TW546238B - Method and device for preventing bump on boat - Google Patents

Abstract

This invention substantially is a method to avoid damages of the wafers or facilities because of the hitting of the automatic boat carrier by mounting a sensor, such as a fine-vibration sensor, on the front of the automatic boat carrier. When the sensor touches a block, the sensor will send an anomalous message to the controller of the automatic boat carrier. Then the controller will stop the motion of the automatic boat carrier to avoid damages of the wafers or facilities. It is efficiently by said method to keep the carrier from hitting something, and protect the wafers and facilities.

Description

546238 V. Description of the invention (1) 5-1 Field of the invention: The present invention relates to a method for automatic storage, and more particularly to a method of using an obstacle detector in a semiconductor wafer manufacturing process to prevent wafers from being transported by the device. Method of collision caused by malfunction. 5-2 Background of the Invention: In the wafer transportation process of semiconductor manufacturing, wafers are usually contained in a cassette, such as a 25-chip cassette, and then transported together with the cassette. Since the wafer is a fragile and high-priced product, the wafer transportation technology must be very reliable, and the wafer can be effectively protected during operation, so that the wafer will not fall or be damaged during transportation. Powerful and broken. With the automation of the semiconductor process, the current wafer storage system has also been changed to an automatic storage system, and a programmable transport device is used to control the removal and placement of wafers at each location in the warehouse. When the task of transporting wafers is transferred to the cassette automatic transport device for execution with the automation of the process, it is very important that the cassette automatic transport device used must have the ability to confirm its action path and correct its own malfunction. In order to ensure the safety of wafer products during transportation, it can further prevent the machine from being damaged due to the malfunction of the automatic transportation device. However, in actual operation, it is often caused by human error or

¢ 46238 V. Description of the invention (2) Automatic operation is abnormal, for example, mechanical failure, noise, signal abnormality, etc. · The collision of the automatic transport device, which will cause wafer fragmentation or equipment damage (such as crystal box, automatic storage) Damage to the filter, even the automatic transport device itself). In the conventional art, the automatic conveying device itself is not very sensitive in judging a malfunction. When an automatic conveying device malfunctions, an abnormal overcurrent is usually generated in the driving part of the automatic device. The above-mentioned overcurrent will become higher and higher. When the overcurrent reaches a certain level, the operation of the automatic conveying device will be stopped abnormally. Usually, it is discovered that the operation of the automatic transportation device is abnormally stopped after the operation of the automatic transportation device is abnormally stopped. However, when the automatic conveying device described in the above 4 abnormally stopped the operation of the automatic conveying device due to an excessively high current in the driving part, the malfunction of the automatic conveying device had already caused the wafer fragmentation or damage to the equipment. . This is a serious problem for the entire wafer process. Therefore, with the automation of the semiconductor process and the increasing demand for the yield of wafer products, it is urgent to find a method to efficiently and safely transport wafer products. 5-3 Objectives and Summary of the Invention: In view of the above-mentioned background of the invention, the conventional technology has many disadvantages in the wafer transportation process. The main purpose of the present invention is to provide an effective detection method.

Page 6 546238 V. Description of the invention (3) The method of measuring the surrounding environment of the automatic conveying device during the transportation process, so that the wafer products will not malfunction due to the manual operation or automatic operation of the automatic conveying device during the transportation process Affected. Another object of the present invention is that the method of the present invention can effectively solve the problem that the wafer products are lost due to the malfunction of the automatic conveying device during the transportation process. Yet another object of the present invention is that the manufacturing process of the present invention can effectively solve the problem of loss of wafer processing equipment due to malfunction of the automatic transport device during wafer transport. Another object of the present invention is that the manufacturing process of the present invention can effectively solve the problem that the wafer storage equipment is lost due to the malfunction of the automatic transportation device during wafer transportation. According to the above-mentioned object, the present invention provides a method of using an obstacle detector, such as a micro-actuated tactile switch, to avoid misoperation of the automatic transport device during its operation. The above method uses an obstacle detector and an extension of the obstacle detector to be installed at the front end of an automatic conveying device to detect whether an obstacle appears in its operating environment when the automatic conveying device is in operation. in. In this way, when the extended part of the obstacle detector touches an obstacle, the obstacle detector will immediately send an abnormal signal to notify the control system of the automatic transport device.

