TW538223B - Washing and wetting apparatus - Google Patents

Abstract

A washing and wetting apparatus for an air conditional system to remove the chemical material from the air to be introduced into a dust-cleaned-room, polluted by a process in the dust-cleaned-room or introduced from outside, includes a case, a water-contained-material and a supplying water/draining water system. The cleaned air with an appropriate humidity is introduced into the dust-cleaned-room from the outlet of the case after the polluted air from the inlet of the case has passed through the water-contained-material in the case and the chemical material in the air has been absorbed.

Description

538223 V. Description of the invention (1) [Background of the invention] [Field of the invention] The present invention relates to air cleaning equipment, and in particular, it relates to a washing and humidifying device that can absorb dust chemicals in the air and maintain the humidity of the air. [Related technical descriptions] For semiconductor factories such as wafer production and process, and in some professional manufacturing plants or laboratories, environmental quality requirements such as air temperature, humidity, and purity are often very strict. Especially on the production line of the manufacturing site, some dust or chemical substances are inevitably continuously introduced or discharged, which deteriorates the air quality and affects the product quality. Some air-conditioning washing and humidifying equipment sold on the market now have high costs, limited effects, and large volumes. For example, the new patent No. 4 2 8 7 1 6 published in China, the content of which is used to wash and humidify the air is shown in Figure 4 below. There are a number of nozzles 4 2 in the air-conditioning box 4 1 The droplets of small particles are sprayed out, combined with the inhaled gas, and then contacted and intercepted by the W-shaped packaging carrier 4 3. However, such a structure requires a large number of nozzles 4 2 and a complicated water pipe 4 4 configuration, and a supporting material 4 3 to block water. Therefore, not only is the manufacturing cost very high, but the space occupied is also large (the water pipe 4 4 includes a nozzle 4 2 to the carrying material 4 3 in the air-conditioning box 4 1 (the distance is 1 2 0 0 mm to 1 6 0 0 mm); plus strong water pressure must be used to spray water out of the small hole in the nozzle 4 2 , It must have a large water pressure (pumps must have a head of 10 to 70 meters), so it consumes energy. In particular, the obtained water-washing effect is not very good (the liquid-gas mixture degree of the water-gas ratio is from 0.04 to 1.0). The conventional air-conditioning washing

ill

16926.ptd Page 5 538223 V. Description of the invention (2) In the i-device, water is wasted without water. So volume, save water and humidity equipment. The present invention provides a central method for controlling the contamination of polluted gases by controlling the contamination of gases caused by outside air. [Summary of the Invention] The purpose of the present invention is to save energy and equipment. In order to achieve the above air-conditioned water inlets and outlets, the wet material on the cross section of the parent material 'and the inlet of the box should enter the polluted substances and fresh air with humidity. The wet equipment according to the present invention includes: equipment for testing box quality and recycling of waste water. Therefore, the industry urgently needs a water washing which can reduce costs, reduce sources and energy sources, and has a good effect of washing and humidifying, which can completely solve the problem Process equipment and introduction of chemical pollution (Airborne Molecular AMC), and to solve the above problems, and design a set of water to the special hydrophilic material as the absorption chemical equipment system, and the central water supply tank for acid Water quality. In order to provide a washing and humidifying device capable of reducing costs, reducing volume, using water, and having a good washing and humidifying effect, according to an embodiment of the present invention, a washing and humidifying device includes: a box body having an air passage; The water-based humidifying material is located in the air passageway inside the box; and the water supply / drainage system, the water supplied to the hydrophilic body is discharged. Thereby, when the contaminated gas enters the cabinet and is absorbed by the hydrophilic humidifying material, it is sent out from the outlet of the cabinet clean and properly wet. Another embodiment is an air-conditioned water-washing additive. With air inlet and outlet; hydrophilic

