator is correct relative to the length of the capillary face. During operation, the desired angular alignment of the capillary 10 corresponds to the angular position of at least one indicator on the AA drawn along the length of the tubular body of the capillary 10. At least one indicator is a primary indicator. For example, the indicator 100 in FIG. 2 is the main indicator. The primary indicator 100 is an indicator used to provide accurate start alignment of the capillary 10. Other indicators 105, 110, and 115 are sub-instructions. 9- This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) (Please read the precautions on the back before filling this page.) Order J—548763 Economy Printed by the Consumers' Cooperative of the Ministry of Standards, Ministry of Standards, A7, and B7. 5. Description of the invention (8) The device is used to determine the compensation angle of the capillary 10 or to provide realignment of the capillary 10 during wiring. There is a longitudinal distance between the primary indicator 100 and the secondary indicator, which can be above or below the secondary indicator. The purpose is to make it easy to tell which is the primary indicator. During operation, the position of the primary indicator on the capillary tube 10 is aligned with respect to the first predetermined angle of the capillary tube 10. A secondary indicator may also be placed at a second predetermined angular alignment corresponding to the capillary tube 10. The position of each indicator is preferably closer to the entrance 40 than closer to the exit 50. In this way, there is sufficient headroom between the indicator and the capillary tip, and the detection function of the detector is not affected by the operation of the wiring machine. Similarly, if the indicator is too close to the tip of the capillary 10, it may be damaged by the puppet from the heater. The size of the μ indicator depends on the individual application, and the type of indicator depends on the functions required by the indicator. In at least some applications, the size of the indicator is narrower in the horizontal direction and longer in the vertical direction. The narrower width prevents the detector from being sensed unless the capillary is not properly aligned. The reason for the longer vertical direction is that a larger vertical area can perform sensing functions. In other words, the indicator or the signal from the indicator can be detected in the long vertical space. The vertical dimension of the indicator must be at least the same as the horizontal dimension. Preferably, the longitudinal dimension is larger than the transverse dimension, and even the longitudinal dimension is preferably at least twice the transverse dimension. ^ Which shape is better depends on the type, application, and desired function of the indicator. Rectangle is the most common shape. However, other shapes are also applicable, such as circular, triangular or oval. There are many types of finger pointing devices, including passive and active indicators. However, passive is preferred. Its advantage is that it does not need to use the power supply in the indicator, and the -10- (CNS) specification (-:-—------ 0! (Please read the precautions on the back before filling in this page) Order τ 548763 Economy Printed by the Consumer Standards Cooperative of the Ministry of Standards, Ministry of Standards and Laboratories A7 B7 V. Description of Invention (9) Learning medicaments or complex electronic circuits. The indicator is also preferably non-contact. This means that the indicator does not need to provide alignment sensing function. Touched any external components. For example, 'the indicator can be an optical indicator. The indicator can be a ribbon on the outer wall of the capillary. For example, the outer surface of a white capillary can be painted black: silver or other