546238 V. Description of the invention (4) It is required to abnormally stop the operation of the above-mentioned automatic transportation device, so as to effectively protect the wafer products, wafer processing, and automatic storage equipment. The end of the installation, the end of the delivery, the end of the delivery, the self-supporting one, the stop of the installation, the frequent delivery of the unusual operation, is implemented from Example 1, and the first is better than the first method. The branch is opened and extended to extend the sense of touch, and the switch of the switch is slightly opened. The end of the sensor is moved to the end of the load. The switch is set to send the switch and the switch is opened. The switch is automatically installed on the micro device, plus I #. The above-mentioned control on the mechanism described above will be described by Hui Ji 9¾ ΛΜν Open-arm sensation hand-triggering mechanism, and the time-varying schedule will be based on the physical obstacle to the obstacle number and the one that often touches the difference. The number described above is to send a message to send a request to be installed. If the sender moves and brakes, it will be controlled immediately. The normal arm can be erected by hand when it is stopped. The machine is described above. .¾ mouth; ^ mouth area control responsibility control device control Dama service through the device to alarm 1 to signal. As soon as the Lhr passes the obstacles, the companion will go along with the device farm to control the current process. The repairable dimension of the process can be explained on the field. Tian Tianming issued 4-5 Φ- detailed and ^ IJ. For example, Shi Zhuan was siege. The actual description of Li Ru as he specifically described it will be extensively exemplified in the following details. Shi Keding also limited some of the statements that were not acceptable, and the statements outside of Fan Fa. The detailed description of the detailed version of the NV item 1 is the body guide of the medium-range wafer produced by the wafer.

Page 8 546238 V. Description of Invention (5) Work. Whether it is on the wafer rack or the wafer from one of the manufacturing processes, the wafer is moved from an automatic process step to the reaction chamber of the storage, how to ensure the crystal box If the wafer can be used to break the set of obstacles, the above makes more mechanical tactile remarks. The set of machinery can mainly be the extension of the machine for the above-mentioned abnormal signals. The entire self-carrying is automatically detected by the automatic detection of the obstacles. The program control in the extended arm is used to expand the arm. The servo action after touching the robot's program control number immediately stops the arm's starting position. To the industry environment of another wafer (or wafer box) and its automatic transportation route. This device, for example, is a set of mechanical micro-judgments that compare with the surrounding environment and the sending device. The front end of the head is extended to a programmable device. On the above-mentioned micro-executive action, an obstacle occurs, the arm has a wrong controller. Then, the motor control was immediately issued and the above-mentioned stop of the manipulator's misoperation first, when a set of micro-motion tactile sensations was installed, the above-mentioned action, a set of micro-motion tactile sensations to automatically control the tactile switch The detection of the micro-movement, once sent to another automatic storage rack, the target position device is an invented dynamic-tactile travel path transport device switch to tactilely open the extended measuring range of the machine. In the process of storing and moving to the manufacturing process, it is set. Whether it can be completely judged is to use the switch to make the line condition set, such as the role of one or a group of micro-motion switches connected to the upper arm. In this way, the programmable controller mentioned above sends another signal to a group of devices, so that the servo arm moves and suffers from requiring its vertical motor control to avoid damage. The tactile switch of the tactile switch will immediately judge that an abnormal signal is supreme. Received the above-mentioned transmission. The above-mentioned machine stopped abnormally as soon as it received the above-mentioned wafer-free or machine because

546238 V. Description of the invention (6) A preferred embodiment of the present invention is an abnormal stop motion of a robotic arm, wherein the behavior of the above-mentioned robotic arm can be described by the flowchart shown in the first figure. First, as shown in step 110 of touching the obstacle, during the movement of the robotic arm, once the micro-tactile switch installed on the front end of the robotic arm touches the obstacle, the micro-tactile switch will be sent out immediately. An abnormal signal is sent to a programmable controller. For example, a micro-tactile switch sends a signal to the programmable controller. Step 1 2 0. Then, when the programmable controller receives the abnormal signal sent by the micro-actuated tactile switch, the programmable controller will then send a signal to the servo motor controller of the robot arm to request an abnormal stop of the movement of the robot arm. At the same time, the alarm device is notified to send out a warning signal to notify the maintenance engineer to go to the site for troubleshooting. For example, the programmable controller sends a signal to the servo motor controller in step 1 30. As shown in step 140 of stopping the robotic arm, after the servo motor controller receives the signal from the programmable controller, it stops the movement of the robotic arm immediately. In order to more specifically illustrate the possible application of the present invention, another preferred embodiment of the present invention is a device for abnormally stopping a malfunction of a robotic arm by using a micro-motion tactile switch in an automatic storage system. To explain. The second figure is a schematic diagram of a robot arm to which the present invention is applied. The robotic arm 1 5 0 can be a telescopic device 1 6 0 in the conventional art.