16926.ptd Page 6 538223 V. Description of the invention (3) The humidifying material is located at the substantial cross-sectional position of the air passage in the box, which can clean and moisten the air passing through it; The hydrophilic humidifying material, and the water in the box is recovered and cleaned by a water purifier, and then returned for recycling. [Detailed description of the preferred embodiment] As shown in Fig. 1, it is a schematic diagram of an embodiment of the water washing and humidifying equipment of the present invention. This embodiment is used in an air-conditioning box. The cabinet 11 has an air inlet 1 1 1 and an air outlet 1 1 2, and a hydrophilic humidifying material 12 is disposed on a substantial cross section of the air channel in the cabinet 1 1. The air is as indicated by the arrow. Show direction flow. In this embodiment, the clean water is stored in the water storage tank 14 and pumped through the water supply pipe 13 through the pump 15 to the hydrophilic humidifying material 12 to make the humidifying material 12 moist. In this way, when the outside air flows into the cabinet 11 from the inlet Π 1 (in the direction indicated by the arrow) of the cabinet 11 and flows through the hydrophilic humidifying material 12, the hydrophilic humidifying material 12 can be Absorb the dust or chemicals contained in the air, and make the air have proper humidity. The clean air is then sent to the room from the outlet Π 2. In this embodiment, the waste water in the tank 11 is discharged from the drain pipe 16. Reference numeral 17 in Fig. 1 is a hot coil in a conventional air-conditioning box, and reference numeral 18 is a cold coil in an air-conditioning box. In this embodiment, the required space for the water supply pipe 13 and the hydrophilic humidifying material 12 in the cabinet 11 is less than 900 mm (less than the conventional 1 2 0 0 mm to 16 0 0 mm). Therefore the volume is small. In this embodiment, there is no need for a carrier material for the packaging body, no majority of nozzles, and no complicated water pipes, so the cost is greatly reduced. In this embodiment, since most nozzles are not used (that is, water does not need to be sprayed from the small holes), only a head of about 3 to 4 meters is used.

16926.ptd Page 7 538223

Bing, invention description (4) pump (10 to 70 meters smaller than the conventional one), and save energy. The unclean air entering in this embodiment is directly absorbed by the hydrophilic humidifying material, so that the liquid-to-water mixing ratio (L / G) is less than 0 · 〇3 (below the conventional 0 · 0 4 to oxygen 1 · 0) ', the effect of washing and humidifying is better. In this embodiment, it is not necessary to supply large denier water to the hydrophilic humidifying material, so water can be saved. Figure 2 of the star shows another embodiment of the water-washing and humidifying equipment of the present invention. It is not intended to 'recycle the enemies of the water-washing and humidifying equipment in the embodiment of FIG. 1' and purify water after deionization and reverse osmosis treatment. Blood was used after treatment. Moreover, since the water washing and humidifying equipment of the present invention only needs a low lift ^% _ water pump, if the same pump as the conventional pump is used, the drainage system can be connected and water can be supplied to several water washing pumps at the same time. Wet equipment. As shown in the second figure, the purified water stored in the water storage tank 丨 4 is pumped through the water supply pipe i 3 (pump 15 'is reserved) and sent to the hydrophilic wet material 1 2 'Moisten the humidifying material. When external air flows from the inlet of the cabinet into the phase body (in the direction shown by the arrow) and flows through the hydrophilic humidifying material 11, it can absorb the dust or chemicals f contained in the air, and , When it gets wet again. Then the clean moist air is sent from the outlet i 丨 2 to the appropriate simultaneous phase = phase, and the waste water in 11 will be returned to the water storage tank from the drainage pipe 2 丨. Second,:, osmosis treatment (not shown in the figure) and acid test • ^ ion exchange treatment by ion exchanger 22, the value is between == 7 to 8, and then the purified water is returned to the storage ^ Examination? I: Use the hydrophilic humidifying material 12. The control valve 25 in the figure is used to: the water supply level of the water tank 14, and the control valve 23 is used to control the circulating water supply. "Water-based humidifying material 1 2. The water-washing humidifying device of the present invention requires only low