Various colored ribbons sensed by the device are used as indicators. In addition, the indicators can also be reflectors or mirrors, or highly polished materials. If a ribbon is used, the ribbon can be detected by the detection device 16 The detection device 160 includes detectors 161 and 162. The vertical position of 161 corresponds to the main indicator, and the vertical position of 162 corresponds to the secondary indicator. The debt detector 161 and 162 detect the signal provided by the indicator or the indicator. . For example, the detectors 161 and 162 can be laser detectors to detect optical ribbon indicators on the surface of the capillary 10. If a mirror is used, the light beam (not shown) from the light source can be directed to the mirror The light beam reflected from the mirror is received by one or more detectors. The detector should be positioned to receive the reflected light beam when the position of the indicator corresponds to the desired alignment. For example, the main indicator 100 is on a capillary tube. The position of 1〇 ^, when the main indicator 100 is in the first predetermined position, the capillary 10 is completely correctly positioned at the starting alignment. This is particularly useful when the surface of the capillary 10 is not a circular surface. For example Fig. 3 is a bottom view of the surface 60 along the line 3-3 of the capillary tube 图 of Fig. 2. The non-circular capillary surface 60 has a longitudinal axis BB, which is aligned with the x-axis of the lead frame 70, for example. During operation, the axis BB is aligned with the vertical axis of the target lead (not shown in the figure). When the main instruction ^ -11-This paper size applies the Chinese National Standard (CNS) Α4 specification (210 X 297 mm) (Please read first (Notes on the back then fill out this page)
548763 A7 B7 五、發明説明（10) 100於第一既定位置時，毛細管面6〇以對正所欲的方向為 佳。例如，在起始階段，希望縱軸BB與要被接線的引線 框70的X軸對齊。 第二種類型的無接觸式指示器是磁性指示器。在此情 況’指示器是以磁性物質製成，對應的偵檢器是它的互補 物質’該物質可量測到偵檢器與指示器間的磁引力。當偵 檢器與指7F器最接近時，其間的磁引力最強。就桿身為圓 形截面的毛細管而言，如圖2所示，當磁性指示器與偵檢 器在最接近位置時，對任何指示器而言都只是一點。此點 最好就疋毛細管1〇所欲的對齊。例如，當主指示器1〇〇與 偵檢器161位於最接近的位置，希望毛細管非圓形面仞的 縱軸與所欲的起始狀態對齊(例如與前述引線框的χ軸或 Y-軸對齊）。 本發明也可使用接觸式指示器。接觸式指示器的類型 之-是電子式指示器。它包括任何4^體材料。如果指示器 安裝於適當位置，毛細管1〇即可對齊所欲的位置，此外， E還包括與指示器接朗偵檢器，以_對電軸合至電子 經濟部中央標準局員工消費合作社印製 電路。因此，指示器完成整個電子電路，使毛細管 對齊。 本發明也可使賴赋指示器。顧式指示器包括缺 口、孔、凸出物或任何可與偵檢器接_機械裝置。另一 種機械式指示器的例子是毛細管本身的外表面部分或全部 為正方形’其尖角即為指示器。機械式指示器也 ^ 觸式。例如’可使用雷射偵檢器，無需接觸即可偵檢機械 -12 - 經濟部中央標準局員工消費合作社印製 548763 A7 B7 五、發明説明（η) 式指示器。 所有的指示器以近接式指示器為佳。此方法是藉決定 指示器靠近偵檢器的程度來決定偵檢或感應。可能的架構 之一是當指示器與偵檢器最接近時才被感應。另一種架構 則是’它提供可變強度的偵檢信號，且當指示器與偵檢器 最接近時的信號最強。當指示器與偵檢器相互漸遠時信號 減弱。例如，視使用的指示器與偵檢器型式而定，即使毛 細管10已偏離初始位置一角度，仍會繼績產生偵檢信號。 在此情況，從偵檢信號與最小值(指示器與檢測器相距最 遠時)及最大值(指示器與偵檢器相距最近時)的相對強度 或減弱程度即可決定出偏離的角度。 按本發明的另一具體實例，毛細管10可與接線機9〇結 合，如圖4所示。接線機9〇包括接線源91以及於積體電路 晶片與引線框70接合時，支撐與操縱毛細管1〇的角形臂92 。在圖4中，主指示器100與偵檢裝置16〇的偵檢器161最接 近。裝置160也包括偵檢器162，用於偵檢副指示器。圖4 也顯示具有1或多個指示器的毛細管的操作例子。假設毛 細管按圖4之接線架構正確對齊，那麼即可做到沿著指定 角方向的準確接合。 如果需要旋轉毛細管10，即可偵檢副指示器1〇5、u〇 或115，以確保毛細管10按所要求的補償角量對齊。舉例 來說，如果毛細管職任—柏旋轉9Q度，毛細管職 BowTI™面即可正確對齊引線框?〇之¥方向的接合。在此 隋況視毛細管10所旋轉的方向(順時針或逆時針），當毛 丨 — (請先閲讀背面之注意事項再填寫本頁) 訂 iir548763 A7 B7 V. Description of the invention (10) When the 100 is in the first predetermined position, the capillary surface 60 is preferably aligned with the desired direction. For example, in the initial stage, it is desirable that the vertical axis BB is aligned with the X axis of the lead frame 70 to be wired. The second type of contactless indicator is a magnetic indicator. In this case, the indicator is made of a magnetic substance, and the corresponding detector is its complementary substance. The substance can measure the magnetic attraction between the detector and the indicator. When the detector and the finger 7F are closest, the magnetic attraction between them is the strongest. For a capillary with a round cross-section, as shown in Figure 2, when