Page 10 546238 V. Description of the invention (7) An automatic conveying device that completes the movement of clamping the crystal box. The above-mentioned mechanical arm can be roughly divided into two parts, namely a fixed part connected to the above-mentioned telescopic device 160 and a carrying part for carrying a crystal box. A set of mechanical micro-actuated tactile switches 170 is installed at the front end of the load part of the above-mentioned robot arm 150. The above-mentioned micro-acting tactile switch is connected with a set of programmable controllers (not shown in the figure) which can control the movement of the robotic arm in a programmable manner through a wire, so that the above-mentioned micro-acting tactile switch can Pass the signal to the programmable controller. In addition, because the detection part of the micro-tactile switch 1 70 has only one point at its end, a set of micro-tactile switch 1 8 0 is further added above the micro-tactile switch 1 70. In order to expand the detection range of the micro-tactile tactile switch. If the extension part 180 of the above micro-tactile tactile switch touches an obstacle while the robot arm 150 is performing an action, the above-mentioned micro-tactile switch 170 will immediately send an abnormal signal to the programmable controller described above. (Not shown in the figure), used to inform the programmable controller that the above-mentioned robot arm is about to hit an obstacle. The programmable controller mentioned above is the same as the conventional technology, and its main purpose is to control the travel route and movement of the robotic arm with a set of preset programs. When the programmable controller receives an abnormal signal from the micro-tactile switch, the programmable controller will then send a signal to a set of servo motor controllers (not shown) (In this figure), to require it to stop the above-mentioned robot arm abnormally, and at the same time notify an alarm (also not shown in this figure), so that it sends out a warning signal to notify the maintenance engineer to the scene to troubleshoot exclude.

I

546238 V. Description of the invention (8) In order to make the above-mentioned micro-acting tactile switch 170 can transmit information in the fastest time, the above-mentioned mechanical micro-acting tactile switch 170 uses a full-time monitoring π B contact π Switch. The so-called B contact means that it is in the "on" (on) state all the time. Once the contact is touched, it will immediately send a switch to turn off the π (〇ff) signal. Furthermore, The extended part of the above micro-tactile tactile switch may be a metal material, and may be in a shape, as shown in the figure, with a fold angle and a slightly oblique upward direction. In order to more clearly illustrate the practical application of the present invention, in the above embodiments, The correlation of each part can be further described as the block diagram shown in the third figure. As shown in the figure, a group of micro-motion tactile switches 170 is installed at the front end of a group of robotic arms 150, and the micro-motion The tactile switch 1 70 is equipped with a set of extensions 180 at the front end. The above micro-actuated tactile switch 170 is connected to a set of programmable controllers 1 0 by wires. The above-mentioned programmable controllers 1 9 are respectively connected by wires Connected to a set of servo motor controllers 2 0 0 for driving the above-mentioned robotic arm 150 and a set of alarms 2 1 0 for notifying the maintenance engineer. The above-mentioned servo motor controller 2 0 0 is further connected by wires and The above robotic arm Connected to 150 °. During the movement of the robotic arm 150, once the above-mentioned extension of the micro-tactile switch 1 80 touches an obstacle 2 2 0, the above-mentioned micro-tactile switch 4 7 0 immediately sends a set of abnormal signals to the aforementioned programmable controller 1 0 0. After the programmable controller 1 90 receives the abnormal signals from the aforementioned micro-tactile switch 1 70, it immediately sends a set of signals to The above-mentioned servo motor controller of the robotic arm 200 is required to stop the robotic arm immediately 546238 V. Description of the invention (9) Controllable control program is available. The above 2 devices are reported to the police group 1 and no. One of the members of the communication team was using the arm of the weapon to repair the knowledge in the Zhengzhenghui while using the weapon. It was possible to stop the release of the obstacle book, and it would be the same for the time being. The condition of the teacher ’s work in the future is to repair the obstacles. When the obstacles are removed and the obstacles are cleared up, the same teacher or the parallel arm will work manually to enter the field. The mechanism of extending arms with arms extended Mingdong Microfabrication Group, the one that interacts with Shangkai to sense the synthesizing microfabrication from the beginning is that the arm-to-arm manipulator mechanism should be tested to determine whether the obstacle collision will be a normal operation. Immediately after the hb Λ is erroneous, the body is soft or weak, and the entire Taiwanese machine that responds to the object is over-produced and the product is shipped to Yuanyun Crystal. Ming Zuo started this often 'Yi Yisheng produced. And the limitation is to show the use of bh and dw, and the user does not know that it is better to send the original but the exception is not implemented. It is better; In this application, the application should include the repair or modification of the package. Surrounded by the end Fan Shenli Jing Jing ♦

