TW547451U - Automatic loading and opening apparatus for wafer carrier - Google Patents

Automatic loading and opening apparatus for wafer carrier

Info

Publication number
TW547451U
TW547451U TW90215935U TW90215935U TW547451U TW 547451 U TW547451 U TW 547451U TW 90215935 U TW90215935 U TW 90215935U TW 90215935 U TW90215935 U TW 90215935U TW 547451 U TW547451 U TW 547451U
Authority
TW
Taiwan
Prior art keywords
wafer carrier
automatic loading
opening apparatus
opening
loading
Prior art date
Application number
TW90215935U
Other languages
Chinese (zh)
Inventor
Guan-Jou Chen
Jin-Jung Jiang
Jr-Luen Shie
Jau-Shiang Wu
Original Assignee
Ind Tech Res Inst
Fortrend Taiwan Scient Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst, Fortrend Taiwan Scient Corp filed Critical Ind Tech Res Inst
Priority to TW90215935U priority Critical patent/TW547451U/en
Publication of TW547451U publication Critical patent/TW547451U/en

Links

TW90215935U 2001-09-14 2001-09-14 Automatic loading and opening apparatus for wafer carrier TW547451U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW90215935U TW547451U (en) 2001-09-14 2001-09-14 Automatic loading and opening apparatus for wafer carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW90215935U TW547451U (en) 2001-09-14 2001-09-14 Automatic loading and opening apparatus for wafer carrier

Publications (1)

Publication Number Publication Date
TW547451U true TW547451U (en) 2003-08-11

Family

ID=29729683

Family Applications (1)

Application Number Title Priority Date Filing Date
TW90215935U TW547451U (en) 2001-09-14 2001-09-14 Automatic loading and opening apparatus for wafer carrier

Country Status (1)

Country Link
TW (1) TW547451U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI630161B (en) * 2013-10-07 2018-07-21 日商東京威力科創股份有限公司 Substrate transfer chamber and container connection mechanism

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI630161B (en) * 2013-10-07 2018-07-21 日商東京威力科創股份有限公司 Substrate transfer chamber and container connection mechanism
US10229847B2 (en) 2013-10-07 2019-03-12 Tokyo Electron Limited Substrate transfer chamber and container connecting mechanism with lid opening mechanisms

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MM4K Annulment or lapse of a utility model due to non-payment of fees