the magnetic indicator and the detector are in the closest position, it is only a little bit for any indicator. At this point, it is best to align the capillary 10 as desired. For example, when the main indicator 100 and the detector 161 are located closest to each other, it is desirable that the longitudinal axis of the capillary non-circular surface 对齐 is aligned with the desired initial state (for example, the χ-axis or Y- Axis alignment). The present invention can also use touch indicators. One of the types of contact indicators is the electronic indicator. It includes any 4-dimensional material. If the indicator is installed in an appropriate position, the capillary 10 can be aligned to the desired position. In addition, E also includes a detector connected to the indicator, which is connected to the electric consumer shaft of the Central Standards Bureau of the Ministry of Electronic Economy.制 电路。 System circuit. The indicator thus completes the entire electronic circuit, aligning the capillaries. The invention also enables the indicator to be relied upon. Gu-type indicators include notches, holes, protrusions, or any mechanical device that can be connected to the detector. Another example of a mechanical indicator is that the outer surface of the capillary itself is partly or entirely square ', and its pointed corner is the indicator. The mechanical indicator is also ^ touch type. For example, a laser detector can be used to detect machinery without contact. -12-Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 548763 A7 B7 V. Description of invention (η) indicator. All indicators are preferably proximity indicators. This method determines the detection or induction by determining how close the indicator is to the detector. One of the possible architectures is when the pointer is closest to the detector. Another architecture is that it provides a variable-intensity detection signal, and the signal is the strongest when the indicator is closest to the detector. The signal diminishes as the indicator and detector move away from each other. For example, depending on the type of indicator and detector used, even if the capillary tube 10 has deviated from the initial position by an angle, detection signals will continue to be generated. In this case, the angle of deviation can be determined from the relative strength or weakening of the detection signal to the minimum value (when the indicator is closest to the detector) and the maximum value (when the indicator is closest to the detector). According to another embodiment of the present invention, the capillary tube 10 can be combined with the wiring machine 90, as shown in FIG. The wiring machine 90 includes a wiring source 91 and an angular arm 92 that supports and manipulates the capillary 10 when the integrated circuit chip is bonded to the lead frame 70. In Fig. 4, the main indicator 100 is closest to the detector 161 of the detection device 160. The device 160 also includes a detector 162 for detecting a secondary indicator. Figure 4 also shows an example of the operation of a capillary with one or more indicators. Assuming that the capillaries are correctly aligned according to the wiring structure in Figure 4, then accurate joining along the specified angular direction can be achieved. If the capillary 10 needs to be rotated, the sub-indicator 105, u0 or 115 can be detected to ensure that the capillary 10 is aligned with the required compensation angle. For example, if the Capillary Position—Pak Rotate 9Q Degrees—the Capillary Position BowTI ™ face will properly align the lead in the ¥ direction of the joint. Here, depending on the direction of rotation of the capillary 10 (clockwise or counterclockwise), when the hair 丨 — (Please read the precautions on the back before filling this page) Order iir