Page 546238 The drawings briefly explain the above-mentioned objects and advantages of the present invention. The following embodiments and diagrams will be used to make detailed descriptions as follows. Among them: The first picture is an abnormal stop of automatic transportation according to the technology disclosed in the present invention. The flow chart of the operation of the device; the second figure is a schematic diagram of the automatic transport device formed according to the disclosed technology of the present invention; and the third figure is when the extension of the micro-tactile switch in the second figure touches an obstacle φ , A schematic diagram of message transmission. Symbols of the main parts: 110 steps to reach an obstacle 120 steps to send a signal to a programmable controller by a micro-motion tactile switch 130 steps to send a signal to a servo motor controller by a programmable controller 140 steps to stop a robot arm 150 robot arm 160 telescopic Device

1 7 0 Micro-tactile switch II 180 Extension of micro-tactile switch 190 Programmable controller 2 0 0 Servo motor controller 210 Alarm 546238

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Claims (1)

546238 6. Scope of patent application 1. A device for preventing the crystal box from colliding, the device includes at least: an automatic transport device, the automatic transport device is used to transport a crystal box and connected to a device for controlling the operation of the automatic transport device A controller; and a detector located at one end of the automatic transport device for moving the crystal box and connected to the controller of the automatic transport device, so that the detector can send a signal to the control Device. 2. For example, the device in the first patent application scope further includes an extension part connected to the detector to expand the detection range of one of the detectors. 3. For the device in the scope of the patent application, the extension is made of metal. 4. For the device of the scope of patent application, the above-mentioned detector is a micro-actuated tactile switch. 5. For the device in the scope of patent application, the micro-motion tactile opening relationship adopts the monitoring mode of B contact's full-time open (ON). 6. For the device in the scope of patent application, the detector will send an abnormal signal to the controller when it touches an obstacle. 7. For the device in the scope of patent application, the controller will abnormally stop the operation of the automatic transport device after the controller receives the abnormal signal. Page 16 546238 6. Scope of Patent Application 8. For the device of the scope of patent application, the controller includes at least a programmable controller, the programmable controller is connected to the detector, and a servo motor controller, the servo motor controller is separately connected To the programmable controller and the automatic transport device. 9. For the device in the scope of patent application, the above-mentioned controller further includes an alarm device, which is used to issue a warning signal to the abnormal signal of the detector. 1 0. A method for preventing the crystal box from colliding during the transportation of an automatic transport device, wherein the automatic transport device is used to move a crystal box, and a detector is installed on the automatic transport device to move the crystal box One end, and a controller for controlling the movement of the automatic transport device, the method at least includes when the detector touches an obstacle, the detector sends an abnormal signal to the controller; and when the controller receives After the abnormal signal, the operation of the automatic transport device is stopped. 11. The method according to item 10 of the patent application range, wherein the detector further includes an extension for expanding a detection range of the detector. Page 17 546238 6. Scope of patent application 1 2. The method of item 11 of the scope of patent application, wherein the above-mentioned extension is made of a metal material. 1 3. The method according to item 10 of the patent application range, wherein the above-mentioned detector is a micro-actuated tactile switch. 14. The method according to item 10 of the scope of patent application, wherein the micro-tactile tactile switch adopts the monitoring mode of B contact's full-time open (ON). 15. The method according to item 10 of the scope of patent application, wherein when the detector touches an obstacle, it sends an abnormal signal to the controller, so that the controller abnormally stops the operation of the automatic transport device. 16. The method according to item 10 of the scope of patent application, wherein the controller includes at least a programmable controller, the programmable controller is connected to the detector, and a servo motor controller, the servo motor controller Connected to the programmable controller and the automatic transport device respectively. 1 7. A method for preventing a crystal box from colliding, the method at least comprises: providing a mechanical arm for moving a crystal box, and a micro-tactile tactile switch installed on the mechanical arm for moving one end of the crystal box, And a controller for controlling the motion of the robot arm; transmitting an abnormal signal from the micro-tactile switch to the controller; and stopping the motion of the robot arm. Page 18 546238 VI. Application scope of patent 18. If the scope of patent application No. 17 includes an extended part to expand the micro 19. If the scope of patent application No. 17 applies B contact The full time open (ON) monitor 4 2 0. If the party applying for item 17 of the patent scope touches an obstacle, it will send a different controller to abnormally stop the movement of the robot arm, where the micro-acting haptic switch Detection range of the tactile switch. Method, in which the micro-motion tactile switch ^ way. Method, in which the micro-actuated tactile switch always sends a signal to the controller to make the operation 0