Page 8 538223 V. Description of the invention (5) The circulating water pump of the head can supply water to the hydrophilic humidifying material, so if the same pump as the conventional one is used, it can be shown at the same time as shown in Figure 2. Water is supplied to several washing and humidifying devices, such as the hydrophilic humidifying materials 12 and 12 'in the figure. In this embodiment, since the used water is continuously used after being subjected to ion exchange treatment, a large amount of water can be saved, and a continuous supply of clean water can be easily maintained. The water-washing and humidifying device of the present invention can be used in an outdoor air-conditioning box system, and can also be used in a clean room in combination with a cooling coil system. As shown in Fig. 3A, it is a schematic diagram of the application of the water washing and humidifying equipment of the present invention in a clean room. In Fig. 3A, the number 31 indicates that the water-washing and humidifying equipment of the present invention is combined with a cooling coil system, and 32 is a clean room. After the dust or chemicals released in the clean room 3 2 such as the production line 3 3 flow through the hydrophilic humidifying material in the device 31 in the direction of the air flow indicated by the arrow, it can be removed. Dust or chemicals and keep the air at a proper humidity. In the figure, 3 and 4 are bypass control dampers, which can adjust the angle of the wind direction. The device 31 in FIG. 3A, as shown in FIG. 3B, is composed of the water washing and humidifying device 30 of the present invention, which combines a hot coil 17 and a cooling coil system 35, and is used in a clean room. . It can be seen from the above embodiments that the water-washing and humidifying equipment of the present invention successfully achieves the goals of reducing costs, reducing volume, saving energy, saving water, and having a good effect of water-washing and humidifying. Although the invention has been described by way of examples, it should be understood that these embodiments are for the purpose of illustration and are not intended to limit the invention. Without departing from the broad spirit and viewpoints defined in the scope of the patent application attached to the present invention, various

16926.ptd Page 9 538223 V. Modification or modification of the description of the invention (6) shall all belong to the scope of the present invention. _

16926.ptd Page 10 538223 Brief description of the drawings [Simplified description of the drawings] From the following detailed description, in conjunction with the drawings? The purpose and advantages of the present invention will become clearer. 'Same reference numbers in each figure It shows the corresponding part, where: FIG. 1 is a schematic diagram of the configuration of the embodiment of the water-washing and humidifying equipment of the present invention, and FIG. 2 is a schematic diagram of the overall system configuration of another embodiment of the water-washing and humidifying equipment of the present invention. Figure 3A is a schematic diagram of the application of the water-washing humidification equipment in the clean room of the present invention 1 Figure 3B is a schematic diagram of the configuration of the water-washing humidification equipment used in the clean room in Figure 3A 1 Figure 4 is the conventional air Schematic diagram of adjusting the structure of the adiabatic washing and humidifying equipment. [Illustration of drawing number: 1 11 cabinet 111 inlet 112 outlet 12, 12, hydrophilic humidifying material 13 water supply pipe 14, 14 'water storage tank 15 > 15' pump 16 drain pipe 17 hot coil 18 cold coil 22 ion exchange 23 ^ 25 Control valve 24 pH value detector 30 Washing and humidifying equipment 31 Combined washing and humidifying equipment • Device with cooling coil system 32 Clean room 33 Production line

16926.ptd Page 11 538223

16926.ptd Page 12

Claims (1)

538223 6. Scope of patent application 1. An air-conditioning washing and humidifying device, comprising: a cabinet with an inlet and an outlet of an air channel; a hydrophilic humidifying material located at a substantially cross-sectional position of the air channel in the cabinet; And a water supply / drainage system that supplies water to the hydrophilic humidifying material and discharges water from the cabinet; thereby, when unclean gas enters the cabinet from the inlet, the hydrophilic humidifying material absorbs pollutants and wets Then, clean and humid air is sent from the outlet of the box. 2. The water washing and humidifying equipment according to item 1 of the patent application scope, wherein the water supply / drainage system includes: a water storage device for storing water; a water supply pipe connected to the water storage device and supplying water to the hydrophilic humidifying material A drain pipe connected to the box to discharge the water in the box. 3. For the water-washing and humidifying equipment in the second item of the patent application, wherein the water supply / drainage system is still provided with a pump, the water in the water supply pipe can be supplied to the hydrophilic humidifying material. 4. For water-washing and humidifying equipment according to item 2 or 3 of the scope of patent application, the water discharged from the drain pipe is returned to the water storage device for recycling. 5. For water-washing and humidifying equipment in the scope of patent application No. 2 or 3, in which the water supply / drainage system is still provided with a water purification device, the water in the water storage device is first cleaned and treated by the water purification device before the The water supply pipe supplies water to the hydrophilic humidifying material. 16926.ptd Page 13 538223 6. Application for patent scope 6: If the water purifying and humidifying equipment of item 5 of the patent scope is applied, the water purification device can detect and control the pH value of water in the water storage device . 7. The water washing and humidifying device according to item 5 of the scope of the patent application, wherein the water purification device filters water in the water storage device. 8. The water-washing and humidifying equipment according to item 5 of the patent application scope, wherein the water purification device is an ion exchanger. Participate 16926.ptd Page 14