548763 A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明（12 細管10到達正確對齊位置時，副指示器110或105會被偵檢 器162感應到。另者，也可完成主指示器100的補償角感測 〇 在另一例中，需要旋轉毛細管以使它能偏離X或Y軸 一既定角度量。例如，從起始點開始，所欲的補償角可能 是從X軸開始的順時針30度。在此情沉，偵檢器161偵檢 主指示器100所產生的偵檢信號會比偵檢器161與主指示器 100於最接近位置時弱。偵檢信號的相對強度可用來決定 毛細管是否已被正確地補償。換句話說，藉校正或其它適 用技術，信號強度可對應到某特定補償角。 按本發明之另一具體實例，提供一種使用一或多個指 示器以供毛細管10對齊的方法。要獲致正確的對齊，必須 建立毛細管的第一既定角對齊。毛細管結合第一指示器， 因此，第一指示器的角位置對應於毛細管的角對齊。第一 指示器的第一角位置角位置被偵檢，以決定毛細J的角對 齊。第一指示器的第一角位置與第一既定角對齊做比較， 以決定毛細管從第-既定角對齊開始的第—補償角。毛細 管朝正確方向旋轉第-猶角的量，以使毛細管根據第一 既定角對齊完成對齊。 2管旋轉後，第—指示器的第二角位置被餘以決 疋毛細管的角對齊。第-指示器的第二角位置與既 角=較，以決定出毛細管從第一既定角對齊開始的第 -補仏角。接著毛細管按照第二靖角旋轉。 依照本具體實例的特性，毛細管結合了第二指示器， -14· --------· — (請先閱讀背面之注意事項再填寫本頁)548763 A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the Invention (12 When the thin tube 10 reaches the correct alignment position, the sub-indicator 110 or 105 will be sensed by the detector 162. Alternatively, the main instruction can also be completed Compensation angle sensing of the sensor 100. In another example, it is necessary to rotate the capillary tube so that it can deviate from the X or Y axis by a predetermined angular amount. For example, from the starting point, the desired compensation angle may start from the X axis 30 degrees clockwise. In this case, the detection signal generated by the detector 161 detecting the main indicator 100 will be weaker than when the detector 161 and the main indicator 100 are closest to each other. The relative strength of the detection signal It can be used to determine whether the capillary has been correctly compensated. In other words, by correction or other applicable techniques, the signal strength can correspond to a specific compensation angle. According to another embodiment of the present invention, a method using one or more indicators Method for capillary 10 alignment. To achieve correct alignment, a first predetermined angular alignment of the capillary must be established. The capillary combines the first indicator, so the angular position of the first indicator corresponds to the hair The angular alignment of the tube. The first angular position of the first indicator is detected to determine the angular alignment of the capillary J. The first angular position of the first indicator is compared with the first predetermined angular alignment to determine the capillary from The first-compensated angle at which the first-predetermined angle is aligned. The capillary is rotated in the correct direction by the amount of the first corner, so that the capillary is aligned according to the first predetermined angle. After the tube is rotated, the second-angle position of the first indicator It is determined by the angle of the capillaries that the capillary is aligned. The second angular position of the first indicator is compared with the existing angle to determine the first complementary angle of the capillary starting from the first predetermined angle alignment. Then the capillary is according to the second angle Rotate. According to the characteristics of this specific example, the capillary incorporates a second indicator, -14 · -------- · — (Please read the precautions on the back before filling this page)
、1T ii. Μ氏張尺度相 ) A4^ ( 210xl^iy 548763 A7 B7 五、發明説明（13 ) 因此，第二指示器的角對齊對應於毛細管的角對齊。第二 指示器的第一角位置與第一既定角對齊比較，以決定毛細 管從第一既定角對齊開始的補償角。依照其它特徵，由第 一指示器的位置決定的補償角可與其它指示器的補償角做 比較，以檢査及建立正確的對齊。 本發明是利用數個有關的較佳具體實例說明。這些具 體實例僅是範例，且從這些具體實例可瞭解，都是使用一 般普通的技巧，這些具體實例可以很容易地修改，都不會 背離所附申請專利範園所定義的範圍與精神。例如，接線 或進行類似處理的毛細管可結合任何型式的指示器。同時 也必須留意的是，任何型式的毛細管面都適用於本發明， 這些包括任何圓形或非圓形的毛細管面。 (請先閲讀背面之注意事項再填寫本頁}1T ii. M-scale scale phase) A4 ^ (210xl ^ iy 548763 A7 B7 V. Description of the invention (13) Therefore, the angular alignment of the second indicator corresponds to the angular alignment of the capillary. The first angle of the second indicator The position is compared with the first predetermined angle alignment to determine the compensation angle of the capillary starting from the first predetermined angle alignment. According to other characteristics, the compensation angle determined by the position of the first indicator can be compared with the compensation angle of other indicators to Check and establish the correct alignment. The present invention is explained using several related specific examples. These specific examples are only examples, and it can be understood from these specific examples that they use common general techniques, which can be easily The modification will not deviate from the scope and spirit defined by the attached patent application park. For example, a capillary tube connected or similarly treated can be combined with any type of indicator. It must also be noted that any type of capillary surface has Applicable to the present invention, these include any circular or non-circular capillary surface. (Please read the precautions on the back before filling this page}
、1T, 1T
Lf 經濟部中央標準局員工消費合作社印繁 尺 張 紙 I本 標 婦 公 7 9 2Lf Central Government Bureau of the Ministry of Economic Affairs, Consumer Cooperatives, Printing and Printing, Rule Sheets, Paper I, Standards, Women, and Women 7 9 2
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US3407696P | 1996-12-19 | 1996-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW548763B true TW548763B (en) | 2003-08-21 |
Family
ID=21874153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW086119249A TW548763B (en) | 1996-12-19 | 1998-02-09 | Wire bonding capillary having alignment features |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPH10199919A (en) |
| KR (1) | KR19980064246A (en) |
| TW (1) | TW548763B (en) |
-
1997
- 1997-12-17 KR KR1019970069923A patent/KR19980064246A/en not_active Application Discontinuation
- 1997-12-19 JP JP9351715A patent/JPH10199919A/en active Pending
-
1998
- 1998-02-09 TW TW086119249A patent/TW548763B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10199919A (en) | 1998-07-31 |
| KR19980064246A (en) | 1998-10-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI373812B (en) | ||
| TW407451B (en) | Semiconductor parts and semiconductor mounting apparatus | |
| TW548763B (en) | Wire bonding capillary having alignment features | |
| US5934543A (en) | Wire bonding capillary having alignment features | |
| TW473883B (en) | Semiconductor device | |
| US6006977A (en) | Wire bonding capillary alignment display system | |
| US11346898B2 (en) | Magnetic sensor module and IC chip employed in same | |
| EP0777263A2 (en) | Method and apparatus for alignment and bonding | |
| TW394968B (en) | Steady autorotation of wire bonding capillary | |
| JP2002009105A (en) | Pattern regonition method and clamp therefor | |
| TW399273B (en) | Stepwise autorotation of wire bonding capillary | |
| KR100306639B1 (en) | Flip-chip bonding parts, flip-chip bonding confirmation parts and a flip-chip bonding method | |
| JPS61199623A (en) | Detection of wafer position and wafer | |
| JPH1012661A (en) | Semiconductor device and its manufacture | |
| WO2023133955A1 (en) | Wafer bonding alignment apparatus and wafer bonding alignment method | |
| CN215130363U (en) | Correction device for optical positioning space isocenter | |
| JPH01282831A (en) | Handling device for tabic | |
| JP3524377B2 (en) | Shape measuring device and shape measuring method | |
| TW458833B (en) | Ultrasonic wire bonder with a sensor for the control of the bond force | |
| JP3231126B2 (en) | Optical connector core position measuring device | |
| CN118795399A (en) | Probe card monitoring system and monitoring method thereof | |
| JPS6057226B2 (en) | How to align semiconductor elements | |
| JPS6350034A (en) | Prober device | |
| JP2517253Y2 (en) | Fiber optic gyro | |
| JP2003347347A (en) | Method and device for wire bonding |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MK4A | Expiration of patent term of an invention patent |